Conveying device

Abstract

The inventive concept provides a transfer device. The transfer device comprises a transfer cart; and a bumper arrangement arranged at any one of a front part and a rear part of the transfer cart, and wherein the bumper arrangement comprises: a bumper arranged spaced apart from the transfer cart; and an impact attenuation unit arranged between the bumper and the transfer cart and configured to attenuate an impact force transmitted from the bumper to the transfer cart by frictional force.

Description

Technical Field

[0001] The embodiments of the inventive concept described herein relate to transmission devices. Background Technology

[0002] Generally, in the manufacturing process of semiconductor or display components, materials (such as semiconductor wafers, semiconductor strips, glass substrates, display panels, etc.) can be transported by unmanned transport systems (such as overhead crane transport (OHT) equipment, rail-guided vehicle (RGV) equipment, etc.). In particular, the transport equipment may include transport vehicles configured to move along drive rails mounted on the top or bottom plate of a cleanroom, and the operation control of the transport vehicles may be controlled by an upper control device (such as an OCS (OHT control server) device).

[0003] For example, in a cleanroom used for manufacturing semiconductor devices, drive rails for material handling can be mounted on the ceiling, and multiple transport vehicles can be movably arranged along the drive rails. The operation control of the transport vehicles can be performed by an OCS (Optical Character Set) device, and the transport vehicles and the OCS device can be interconnected via wireless communication.

[0004] If an anomaly occurs while the transport vehicle is moving on the drive rail, the transport vehicle may stop on the drive rail. In this case, if another subsequent transport vehicle does not detect the stopped transport vehicle, a collision may occur between the transport vehicles, which could damage the transport vehicles and the materials loaded on them. In one embodiment, Korean Patent Publication No. 10-1374665 discloses a transport vehicle equipped with buffer stops to reduce impact when a collision occurs between transport vehicles.

[0005] However, even with the aforementioned buffer stops, it is impossible to completely eliminate the impact caused by physical contact, so a new method is needed to prevent collisions between the aforementioned transport vehicles. Summary of the Invention

[0006] An embodiment of the present invention provides a conveying device for absorbing the impact during a collision.

[0007] The technical objectives of this invention are not limited to those described above, and other unmentioned technical objectives will become apparent to those skilled in the art from the following description.

[0008] The present invention provides a conveying device. The conveying device includes a conveyor vehicle; and a buffer device disposed at either a front component or a rear component of the conveyor vehicle, wherein the buffer device includes: a buffer spaced apart from the conveyor vehicle; and an impact attenuation unit disposed between the buffer and the conveyor vehicle and configured to attenuate impact forces transmitted from the buffer to the conveyor vehicle by friction.

[0009] In one embodiment, the impact attenuation unit includes: a first support member fixed to the frame of the conveyor and having a slot in the longitudinal direction; a second support member fixed to the buffer; and a friction pin fixed to the second support member to be inserted into the slot formed on the first support member, and attenuating the impact by friction generated when the buffer moves along the slot in the event of an impact.

[0010] In one embodiment, the slot is configured to increase the frictional force with the friction pin as the slot moves further away from the buffer.

[0011] In one embodiment, the width of the slot decreases as the slot moves further away from the buffer.

[0012] In one embodiment, the slot is oriented to be curved in an upward or downward direction.

[0013] In one embodiment, the slot includes: a first section having a diameter greater than that of the friction pin; a second section having a diameter less than that of the first section; and a third section having a diameter greater than that of the second section and less than that of the first section.

[0014] In one embodiment, the second segment and the third segment are formed consecutively.

[0015] In one embodiment, the buffer includes a front component positioned at a predetermined distance from the transport vehicle; and side components extending from both sides of the front component and secured to the frame of the transport vehicle, wherein the second support is secured to the bottom surface of the front component.

[0016] The present invention provides a conveying device. The conveying device includes: a drive module configured to move along a drive guide rail; a gripper unit configured to pick up a conveyed object; a carriage body mounted on the gripper unit and connected to the drive module; and a buffer device disposed at either a front or rear component of the carriage body, wherein the buffer device includes: a buffer having sides fixed to the carriage body; and an impact damping unit disposed between the buffer and the carriage body to minimize impact on the buffer so as to prevent it from being transmitted to the carriage body.

