A gas-driven two-dimensional adjustable-speed precision air-bearing platform

Abstract

Title of the Invention: A Gas-Powered Two-Dimensional Adjustable-Speed Precision Air-Floating Platform Abstract: This is an air-floating device that enables the platform to move in a two-dimensional space. The device has two types of throttle orifices. One is a fixed throttle orifice machined directly on the bearing surface, and the other is a rotatable throttle orifice. Compressed air is introduced to lift the platform to a certain height. The rotatable spherical body is connected to two pairs of parallel link mechanisms. By controlling the parallel link mechanisms, the spherical body rotates around its center of the sphere, and then the outlet direction of the throttle orifice changes, forming a two-dimensional horizontal driving force on the platform, so that the platform moves in the XY plane. The fixed throttle orifice and the rotatable throttle orifice are respectively supplied with air by two pressure pumps, thus avoiding the mutual interference between floating and lateral driving and ensuring the stability of the movement of the bearing platform. This device realizes the stable variable-speed movement of the platform without friction in the two-dimensional space.

Description

Technical Field

[0001] The air-floating platform relates to the field of low-friction coefficient and high-precision motion, and particularly relates to an air-floating bearing platform with adjustable motion speed.

Background Art

[0002] The sliding friction between the bearing platform and the bearing surface or the guide rail is an important factor affecting the motion accuracy of the bearing platform. By using the air-floating method to separate the bearing platform from the bearing surface, the bearing platform and the bearing surface are not in direct contact, which greatly reduces the frictional resistance received by the bearing platform.

[0003] For different application scenarios, there are different requirements for the motion speed of the bearing platform. Therefore, it is crucial to design a moving air-floating platform whose motion speed can be adjusted.

[0004] Designing the motion speed of the bearing platform to be adjustable can improve the processing or transportation efficiency.

Summary of the Invention

[0005] Disclosed is a two-dimensional adjustable-speed precision air-floating platform driven by gas. High-pressure compressed air is introduced into a fixed throttle hole and a rotatable throttle hole. A gas film is formed between the load surface and the bearing platform, and the bearing platform is floated on the load surface. The rotatable throttle hole rotates a certain angle around the center of the spherical body of the rotatable sphere, giving a horizontal thrust to the bearing platform. The output mass flow rate of the fixed throttle hole is adjusted to enable the bearing platform to move stably in the XY plane. By adjusting the rotatable throttle hole to rotate at different angles, the speed adjustment of the bearing platform is achieved; the outgoing direction of the rotatable throttle hole does not deflect, and the bearing platform is suspended by adjusting the output mass flow rate of the fixed throttle hole.

[0006] To achieve the above object, the technical solution is as follows:

[0007] A gas-driven two-dimensional adjustable-speed precision air-bearing platform, which includes a bearing plate, rotatable spherical bodies, and a fixed plate. Several rotatable spherical bodies are embedded between the bearing plate and the fixed plate. There are grooves for installing sealed lubrication sleeves between the bearing plate and the fixed plate. The rotatable spherical bodies are wrapped by the sealed lubrication sleeves. The rotatable spherical bodies can rotate arbitrarily around their centers, and several throttling holes are machined on the rotatable spherical bodies. Several fixed throttling holes are machined on the bearing plate. The bearing plate, the fixed plate, and the base are connected by fastening connectors. Two through holes are respectively connected to two external air supply pressure pumps. The air inlet end of the air ventilation pipe is connected to the through hole, and the air outlet end is connected to the fixed throttling hole. The air inlet end of the air ventilation pipe is connected to the through hole, and the air outlet end is connected to the throttling holes on the rotatable spherical bodies. The gas ejected from the fixed throttling holes and the rotatable throttling holes makes the bearing platform float above the bearing plate. Several tower-shaped structures are machined on the stress surface of the bearing platform. The rotatable spherical bodies and the parallel link mechanism are hinged by hinges that can rotate relative to each other. Adjacent rotatable spheres are hinged together by connecting rods. A position sensor is installed at the center of the stress surface of the bearing platform. The position sensor controls the opening and closing of the solenoid valves.

