Liquid ejection head

Abstract

A liquid ejection head in which wiring formation becomes easy is provided. The liquid ejection head involved in the embodiment includes a substrate, an actuator, and an electrode portion. The substrate has a wiring surface. The actuator includes a side portion, and the side portion is provided on the wiring surface of the substrate and has an inclination angle greater than 45° and less than 90° relative to the wiring surface. The electrode portion includes a first wiring portion formed on the side portion, and a second wiring portion connected to the first wiring portion and formed on the wiring surface. The second wiring portion in the wiring surface is located on an extension line of the first wiring portion in a reflected light area in an area where the side portion or the first wiring portion is formed, and the distance from the end of the actuator is less than a when the height from the wiring surface is b, the inclination angle between the side portion and the wiring surface is θ, θ′=(θ‑45)×2, and a=b / tanθ′.

Description

Technical Field

[0001] An embodiment of the present invention relates to a liquid ejection head. Background Art

[0002] In recent years, high productivity has been required in liquid ejection devices such as inkjet heads, and high speed and increased droplet volume are essential. On the other hand, miniaturization of the head size is desired, and achieving a balance between high productivity and miniaturization has become a challenge.

[0003] The following structure is known in liquid ejection heads: a plurality of partition walls are provided at predetermined intervals on a substrate formed of ceramic, a piezoelectric ceramic actuator is provided to use the space between the partition walls as a flow path for ink, and the end faces of the partition walls are provided as inclined surfaces extending outward from the top to the bottom thereof.

[0004] In this type of liquid ejection head, the shallower the slope of the actuator's inclined surface, the larger the substrate's short-side dimension. Therefore, by increasing the angle of the inclined surface, thereby raising the inclined surface, the short-side dimension can be reduced. However, if the angle between the substrate's wiring surface and the actuator's inclined surface is large, for example, greater than 45°, when forming an electrode pattern on the inclined surface or wiring surface by photolithography, light reflected from the inclined surface will illuminate the electrode pattern formed on the substrate near the inclined surface, making wiring formation difficult due to exposed wiring lines. Summary of the Invention

[0005] The problem to be solved by the present invention is to provide a liquid ejection head in which wiring formation is easy.

[0006] The liquid ejection head of the embodiment includes a substrate, an actuator, and an electrode portion. The substrate has a wiring surface. The actuator includes a side portion, and the side portion is provided on the wiring surface of the substrate and has an inclination angle greater than 45° and less than 90° relative to the wiring surface. The electrode portion includes a first wiring portion formed on the side portion, and a second wiring portion connected to the first wiring portion and formed on the wiring surface. The second wiring portion in the wiring surface is located on an extension line of the first wiring portion in a reflected light area where the side portion or the first wiring portion is formed, and the distance from the end of the actuator is less than a when the height from the wiring surface is b, the inclination angle between the side portion and the wiring surface is θ, θ′=(θ-45)×2, and a=b / tanθ′. BRIEF DESCRIPTION OF THE DRAWINGS

[0007] Figure 1 It is a perspective view showing the structure of the liquid ejecting head according to the first embodiment.

[0008] Figure 2 It is a bottom view showing the structure of the liquid ejecting head according to the first embodiment.

[0009] Figure 3 It is a bottom view showing a portion of the structure of the liquid ejecting head according to the first embodiment.

[0010] Figure 4 It is a perspective view showing the structure of a head body of the liquid ejecting head according to the first embodiment.

[0011] Figure 5 This is a cross-sectional view showing a part of the configuration of the head main body according to the first embodiment.

[0012] Figure 6 This is a cross-sectional view showing a part of the configuration of the head main body according to the first embodiment.

[0013] Figure 7 It is a perspective view showing the structure of wiring of the liquid ejecting head according to the first embodiment.

[0014] Figure 8 It is an explanatory diagram of wiring of the liquid ejecting head according to the first embodiment.

[0015] Figure 9 It is an explanatory diagram of wiring of the liquid ejecting head according to the first embodiment.

[0016] Figure 10 It is an explanatory diagram of wiring of the liquid ejecting head according to the first embodiment.

[0017] Figure 11 It is an explanatory diagram showing the configuration of the liquid ejecting device according to the first embodiment.

[0018] Figure 12 It is an explanatory diagram of wiring of a liquid ejecting head according to a comparative example.

