Angular deviation compensation system, method, device and medium adapted for low frequency vibrations

Abstract

The application provides an angle deviation compensation system, method, device and medium suitable for low-frequency vibration, which comprises a system body, an optical element support fixed on the system body, an angle adjusting mechanism arranged on the optical element support, an optical element arranged on the angle adjusting mechanism and driven by the angle adjusting mechanism for angle adjustment, an incident light beam deflected after passing through the optical element, a vibration sensor arranged on the system body and used for detecting a vibration signal of the system, and a light beam jitter detector arranged on an outgoing path of an outgoing light beam deflected after passing through the optical element and used for detecting a jitter signal of the outgoing light beam. The application takes a signal of a linear vibration sensor as a feedback signal, adopts the angle adjusting mechanism on the optical element support to compensate for the angle vibration of the optical element, and realizes the vibration stability requirement of a final light spot.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of instrument equipment, in particular to an angle deviation compensation system, method, device and medium suitable for low-frequency vibration. BACKGROUND

[0002] In a large scientific device such as synchrotron radiation, free electron laser, long-range laser, etc., a small angle jitter will be amplified due to long-distance transmission. Therefore, the angle stability of the key optical element of such a device has very high requirements. In order to improve the stability of the entire device or system, on the one hand, the device is built in an area with less environmental vibration, such as a basement, an underground experimental platform or a vibration isolation platform; on the other hand, a higher stability angle adjusting mechanism is designed to improve the natural modal frequency, and a suitable damping structure material is used to reduce the angle vibration response, etc.

[0003] However, it is difficult to isolate the vibration for the low-frequency vibration below 5Hz generated by the environment. Taking a hard X-ray free electron laser device as an example, the device is installed in a tunnel about 30 meters deep underground, and the total length is 3 kilometers. After the electron is accelerated, the X-ray needs to be transmitted to the experiment station through optical elements such as deflection mirrors, monochromators and focusing mirrors for related experiments. Due to the interference of natural environment, human activities and other factors, the tunnel vibrates, so that the optical elements installed on the tunnel also vibrate accordingly, which ultimately leads to the decrease of the pointing stability of the light beam transmitted to the test station, especially for the deflection mirror and the reflection type focusing mirror group. Small angle vibration will have a great impact on the pointing stability of the light beam through long-distance amplification. SUMMARY

[0004] In view of the above-mentioned shortcomings of the prior art, the purpose of the present application is to provide an angle deviation compensation system, method, device and medium suitable for low-frequency vibration, which solves the technical problem that the angle deviation of low-frequency vibration is difficult to compensate in the prior art.

[0005] To achieve the above-mentioned purpose and other related purposes, the first aspect of the present application provides an angle deviation compensation system suitable for low-frequency vibration, comprising: a system body; an optical element support fixed on the system body; an angle adjusting mechanism provided on the optical element support; an optical element provided on the angle adjusting mechanism to be driven by the angle adjusting mechanism for angle adjustment; a vibration sensor provided on the system body for detecting the vibration signal of the system; a light beam jitter detector provided on the light output path of the outgoing light beam deflected after the optical element for detecting the jitter signal of the outgoing light beam; wherein the angle deviation compensation system compensates the angle deviation by any one of the following ways:

[0006] The time difference between the linear vibration signal of the vibration sensor and the beam jitter signal of the beam jitter detector is obtained based on the correlation between the vibration signal of the vibration sensor and the angle error of the optical element; the signal obtained after the linear vibration signal of the vibration sensor is delayed by the time difference is taken as a feedback signal; the feedback signal is input into the angle adjusting mechanism for proportional compensation; the proportional compensation coefficient of the angle adjusting mechanism is adjusted until the optimal proportional compensation coefficient that minimizes the jitter amplitude of the beam jitter detector is found; and the angle adjusting mechanism is set according to the time difference and the optimal proportional compensation coefficient as control parameters to compensate for the angle deviation of the optical element.

[0007] Alternatively, the actual proportional compensation coefficient of the angle adjusting mechanism is determined based on the actual angle change amount of the angle adjusting mechanism and the actual jitter amplitude of the beam jitter detector; and the time difference between the linear vibration signal of the vibration sensor and the beam jitter signal of the beam jitter detector is adjusted based on the actual proportional compensation coefficient until the optimal time difference that minimizes the jitter amplitude of the beam jitter detector is found; and the angle adjusting mechanism is set according to the actual proportional compensation coefficient and the optimal time difference as control parameters to compensate for the angle deviation of the optical element.

[0008] In some embodiments of the first aspect of the present application, the time difference between the linear vibration signal of the vibration sensor and the beam jitter signal of the beam jitter detector is obtained based on the correlation between the vibration signal of the vibration sensor and the angle error of the optical element, and the process comprises: obtaining the time difference when the waveform correlation between the linear vibration signal waveform of the vibration sensor and the beam jitter signal waveform of the beam jitter detector is the strongest based on the waveform cross-correlation analysis method.

