photocell

Abstract

The phototube includes a housing including a light transmission portion, an electron emission portion including a photoelectric surface disposed in the housing, an electron capture portion disposed in the housing between the light transmission portion and the photoelectric surface, and a conductive layer configured to be disposed in the housing in a manner opposite the photoelectric surface at a position on the light transmission portion side than at least a portion of the electron capture portion and to allow light to pass through.

Description

TECHNICAL FIELD

[0001] The present application relates to a phototube. BACKGROUND

[0002] A phototube is known that includes a housing that contains a light-transmitting portion, an electron-emitting portion (photocathode) that contains a photoelectric surface disposed inside the housing, and a mesh- or dot-shaped electron-capturing portion (anode) that is formed on a surface of the light-transmitting portion on the electron-emitting portion side (see, for example, Patent Documents 1 and 2).

[0003] PRIOR ART DOCUMENTS

[0004] PATENT DOCUMENTS

[0005] Patent Document 1: Japanese Patent Application Publication No. 2019-067494

[0006] Patent Document 2: Japanese Patent Application Publication No. 2018-097925 SUMMARY

[0007] PROBLEMS TO BE SOLVED BY THE INVENTION

[0008] In the phototube described above, in order to increase the probability that light incident from the outside to the light-transmitting portion reaches the photoelectric surface, if the mesh-shaped electron-capturing portion is formed roughly or the dot-shaped electron-capturing portion is formed small, the probability that photoelectrons emitted from the photoelectric surface are captured by the electron-capturing portion can decrease. On the other hand, if the mesh-shaped electron-capturing portion is formed densely or the dot-shaped electron-capturing portion is formed large in order to increase the probability that photoelectrons emitted from the photoelectric surface are captured by the electron-capturing portion, the probability that light incident from the outside to the light-transmitting portion reaches the photoelectric surface can decrease. Therefore, the structure of the phototube described above cannot be said to be a structure in which the detection efficiency of light is high.

[0009] An object of the present application is to provide a phototube that can increase the detection efficiency of light.

[0010] METHOD FOR SOLVING THE PROBLEM

[0011] A phototube according to one aspect of the present application includes a housing that contains a light-transmitting portion, an electron-emitting portion that contains a photoelectric surface disposed inside the housing, an electron-capturing portion that is disposed between the light-transmitting portion and the photoelectric surface inside the housing, and a conductive layer that is configured to be disposed at a position on the light-transmitting portion side than at least a part of the electron-capturing portion in a manner opposite to the photoelectric surface inside the housing and to transmit light.

[0012] In the above phototube, the electron capturing portion is disposed in the housing between the light transmitting portion and the photoelectric surface, and the conductive layer is disposed in the housing in a manner opposite to the photoelectric surface at a position on the light transmitting portion side than at least a part of the electron capturing portion. Thus, since the electron capturing portion is provided separately from the conductive layer (i.e., without being required to perform only the function of capturing photoelectrons by the conductive layer), the conductive layer can be configured in a manner that allows sufficient transmission of light. As a result, light incident from the outside to the light transmitting portion easily reaches the photoelectric surface. Therefore, the probability of light incident from the outside to the light transmitting portion reaching the photoelectric surface can be improved. Further, for example, by imparting a negative potential to the electron emitting portion with reference to the potential of the electron capturing portion, and imparting a negative potential (or the same potential as that of the electron emitting portion) to the conductive layer with reference to the potential of the electron emitting portion, even if a part of the photoelectrons of the photoelectrons emitted from the photoelectric surface travels toward the light transmitting portion, the part of the photoelectrons is bounced back by the repulsive force generated between the part of the photoelectrons and the conductive layer, and easily reaches the electron capturing portion. Therefore, the probability of the photoelectrons emitted from the photoelectric surface being captured by the electron capturing portion can be improved. As described above, according to the above phototube, the detection efficiency of light can be improved.

[0013] In the phototube of one aspect of the present application, the conductive layer can be disposed in the housing in a manner opposite to the photoelectric surface along the light transmitting portion. As a result, the effect of the conductive layer can be exerted along the light transmitting portion.

[0014] In the phototube of one aspect of the present application, the electron capturing portion can be a plate-shaped member disposed in a manner that divides the region in the housing when viewed from the light transmitting portion side. As a result, light incident to the light transmitting portion at a large incident angle is also easily reflected by the pair of main surfaces of the electron capturing portion respectively and reaches the photoelectric surface. Therefore, the probability of light incident from the outside to the light transmitting portion reaching the photoelectric surface can be further improved. Further, the photoelectrons emitted from the photoelectric surface easily reach each of the pair of main surfaces of the electron capturing portion. Therefore, the probability of the photoelectrons emitted from the photoelectric surface being captured by the electron capturing portion can be further improved.

