A coupling test system and test method for pulse driving high-power semiconductor laser

Abstract

The application relates to a coupling test system and a test method for pulse driving a high-power semiconductor laser, and belongs to the technical field of semiconductor lasers. The system comprises a water-cooled metal plate, a pulse power supply, a power detection assembly, an industrial computer and an optical platform, wherein the water-cooled metal plate is arranged on the optical platform, a laser is arranged on the water-cooled metal plate, the laser is connected with the pulse power supply, the power detection assembly is arranged on the optical platform on one side of the water-cooled metal plate, and the pulse power supply and the power detection assembly are both connected with the industrial computer. The application changes the original direct-current driving mode of the high-power semiconductor laser mirror coupling, creatively introduces pulse driving, makes the packaging process consistent with the use current of the finished product, avoids the problems of poor beam quality and difference change of the light path profile caused by low-current mirror coupling, greatly improves the coupling power consistency, reduces the generation of residual heat and lowers the working temperature.

Description

TECHNICAL FIELD

[0001] The application relates to a coupling test system and a test method for pulse driving a high-power semiconductor laser, and belongs to the technical field of semiconductor lasers. BACKGROUND

[0002] With the maturity of semiconductor technology, semiconductor lasers have been widely used in scientific research, industry, military, medical treatment and other fields due to their high conversion efficiency, small size, light weight, high reliability and direct modulation, and have caused revolutionary breakthroughs in many fields, and the market demand and development potential are huge. High-power fiber-coupled semiconductor lasers have complex manufacturing processes and production processes. The power test of the mirror coupling of the high-power semiconductor laser is an indispensable requirement. Multiple light beams pass through the mirror for spatial beam combining. In order to maximize or even losslessly output the fiber coupling, the power test of the mirror coupling of each light beam must be performed. The power test of the multiple mirror coupling superimposed effective light beams satisfies linear calculation. Through the test, the mirror position is optimized, the coupling power is quantifiable, the efficiency is traceable, the mirror coupling process is controllable throughout, and the product quality stability is ensured.

[0003] At present, in the field of semiconductor laser packaging, the power test of the mirror coupling of the high-power semiconductor laser is mainly driven by a direct current power supply, and the power meter installed on the integrating sphere is used for reading and counting. This method can only use low current to drive the laser, and each mirror is placed one by one for coupling. The power meter linearly calculates the total power value of the multiple superimposed light beams. Because of the problems of high-power laser safety and heat dissipation temperature control, this method cannot use working current for mirror coupling. This leads to the inconsistency between the packaging current and the use current, causing changes in the beam quality and optical path profile in the process of laser packaging and use state, resulting in a certain loss of laser output power, reducing the coupling efficiency, and further increasing the residual heat. High temperature affects the reliability and performance of the laser, and even shortens the service life.

[0004] Chinese patent document CN113036585A discloses a high-power semiconductor fiber-coupled laser packaging method. The method comprises the following steps: obtaining a target laser after collimator installation; performing first temperature cycling on the target laser to obtain a target laser after first temperature cycling; and based on the target laser after first temperature cycling, performing mirror coupling to continue normal production after mirror coupling. The method increases the temperature cycling step between the laser installation step and the mirror coupling step, releases the glue stress of the previous steps, and improves the final coupling efficiency of the laser, but does not improve the power driving method. The inconsistency between the packaging current and the use current still exists. SUMMARY

[0005] In view of the deficiencies of the prior art, the application provides a coupling test system for pulse-driven high-power semiconductor lasers, which uses working current to drive the mirror coupling of the high-power semiconductor laser, ensures the optimization of the mirror coupling position and the maximization of the coupling power, avoids the disadvantages of the mirror coupling using low current in the DC power driving mode, solves the problem of the difference between the beam quality and the optical path profile in the packaging process and the use state of the laser caused by the inconsistency between the packaging current and the use current, greatly improves the coupling power consistency, reduces the generation of residual heat, and reduces the working temperature. At the same time, it makes it possible to effectively test the power stability of the laser beam after the mirror coupling of one-way and multi-way superposition, and significantly improves the coupling accuracy.

[0006] The application also provides a test method for the coupling test system for pulse-driven high-power semiconductor lasers.