[0009] In some embodiments of the first aspect of the present application, the beam jitter signal of the beam jitter detector and the angle vibration signal of the optical element are in-phase waveforms; and the time difference between the linear vibration signal of the vibration sensor and the beam jitter signal of the beam jitter detector is equivalent to the time difference between the linear vibration signal of the vibration sensor and the angle vibration signal of the optical element.

[0010] In some embodiments of the first aspect of the present application, the system body comprises a long strip-shaped foundation.

[0011] In some embodiments of the first aspect of the present application, the optical element support comprises a deflection mirror support for clamping and adjusting the angle of the optical element.

[0012] In some embodiments of the first aspect of the present application, the optical element is a deflection mirror for deflecting an incident light beam by a certain angle to change the propagation direction of the light beam accordingly.

[0013] In some embodiments of the first aspect of the present application, the vibration sensor is arranged on the system body and close to the position of the optical element holder.

[0014] To achieve the above object and other related objects, the second aspect of the present application provides an angle deviation compensation method suitable for low-frequency vibration, comprising:

[0015] Based on the correlation between the vibration signal of the vibration sensor and the angle error of the optical element, a time difference with the strongest correlation between the two is obtained; the signal obtained after the linear vibration signal of the vibration sensor is delayed by the time difference is taken as a feedback signal; the feedback signal is input into the angle adjusting mechanism for proportional compensation; the proportional compensation coefficient of the angle adjusting mechanism is adjusted until the optimal proportional compensation coefficient that minimizes the jitter amplitude of the beam jitter detector is found; the angle adjusting mechanism is set according to the time difference and the optimal proportional compensation coefficient as control parameters to compensate for the angle deviation of the optical element;

[0016] Alternatively, the actual proportional compensation coefficient of the angle adjusting mechanism is determined based on the actual angle change amount of the angle adjusting mechanism and the actual jitter amplitude of the beam jitter detector; based on the actual proportional compensation coefficient, the time difference between the linear vibration signal of the vibration sensor and the beam jitter signal of the beam jitter detector is adjusted until the optimal time difference that minimizes the jitter amplitude of the beam jitter detector is found; the angle adjusting mechanism is set according to the actual proportional compensation coefficient and the optimal time difference as control parameters to compensate for the angle deviation of the optical element;

[0017] Wherein, the optical element is arranged on the angle adjusting mechanism, and the incident light beam is deflected after passing through the optical element; the angle adjusting mechanism is arranged on the optical element holder; the optical element holder is fixed on the system body; the vibration sensor is arranged on the system body; the beam jitter detector is arranged on the light output path of the deflected outgoing light beam after passing through the optical element.

[0018] To achieve the above object and other related objects, the third aspect of the present application provides a computer readable storage medium having a computer program stored thereon, wherein the computer program is executed by a processor to implement the angle deviation compensation method suitable for low-frequency vibration.

[0019] To achieve the above object and other related objects, the fourth aspect of the present application provides a computer device, comprising: a processor and a memory; the memory is used to store a computer program, and the processor is used to execute the computer program stored in the memory, so that the computer device executes the angle deviation compensation method suitable for low-frequency vibration.

[0020] As described above, the angle deviation compensation system, method, device and medium suitable for low-frequency vibration of the present application have the following beneficial effects: the present application takes the signal of the linear vibration sensor as the feedback signal, and uses the angle adjustment mechanism on the optical element support to compensate for the angular vibration of the optical element, so as to realize the vibration stability requirement of the final light spot. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 A structural schematic diagram of an angle deviation compensation system according to an embodiment of the present application is shown.

[0022] Figure 2 A parameter schematic diagram of an angle deviation compensation system according to an embodiment of the present application is shown.

[0023] Figure 3 A control schematic diagram of the angle deviation of an optical element according to an embodiment of the present application is shown.

[0024] Figure 4 A structural schematic diagram of a test device according to an embodiment of the present application is shown.

[0025] Figure 5A A flowchart of an angle deviation compensation method suitable for low-frequency vibration according to an embodiment of the present application is shown.

[0026] Figure 5B A flowchart of an angle deviation compensation method suitable for low-frequency vibration according to an embodiment of the present application is shown.

[0027] Figure 6 A structural schematic diagram of a computer device suitable for low-frequency vibration according to an embodiment of the present application is shown. DETAILED DESCRIPTION

[0028] The embodiments of the present application are described below through specific concrete examples, and those skilled in the art can easily understand other advantages and effects of the present application from the disclosure of the present specification. The present application can also be implemented or applied through other different specific embodiments, and each detail in the present specification can be modified or changed based on different views and applications without departing from the spirit of the present application. It should be noted that the following embodiments and features in the embodiments can be combined with each other without conflict.