[0015] In the phototube of one aspect of the present application, the housing can further include a main body portion having a recess, the light transmitting portion can be mounted to the main body portion in a manner that closes the opening of the recess, the electron emitting portion and the electron capturing portion can be supported by the main body portion, and the conductive layer can be supported by the light transmitting portion. As a result, a structure in which the photoelectric surface, the electron capturing portion, and the conductive layer are accurately disposed can be easily and reliably achieved.

[0016] In the phototube of one aspect of the present application, the electron emitting portion can be disposed on the inner surface of the recess, the electron capturing portion can be erected on the opening rim of the recess, and the conductive layer can be disposed on the surface of the light transmitting portion on the electron emitting portion side. As a result, a structure in which the photoelectric surface, the electron capturing portion, and the conductive layer are accurately disposed can be achieved in a highly efficient layout.

[0017] The phototube of one aspect of the present application can further include a first conductive portion electrically connected to the electron capturing portion and a second conductive portion electrically connected to the conductive layer, a portion of the first conductive portion, a portion of the second conductive portion, and a portion of the electron emitting portion being exposed to the outside at a surface of the main body portion on the side opposite the light transmitting portion. Thus, the external wiring can be electrically connected to the portion of the first conductive portion, the portion of the second conductive portion, and the portion of the electron emitting portion, respectively, at the same surface (the surface of the main body portion on the side opposite the light transmitting portion) without interfering with the incidence of light to the light transmitting portion and with ease of wiring of the external wiring. In addition, the desired electric potential can be imparted to the electron emitting portion, the electron capturing portion, and the conductive layer, respectively.

[0018] The phototube of one aspect of the present application can further include a first conductive portion electrically connected to the electron capturing portion and a second conductive portion electrically connected to the conductive layer, and a wiring electrically connecting the electron emitting portion and the conductive layer, a portion of the first conductive portion and a portion of the second conductive portion being exposed to the outside at a surface of the main body portion on the side opposite the light transmitting portion. Thus, the external wiring can be electrically connected to the portion of the first conductive portion and the portion of the second conductive portion, respectively, at the same surface (the surface of the main body portion on the side opposite the light transmitting portion) without interfering with the incidence of light to the light transmitting portion and with ease of wiring of the external wiring. In addition, the structure of the conductive portion for electrically connecting the external wiring can be simplified.

[0019] Effects of the Invention

[0020] According to the present application, a phototube capable of improving the detection efficiency of light can be provided. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 is a plan view of the phototube of one embodiment.

[0022] Figure 2 is a cross-sectional view of the phototube along the line Figure 1 indicated by II-II in FIG. 1.

[0023] Figure 3 is a cross-sectional view of the phototube along the line Figure 1 indicated by III-III in FIG. 1.

[0024] Figure 4 is an exploded perspective view of the phototube. Figure 1

[0025] Figure 5 is a cross-sectional view of the phototube of the first modified example.

[0026] Figure 6 is a cross-sectional view of the phototube of the first modified example.

[0027] Figure 7 ​is a cross-sectional view of a phototube of a first modification example.

[0028] Figure 8 is a perspective view of an electron capturing portion of a phototube of a second modification example.

[0029] Figure 9 is an exploded perspective view of a phototube of a third modification example. DETAILED DESCRIPTION

[0030] Hereinafter, embodiments of the present application will be described in detail with reference to the drawings. In each drawing, like or equivalent components are designated by like reference numerals, and repeated description is omitted.

[0031] As shown in Figure 1 , Figure 2 and Figure 3 , the phototube 1 includes a housing 2, an electron emitting portion 3, an electron capturing portion 4, a conductive layer 5, a pair of first conductive portions (conductive portions) 6, and a second conductive portion 7. In the phototube 1, the electron emitting portion 3 functions as a photocathode, and the electron capturing portion 4 functions as an anode. The light to be detected by the phototube 1 is, for example, ultraviolet rays.

[0032] The housing 2 includes a main body portion 21 and a light-transmitting portion 22. The main body portion 21 has a recessed portion 23 that is open on one side in the Z-axis direction. In the main body portion 21, the recessed portion 23 is demarcated by a bottom wall 24 and a side wall 25. A groove portion 26 that is formed so as to substantially surround the recessed portion 23 is provided between the recessed portion 23 and the side wall 25, and improvement of the voltage resistance characteristics between components to which different potentials are applied is achieved. The main body portion 21 is, for example, a plate-shaped component (thickness: several mm or so) that is square (length of one side: about 10 mm) when viewed from the Z-axis direction, and is formed of an insulating material (for example, Kovar glass). The light-transmitting portion 22 is attached to the main body portion 21 so as to close the opening of the recessed portion 23. The light-transmitting portion 22 transmits the light to be detected by the phototube 1. The light-transmitting portion 22 is, for example, a plate-shaped component (thickness: 1 mm or less) that is square (length of one side: about 10 mm) when viewed from the Z-axis direction, and is formed of an insulating material (for example, quartz glass). In the present embodiment, the region inside the housing 2 is maintained at high vacuum.