[0007] The technical scheme of the application is as follows:

[0008] A coupling test system for pulse-driven high-power semiconductor lasers, comprising a water-cooled metal plate, a pulse power supply, a power detection assembly, an industrial computer and an optical platform, wherein,

[0009] The water-cooled metal plate is arranged on the optical platform, and the laser is arranged on the water-cooled metal plate. The water-cooled metal plate is used for heat dissipation and temperature control of the laser. The laser is connected with the pulse power supply, and the pulse power supply is used for driving the laser to work. The power detection assembly is arranged on the optical platform on one side of the water-cooled metal plate, and is used for power test of the pulse power supply driving the laser. The pulse power supply and the power detection assembly are both connected with the industrial computer.

[0010] Preferably, the power detection assembly comprises an integrating sphere, a photodetector and a data acquisition device. One input end of the integrating sphere is connected with the optical fiber output end of the laser, one output end is connected with the photodetector through an optical fiber, the photodetector is connected with the data acquisition device, the integrating sphere, the photodetector and the data acquisition device are all fixed on the optical platform, and the data acquisition device is connected with the industrial computer. The integrating sphere is used for receiving the laser emitted by the optical fiber output end of the laser. After multiple reflections in the integrating sphere and the optical fiber, the laser is uniformly scattered in the integrating sphere. When the integrating sphere and the optical fiber are used to measure the luminous flux, the measurement result is more reliable. The integrating sphere and the optical fiber can reduce and remove the measurement error caused by the shape, divergence angle, intensity oversaturation of light and the responsivity difference of different positions on the photodetector. Then, the effective power peak data are read, recorded and stored through the industrial computer.

[0011] Preferably, the water-cooled metal plate is a rectangular metal plate, a water supply and return pipeline is arranged in the water-cooled metal plate, the water supply and return pipeline is connected with a plant water pipe through a water supply and return ball valve, cooling of the water-cooled metal plate is realized through flow of cooling water in the water supply and return pipeline, and heat dissipation of the laser is realized.

[0012] Preferably, the pulse power source is connected with positive and negative poles of the power-on needle of the laser to form a closed loop, the pulse power source is controlled by the industrial computer to increase output current to working current of the laser in a ramp mode, the output current is automatically reduced to 0 after completion of the coupling test, and then the output is turned off, which is helpful for protecting the laser and avoiding damage caused by overshoot.

[0013] Preferably, the industrial computer is connected with a display to display readings.

[0014] The above-mentioned coupling test system for the pulse-driven high-power semiconductor laser has the following test method:

[0015] (1) The water-cooled metal plate is supplied with circulating cooling plant water, the laser is fixed on the water-cooled metal plate, and complete contact is achieved without gap.

[0016] (2) The fiber output end of the laser is inserted into the input end of the integrating sphere.

[0017] (3) The output end of the pulse power source is connected to the positive and negative poles of the power-on needle of the laser.

[0018] (4) The industrial computer is used to control the pulse power source to increase output current to working current in a ramp mode, at this time, the integrating sphere synchronously receives laser, the optical signal is transmitted to the photodetector through the optical fiber, the photodetector converts the optical signal into a standard electrical signal, and then the standard electrical signal is sent to the data acquisition device, the data acquisition device transmits the processed machine-recognizable data to the industrial computer, and the industrial computer reads and visualizes the data through the display.

[0019] (5) The mirror coupling of one light path of the laser is continuously adjusted, after the power test value is maximum, the action is stopped, the mirror position is fixed, the maximum value of the effective power is recorded and stored.

[0020] (6) The current power-on state is maintained, and step (5) is repeated until the mirror coupling power test of the remaining light path of the laser is completed, the power detection component linearly superimposes and calculates the mirror coupling power of all light paths, and whether the mirror coupling power of each light path of the laser is qualified and whether the total sum of the superimposed output power of all light paths meets the standard is judged.

[0021] (7) After completion of the coupling test, the industrial computer controls the pulse power source to automatically reduce the output current to 0, and then turns off the output, and waits for the next laser coupling test.