[0029] It is to be understood that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting, unless the context clearly indicates otherwise. Spatially relative terms, such as "upper," "lower," "left," "right," "beneath," "below," "lower," "above," "upper," and the like, can be used herein for ease of description to describe one element or feature's relationship to another element(s) or feature(s) as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientations depicted in the figures. For example, if the device described herein is turned over from the orientation depicted in the figure, a spatially relative descriptor used with respect to the overturned device will also describe orientations covered by the original description. Therefore, the

[0030] In the present application, unless specifically defined otherwise, the terms "mounting", "connected", "connection", "fixed", "fixedly held" and the like are used broadly and encompass both direct and indirect mounting, connection, fixing, and the like; and can further include fixed, detachable, or integrally connected mounting, connection, fixing, and the like; can be mechanical or electrical connection, direct or indirect connection, and internal communication between two elements. Those skilled in the art can understand the specific meaning of the above terms in the present application according to the specific circumstances.

[0031] Furthermore, as used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises", "comprising", "includes" and / or "including", when used herein, specify the presence of stated features, operations, elements, components, items, and / or objects, but do not preclude the presence or addition of one or more other features, operations, elements, components, items, and / or objects. As used herein, the terms "or" and "and / or" are to be interpreted as inclusive, i.e., as meaning one or any combination of the items. Thus, "A, B or C" or "A, B and / or C" means any of the following: A; B; C; A and B; A and C; B and C; A, B and C. An exception to this definition will occur only when two or more sequentially listed items are in some way inherently mutually exclusive.

[0032] To solve the problems in the background art, the present application provides an angle deviation compensation method, system, terminal and medium suitable for low-frequency vibration, aiming to reduce the influence of angle vibration at key positions on system stability through active compensation. In order to make the purpose, technical scheme and advantages of the present application clearer and more apparent, the technical scheme of the embodiments of the present application will be further described in detail through the following embodiments and in conjunction with the drawings. It should be understood that the specific embodiments described herein are only used to explain the present application and not to limit the application.

[0033] Before the present application is further described, the nomenclature and terminology used in the description of embodiments of the present application are explained. The nomenclature and terminology used in the description of embodiments of the present application are applicable to the following explanations:

[0034] (1) Vibration sensor: used to receive the mechanical vibration quantity (such as displacement, velocity or acceleration) of the measured object and convert the mechanical quantity into an electrical signal (current or voltage) for output.

[0035] (2) Piezoelectric deflection mirror: a key device in the optical system for correcting the direction of light beam propagation and adjusting the tilt error of the optical path.

[0036] Embodiments of the present application provide an angle deviation compensation method suitable for low-frequency vibration, a system for angle deviation compensation suitable for low-frequency vibration, and a storage medium storing an executable program for implementing the angle deviation compensation method suitable for low-frequency vibration. In terms of the implementation of the angle deviation compensation method suitable for low-frequency vibration, exemplary implementation scenarios of the angle deviation compensation suitable for low-frequency vibration will be described.

[0037] As shown in Figure 1 , a structural schematic diagram of an angle deviation compensation system in an embodiment of the present application is shown, which can be applied to the angle deviation compensation of optical elements caused by low-frequency environmental vibration or structural vibration. The angle deviation compensation system in the embodiment of the present application specifically includes: a system body 1, an optical element support 2, an optical element 3, a vibration sensor 4 and a beam jitter detector 5. For ease of description, incident light 6 and outgoing light 7 are defined in the angle deviation compensation system.

[0038] The system body 1 is used to carry various devices in the angle deviation compensation system; the optical element support 2 is fixed on the system body 1; the optical element 3 is adjustably mounted on the optical element support 2. The vibration sensor 4 is mounted on the system body 1 and used to measure the velocity and / or acceleration waveform near the optical element support 2.

[0039] The direction of the light beam changes after passing through the optical element 3, and then shoots towards the beam jitter detector 5, which detects the jitter amplitude of the incident light beam. Figure 1 According to the above, the incident light 6 enters the optical element 3 along the direction A, changes the direction after passing through the optical element 3 to form the outgoing light 7 along the direction B, and the outgoing light 7 is detected by the beam jitter detector 5 at the terminal of the beam line.

[0040] For ease of description, the angle deviation compensation system will be further described in detail below. It should be noted that the following description is only for one-dimensional angle compensation, but also applies to multi-dimensional compensation, so the present application is not limited to the following description.

[0041] Preferably, the system body 1 is a solid long strip foundation such as a tunnel.

[0042] Preferably, the optical element holder 2 is a deflection mirror holder for clamping and adjusting the optical element 3; the optical element holder 2 has at least one dimensional angle adjustment mechanism 21 for adjusting the angle of the optical element 3.

[0043] Preferably, the optical element 3 is a deflection mirror for deflecting the incident light beam by a specific angle to change the propagation direction of the light beam accordingly.

[0044] Preferably, the vibration sensor 4 is a velocity sensor. The vibration sensor 4 is fixedly connected to the system body 1 for measuring the velocity waveform of the system body 1 at the position near the optical element holder 2. The vibration signal collected by the vibration sensor 4 can be a velocity signal or an acceleration signal.

