Reticle temporary storage device

Abstract

This invention belongs to the technical field of LCD panel production equipment, and particularly relates to a photomask storage device, including a base, a main rotating mechanism, and a rotating frame connected to each other. The main rotating mechanism is installed inside the base; multiple clamping mechanisms for holding photomasks are provided on the side of the rotating frame; the rotating frame is connected to the main rotating mechanism; the main rotating mechanism drives the rotating frame to rotate 360°. The clamping mechanisms are used to hold photomasks, and the main rotating mechanism drives the rotating frame to rotate. When a robot arm needs to hold a specific photomask, the rotating frame rotates the clamping mechanism holding that photomask to the front of the robot arm, facilitating the robot arm's gripping. Since the rotating frame can rotate each photomask to the same plane, i.e., the front of the robot arm, only one parameter setting is needed for the robot arm to continuously and repeatedly grip the photomasks on the rotating frame. Introducing this invention into production will enhance the automation level of production, thereby improving production efficiency.

Description

Technical Field

[0001] This invention belongs to the technical field of liquid crystal panel production equipment, and particularly relates to a photomask storage device. Background Technology

[0002] The semiconductor device manufacturing process consists of nearly 20 steps, but the completion time for each step is not consistent. This results in a situation where a semiconductor device has completed the previous step, but the next step takes a long time. As a result, the semiconductor device that has completed the previous step cannot immediately enter the next step. At this time, temporary storage equipment is needed to temporarily store the semiconductor device that has completed the previous step, so as to avoid the workpiece being placed on the equipment of the previous step for a long time, which would affect the equipment's processing of subsequent semiconductor devices.

[0003] Utility model patent application CN202120792080.4 discloses a temporary storage rack with positioning capability for photomask boxes. The rack includes a storage rack body with a through hole at its top, a positioning plate at its top, and a long groove at its top that mates with the positioning plate. A short rod is fixedly connected to the bottom of the positioning plate, extending through to the bottom of the storage rack body. A slider is slidably connected to the inner wall of the positioning plate, and a limiting block that mates with the through hole is fixedly connected to the bottom of the slider. A connecting rod is fixedly connected to the top of the slider. This utility model, by incorporating a storage rack body, through hole, positioning plate, long groove, short rod, slider, limiting block, connecting rod, spring, pull ring, and anti-slip block, solves the problem of existing temporary storage racks lacking positioning functionality and further addresses the temporary storage problem of photomasks in a certain semiconductor production process. However, since each photomask has a different temporary storage location, it is inconvenient to automatically grasp the photomasks. Different parameter settings are required for the robotic arm to grasp photomasks in different positions. Therefore, this utility model is not conducive to the automation upgrade in the processing and manufacturing of semiconductor devices. Summary of the Invention

[0004] The purpose of this invention is to provide a photomask storage device, which aims to solve the technical problem that existing photomask storage devices cannot allow each photomask to be grasped by a robotic arm in the same state, which is not conducive to the automation upgrade in the processing and manufacturing of semiconductor devices.

[0005] To achieve the above objectives, embodiments of the present invention provide a photomask storage device, including a base, and further including a main rotating mechanism and a rotating frame connected to each other; the main rotating mechanism is installed inside the base; the rotating frame is provided with a plurality of clamping mechanisms for clamping the photomask on its side; the rotating frame is connected to the main rotating mechanism; the main rotating mechanism drives the rotating frame to rotate 360°.

[0006] Optionally, a secondary rotation mechanism is rotatably provided on the side of the rotating frame; the secondary rotation mechanism includes a secondary rotation shaft; the secondary rotation shaft is rotatably connected to the rotating frame; at least two clamping mechanisms are fixedly installed on the side of the secondary rotation shaft.

[0007] Optionally, the clamping mechanism includes a flat plate and a clamping block; the flat plate is fixedly connected to the side of the secondary rotation axis; the clamping block includes a mounting plate and a clamping seat; the mounting plate is slidably mounted on the upper and lower ends of the flat plate; the clamping seat is fixedly mounted on the other side of the mounting plate, and the clamping seats at the upper and lower ends are used to clamp the sidewalls of the photomask.

[0008] Optionally, the clamping seat includes a housing, a first pressure block, a second pressure block, and a cylinder; one end of the housing is connected to the mounting plate; the interior of the housing is hollow, and a clamping groove is provided on the lower side; the first pressure block is fixedly disposed on the front side wall of the clamping groove; the second pressure block is slidably disposed above the clamping groove and is disposed opposite to the first pressure block; the cylinder is fixedly disposed on the rear outer surface of the housing, and the output shaft of the cylinder extends into the housing and is connected to the second pressure block.

