An ultrasonic cleaning test all-in-one machine and a test method

Abstract

The application relates to the technical field of ultrasonic cleaning test, and particularly relates to an ultrasonic cleaning test all-in-one machine and a test method, which comprises a machine table, a cleaning head, a translation assembly and an image processing device. The cleaning head is used for cleaning a sample, is installed on the machine table and is height-adjustable. The translation assembly is used for fixing the sample, is installed on the machine table and moves horizontally along an X direction, and the moving speed is adjustable. The image processing device is installed on the machine table. The image processing device is used for acquiring images before and after the sample is cleaned, performing micro-dust quantity analysis on the images, calculating a cleaning rate and solving the technical problem that the cleaning rate of an ultrasonic cleaning machine in the prior art cannot be measured in real time.

Description

Technical Field

[0001] This invention relates to the field of ultrasonic cleaning testing technology, and specifically to an integrated ultrasonic cleaning testing machine and testing method. Background Technology

[0002] Dry ultrasonic cleaning technology is a new type of dry cleaning technology that is widely used in industries such as panel manufacturing, film materials, and PCB / FPC. The cleaning rate, as a core parameter of dry ultrasonic cleaning equipment, is of great concern to users. In existing technologies, the cleaning rate of ultrasonic cleaning equipment is tested after the equipment is installed on the production line. The cleaning rate can only be judged by the yield of products in subsequent processes. Since the cleaning rate of ultrasonic cleaning machines is affected by a variety of factors under various operating conditions, the cleaning rate of the cleaning equipment cannot be measured in real time to ensure the cleaning quality of the products, resulting in a large number of defective products. Summary of the Invention

[0003] This invention addresses the shortcomings of existing technologies by providing an integrated ultrasonic cleaning and testing machine and method, thereby solving the technical problem that existing ultrasonic cleaning machines cannot measure the cleaning rate in real time.

[0004] The technical solution of the present invention to solve the above-mentioned technical problems is as follows: an integrated ultrasonic cleaning and testing machine and testing method, including a machine base, a cleaning head, a translation component and an image processing device. The cleaning head is used to clean the sample, is mounted on the machine base and has an adjustable height; the translation component is used to fix the sample, is horizontally moved along the X direction and is mounted on the machine base with an adjustable moving speed; the image processing device is mounted on the machine base, and the image processing device is used to acquire images of the sample before and after cleaning and to perform micro-dust quantity analysis on the images to calculate the cleaning rate.

[0005] The beneficial effects of this invention are: by setting up a height-adjustable cleaning head, translation component and image processing equipment, it is possible to perform ultrasonic cleaning on the workpiece while testing the ultrasonic cleaning rate of the workpiece under different working conditions, thereby obtaining the cleaning rate under different cleaning conditions, providing convenient conditions for equipment selection, and at the same time, the cleaning rate of the ultrasonic cleaner is measured in real time to ensure the cleaning quality of the ultrasonic cleaner.

[0006] Based on the above technical solution, the present invention can be further improved as follows.

[0007] Furthermore, the cleaning head includes a pressure chamber and a vacuum chamber. The pressure chamber is connected to the air inlet of the ultrasonic generator, the air outlet of the ultrasonic generator is connected to the air outlet of the cleaning head, and the air return port of the cleaning head is connected to the vacuum chamber. The air outlet and air return port of the cleaning head are located on the same surface of the cleaning head.

[0008] The beneficial effect of adopting the above-mentioned further solution is that by setting up a pressure chamber and a vacuum chamber, the ultrasonic waves are delivered under pressure, and the negative pressure generated by the vacuum chamber is used to adsorb the washed-off micro-dust, thereby improving the cleaning efficiency.

[0009] Furthermore, the translation component includes a translation force unit fixedly installed on the machine base and an adsorption platform slidably installed on the machine base driven by the translation force unit. The adsorption holes on the adsorption platform are connected to the negative pressure generating device, and the adsorption platform is provided with a plurality of clearance slots penetrating the adsorption platform.

[0010] The advantages of adopting the above-mentioned further solutions are that by setting up an adsorption platform, it is convenient to quickly adsorb, fix and disassemble the sample, thereby improving the cleaning efficiency. By setting up avoidance slots, when taking pictures of the workpiece, the image taken by the adsorption platform can be avoided due to the transparency of the workpiece, thus ensuring the accuracy of the collected data.