[0045] Preferably, the light beam jitter detector 5 is a light beam position detector commonly used in advanced light sources, which can be a camera, a paper with a grid, or any instrument capable of measuring or displaying light beam jitter. The light beam position detector can be a beam position monitor (BPM), a laser position detector, or a position sensitive detector (PSD).

[0046] It is worth noting that since the vibration signal collected by the vibration sensor 4 can be a velocity signal or an acceleration signal, both signals can reflect the vibration situation. For ease of description, the velocity signal (i.e., linear vibration velocity V4) is mainly used in the following embodiments for relevant explanation and description. Those skilled in the art should know that the acceleration signal can also be implemented, and the embodiments of the present application are not limited to the vibration signal being only a velocity signal.

[0047] In the embodiments of the present application, considering that in actual working conditions, the system body 1 will produce vibration deformation due to various factors at any time. Assuming that the angle error of the bottom end of the optical element holder 2 at the theoretical required position is θ2, the angle error of the optical element 3 at the theoretical required position is θ3, the velocity of the vibration sensor 4 is V4, and the light beam jitter amplitude detected by the light beam jitter detector 5 is D5.

[0048] As Figure 2As shown in the figure, the parameters of the angle deviation compensation system in an embodiment of the application are shown. It is worth mentioning that for the low-frequency vibration generated by the natural environment, although the vibration amplitude is large, the spatial coherence is good, that is, the angle errors θ2 and θ3 and the linear vibration velocity V4 have good spatial coherence although the amplitude and phase are different. It should be understood that the spatial coherence describes the phase relationship between points on the wave surface perpendicular to the propagation direction of the light beam. According to the above characteristics, it can be known that the low-frequency vibration generated by the natural environment causes the system body 1 to generate an angle error θ1, thereby causing the linear vibration velocity V4 of the vibration sensor, the angle error θ3 of the optical element 3, and the light beam jitter signal D5 detected by the light beam jitter detector 5. The linear vibration velocity V4 of the vibration sensor and the angle error θ3 of the optical element 3 have good correlation, and the linear vibration velocity V4 can be used as a sensing signal to compensate for the angle error θ3 of the optical element 3 through a one-dimensional angle adjustment mechanism 21.

[0049] In order to facilitate understanding and not lose generality, it is assumed that the low-frequency vibration frequency of the natural environment is ω, and other modal vibrations caused by the mechanical structure are ignored, then the vibration of the optical element is θ3(t) = A3*sin(ωt + φ3), the linear vibration velocity of the linear vibration sensor is v4(t) = A4*sin(ωt + φ4), and the light beam jitter detected by the light beam jitter detector is D5(t) = A5*sin(ωt + φ5). In the formula, A3, A4, and A5 are the corresponding vibration amplitudes, φ3, φ4, and φ5 are the corresponding vibration phases, and since D5(t) is the reflected light of the optical element, their phases are the same, that is, φ3 = φ5. According to this feature, the linear vibration v4(t) can be used as a sensing signal to compensate for the angle deviation of the optical element θ3(t) by using the one-dimensional angle adjustment mechanism.

[0050] The control schematic diagram of the angle deviation of the optical element 3 is as shown in the figure: Figure 3 The foundation vibration (that is, the vibration of the system body 1) causes the optical element 3 to generate jitter θ3 through its inherent transmission characteristic G 13 (s), the vibration sensor 4 measures the vibration v4 of the foundation through its inherent transmission characteristic G 14 (s), the vibration sensor signal v4 is delayed, and the signal is adjusted by a proportional coefficient P3. The fine angle adjustment mechanism can also realize different angle amplitude adjustment by adjusting the parameter M3. Finally, the angle jitter output of the optical element 3 is the superposition of the foundation influence and the compensation, and then through the inherent transmission characteristic G 15 (s) between the optical element 3 and the light beam jitter detector 5, it is embodied on the light beam jitter detector 5.

[0051] In the embodiments of the present application, the angle deviation compensation system compensates for the angle deviation by any one of the following ways:

[0052] The first compensation method is based on the correlation between the vibration speed of the vibration sensor and the angle error of the optical element, and the time difference with the strongest correlation between the two is obtained. The linear vibration speed of the vibration sensor after the time difference is delayed is taken as the feedback signal. The feedback signal is input into the angle adjusting mechanism for proportional compensation. The proportional compensation coefficient of the angle adjusting mechanism is adjusted until the optimal proportional compensation coefficient that minimizes the jitter amplitude of the beam jitter detector is found. The angle adjusting mechanism is set according to the time difference and the optimal proportional compensation coefficient as control parameters to compensate for the angle deviation of the optical element.

[0053] In some examples, the time difference with the strongest correlation between the vibration speed of the vibration sensor and the angle error of the optical element is obtained based on the correlation between the two, and the specific process includes: based on the waveform cross-correlation analysis method, the time difference when the waveform correlation between the linear vibration speed waveform of the vibration sensor and the beam jitter signal waveform of the beam jitter detector is the strongest is obtained.