[0009] Optionally, the clamp further includes a first guide rail and an abutment block; the first guide rail is horizontally disposed above the second pressure block, and one end of it is fixedly connected to the inner wall of the housing; the abutment block is slidably connected to the guide rail, and the abutment block is fixedly connected to the second pressure block.

[0010] Optionally, the secondary rotation mechanism further includes a first motor; the first motor is fixedly mounted on the upper end of the rotating frame, the first motor is connected to the secondary rotation shaft, and the first motor drives the secondary rotation shaft to rotate 180°.

[0011] Optionally, the main rotating mechanism includes a second motor and a main rotating shaft; the second motor is installed inside the base; one end of the main rotating shaft is connected to the second motor, and the other end of the main rotating shaft is connected to the lower end of the rotating frame.

[0012] Optionally, a second guide rail is provided on both sides of the flat plate; one side of the mounting plate is slidably connected to the second guide rail.

[0013] Optionally, extension rods are provided on both sides of the mounting plate, and both the mounting plate and the extension rods are equipped with sensing sensors.

[0014] Optionally, the rotating frame has a cuboid structure, and each side of it is provided with a flipping station. Each flipping station is provided with a secondary rotation mechanism, and each secondary rotation shaft is provided with two clamping mechanisms.

[0015] The above-mentioned one or more technical solutions in the photomask temporary storage device provided in the embodiments of the present invention have at least one of the following technical effects: the clamping mechanism is used to clamp the photomask, the main rotating mechanism drives the rotating frame to rotate, when the robot needs to clamp a specific photomask, the rotating frame rotates the clamping mechanism holding the photomask to the front of the robot, which facilitates the robot to clamp. Since the rotating frame can rotate each photomask to the same plane, that is, the front of the robot, and the position of each photomask is the same, the position of the robot to clamp the photomask remains consistent each time. Therefore, only one parameter setting is required for the robot, so that the robot can repeatedly clamp the photomasks on the rotating frame. Introducing the present invention into production is beneficial to enhancing the degree of automation in production, thereby improving production efficiency. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of the overall structure of the photomask storage device provided in an embodiment of the present invention;

[0018] Figure 2 This is a cross-sectional view of the photomask storage device provided in an embodiment of the present invention;

[0019] Figure 3 This is a cross-sectional view of the clamping mechanism provided in an embodiment of the present invention.

[0020] The following are the labeling elements in the figure:

[0021] 1. Photomask;

[0022] 100. Base; 200. Main rotating mechanism; 300. Rotating frame; 400. Clamping mechanism; 410. Flat plate; 411. Slider; 420. Clamping block; 421. Mounting plate; 422. Clamping seat; 4221. Housing; 4222. First pressure block; 4223. Second pressure block; 4224. Cylinder; 4225. Clamping groove; 4226. First guide rail; 4227. Abutment block; 500. Secondary rotating mechanism; 510. Secondary rotating shaft; 520. First motor; 600. Second guide rail; 700. Extension rod; 800. Sensor; 900. Lead screw motor; 900a. Lead screw motor nut. Detailed Implementation

[0023] Embodiments of the present invention are described in detail below, examples of which are illustrated in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain embodiments of the present invention, and should not be construed as limiting the present invention.

[0024] In the description of the embodiments of the present invention, it should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the present invention.

[0025] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of embodiments of the present invention, "a plurality of" means two or more, unless otherwise explicitly specified.

[0026] In the embodiments of the present invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of the present invention according to the specific circumstances.

[0027] In some embodiments of the present invention, such as Figure 1 As shown, a photomask storage device is provided, including a base 100, a main rotating mechanism 200, and a rotating frame 300 connected to each other. The main rotating mechanism 200 is installed inside the base 100. The rotating frame 300 has multiple clamping mechanisms 400 on its side for holding the photomask 1. The rotating frame 300 is connected to the main rotating mechanism 200. The main rotating mechanism 200 drives the rotating frame 300 to rotate 360°.

[0028] The clamping mechanism 400 is used to clamp the photomask 1. The main rotating mechanism 200 drives the rotating frame 300 to rotate. When the robot needs to clamp a specific photomask 1, the rotating frame 300 rotates the clamping mechanism 400 holding the photomask 1 to the front of the robot, making it convenient for the robot to clamp. Since the rotating frame 300 can rotate each photomask 1 to the same plane, that is, the front of the robot, and the position of each photomask 1 is the same, the position of the robot clamping the photomask 1 remains consistent each time. Therefore, only one parameter setting is needed for the robot, so that the robot can repeatedly clamp the photomasks 1 on the rotating frame 300. Introducing this invention into production is beneficial to enhancing the degree of automation in production, thereby improving production efficiency.

