Chip area-based multi-device automatic screening method and system

Abstract

The present invention provides a multi-device automatic screening method based on chip regions, comprising the following steps: Step S1: obtaining a chip region list and a device attribute list; Step S2: obtaining a preset number N of continuous chip regions and M selected device attributes; screening a number of combined regions from the chip region list; and screening M target devices from the devices located in the combined regions based on the device attribute list, and determining whether each of the M target devices satisfies the M device attributes in a one-to-one correspondence. By utilizing the relationship between continuous chip regions and devices, the present invention can screen out more effective combinations of devices to be tested based on the reasonable connection relationships between devices in a real physical environment.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor design and production technology, and in particular to a chip area-based multi-device automatic screening method and system. Background Art

[0002] Throughout the lifecycle of advanced processes, there is a significant risk that impacts product yield: the process development phase (a relatively simple environment) focuses on developing a platform process for a specific process node, while the product introduction and mass production phases (a complex and volatile environment) are driven by actual product results. Chip products are diverse, and each chip's design maturity and process sensitivity vary, sometimes significantly. Therefore, during chip introduction, many issues that were not discovered or addressed during the process development phase can arise, leading to a disconnect between process development and product introduction.

[0003] With traditional test chip processes, customers can only infer the status of corresponding devices in production chips by testing the test structures on the test chip. However, with the continuous evolution of process nodes, differences in the physical environments faced by devices in production chips and test structures in test chips have gradually become apparent. Therefore, designing built-in test chips using actual production chips to test key components in real physical environments is of great significance to improving chip product yield.

[0004] In the design of built-in test chips, selecting devices for testing based on a vast amount of device information is a crucial step. Current device screening methods typically focus on finding a single instance within a specific chip region that satisfies a specific device attribute, without requiring consideration of adjacent chip regions or even the relationships between devices. However, a growing number of application examples demonstrate that considering the relationships between chip regions and devices is necessary and appropriate for screening multiple devices. Therefore, a rational and effective device screening method that considers these factors is needed.

[0005] In view of this, it is indeed necessary to provide a multi-device automatic screening method and system based on chip area to solve the above problems. Summary of the Invention

[0006] The purpose of the present invention is to provide a multi-device automatic screening method and system based on chip areas, which takes into account the relationship between continuous chip areas and devices, thereby screening out more representative devices to be tested, so that the testing of key components of these product chips in a real physical environment can better reflect the status of the product chips.

[0007] To achieve the above object, the present invention provides a multi-device automatic screening method based on chip area, comprising the following steps:

[0008] Step S1: Obtain a chip region list and a device attribute list; wherein the chip region list includes information of each chip region, and the device attribute list includes information of each device;

[0009] Step S2: Obtain a preset number N of continuous chip areas and M selected device attributes; filter out at least one combination area from the chip area list; based on the device attribute list, filter out M target devices from the devices located in the combination area, and determine whether the M target devices respectively satisfy the M device attributes in a one-to-one correspondence; wherein the combination area is composed of N continuous chip areas.

[0010] As a further improvement of the present invention, it is determined that the M target devices located in the combination area selected in step S2 also satisfy: a distance between any two target devices in the combination area is less than a preset distance d.

[0011] As a further improvement of the present invention, for a preset number N of continuous chip regions and M selected device attributes, the following condition is satisfied: N≥M.

[0012] As a further improvement of the present invention, the information of the chip area includes positioning point information for determining the position of the chip area.

[0013] As a further improvement of the present invention, the chip area is a two-dimensional planar rectangular area, the position of the chip area is determined by using four vertices as positioning points, and the chip areas do not overlap with each other.

[0014] As a further improvement of the present invention, if two chip regions have two identical positioning points, the two chip regions are marked as continuous chip regions.

[0015] As a further improvement of the present invention, the device information includes location information and attribute information of the device.