[0011] Furthermore, the image processing device is horizontally slidably mounted on the machine base and its running direction is perpendicular to the running direction of the translation component. The image processing device includes a camera that is mounted on the machine base and moves along the Y direction, and a camera power unit that drives the camera to reciprocate. The camera power unit is mounted on the machine base, and the camera's position is adjusted in the Z-axis direction through a Z-axis fine-tuning mechanism.

[0012] The beneficial effect of adopting the above-mentioned further solution is that by setting the camera to move along the Y direction and be adjustable along the Z axis, combined with the sample that can move in the X direction, the camera can take pictures at any point on the XY horizontal plane, and the repeatability of positioning is high and the error of picture calculation is small.

[0013] Furthermore, it also includes a fan filter section and an electrostatic eliminator section. The fan filter section connects the internal space of the machine cover with the external space. Both the fan filter section and the electrostatic eliminator section are installed on the inner side of the top of the machine cover.

[0014] The beneficial effect of adopting the above-mentioned further solution is that, by setting up a fan filter section and an electrostatic eliminator section, the cleaning rate can be measured under the condition of having and not having a fan filter section and an electrostatic eliminator section.

[0015] Furthermore, the cleaning head is mounted on the machine base via a cleaning head mounting plate, and the mounting hole of the cleaning head mounting plate is an elongated hole with its axis in the vertical direction.

[0016] The advantage of adopting the above-mentioned further solution is that by setting the elongated hole on the cleaning head mounting plate, it is convenient to adjust the cleaning head vertically, thereby realizing the adjustment of the distance between the cleaning head and the sample.

[0017] Furthermore, the Z-axis fine-tuning mechanism includes an adjusting screw, a camera bracket, and a camera mounting plate. The camera mounting plate is slidably mounted on the machine base via the camera power unit. The adjusting screw passes through the upper horizontal plate of the camera mounting plate and its bottom passes through and is threaded onto the lifting plate. The adjusting screw is threaded onto a nut located above the upper horizontal plate. The lifting plate is slidably mounted on the connecting rod between the upper and lower horizontal plates of the camera mounting plate via a sliding bearing. The camera is fixedly mounted on the lifting plate.

[0018] The beneficial effect of adopting the above-mentioned further solution is that by setting a Z-axis fine-tuning mechanism, the Z-axis direction of the camera can be adjusted, thereby achieving the purpose of adjusting the focal length of the camera when taking pictures of the cleaned sample.

[0019] A testing method for ultrasonic cleaning and testing integrated machine includes: S1: marking test points on the sample to be cleaned, with the test points located directly above the clearance slot; S2: taking pictures of the test points of the sample in three states: after being cleaned with alcohol, after being contaminated with powder, and after being ultrasonically cleaned; S3: analyzing and recording the number of microparticles in the acquired images; S4: calculating the cleaning rate L=1-(AC-BG) / (PT-BG)= (PT-AC) / (PT-BG), where AC is the number of microparticles in the sample after ultrasonic cleaning, BG is the number of microparticles in the sample after being cleaned with alcohol, and PT is the number of microparticles in the sample after being contaminated with powder.

[0020] In step S2, when performing ultrasonic cleaning, the height of the cleaning head, the running speed of the adsorption platform, the opening and closing of the fan filter section, the opening and closing of the static elimination section, and the positive and negative pressure values ​​inside the cleaning head are set respectively, so as to obtain the cleaning rate under different working conditions.

[0021] By adopting the above testing method, the cleaning rate of workpieces cleaned by ultrasonic cleaning machines under different working conditions can be tested, and the cleaning rate data of different workpieces under different working conditions can be obtained, thereby determining the optimal cleaning speed and cleaning height. Attached Figure Description

[0022] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0023] Figure 2 This is a schematic diagram of the internal structure of the cleaning head;

[0024] Figure 3 This is a schematic diagram of the translation component.

