An optical device coupling test apparatus and method

Abstract

The application discloses an optical device coupling test device and method, and belongs to the technical field of optical coupling test, which comprises a coupler, the light outlet of the coupler is arranged towards the chip light port, and a containing gap is left between the light outlet of the coupler and the chip light port; a liquid outlet assembly, the liquid outlet of the liquid outlet assembly is arranged towards the containing gap; a temperature adjusting assembly, the temperature adjusting assembly is connected with the liquid outlet assembly, and is used for adjusting the temperature of the matching liquid sprayed from the liquid outlet of the liquid outlet assembly; and a source table, the source table is electrically connected with the chip, and is used for sensing the light signal intensity on the chip. The application forms flowing matching liquid between the coupler and the chip, changes the temperature of the matching liquid by using the temperature adjusting assembly, realizes the change of the refractive index of the matching liquid, can simulate the working condition of the chip in the use state, does not need to frequently replace the matching liquid to obtain the optimal refractive index matched with the chip, reduces the test times, and improves the experimental efficiency.

Description

Technical Field

[0001] This invention belongs to the field of optical coupling testing technology, specifically relating to an optical device coupling testing apparatus and method. Background Technology

[0002] In the performance screening and testing of optical chips, optical coupling is the most commonly used method. The optical test results are used to perform preliminary screening of the chips, preventing defective chips from being assembled into products and causing overall product failure.

[0003] In the testing of optical chips, it is necessary not only to obtain the chip's performance parameters but also to avoid affecting its subsequent use. The optical port structure of the chip is very fragile, and no contamination can be introduced during testing; therefore, optical testing of chips is usually non-contact. During optical chip testing, the coupler must not touch the chip; it must be spatially aligned with the chip's optical port and maintain a certain gap. Light exiting the coupler first enters the air and then enters the chip's optical port from the air. Regarding this process of light entering the air from the coupler and then entering the chip's optical port, due to the principle of reflection, the large difference in refractive index between silicon dioxide and air causes some light to be reflected back at the interface between the coupler and air, and at the interface between air and chip, preventing it from entering the chip and causing light loss. To minimize light loss in the product, a refractive index matching fluid is filled between the coupler and the chip's optical port during actual use to reduce light loss. This results in a difference between the light loss during chip-level testing and the light loss during actual chip use.

[0004] To address the issue that chip testing data cannot directly reflect the true condition of the product, leading to misjudgments during chip screening and resulting in product scrap, a matching fluid can be directly used during chip testing. This matching fluid fills the gap between the coupler and the chip's optical port. The purpose of the matching fluid is to ensure that the refractive index of the medium between the coupler and the chip's optical port is close to the refractive index of the optical port or coupler. Differences in the optical port structure, materials, and mode fields of different silicon photonic chips mean that each chip has different refractive index requirements for the matching fluid. This necessitates using different refractive index matching fluids for each chip test, requiring multiple tests to find a matching fluid with a similar refractive index to the chip, significantly increasing the complexity of optical testing. Furthermore, cleaning the matching fluid is difficult, and each matching fluid experiment consumes one chip, resulting in substantial waste of test chips. Summary of the Invention

[0005] In view of one or more of the above-mentioned defects or improvement needs of the prior art, the present invention provides an optical device coupling test method to solve the problem that the matching fluid needs to be constantly replaced to adapt to the refractive index of the chip optical port during the existing optical device coupling test process.

[0006] To achieve the above objectives, the present invention provides an optical device coupling test apparatus for testing the optical signal intensity of a chip, comprising:

[0007] A coupler for emitting optical signals, wherein the output port of the coupler is oriented toward the optical port of the chip, and a accommodating gap is provided between the output port of the coupler and the optical port of the chip;

[0008] A liquid dispensing assembly for dispensing a matching liquid, wherein the liquid outlet of the liquid dispensing assembly is positioned toward the receiving gap;

[0009] A temperature regulating component, which is connected to the liquid outlet component, is used to adjust the temperature of the matching liquid sprayed from the liquid outlet of the liquid outlet component;

[0010] A source meter, which is electrically connected to the chip, is used to sense the intensity of the optical signal on the chip.