[0054] Specifically, first, the linear vibration speed V4(t) of the vibration sensor and the beam jitter signal D5(t) detected by the beam jitter detector are measured and recorded. The correlation coefficient between the linear vibration speed waveform of the vibration sensor and the beam jitter signal waveform of the beam jitter detector can be solved using data analysis software such as matlab. The maximum correlation coefficient obtained indicates that the two waveforms are most positively correlated at this time, and the time difference between the two waveforms at this time is the time difference with the strongest correlation, denoted as the time difference t 45 .

[0055] It can be understood that since the angle vibration of the optical element 3 directly causes the beam jitter of the beam jitter detector, the beam jitter signal D5(t) of the beam jitter detector and the angle vibration θ3(t) of the optical element 3 are in-phase waveforms, that is, the time difference between the angle vibration θ3(t) and the linear vibration speed V4(t) is also t 45 . The linear vibration speed V4(t) is delayed by the time difference t 45 as a feedback signal input into the angle adjusting mechanism for proportional compensation, that is, the anti-phase compensation of the optical element is realized. After adjusting the proportional compensation coefficient P3 of the angle adjusting mechanism, the beam jitter detector can be moved out of the optical path according to experimental requirements.

[0056] It should be understood that the similarity of two columns of waves (commonly used in repeated seismic exploration) or the fitting degree of two columns of waves (commonly used in inversion) can be determined by calculating the cross-correlation coefficient of the two columns of waves (for example, the cross-correlation coefficient of the two columns of waves can be calculated by using the built-in function xcorr of matlab). The value of the cross-correlation coefficient ranges from -1 to 1, and the closer to 1, the more positively correlated the two columns of waves (the more similar the waveforms), the closer to -1, the more negatively correlated the two columns of waves (the waveforms are opposite), and the closer to 0, the less correlated (the waveforms are not similar).

[0057] In some examples, the P control angle adjusting mechanism is selected for proportional compensation. It should be understood that P control refers to proportional control, and the input signal of the P controller is proportional to the output signal, which adjusts the open-loop gain of the system, improves the steady-state accuracy of the system, reduces the inertia of the system, and speeds up the response.

[0058] In combination Figure 3 The description first measures the speed V4(t) of the linear vibration sensor and the beam jitter D5(t) detected by the beam jitter detector, and uses cross-correlation analysis on V4(t) and D5(t) to obtain the time difference t 45 Since D5(t) and the angular vibration θ3(t) of the optical element are in phase, the time difference between θ3(t) and V4(t) is also t 45 The linear vibration V4(t) is delayed by the time difference t 45 as a feedback signal input to the proportional compensation of the angle adjusting mechanism, which realizes the anti-phase compensation of the optical element, adjusts the proportional compensation coefficient P3 of the angle adjusting mechanism, and monitors the value of the beam jitter D5(t), and finds the minimum beam jitter D5(t) to realize active angle compensation. After setting the control parameters t 45 and P3, the beam jitter detector can be removed from the optical path according to experimental requirements.

[0059] The second compensation method is to determine the actual proportional compensation coefficient of the angle adjusting mechanism based on the actual angular change of the angle adjusting mechanism and the actual jitter amplitude of the beam jitter detector, to adjust the time difference between the linear vibration speed of the vibration sensor and the beam jitter signal of the beam jitter detector based on the actual proportional compensation coefficient, and to find the optimal time difference that minimizes the jitter amplitude of the beam jitter detector. The actual proportional compensation coefficient and the optimal time difference are used as control parameters to set the angle adjusting mechanism to compensate for the angular deviation of the optical element.

[0060] It can be understood that the difference between the compensation mode one and the compensation mode two is that the compensation mode one is to determine the time difference t 45 , and then to obtain the velocity V4(t) by delaying the time difference t 45 , the velocity obtained is taken as a feedback signal, and thus the proportional compensation coefficient P3 of the angle adjusting mechanism is determined when the value of the beam jitter D5(t) is the smallest; the compensation mode two is to determine the actual value of the proportional compensation coefficient P3 of the angle adjusting mechanism according to the actual experimental operation, and then to inversely find the time difference t 45 between the beam jitter D5(t) and the linear vibration V4(t) when the value of the beam jitter D5(t) is the smallest, and the above two compensation modes can realize the angle deviation compensation, and the embodiment of the present application is not limited.

[0061] In order to verify the feasibility of the technical scheme of the present application, Figure 4 a corresponding test device is built in the embodiment. The bottom plate 10 is subjected to simple harmonic motion at a single frequency, the flexible plate 11 is fixed on the bottom plate 10, the optical element support 2 is arranged in the middle of the flexible plate 11, the vibration sensor 4 is arranged on the optical element support 2, the flexible structure 32 is arranged on the optical element support 2 and the piezoelectric driver 31 is arranged on the flexible structure 32 to realize the angle adjustment of the optical element 3. The laser pen 8 is used to irradiate light on the optical element 3, and the paper marked with fixed squares is used to simulate the beam jitter detector 5.

[0062] The above compensation mode two is used to test the system:

[0063] First step: the bottom plate 10 is vibrated at a single frequency to obtain the jitter amplitude of the bottom plate 10 on the paper.