[0017] In one embodiment, the impact damping unit includes: a first support member fixed to the carriage body and having a slot in the longitudinal direction; a second support member fixed to the buffer; and a friction pin fixed to the second support member to be inserted into the slot formed on the first support member, and damping the impact by friction generated when the buffer moves along the slot in the event of an impact.

[0018] In one embodiment, the slot is configured to increase the frictional force with the friction pin as the slot moves further away from the buffer.

[0019] In one embodiment, the width of the slot decreases as the slot moves further away from the buffer.

[0020] In one embodiment, the slot is oriented to be curved in an upward or downward direction.

[0021] In one embodiment, the slot includes: a first section having a diameter greater than that of the friction pin; a second section having a diameter less than that of the first section; and a third section having a diameter greater than that of the second section and less than that of the first section.

[0022] In one embodiment, the second segment and the third segment are formed consecutively.

[0023] In one embodiment, the buffer includes a front component positioned at a predetermined distance from the transport vehicle; and side components extending from both sides of the front component and secured to the frame of the transport vehicle, wherein the second support is secured to the bottom surface of the front component.

[0024] In one embodiment, two first supports are spaced apart, and a second support is positioned between the first supports.

[0025] In one embodiment, two second supports are spaced apart, and the first support is positioned between the second supports.

[0026] This invention provides a conveying device. The conveying device includes: a drive module configured to move along a drive guide rail; a gripper unit configured to pick up a conveyed object; a carriage body mounted on the gripper unit and connected to the drive module; and a buffer device disposed at either a front or rear component of the carriage body, wherein the buffer device includes: a buffer having sides fixed to both sides of the carriage body; a first support fixed to the carriage body and having a slot in a longitudinal direction; a second support fixed to the buffer; and a friction pin fixed to the second support to insert into the slot formed on the first support, and to attenuate the impact by friction generated during movement along the slot in the event of an impact on the buffer.

[0027] In one embodiment, the slot is formed to increase the friction with the friction pin as the slot moves further away from the buffer, and the buffer includes a front member positioned at a predetermined distance from the body of the carriage; and side members extending from both sides of the front member and fixed to the frame of the body of the carriage, wherein the second support is fixed to the bottom surface of the front member.

[0028] According to embodiments of the invention, although the buffer is subjected to impact, the impact transmitted to the body can be minimized by means of the frictional force generated during the process of the friction pin moving with the slot.

[0029] The effects of this invention are not limited to those described above, and other effects not mentioned will become apparent to those skilled in the art from the following description. Attached Figure Description

[0030] The above and other objects and features will become apparent from the following description with reference to the accompanying drawings, wherein, unless otherwise stated, the same reference numerals in the various figures refer to the same parts, and wherein:

[0031] Figure 1 It is a floor plan of a transmission facility with transmission equipment.

[0032] Figure 2 This is a side view showing a conveying device in the state of conveying an object to its installation location.

[0033] Figure 3 and Figure 4 The diagram shows the transmission equipment.

[0034] Figure 5 and Figure 6 The impact attenuation unit is shown.

[0035] Figure 7 The performance effect at the impact damping unit is shown.

[0036] Figure 8A and Figure 8B An embodiment of a modified impact attenuation unit is shown.

[0037] Figures 9A to 9C Various modified embodiments of the slot are shown. Detailed Implementation

[0038] The inventive concept can be modified and taken in various forms, and specific embodiments of the inventive concept will be shown and described in detail in the accompanying drawings. However, the embodiments of the inventive concept are not intended to limit the specific forms disclosed, and it should be understood that the inventive concept includes all variations, equivalents, and substitutions included within the spirit and scope of the inventive concept. In the description of the inventive concept, detailed descriptions of relevant prior art may be omitted where it may obscure the essence of the inventive concept.

[0039] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the inventive concept. As used herein, the word “the” is intended to include plural forms unless the context clearly indicates otherwise. It should also be understood that, when used in this specification, the terms “comprise” and / or “comprising” specify the presence of the stated features, integrals, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, integrals, steps, operations, elements, components, and / or groups thereof. As used herein, the terms “and / or” include any and all combinations of one or more of the associated listed items. Additionally, the term “exemplary” is intended to refer to an example or illustration.

[0040] It should be understood that although the terms "first," "second," "third," etc., may be used herein to describe various elements, components, regions, layers, and / or sections, these elements, components, regions, layers, and / or sections should not be limited by these terms. These terms are used only to distinguish one element, component, region, layer, or section from another region, layer, or section. Therefore, without departing from the teachings of the inventive concept, the first element, first component, first region, first layer, or first section discussed below may be referred to as a second element, second component, second region, second layer, or second section.