[0011] As a further improvement of the present invention, it also includes a first recovery component, which is used to absorb the matching liquid sprayed out by the liquid outlet component;

[0012] The first recovery component and the liquid outlet component are disposed opposite to each other, and the first recovery component and the liquid outlet component are respectively disposed on both sides of the receiving gap to form a stable matching liquid flow at the receiving gap.

[0013] As a further improvement of the present invention, it also includes a cleaning fluid assembly and a second recovery assembly, wherein the outlet of the cleaning fluid assembly is disposed toward the receiving gap for spraying cleaning fluid to clean the chip and the coupler;

[0014] The second recovery component is disposed opposite to the cleaning fluid component and is used to recover the cleaning fluid.

[0015] As a further improvement of the present invention, it also includes an outlet pipe and a recovery pipe;

[0016] One end of the liquid outlet pipe is positioned towards the receiving gap, and the other end of the liquid outlet pipe is connected to the liquid outlet assembly and the cleaning liquid assembly respectively through branch pipes;

[0017] One end of the recycling pipe is positioned towards the receiving gap, and the other end of the recycling pipe is connected to the first recycling component and the second recycling component respectively through a branch pipe.

[0018] As a further improvement of the present invention, a temperature sensing component is also included, wherein the temperature sensing end of the temperature sensing component is disposed toward the receiving gap, and when the matching liquid is sprayed out by the liquid dispensing device, the temperature sensing end of the temperature sensing component extends into the matching liquid.

[0019] As a further improvement of the present invention, a control component is also included, which is electrically connected to the temperature measuring component and the temperature regulating component respectively; the control component is used to receive the temperature measured by the temperature measuring component and adjust the temperature of the temperature regulating component.

[0020] This application also includes a method for testing the coupling of optical devices, comprising the following steps:

[0021] Set up a coupler, adjust the optical port of the chip and / or the output port of the coupler to align the optical path between the output port of the coupler and the optical port of the chip, and reserve a accommodating gap between the output port of the coupler and the optical port of the chip.

[0022] A liquid outlet component is provided, which continuously sprays matching liquid towards the receiving spike, so that the matching liquid covers the optical port of the chip and the optical port of the coupler, and the matching liquid covers the optical path between the optical port of the chip and the optical port of the coupler.

[0023] The coupler emits an optical signal, the chip receives the optical signal, and the intensity of the received optical signal is detected by the chip.

[0024] Adjust the temperature of the matching liquid ejected from the liquid outlet assembly, continuously monitor the intensity of the light signal received by the chip, and obtain the maximum light signal intensity of the chip.

[0025] As a further improvement of the present invention, after providing the liquid outlet component, it also includes:

[0026] A first recovery component is set up to absorb the matching liquid sprayed out by the liquid output component, so that a continuous and stable matching liquid flow is formed between the chip optical port and the coupler optical port.

[0027] As a further improvement of the present invention, the rate at which the liquid outlet component sprays out the matching liquid is the same as the rate at which the first recovery component absorbs the matching liquid.

[0028] As a further improvement of the present invention, after obtaining the maximum optical signal intensity of the chip, a cleaning step is also included:

[0029] Spray cleaning fluid toward the gap, using the flowing cleaning fluid to cover the chip's optical port and the coupler's output port.

[0030] The aforementioned improved technical features can be combined with each other as long as they do not conflict with each other.