[0033] As shown in Figure 4As shown, the end surface 25a (the end surface on the light-transmitting portion 22 side) of the side wall 25 of the main body portion 21 is provided with the base layer 11 in a frame shape. The surface 22a of the light-transmitting portion 22 on the electron emission portion 3 side is provided with the base layer 12 in a frame shape along the outer edge of the light-transmitting portion 22. The base layer 11 and the base layer 12 are provided with the joint layer 13 in a frame shape therebetween. The light-transmitting portion 22 is hermetically joined to the side wall 25 of the main body portion 21 by the base layer 11, the base layer 12, and the joint layer 13. The base layer 11 and the base layer 12 are metal layers (so-called metallized layers) for improving the adhesion of the joint layer 13 to the main body portion 21 and the adhesion strength of the joint layer 13 to the light-transmitting portion 22, and are formed of, for example, Cr / Ni / Cu or Ti / Pt / Au. The joint layer 13 is formed of an electrically conductive material (for example, a joint metal such as In or a solder such as AuSn).

[0034] As shown in FIG. 1, the light-transmitting portion 22 is provided with the light-transmitting window 24 in a frame shape along the outer edge of the light-transmitting portion 22. The light-transmitting window 24 is formed of, for example, a transparent resin such as acrylic resin or glass. Figure 1 、 Figure 2 and Figure 3 As shown, the electron emission portion 3 includes the electrode body 31 and the photoelectric surface 32. The electron emission portion 3 is held by the recessed portion 23 of the main body portion 21 of the case 2 in a state in which the photoelectric surface 32 is disposed inside the case 2. In the present embodiment, the electron emission portion 3 is disposed on the inner surface 23a of the recessed portion 23 of the main body portion 21, and a portion of the electron emission portion 3 is exposed to the outside through the opening portion 21c of the case 2 that is opened in the surface 21a of the main body portion 21 on the side opposite to the light-transmitting portion 22. More specifically, the electrode body 31 in a bowl shape is fixed to the inner surface 23a of the recessed portion 23, for example, by welding or joining based on a joining member, and the bottom portion 31a of the electrode body 31 that protrudes in a convex shape is exposed to the outside through the opening portion 21c of the main body portion 21 in the surface 21a of the main body portion 21. The photoelectric surface 32 is a photoelectric conversion film formed along the inner surface of the electrode body 31 in a bowl shape. The electrode body 31 is formed of an electrically conductive material (for example, a metal material such as Kovar or the like), and the photoelectric surface 32 is formed of, for example, CsTe.

[0035] The photoelectric surface 32 is a concave surface inside the case 2 toward the light-transmitting portion 22. That is, the photoelectric surface 32 is recessed inside the case 2 toward the side opposite to the light-transmitting portion 22 (that is, the side away from the light-transmitting portion 22). The photoelectric surface 32 includes a bottom surface 32a and a side surface 32b. The bottom surface 32a is a flat surface perpendicular to the Z-axis direction. The side surface 32b is curved in such a manner that the inclination increases the farther away from the bottom surface 32a (that is, the closer to the light-transmitting portion 22). The side surface 32b is connected to the bottom surface 32a in a continuously inclined manner. The bottom surface 32a is circular when viewed from the light-transmitting portion 22 side, and the side surface 32b is annular when viewed from the light-transmitting portion 22 side. That is, the photoelectric surface 32 is circular when viewed from the light-transmitting portion 22 side.

[0036] The electron-capturing portion 4 is disposed in the housing 2 between the light-transmitting portion 22 and the photoelectric surface 32. The electron-capturing portion 4 is a plate-shaped member (thickness: about 0.4 mm) formed of an electrically conductive material (for example, metal material such as Kovar, etc.), and is disposed so as to divide the region in the housing 2 when viewed from the light-transmitting portion 22 side. That is, the electron-capturing portion 4 is disposed so that the pair of major surfaces 4a of the electron-capturing portion 4 are parallel to the Z-axis direction. The edge portion of each major surface 4a, when viewed from the Y-axis direction (when viewed in opposition to the major surface of the plate-shaped member), is in a substantially elliptical shape (shape including a smooth arc portion and a straight line portion) extending along the inner surface 23a of the recessed portion 23 and opposing the inner surface 23a of the recessed portion 23. The electron-capturing portion 4 is supported by the main body portion 21 of the housing 2. In the present embodiment, the electron-capturing portion 4 is mounted to the opening edge 23b of the recessed portion 23 of the main body portion 21. More specifically, the pair of end portions 4b of the electron-capturing portion 4 projecting outward in the X-axis direction are disposed in the opposite portions in the X-axis direction in the opening edge 23b.