[0041] In the following, embodiments of the inventive concept will be described in detail with reference to the accompanying drawings.

[0042] Figure 1 It is a floor plan of a transmission facility with transmission equipment, and Figure 2 This is a side view of the conveying equipment that transports the object to the installation location.

[0043] like Figure 1 and Figure 2 As shown, the conveying device 100 may include a conveyor vehicle for conveying the conveyed object 20 to the conveying location 10.

[0044] In this embodiment, the transport device 100 transports the transport object 20 to each of the transport positions 10 in a transport facility having a plurality of transport positions 10. The transport object 20 is the object to be transported and can be, for example, a single item or a combination of multiple items (such as an object to be stored and a container for storing the object). In this embodiment, the transport object 20 can be a substrate storage container storing multiple substrates, such as a front-opening wafer transport box (FOUP).

[0045] In this embodiment, the transfer position 10 includes a processing device 12 for processing the semiconductor substrate and a mounting position 14 for mounting the substrate storage container 20, which is the transfer object 20. For example, the processing device 12 removes the semiconductor substrate from the substrate storage container 20 mounted on the mounting position 14 and processes the semiconductor substrate. Furthermore, the processing device 12 stores the processed semiconductor substrate in the substrate storage container mounted on the mounting position 14. Figure 1 As shown, multiple transport locations 10 are provided in the transport facility. For example, in the transport facility, a transport path 30 is arranged to pass through multiple transport locations 10.

[0046] like Figure 2 As shown, in this invention, the conveying path 30 is defined by a guide rail 32 connected to the top plate. Furthermore, the mounting position 14 is positioned below the guide rail 32 and is arranged to overlap with the guide rail 32 when viewed in a flat plane (see [reference]). Figure 1 ).

[0047] In this embodiment, the conveying device 100 is an overhead crane transport (OHT) device that travels on guide rails 32 and conveys the object 20 to each of a plurality of conveying positions 10. In this embodiment, a plurality of such conveying devices 100 are arranged in the conveying facility. Furthermore, as... Figure 2 As shown, the conveying device 100 conveys the object 20 to the mounting position 14 located below. In other words, the conveying device 100 lowers the conveying device 20 from the height of the conveying device 100 (the height of the guide rail 32) toward the mounting position 14 and mounts the object 20 on the mounting position 14.

[0048] Figure 3 and Figure 4 The transmission device is shown.

[0049] like Figure 3 and Figure 4 As shown, the conveying device 100 conveys a suspended object (20; hereinafter referred to as a substrate storage container). In this invention, the conveying device 100 may be a conveying vehicle including a drive module 200 and a hoisting module 300.

[0050] The drive module 200 is driven along a guide rail 32 by a separate drive unit, the guide rail being disposed along the top plate of the semiconductor production line. The drive module 200 may include a body 210 having drive wheels 212 on both sides thereof. Although not shown, actuators for rotating the drive wheels 212 may be disposed inside the body 210. The body 210 is driven along the guide rail 32. Specifically, the body 210 may be driven while rotating when the drive wheels 212 are in contact with the guide rail 32. During this time, although not shown, a steering wheel may be disposed on the top surface of the body 210. The steering wheel is configured to be movable in a horizontal direction perpendicular to the drive direction of the body. For example, the steering wheel may be movable in the left-right direction of the body 210. The steering wheel may selectively contact a straight steering guide (not shown) for guiding straight-line travel and a branch steering guide (not shown) for guiding branch travel.

[0051] The hoisting module 300 may include: a main body 310, which is mounted on the drive module 200; a gripper unit 320 for picking up the substrate storage container 20; a lifting / lowering unit 330 for lifting / lowering the gripper unit 320; and a buffer device 350, which is respectively disposed at the front and rear of the main body.

[0052] The main body 310 is fixed as if suspended from the bottom portion of the drive module. The front surface (which is a side surface) of the main body 310 can be opened for vertical and horizontal movement of the substrate storage container 20. In this case, the side surface can be perpendicular to the drive direction of the transfer device 100.

[0053] The clamping unit 320 can be connected to the lifting / lowering unit 330 via a plurality of lifting / lowering straps 336, and may include a clamp 322 for clamping the substrate storage container 20. Furthermore, a flange configured to be clamped by the clamp 322 may be provided on the substrate storage container 20.