[0008] A gas-driven two-dimensional adjustable-speed precision air-bearing platform: Driven by a stepper motor, the parallel link mechanism enables the rotatable spherical body to rotate by any angle around its center, and the throttling holes on the rotatable spherical body rotate from 0 to 30°.

[0009] A gas-driven two-dimensional adjustable-speed precision air-bearing platform: Adjacent rotatable spherical bodies are hinged together by connecting rods, and the rotatable spherical bodies and the connecting rods can rotate relative to each other.

[0010] A gas-driven two-dimensional adjustable-speed precision air-bearing platform: Tower-shaped structures are machined on the stress surface of the bearing platform, with a height of 5 microns.

[0011] According to the gas-driven two-dimensional adjustable-speed precision air-bearing platform described in claim 1, it is characterized in that: The working clearance between the bearing platform and the bearing plate is less than 15 microns, so as to ensure the Z-direction bearing capacity of the bearing platform and the driving force for lateral movement in the X and Y directions.

[0012] A gas-driven two-dimensional adjustable-speed precision air-bearing platform: Throttling holes are machined on the end faces of the rotatable spherical bodies.

[0013] A gas-driven two-dimensional adjustable-speed precision air-bearing platform: The rotatable spherical bodies are wrapped by lubrication sleeves, and the shape of the lubrication sleeves can be circular.

[0014] A gas-driven two-dimensional adjustable-speed precision air-bearing platform: There is a set of the fixed throttling holes between every four adjacent rotatable spherical bodies.

[0015] A gas-driven two-dimensional adjustable-speed precision air-bearing platform: The position sensor installed on the bearing platform can control the solenoid valve directly below it to open, and the solenoid valves not within the range will automatically close.

[0016] A gas-driven two-dimensional adjustable-speed precision air-bearing platform: The flow control valve can control the output flow of the external air supply pressure pump according to the deflection angle of the parallel link mechanism, and adjust the two-dimensional movement direction and speed of the platform.

[0017] The beneficial effects of a provided gas-driven two-dimensional adjustable-speed precision air-bearing platform:

[0018] 1. The fixed orifice and the orifices on the rotatable spherical body can be automatically opened or closed, reducing energy waste and improving the movement stability of the bearing platform at the same time;

[0019] 2. The rotatable spherical body rotates at different angles, giving different thrusts to the bearing platform, realizing the variable-speed movement of the bearing platform, thus ensuring that the bearing platform can start and stop stably, and ensuring the safety of the working process;

[0020] 3. When the bearing platform is in the idle stroke, the movement speed of the bearing platform is increased, improving the processing or transportation efficiency;

[0021] 4. Through the cooperation of two pairs of parallel link mechanisms, the bearing platform can move arbitrarily on the XY plane. During the processing or transportation process, the movement of the bearing platform on the optimal path can be controlled, improving the working efficiency.

Description of the Drawings

[0022] In order to more clearly illustrate the technical solutions in the embodiments, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the following drawings are only some of the embodiments. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings, where:

[0023] Figure 1 It is a schematic diagram of the movement structure of a gas-driven two-dimensional adjustable-speed precision air-bearing platform;

[0024] Figure 2 It is a schematic diagram of the air flow pipeline distribution of a gas-driven two-dimensional adjustable-speed precision air-bearing platform;

[0025] Figure 3 It is a schematic diagram of the distribution of the rotatable spherical bodies of a gas-driven two-dimensional adjustable-speed precision air-bearing platform and the connection between the rotatable spherical bodies;

[0026] Figure 4 For Figure 5 The cross-sectional view of the bearing plate along the A-A line in

[0027] Figure 5 Top view of the carrier plate of the embodiment;

[0028] Figure 6 Top view of the fixing plate of the embodiment;

[0029] Figure 7 For Figure 6 Cross-sectional view of the fixing plate along line B-B in

[0030] Figure 8 Schematic diagram of the carrier platform of the embodiment;

[0031] Figure 9 Schematic diagram of the rotatable spherical body of the embodiment;

[0032] Figure 10 Top view of the base body of the embodiment;

[0033] Figure 11 For Figure 10 Cross-sectional view of the base body along line C-C in

Specific Embodiments

[0034] Next, the technical solutions will be clearly and completely described in conjunction with the accompanying drawings in the embodiments. The described embodiments are only a part of the embodiments, not all of them. Based on the embodiments, other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope.