[0022] The present application has the following advantages:

[0023] 1. The application changes the original high-power semiconductor laser mirror coupling adopts direct current driving mode, creatively introduces pulse driving, makes the packaging process and the finished product use current consistent, avoids the problem of poor beam quality and difference change of light path profile caused by low current mirror coupling, greatly improves the coupling power consistency, reduces the generation of residual heat and reduces the working temperature.

[0024] 2. The application realizes stable and effective detection of pulse driving single-channel laser mirror coupling power, and solves the non-linear problem of multi-channel laser mirror coupling power detection, realizes linear calculation, and provides accurate and effective quantitative judgment basis for whether single-channel and multi-channel mirror coupling power data is qualified. BRIEF DESCRIPTION OF DRAWINGS

[0025] Figure 1 The structure of the application is shown in the figure;

[0026] Among them: 1, water-cooled metal plate; 2, pulse power supply; 3, integrating sphere; 4, photodetector; 5, data acquisition equipment; 6, industrial computer; 7, display; 8, optical platform. DETAILED DESCRIPTION

[0027] The application will be further described below by examples and in conjunction with the drawings, but is not limited thereto.

[0028] Example 1:

[0029] As shown in the figure, the embodiment provides a coupling test system of pulse-driven high-power semiconductor laser, which comprises a water-cooled metal plate 1, a pulse power supply 2, a power detection assembly, an industrial computer 6 and an optical platform 8, wherein, Figure 1 The optical platform 8 is provided with a water-cooled metal plate 1, and the water-cooled metal plate 1 is provided with a laser, which is cooled and temperature-controlled by the water-cooled metal plate. The laser is connected with a pulse power supply 2, which drives the laser to work. The optical platform 8 on one side of the water-cooled metal plate 1 is provided with a power detection assembly, which tests the power of the pulse power supply driven laser. The pulse power supply 2 and the power detection assembly are both connected with an industrial computer 6.

[0030]

[0031] ​The power detection assembly comprises an integrating sphere 3, a photoelectric detector 4 and a data acquisition device 5, the integrating sphere 3 is connected with the optical fiber output end of the laser at one input end, is connected with the photoelectric detector 4 through the optical fiber at one output end, the photoelectric detector 4 is connected with the data acquisition device 5, the integrating sphere 3, the photoelectric detector 4 and the data acquisition device 5 are all fixed on the optical platform 8, and the data acquisition device 5 is connected with the industrial computer 6. The integrating sphere 3 is used for receiving the laser emitted by the optical fiber output end of the laser, the laser is uniformly scattered in the integrating sphere 3 after multiple reflections in the integrating sphere and the optical fiber, when the integrating sphere 3 and the optical fiber are used to measure the light flux, the measurement result is more reliable, the integrating sphere and the optical fiber can reduce and remove the measurement error caused by the shape, divergence angle, intensity oversaturation of light and the responsivity difference of different positions on the photoelectric detector, then the effective power peak value data is read, recorded and stored through the industrial computer. The photoelectric detector 4 selects the photoelectric detector with adjustable gain amplification.

[0032] The water-cooled metal plate 1 is a rectangular metal plate, a water supply and return pipeline is arranged in the water-cooled metal plate 1, the water supply and return pipeline is connected with a plant water pipe through a water supply and return ball valve, cooling of the water-cooled metal plate is realized through flow of cooling water in the water supply and return pipeline, and then heat dissipation of the laser is completed.

[0033] The pulse power supply is connected with the positive and negative poles of the power-on needle of the laser, a closed loop is formed, the pulse power supply is controlled by the industrial computer to increase the output current to the working current of the laser in a ramp mode, the output current is automatically reduced to 0 after the coupling test is completed, and then the output is turned off, which is helpful for protecting the laser and avoiding damage caused by overshoot.

[0034] The industrial computer 6 is connected with the display 7, and the reading is displayed through the display.