[0031] In summary, the beneficial effects of the above-described technical solutions conceived by this invention compared with the prior art include:

[0032] (1) The optical device coupling test device of the present invention sets up a liquid outlet component and a first recovery component between the chip and the coupler, and uses the liquid outlet component and the first recovery component to form a flow state match at the accommodating gap, and changes the refractive index of the matching liquid by changing the temperature of the matching liquid, thereby achieving the matching of the refractive index of the chip and the matching liquid. When the source meter detects the light signal intensity as the highest value, it represents the best refractive index match between the matching liquid and the chip, and the light signal intensity of the chip measured at this time can reflect the light loss rate of the chip. By comparing the measured best light signal intensity with the standard test light signal intensity, it can be determined whether the chip is qualified.

[0033] (2) The optical device coupling test device of the present invention is provided with a cleaning liquid component and a second recovery component. The cleaning liquid sprayed by the cleaning liquid component cleans the optical port of the chip and the optical output port of the coupler. Compared with the traditional coupling test method, the test device in this application does not need to completely cover the chip with cleaning liquid. The smaller cleaning area makes the spraying method of the cleaning liquid component possible, which greatly reduces the consumption of cleaning liquid, is easy to clean, and does not cause the chip to be corroded by the matching liquid in the traditional method.

[0034] (3) The optical device coupling test device of the present invention sets up a temperature measuring component and a temperature regulating component, and controls the two through a control component. The temperature of the matching liquid at the accommodating gap is known in real time through the control component, and then the refractive index of the matching liquid is known. The temperature regulating component is adjusted by feedback through the control component to change the temperature of the matching liquid so as to adjust the matching liquid to a suitable refractive index.

[0035] (4) The optical device coupling test method of the present invention, compared with the conventional test method without matching liquid, reduces the measured optical loss of the chip by 1~2dB, and the test state of the chip is the same as the actual use state, which can directly represent the performance of the chip itself, and can greatly improve the accuracy of the chip performance measured by the test method. At the same time, by adjusting the temperature of the matching liquid to change the refractive index of the matching liquid, the refractive index of the matching liquid is adjusted to the optimal value that is compatible with the refractive index of the chip through temperature change, thereby obtaining the optical loss performance of the chip in actual use. This test method does not require frequent replacement of the matching liquid to obtain the optimal refractive index that matches the chip, reducing the number of tests and improving experimental efficiency. At the same time, the matching liquid only simply wets the optical port of the chip and the light output port of the coupler. The area of ​​the matching liquid adhering to the chip is small, which facilitates the cleaning of the chip and will not cause chip scrapping. Attached Figure Description

[0036] Figure 1 This is a schematic diagram of the overall structure of the optical device coupling test device in an embodiment of the present invention;

[0037] Figure 2 This is a linear relationship graph between the refractive index of the matching liquid and temperature in an embodiment of the present invention;

[0038] Figure 3 This is a schematic diagram of the optical device coupling test method in an embodiment of the present invention.

[0039] In all the accompanying drawings, the same reference numerals denote the same technical features, specifically:

[0040] 1. Chip; 2. Liquid dispensing assembly; 3. Temperature control assembly; 4. Source meter; 5. First recovery assembly; 6. Cleaning fluid assembly; 7. Second recovery assembly; 8. Liquid dispensing pipe; 9. Recovery pipe; 10. Optical fiber; 11. Light source; 12. Thermocouple probe; 13. Temperature measuring instrument; 14. Control assembly. Detailed Implementation

[0041] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the invention. Furthermore, the technical features involved in the various embodiments of this invention described below can be combined with each other as long as they do not conflict with each other.