[0019] Description of Reference Numerals

[0020] 1…Liquid ejection head (inkjet head), 2…Liquid ejection device (inkjet recording device), 11…Head body, 12…Manifold unit, 13…Circuit substrate, 14…Cap, 111…Substrate, 112…Frame, 113…Actuator, 114…Nozzle plate, 116…Common liquid chamber, 118…Independent electrode (electrode portion), 1181…First independent electrode portion (first electrode portion), 1182…First wiring portion, 1183…Second wiring portion, 121…Manifold, 122…Top plate, 123…Ink supply tube, 124…Ink discharge tube, 125…Tempered water supply tube, 131…Wiring film, 133…Printed wiring substrate, 141…External body, 142…Mask, 1111…Supply port, 1112…Discharge port, 1131…Pressure chamber, 1133…Piezoelectric element (driving element), 1134 ...inclined surface, 1141...nozzle, 1142...nozzle array, 1161...first common liquid chamber, 1162...second common liquid chamber, 2001...conveyance path, 2111...housing, 2112...medium supply unit, 2113...image forming unit, 2114...medium discharge unit, 2115...conveyance device, 2116...temperature control device, 2117...maintenance device, 2118...control unit, 2120...support unit, 2130...head unit, 2132...supply tank, 2134...pump, 2135...connecting flow path, 21121...paper cassette, 21141...paper discharge tray, 21201...conveyor belt, 21202...support plate, 21203...belt roller, 21211-21218...guide plate pair, 21221-21228...conveyance rollers, 132...driver IC, P...paper. DETAILED DESCRIPTION

[0021] Below, refer to Figures 1 to 11 A liquid ejecting head 1 according to a first embodiment and a liquid ejecting apparatus 2 using the liquid ejecting head 1 will be described. Figure 1 1 is a perspective view showing the structure of the liquid ejecting head 1 according to the first embodiment. Figure 2 It is a bottom view showing the structure of the liquid ejecting head 1 . Figure 3 It is a bottom view showing the structure of the liquid ejecting head 1 omitting the nozzle plate 114 . Figure 4 This is a perspective view showing the structure of the head body 11 of the liquid ejecting head 1 with a portion of the nozzle plate 114 cut away. Figure 5 It is a cross-sectional view showing the structure of the head main body 11 . Figure 6 It is a cross-sectional view showing the configuration of the substrate 111 and the actuator 113 of the head main body 11 . Figure 7 It is a perspective view showing the wiring structure of the head body. Figure 8 and Figure 9 It is an explanatory diagram showing the range of reflected light when light is irradiated onto the wiring surface. Figure 10It is an explanatory diagram showing the tilt angle and the range of reflected light. Figure 11 This is an explanatory diagram showing the structure of a liquid ejection device 2 using a liquid ejection head 1. In the figure, X, Y, and Z respectively represent a first direction, a second direction, and a third direction that are orthogonal to each other. It should be noted that in this embodiment, although the directions are described based on the position that the parallel direction of the nozzles 28 or the pressure chambers 31 of the inkjet head 10 is along the X-axis, the extension direction of the pressure chambers 31 is along the Y-axis, and the liquid ejection direction is along the Z-axis, this is not limited to this. It should be noted that the structure is appropriately enlarged, reduced, or omitted in each figure for illustration.

[0022] The liquid ejection head 1 is provided, for example, at Figure 11 The shared mode of the liquid ejecting device 2 such as the inkjet recording apparatus shown shares a wall-type inkjet head. The liquid ejecting head 1 is provided in a head unit 2130 including a supply tank 2132 as a liquid storage portion provided in the liquid ejecting device 2.

[0023] The liquid ejecting head 1 supplies ink, which is a liquid stored in a supply tank 2132. It should be noted that the liquid ejecting head 1 may be a non-circulating head that does not circulate the ink, or a circulating head that circulates the ink. In this embodiment, the liquid ejecting head 1 is described using a non-circulating head as an example.

[0024] like Figures 1 to 5 As shown, the liquid ejecting head 1 includes a head body 11, a manifold unit 12, a circuit board 13, and a cap 14. For example, the liquid ejecting head 1 is a side-shooting type four-row integrated head having two sets of head bodies 11 each including a pair of actuators 113.

[0025] The head body 11 ejects liquid. Figures 3 to 8 As shown, the head main body 11 includes a substrate 111 , a frame 112 , an actuator 113 having a plurality of pressure chambers 1131 , and a nozzle plate 114 .