[0035] Embodiment 2:

[0036] A test method of the coupling test system of the pulse-driven high-power semiconductor laser as described in embodiment 1, the steps are as follows:

[0037] (1) The circulating cooling plant water is introduced into the water-cooled metal plate 1, the laser is fixed on the water-cooled metal plate 1, and complete contact is achieved without gap;

[0038] (2) The optical fiber output end of the laser is inserted into the input end of the integrating sphere;

[0039] (3) The output end of the pulse power supply 2 is connected to the positive and negative poles of the power-on needle of the laser;

[0040] (4) Use the industrial control computer 6 to control the pulse power supply to increase the output current to the working current in ramp mode. At this time, the integrating sphere 3 synchronously receives the laser and transmits the optical signal to the photodetector through the optical fiber. The photodetector converts the optical signal into a standard electrical signal and then sends it to the data acquisition device. The data acquisition device transmits the processed machine-recognizable data to the industrial control computer, which reads it and visualizes it on the display.

[0041] (5) Continuously adjust the mirror coupling of one optical path of the laser. The mirror coupling process is the existing technology. After the power test value is the maximum, stop the action, fix the mirror position, record and store the maximum effective power.

[0042] (6) Keep the current power-on state and repeat step (5) until the mirror coupling power test of the remaining optical path of the laser is completed. The power detection component linearly superimposes and calculates the mirror coupling power of all optical paths to determine whether the mirror coupling power of each optical path of the laser is qualified and whether the sum of the superimposed output power of all optical paths meets the standard.

[0043] (7) After the coupling test is completed, the industrial control computer 6 controls the pulse power supply 2 to automatically reduce the output current to 0, and then shuts off the output, waiting for the next laser coupling test.

Claims

1. A test method for a coupling test system of a pulse-driven high-power semiconductor laser, characterized in that, The testing system includes a water-cooled metal plate, a pulse power supply, a power detection component, an industrial computer, and an optical platform. A water-cooled metal plate is set on the optical platform, and a laser is set on the water-cooled metal plate. The laser is connected to a pulse power supply. A power detection component is set on the optical platform on one side of the water-cooled metal plate. The power of the laser driven by the pulse power supply is tested through the power detection component. Both the pulse power supply and the power detection component are connected to an industrial control computer. The power detection component includes an integrating sphere, a photodetector, and a data acquisition device. One input end of the integrating sphere is connected to the optical fiber output end of the laser, and the other output end is connected to the photodetector via an optical fiber. The photodetector is connected to the data acquisition device. The test method for the coupling test system of the above-mentioned pulse-driven high-power semiconductor laser includes the following steps: (1) The water-cooled metal plate is circulated with the plant water for cooling, and the laser is fixed on the water-cooled metal plate; (2) Insert the fiber optic output end of the laser into the input end of the integrating sphere; (3) Connect the output terminal of the pulse power supply to the positive and negative terminals of the power-on needle of the laser; (4) Use an industrial control computer to control the pulse power supply to increase the output current to the working current in ramp mode. At this time, the integrating sphere synchronously receives the laser and transmits the optical signal to the photodetector through the optical fiber. The photodetector converts the optical signal into a standard electrical signal and then sends it to the data acquisition device. The data acquisition device transmits the data to the industrial control computer, which reads it and visualizes it on the display. (5) Continuously adjust the mirror coupling of one optical path of the laser. After the power test value is at its maximum, stop the operation, fix the mirror position, record and store the maximum effective power. (6) Keep the current power-on state and repeat step (5) until the mirror coupling power test of the remaining optical path of the laser is completed. The power detection component linearly superimposes and calculates the mirror coupling power of all optical paths to determine whether the mirror coupling power of each optical path of the laser is qualified and whether the sum of the superimposed output power of all optical paths meets the standard. (7) After the coupling test is completed, the industrial control computer controls the pulse power supply to automatically reduce the output current to 0, and then shuts off the output, waiting for the next laser coupling test.

2. The test method of the coupling test system for pulse-driven high-power semiconductor lasers as described in claim 1, characterized in that, The water-cooled metal plate is a rectangular metal plate, and a supply and return water pipeline is installed inside the water-cooled metal plate. The supply and return water pipeline is connected to the plant water pipeline through the supply and return water ball valve.

3. The test method of the coupling test system for pulse-driven high-power semiconductor lasers as described in claim 2, characterized in that, The pulse power supply is connected to the positive and negative terminals of the laser's power-on needle.

4. The test method of the coupling test system for pulse-driven high-power semiconductor lasers as described in claim 3, characterized in that, The industrial computer is connected to a monitor.

Images