Light shaping device, and method for manufacturing a structure

Abstract

Curing of a photocurable resin is reliably performed between a bottom plate of a container and a bottom surface of a holder, and the possibility of a structure made of the cured photocurable resin adhering to the bottom plate of the container is reduced. A light molding apparatus (1) is provided with: a container (11) that stores a photocurable resin (RL) before curing and has a bottom plate (111) having light transmissivity; a holder (12) that is immersed in the photocurable resin (RL); a reaction light irradiation section (13) that irradiates reaction light having an effect of promoting curing of the photocurable resin (RL) in such a manner that the reaction light transmits a boundary surface (BS) between the bottom plate (111) and the photocurable resin (RL); and a barrier light irradiation section (14) that irradiates barrier light having an effect of hindering curing of the photocurable resin (RL) in such a manner that the barrier light totally reflects on the boundary surface (BS).

Description

TECHNICAL FIELD

[0001] The present application relates to a light shaping apparatus that performs light shaping. In addition, the present application relates to a method for manufacturing a structure using light shaping. BACKGROUND

[0002] As one of methods for shaping a structure made of resin, a light shaping method (also referred to as a vat polymerization method) is known. In the light shaping method, a container that stores a photocurable resin before curing and a holder that is immersed in the photocurable resin before curing are used. A bottom plate of the container is made of a material having light transmissivity so that a reaction light that promotes curing of the photocurable resin can be transmitted. Further, shaping is performed by repeatedly performing a process of irradiating the photocurable resin before curing, which exists between the bottom plate of the container and a bottom surface of the holder, with the reaction light and a process of lifting the holder. The structure shaped by the shaping is lifted together with the holder in a state of being attached to the bottom surface of the holder.

[0003] In order to shape a structure having a fine structure using the light shaping method, it is necessary to reduce the amount of lifting of the holder in each cycle to the same degree as the scale of the fine structure. However, in the shaping method, the structure made of the cured photocurable resin can be attached to the bottom plate of the container, which makes it difficult to perform such a small lifting of the holder.

[0004] In order to prevent the structure made of the cured photocurable resin from being attached to the bottom plate of the container, as a related technology, a method of generating a curing hindrance by introducing oxygen near the bottom plate of the container is known (Patent Documents 1 and 2). However, this method has the following problems. First, in order to implement this method, an oxygen-permeable film is necessary. The oxygen-permeable film has a thin film thickness and low rigidity and strength. Therefore, it is easy to generate unevenness, wrinkles, and the like on the oxygen-permeable film, and as a result, it is difficult to stably implement the light shaping. Second, the concentration of oxygen introduced near the bottom plate of the container is distributed widely, that is, is highest on the surface of the oxygen-permeable film and gently decreases as it moves away from the oxygen-permeable film. Therefore, the curing hindrance is generated even at a position far from the bottom plate of the container. In order to limit the region where the curing hindrance is generated to the vicinity of the bottom plate of the container, it is necessary to precisely control the oxygen permeability, oxygen concentration, flow rate, and the like of the oxygen-permeable film, but such control is difficult during a change in the shaping speed. Third, oxygen is used to generate the curing hindrance, and therefore it is difficult to locally generate the curing hindrance.

[0005] In order to prevent the structure made of the cured photocurable resin from being attached to the bottom plate of the container, as another related technology, a method of simultaneously irradiating a reaction light that promotes curing of the photocurable resin and a hindering light that hinders curing of the photocurable resin is known (Patent Document 3).

[0006] Existing technical documents

[0007] Patent documents

[0008] Patent Document 1: US Patent No. 9,453,142

[0009] Patent Document 2: US Patent No. 10,471,699

[0010] Patent Document 3: US Patent No. 8,697,346 Summary of the Invention

[0011] (a) Technical problems to be solved

[0012] However, in the technology described in Patent Document 3, both reactive light and blocking light are irradiated at the boundary between the bottom plate of the container and the uncured photocurable resin. Therefore, the blocking light enters the entire area reached by the reactive light. In other words, both reactive light and blocking light are irradiated onto the entire photocurable resin between the bottom plate of the container and the bottom surface of the holder. Therefore, the following problems exist: if the reactive light is too strong, structures made of cured photocurable resin will adhere to the bottom plate of the container; if the blocking light is too strong, the curing of the photocurable resin cannot be promoted between the bottom plate of the container and the bottom plate of the holder.