[0025] Figure 4 This is a schematic diagram of the structure of an image processing device;

[0026] Figure 5This is a schematic diagram of the three-dimensional structure of the shroud;

[0027] Figure 6 Schematic diagram of the pressure supply principle for the cleaning head;

[0028] Figure 7 Example of marking test points on a workpiece;

[0029] Figure 8 Images captured by the camera before and after ultrasonic cleaning;

[0030] Figure 9 To Figure 8 A schematic diagram of micro-dust quantity analysis using mid-images;

[0031] Figure 10 The effect of the distance between the cleaning head and the workpiece on the cleaning rate;

[0032] Figure 11 The effect of the adsorption platform's moving speed on the cleaning rate;

[0033] Figure 12 The effect of positive pressure on the cleaning head on the cleaning rate;

[0034] Figure 13 The effect of negative pressure on the cleaning head on the cleaning rate.

[0035] In the diagram: 1. Machine base, 2. Machine cover, 3. Cleaning head, 4. Pressure chamber, 5. Vacuum chamber, 6. Ultrasonic generator, 7. Translational power unit, 8. Adsorption platform, 9. Adsorption hole, 10. Camera, 11. Camera power unit, 12. Z-axis fine adjustment mechanism, 13. Fan filter unit, 14. Static electricity elimination unit, 15. Cleaning head mounting plate, 16. Adjusting screw, 17. Camera bracket, 18. Camera mounting plate, 19. Lifting plate, 20. Fan cabinet, 21. Upper horizontal plate, 22. Lower horizontal plate, 23. Connecting rod, 24. Vertical beam, 25. Horizontal beam, 26. Clearance slot. Detailed Implementation

[0036] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0037] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0038] See appendix Figure 1 and attached Figure 2 An integrated ultrasonic cleaning and testing machine includes a machine base 1, a cleaning head 3, a translation component, and an image processing device. A machine cover 2 is mounted on the machine base 1. The cleaning head 3 is used to clean samples mounted on an adsorption platform 8 of the translation component. The cleaning head 3 is mounted on the machine base 1 and its height is adjustable. Specifically, the cleaning head 3 is mounted on a crossbeam 25 between two vertical beams 24 of the machine cover 2 above the machine base 1 via a cleaning head mounting plate 15. The mounting holes on the cleaning head mounting plate 15 are elongated holes with a vertical axis. This facilitates vertical adjustment of the cleaning head 3, thereby adjusting the distance between the cleaning head 3 and the sample. The cleaning head 3 internally includes a pressure chamber 4 and a vacuum chamber 5. The pressure chamber 4 is located in the middle, and the vacuum chambers 5 are located on either side of the pressure chamber 4. The pressure chamber 4 is connected to the air inlet of the ultrasonic generator 6, and the air outlet of the ultrasonic generator 6 is connected to the air outlet of the cleaning head 3. The return air outlet of the cleaning head 3 is connected to the vacuum chamber 5. The air outlet and return air outlet of the cleaning head 3 are located on the same plane, which is parallel to the adsorption platform 8. (See attached diagram.) Figure 6 The pressure chamber 4 and the vacuum chamber 5 are connected to the air inlet and air outlet of the fan cabinet 20 through pipelines, respectively. By setting up the pressure chamber 4 and the vacuum chamber 5, the ultrasonic waves are transmitted under pressure, and the negative pressure generated by the vacuum chamber 5 is used to adsorb the washed-off micro dust, thereby improving the cleaning efficiency.

[0039] See appendix Figure 3The translation component is used to fix the sample. It is horizontally mounted on the machine base 1 along the X-axis and its movement speed is adjustable. The translation component includes a translation force unit 7 fixedly mounted on the machine base 1 and an adsorption platform 8 driven by the translation force unit 7 to slide along the X-axis on the machine base 1. The adsorption holes 9 on the adsorption platform 8 are connected to a negative pressure generating device. The adsorption platform 8 is provided with a plurality of clearance slots 26 that penetrate the adsorption platform. For transparent workpieces, when the camera 10 takes pictures, it will take pictures of the adsorption platform 8 under the workpiece through the workpiece, causing the camera 10 to capture the micro-dust and adsorption on the surface of the workpiece. The microscopic features on platform 8 are fused within the camera's focal length, making it impossible to effectively identify micro-dust. By setting the avoidance slot 26, the image captured when photographing the workpiece can be avoided from being affected by the adsorption platform due to the workpiece's transparency, thus ensuring the accuracy of the collected data. The adsorption platform 8 facilitates the rapid adsorption, fixation, and disassembly of samples, improving cleaning efficiency. The translational motion unit 7 uses a servo motor. The bottom of the adsorption platform 8 reciprocates between itself and the machine base 1 via a linear guide module. The pipeline between the adsorption platform 8 and the negative pressure generating device is protected by a drag chain.