[0016] As a further improvement of the present invention, step S2 specifically includes the following sub-steps:

[0017] Step S21: obtaining the preset number N of continuous chip regions and the selected M device attributes;

[0018] Step S22: Based on the preset number N of continuous chip regions, E combination regions R are obtained from the chip region list. i , where i∈[1,E]; the combined region R i Consists of N consecutive chip areas;

[0019] Step S23: Obtain F types of device combinations D according to the device attribute list j, where j∈[1,F]; the device combination D j Composed of M devices, wherein each of the M devices satisfies one of the M device attributes in a one-to-one correspondence;

[0020] Step S24: Initialize i=1, j=1;

[0021] Step S25: Get the i The device information in the device and judge the device combination D j Are all the M devices in the combined area R i If yes, then combine the device D j If all the M devices in the result are determined to be target devices, if not, go directly to step S26;

[0022] Step S26: Determine whether j is equal to F:

[0023] If not, set j=j+1 and go to step S25;

[0024] If yes, go to step S27;

[0025] Step S27: Determine whether i is equal to E:

[0026] If not, set i=i+1, j=1, and go to step S25;

[0027] If yes, then the multi-device automatic screening based on chip area is completed.

[0028] As a further improvement of the present invention, in step S25, it is also determined that the device combination D j Among the M devices in the , the distance between any two devices is less than the preset distance d. j The M devices are all in the combined area R i When the distance between any two devices is less than the preset distance d, the device combination D j The M devices in are all determined as target devices.

[0029] To further achieve the above-mentioned purpose, the present invention also provides a multi-device automatic screening system based on chip area, which includes a storage device, in which multiple instructions are stored, and the instructions are suitable for being loaded and executed by a processor. The aforementioned multi-device automatic screening method based on chip area.

[0030] The beneficial effect of the present invention is that the present invention screens out more representative devices to be tested by considering the relationship between continuous chip areas and devices, so that the testing of key devices of these product chips in a real physical environment can better reflect the status of the product chips, and provide more valuable information for improving the yield of chip products. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 It is a flow chart of a multi-device automatic screening method based on chip area according to a preferred embodiment of the present invention. DETAILED DESCRIPTION

[0032] The following examples may enable professionals in this field to more fully understand the present invention, but are not intended to limit the present invention in any way.

[0033] The following describes embodiments of the present disclosure in more detail with reference to the accompanying drawings. Although certain embodiments of the present disclosure are shown in the accompanying drawings, it should be understood that the present disclosure can be implemented in various forms and should not be construed as limited to the embodiments described herein. Rather, these embodiments are provided to provide a more thorough and complete understanding of the present disclosure. It should be understood that the drawings and embodiments of the present disclosure are for illustrative purposes only and are not intended to limit the scope of protection of the present disclosure.

[0034] See also Figure 1 As shown, the present invention discloses a multi-device automatic screening method based on chip area, comprising the following steps:

[0035] Step S1: Obtain a chip region list and a device attribute list; wherein the chip region list includes information of each chip region, and the device attribute list includes information of each device;

[0036] Step S2: Obtain a preset number N of continuous chip areas and M selected device attributes; filter out at least one combination area from the chip area list; based on the device attribute list, filter out M target devices from the devices located in the combination area, and determine whether the M target devices respectively satisfy the M device attributes in a one-to-one correspondence; wherein the combination area is composed of N continuous chip areas.

[0037] Furthermore, it is determined that the M target devices located in the combined area screened out in step S2 also satisfy: a distance between any two target devices in the combined area is less than a preset distance d.

[0038] Furthermore, for a preset number N of continuous chip regions and the selected M device attributes, N≥M is satisfied.

[0039] Furthermore, the information of the chip area includes positioning point information for determining the position of the chip area.

[0040] Furthermore, the chip area is a two-dimensional planar rectangular area, the position of the chip area is determined by using four vertices as positioning points, and the chip areas do not overlap with each other.

[0041] Furthermore, if two chip regions have two identical positioning points, the two chip regions are marked as continuous chip regions.

[0042] Furthermore, the device information includes location information and attribute information of the device.

