Lens debugging method

By using collimated light sources and semi-transparent half-mirrors in lens debugging, adjusting the reflection and transmission spots of the lens overlap with the spots of the collimated light sources, solving the problem of low coaxiality of multi-lens adjustment, achieving efficient and accurate lens debugging.

CN116300128BActive Publication Date: 2025-08-05ANHUI CHUANGPU INSTR TECH CO LTD
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Patent Information

Application Number
CN202310081134.X
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2023-01-16
Publication Date
2025-08-05
Estimated Expiration
2043-01-16

AI Technical Summary

Technical Problem

The prior art is difficult to efficiently adjust two or more lenses to the coaxial state, and optical system debugging is complicated.

Method used

The collimated light source debugging method is adopted, and the lens posture is adjusted by setting a semi-transparent and half-mirror, so that the reflective and transmitted light spots of the lens coincide with the reflected light spots of the collimated light source, ensuring that the optical axis of the lens coincides with the outgoing light of the collimated light source.

Benefits of technology

Efficient debugging of various lens combinations is achieved, ensuring that the two lenses are coaxial and centered together, and improving collimation accuracy.

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Abstract

The present invention belongs to the field of optical system debugging technology, and particularly relates to a lens debugging method. The method involves first debugging a collimated light source so that its emitted visible collimated light is horizontally arranged and close to the center of a lens mounting hole on a lens mounting base. The lenses are then sequentially adjusted so that their optical axes coincide with the collimated light source. The method can efficiently debug various lens combinations, ensuring that the two lenses are coaxial and aligned, with high collimation accuracy.
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Description

Technical Field

[0001] The invention belongs to the technical field of optical system debugging, and in particular relates to a lens debugging method. Background Art

[0002] Determining the optical axis of the lens is very important in the use of the lens. Chinese patent CN104483740A discloses a method for precise axis determination of a coaxial lens, which uses a collimated light source as a reference to perform coarse adjustments on the lens, standard mirror, and internal focusing telescope, and then adjusts the translation and rotation angle of the internal focusing telescope or adjusts the translation and rotation angle of the coaxial lens, so that the cross-wire images reflected back from the front and back surfaces of the coaxial lens coincide with the inherent self-collimating cross-wires in the internal focusing telescope, that is, the axis of the internal focusing telescope is coupled with the optical axis of the coaxial lens, thereby achieving coaxial lens axis determination, so that the lens axis determination accuracy is consistent with the accuracy of the internal focusing telescope. This method can determine the optical axis of a single lens, however, when two or more lenses in an optical system need to maintain a coaxial state and displace, it is inconvenient to use this method to verify the coaxiality of the lens after displacement, and the debugging of the optical system is cumbersome. Summary of the Invention

[0003] The object of the present invention is to provide a lens debugging method which can efficiently adjust two lenses to be coaxial.

[0004] To achieve the above objectives, the technical solution adopted by the present invention is:

[0005] A lens debugging method comprises the following steps:

[0006] Step 1: Adjust the collimated light source so that the visible collimated light emitted by it is arranged horizontally and close to the center of the lens mounting hole on the lens mounting seat;

[0007] Step 2: Assemble lens A on lens mount 1, and illuminate lens A with the outgoing light of the collimated light source.

[0008] A semi-transparent and semi-reflective mirror is set between lens A and the collimated light source, and the posture of lens A is adjusted so that the light spots reflected by its front and rear reflective surfaces coincide with the light spots reflected by the collimated light source on the semi-transparent and semi-reflective mirror.

[0009] A semi-transparent mirror is set on the side of lens A away from the collimated light source, and the posture of lens A is adjusted so that the transmitted light spot coincides with the reflected light spot of the collimated light source on the semi-transparent mirror.

[0010] At this point, the optical axis of lens A coincides with the outgoing light of the collimated light source;

[0011] Mount lens B on lens mount 2, and use the same method to adjust lens B so that it coincides with the outgoing light of the collimated light source.