[0026] The head body 11 has a common liquid chamber 116 that communicates with multiple pressure chambers 1131 of the actuator 113. The primary side of the multiple pressure chambers 1131 refers to the upstream side of the multiple pressure chambers 1131 in the direction of liquid flow. The secondary side of the multiple pressure chambers 1131 refers to the downstream side of the multiple pressure chambers 1131 in the direction of liquid flow.

[0027] Furthermore, the head main body 11 includes a plurality of independent electrodes 118 (electrode portions) on the substrate 111 and the actuator 113 , each of which drives a plurality of pressure chambers 1131 of the actuator 113 .

[0028] In the example of this embodiment, the head body 11 includes two actuators 113, and the common liquid chamber 116 includes one first common liquid chamber 1161 and two second common liquid chambers 1162. The common liquid chamber 116 includes, for example, the first common liquid chamber 1161 that communicates with the primary-side openings (inlets of the pressure chambers 1131) of the multiple pressure chambers 1131 of the actuators 113, and the second common liquid chamber 1162 that communicates with the secondary-side openings (outlets of the pressure chambers 1131) of the multiple pressure chambers 1131 of the actuators 113.

[0029] The substrate 111 is formed of, for example, a ceramic material in a rectangular plate shape. The substrate 111 is formed in, for example, a rectangular shape having a longitudinal direction in one direction (X direction).

[0030] Second wiring portions 1183 forming part of individual electrodes 118 are formed on wiring surface 115, one surface of substrate 111. Second wiring portions 1183 are formed of, for example, a nickel thin film and have a predetermined pattern shape connected to first wiring portions formed on actuator 113.

[0031] A pair of actuators 113 are arranged in the short-side direction (Y direction) of substrate 111. A surface of substrate 111 refers to one side of substrate 111. Substrate 111 has a supply port 1111 and a plurality of discharge ports 1112. Supply port 1111 and discharge port 1112 are through-holes that penetrate between the two main surfaces of substrate 111.

[0032] The supply port 1111 is the inlet for supplying ink to the first common liquid chamber 1161. The supply port 1111 is a through-hole formed in the center of the substrate 111 in the short-side direction. The supply port 1111 extends along the long-side direction of the substrate 111. In other words, the supply port 1111 is, for example, an elongated hole whose length aligns with the long-side direction of the actuator 113 and the long-side direction of the first common liquid chamber 1161. The supply port 1111 is provided between the pair of actuators 113 and opens at a position opposite the first common liquid chamber 1161.

[0033] The discharge port 1112 is an outlet for discharging ink from the second common liquid chamber 1162. Multiple discharge ports 1112 are provided, for example, four. Each discharge port 1112 is located, for example, between the first common liquid chamber 1161 and each of the second common liquid chambers 1162 and adjacent to each of the longitudinal ends of the pair of actuators 113. It should be noted that multiple discharge ports 1112 may also be provided in the second common liquid chamber 1162.

[0034] The frame 112 is fixed to one main surface of the substrate 111 with an adhesive or the like. The frame 112 surrounds the supply port 1111 , the plurality of discharge ports 1112 , and the actuator 113 provided on the substrate 111 .

[0035] For example, the frame 112 is formed in a rectangular frame shape, and an opening having a longitudinal direction in one direction is formed along the longitudinal direction of the frame 112. A pair of actuators 113, a supply port 1111, and four discharge ports 1112 are arranged in the opening of the frame 112.

[0036] A pair of actuators 113 are bonded to the mounting surface of substrate 111. A pair of actuators 113 are arranged in two rows on substrate 111, sandwiching supply port 1111. Actuators 113 are shaped like plates with a longitudinal direction. Actuators 113 are positioned within the opening of frame 112 and bonded to the main surface of substrate 111.

[0037] like Figure 6 and Figure 7 As shown, the actuator 113 has a plurality of pressure chambers 1131 arranged at equal intervals in the longitudinal direction at the center side in the longitudinal direction. In other words, the actuator 113 has a plurality of pressure chambers 1131 arranged along the longitudinal direction.

[0038] The top surface of the actuator 113, which is the surface opposite the substrate 111, is bonded to the nozzle plate 114. The actuator 113 is formed with multiple grooves arranged at equal intervals along the longitudinal direction and perpendicular to the longitudinal direction. These grooves form multiple pressure chambers 1131. In other words, the actuator 113 includes multiple piezoelectric bodies 1133, or driving elements, arranged at equal intervals along the longitudinal direction, forming the walls that form the grooves between them. The multiple piezoelectric bodies 1133 form multiple pressure chambers 1131 between adjacent piezoelectric bodies 1133, and by applying a driving voltage, the volume of the pressure chambers 1131 changes.