[0042] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0043] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this invention, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0044] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0045] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "over," and "on top" of the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0046] Example:

[0047] Please see Figures 1-3 In a preferred embodiment of the present invention, the optical device coupling test apparatus is mainly used to test the light output parameters of chip 1. It includes a coupler, which is mainly used to emit light signals. The light output port of the coupler is positioned facing the light port of chip 1. After receiving the light signal, chip 1 converts the corresponding intensity of the light signal into different magnitudes of current or voltage intensity. Simultaneously, a accommodating gap is provided between the light output port of the coupler and the light port of chip 1. The existence of the accommodating gap is to avoid direct contact between the coupler and the light port of chip 1, which could damage the light port structure of chip 1 or cause contamination by external impurities. Furthermore, this application also includes a liquid dispensing component 2 and a first recovery component 5. The liquid dispensing component 2 has its liquid outlet facing the accommodating gap, and this liquid dispensing component 2 is used to spray out and cover the matching liquid. The gap between the light output port of the coupler and the light output port of the chip 1 is filled with matching liquid. The recovery port of the first recovery component 5 is arranged opposite to the liquid output port to recover the matching liquid sprayed from the liquid output port. Through the relative arrangement of the liquid output component 2 and the first recovery component 5, the gap between the light output port of the coupler and the light output port of the chip 1 is filled with continuously flowing matching liquid. Furthermore, the liquid output component 2 is also connected to a temperature regulation component 3, which is used to regulate the temperature of the matching liquid sprayed from the liquid output component 2. By adjusting the temperature of the matching liquid, the refractive index of the matching liquid is changed to meet the different refractive index requirements of different chips 1. The source meter 4 is electrically connected to the chip 1 and is used to sense the intensity of the light signal received by the chip 1.

[0048] This application sets up a liquid outlet component 2 and a first recovery component 5 between the chip 1 and the coupler. The liquid outlet component 2 and the first recovery component 5 form a matching liquid in a flowing state at the accommodating gap. By changing the temperature of the matching liquid, the refractive index of the matching liquid is changed, thereby achieving the matching of the refractive index of the chip 1 and the matching liquid. When the light signal intensity detected by the source meter 4 is the highest value, it represents the best refractive index matching between the matching liquid and the chip 1. The light signal intensity of the chip 1 measured at this time can reflect the light loss rate of the chip 1. By comparing the light signal intensity measured at this time with the standard test light signal intensity, it can be determined whether the chip 1 is qualified.

[0049] Preferably, the optical device coupling test apparatus in this application can also be used for coupling tests of other optical devices besides chip 1.

[0050] Furthermore, as a preferred embodiment of the present invention, the coupler in this application includes a light source 11 and an optical fiber 10. The light source 11 is a light-emitting device capable of emitting light. One end of the optical fiber 10 is connected to the light source 11, and the other end is positioned towards the optical port of the chip 1, used to guide the light emitted by the light source 11 to the optical port of the chip 1. The coupler in this application can be a light emitting device or a light guiding device. It can be in the form of connecting the light source 11 to the optical fiber 10, simply by aligning the light outlet of the optical fiber 10 with the optical port of the chip 1. It is worth noting that when the light source 11 is used in conjunction with the optical fiber 10, the optical fiber 10 will be washed by the flowing matching fluid, causing the end of the optical fiber 10 to shake, affecting the light receiving efficiency of the optical port of the chip 1. Therefore, an additional fixing device is required to clamp the end of the optical fiber 10 to fix the end of the optical fiber 10 facing the optical port of the chip 1.

[0051] Furthermore, as a preferred embodiment of the present invention, the optical device coupling test apparatus of this application further includes a cleaning fluid assembly 6. The outlet of the cleaning fluid assembly 6 is also positioned facing the receiving gap. The cleaning fluid assembly 6 can spray cleaning fluid to clean the optical port of the chip 1. Since the outlet assembly 2 and the first recovery assembly 5 of this application are positioned at the receiving gap, the matching fluid flowing out from the outlet assembly 2 will not cover a large area of ​​the chip 1 as in conventional testing, thus preventing corrosion of the chip 1 circuit board or making it difficult to clean. In actual testing, the end of the optical fiber 10 is close to the optical port of the chip 1, and the width of the receiving gap between them is usually only 10~20μm. The amount of matching fluid required to cover this gap width is very small. When the matching fluid flowing out from the outlet of the outlet assembly 2 comes into contact with the end of the optical fiber 10 and the end face of the optical port of the chip 1, due to capillary effect, the matching fluid will fill the space between the optical fiber 10 and the optical port of the chip 1. Due to the surface tension of the liquid, the matching fluid will accumulate at the optical port of fiber 10 and chip 1, thus covering the optical transmission path between them to simulate the actual application of chip 1 and obtain its actual coupling parameters. This also reduces the amount of matching fluid required between fiber 10 and chip 1, as the cleaning fluid component 6 can be used to clean the matching fluid.