[0012] Compared with the prior art, the present invention has the following technical effects: wide application range, can efficiently debug various lens combinations, ensure that the two lenses are coaxial and centered, and have high collimation accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] The following is a brief description of the contents and symbols in the drawings of this specification:

[0014] Figure 1 This is a schematic diagram of a side view of an embodiment when a theodolite is used to debug a collimated light source;

[0015] Figure 2 This is a schematic diagram of debugging a collimating light source using a level from a top-down perspective in Example 1;

[0016] Figure 3 This is a schematic diagram of debugging lens A from a top-down perspective in Example 1;

[0017] Figure 4 This is a schematic diagram of debugging lens B from a top-down perspective in Example 1;

[0018] Figure 5 This is a schematic diagram of the side view of the collimating light source during debugging in Example 2;

[0019] Figure 6 This is a schematic diagram of debugging the translation stage from a side perspective in Example 2;

[0020] Figure 7 This is a schematic diagram of debugging lens B from a top-down perspective in Example 2;

[0021] Figure 8 This is a schematic diagram of the second embodiment when a level is used to debug a collimating light source from a top-down perspective;

[0022] Figure 9 is a schematic diagram of a top view of the second embodiment;

[0023] Figure 10 It is a three-dimensional schematic diagram of the laser, the steering mirror and the reflecting mirror of the second embodiment. DETAILED DESCRIPTION

[0024] The specific implementation of the present invention will be further described in detail below through description of embodiments in conjunction with the accompanying drawings.

[0025] Example 1

[0026] In order to adjust the two lenses A and B in the optical system to be coaxial, the following debugging method is used:

[0027] Step 1: Use the theodolite 30 and the level 40 to debug the outgoing light of the collimating light source.

[0028] This embodiment is shown in the attached Figure 1 As shown, a collimated laser 31 of another theodolite is used as a collimated light source. A theodolite 30 is set up opposite the collimated light source and adjusted so that its observation surface is vertically positioned and close to the center of the lens mounting hole on the lens mount 10. In this embodiment, the lens mount 10 includes a first lens mount 11 and a second lens mount 12. During implementation, to facilitate observation and adjustment, a lens or baffle marking the center of the lens mounting hole of either lens mount 11 or lens mount 2 12 can be installed. The theodolite 30 is adjusted so that its observation surface is vertically positioned, and the crosshairs in the observation field of the theodolite 30 coincide with the hole center mark on the lens or baffle. A level 40 is set up next to the collimated light source and adjusted so that its observation surface is horizontally positioned and close to the center of the lens mounting hole on the lens mount 10. In specific implementation, a lens or baffle marking the hole center can be installed at the lens mounting hole of lens mounting seat 11 or lens mounting seat 2 12, and the level 40 can be adjusted so that its observation surface is arranged horizontally, and the cross hairs in the observation field of the level 40 are made to coincide with the hole center mark of the lens or baffle.

[0029] Then turn on the collimated light source and debug it.

[0030] When adjusting the horizontal deflection of the collimated light source, as shown in the attached Figure 1 As shown, a semi-transparent and semi-reflective mirror 21 is set on the front side of the direction of emission of the collimated light source, and the theodolite 30 is used to observe the light spot formed by the collimated light source on the semi-transparent and semi-reflective mirror 21. The posture of the collimated light source is adjusted. If the light spot does not shift in the horizontal direction when the semi-transparent and semi-reflective mirror 21 is moved forward and backward, it is determined that the emitted light of the collimated light source is parallel to the observation surface of the theodolite 30, that is, the emitted light of the collimated light source is located in the vertical plane. The front end and the front side here refer to the direction of emission of the light of the collimated light source, that is, the attached Figure 1 The left side, rear end, and back side refer to the opposite direction of the collimated light source, that is, the Figure 1 Right side shown.

[0031] When adjusting the vertical deflection of the collimated light source, as shown in the attached Figure 2 As shown, a semi-transparent and semi-reflective mirror 21 is set on the front side of the emitting direction of the collimated light source, and a level 40 is used to observe the light spot formed by the collimated light source on the semi-transparent and semi-reflective mirror 21, and the posture of the collimated light source is adjusted. If the light spot does not shift in the vertical direction when the semi-transparent and semi-reflective mirror 21 is moved back and forth, it is determined that the emitted light of the collimated light source is parallel to the observation surface of the level 40, that is, the emitted light of the collimated light source is located in the horizontal plane.