[0013] The present invention addresses the above-mentioned problems by achieving the following technology: reliably curing a photocurable resin between the bottom plate of the container and the bottom surface of the holder, and reducing the possibility of structures made of the cured photocurable resin adhering to the bottom plate of the container.

[0014] (II) Technical Solution

[0015] A photoforming apparatus according to one aspect of the present invention comprises: a container storing a photocurable resin before curing and having a base plate that is translucent; a holder immersed in the photocurable resin; a reactive light irradiation unit that irradiates reactive light that promotes the curing of the photocurable resin by transmitting the reactive light through the boundary between the base plate and the photocurable resin; and a blocking light irradiation unit that irradiates blocking light that hinders the curing of the photocurable resin by total internal reflection at the boundary surface.

[0016] A method for manufacturing a structure according to one aspect of the present invention includes: a pretreatment step of storing a photocurable resin before curing in a container having a base plate, and immersing a holder in the photocurable resin, wherein the base plate is translucent; and an irradiation step of irradiating reactive light that promotes the curing of the photocurable resin such that the reactive light is transmitted through the boundary between the base plate and the photocurable resin; and irradiating obstructive light that hinders the curing of the photocurable resin such that the obstructive light is totally reflected at the boundary.

[0017] (III) Beneficial Effects

[0018] According to one aspect of the present invention, the photocurable resin can be reliably cured between the bottom plate of the container and the bottom surface of the holder, and the possibility of structures made of the cured photocurable resin adhering to the bottom plate of the container is reduced. Attached Figure Description

[0019] Figure 1 This is a cross-sectional view showing the structure of a light modeling device according to an embodiment of the present invention.

[0020] Figure 2 It means to use Figure 1 A flowchart illustrating the manufacturing process of the structure of the light modeling device shown.

[0021] Figure 3 It means Figure 1 A cross-sectional view of a modified example of the light modeling device shown.

[0022] Figure 4 It means that it is able to use, such as Figure 3 A perspective view of a specific example of a planar light diffraction element manufactured using a light modeling device, etc., as shown.

[0023] Figure 5 It means Figure 1 A schematic diagram of a first modified example of the reactive light irradiation unit of the light modeling device shown.

[0024] Figure 6 It means Figure 1 A schematic diagram of a second modified example of the reactive light irradiation unit included in the light modeling device shown. Detailed Implementation

[0025] (Structure of the installation)

[0026] Reference Figure 1 The structure of the light modeling device 1 according to an embodiment of the present invention will be described. Figure 1 (a) is a cross-sectional view of the light modeling device 1. Figure 1(b) is a schematic diagram showing the state of evanescent light generated when total internal reflection of obstructing light is performed in the light modeling device 1.

[0027] Light modeling device 1 is a device used to manufacture resin structures, such as... Figure 1 As shown, it includes: a container 11, a holder 12, a reactive light irradiation section 13, and a light blocking irradiation section 14. Additionally, the light modeling device 1 includes a lifting mechanism (not shown) for lifting the holder 12.

[0028] Container 11 is a structure for storing the photocurable resin (hereinafter also referred to as "photocurable resin RL") before curing. Container 11 is, for example, box-shaped or barrel-shaped. The bottom plate 111 of container 11 is made of a light-transmitting material that transmits reaction light (described later) and blocks light. Holder 12 is a structure for supporting the cured photocurable resin (hereinafter also referred to as "photocurable resin RS"). The shape of holder 12 is, for example, a quadrangular prism or a cylinder. Holder 12 is immersed in photocurable resin RL with its bottom surface 121 facing the bottom plate 111 of container 11.