[0039] The width of actuator 113, for example, in the short-side direction, gradually increases from the top side toward substrate 111. A cross-section of actuator 113, taken along the short-side direction, perpendicular to the long-side direction, is formed into a trapezoidal shape. Specifically, actuator 113 has inclined surfaces 1134 on the side surfaces in the short-side direction. These side surfaces (inclined surfaces 1134) are arranged opposite first common liquid chamber 1161 and second common liquid chamber 1162.

[0040] For example, the side surface portion constituting the inclined surface 1134 has an inclination angle θ with respect to the wiring surface that is larger than 45° and smaller than 90°. As an example, in this embodiment, the inclination angle θ is configured to be larger than 60°.

[0041] The pressure chamber 1131 deforms during printing or other operations by the liquid ejection head 1, causing ink to be ejected from the nozzle 1141. The inlet of the pressure chamber 1131 opens into the first common liquid chamber 1161, and the outlet opens into the second common liquid chamber 1162. Ink flows into the pressure chamber 1131 through the inlet and flows out through the outlet. It should be noted that the pressure chamber 1131 may also have a configuration in which ink flows in through the two openings described as the inlet and outlet.

[0042] The nozzle plate 114 is formed in a plate shape. It is fixed to the main surface of the frame 112 opposite the substrate 111 using an adhesive or the like. The nozzle plate 114 has a plurality of nozzles 1141 formed at positions opposing the plurality of pressure chambers 1131. In this embodiment, the nozzle plate 114 has two nozzle arrays 1142, each of which is formed by aligning the plurality of nozzles 1141 in one direction.

[0043] The first common liquid chamber 1161 is formed between the center of the pair of actuators 113, excluding both ends, and forms a flow path for ink from the supply port 1111 to the primary-side openings (inlets) of the multiple pressure chambers 1131 of each actuator 113. The first common liquid chamber 1161 extends along the longitudinal direction of the actuator 113.

[0044] Second common liquid chambers 1162 are formed between each actuator 113 and housing 112. They form a flow path for ink from the secondary-side openings (outlets) of the plurality of pressure chambers 1131 toward discharge port 1112. They extend along the longitudinal direction of actuator 113.

[0045] The plurality of independent electrodes 118 are independent electrodes for independently applying driving voltages to the plurality of piezoelectric bodies 1133. The plurality of independent electrodes 118 independently deform the pressure chambers 1131. The independent electrodes 118 are formed of wiring formed on the actuator 113 and the substrate 111, respectively.

[0046] As a specific example, Figure 7 and Figure 8As shown, multiple independent electrodes 118 are continuously formed, including a first independent electrode 1181 (first electrode portion) formed on the inner surface of each pressure chamber 1131, a first wiring portion 1182 formed on the inclined surface 1134 of the actuator 113, and a second wiring portion 1183 formed on the wiring surface 115 of the substrate 111. The independent electrodes 118 extend from the inner surface of the pressure chamber 1131 to the inclined surface 1134 and the wiring surface 115 of the substrate 111, extending toward the ends in the short-side direction of the substrate 111 and connecting to the circuit board 13 of the substrate 111. The independent electrodes 118 are formed, for example, from a nickel thin film. It should be noted that the independent electrodes 118 are not limited to nickel thin films and can also be formed from, for example, gold or copper thin films. The thickness of the independent electrodes 118 is, for example, 0.5 μm to 5 μm. The independent electrodes 118 are formed of a conductive material using methods such as vacuum evaporation or electroless plating, and are patterned into a predetermined shape using photolithography. Photolithography involves applying a photosensitive resist material, then exposing the wiring pattern through ultraviolet light through a photomask. The wiring is then formed through a development process and an etching process. It should be noted that, in the process of forming the independent electrodes 118, the first independent electrode 1181 can be formed simultaneously with the first wiring portion 1182 or the second wiring portion 1183, or in a separate process.