[0040] In this application, the movement of the cleaning head 3 and the camera 10 can be achieved not only by using a linear guide module, but also by using a servo motor to drive a synchronous wheel, a gear rack, a ball screw, or by direct linear motor drive.

[0041] See appendix Figure 4The image processing equipment is used to acquire images of the sample before and after cleaning and to perform micro-dust quantity analysis on the images to calculate the cleaning rate. The image processing equipment is slidably mounted on a crossbeam 25 between two vertical beams 24 of the machine cover 2 above the machine platform 1. Specifically, the running direction of the image processing equipment is perpendicular to the running direction of the translation component. The image processing equipment includes a camera 10 that is mounted on the machine platform 1 along the Y direction and a camera power unit 11 that drives the camera 10 to reciprocate. The camera 10 is adjusted in the Z-axis direction by a Z-axis fine-tuning mechanism 12. Specifically, the Z-axis fine-tuning mechanism 12 includes an adjusting screw 16, a camera bracket 17, and a camera mounting plate 18. The camera power unit 11 uses a servo motor, which slides the camera mounting plate onto the camera bracket 17 via a linear guide module. The camera bracket 17 is mounted on a crossbeam 25 between two vertical beams 24 of the machine cover 2 above the machine platform 1. The camera 10 is mounted on the camera... The camera 10 is mounted on the mounting plate 18 and its position is adjustable. By setting the camera to move along the Y direction and adjust along the Z axis, combined with the sample mounted on the adsorption platform 8 that can move along the X direction, the camera 10 can take pictures at any point on the XY horizontal plane, and the repeatability of the positioning accuracy can reach ±0.01mm, reducing the error in the calculation of the cleaning rate to below 0.5%. The adjusting screw 16 passes through the upper horizontal plate 21 of the camera mounting plate 18 and its bottom passes through and is threadedly installed with the lifting plate 19. A nut is threaded on the adjusting screw 16, which is located above the upper horizontal plate 21. The lifting plate 19 is slidably mounted on the connecting rod 23 between the upper horizontal plate 21 and the lower horizontal plate 22 of the camera mounting plate 18 through a sliding bearing. The camera 10 is fixedly mounted on the lifting plate 19. By setting the Z-axis fine adjustment mechanism 12, the Z-axis direction of the camera 10 can be adjusted, thereby adjusting the focal length of the camera 10 when taking pictures of the cleaned sample.

[0042] See appendix Figure 1 It also includes a fan filter section 13 and an electrostatic eliminator section 14. The fan filter section 13 connects the internal space and the external space of the housing 2. Both the fan filter section 13 and the electrostatic eliminator section 14 are installed on the inner side of the top of the housing 2. The electrostatic eliminator section 14 can be an ion bar or an X-ray electrostatic eliminator. By setting the fan filter section 13 and the electrostatic eliminator section 14, the cleaning rate can be measured under the condition of having and not having the fan filter section 13 and the electrostatic eliminator section 14.

[0043] A testing method for ultrasonic cleaning and testing integrated machine includes: S1: Marking test points on the sample to be cleaned, wherein the number of test points is related to the size of the workpiece. Specifically, a test point is set every 200mm on the workpiece, and the position of the test point is selected directly above the clearance slot 26, so that the adsorption platform 8 will not be captured by the camera 10; S2: Using the camera 10 to take pictures of the test points of the sample in three states: after being cleaned with alcohol, after being contaminated with powder, and after ultrasonic cleaning. During ultrasonic cleaning, the height of the cleaning head 3, the running speed of the adsorption platform 8, the opening and closing of the fan filter section 13, the opening and closing of the static elimination section 14, and the positive and negative pressure values ​​inside the cleaning head 3 are set respectively to obtain the cleaning rate under different working conditions. The camera is a German Jena GRYPHAX 3.0, and the accompanying image acquisition and processing software can cooperate with the camera to complete the micro-dust quantity statistics of the captured images; S3: Analyzing and recording the micro-dust quantity of the captured images; S4: Calculating the cleaning rate L=1-(AC-BG) / (PT-BG)= (PT-AC) / (PT-BG), where AC is the number of micro-dust particles after ultrasonic cleaning, BG is the number of micro-dust particles after alcohol cleaning, and PT is the number of micro-dust particles after dust contamination. By setting up a height-adjustable cleaning head 3, a translation component, and an image processing device, the cleaning rate can be tested in real time while ultrasonically cleaning workpieces under different working conditions. This allows for obtaining the cleaning rate under different cleaning conditions, providing convenient conditions for equipment selection and ensuring the cleaning quality of the ultrasonic cleaning machine.