[0029] The reaction light irradiation unit 13 is a structure for irradiating reaction light in such a way that the reaction light passes through the boundary surface BS between the bottom plate 111 of the container 11 and the photocurable resin RL. Here, reaction light refers to light that promotes the curing of the photocurable resin RL. When the reaction light is irradiated by the reaction light irradiation unit 13, the curing of the photocurable resin RL between the bottom plate 111 of the container 11 and the bottom surface 121 of the holder 12 can be promoted.

[0030] Furthermore, regarding the reactive light irradiation unit 13: (A1) can be a light source that generates reactive light (e.g., LD, LED, lamp, etc.); (A2) can be a reflector that reflects the reactive light generated by a separately provided light source (e.g., mirror, prism, etc.); (A3) can be a lens that focuses or collimates the reactive light generated by a separately provided light source; and (A4) can be an optical waveguide (e.g., optical fiber, etc.) that conducts the reactive light generated by a separately provided light source. When the structure of (A2), (A3), or (A4) is adopted, the separately provided light source can also be used as a structural element of the light modeling device 1.

[0031] Furthermore, regarding the reactive light irradiation section 13: (B1) it can be configured to irradiate the entire photocurable resin RL between the bottom plate 111 of the container 11 and the bottom surface 121 of the holder 12 with reactive light; (B2) it can be configured to irradiate a portion of the photocurable resin RL between the bottom plate 111 of the container 11 and the bottom surface 121 of the holder 12 with reactive light. When the structure of (B1) is adopted, the shaping of each point constituting each layer of the structure is performed simultaneously. On the other hand, when the structure of (B2) is adopted, the irradiation point of the reactive light is moved by scanning the bottom surface 121 of the holder 12 to sequentially shape each point constituting the layer. Furthermore, in Figure 1 The structure of (B1) is illustrated in the example.

[0032] The light-blocking irradiation section 14 is a structure for irradiating light-blocking light in such a way that the light-blocking light is totally reflected at the boundary surface BS between the bottom plate 111 of the container 11 and the photocurable resin RL. Here, light-blocking light refers to light that inhibits the curing of the photocurable resin RL. When light-blocking light is irradiated by the light-blocking irradiation section 14, the light-blocking light enters the photocurable resin RL from the boundary BS as a transient light. If the region where the intensity of the transient light is more than 1 / e of the intensity at the boundary surface BS is considered as the region where the transient light enters, then the thickness d of this region is d=λ / {4π(n1 2 ×sin 2 θ-n2 2 ) 1 / 2} is obtained. Here, λ is the wavelength of the obstructing light, and θ is the angle of incidence of the obstructing light relative to the boundary surface BS. Additionally, n1 is the refractive index of the base plate 111 of container 11, and n2 is the refractive index of the photocurable resin RL. In the region where evanescent light enters, even if the reactive light is irradiated, the photocurable resin RL will not cure, or if it does, the curing will be insufficient.

[0033] Furthermore, regarding the light-blocking illumination section 14: (C1) can be a light source that generates blocking light (e.g., LD, LED, lamp, etc.); (C2) can be a reflector that reflects the blocking light generated by the separately provided light source (e.g., mirror, prism, etc.); (C3) can be a lens that focuses or collimates the blocking light generated by the separately provided light source; and (C4) can be an optical waveguide (e.g., optical fiber) that conducts the blocking light generated by the separately provided light source. When the structure of (C2), (C3), or (C4) is adopted, the separately provided light source can also be used as a structural element of the light modeling device 1.

[0034] Furthermore, regarding the light-blocking irradiation section 14: (D1) can be configured to irradiate the entire area of ​​the bottom plate 111 of the container 11 opposite to the bottom surface 121 of the holder 12 with blocking light; (D2) can be configured to irradiate a portion of the area of ​​the bottom plate 111 of the container 11 opposite to the bottom surface 121 of the holder 12 with blocking light. When the structure (B1) is used in the reaction light irradiation section 13, it is preferable to use the structure (D1) in the light-blocking irradiation section 14. On the other hand, when the structure (B2) is used in the reaction light irradiation section 13, either the structure (D1) or the structure (D2) can be used in the light-blocking irradiation section 14. It should be noted that when the structure (D2) is used, it is preferable to move the irradiation point of the blocking light so that the irradiation point of the blocking light always includes the irradiation point of the reaction light.