[0037] A portion 41 of the electron-capturing portion 4 is located in the region 33 on the inner side of the recessed photoelectric surface 32. That is, the portion 41 of the electron-capturing portion 4 is located on the side opposite the light-transmitting portion 22 with respect to the opening edge 32c of the recessed photoelectric surface 32. A portion 42 of the electron-capturing portion 4 other than the portion 41 is located on the outer side of the recessed photoelectric surface 32 (that is, outside the region 33). That is, the portion 42 of the electron-capturing portion 4 is located on the light-transmitting portion 22 side with respect to the opening edge 32c of the recessed photoelectric surface 32. The side surface 41a (side surface between the pair of major surfaces 4a and opposing the photoelectric surface 32) of the portion 41 of the electron-capturing portion 4 extends along the photoelectric surface 32 when viewed from the Y-axis direction. The electron-capturing portion 4 is spaced apart from the photoelectric surface 32 by a prescribed distance in the housing 2 so as to be distanced from the photoelectric surface 32, and is not electrically connected to the photoelectric surface 32.

[0038] The electrically conductive layer 5 is disposed in the housing 2 in opposition to the photoelectric surface 32 at a position closer to the light-transmitting portion 22 than the electron-capturing portion 4. In the present embodiment, the electrically conductive layer 5 is disposed along the light-transmitting portion 22 in opposition to the photoelectric surface 32 in the housing 2. The electrically conductive layer 5 is separated from the electron-capturing portion 4 by a prescribed distance in the housing 2, and is not electrically connected to the electron-capturing portion 4. In the present embodiment, the electrically conductive layer 5 is disposed on the surface 22a of the light-transmitting portion 22. That is, the electrically conductive layer 5 is supported by the light-transmitting portion 22. The electrically conductive layer 5 is configured so that the light that is the detection object of the phototube 1 passes therethrough. In the present embodiment, the electrically conductive layer 5 is formed in a film shape from a material selected in accordance with the wavelength of the light that is the detection object of the phototube 1, at a thickness set in accordance with the wavelength. The material of the electrically conductive layer 5 is, for example, Ni, and the thickness of the electrically conductive layer 5 is, for example, on the order of several nm.

[0039] AsFigure 1 and Figure 4 As shown, the conductive layer 5 is located inside the substrate layer 12 on the surface 22a of the light-transmitting portion 22. As an example, the conductive layer 5 is square when viewed from the Z-axis direction and is located inside the square frame-shaped substrate layer 12. The corner portion 5a of the conductive layer 5 overlaps with the protrusion 12a of the substrate layer 12, and overlaps with the protrusion 11a of the substrate layer 11 via the bonding layer 13. Thus, the conductive layer 5, substrate layer 11, substrate layer 12, and bonding layer 13 are electrically connected to each other. The corner portion 5a is one of a pair of opposite corner portions in the Y-axis direction of the conductive layer 5. The protrusion 11a is the portion protruding inward from one of the pair of opposite corner portions in the Y-axis direction of the substrate layer 11, and the protrusion 12a is the portion protruding inward from one of the pair of opposite corner portions in the Y-axis direction of the substrate layer 12.

[0040] like Figure 1 and Figure 2 As shown, a pair of first conductive portions 6 are electrically connected to the electron capturing portion 4, and a portion of each first conductive portion 6 is exposed to the outside on the surface 21a of the main body portion 21. More specifically, the end portion 6a of each first conductive portion 6 on the light-transmitting portion 22 side is electrically connected to each end portion 4b provided on a portion 42 of the electron capturing portion 4, and the end portion 6b of each first conductive portion 6 opposite to the end portion 6a is exposed to the outside on the surface 21a of the main body portion 21. Outside the region 33 inside the concave photoelectric surface 32, each first conductive portion 6 is electrically connected to the electron capturing portion 4, so the electron capturing portion 4 and the pair of first conductive portions 6 are separated from the photoelectric surface 32 which is given a different potential than the electron capturing portion 4 and the pair of first conductive portions 6, thereby improving the voltage withstand characteristics between components given different potentials. As an example, the pair of opposite corner portions of each first conductive portion 6 in the side wall 25 of the main body portion 21 extend in the Z-axis direction. A pair of first conductive parts 6 are integrally formed with an electron-capturing part 4 from a conductive material (e.g., Kova iron-nickel-cobalt alloy).