[0035] It should be specifically noted that all directional indications (such as up, down, left, right, front, back...) in the embodiments are only used to explain the relative positional relationship and movement conditions between components in a specific posture. If the specific posture changes, the directional indications will also change accordingly.

[0036] In this specification, unless otherwise clearly specified and limited, terms such as "connection" and "fixation" should be understood in a broad sense. For example, "fixation" can be a fixed connection, a detachable connection, or integrated: it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, and it can be the internal communication of two components or the interaction relationship between two components, unless otherwise clearly limited. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0037] Embodiment

[0038] A two-dimensional stable motion platform with adjustable speed is provided, as shown in Figure 1 and Figure 2, a throttle hole 2 is machined on the bearing plate 1. A rotatable spherical body 4 is embedded between the bearing plate 1 and the fixed plate 7. There is a lubricating sleeve 3 outside the rotatable spherical body 4, and the rotatable spherical body 4 can rotate freely around its spherical center; the rotatable spherical bodies 4 are connected together by a connecting rod 24 in the manner shown by Figure 3 . The connection between the rotatable spherical body 4 and the connecting rod 24 is a rotatable connection with each other; the rotatable spherical bodies 4 in one row and one column are respectively hinged to a parallel link mechanism 23 and a parallel link mechanism 10. The prime movers of the two pairs of parallel link mechanisms are controlled by a stepping motor. When the two pairs of parallel link mechanisms rotate a certain angle, the rotatable spherical body 4 also rotates a corresponding angle.

[0039] As shown by Figure 3 , each group of throttle holes 2 has an independent air supply pipeline, and there is an electromagnetic valve 20 on the pipeline to control the opening and closing of the pipeline. The air supply pipelines of all the throttle holes 2 finally converge into an air supply pipeline 9, and the flow rate of the air supply pipeline 9 is controlled by a flow control valve 14. An external air supply pressure pump 16 supplies air to the air supply pipeline 9; each group of throttle holes 6 has an independent air supply pipeline, and there is an electromagnetic valve 19 on the pipeline to control the opening and closing of the pipeline. The air supply pipelines of all the throttle holes 6 finally converge into an air supply pipeline 11, and the flow rate of the air supply pipeline is controlled by a flow control valve 13. An external air supply pressure pump 15 supplies air to the air supply pipeline 11.

[0040] The bearing platform 5 is suspended above the bearing plate 1 by the high-pressure air ejected from the throttle holes 2 and the throttle holes 6. A position sensor 21 is installed in the bearing platform. The position sensor 21 can control all the electromagnetic valves 20 and electromagnetic valves 19 directly below the bearing platform 5 to open, and the corresponding throttle holes 2 and throttle holes 6 eject air. All the electromagnetic valves 20 and electromagnetic valves 19 not below the bearing platform automatically close, and the corresponding throttle holes 2 and throttle holes 6 do not eject air.

[0041] To ensure the stability of the movement of the bearing platform, when the parallel link structure 10 and the parallel link mechanism 23 rotate a certain angle, the flow control valve 14 automatically adjusts to make the bearing platform 5 keep suspended in the Z-axis direction.

[0042] The number of a group of throttle holes 2 is from 1 to 100, and the distribution of a group of throttle holes 2 can be linear distribution, circular distribution, square distribution, circular distribution;

[0043] The number of a group of throttle holes 6 is from 1 to 100, and the distribution of a group of throttle holes 6 can be linear distribution, circular distribution, square distribution, circular distribution;

[0044] The shape of the bearing platform 5 can be quadrilateral, circular, triangular.