[0052] Preferably, the optical device coupling test device further includes a second recovery component 7, the recovery port of the second recovery component 7 is also arranged facing the receiving gap, so that the cleaning fluid can be directly recovered after rinsing the optical port of the chip 1, avoiding the problem of the cleaning fluid escaping everywhere.

[0053] Furthermore, as a preferred embodiment of the present invention, since this application involves a liquid dispensing component 2, a first recovery component 5, a cleaning fluid component 6, and a second recovery component 7, the liquid dispensing / recovery ports of all four devices are concentrated at the receiving gap. The spraying of the matching fluid and the spraying of the cleaning fluid do not occur simultaneously; one occurs during the testing phase, and the other during the cleaning phase. To avoid excessive pipe accumulation at the receiving gap, this application provides a liquid dispensing pipe 8 and a recovery pipe 9, respectively. One end of the liquid dispensing pipe 8 faces the receiving gap, and the other end is connected to the liquid dispensing component 2 and the cleaning fluid component 6 via branch pipes. Valves are provided at the outlets of the liquid dispensing component 2 and the cleaning fluid component 6 to control their spraying time and spraying rate. Correspondingly, one end of the recovery pipe 9 faces the receiving gap, and the liquid dispensing pipe 8 and the recovery pipe 9 are coaxially arranged. The end of the recovery pipe 9 facing away from the receiving gap is connected to the first recovery component 5 and the second recovery component 7 via branch pipes. Valves are provided at the inlets of the first recovery component 5 and the second recovery component 7 to control their opening and closing. In actual operation, the liquid dispensing component 2 is used in pairs with the first recovery component 5, and the cleaning liquid component 6 and the second recovery component 7 are used in pairs. The liquid dispensing rate of the liquid dispensing component 2 is the same as the absorption rate of the first recovery component 5. This makes the matching liquid in the accommodating gap in a dynamic equilibrium state, which will not contaminate other parts of the chip 1 over a large area, and will also ensure that the matching liquid covers the optical path between the optical fiber 10 and the optical port of the chip 1, thus ensuring the accuracy of the test results.

[0054] Furthermore, as a preferred embodiment of the present invention, the optical device coupling test device in this application further includes a temperature measuring component, which includes a thermocouple probe 12 and a thermometer 13. The end of the thermocouple probe 12 is also positioned facing the receiving gap, and it is used to extend into the matching liquid to sense the temperature of the matching liquid after it has been adjusted by the temperature regulating component 3. Then, the refractive index of the matching liquid is obtained through the linear relationship graph between the matching liquid and the temperature. In this case, the matching liquid is polyurethane acrylate, such as... Figure 2 As shown. (Through) Figure 2 It can be seen that the matching liquid is basically linearly related to temperature, and the increase or decrease of refractive index can be predicted by raising or lowering the temperature.

[0055] Furthermore, both the temperature measuring component and the temperature regulating component 3 are regulated by the control component 14. The temperature measuring component and the temperature regulating device are electrically connected to the control component 14. The temperature of the matching liquid sensed by the thermocouple probe 12 is transmitted to the control component 14, which then controls the temperature regulating component 3 based on the sensed temperature. The temperature regulating component 3 adjusts the temperature accordingly to regulate the refractive index of the matching liquid. Preferably, the control component 14 can be a computer or other control output device.