[0035] Furthermore, light with wavelengths of 100 nm or more and 500 nm or less can be used as both the reaction light and the blocking light. It should be noted that it is preferable that the wavelengths of the reaction light and the blocking light are different. For example, a combination of a reaction light with a wavelength of 470 nm and a blocking light with a wavelength of 375 nm can be considered.

[0036] (Manufacturing method of structures using light modeling devices)

[0037] Reference Figure 2 The process of manufacturing a structure using the light modeling device 1 is explained. Figure 2 This is a flowchart representing the process of manufacturing method S1.

[0038] Manufacturing method S1 includes: a pretreatment step S11, an irradiation step S12, a lifting step S13, and a post-treatment step S14. The irradiation step S12 and the lifting step S13 are repeated a predetermined number of times. For example, when the structure is divided into n layers (n is any natural number) and modeled layer by layer, the irradiation step S12 and the lifting step S13 are repeated n times.

[0039] The pretreatment step S11 involves storing the photocurable resin RL in the container 11 and immersing the holder 12 in the photocurable resin RL. Here, the holder 12 is immersed in the photocurable resin RL such that its bottom surface 121 is isolated from the bottom plate 111 of the container 11, and that the reaction light can reach the bottom surface 121 during the irradiation step S12 described later. The storage of the photocurable resin RL and the immersion of the holder 12 can be performed manually by an operator or automatically by the light modeling device 1 or other devices.

[0040] The irradiation process S12 is a process in which the reactive light irradiation unit 13 irradiates reactive light and the blocking light irradiation unit 14 irradiates blocking light. Here, the reactive light irradiation is performed such that the reactive light passes through the boundary surface BS between the bottom plate 111 of the container 11 and the photocurable resin RL. Furthermore, the blocking light irradiation is performed such that the blocking light is totally reflected at the boundary surface BS between the bottom plate 111 of the container 11 and the photocurable resin RL. The control of the reactive light irradiation unit 13 and the blocking light irradiation unit 14 can be performed manually by the operator or automatically by the light modeling device 1 or other devices.

[0041] In the irradiation process S12, since the reactive light is transmitted through the boundary surface BS, the curing of the photocurable resin RL between the bottom plate 111 of the container 11 and the bottom surface 121 of the holder 12 can be promoted. However, total internal reflection of light is hindered at the boundary surface BS, thus preventing light from entering the photocurable resin RL as evanescent light from the boundary surface BS. Therefore, even if the reactive light is irradiated near the bottom plate 111 of the container 11 where the evanescent light enters, the photocurable resin RL will not be cured, or if it is, it will be insufficient. Therefore, the possibility of the photocurable resin RS constituting the structure adhering to the bottom plate 111 of the container 11 is reduced.

[0042] The lifting process S13 is the process of lifting the retainer 12 by the lifting mechanism. Here, the direction of lifting the retainer 12 is the direction in which the retainer 12 is away from the bottom plate 111 of the container 11, and the amount of lifting the retainer 12 is the same as the thickness of one layer of the structure. The lifting mechanism can be controlled manually by the operator or automatically by the light-forming device 1 or other devices.

[0043] In the lifting process S13, the structure made of photocurable resin RS is lifted together with the holder 12. In the subsequent irradiation process S12, the photocurable resin RL, which is to be cured, is added between the structure and the bottom plate 111 of the container 11.

[0044] When the light modeling of the structure is completed through repeated irradiation step S12 and lifting step S13, a post-processing step S14 is performed. Post-processing step S14 involves removing the light-modeled structure from container 11 and subjecting it to processes such as exposure and / or cleaning. In post-processing step S14, further processes such as complete exposure and / or sintering of the unexposed resin may also be performed.