[0043] Furthermore, the step S2 specifically includes the following sub-steps:

[0044] Step S21: obtaining the preset number N of continuous chip regions and the selected M device attributes;

[0045] Step S22: Based on the preset number N of continuous chip regions, E combination regions R are obtained from the chip region list. i , where i∈[1,E]; the combined region R i Consists of N consecutive chip areas;

[0046] Step S23: Obtain F types of device combinations D according to the device attribute list j , where j∈[1,F]; the device combination D j Composed of M devices, wherein each of the M devices satisfies one of the M device attributes in a one-to-one correspondence;

[0047] Step S24: Initialize i=1, j=1;

[0048] Step S25: Get the i The device information in the device and judge the device combination D j Are all the M devices in the combined area R i If yes, then combine the device D j If all the M devices in the result are determined to be target devices, if not, go directly to step S26;

[0049] Step S26: Determine whether j is equal to F:

[0050] If not, set j=j+1 and go to step S25;

[0051] If yes, go to step S27;

[0052] Step S27: Determine whether i is equal to E:

[0053] If not, set i=i+1, j=1, and go to step S25;

[0054] If yes, then the multi-device automatic screening based on chip area is completed.

[0055] Furthermore, in step S25, the device combination D is also judged. j Among the M devices in the , the distance between any two devices is less than the preset distance d. j The M devices are all in the combined area R i When the distance between any two devices is less than the preset distance d, the device combination D j The M devices in are all determined as target devices.

[0056] Example 1

[0057] Chip area: Each chip area is a two-dimensional plane rectangle, determined by the coordinate points of four vertices. Different chip areas do not overlap with each other.

[0058] Please refer to Table 1, which is an example of the coordinate points of the chip area of ​​this embodiment. This embodiment includes 8 chip areas, _r1 to _r9, where (X1, Y1) and (X2, Y2) are the coordinate points of the diagonals of a two-dimensional plane rectangle.

[0059] Table 1 Coordinate points of chip area

[0060]

[0061]

[0062] Device attributes: that is, device type. Multiple device types may correspond to the same device, and each device type has a sample quantity requirement.

[0063] Please refer to Table 2, which shows an example of the device type of this embodiment, wherein each row represents a device information, and Length, Width, SDB (single diffusion break), model, and positioning point coordinates (X, Y) can all be used as device types.

[0064] Table 2 Device types

[0065] Length Width SDB model X Y 0.010 0.060 0 Nch08 1.1 1.1 0.010 0.070 1 Nch08 1.2 1.2 0.010 0.080 2 Nch08 1.3 1.3 0.010 0.080 2 Nch08 4.1 1.1 0.016 0.080 1 Nch08 4.2 1.2 0.010 0.060 2 Nch08 7.1 1.1 0.010 0.080 2 Nch08 7.2 1.2 0.010 0.080 2 Nch08 7.3 1.3 0.016 0.080 2 Nch08 1.1 4.1 0.010 0.080 2 Nch08 4.1 4.1 0.016 0.080 2 Nch08 4.2 4.2 0.016 0.080 2 Nch08 4.3 4.3 0.010 0.070 1 Nch08 7.1 4.1 0.016 0.080 2 Nch08 1.1 7.1 0.010 0.080 2 Nch08 1.2 7.2 0.010 0.060 0 Nch08 1.3 7.3 0.010 0.080 2 Nch08 4.1 7.1 0.010 0.070 0 Nch08 7.1 7.1 0.016 0.080 0 Nch08 7.2 7.2 0.010 0.080 2 Nch08 7.3 7.3

[0066] The following examples may enable those skilled in the art to more fully understand the present invention, but are not intended to limit the present invention in any way.

[0067] The multi-device automatic screening method based on chip area of ​​the present invention specifically includes the following steps:

[0068] Step S1: Obtain a chip region list and a device attribute list;

[0069] Step S21: obtaining a preset number of consecutive chip regions N=3 and selected device attributes M=2, that is, it is necessary to find two device types in three consecutive chip regions, abbreviated as 3r2d;

[0070] Step S22: Based on the preset number of continuous chip regions N=3, E combination regions R are obtained from the chip region list. i , where i∈[1,E]; combined region R i It consists of 3 continuous chip areas;

[0071] Step S23: Obtain F device combinations D according to the device attribute list j , where j∈[1,F]; device combination D j The device is composed of two devices, and each of the two devices satisfies one of the two selected device attributes in a one-to-one correspondence, that is, one of the two devices satisfies one of the two device attributes, and the other of the two devices satisfies the other of the two device attributes;