[0041] like Figure 1 and Figure 3 As shown, the second conductive portion 7 is electrically connected to the conductive layer 5, and a portion of the second conductive portion 7 is exposed to the outside on the surface 21a of the main body portion 21. More specifically, the end portion 7a on the light-transmitting portion 22 side of the second conductive portion 7 is connected via the protrusion 11a of the base layer 11, the protrusion 12a of the base layer 12, and the bonding layer 13 (see reference). Figure 4 The second conductive portion 7 is electrically connected to the corner 5a of the conductive layer 5, and the end 7b of the second conductive portion 7, opposite to the end 7a, is exposed to the outside on the surface 21a of the main body 21. As an example, one of the pair of opposite corners of the second conductive portion 7 in the side wall 25 of the main body 21 extends in the Z-axis direction. The second conductive portion 7 is formed of a conductive material (e.g., Kova iron-nickel-cobalt alloy).

[0042] In the phototube 1 configured as above, for example, a negative potential is given to the electron emission portion 3 with the potential (ground potential) of the electron capturing portion 4 as a reference, and a negative potential (or the same potential as that of the electron emission portion 3) is given to the conductive layer 5 with the potential of the electron emission portion 3 as a reference. In this state, if light incident from the outside to the light transmitting portion 22 reaches the photoelectric surface 32 through the light transmitting portion 22 and the conductive layer 5, photoelectrons are emitted from the photoelectric surface 32 by a photoelectron emission effect. Of the photoelectrons emitted from the photoelectric surface 32, photoelectrons that travel toward the electron capturing portion 4 are attracted close to the electron capturing portion 4 by the electron capturing portion 4 to reach the electron capturing portion 4. Of the photoelectrons emitted from the photoelectric surface 32, photoelectrons that travel toward the light transmitting portion 22 are bounced back by a repulsive force generated between the photoelectrons and the conductive layer 5 to reach the electron capturing portion 4. By detecting the photoelectrons (current) that reach the electron capturing portion 4 in this way, light can be detected. Further, from the viewpoint of simplifying the power supply to the phototube 1 by using as many as possible the same voltage values, it is preferable that the electron emission portion 3 and the conductive layer 5 have the same potential.

[0043] As described above, in the phototube 1, the electron capturing portion 4 is disposed between the light transmitting portion 22 and the photoelectric surface 32 in the housing 2, and the conductive layer 5 is disposed at a position closer to the light transmitting portion 22 than the electron capturing portion 4 in the housing 2 in opposition to the photoelectric surface 32. In this way, since the electron capturing portion 4 is provided separately from the conductive layer 5 (i.e., the function of capturing photoelectrons does not need to be borne only by the conductive layer 5), the conductive layer 5 can be configured in a manner that allows light to sufficiently transmit therethrough. Thus, light incident from the outside to the light transmitting portion 22 easily reaches the photoelectric surface 32. Therefore, the probability that light incident from the outside to the light transmitting portion 22 reaches the photoelectric surface 32 can be improved. Further, for example, by giving a negative potential to the electron emission portion 3 with the potential (ground potential) of the electron capturing portion 4 as a reference, and giving a negative potential (or the same potential as that of the electron emission portion 3) to the conductive layer 5 with the potential of the electron emission portion 3 as a reference, even if some of the photoelectrons emitted from the photoelectric surface 32 travel toward the light transmitting portion 22, the some of the photoelectrons are bounced back by a repulsive force generated between the some of the photoelectrons and the conductive layer 5 to easily reach the electron capturing portion 4. Therefore, the probability that the photoelectrons emitted from the photoelectric surface 32 are captured by the electron capturing portion 4 can be improved. As described above, according to the phototube 1, the detection efficiency of light can be improved.

[0044] In the phototube 1, the conductive layer 5 is disposed along the light transmitting portion 22 in the housing 2 in opposition to the photoelectric surface 32. Thus, the effect of the conductive layer 5 can be exerted along the light transmitting portion 22.

[0045] In the phototube 1, the electron capturing portion 4 is a plate-shaped member, which is arranged in a manner of dividing the region within the housing 2 when viewed from the light transmitting portion 22 side. Thereby, the light incident to the light transmitting portion 22 with a large incident angle is also easily reflected in the pair of main surfaces 4a of the electron capturing portion 4 respectively to reach the photoelectric surface 32. Therefore, the probability of the light incident from the outside to the light transmitting portion 22 to reach the photoelectric surface 32 can be further improved. In addition, the photoelectron emitted from the photoelectric surface 32 easily reaches each of the pair of main surfaces 4a of the electron capturing portion 4. Therefore, the probability of the photoelectron emitted from the photoelectric surface 32 to be captured by the electron capturing portion 4 can be further improved.

[0046] In the phototube 1, the light transmitting portion 22 is installed to the main body portion 21 in a manner of closing the opening of the recessed portion 23, the electron emitting portion 3 and the electron capturing portion 4 are supported by the main body portion 21, and the conductive layer 5 is supported by the light transmitting portion 22. Thereby, the structure in which the photoelectric surface 32, the electron capturing portion 4 and the conductive layer 5 are arranged with high precision can be easily and reliably achieved.