[0045] (The effect of the light modeling device)

[0046] As described above, the light modeling apparatus 1 includes: a container 11 that stores photocurable resin RL before curing and has a base plate 111 that is light-transmitting; a holder 12 that is immersed in the photocurable resin RL; a reactive light irradiation section 13 that irradiates reactive light that promotes the curing of the photocurable resin RL in such a way that the reactive light is transmitted through the boundary surface BS between the base plate 111 and the photocurable resin RL; and a blocking light irradiation section 14 that irradiates blocking light that hinders the curing of the photocurable resin RL in such a way that the blocking light is totally reflected at the boundary surface BS.

[0047] Therefore, according to the light modeling device 1, when manufacturing a structure made of photocurable resin RS, the possibility of the structure adhering to the bottom plate 111 of the container 11 can be reduced.

[0048] (A variation of the light modeling device)

[0049] Reference Figure 3 A modified example of the light modeling device 1 will be described. Figure 3 This is a cross-sectional view showing the structure of the light modeling device 1A in this modified example.

[0050] Figure 1 The light modeling device 1 shown includes a light-blocking part 14, in contrast, Figure 3 The light modeling device 1A shown has two light-blocking parts 141 and 142. The structure of the light modeling device 1A, except for the light-blocking parts 141 and 142, is the same as that of the light modeling device 1, except for the light-blocking part 14, so its description is omitted here.

[0051] The light-blocking irradiation units 141 and 142 are structures for irradiating light-blocking light onto the bottom plate 111 of the container 11 in such a way that the light-blocking light undergoes total internal reflection at the boundary surface BS between the bottom plate 111 of the container 11 and the photocurable resin RL. It should be noted that the region BS1 where the light-blocking irradiation unit 141 irradiates the light incident on the boundary surface BS is different from the region BS2 where the light-blocking irradiation unit 142 irradiates the light incident on the boundary surface BS. Furthermore, the incident angle θ1 of the light-blocking irradiation unit 141 onto the boundary surface BS is different from the incident angle θ2 of the light-blocking irradiation unit 142 onto the boundary surface BS. Therefore, the thickness d1 of the region where the light-blocking irradiation unit 141 enters the photocurable resin RL as evanescent light via region BS1 is different from the thickness d2 of the region where the light-blocking irradiation unit 142 enters the photocurable resin RL as evanescent light via region BS2. Therefore, if the light-forming apparatus 1A is used, it is possible to manufacture a structure with a stepped surface.

[0052] As an example, consider the following situation: the refractive index n1 of the base plate 111 is 1.52, the refractive index n2 of the photocurable resin RL is 1.33, and the wavelength λ of the blocking light is 405 nm. If the incident angle θ1 of the blocking light irradiated from the first blocking light irradiation section 141 toward the boundary surface BS is set to 75°, then the thickness d1 of the evanescent light entering the region of the photocurable resin RL via region BS1 is approximately 52 nm. On the other hand, if the incident angle θ2 of the blocking light irradiated from the second blocking light irradiation section 142 toward the boundary surface BS is set to 63°, then the thickness d2 of the evanescent light entering the region of the photocurable resin RL via region BS1 is approximately 126 nm. Therefore, if the light modeling apparatus 1A is used, it is possible to manufacture a structure with a step difference of about 74 nm on the surface.

[0053] As described above, the light-forming apparatus 1A includes multiple light-blocking irradiation sections 141 and 142, which irradiate different regions BS1 and BS2 of the boundary surface BS with light incident at different angles θ1 and θ2. Therefore, by using the light-forming apparatus 1A, it is possible to manufacture structures with stepped differences on the surface.