[0032] Since most lenses are circular, their optical axes are often located at the center of the circle. Therefore, to improve lens debugging efficiency, this embodiment synchronously adjusts the lens mount 10 when debugging the collimated light source, so that the centers of the lens mounting holes of lens mount 1 11 and lens mount 2 12 coincide with the emitted light of the collimated light source. Specifically, lenses with the centers of their lens mounting holes marked are installed on lens mount 1 11 and lens mount 2 12, respectively. While debugging the theodolite 30 and level 40, the lens mount 10 is simultaneously adjusted so that the centers of the lens mounting holes of the two lens mounts 10 coincide. This allows direct observation of the light spot illuminated by the collimated light source on the lens or baffle marked with the hole center when debugging the collimated light source. The collimated light source's position is adjusted based on the positional relationship between the light spot and the lens mounting hole center mark. Once the light spot illuminated by the collimated light source on the marked lens or baffle is at the hole center mark, the collimated light source is fine-tuned using the theodolite 30 and level 40. The outgoing light of the collimated light source obtained by debugging is arranged horizontally and passes through the centers of the lens mounting holes of the first and second lens mounting seats 11 and 12, and the centers of the lens mounting holes of the two lens mounting seats are coaxial and arranged horizontally.

[0033] The order of setting up the theodolite 30 and the level 40 can be reversed, as can the order of adjusting the lens mount 10 and the collimated light source, so as to obtain horizontally emitted collimated light, with the collimated light source being adjacent to or coinciding with the center of the lens mounting hole on the lens mount 10. For example, the above scheme first adjusts the two lens mounts 10 so that their lens mounting holes are coaxially arranged, then roughly adjusts the collimated light source based on the lens mounting hole center mark of the lens mount 10, and finally fine-tunes the collimated light source using the theodolite 30 and the level 40. In other embodiments, the collimated light source can also be first adjusted so that its emitted light spot illuminates the lens mounting hole center mark of lens mount 11 or lens mount 2 12, then fine-tunes the collimated light source using the theodolite 30 and the level 40 to ensure a horizontal arrangement, while the other lens mount 10 is adjusted to be coaxial with the first lens mount 10.

[0034] In this embodiment, the theodolite 30 is mounted in front of the collimated light source. In another embodiment, Figure 9 As shown, the theodolite 30 can also be set up on the rear side of the collimated light source. In this way, during debugging, an opaque element such as white paper or a baffle can be set in front of the direction of emission of the collimated light source. The theodolite 30 is used to observe the light spot formed by the collimated light source on the white paper or the baffle, and the posture of the collimated light source is adjusted until its emitted light is located in the vertical plane.

[0035] Step 2: Adjust lens A and lens B to be coaxial.

[0036] When lens A is mounted on lens mount 11, the light emitted by the collimated light source illuminates lens A, forming three light spots, namely the transmitted light spot, the reflected light spot on the front reflective surface, and the reflected light spot on the rear reflective surface. The front and rear directions mentioned here are consistent with the above, and the front end and the front side refer to the direction of light emission from the collimated light source, i.e. Figure 1 The left side, rear end, and back side refer to the opposite direction of the collimated light source, that is, the Figure 1 Right side shown.

[0037] As attached Figure 3 As shown, a semi-transparent mirror 21 is set between lens A and the collimated light source, and the posture of lens A is adjusted so that the reflected light spots on its front and rear reflecting surfaces coincide with the reflected light spots of the collimated light source on the semi-transparent mirror 21. Then, a semi-transparent mirror 21 is set on the side of lens A away from the collimated light source, and the posture of lens A is adjusted so that the transmitted light spot coincides with the reflected light spot of the collimated light source on the semi-transparent mirror 21. At this point, the optical axis of lens A coincides with the output light of the collimated light source. Of course, the above adjustment sequence can be reversed, that is, first setting the semi-transparent mirror 21 on the side of lens A away from the collimated light source, adjusting the transmitted light spot of lens A to coincide with the reflected light spot of the collimated light source, and then adjusting the reflected light spot of lens A to coincide with the reflected light spot of the collimated light source.

[0038] After lens A is debugged, Figure 4 As shown, lens B is mounted on lens mount 2 12 and adjusted using the same method to coincide with the outgoing light from the collimated light source. Specifically, a semi-transparent mirror 21 is placed between lens B and the collimated light source, and the position of lens B is adjusted so that the light spots reflected from its front and rear reflection surfaces coincide with the light spots reflected from the collimated light source on the semi-transparent mirror 21. Next, a semi-transparent mirror 21 is placed between lens B and lens A, and the position of lens B is adjusted so that the transmitted light spot coincides with the light spot reflected from the collimated light source on the semi-transparent mirror 21. At this point, the optical axes of lens A and lens B respectively coincide with the outgoing light from the collimated light source, and the optical axes of lens A and lens B are arranged so that they coincide with each other.