[0047] In this embodiment, the second wiring portion 1183 is formed along the wiring surface 115 and extends in the same direction as the first wiring portion 1182 extending from the actuator 113, at least within the reflected light range reached by the reflected light. Specifically, for example, when viewed from a top view from the third direction (the Z direction), the first wiring portion 1182 and the second wiring portion 1183 extend on the same straight line in the second direction (the Y direction), which is the short side direction of the actuator 113. That is, the individual electrode 118 extends on a straight line perpendicular to the first direction (the X direction), which is the arrangement direction of the plurality of nozzles 1141, and perpendicular to the upper and lower edges of the inclined surface 1134, at least within the reflected light range of a distance a or less from the actuator. Furthermore, the second wiring portion 1183 extends along the surface of the wiring surface 115 in the second direction (the Y direction), which is the short side direction of the actuator 113.

[0048] For example, reflected light region a is the area where parallel light irradiated during exposure is reflected and reaches the wiring surface. Reflected light region a can be calculated using the height b from wiring surface 115 to the upper surface of actuator 113 and the inclination angle θ between wiring surface 115 and inclined surface 1134, and is expressed as a = b / tanθ. Figure 10 ] shows the reflected light range based on the tilt angle θ when b=0.5 mm.

[0049] Here, the reflected light region is defined as the range where, when the height of the inclined surface 1134 from the wiring surface 115 is b and the inclination angle between the inclined surface 1134 and the wiring surface 115 is θ, θ′ = (θ-45) × 2, a = b / tanθ′, and the distance from the end of the actuator 113 is less than or equal to a. Within this range, when pattern formation occurs, light incident on the inclined surface has the potential to reach the region where the second wiring portion 1183 is formed. Therefore, in this embodiment, within this reflected light region, when viewed from the exposure direction during wiring formation, the first wiring portion 1182 and the second wiring portion 1183 are arranged on the same straight line. As an example, the exposure direction is along a third direction (Z direction) that is orthogonal to the first direction (X direction) and the second direction (Y direction) in which the plurality of pressure chambers 1131 are arranged.

[0050] Note that a portion of the independent electrode 118 may be covered on the lower surface of the frame body 112 by an adhesive for bonding the frame body 112 to the substrate 111 .

[0051] like Figure 1 、 Figure 3 As shown, the manifold unit 12 includes a manifold 121, a top plate 122, an ink supply pipe 123, an ink discharge pipe 124, and a pair of temperature control pipes: a temperature-controlled water supply pipe 125 and a temperature-controlled water discharge pipe. The number of the ink supply pipe 123, the ink discharge pipe 124, the temperature-controlled water supply pipe 125, and the temperature-controlled water discharge pipe can be set as appropriate.

[0052] The manifold 121 is formed in a plate or block shape and includes a supply channel connected to the supply port 1111 of the substrate 111 to form a liquid supply channel, a discharge channel connected to the discharge port 1112 of the substrate 111 to form a liquid discharge channel, and a temperature control channel to form a flow path for the temperature control fluid.

[0053] One main surface of the manifold 121 is fixed to the main surface of the substrate 111. In addition, for example, the ink supply tube 123, the ink discharge tube 124, the temperature-controlled water supply tube 125, and the temperature-controlled water discharge tube are fixed to the manifold 121 via the top plate 122.

[0054] The supply flow path is a flow path formed by a hole or a groove in the manifold 121. The supply flow path connects the ink supply tube 123 and the supply port 1111 of the substrate 111 in a fluid manner.

[0055] The discharge flow path is a flow path formed by a hole or a groove in the manifold 121. The discharge flow path fluidically connects the ink discharge tube 124 and the discharge port 1112 of the substrate 111.

[0056] The temperature adjustment flow path is a flow path formed by a hole or a groove in the manifold 121. The temperature adjustment flow path fluidically connects the temperature adjustment water supply pipe 125 and the temperature adjustment water discharge pipe.

[0057] Both ends of the temperature control flow path are openings connected to the temperature control water supply pipe 125 and the temperature control water discharge pipe provided on one main surface of the manifold 121. The temperature control flow path is formed to be able to exchange heat with the base plate 111 fixed to the manifold 121.

[0058] The ink supply tube 123 is connected to the supply flow path 1211. The ink discharge tube 124 is connected to the discharge flow path. The temperature control water supply tube 125 and the temperature control water discharge tube are connected to the primary side and the secondary side of the temperature control flow path.

[0059] like Figure 4 As shown, the circuit board 13 includes a wiring film 131 having one end connected to the substrate 111 , a driver IC 132 mounted on the wiring film 131 , and a printed wiring board 133 mounted on the other end of the wiring film 131 .