[0056] Furthermore, in a preferred embodiment of the present invention, the aforementioned source meter 4 does not directly sense the intensity of the light signal received by chip 1. Typically, chip 1 contains a PD (photodiode) component, which converts the intensity of the light signal received at the optical port of chip 1 into voltage or current intensity. The source meter 4 then senses the voltage or current intensity of chip 1, and by determining whether the voltage or current intensity is within the standard range, it is determined whether chip 1 meets the standard. Correspondingly, the aforementioned source meter 4 can be a voltmeter or an ammeter. When the source meter 4 is an ammeter, the ammeter is connected to a probe electrically connected to chip 1. The probe senses the current intensity of chip 1, which is displayed on the ammeter. The tester uses the current intensity displayed on the ammeter to determine whether chip 1 is qualified.

[0057] Furthermore, addressing the difficulty of coupling testing of existing chips, this application also includes a method for coupling testing of optical devices, specifically comprising the following steps:

[0058] Set up a coupler, adjust the optical port of chip 1 and / or the output port of the coupler so that the optical path between the output port of the coupler and the optical port of chip 1 is aligned, and reserve a accommodating gap between the output port of the coupler and the optical port of chip 1.

[0059] The liquid outlet component 2 is provided. The liquid outlet component 2 continuously sprays matching liquid towards the accommodating gap, so that the matching liquid covers the optical port of chip 1 and the optical port of coupler, and the matching liquid covers the optical path between the optical port of chip 1 and the optical port of coupler.

[0060] The coupler emits an optical signal, and chip 1 receives the optical signal and detects the intensity of the received optical signal. Specifically, the intensity of the received optical signal is converted by the PD component inside the chip 1. The optical signal intensity is converted into an electrical signal intensity, and then the voltage or current intensity is sensed by the source meter 4 to obtain the optical loss of chip 1.

[0061] The temperature of the matching liquid ejected from the liquid outlet assembly 2 is adjusted, and the intensity of the light signal received by the chip 1 is continuously monitored to obtain the maximum light signal intensity that the chip 1 can obtain. Specifically, the temperature adjustment of the matching liquid ejected from the liquid outlet assembly 2 is achieved through a temperature regulating component 3. This temperature regulating component 3 can heat or cool the liquid accordingly, so that the temperature of the matching liquid ejected from the liquid outlet assembly 2 changes accordingly. Optionally, the temperature regulating component 3 can be set separately from the liquid outlet assembly 2, and the temperature of the matching liquid flowing through the receiving gap is changed by the temperature regulating component 3. The temperature regulating component 3 can also be set integrally with the liquid outlet assembly 2, as long as it can achieve the heating or cooling of the matching liquid.

[0062] Furthermore, as a preferred embodiment of the present invention, the accommodating gap distance between the light output port of the coupler and the light port of chip 1 is 10~20μm. This gap distance is the commonly used distance between the light output port of the coupler and the light port of chip 1 during the coupling test of chip 1, and this distance allows the matching liquid sprayed by the liquid dispensing component 2 to fully cover the accommodating gap, which is convenient for simulating the optical signal reception of chip 1 in use.

[0063] Furthermore, as a preferred embodiment of the present invention, the optical device coupling test method in this application, after setting the liquid outlet component 2, further includes:

[0064] A first recovery component 5 is provided, which absorbs the matching liquid sprayed out by the liquid output component 2, so that a continuous and stable matching liquid flow is formed between the optical port of chip 1 and the optical output port of coupler.

[0065] Furthermore, as a preferred embodiment of the present invention, the optical device coupling test method in this application further includes, after the liquid outlet component 2 continuously ejects the matching liquid, the following steps:

[0066] The temperature of the matching liquid at the accommodating gap is detected, and the temperature of the matching liquid ejected by the liquid ejection component 2 is adjusted according to the detected temperature of the matching liquid. The temperature of the matching liquid ejected is stabilized when the chip 1 receives the maximum light signal intensity.