[0039] In this embodiment, lens A, which is arranged away from the collimated light source, is first debugged, and then lens B, which is arranged adjacent to the collimated light source, is debugged. In this way, before lens B is debugged to coincide with the collimated light source, the reflected light spot produced by the collimated light passing through lens B and irradiating lens A is relatively dim, making it easier to distinguish and identify from the reflected light spot of lens B. This can prevent the refraction or reflection of light by lens B from adversely affecting the debugging of lens A after the debugging of lens B is completed first.

[0040] Example 2

[0041] In this embodiment, lens A and lens B need to be displaced synchronously in the vertical direction. In order to achieve the synchronous displacement of the collimated light source and lens A and lens B, the collimated light source adopts a laser 50, and the laser 50 is arranged beside one end of the lens mounting seat 10. The output light of the laser 50 is reflected by the reflector 60 and then emitted to the side where the lens mounting seat 10 is located. Figure 5 As shown, the lens mounting seat 10 and the reflector 60 are respectively mounted on a working platform via a displacement stage 70 . The displacement stage 70 includes a fixed part 71 and a movable part 72 .

[0042] In order to verify whether the lens A and lens B maintain their coaxial posture after displacement, the collimated light source needs to be displaced synchronously with them. In other words, the reflector 60 or the reflector 60 and the laser 50 also need to be displaced synchronously with the lens A and lens B to obtain a stable and reliable optical path. Among them, the laser 50 is usually connected to the power supply or communication line, which is inconvenient to displace. Therefore, in this embodiment, as shown in the attached figure, Figure 10 As shown, the laser 50 is fixedly mounted on the workbench, a steering mirror 61 is set at the front end of the laser emission direction of the laser 50, and a vertically displaceable reflector 60 is set above the steering mirror 61. In this way, the steering mirror 61 can also be fixedly mounted on the workbench, and the visible collimated light emitted by the laser 50 is deflected by the steering mirror 61 and then emitted vertically upward, and then emitted to the side where the lens mounting seat is located through the reflector 60. See the attached Figure 10 As long as the output light from the steering mirror 61 is vertically arranged, and the reflector 60 is then moved vertically while maintaining its position, the desired collimated light source can be obtained that can be synchronously moved with lenses A and B. In other words, in step 1, the output direction of the collimated light source is actually adjusted by adjusting the steering mirror 61, the reflector 60, and the movable member 72 of the translation stage 70.

[0043] To ensure the synchronous displacement of lens A, lens B and reflector 60 in the vertical direction, in step 1, the theodolite 30 is also required to calibrate the posture of the moving parts 72 in each displacement platform 70 so that the displacement directions of the moving parts 72 are parallel. Figure 6The diagram shows a schematic diagram of the adjustment of the translation stage 70 of the lens mount 2 12. An observation mark is required on the movable member 72. During adjustment, by comparing the positional relationship between the observation mark and the crosshairs in the observation field of the theodolite 30 during or before and after the adjustment, it is possible to determine whether the displacement direction of the movable member 72 meets the requirements. In this embodiment, lenses A, B, and the reflector 60 need to be displaced in the vertical direction. The movable member 72 has a vertically arranged edge profile. In a specific implementation, this vertical edge profile is used as the observation mark. After the adjustment of the theodolite 30 is completed, that is, when the observation surface of the theodolite 30 is vertical and the movable member 72 to be adjusted is within its observation field, the position of the movable member 72 is adjusted so that the crosshairs in the observation field of the theodolite 30 and the observation mark on the movable member 72 always coincide with or are parallel before and after the adjustment of the movable member 72. This determines that the calibration of the translation stage 70 is complete. In order to improve the calibration accuracy of the translation stage 70, high-precision observation marks can be processed on the movable member 72. The observation marks can be vertical straight lines, spaced dot arrays, or parallel spaced lines. Other translation stages 70 can be calibrated using the same method. In other embodiments, if the movable member 72 is displaced horizontally, the horizontal edge contour of the movable member 72 can be used as the observation mark, and the level 40 can be used to calibrate the translation stage 70; if the movable member 72 is displaced obliquely, a high-precision observation mark can be set on the movable member 72. By comparing the observation mark with the position change of the crosshairs in the field of view of the theodolite 30 and the level 40 before and after the displacement of the movable member 72, it can be determined whether the displacement of the movable member 72 meets the requirements.