[0054] The gripper unit 320 may include a gripper drive unit (not shown) for driving the gripper 322. For example, the gripper drive unit may operate the gripper 322 using a cam plate and a cam follower, and may include a motor and a ball screw to move the cam plate. However, the scope of the invention is not limited thereto because the configuration of the gripper unit 320 itself can be varied.

[0055] The buffer device 350 can be respectively disposed on the front and rear sides of the main body. The buffer device 350 may include a buffer 352 and an impact damping unit 360.

[0056] Figure 5 and Figure 6 The impact attenuation unit is shown.

[0057] like Figure 5 and Figure 6 As shown, the buffer 352 may be configured to be spaced apart from the body 310. In one embodiment, the buffer 352 may include a front member 354 positioned at a predetermined distance from the body 310; and side members 356 extending from both sides of the front member 354 and fixed to the frame of the body 310.

[0058] The impact damping unit 360 may be disposed between the front part 354 of the buffer 352 and the main body 310. The impact damping unit 360 is a device for reducing the impact force transmitted from the buffer 352 to the main body 310 by means of friction.

[0059] According to one embodiment, the impact damping unit 360 may include a first support 362, a second support 366, and a friction pin 370. The first support 362 is fixed to the frame of the body 310. The first support 362 is formed of a rod-shaped frame and is horizontally positioned toward the front part 354 of the buffer 352. The first support 362 has a slot 364 formed in the longitudinal direction.

[0060] The second support member 366 is fixed to the buffer 352. The second support member 366 is formed by a rod-shaped frame and is positioned facing the body 310. The first support member 362 and the second support member 366 have lengths that can partially overlap.

[0061] Friction pin 370 is secured to second support 366 to insert into slot 364 formed in first support 362. If an impact occurs at buffer 352, friction pin 370 can mitigate the impact through the friction generated as it moves along slot 364.

[0062] The slot 364 is formed such that the frictional force with the friction pin 370 increases with increasing distance from the buffer 352. In one embodiment, the end of the slot 364 closer to the buffer 352 may be larger than the diameter d3 of the friction pin 370, and the other end of the slot 364 further away from the buffer 352 may be formed with a diameter d2 smaller than that of the smaller friction pin 370. For reference, the size of the slot and the number of friction pins can be selectively combined and applied according to the operating speed of the conveying device to absorb appropriate impact forces.

[0063] Figure 7 The performance effect at the impact damping unit is shown.

[0064] like Figure 7 As shown, if an impact is applied to the buffer device 350, the impact is mainly absorbed by the plastic deformation of the buffer 352. In addition, due to the plastic deformation of the buffer 352, the friction pin 370 moves from one end of the slot 364 to the other end, and the impact is absorbed by the friction between the friction pin 370 and the slot 364 and the micro-plastic deformation of the contact surface.

[0065] Figure 8A and Figure 8B An embodiment of a modified impact attenuation unit is shown.

[0066] like Figure 8A and Figure 8B As shown, the impact attenuation unit 360 can be equipped with one first support member 362 and two second support members 366, or two first support members 362 and one second support member 366, as needed.

[0067] Figures 9A to 9C Various modifications of the slot are shown.

[0068] like Figure 9AAs shown, slot 364a can be bent upwards. In another embodiment, slot 364b can be formed to be bent downwards. If slots 364a and 364b with this shape are applied, when an impact is applied to the buffer device 350, the friction pin 370 moves upwards or downwards along slots 364a and 364b, thereby causing the buffer 352 to move downwards or upwards. That is, when the direction is tilted due to the shape of slots 364a and 364b, the impact force applied to the buffer 352 in the horizontal direction can improve the damping effect.

[0069] Figure 9C The slot 364c shown may include: a first segment X1 having a diameter larger than that of the friction pin 370; a second segment X2 having a diameter smaller than that of the first segment X1; and a third segment X3 having a diameter larger than that of the second segment X2 and smaller than that of the first segment X1. The second segment X2 and the third segment X3 may be formed continuously. For reference, the diameter of the second segment is smaller than that of the friction pin 370.

[0070] Friction can occur when the friction pin passes through the second section in a slot with the same configuration as described above.

[0071] The effects of this invention are not limited to those described above, and those skilled in the art to which this invention pertains can clearly understand any effects not mentioned from the specification and drawings.