[0044] The distance between the cleaning head 3 and the workpiece was set to L (mm), the cleaning scanning speed to V (mm / s), the positive pressure of the cleaning head 3 to K (kPa), the negative pressure of the cleaning head 3 to P (kPa), the workpiece dimensions to be 600mm long and 500mm wide, and 9 test points. The cleaning rate under the above working conditions was measured using the above method, and the following data were obtained:

[0045] Experimental Example 1: When the cleaning scanning speed is V = 50-200 mm / s, the positive pressure of the cleaning head K = 22-24 kPa, and the negative pressure of the cleaning head P = (-0.3) ~ (-0.4) kPa, the relationship between the cleaning rate of the cleaning machine and the distance between the cleaning head 3 and the workpiece, as measured by the above measurement method, is shown in the following table. (See also...) Figure 10 :

[0046]

[0047] Experimental Example 2: When the distance between the cleaning head 3 and the workpiece is L=3mm, the positive pressure of the cleaning head K=22-24Kpa, and the negative pressure of the cleaning head P=(-0.3)~(-0.4)Kpa, the relationship between the cleaning rate of the cleaning machine and the cleaning scanning speed, measured by the above measurement method, is shown in the following table. (See also...) Figure 11 :

[0048]

[0049] Experimental Example 3: When the distance between the cleaning head 3 and the workpiece is L=3mm, the cleaning scanning speed is V=50-200mm / s, and the negative pressure of the cleaning head is P=(-0.3)~(-0.4)Kpa, the relationship between the cleaning rate of the cleaning machine and the positive pressure of the cleaning head, measured by the above method, is shown in the following table. (See also...) Figure 12 :

[0050]

[0051] Experimental Example 4: When the distance between the cleaning head 3 and the workpiece is L=3mm, the cleaning scanning speed is V=50-200mm / s, and the positive pressure of the cleaning head is K=22-24Kpa, the cleaning rate of the cleaning machine as a function of the negative pressure of the cleaning head, measured using the above method, is shown in the following table. (See also...) Figure 13 :

[0052]

[0053] Experimental Example 5: When the distance between the cleaning head 3 and the workpiece is L=3mm, the cleaning scanning speed is V=50-200mm / s, the positive pressure of the cleaning head is K=22-24Kpa, and the negative pressure of the cleaning head is P=(-0.3)~(-0.4)Kpa, the relationship between the cleaning rate of the cleaning machine and the switching of the fan filter section, measured by the above measurement method, is shown in the following table:

[0054]

[0055] Experimental Example 6: When the distance between the cleaning head 3 and the workpiece is L=3mm, the cleaning scanning speed is V=50-200mm / s, the positive pressure of the cleaning head is K=22-24Kpa, and the negative pressure of the cleaning head is P=(-0.3)~(-0.4)Kpa, the relationship between the cleaning rate of the cleaning machine and the electrostatic dust removal unit switch, measured by the above measurement method, is shown in the following table:

[0056]

[0057] The experimental data above shows that the cleaning rate is highest when the distance between the cleaning head 3 and the workpiece is L=3mm, the cleaning scanning speed is V=50-200mm / s, the positive pressure of the cleaning head is K=22-24Kpa, and the negative pressure of the cleaning head is P=(-0.3)~(-0.4)Kpa, and both the fan filter section and the electrostatic dust removal section are open.