[0060] The circuit board 13 applies a driving voltage to the wiring pattern of the actuator 113 via the driver IC 132 to drive the actuator 113 , thereby increasing or decreasing the volume of the pressure chamber 1131 and ejecting liquid droplets from the nozzle 1141 .

[0061] The wiring film 131 is connected to the plurality of individual electrodes 118. For example, the wiring film 131 is an ACF (anisotropic conductive film) fixed to the connection portion of the substrate 111 by thermocompression bonding or the like. For example, multiple wiring films 131 are provided for each head body 11. In this embodiment, two wiring films 131 are connected to one actuator 113. The wiring film 131 is, for example, a COF (chip on film) on which a driver IC 132 is mounted.

[0062] The driver IC 132 is connected to the plurality of independent electrodes 118 via the wiring film 131. Note that the driver IC 132 may be connected to the plurality of independent electrodes 118 not through the wiring film 131 but through other means such as ACP (anisotropic conductive paste), NCF (non-conductive film), or NCP (non-conductive paste).

[0063] The printed wiring board 133 is a PWA (Printing Wiring Assembly) on which various electronic components and connectors are mounted.

[0064] The cover 14 includes, for example, an outer shell 141 that covers the side surfaces of the pair of head main bodies 11 , the manifold unit 12 , and the circuit board 13 , and a mask that covers a portion of the nozzle plate 114 side of the pair of head main bodies 11 .

[0065] The outer shell 141 exposes, for example, the ink supply tube 123 , the ink discharge tube 124 , the temperature-controlled water supply tube 125 , the temperature-controlled water discharge tube 125 , and the end portions of the circuit board 13 in the manifold unit 12 to the outside.

[0066] The mask plate 142 covers the pair of head main bodies 11 excluding the plurality of nozzles 1141 and the areas around the plurality of nozzles 1141 of the nozzle plate 114 .

[0067] The liquid ejection head 1 thus constructed can avoid the influence of reflection during pattern formation and suppress the wiring from becoming an exposed line by arranging the second wiring portion 1183 on the wiring surface 115 on the extension line of the first wiring portion 1182 formed on the inclined surface 1134 of the actuator 113 within the range reached by the reflected light, i.e., the reflected light range. Figure 9 As shown, when the angle formed by the wiring surface 115 as the upper surface of the substrate 111 and the inclined surface 1134 of the actuator 113 is less than 45°, the light reflected by the inclined surface 1134 becomes an incident angle + a reflection angle < 90°, and will not irradiate the upper surface of the substrate 111. However, when the angle formed by the upper surface of the substrate 111 and the inclined surface 1134 as the side portion of the actuator 113 is greater than 45°, the light reflected by the inclined surface 1134 becomes an incident angle + a reflection angle > 90°, and the reflected light irradiates the wiring surface 115. According to this embodiment, by setting the electrode pattern shape of the range reached by the reflected light to the same direction, it is possible to avoid exposure to unexpected parts due to the reflected light. That is, for example, as a comparison, Figure 12 When the wiring shape of the second wiring portion 11183 is bent at the bottom of the inclined surface 1134 as in the inkjet head 1000 shown in FIG. 1 , the reflected light in the inclined surface during exposure affects the pattern shape, and the wiring sometimes becomes a bright line. However, by Figure 7 By arranging the first wiring portion 1182 and the second wiring portion 1183 on a straight line within the range of reflected light, it is possible to avoid exposure caused by reflected light to unexpected locations and prevent the wiring from becoming exposed lines.

[0068] Furthermore, since the desired wiring shape can be ensured, the inclination of the side surface relative to the wiring surface 115 can be made larger, thereby reducing the width of the actuator 113. Consequently, the dimension of the actuator 113 in the second direction (Y direction), which is the short side direction, can be reduced, thereby achieving the effect of reducing the size of the liquid ejecting head 1.

[0069] Furthermore, by reducing the width of the actuator, the area of ​​the supply liquid chamber can be increased, thereby reducing the flow resistance of the supply liquid chamber. Furthermore, in a configuration where the supply port 1111 is disposed between multiple actuators 113, reducing the width of the actuator 113 creates a margin between the actuator 113 and the supply port 1111. This can prevent adhesive from flowing into the supply port 1111 during bonding of the actuator 113 to the substrate 111, thereby reducing defects caused by adhesive inflow.