[0064] Second step: the vibration of the bottom plate 10 is stopped, and the voltage of the piezoelectric driver 31 is adjusted to obtain the same adjustment amplitude of the light spot on the paper.

[0065] Third step: the vibration of the bottom plate 10 is started, the vibration of the vibration sensor 4 is measured, and the feedback proportion P3 is adjusted to make A4*P3=1.

[0066] Fourth step: the delay amount of the vibration sensor 4 is adjusted, the jitter on the beam jitter detector 5 is observed, and the delay amount when the jitter amplitude is the smallest is selected.

[0067] The system built by the above method can well realize the angle deviation compensation of the low-frequency vibration, the signal of the linear vibration sensor is taken as the feedback signal in the embodiment of the present application, the angle adjusting mechanism on the optical element support is used to compensate the angle vibration of the optical element, and the vibration stability requirement of the final light spot is realized.

[0068] As Figure 5A and 5BAs shown in FIG. 5A, a flowchart of an angle deviation compensation method suitable for low-frequency vibration in an embodiment of the present application is shown. The angle deviation compensation method in the embodiment of the present application has two compensation modes. The implementation process of the first compensation mode is shown in FIG. 5A. Figure 5A The implementation process of the second compensation mode is shown in FIG. 5B. Figure 5B

[0069] In the first compensation mode, the flow of the angle deviation compensation method suitable for low-frequency vibration is as follows: Figure 5A

[0070] Step S5A1: Based on the correlation between the vibration signal of the vibration sensor and the angle error of the optical element, a time difference with the strongest correlation between the two is obtained.

[0071] Step S5A2: The signal obtained after the linear vibration signal of the vibration sensor is delayed by the time difference is taken as a feedback signal; the feedback signal is input into the angle adjustment mechanism for proportional compensation.

[0072] Step S5A3: The proportional compensation coefficient of the angle adjustment mechanism is adjusted until an optimal proportional compensation coefficient that minimizes the jitter amplitude of the beam jitter detector is found.

[0073] Step S5A4: The angle adjustment mechanism is set with the time difference and the optimal proportional compensation coefficient as control parameters to compensate for the angle deviation of the optical element.

[0074] In the second compensation mode, the flow of the angle deviation compensation method suitable for low-frequency vibration is as follows: Figure 5B

[0075] Step S5B1: Based on the actual angle change amount of the angle adjustment mechanism and the actual jitter amplitude of the beam jitter detector, the actual proportional compensation coefficient of the angle adjustment mechanism is determined.

[0076] Step S5B2: Based on the actual proportional compensation coefficient, the time difference between the linear vibration signal of the vibration sensor and the beam jitter signal of the beam jitter detector is adjusted until an optimal time difference that minimizes the jitter amplitude of the beam jitter detector is found.

[0077] Step S5B3: The angle adjustment mechanism is set with the actual proportional compensation coefficient and the optimal time difference as control parameters to compensate for the angle deviation of the optical element.

[0078] ​​​The optical element is arranged on the angle adjusting mechanism, and the incident light beam is deflected after passing through the optical element; the angle adjusting mechanism is arranged on an optical element support; the optical element support is fixed on a system body; the vibration sensor is arranged on the system body; and the light beam jitter detector is arranged on an outgoing light path of the outgoing light beam deflected after passing through the optical element.

[0079] It should be noted that the angle deviation compensation method suitable for low-frequency vibration provided by the above embodiment and the angle deviation compensation system suitable for low-frequency vibration embodiment belong to the same concept, and the specific implementation process is detailed in the method embodiment, which will not be repeated here.

[0080] The angle deviation compensation method suitable for low-frequency vibration provided by the embodiment of the application can be implemented on the terminal side or the server side. As for the hardware structure of the angle deviation compensation terminal suitable for low-frequency vibration, please refer to Figure 6 An optional hardware structure schematic diagram of the computer device 600 provided by the embodiment of the application is shown in the figure. The device 600 can be a mobile phone, a computer device, a tablet device, a personal digital processing device, a factory background processing device, etc. The angle deviation compensation terminal 600 suitable for low-frequency vibration comprises at least one processor 601, a memory 602, at least one network interface 604 and a user interface 606. Each component in the device is coupled together through a bus system 605. It can be understood that the bus system 605 is used to realize the connection communication between the components. The bus system 605 comprises a data bus, a power supply bus, a control bus and a state signal bus. However, in order to clearly illustrate, all kinds of buses are marked as the bus system in the figure. Figure 6

[0081] The user interface 606 can comprise a display, a keyboard, a mouse, a trackball, a click gun, a key, a button, a touch pad or a touch screen, etc.

[0082] ​It is to be understood that the memory 602 can be volatile or nonvolatile memory, or both. In one embodiment, the nonvolatile memory can be read-only memory (ROM), programmable ROM (PROM), and the like, which are used as external cache. By way of example, and not limitation, many forms of RAM can be used, such as, by way of example but not limitation, static RAM (SRAM), synchronous SRAM (SSRAM). The memory described in the embodiments of the present application is intended to include, but not be limited to, these and any other suitable type of memory.