[0058] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A testing method for an integrated ultrasonic cleaning and testing machine, characterized in that: The ultrasonic cleaning and testing integrated machine includes a machine base (1). Cleaning head (3), which is used to clean the sample, is mounted on the machine base (1) and is height adjustable; Translation component, which is used to fix the sample, is horizontally moved along the X direction and mounted on the machine base (1) with adjustable moving speed; the translation component includes a translation force part (7) fixedly mounted on the machine base (1) and an adsorption platform (8) driven by the translation force part (7) and slidably mounted on the machine base (1). An image processing device is installed on a machine base (1). The image processing device is used to acquire images of the sample before and after cleaning and to perform micro-dust quantity analysis on the images to calculate the cleaning rate. It also includes a fan filter section (13) and a static electricity elimination section (14). The fan filter section (13) connects the internal space and the external space of the machine cover (2). The fan filter section (13) and the static electricity elimination section (14) are both installed on the inner side of the top of the machine cover (2). The testing methods of this ultrasonic cleaning testing machine include: S1: Mark test points on the sample to be cleaned; S2: Use a camera to take pictures of the test points of the sample in three states: after being cleaned with alcohol, after being contaminated with powder, and after being cleaned with ultrasonic waves. S3: Analyze and record the number of micro-dust particles in the images captured by the photograph; S4: Calculate the cleaning rate L=1-(AC-BG) / (PT-BG)= (PT-AC) / (PT-BG), where AC is the number of micro-dust particles after ultrasonic cleaning of the sample, BG is the number of micro-dust particles after alcohol cleaning of the sample, and PT is the number of micro-dust particles after the sample is contaminated with dust. In step S2, when performing ultrasonic cleaning, the height of the cleaning head (3), the running speed of the adsorption platform (8), the opening and closing of the fan filter section (13), the opening and closing of the static elimination section (14), and the positive and negative pressure values ​​inside the cleaning head (3) are set respectively, so as to obtain the cleaning rate under different working conditions.

2. The testing method of the ultrasonic cleaning and testing integrated machine according to claim 1, characterized in that: The cleaning head (3) includes a pressure chamber (4) and a vacuum chamber (5). The pressure chamber (4) is connected to the air inlet of the ultrasonic generator (6). The air outlet of the ultrasonic generator (6) is connected to the air outlet of the cleaning head (3). The return air outlet of the cleaning head (3) is connected to the vacuum chamber (5). The air outlet and return air outlet of the cleaning head (3) are located on the same surface of the cleaning head (3).

3. The testing method of the ultrasonic cleaning and testing integrated machine according to claim 2, characterized in that: The adsorption holes (9) on the adsorption platform (8) are connected to the negative pressure generating device, and a number of clearance slots (26) penetrating the adsorption platform (8) are provided on the adsorption platform (8).

4. The testing method of the ultrasonic cleaning and testing integrated machine according to claim 3, characterized in that: The image processing device is horizontally slidably mounted on the machine base (1) and its running direction is perpendicular to the running direction of the translation component. The image processing device includes a camera (10) that is mounted on the machine base (1) along the Y direction and a camera power unit (11) that drives the camera (10) to reciprocate. The camera power unit (11) is mounted on the machine base (1), and the camera (10) is adjusted in the Z-axis direction by the Z-axis fine adjustment mechanism (12).

5. The testing method of an integrated ultrasonic cleaning and testing machine according to claim 4, characterized in that: The cleaning head (3) is mounted on the machine base (1) via a cleaning head mounting plate (15), and the mounting hole of the cleaning head mounting plate (15) is an elongated hole with the axis in the vertical direction.

6. The testing method of an integrated ultrasonic cleaning and testing machine according to claim 5, characterized in that: The Z-axis fine-tuning mechanism (12) includes an adjusting screw (16), a camera bracket (17), and a camera mounting plate (18). The camera mounting plate (18) is slidably mounted on the machine base (1) via the camera power unit (11). The adjusting screw (16) passes through the upper horizontal plate (21) of the camera mounting plate (18) and its bottom passes through and is threaded onto the lifting plate (19). The adjusting screw (16) is threaded onto a nut, which is located above the upper horizontal plate (21). The lifting plate (19) is slidably mounted on the connecting rod (23) between the upper horizontal plate (21) and the lower horizontal plate (22) of the camera mounting plate (18) via a sliding bearing. The camera (10) is fixedly mounted on the lifting plate (19).

7. The testing method of an integrated ultrasonic cleaning and testing machine according to claim 6, characterized in that: The number of test points is determined according to the size of the cleaning head (3).

Images