[0070] Below, refer to Figure 11 The following describes an inkjet recording device 2 having a liquid ejecting head 1. The inkjet recording device 2 includes a housing 2111, a medium supply unit 2112, an image forming unit 2113, a medium discharge unit 2114, a transport device 2115 as a support device, a maintenance device 2117, and a control unit 2118. The inkjet recording device 2 also includes a temperature control device for adjusting the temperature of the ink supplied to the liquid ejecting head 1.

[0071] The inkjet recording device 2 is an inkjet printer that ejects ink or other liquid while transporting, for example, paper P as a ejection object, i.e., a recording medium, along a predetermined conveying path 2001 from a medium supply section 2112 through an image forming section 2113 to a medium discharge section 2114, thereby performing image forming processing on the paper P.

[0072] The medium supply unit 2112 includes a plurality of paper cassettes 21121. The image forming unit 2113 includes a support unit 2120 for supporting paper and a plurality of head units 2130 disposed above the support unit 2120 to face each other. The medium discharge unit 2114 includes a paper discharge tray 21141.

[0073] The support section 2120 includes a conveyor belt 21201 provided in an endless shape in a predetermined area where image formation is performed, a support plate 21202 supporting the conveyor belt 21201 from the rear side, and a plurality of belt rollers 21203 provided on the rear side of the conveyor belt 21201 .

[0074] The head unit 2130 includes: a liquid ejection head 1, which is a plurality of inkjet heads; a plurality of supply tanks 2132, which are liquid tanks respectively mounted on each liquid ejection head 1; a pump 2134, which supplies ink; and a connecting flow path 2135, which connects the liquid ejection head 1 with the supply tank 2132.

[0075] This embodiment includes four color liquid ejection heads 1 for cyan, magenta, yellow, and black, and four color supply tanks 2132 for storing inks of these colors. The supply tanks 2132 are connected to the liquid ejection heads 1 via connection channels 2135 .

[0076] The pump 2134 is a liquid delivery pump composed of, for example, a piezoelectric pump, and is connected to the control unit 2118 and is driven and controlled by the control unit 2118 .

[0077] The connecting flow path 2135 includes a supply flow path connected to the ink supply tube 123 of the liquid ejecting head 1. Furthermore, the connecting flow path 2135 includes a recovery flow path connected to the ink discharge tube 124 of the liquid ejecting head 1. For example, if the liquid ejecting head 1 is a non-circulating type, the recovery flow path is connected to the maintenance device 2117, while if the liquid ejecting head 1 is a circulating type, the recovery flow path is connected to the supply tank 2132.

[0078] The transport device 2115 transports the paper P along the transport path 2001, which runs from the paper feed cassette 21121 of the medium supply unit 2112 through the image forming unit 2113 to the paper discharge tray 21141 of the medium discharge unit 2114. The transport device 2115 includes a plurality of guide plate pairs 21211 to 21218 and a plurality of transport rollers 21221 to 21228 arranged along the transport path 2001. The transport device 2115 supports the paper P so that it can move relative to the liquid ejecting head 1.

[0079] The maintenance device 2117, for example, suctions and recovers ink remaining on the outer surface of the nozzle plate 114 during maintenance. Furthermore, if the liquid ejecting head 1 is a non-circulating type, the maintenance device 2117 recovers ink within the head body 11 during maintenance. This maintenance device 2117 includes a tray or tank for storing the recovered ink.

[0080] The control unit 2118 includes: a CPU 21181 as an example of a processor; memories such as a ROM (Read Only Memory) for storing various programs, a RAM (Random Access Memory) for temporarily storing various variable data or image data, and an interface unit for inputting and outputting data from and to the outside.

[0081] In the liquid ejection head 1 and liquid ejection device 2 constructed in this way, the influence of reflection during pattern formation can be suppressed by arranging the second wiring portion 1183 on the wiring surface 115 on the extension line of the first wiring portion 1182 formed on the inclined surface 1134 of the actuator 113 within the reflected light range which is the range reached by the reflected light.

[0082] It should be noted that the embodiments of the present invention are not limited to the above-mentioned configurations. Several examples of embodiments are shown below. In addition, in the embodiments described in the following description, the same reference numerals are used for the same configurations as those in the first embodiment described above, and detailed description thereof is omitted.

[0083] For example, in the above example, the exposure direction is along a third direction (Z direction) perpendicular to the first direction (X direction) and the second direction (Y direction), but the exposure direction is not limited to this. For example, the exposure direction may be inclined relative to the first direction (X direction), the second direction (Y direction), and the third direction (Z direction). In this case, within the reflected light range, the second wiring portion 1183 is aligned with the first wiring portion 1182 when viewed from the exposure direction, thereby achieving a desired wiring shape while avoiding the influence of reflection during exposure.