[0083] The memory 602 in the embodiments of the present application is used to store various categories of data to support the operation of the low-frequency vibration suitable angle deviation compensation terminal 600. Examples of these data include: any executable programs for operating on the low-frequency vibration suitable angle deviation compensation terminal 600, such as an operating system 6021 and an application program 6022; the operating system 6021 contains various system programs, such as a framework layer, a core library layer, a driver layer, and the like, for implementing various basic services and processing hardware-based tasks. The application program 6022 can contain various application programs, such as a media player (MediaPlayer), a browser (Browser), and the like, for implementing various application services. The low-frequency vibration suitable angle deviation compensation method provided by the embodiments of the present application can be contained in the application program 6022.

[0084] The method disclosed by the embodiments of the present application can be applied to the processor 601 or implemented by the processor 601. The processor 601 can be an integrated circuit chip having a signal processing capability. In the implementation process, each step of the above method can be completed by an integrated logic circuit or an instruction in the form of software in the processor 601. The processor 601 can be a general processor, a digital signal processor (DSP), or other programmable logic device, discrete gate or transistor logic device, discrete hardware component, etc. The processor 601 can implement or execute the disclosed methods, steps and logic block diagrams in the embodiments of the present application. The general processor 601 can be a microprocessor or any conventional processor, etc. In combination with the steps of the accessory optimization method provided by the embodiments of the present application, the hardware decoding processor can be directly embodied to complete the execution, or the hardware and software modules in the decoding processor can be combined to complete the execution. The software module can be located in a storage medium, which is located in a memory. The processor reads the information in the memory and combines the hardware to complete the steps of the foregoing method.

[0085] In the exemplary embodiments, the angle deviation compensation terminal 600 suitable for low-frequency vibration can be implemented by one or more application specific integrated circuits (ASICs), DSPs, programmable logic devices (PLDs), complex programmable logic devices (CPLDs), etc. for executing the foregoing method.

[0086] Those skilled in the art can understand that all or part of the steps of the above-mentioned method embodiments can be completed by the hardware of the computer program. The foregoing computer program can be stored in a computer readable storage medium. When the program is executed, the steps of the above-mentioned method embodiments are executed; and the foregoing storage medium includes ROM, RAM, magnetic disk or optical disk, etc. various storage medium which can store program codes.

[0087] In the embodiments provided in the present application, the computer readable and writable storage medium can include a read-only memory, a random access memory, an EEPROM, a CD-ROM or other optical disk storage device, a magnetic disk storage device or other magnetic storage device, a flash memory, a U disk, a mobile hard disk, or any other medium capable of storing desired program code in the form of instructions or data structures and capable of being accessed by a computer. In addition, any connection can be appropriately referred to as a computer readable medium. For example, if instructions are sent from a website, server or other remote source using a coaxial cable, fiber optic cable, twisted pair, digital subscriber line (DSL) or wireless technology such as infrared, radio and microwave, the coaxial cable, fiber optic cable, twisted pair, DSL or wireless technology such as infrared, radio and microwave is included in the definition of the medium. However, it should be understood that the computer readable and writable storage medium and the data storage medium do not include connections, carriers, signals or other transitory media, but are intended for non-transitory, tangible storage media. As used in the application, magnetic disks and optical disks include compact discs (CDs), laser discs, optical discs, digital versatile discs (DVDs), floppy disks and Blu-ray discs, wherein magnetic disks typically magnetically copy data, and optical disks optically copy data with a laser.

[0088] In summary, the present application provides an angle deviation compensation system, method, device and medium suitable for low-frequency vibration. The present application uses the signal of a linear vibration sensor as a feedback signal, and uses an angle adjustment mechanism on an optical element support to compensate for the angular vibration of the optical element, so as to achieve the vibration stability requirement of the final light spot. Therefore, the present application effectively overcomes the various shortcomings in the prior art and has high industrial utilization value.

[0089] The above embodiments only exemplarily illustrate the principles and effects of the present application, and are not used to limit the present application. Any person skilled in the art can modify or change the above embodiments without departing from the spirit and scope of the present application. Therefore, all equivalent modifications or changes made by those skilled in the art without departing from the spirit and technical idea disclosed in the present application should be covered by the claims of the present application.