[0044] In step 1 of this embodiment, to simplify the adjustment process, the translation stage 70 is first calibrated, and then the lens mount 10 and collimated light source are debugged. After the collimated light source debugging is completed, the collimated light source is verified to see if it deviates before and after the displacement. The specific verification method is to drive the translation stage 70 of the reflector 60 to move a certain distance, and use the theodolite 30 to observe whether the visible collimated light is deflected in the vertical direction, and use the level 40 to observe whether the visible collimated light is deflected in the horizontal direction. If the collimated light is deflected, the position of the translation stage 70 and / or the reflector 60 is readjusted until the collimated light can be displaced while maintaining its output direction.

[0045] After completing the debugging in step 2, it is necessary to verify whether lenses A and B maintain a coaxial positional relationship after synchronous displacement. The verification and debugging are specifically performed using the following steps:

[0046] Step 31: drive each translation stage 70 to move in the same direction and the same distance.

[0047] Step 32: The distance between lens A and the collimated light source is greater than the distance between lens B and the reflector 60. A semi-transparent mirror 21 is set between lens A and lens B to determine whether the two reflected light spots of lens A, the transmitted light spot of lens B, and the reflected light spot of the collimated light source on the semi-transparent mirror 21 coincide with each other.

[0048] Step 33: If one light spot is misaligned, it is determined that lens B has shifted. First, use the theodolite 30 to calibrate the movable member 72 of the translation stage that drives the displacement of lens B. If the edge profile of the movable member 72 coincides with or is parallel to the vertical wire of the crosshairs in the field of view of the theodolite 30, adjust lens B to coincide with the output light of the collimated light source using the same method as in step 2. If the edge profile of the movable member 72 of the translation stage is at an angle to the vertical wire of the crosshairs in the field of view of the theodolite 30, recalibrate the translation stage 70, and then use the same method as in step 2 to adjust lens B to coincide with the output light of the collimated light source.

[0049] If the two light spots are misaligned, it is determined that lens A is offset. First, use the theodolite 30 to calibrate and calibrate the displacement stage movable member 72 that drives the displacement of lens A. Then, use the same method as step 2 to adjust lens A to coincide with the output light of the collimated light source.

[0050] If the four light spots are misaligned, it is determined that the reflector 60 is offset. The theodolite 30 is used to calibrate and calibrate the movable member 72 of the displacement stage that drives the reflector 60 to move, and then step 32 is repeated.

[0051] If the light spots overlap, it is determined that the optical axes of the two lenses and the collimated light source are still coincident, and the debugging is completed.

[0052] It should be noted that if Figure 7 In the illustrated embodiment, the laser 50 used is non-focusable. When debugging lenses A and B, due to the large distance between the two lenses, the spot size during debugging lens A is too large, resulting in insufficient debugging accuracy. Therefore, a collimated laser 31 from another theodolite is used as a collimated light source to debug lenses A and B. The collimated laser 31 of the theodolite allows for convenient focusing, facilitating the acquisition of the desired focused spot. However, the collimated laser 31 of the theodolite cannot shift synchronously with lenses A and B. Therefore, after the two lenses are adjusted to be coaxial, the laser 50 is used to perform a coaxial calibration on the displaced lenses A and B.

[0053] In order to further ensure the debugging accuracy, as shown in the attached Figure 8 In the embodiment shown, a focusable laser 50 is used, which can not only perform high-precision coaxial adjustment on the two lenses, but also complete high-precision coaxiality verification of the two lenses after the lens displacement. Figure 9 In the embodiment shown, the theodolite 30 is arranged at a position corresponding to the surrounding Figure 7 、 8The position shown is different. In this embodiment, the theodolite 30 is arranged behind the collimated light source.

Claims

1. A lens debugging method comprising the following steps: Step 1: Debug the collimated light source so that the visible collimated light emitted by it is arranged horizontally and close to the center of the lens mounting hole on the lens mounting seat (10); Step 2: First, assemble lens A on lens mount 1 (11), and let the outgoing light of the collimated light source illuminate lens A. A semi-transparent and semi-reflective mirror (21) is provided between the lens A and the collimated light source, and the posture of the lens A is adjusted so that the light spot reflected by the front reflecting surface and the light spot reflected by the rear reflecting surface coincide with the light spot reflected by the collimated light source on the semi-transparent and semi-reflective mirror (21). A semi-transparent and semi-reflective mirror (21) is provided on the side of the lens A away from the collimated light source, and the posture of the lens A is adjusted so that the transmitted light spot thereof coincides with the reflected light spot of the collimated light source on the semi-transparent and semi-reflective mirror (21). At this point, the optical axis of lens A coincides with the outgoing light of the collimated light source; Then, mount lens B on lens mount 2 (12), and use the same method to adjust the optical axis of lens B so that it coincides with the outgoing light of the collimated light source. in, Lens B is closer to the collimated light source than lens A. When the posture of lens B is adjusted, the semi-transparent and semi-reflective mirrors are arranged between lens B and the collimated light source, and between lens A and lens B.