[0029] In other embodiments of the invention, such as Figure 1 As shown, a secondary rotation mechanism 500 is rotatably mounted on the side of the rotating frame 300. The secondary rotation mechanism 500 includes a secondary rotation shaft 510, which is rotatably connected to the rotating frame. At least two clamping mechanisms 400 are fixedly mounted on the side of the secondary rotation shaft 510, so each secondary rotation shaft 510 can temporarily hold at least two photomasks 1. When the robot arm needs to grip a photomask 1, after the rotating frame 300 rotates the clamping mechanism 400 holding the photomask 1 to the front of the robot arm, the secondary rotation shaft 510 rotates, causing the clamping mechanism 400 holding the photomask 1 to flip outwards and face the robot arm. The remaining clamping mechanisms 400 are temporarily stored inside as the secondary rotation mechanism 500 flips over.

[0030] In other embodiments of the invention, such as Figure 1 As shown, the clamping mechanism 400 includes a flat plate 410 and a clamping block 420. The flat plate 410 is fixedly connected to the side of the secondary rotation shaft 510. The clamping block 420 includes a mounting plate 421 and a clamping seat 422. The mounting plate 421 is slidably mounted on the upper and lower ends of the flat plate 410. The clamping seat 422 is fixedly mounted on the other side of the mounting plate 421, and the clamping seats 422 at the upper and lower ends are used to clamp the side wall of the photomask 1. Specifically, the photomask 1 is placed between the clamping seats 422, and the clamping seats 422 abut against the side wall of the photomask 1 to clamp the photomask 1.

[0031] In other embodiments of the invention, such as Figures 1-2As shown, the clamping base 422 includes a housing 4221, a first pressing block 4222, a second pressing block 4223, and a cylinder 4224. One end of the housing 4221 is connected to the mounting plate 421. The housing 4221 is hollow inside, and a clamping groove 4225 is formed on its lower side. The first pressing block 4222 is fixedly disposed on the front side wall of the clamping groove 4225. The second pressing block 4223 is slidably disposed above the clamping groove 4225 and is disposed opposite to the first pressing block 4222. The cylinder 4224 is fixedly disposed on the rear outer surface of the housing 4221, and the output shaft of the cylinder 4224 extends into the housing 4221 and is connected to the second pressing block 4223. The side of the photomask 1 is embedded in the clamping groove 4225. The cylinder 4224 pushes the second pressing block 4223 to move towards the first pressing block 4222. Under the combined action of the first pressing block 4222 and the second pressing block 4223, the side of the photomask 1 is pressed and fixed in the clamping groove 4225.

[0032] In other embodiments of the invention, such as Figures 1-2 As shown, the clamping seat 422 further includes a first guide rail 4226 and an abutment block 4227. The first guide rail 4226 is horizontally disposed above the second pressure block 4223, and one end of it is fixedly connected to the inner wall of the housing. The abutment block 4227 is slidably connected to the guide rail and is fixedly connected to the second pressure block 4223. Specifically, when the side of the photomask 1 is in the clamping groove 4225, since the clamping seats 422 at both the upper and lower ends apply pressure to the photomask 1, the side of the photomask 1 will abut against the abutment plate.

[0033] Since the abutment block 4227 is fixedly connected to the second pressure block 4223, when the second pressure block 4223 is driven by the cylinder 4224 to slide and push the photomask 1, the abutment block 4227 will also slide along with the second pressure block 4223. The photomask 1 and the abutment block 4227 remain relatively stationary, thereby preventing the photomask 1 from sliding relative to the abutment block 4227 when pushed by the second pressure block 4223, which could cause damage to the side of the photomask 1.

[0034] In other embodiments of the invention, such as Figure 1 As shown, the secondary rotation mechanism 500 further includes a first motor 520. The first motor 520 is fixedly mounted on the upper end of the rotating frame 300, and is connected to the secondary rotation shaft 510. The first motor 520 drives the secondary rotation shaft 510 to rotate 180°. In this embodiment, each secondary rotation shaft 510 is provided with two clamping mechanisms 400. The first motor 520 serves as a drive source, driving the secondary rotation shaft 510 to rotate.

[0035] Specifically, the first motor 520 is a stepper motor.

[0036] In other embodiments of the present invention, the main rotating mechanism 200 includes a second motor and a main rotating shaft. The second motor is mounted inside the base 100. One end of the main rotating shaft is connected to the second motor, and the other end of the main rotating shaft is connected to the lower end of the rotating frame 300.

[0037] In this embodiment, the second motor serves as the drive source to drive the rotating frame 300 to rotate. Specifically, the second motor is a stepper motor.