[0047] In the phototube 1, the electron emitting portion 3 is arranged to the inner surface 23a of the recessed portion 23 of the main body portion 21, the electron capturing portion 4 is erected to the opening edge 23b of the recessed portion 23 of the main body portion 21, and the conductive layer 5 is arranged to the surface 22a of the light transmitting portion 22. Thereby, the structure in which the photoelectric surface 32, the electron capturing portion 4 and the conductive layer 5 are arranged with high precision can be achieved with a high efficient layout. In addition, the electron emitting portion 3, the electron capturing portion 4 and the conductive layer 5 can be stably held, and a structure with high seismic resistance can be obtained.

[0048] In the phototube 1, a part of each of the first conductive portions 6 electrically connected to the electron capturing portion 4, a part of the second conductive portion 7 electrically connected to the conductive layer 5, and a part of the electron emitting portion 3 are exposed to the outside at the surface 21a of the main body portion 21. Thereby, the external wiring can be electrically connected to the part of each of the first conductive portions 6, the part of the second conductive portion 7 and the part of the electron emitting portion 3 respectively at the same surface (the surface 21a of the main body portion 21) without hindering the incidence of the light to the light transmitting portion 22 and with easy wiring of the external wiring. In addition, the desired electric potential can be imparted to the electron emitting portion 3, the electron capturing portion 4 and the conductive layer 5 respectively.

[0049] In addition, as an example, the phototube 1 is manufactured as follows. First, the electron emission portion 3, the integrally formed electron capturing portion 4, and the pair of first conductive portions 6 and the second conductive portion 7 (hereinafter, referred to as "the electron emission portion 3 and the like") are provided to a jig. Next, fusion and re-solidification of a kova glass plate is performed on the jig on which the electron emission portion 3 and the like are provided, and the electron emission portion 3 and the like are unitized with the main body portion 21. Next, the surface 21a of the main body portion 21 is polished, and a part of each of the first conductive portions 6, a part of the second conductive portion 7, and a part of the electron emission portion 3 are exposed to the outside at the surface 21a of the main body portion 21. Next, the base layer 11 is formed at the end surface 25a of the side wall 25 of the main body portion 21. On the other hand, the conductive layer 5 and the base layer 12 are formed at the surface 22a of the light transmitting portion 22. Next, in a high vacuum space, the base layer 11 formed at the main body portion 21 and the base layer 12 formed at the light transmitting portion 22 are joined by the joining layer 13, and the phototube 1 is obtained.

[0050] Each of the above processes is performed in a wafer state in which a plurality of structures of the phototube 1 are two-dimensionally arranged, respectively, and finally, each of the phototubes 1 is cut out. Thus, reduction of the assembly process can be achieved, and further, reduction of manufacturing cost can be achieved, and the phototube 1 which is miniaturized can be mass-produced. In the phototube 1, since the electron emission portion 3 and the like and the main body portion 21 are unitized, positional accuracy of the electron emission portion 3 and the like is also improved, and positional displacement of the electron emission portion 3 and the like due to vibration and impact is also prevented.

[0051] The present application is not limited to the above-described embodiments. For example, as shown in Figs. 10 and 11, in the phototube 1, a part of the electron emission portion 3 is not exposed to the outside at the surface 21a of the main body portion 21, and the electron emission portion 3 and the conductive layer 5 can be electrically connected by the wiring 8. Figure 5 Figure 6 In the phototube 1 shown in Figs. 10 and 11, the wiring 8 is formed at the inclined surface 21b which the main body portion 21 has. The inclined surface 21b extends from the opening rim 23b of the recessed portion 23 to the end surface 25a of the side wall 25. Figure 5 Figure 6 In the phototube 1 shown in Figs. 10 and 11, at the same surface (the surface 21a of the main body portion 21) at which the light is not hindered from being incident on the light transmitting portion 22 and at which wiring of the external wiring is easy, the external wiring can be electrically connected to a part of each of the first conductive portions 6 and a part of the second conductive portion 7, respectively, and for example, a negative potential can be given to the electron emission portion 3 and the conductive layer 5 based on the potential (ground potential) of the electron capturing portion 4. In addition, simplification of the structure of the conductive portion for electrically connecting the external wiring can be achieved. Figure 5 Figure 6 In the phototube 1 shown in Figs. 10 and 11, at the same surface (the surface 21a of the main body portion 21) at which the light is not hindered from being incident on the light transmitting portion 22 and at which wiring of the external wiring is easy, the external wiring can be electrically connected to a part of each of the first conductive portions 6 and a part of the second conductive portion 7, respectively, and for example, a negative potential can be given to the electron emission portion 3 and the conductive layer 5 based on the potential (ground potential) of the electron capturing portion 4. In addition, simplification of the structure of the conductive portion for electrically connecting the external wiring can be achieved.