Claims

1. An angle deviation compensation system suitable for low-frequency vibration, characterized in that, include: System body; An optical element bracket is fixed to the system body; the optical element bracket is equipped with an angle adjustment mechanism. An optical element is mounted on the angle adjustment mechanism so that it can be adjusted in angle by the angle adjustment mechanism; the incident light beam is deflected after passing through the optical element. A vibration sensor, mounted on the system body, is used to detect vibration signals of the system; A beam jitter detector is placed on the exit path of the outgoing beam that is deflected after passing through the optical element, and is used to detect the jitter signal of the outgoing beam. The angle deviation compensation system compensates for angle deviation in any of the following ways: Based on the correlation between the vibration signal of the vibration sensor and the angle error of the optical element, the time difference with the strongest correlation between the two is obtained; the signal obtained by delaying the linear vibration signal of the vibration sensor by the time difference is used as a feedback signal; the feedback signal is input to the angle adjustment mechanism for proportional compensation; the proportional compensation coefficient of the angle adjustment mechanism is adjusted until the optimal proportional compensation coefficient that minimizes the jitter amplitude of the beam jitter detector is found; the angle adjustment mechanism is set according to the time difference and the optimal proportional compensation coefficient as control parameters to compensate for the angle deviation of the optical element; wherein, the process of obtaining the time difference with the strongest correlation between the vibration signal of the vibration sensor and the angle error of the optical element includes: obtaining the time difference when the waveform correlation between the linear vibration signal waveform of the vibration sensor and the beam jitter signal waveform of the beam jitter detector is strongest based on waveform cross-correlation analysis; Alternatively, the actual proportional compensation coefficient of the angle adjustment mechanism is determined based on the actual angle change of the angle adjustment mechanism and the actual jitter amplitude of the beam jitter detector; based on the actual proportional compensation coefficient, the time difference between the linear vibration signal of the vibration sensor and the beam jitter signal of the beam jitter detector is adjusted until the optimal time difference that minimizes the jitter amplitude of the beam jitter detector is found; the actual proportional compensation coefficient and the optimal time difference are used as control parameters to set the angle adjustment mechanism to compensate for the angle deviation of the optical element.

2. The angle deviation compensation system suitable for low-frequency vibration according to claim 1, characterized in that, The beam jitter signal of the beam jitter detector and the angular vibration signal of the optical element are in phase; the time difference between the linear vibration signal of the vibration sensor and the beam jitter signal of the beam jitter detector is equal to the time difference between the linear vibration signal of the vibration sensor and the angular vibration signal of the optical element.

3. The angle deviation compensation system suitable for low-frequency vibration according to claim 1, characterized in that, The system body includes a long strip-shaped foundation.

4. The angle deviation compensation system suitable for low-frequency vibration according to claim 1, characterized in that, The optical element support includes a deflector support for holding and adjusting the angle of the optical element.

5. The angle deviation compensation system suitable for low-frequency vibration according to claim 1, characterized in that, The optical element is a deflector, used to deflect the incident light beam at a specific angle to change the propagation direction of the light beam accordingly.

6. The angle deviation compensation system suitable for low-frequency vibration according to claim 1, characterized in that, The vibration sensor is located on the system body and near the optical element support.

7. A method for compensating for angular deviations suitable for low-frequency vibrations, characterized in that, include: Based on the correlation between the vibration signal of the vibration sensor and the angle error of the optical element, the time difference with the strongest correlation between the two is obtained; the signal obtained after the time difference delay of the linear vibration signal of the vibration sensor is used as the feedback signal; the feedback signal is input to the angle adjustment mechanism for proportional compensation; the proportional compensation coefficient of the angle adjustment mechanism is adjusted until the optimal proportional compensation coefficient that minimizes the jitter amplitude of the beam jitter detector is found; the angle adjustment mechanism is set according to the time difference and the optimal proportional compensation coefficient as control parameters to compensate for the angle deviation of the optical element; wherein, based on the correlation between the vibration signal of the vibration sensor and the angle error of the optical element, the process of obtaining the time difference with the strongest correlation between the two includes: obtaining the time difference when the waveform correlation between the linear vibration signal waveform of the vibration sensor and the beam jitter signal waveform of the beam jitter detector is strongest based on waveform cross-correlation analysis; Alternatively, the actual proportional compensation coefficient of the angle adjustment mechanism is determined based on the actual angle change of the angle adjustment mechanism and the actual jitter amplitude of the beam jitter detector; based on the actual proportional compensation coefficient, the time difference between the linear vibration of the vibration sensor and the beam jitter signal of the beam jitter detector is adjusted until the optimal time difference that minimizes the jitter amplitude of the beam jitter detector is found; the actual proportional compensation coefficient and the optimal time difference are used as control parameters to set the angle adjustment mechanism to compensate for the angle deviation of the optical element. The optical element is mounted on the angle adjustment mechanism, and the incident light beam is deflected after passing through the optical element; the angle adjustment mechanism is mounted on the optical element support; the optical element support is fixed to the system body; the vibration sensor is mounted on the system body; and the beam jitter detector is mounted on the exit path of the outgoing light beam that is deflected after passing through the optical element.

8. A computer-readable storage medium having a computer program stored thereon, characterized in that, When the computer program is executed by the processor, it implements the angle deviation compensation method for low-frequency vibration as described in claim 7.

9. A computer device, characterized in that, include: Processor and memory; The memory is used to store computer programs; The processor is used to execute the computer program stored in the memory to cause the computer device to perform the angle deviation compensation method suitable for low-frequency vibration as described in claim 7.

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