[0038] In other embodiments of the invention, such as Figure 1 and Figure 3 As shown, the planar plate 410 has second guide rails 600 on both sides. One side of the mounting plate 421 is slidably connected to the second guide rail 600. Specifically, in this embodiment, a lead screw motor 900 is provided at the upper end of the planar plate 410. One side of the mounting plate 421 is connected to the second guide rail 600 via a slider 411, and the slider 411 is also connected to the nut 900a of the lead screw motor 900. The lead screw motor 900 drives the slider 411 to slide up and down along the second guide rail 600. By sliding the mounting plate 421, the distance between the upper and lower mounting plates 421 is adjusted, thereby enabling the clamping mechanism 400 to clamp photomasks 1 of different sizes.

[0039] In other embodiments of the invention, such as Figure 1 As shown, extension rods 700 are provided on both sides of the mounting plate 421, and both the mounting plate 421 and the extension rods 700 are equipped with sensing sensors 800. The sensing sensors 800 are used to detect whether the clamping mechanism 400 is clamping the photomask 1.

[0040] Specifically, the photomask 1 sensing sensor 800 is an optical fiber sensor. When the clamping mechanism 400 clamps the photomask 1, the optical fiber sensor senses the photomask 1 and reminds the user not to continue clamping the photomask 1 through signal feedback or other means.

[0041] Since fiber optic sensors are a common type of sensor used to detect the presence or absence of objects, how fiber optic sensors detect the presence or absence of objects and how they communicate with the outside world should be well known to those skilled in the art, so they will not be described in detail here.

[0042] When the clamping mechanism 400 clamps the photomask 1, the center of the photomask 1 contacts the mounting plate 421, while the two sides of the photomask 1 contact the extension plate. The sensing sensor 800 located on the extension rod 700 can also sense the presence of the photomask 1. The presence of the photomask 1 is comprehensively evaluated based on the test results of each sensing sensor 800, and the result is more accurate.

[0043] In other embodiments of the invention, such as Figure 1 As shown, the rotating frame 300 has a cuboid structure, and each side of it is provided with a flipping station. Each flipping station is provided with a secondary rotation mechanism 500, and each secondary rotation shaft 510 is provided with two clamping mechanisms 400. Specifically, in this embodiment, the number of flipping stations is four, and each flipping station can clamp two photomasks 1.

[0044] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A photomask storage device, comprising a base, characterized in that, It also includes a main rotating mechanism and a rotating frame connected to each other; the main rotating mechanism is installed inside the base; the rotating frame has multiple clamping mechanisms for holding the photomask on its side; the rotating frame is connected to the main rotating mechanism; the main rotating mechanism drives the rotating frame to rotate 360°; a secondary rotating mechanism is rotatably provided on the side of the rotating frame; the secondary rotating mechanism includes a secondary rotating shaft; the secondary rotating shaft is rotatably connected to the rotating frame; at least two of the clamping mechanisms are fixedly installed on the side of the secondary rotating shaft; the clamping mechanism includes a flat plate and a clamping block; the flat plate is fixedly connected to the side of the secondary rotating shaft; the clamping block includes a mounting plate and a clamping seat; the mounting plate is slidably installed on the upper and lower ends of the flat plate; the clamping seat is fixedly installed on the other side of the mounting plate, and the clamping seat is used to clamp the side wall of the photomask; the clamping seat includes a housing, a first pressure block, a second pressure block, and a cylinder; one end of the housing is connected to the mounting plate; the interior of the housing is hollow, and the lower side has an opening. The clamping slot includes a first pressure block fixedly disposed on the front side wall of the clamping slot, a second pressure block slidably disposed above the clamping slot and opposite to the first pressure block, a cylinder fixedly disposed on the rear outer surface of the housing, the output shaft of the cylinder extending into the housing and connected to the second pressure block, a clamping seat further including a first guide rail and an abutment block, the first guide rail horizontally disposed above the second pressure block, one end of which is fixedly connected to the inner wall of the housing, the abutment block slidably connected to the guide rail and fixedly connected to the second pressure block, second guide rails disposed on both sides of the flat plate, one side of the mounting plate slidably connected to the second guide rail, extension rods disposed on both sides of the mounting plate, and sensing sensors disposed on both the mounting plate and the extension rods, the rotating frame having a cuboid structure, and each side of the rotating frame having a flipping station, each flipping station having a secondary rotation mechanism, and each secondary rotation shaft having two clamping mechanisms.

2. The photomask temporary storage device according to claim 1, characterized in that, The secondary rotation mechanism also includes a first motor; the first motor is fixedly mounted on the upper end of the rotating frame, the first motor is connected to the secondary rotation shaft, and the first motor drives the secondary rotation shaft to rotate 180°.

3. The photomask temporary storage device according to claim 2, characterized in that, The main rotating mechanism includes a second motor and a main rotating shaft; the second motor is installed inside the base; one end of the main rotating shaft is connected to the second motor, and the other end of the main rotating shaft is connected to the lower end of the rotating frame.

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