[0072] Although preferred embodiments of the inventive concept have been shown and described up to now, the inventive concept is not limited to the specific embodiments described above, and it should be noted that those skilled in the art to which the inventive concept relates can implement the inventive concept differently without departing from the essence of the inventive concept as claimed in the claims, and should not be interpreted or modified separately from the technical spirit or prospect of the inventive concept.

Claims

1. A transmission device, comprising: Conveyor vehicle; as well as A buffer device, wherein the buffer device is disposed at either the front or the rear of the conveyor vehicle, and The buffer device includes: A buffer, the buffer being configured to be spaced apart from the conveyor; and An impact attenuation unit is disposed between the buffer and the conveyor and is configured to attenuate the impact force transmitted from the buffer to the conveyor through friction. The impact attenuation unit includes: A first support member is fixed to the frame of the conveyor vehicle and has a slot in the longitudinal direction; A second support member, the second support member being fixed to the buffer; and A friction pin, fixed to the second support member, is inserted into the slot formed on the first support member, and dampens the impact by the frictional force generated when the buffer moves along the slot in the event of an impact. The slot is oriented to be curved in an upward or downward direction.

2. The conveying device according to claim 1, wherein the slot is formed such that the frictional force with the friction pin increases as the slot moves further away from the buffer.

3. The conveying device according to claim 2, wherein the width of the slot decreases as the slot moves further away from the buffer.

4. The conveying device according to claim 2, wherein the buffer includes a front component positioned at a predetermined distance from the conveyor vehicle; and side components extending from both sides of the front component and fixed to the frame of the conveyor vehicle, and The second support member is fixed to the bottom surface of the front component.

5. A transmission device, comprising: A drive module configured to move along a drive rail; A gripper unit configured to pick up and transfer objects; The main body of the carriage is mounted on the clamping unit and connected to the drive module; as well as A buffer device, wherein the buffer device is disposed at either the front or the rear of the main body of the carriage, and The buffer device includes: A buffer, the buffer having sides fixed to the main body of the carriage; and An impact damping unit is disposed between the buffer and the car body to minimize the impact on the buffer so as to prevent it from being transmitted to the car body. The impact attenuation unit includes: A first support member, the first support member being fixed to the main body of the carriage and having a slot in the longitudinal direction; A second support member, the second support member being fixed to the buffer; and A friction pin, fixed to the second support member, is inserted into the slot formed on the first support member, and dampens the impact by the frictional force generated when the buffer moves along the slot in the event of an impact. The slot is oriented to be curved in an upward or downward direction.

6. The conveying device according to claim 5, wherein the slot is formed such that the frictional force with the friction pin increases as the slot moves further away from the buffer.

7. The conveying device according to claim 6, wherein the width of the slot decreases as the slot moves further away from the buffer.

8. The conveying device of claim 5, wherein the buffer includes a front member positioned at a predetermined distance from the main body of the carriage; and side members extending from both sides of the front member and fixed to the frame of the main body of the carriage, and The second support member is fixed to the bottom surface of the front component.

9. The conveying device according to claim 5, wherein the two first supports are spaced apart, and the second support is positioned between the first supports.

10. The conveying device according to claim 5, wherein the two second supports are spaced apart, and the first support is positioned between the second supports.

11. A transmission device, comprising: A drive module configured to move along a drive rail; A gripper unit configured to pick up and transfer objects; The main body of the carriage is mounted on the clamping unit and connected to the drive module; as well as A buffer device, wherein the buffer device is disposed at either the front or the rear of the main body of the carriage, and The buffer device includes: A buffer, the buffer having sides fixed to the main body of the carriage; and A first support member, the first support member being fixed to the main body of the carriage and having a slot in the longitudinal direction; A second support member, the second support member being fixed to the buffer; and A friction pin, fixed to the second support member, is inserted into the slot formed on the first support member, and dampens the impact by the frictional force generated when the buffer moves along the slot in the event of an impact. The slot is oriented to be curved in an upward or downward direction.

12. The conveying device of claim 11, wherein the slot is formed such that the frictional force with the friction pin increases as the slot moves further away from the buffer, and The buffer includes: A front component, wherein the front component is positioned at a predetermined distance from the main body of the carriage; And side components, which extend from both sides of the front component and are fixed to the frame of the carriage body, and The second support member is fixed to the bottom surface of the front component.

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