Claims

1. A gas-driven two-dimensional adjustable-speed precision air-bearing platform, characterized by: The described precision air-bearing platform includes a bearing plate (1), a rotatable spherical body (4), and a fixed plate (7). Several rotatable spherical bodies (4) are embedded between the bearing plate (1) and the fixed plate (7). A groove for installing a sealed lubricating sleeve (3) is provided between the bearing plate (1) and the fixed plate (7). The rotatable spherical body (4) is wrapped by the sealed lubricating sleeve (3). The rotatable spherical body (4) can rotate arbitrarily around its center of the sphere, and several throttle holes (6) are machined on the rotatable spherical body (4). Several fixed throttle holes (2) are machined on the bearing plate (1). The bearing plate (1), the fixed plate (7), and the base body (8) are connected by fastening connectors (12). Through holes (9, 11) are respectively connected to external air supply pressure pumps (15, 16). The inlet end of the ventilation pipeline (17) is connected to the through hole (9), and the outlet end is connected to the fixed throttle hole (2). The inlet end of the ventilation pipeline (18) is connected to the through hole (11), and the outlet end is connected to the throttle hole (6) on the rotatable spherical body (4). The gas ejected from the fixed throttle hole (2) and the throttle hole (6) makes the bearing platform (5) float above the bearing plate (1). Several tower-shaped structures (22) are machined on the stress surface of the bearing platform (5). The rotatable spherical body (4) and the parallel link mechanism (10, 23) are hinged by hinges that can rotate relative to each other. Adjacent rotatable spherical bodies (4) are hinged together by a connecting rod (24). A position sensor (21) is installed at the center of the stress surface of the bearing platform (5). The position sensor (21) controls the opening and closing of solenoid valves (19) and (20).

2. The two-dimensional adjustable-speed precision air-bearing platform driven by gas according to claim 1, wherein: The parallel link mechanisms (10) and (23) enable the rotatable spherical body (4) to rotate around its center of the sphere by any angle, causing the throttle hole (6) to rotate from 0 to 30°.

3. A gas-driven two-dimensional adjustable-speed precision air-bearing platform according to claim 1, characterized in that: Two adjacent rotatable spherical bodies (4) are connected by a connecting rod (24), and the rotatable spherical body (4) and the connecting rod (24) can rotate relative to each other.

4. A gas-driven two-dimensional adjustable-speed precision air-bearing platform according to claim 1, wherein: The stress surface of the bearing platform (5) is machined with tower-shaped structures (22) with a height of 5 microns.

5. A gas-driven two-dimensional adjustable-speed precision air-bearing platform according to claim 1, characterized in that: The working gap between the bearing platform (5) and the bearing plate (1) is less than 15 microns, thus ensuring the Z-direction bearing capacity and the driving force for lateral movement in the X and Y directions of the bearing platform (5).

6. The two-dimensional adjustable-speed precision air-bearing platform driven by gas according to claim 1, wherein: Throttle holes (2) are machined on the end face of the rotatable spherical body (4).

7. A gas-driven two-dimensional adjustable-speed precision air-bearing platform according to claim 1, characterized in that: The rotatable spherical body (4) is wrapped by a sealed lubricating sleeve (3), and the shape of the sealed lubricating sleeve (3) is annular or cylindrical.

8. A gas-driven two-dimensional adjustable-speed precision air-bearing platform according to claim 1, characterized in that: There is a set of fixed throttle holes (2) between four adjacent rotatable spherical bodies (4).

9. A gas-driven two-dimensional adjustable-speed precision air-bearing platform according to claim 1, characterized in that: The position sensor (21) installed on the bearing platform (5) can control the solenoid valves (19) and (20) directly below it to open, and the solenoid valves (19) and (20) outside the range will automatically close.

10. A gas-driven two-dimensional adjustable-speed precision air-bearing platform according to claim 1, characterized in that: The flow control valves (13) and (14) can control the output flow rates of the external air supply pressure pumps (15) and (16) according to the deflection angles of the four-bar mechanisms (10) and (23), and adjust the two-dimensional movement direction and speed of the platform.

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