[0072] Step S24: Initialize i=1, j=1;

[0073] Step S25: Get the i The device information in the device and judge the device combination D j Are both devices in the combined area R i Is the distance between the two devices less than the preset distance d? If so, combine the devices D j Both devices in are determined as target devices;

[0074] Step S26: Determine whether j is equal to F:

[0075] If not, set j=j+1 and go to step S25;

[0076] If yes, go to step S27;

[0077] Step S27: Determine whether i is equal to E:

[0078] If not, set i=i+1, j=1, and go to step S25;

[0079] If yes, then the multi-device automatic screening based on chip area is completed.

[0080] To sum up, the present invention screens out more representative devices to be tested by considering the relationship between continuous chip areas and devices, so that the testing of key devices of these product chips in a real physical environment can better reflect the status of the product chips and provide more valuable information for improving the yield of chip products.

[0081] The above are merely preferred embodiments of the present application and are not intended to limit the present application. Those skilled in the art will readily appreciate that various modifications and variations are possible. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present application shall be included within the scope of protection of the present application.

Claims

1. A multi-device automatic screening method based on chip area, characterized in that: The steps include: Step S1: Obtain a chip region list and a device attribute list; wherein the chip region list includes information about each chip region, and the device attribute list includes information about each device; the chip region information includes positioning point information for determining the position of the chip region; if two chip regions have the same two positioning points, the two chip regions are marked as continuous chip regions; Step S2: Obtaining a preset number N of contiguous chip regions and M selected device attributes; selecting at least one combination region from the chip region list; selecting M target devices from the devices located in the combination region based on the device attribute list, and determining whether each of the M target devices satisfies one device attribute of the M device attributes in a one-to-one correspondence; wherein the combination region is composed of N contiguous chip regions; Wherein, the step S2 specifically includes the following sub-steps: Step S21: obtaining the preset number N of continuous chip regions and the selected M device attributes; Step S22: Based on the preset number N of continuous chip regions, E combination regions are obtained from the chip region list. ,in, The combined area Consists of N consecutive chip areas; Step S23: Obtain F device combinations according to the device attribute list ,in, The device combination Composed of M devices, wherein each of the M devices satisfies one of the M device attributes in a one-to-one correspondence; Step S24: Initialization , ; Step S25: Get the The device information in the device and judge the device combination Are all the M devices in the combination area If yes, then combine the devices If all the M devices in the result are determined to be target devices, if not, go directly to step S26; Step S26: Determine whether j is equal to F: If not, then , and go to step S25; If yes, go to step S27; Step S27: Determine whether i is equal to E: If not, then , , and go to step S25; If yes, then the multi-device automatic screening based on chip area is completed.

2. The chip area-based multi-device automatic screening method according to claim 1, characterized in that: It is determined that the M target devices located in the combination area screened out in step S2 also satisfy: a distance between any two target devices of the device combination in the combination area is less than a preset distance d.

3. The chip area-based multi-device automatic screening method according to claim 1, characterized in that: For the preset number N of continuous chip regions and the selected M device attributes, the following conditions are met: .

4. The chip area-based multi-device automatic screening method according to claim 1, characterized in that: The chip area is a two-dimensional planar rectangular area, and the position of the chip area is determined by using four vertices as positioning points, and the chip areas do not overlap with each other.

5. The chip area-based multi-device automatic screening method according to claim 1, characterized in that: The device information includes location information and attribute information of the device.

6. The chip area-based multi-device automatic screening method according to claim 3, characterized in that: In step S25, the device combination is also judged Among the M devices in the device, whether the distance between any two devices is less than the preset distance d; when the device combination The M devices are all in the combined area When the distance between any two devices is less than the preset distance d, the devices are combined. The M devices in are all determined as target devices.

7. A multi-device automatic screening system based on chip area, characterized in that: The method comprises a storage device storing a plurality of instructions, wherein the instructions are suitable for being loaded by a processor and executing the multi-device automatic screening method based on chip area according to any one of claims 1 to 6.

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