[0084] For example, in the above example, the liquid ejecting head 1 is described as having a pair of head bodies 11, but the invention is not limited thereto and may also be configured as having a single head body 11. Furthermore, although the head body 11 is described as having a pair of actuators 113, the invention is not limited thereto. For example, the head body 11 may also be configured as having a single actuator 113.

[0085] It should be noted that while this embodiment describes an example in which the actuator 113 includes multiple pressure chambers 1131, it is also possible to have an air chamber alternately arranged with the multiple pressure chambers 1131. In this case, for example, one or more common electrodes that simultaneously drive the multiple pressure chambers 1131 can be provided in the air chamber, with the common electrode being extended to the opposite side of the extension direction of the individual electrodes. In the case of an air chamber adjacent to a pressure chamber 1131, the nozzle plate 114 is provided with nozzles 1141 in the portion facing the pressure chamber 1131, while no nozzles 1141 are provided in the portion facing the air chamber. In other words, ink is not ejected from the air chamber. The air chamber is formed by, for example, blocking the ends of the groove in the actuator 113 with walls formed of a photosensitive resin. The air chamber is formed by blocking the groove in the actuator 113 with the substrate 111, the nozzle plate 114, and the walls at both ends.

[0086] In addition, in the above example, the liquid ejection head 1 is described as an example of a non-circulating type, but it can also be a circulating type. In addition, it can also be set that the actuator 113 has an opening on the primary side and a second pressure chamber for purging that is continuous with the second common liquid chamber 1162, and a third common liquid chamber is provided on the secondary side of the second pressure chamber.

[0087] According to at least one embodiment described above, the influence of reflection can be avoided and wiring formation is facilitated.

[0088] Although several embodiments of the present invention have been described, these embodiments are provided for illustrative purposes only and are not intended to limit the scope of the invention. These new embodiments can be implemented in various other ways and can be omitted, replaced, or modified without departing from the scope of the invention. These embodiments and their variations are included within the scope and spirit of the invention and are also included within the scope of the invention described in the claims and their equivalents.

Claims

1. A liquid ejection head, characterized in that: have: a substrate having a wiring surface; an actuator including a side surface portion, the side surface portion being provided on the wiring surface of the substrate and having an inclination angle greater than 45° and less than 90° relative to the wiring surface; as well as an electrode portion including a first wiring portion formed along the side surface portion and a second wiring portion connected to the first wiring portion, The second wiring portion extends in the same direction as the first wiring portion within a light reflection area formed along the wiring surface and forming the side portion or the first wiring portion. The light reflection area is an area that is at least a distance from the end of the actuator when the height from the wiring surface is b, the inclination angle between the side portion and the wiring surface is θ, θ′=(θ-45)×2, and a=b / tanθ′.

2. The liquid ejection head according to claim 1, wherein The plurality of electrode portions are arranged in a direction, The first wiring portion and the second wiring portion extend in a direction orthogonal to the one direction.

3. The liquid ejection head according to claim 2, wherein The actuator has a plurality of pressure chambers in the one direction, the pressure chambers are communicated with the nozzles, and independent electrodes are formed on the inner surfaces of the pressure chambers. The edge of the side surface of the actuator on the wiring surface side extends in the one direction, The first wiring portion and the second wiring portion extend in straight lines perpendicular to the one direction.

4. The liquid ejection head according to claim 3, wherein The plurality of pressure chambers extend in directions perpendicular to the one direction, respectively. A first electrode portion connected to the first wiring portion is formed in the pressure chamber.

5. The liquid ejection head according to claim 4, wherein The inclination angle between the side surface and the wiring surface is greater than or equal to 60°.

6. The liquid ejection head according to claim 4, wherein The first electrode portion and the first wiring portion are formed simultaneously.

7. The liquid ejection head according to claim 5, wherein The first electrode portion and the first wiring portion are formed simultaneously.

8. The liquid ejection head according to claim 4, wherein The first electrode portion and the second wiring portion are formed simultaneously.

9. The liquid ejection head according to claim 5, wherein The first electrode portion and the second wiring portion are formed simultaneously.

10. The liquid ejection head according to claim 1, wherein The thickness of the electrode portion is 0.5 μm to 5 μm.

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