[0054] (Specific examples of structures)

[0055] If a light modeling apparatus such as the light modeling apparatus 1A is used, a planar light diffraction element with optical computing capabilities can be manufactured, consisting of multiple micro-units whose thickness or refractive index is independently set. When signal light is incident on such a planar light diffraction element, the signal light with different phases transmitted through each micro-unit interferes with each other, thereby performing a predetermined optical operation. Furthermore, in this specification, "micro-unit" refers to a unit with a unit size, for example, less than 10 μm. Additionally, in this specification, "unit size" refers to the square root of the unit area. For example, when the top view of the micro-unit is square, the unit size refers to the length of one side of the unit. There is no particular limitation on the lower limit of the unit size; for example, it is 1 nm.

[0056] exist Figure 4 The image shows a specific example of such a planar optical diffraction element. Figure 4 This is a three-dimensional view of the planar optical diffraction element 100 in this specific example.

[0057] The planar optical diffraction element 100 of this specific example has an effective region that is a square with one side of 1.0 mm. This effective region is composed of 1000 × 1000 micro-units arranged in a matrix. Each micro-unit is composed of a prism-shaped pillar with a square base of 1 μm on a substrate with a thickness of 100 μm. The height of each pillar is any one of 0 nm, 100 nm, 200 nm, ..., 1100 nm, 1200 nm (13 stages in 100 nm increments), and is determined in such a way that the phase change of the light transmitted through the micro-unit composed of the pillar is a desired value.

[0058] When manufacturing such a planar light diffraction element, it is sufficient to allow the blocking light to be incident at an angle corresponding to the pillar constituting the micro-unit in the region corresponding to each micro-unit. In this case, a DMD (Digital Mirror Device) having multiple (greater than or equal to the number of micro-units) mirrors can be used as the blocking light irradiation section 141, 142, wherein the multiple mirrors irradiate blocking light incident at different angles onto different regions of the boundary surface BS.

[0059] (Example 1 of a variation of the reactive light irradiation section)

[0060] Reference Figure 5 A first modified example of the reactive light irradiation section 13 will be described. Figure 5 This is a schematic diagram of the reactive light irradiation section 13 in this modified example.

[0061] The reactive light irradiation unit 13 of this modified example is composed of a condenser lens L and a reflector M. The condenser lens L is a structure for focusing the reactive light emitted from a light source (not shown). The reflector M is a structure for reflecting the reactive light focused by the condenser lens L. The reflector M is configured to control the orientation of the reflecting surface. Therefore, if the reactive light irradiation unit 13 of this specific example is used, the irradiation point P of the reactive light can be moved by scanning the bottom surface 121 of the holder 12.

[0062] (Modified Example 2 of the reactive light irradiation section)

[0063] Reference Figure 6 A second modified example of the reactive light irradiation section 13 will be described. Figure 6 This is a schematic diagram of the reactive light irradiation section 13 in this modified example.

[0064] The reactive light irradiation unit 13 of this modified example is composed of a DMD having multiple mirrors M1 to Mn (n is a natural number of 2 or more), a collimating lens L1, and a condenser lens L2. Each mirror Mi constituting the DMD (i is a natural number of 1 or more and n less) is a structure for reflecting reactive light emitted from a light source not shown. The collimating lens L1 is a structure for collimating the reflected light reflected by each mirror Mi constituting the DMD. The condenser lens L2 is a structure for focusing the reactive light reflected by each mirror Mi and collimated by the collimating lens L1. For each mirror Mi constituting the DMD, the orientation of the reflecting surface can be controlled. For example, if the orientation of the reflecting surface of mirror Ma is controlled so that the reflected light is incident on the collimating lens L1, the reactive light can be irradiated towards point Pa; if the orientation of the reflecting surface of mirror Ma is controlled so that the reflected light is not incident on the collimating lens L1, the reactive light can be prevented from irradiating point Pa. Therefore, by using the reactive light irradiation unit 13 of this embodiment, it is possible to switch whether reactive light is irradiated onto the bottom surface 121 of the holder 12 according to each point. This allows for the shaping of fine structures using photocurable resin.