[0067] Furthermore, as a preferred embodiment of the present invention, the rate at which the liquid outlet component 2 ejects the matching liquid is the same as the rate at which the first recovery component 5 absorbs the matching liquid. During actual testing, to avoid excessive mixing of the matching liquid with other parts of the chip 1 or insufficient matching liquid causing flow interruption, it is necessary to ensure that the rate at which the liquid outlet component 2 ejects the matching liquid is the same as the recovery efficiency of the first recovery component 5, thus maintaining a dynamic equilibrium. Simultaneously, the matching liquid in this dynamic equilibrium state is homogeneous and will not experience refractive index changes due to its flow state, making the testing conditions of the chip 1 closely resemble its actual usage. Moreover, the flow state of the matching liquid ensures that the matching liquid flowing from the liquid outlet component 2 is continuously heated or cooled by the temperature regulation component 3. Even if the matching liquid in the containment gap loses heat due to external environmental factors, the continuous output of the matching liquid after heating or cooling by the subsequent temperature regulation component 3 maintains a balanced temperature for the matching liquid in the containment gap. Furthermore, by detecting the temperature of the matching liquid at the accommodating gap, the refractive index of the matching liquid at the corresponding temperature can be determined. Regardless of whether the temperature regulating component 3 itself is heated or cooled, as long as the temperature of the matching liquid at the accommodating gap corresponds to the optimal refractive index that matches the chip 1, it is acceptable.

[0068] Furthermore, to prevent the matching fluid from overflowing everywhere and to ensure that the matching fluid completely covers the accommodating gap, the vertical distance between the outlet of the liquid outlet assembly 2 and the optical path formed between the chip 1 and the coupler is 0.1~0.15mm.

[0069] Furthermore, the matching fluid mentioned above is polyurethane acrylate or polydimethylsiloxane. Of course, in addition to the above-mentioned matching fluid, other fluid substances whose refractive index changes with temperature can also be used as the matching fluid.

[0070] Furthermore, the cleaning solution mentioned above is alcohol, acetone, or deionized water, etc.

[0071] Furthermore, the optical device coupling test method in this application also includes a cleaning step after the test is completed:

[0072] Spray cleaning fluid toward the gap to clean the optical port of chip 1 and the output port of the coupler using the flowing cleaning fluid.

[0073] Polyurethane acrylate was selected as the matching solution, and conventional chip 1 was used for testing. The table below shows the current values ​​obtained by adjusting the source table 4 at different temperatures:

[0074]

[0075] As shown in the table above, the measured photoresponse current value is the highest, 230.7uA, when the matching liquid temperature is 65℃. This indicates that the refractive index of the matching liquid at 65℃ is the optimal refractive index for matching chip 1. The photoresponse current measured at this temperature represents the optical signal reception of chip 1 under optimal operating conditions, thus revealing its actual optical loss.

[0076] Compared to conventional testing methods that do not use matching fluid, the optical device coupling testing method in this application reduces the optical loss of chip 1 by 1-2 dB. Furthermore, the tested state of chip 1 is identical to its actual usage state, directly representing the performance of chip 1 itself and significantly improving the accuracy of the measured chip 1 performance. Simultaneously, by adjusting the temperature of the matching fluid to change its refractive index, the method optimizes the refractive index of the matching fluid to match the refractive index of chip 1, thereby obtaining the optical loss performance of chip 1 under actual usage conditions. This testing method eliminates the need for frequent replacement of the matching fluid to obtain the optimal refractive index matching chip 1, reducing the number of tests and improving experimental efficiency. Moreover, the matching fluid only briefly wets the optical port of chip 1 and the output port of the coupler, resulting in a small area of ​​matching fluid adhering to chip 1, facilitating cleaning and preventing chip 1 from being rendered unusable.