[0052] As shown in Figs. 12 and 13, in the phototube 1, a part of the electron emission portion 3 is not exposed to the outside at the surface 21a of the main body portion 21, and the electron emission portion 3 and the conductive layer 5 can be electrically connected by the wiring 8. Figure 5 Figure 6 ​​​​As shown in FIG. 1, the photoelectric cell 1 in which the electron emission portion 3 and the conductive layer 5 are electrically connected by the wiring 8 can not be provided with the second conductive portion 7, and a part of the electron emission portion 3 is exposed to the outside at the surface 21a of the main body portion 21. In this case, by electrically connecting the external wiring to a part of each of the first conductive portion 6 and the electron emission portion 3 exposed to the outside at the surface 21a of the main body portion 21, for example, the electron emission portion 3 and the conductive layer 5 can be given a negative potential with reference to the potential (ground potential) of the electron capturing portion 4.

[0053] The electron capturing portion 4 is not limited to a plate-shaped member. As one example, as shown in FIG. 2, the electron capturing portion 4 can be a bowl-shaped member having a plurality of light passing openings 4c. Figure 7 and Figure 8 As shown in FIG. 2, the electron capturing portion 4 can be a bowl-shaped member having a plurality of light passing openings 4c. In the photoelectric cell 1 shown in FIG. 2, a part 41 of the electron capturing portion 4 including the bottom is located inside the region 33 of the photoelectric surface 32. In the photoelectric cell 1 shown in FIG. 2, light passing through the light passing portion 22 and the conductive layer 5 reaches the photoelectric surface 32 through the plurality of light passing openings 4c. Further, in FIG. 2, the illustration of the light passing openings 4c formed in a part other than the cross-sectional portion in the electron capturing portion 4 is omitted. Figure 7 Figure 7 As shown in FIG. 2, the electron capturing portion 4 can be a bowl-shaped member having a plurality of light passing openings 4c. In the photoelectric cell 1 shown in FIG. 2, a part 41 of the electron capturing portion 4 including the bottom is located inside the region 33 of the photoelectric surface 32. In the photoelectric cell 1 shown in FIG. 2, light passing through the light passing portion 22 and the conductive layer 5 reaches the photoelectric surface 32 through the plurality of light passing openings 4c. Further, in FIG. 2, the illustration of the light passing openings 4c formed in a part other than the cross-sectional portion in the electron capturing portion 4 is omitted. Figure 7

[0054] As shown in FIG. 2, the electron capturing portion 4 can be a bowl-shaped member having a plurality of light passing openings 4c. In the photoelectric cell 1 shown in FIG. 2, a part 41 of the electron capturing portion 4 including the bottom is located inside the region 33 of the photoelectric surface 32. In the photoelectric cell 1 shown in FIG. 2, light passing through the light passing portion 22 and the conductive layer 5 reaches the photoelectric surface 32 through the plurality of light passing openings 4c. Further, in FIG. 2, the illustration of the light passing openings 4c formed in a part other than the cross-sectional portion in the electron capturing portion 4 is omitted. Figure 9

[0055] In the above-described embodiments and all the modifications, the region inside the housing 2 can be a region in which a discharge gas such as neon gas or hydrogen gas is enclosed. In the above-described embodiments and all the modifications, instead of the pair of first conductive portions 6, one first conductive portion 6 can be electrically connected to the electron capturing portion 4.

[0056] ​​​In the above embodiment and all the modifications, the conductive layer 5 can be arranged in the housing 2 in a manner opposite to the photoelectric surface 32 on the light-transmitting portion 22 side of at least a part of the electron capturing portion 4. As one example, the conductive layer 5 can be supported by the main body portion 21 without contacting the light-transmitting portion 22 by extending in the space on the inner side of the side wall 25 of the main body portion 21. In the above embodiment and all the modifications, the photoelectric surface 32 can not be a concave surface in the housing 2 facing the light-transmitting portion 22 side, but can be a flat surface, for example. In the above embodiment and all the modifications, the electron capturing portion 4 can not be located in the area 33 on the inner side of the concave photoelectric surface 32 with at least a part 41 thereof, but the entire electron capturing portion 4 can not be located in the area 33 on the inner side of the concave photoelectric surface 32, for example. In the above embodiment and all the modifications, the first conductive portion 6 can be directly connected to the electron capturing portion 4, or can be indirectly (i.e., via another conductive member) connected to the electron capturing portion 4. That is, the first conductive portion 6 can be electrically connected to the electron capturing portion 4. In the above embodiment and all the modifications, the second conductive portion 7 can be directly connected to the conductive layer 5, or can be indirectly (i.e., via another conductive member) connected to the conductive layer 5. That is, the second conductive portion 7 can be electrically connected to the conductive layer 5.