[0065] (Summarize)

[0066] The photoforming apparatus of the first aspect of the present invention comprises: a container storing a photocurable resin before curing and having a base plate that is translucent; a holder immersed in the photocurable resin; a reactive light irradiation unit that irradiates reactive light that promotes the curing of the photocurable resin in such a way that the reactive light is transmitted through the boundary between the base plate and the photocurable resin; and a blocking light irradiation unit that irradiates blocking light that hinders the curing of the photocurable resin in such a way that the blocking light is totally reflected at the boundary surface.

[0067] Regarding the light modeling device of the second aspect of the present invention, based on the structure of the light modeling device of the first aspect, it includes a plurality of light-blocking irradiation sections as the light-blocking irradiation sections, which irradiate different regions of the boundary surface with light blocking incident at different angles.

[0068] Regarding the light modeling device of the third aspect of the present invention, based on the structure of the light modeling device of the first or second aspect, a DMD (Digital Mirror Device) is provided as the light blocking irradiation part. The DMD has multiple mirrors that irradiate blocking light incident at different incident angles onto different regions of the boundary surface.

[0069] The method for manufacturing a structure according to the fourth aspect of the present invention includes: a pretreatment step of storing a photocurable resin before curing in a container having a base plate, and immersing a holder in the photocurable resin, wherein the base plate is translucent; and an irradiation step of irradiating reactive light that promotes the curing of the photocurable resin such that the reactive light is transmitted through the boundary between the base plate and the photocurable resin; and irradiating obstructive light that hinders the curing of the photocurable resin such that the obstructive light is totally reflected at the boundary.

[0070] Regarding the method for manufacturing a structure according to the fifth aspect of the present invention, based on the method for manufacturing a structure according to the fourth aspect, a planar optical diffraction element is manufactured. The planar optical diffraction element is composed of multiple micro-units and has optical computing functions, and each micro-unit is composed of pillars.

[0071] (Appendix Items)

[0072] This invention is not limited to the embodiments described above, and various modifications can be made within the scope of the claims. Embodiments obtained by appropriately combining the technical solutions disclosed in the above embodiments are also included in the technical scope of this invention.

[0073] Explanation of reference numerals in the attached figures

[0074] 1-Light modeling device; 11-Container; 111-Base plate; 12-Holder; 121-Bottom surface; 13-Reaction light irradiation part; 14-Obstruction light irradiation part.

Claims

1. A light modeling device, characterized in that, have: A container for storing photocurable resin before curing and having a base plate that is translucent; A retainer, which is immersed in the photocurable resin; The reactive light irradiation unit irradiates reactive light that promotes the curing of the photocurable resin in such a manner that the reactive light penetrates the boundary between the substrate and the photocurable resin; and Multiple light-blocking irradiation sections irradiate light that has the effect of hindering the curing of the photocurable resin in such a way that the light-blocking light is totally reflected on the boundary surface, and the multiple light-blocking irradiation sections irradiate different areas of the boundary surface with light-blocking light incident at different angles of incidence.

2. The light modeling device according to claim 1, characterized in that, The light-blocking irradiation section includes a DMD (Digital Micromirror Device), which has multiple mirrors that irradiate different regions of the boundary surface with light blocking incident at different angles.

3. A method for manufacturing a structure, characterized in that, Include: The pretreatment process involves storing the uncured photocurable resin in a container with a base plate, and immersing a holder in the photocurable resin, wherein the base plate is translucent; and The irradiation process involves irradiating reactive light that promotes the curing of the photocurable resin in such a way that the reactive light is transmitted through the boundary between the substrate and the photocurable resin; and irradiating obstructive light that hinders the curing of the photocurable resin in such a way that the obstructive light is totally reflected at the boundary surface. The irradiation process uses multiple obstructive light irradiation units to irradiate different areas of the boundary surface with obstructive light incident at different angles of incidence.

4. The method for manufacturing a structure according to claim 3, characterized in that, The structure is a planar optical diffraction element with optical computing function, composed of multiple micro-units, each of which is composed of pillars.

Images