2. The lens debugging method according to claim 1, characterized in that: In the step 1, the theodolite (30) and the level (40) are used to debug the outgoing light of the collimating light source. The theodolite (30) is set up on the front side or the rear side of the collimated light source, and the theodolite (30) is debugged so that its observation surface is arranged vertically and close to the hole center of the lens mounting hole on the lens mounting seat (10). A level (40) is set up beside the collimated light source, and the level (40) is adjusted so that its observation surface is arranged horizontally and close to the center of the lens mounting hole on the lens mounting seat (10). The posture of the collimated light source is adjusted so that the emitted light of the collimated light source is arranged parallel to the observation surfaces of the theodolite (30) and the level (40).

3. The lens debugging method according to claim 2, characterized in that: The collimated light source is a collimated laser of another theodolite.

4. The lens debugging method according to claim 2, wherein: The collimated light source is a laser (50) disposed beside one end of the lens mounting seat (10), and the emitted light of the laser (50) is reflected by the reflector (60) and then emitted toward the side where the lens mounting seat (10) is located. The lens mounting seat (10) and the reflector (60) are respectively mounted on a work platform via a displacement stage (70). The displacement stage (70) includes a fixed member (71) and a movable member (72). In step 1, a theodolite (30) is used to calibrate the posture of the movable member (72) of each displacement stage (70) so that the displacement direction of each movable member (72) is vertical and parallel.

5. The lens debugging method according to claim 4, characterized in that: In the step 1, the theodolite (30) is debugged so that its observation surface is arranged vertically, and the posture of the movable member (72) is adjusted so that the observation mark on the movable member (72) always maintains the same positional relationship with the crosshairs in the observation field of the theodolite (30) before and after the displacement of the movable member (72), and it is determined that the calibration of the displacement stage (70) is completed.

6. The lens debugging method according to claim 4, characterized in that: The invention also includes a steering mirror (61), wherein the steering mirror (61) and the laser (50) are fixedly mounted on a working platform, and the reflector (60) is arranged above the steering mirror (61) and moves up and down under the action of the displacement stage (70). The visible collimated light emitted by the laser (50) is arranged nearly horizontally, and is emitted vertically upward after being deflected by the steering mirror (61), and then emitted toward the side where the lens mounting seat is located through the reflector (60).

7. The lens debugging method according to claim 4, characterized in that: Also includes step 3, Step 31: drive each displacement stage (70) to move in the same direction and the same distance. Step 32: The distance between lens A and the collimated light source is greater than the distance between lens B and the reflector (60). A semi-transparent and semi-reflective mirror (21) is set between lens A and lens B to determine whether the two reflected light spots of lens A, the transmitted light spot of lens B, and the reflected light spot of the collimated light source on the semi-transparent and semi-reflective mirror (21) coincide with each other. Step 33: If a light spot is misplaced, it is determined that lens B is offset. First, the theodolite (30) is used to calibrate the movable member (72) of the displacement stage that drives the displacement of lens B. If the edge profile of the movable member (72) of the displacement stage coincides with or is parallel to the vertical wire of the crosshairs in the field of view of the theodolite (30), the lens B is adjusted to coincide with the output light of the collimated light source using the same method as step 2. If the edge profile of the movable member (72) of the displacement stage and the vertical wire of the crosshairs in the field of view of the theodolite (30) are arranged at an angle, the displacement stage (70) is recalibrated, and then the lens B is adjusted to coincide with the output light of the collimated light source using the same method as step 2. If the two light spots are misaligned, it is determined that lens A is offset. First, the theodolite (30) is used to calibrate and calibrate the moving stage (72) that drives the displacement of lens A. Then, the same method as step 2 is used to adjust lens A to coincide with the output light of the collimated light source. If the four light spots are misaligned, it is determined that the reflector (60) is offset, and the theodolite (30) is used to calibrate and calibrate the displacement stage moving member (72) that drives the reflector (60) to move, and then step 32 is repeated; If the light spots overlap, it is determined that the optical axes of the two lenses and the collimated light source are still coincident, and the debugging is completed.

Citation Information

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