[0057] BRIEF DESCRIPTION OF DRAWINGS

[0058] 1...photocell

[0059] 2...housing

[0060] 3...electron emitting portion

[0061] 4...electron capturing portion

[0062] 5...conductive layer

[0063] 6...first conductive portion

[0064] 7...second conductive portion

[0065] 8...wiring

[0066] 21...main body portion

[0067] 21a...surface

[0068] 22...light-transmitting portion

[0069] 22a...surface

[0070] 23...recess

[0071] 23a...inner surface

[0072] 23b...opening rim

[0073] 32...photoelectric surface

Claims

1. A phototube, comprising: A housing, including a light-transmitting portion; An electron emitting unit includes a photoelectric surface disposed within the housing; An electron capturing unit is disposed within the housing between the light transmitting portion and the photoelectric surface; and A conductive layer is configured to be disposed within the housing, facing the photoelectric surface, at a position closer to the light-transmitting portion than at least a portion of the electron-capturing portion, allowing light to pass through. The electron capturing part is a plate-shaped component arranged in such a way that it divides the area within the housing when viewed from the light-transmitting part side.

2. The phototube as described in claim 1, wherein, The conductive layer is disposed within the housing along the light-transmitting portion in a manner opposite to the photoelectric surface.

3. The phototube as described in claim 1, wherein, The housing also includes a main body portion with a recess. The light-transmitting portion is mounted on the main body in a manner that closes the opening of the recess. The electron emitting unit and the electron capturing unit are supported by the main body. The conductive layer is supported by the light-transmitting portion.

4. The phototube as described in claim 3, wherein, The electron emitting part is disposed on the inner surface of the recess. The electron capture unit is mounted on the opening edge of the recess. The conductive layer is disposed on the surface of the light-transmitting portion on the electron-emitting portion side.

5. The phototube as described in claim 3 or 4, wherein, The phototube also includes: A first conductive part, which is electrically connected to the electron-capturing part; and The second conductive portion is electrically connected to the conductive layer. A portion of the first conductive portion, a portion of the second conductive portion, and a portion of the electron emitting portion are exposed to the outside on the surface of the main body on the side opposite to the light-transmitting portion.

6. The phototube as described in claim 3 or 4, wherein, The phototube also includes: The first conductive part is electrically connected to the electron capturing part; A second conductive portion, which is electrically connected to the conductive layer; and Wiring that electrically connects the electron emitting part to the conductive layer. A portion of the first conductive portion and a portion of the second conductive portion are exposed to the outside on the surface of the main body on the side opposite to the light-transmitting portion.

7. A phototube, comprising: A housing, including a light-transmitting portion; An electron emitting unit includes a photoelectric surface disposed within the housing; An electron capturing unit is disposed within the housing between the light transmitting portion and the photoelectric surface; and A conductive layer is configured to be disposed within the housing, facing the photoelectric surface, at a position closer to the light-transmitting portion than at least a portion of the electron-capturing portion, allowing light to pass through. The housing also includes a main body portion with a recess. The light-transmitting portion is mounted on the main body in a manner that closes the opening of the recess. The electron emitting unit and the electron capturing unit are supported by the main body. The conductive layer is supported by the light-transmitting portion.

8. The phototube as described in claim 7, wherein, The conductive layer is disposed within the housing along the light-transmitting portion in a manner opposite to the photoelectric surface.

9. The phototube as described in claim 7, wherein, The electron capturing part is a plate-shaped component arranged in such a way that it divides the area within the housing when viewed from the light-transmitting part side.

10. The phototube as claimed in claim 7, wherein, The electron emitting part is disposed on the inner surface of the recess. The electron capture unit is mounted on the opening edge of the recess. The conductive layer is disposed on the surface of the light-transmitting portion on the electron-emitting portion side.

11. The phototube as described in any one of claims 7 to 10, wherein, The phototube also includes: A first conductive part, which is electrically connected to the electron-capturing part; and The second conductive portion is electrically connected to the conductive layer. A portion of the first conductive portion, a portion of the second conductive portion, and a portion of the electron emitting portion are exposed to the outside on the surface of the main body on the side opposite to the light-transmitting portion.

12. The phototube as described in any one of claims 7 to 10, wherein, The phototube also includes: The first conductive part is electrically connected to the electron capturing part; A second conductive portion, which is electrically connected to the conductive layer; and Wiring that electrically connects the electron emitting part to the conductive layer. A portion of the first conductive portion and a portion of the second conductive portion are exposed to the outside on the surface of the main body on the side opposite to the light-transmitting portion.

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