[0077] Those skilled in the art will readily understand that the above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. An optical device coupling test apparatus for testing the optical signal intensity of a chip, characterized in that, include: A coupler for emitting optical signals, wherein the output port of the coupler is oriented toward the optical port of the chip, and a accommodating gap is provided between the output port of the coupler and the optical port of the chip; A liquid dispensing assembly for dispensing a matching liquid, wherein the liquid outlet of the liquid dispensing assembly is positioned toward the receiving gap; A temperature regulating component, which is connected to the liquid outlet component, is used to adjust the temperature of the matching liquid sprayed from the liquid outlet of the liquid outlet component; A source meter, electrically connected to the chip, is used to sense the intensity of the light signal on the chip; a first recovery component is used to absorb the matching liquid sprayed out by the liquid outlet component. The first recovery component and the liquid outlet component are disposed opposite to each other, and the first recovery component and the liquid outlet component are respectively disposed on both sides of the receiving gap to form a stable matching liquid flow at the receiving gap.

2. The optical device coupling test apparatus according to claim 1, characterized in that, It also includes a cleaning fluid assembly and a second recovery assembly. The outlet of the cleaning fluid assembly is arranged facing the receiving gap for spraying cleaning fluid to clean the chip and the coupler. The second recovery component is disposed opposite to the cleaning fluid component and is used to recover the cleaning fluid.

3. The optical device coupling test apparatus according to claim 2, characterized in that, It also includes an outlet pipe and a recovery pipe; One end of the liquid outlet pipe is positioned towards the receiving gap, and the other end of the liquid outlet pipe is connected to the liquid outlet assembly and the cleaning liquid assembly respectively through branch pipes; One end of the recycling pipe is positioned towards the receiving gap, and the other end of the recycling pipe is connected to the first recycling component and the second recycling component respectively through a branch pipe.

4. The optical device coupling test apparatus according to claim 1, characterized in that, It also includes a temperature sensing component, the temperature sensing end of which is positioned toward the receiving gap, and when the matching liquid is sprayed out by the liquid outlet device, the temperature sensing end of the temperature sensing component extends into the matching liquid.

5. The optical device coupling test apparatus according to claim 4, characterized in that, It also includes a control component, which is electrically connected to the temperature measuring component and the temperature regulating component respectively; the control component is used to receive the test temperature from the temperature measuring component and adjust the temperature of the temperature regulating component.

6. A method for testing the coupling of optical devices, characterized in that, The test is performed using the optical device coupling test apparatus described in any one of claims 1 to 5, and includes the following steps: Set up a coupler, adjust the optical port of the chip and / or the output port of the coupler to align the optical path between the output port of the coupler and the optical port of the chip, and reserve a accommodating gap between the output port of the coupler and the optical port of the chip. A liquid outlet component is provided, which continuously sprays matching liquid towards the receiving spike, so that the matching liquid covers the optical port of the chip and the optical port of the coupler, and the matching liquid covers the optical path between the optical port of the chip and the optical port of the coupler. The coupler emits an optical signal, the chip receives the optical signal, and the intensity of the received optical signal is detected by the chip. Adjust the temperature of the matching liquid ejected from the liquid outlet assembly, continuously monitor the intensity of the light signal received by the chip, and obtain the maximum light signal intensity of the chip.

7. The optical device coupling test method according to claim 6, characterized in that, After setting up the liquid outlet assembly, the following is also included: A first recovery component is set up to absorb the matching liquid sprayed out by the liquid output component, so that a continuous and stable matching liquid flow is formed between the chip optical port and the coupler optical port.

8. The optical device coupling test method according to claim 7, characterized in that, The rate at which the liquid outlet component sprays out the matching liquid is the same as the rate at which the first recovery component absorbs the matching liquid.

9. The optical device coupling test method according to claim 6, characterized in that, After obtaining the maximum optical signal intensity of the chip, a cleaning step is also included: Spray cleaning fluid toward the gap, using the flowing cleaning fluid to cover the chip's optical port and the coupler's output port.

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