A gas flow control method and device, electronic equipment and storage medium
By obtaining the inner diameter and target flow rate of the flow restrictor, determining the preset relationship set, and adjusting the pressure value of the flow restrictor, the problem of inconsistent flow rate of the flow restrictor under different pressures is solved, and accurate control of gas flow rate is achieved.
Patent Information
- Application Number
- CN202310457575.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2023-04-25
- Publication Date
- 2025-12-26
- Estimated Expiration
- 2043-04-25
AI Technical Summary
Under different pressures, the correspondence between the flow rate at the input and output ends of the flow limiter is inconsistent, making it difficult to accurately output the required flow rate of gas under different pressures.
By obtaining the inner diameter and target flow rate of the flow limiter, a set of preset relationships is determined, and the pressure value at the input end of the flow limiter is adjusted using a pressure controller to ensure accurate output of the required flow rate under different pressures.
It can accurately output the required flow rate of gas under different pressures, ensuring the accuracy of the gas mixing and dilution process.
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Figure CN116360509B_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to the field of flow control, and in particular to a gas flow control method and device, an electronic device and a storage medium. BACKGROUND
[0002] In the field of gas preparation, the staff needs to prepare a certain concentration of gas, and needs to mix and dilute the high concentration standard gas corresponding to the gas with inert gas such as nitrogen. The inert gas such as nitrogen is a diluent gas. When mixing, the gas paths of the two gases need to be output according to the specified flow rate, so a flow restrictor needs to be provided in the gas path to limit the flow rate of the gas.
[0003] The output flow rate of the flow restrictor is related to the gas pressure at the input end of the flow restrictor, and for flow restrictors of different inner diameters, the corresponding relationship between the pressure and the output flow rate at the input end of the flow restrictor is different in different pressure intervals, so how to accurately output the required flow rate of gas at different pressures becomes a problem. SUMMARY
[0004] In order to enable the flow restrictor to accurately output the required flow rate of gas at different pressures, the present application provides a gas flow control method, device, electronic device and storage medium.
[0005] In a first aspect, the present application provides a gas flow control method, which adopts the following technical solution:
[0006] A gas flow control method, comprising:
[0007] obtaining a first inner diameter value of a first flow restrictor, a second inner diameter value of a second flow restrictor, a first target flow rate value and a second target flow rate value, the first flow restrictor being a flow restrictor of a gas path of a standard gas, the second flow restrictor being a flow restrictor of a gas path of a diluent gas, the first target flow rate value being a required flow rate value of an output end of the first flow restrictor, and the second target flow rate value being a required flow rate value of an output end of the second flow restrictor;
[0008] determining a first preset relationship formula group based on the first inner diameter value and determining a second preset relationship formula group based on the second inner diameter value, the first preset relationship formula group including at least two relationship formulas corresponding to the first flow restrictor for calculating the pressure in different flow rate intervals, and the second preset relationship formula group including at least two relationship formulas corresponding to the second flow restrictor for calculating the pressure in different flow rate intervals;
[0009] determine a first pressure value based on the first preset relationship group and the first target flow value, and determine a second pressure value based on the second preset relationship group and the second target flow value, the first pressure value being a pressure value of an input end of the first flow restrictor, and the second pressure value being a pressure value of an input end of the second flow restrictor;
[0010] control a first pressure controller to act based on the first pressure value, and control a second pressure controller to act based on the second pressure value, the first pressure controller being configured to adjust the pressure value of the input end of the first flow restrictor, and the second pressure controller being configured to adjust the pressure value of the input end of the second flow restrictor.
[0011] By using the above technical solution, two gas paths are required for diluting the standard gas, i.e., a gas path of the standard gas and a gas path of the dilution gas, which are mixed after passing through the flow restrictors to obtain the standard gas with the required concentration. For different dilution concentrations, the required flow rates at the output ends of the two flow restrictors are different, and thus the flow rates required to achieve the required dilution concentration, i.e., the first target flow rate and the second target flow rate, are obtained. The output flow rate of the flow restrictor is related to the input pressure, and the corresponding relationship between the input pressure and the output flow rate of the flow restrictor with different inner diameters is different. Therefore, the inner diameters of the flow restrictors in the two gas paths are obtained, so as to subsequently determine the required pressures of the input ends of the two flow restrictors. Since the corresponding relationship between the pressure and the flow rate of the flow restrictor is not consistent at different pressure ranges, after the first inner diameter value and the second inner diameter value are obtained, the first preset relationship group corresponding to the first flow restrictor is determined according to the first inner diameter value, and the second relationship group is determined according to the second inner diameter value. The above two preset relationship groups each include at least two relationship formulas for calculating the pressure in different flow rate intervals. According to the above two preset relationship groups and the two target flow rates, the first pressure value of the input end of the first flow restrictor and the second pressure value of the output end of the second flow restrictor are calculated. Then, the first pressure controller in the standard gas path is controlled to act according to the first pressure value, so as to generate the standard gas with the first pressure value at the input end of the first flow restrictor, and then output the standard gas with the first target flow rate at the output end of the first flow restrictor. The second pressure controller in the dilution gas path is controlled to act according to the second pressure value, so as to generate the dilution gas with the second pressure value at the input end of the second flow restrictor, and then output the dilution gas with the second target flow rate at the output end of the second flow restrictor. In the subsequent process, the standard gas with the required concentration can be diluted and mixed. Since the corresponding preset relationship group is determined according to the inner diameter of the flow restrictor, the first pressure value and the second pressure value can be calculated more accurately, and the gas with the required flow rate can be output more accurately at different pressures.
[0012] In another possible implementation manner, the determining the first preset relational expression group based on the first inner diameter value and the determining the second preset relational expression group based on the second inner diameter value comprise:
[0013] The first preset relational expression group corresponding to the first flow restrictor and the second preset relational expression group corresponding to the second flow restrictor are obtained by matching the first inner diameter value and the second inner diameter value in a preset relational expression library, and the preset relational expression library comprises a plurality of inner diameter values and a plurality of preset relational expression groups corresponding to the plurality of inner diameter values.
[0014] According to the above technical solution, the preset relational expression library stores a plurality of inner diameter values and a plurality of preset relational expression groups corresponding to the plurality of inner diameter values, so that the corresponding preset relational expression groups, that is, the first preset relational expression group and the second preset relational expression group, can be found according to the obtained first inner diameter value and the second inner diameter value, and the method is more convenient and accurate.
[0015] In another possible implementation manner, the obtaining of the first inner diameter value of the first flow restrictor, the second inner diameter value of the second flow restrictor, the first target flow value, and the second target flow value further comprises:
[0016] The test pressure value at the input end of any flow restrictor and the output flow value at the output end are obtained in real time;
[0017] A scatter plot is drawn based on the test pressure value and the output flow value.
[0018] The scatter plot is subjected to regression analysis to obtain a relational expression of the pressure value and the flow value.
[0019] According to the above technical solution, the test pressure value at the input end of the flow restrictor and the output flow value at the output end are obtained in real time, and then the scatter plot can be drawn according to the coordinate system, and then the scatter plot is subjected to regression analysis, so that a more accurate corresponding relationship of the pressure value and the flow value can be obtained, and then the relational expression of the pressure value and the flow value is obtained.
[0020] In another possible implementation manner, the relational expression comprises a linear relational expression and a nonlinear relational expression, and the regression analysis of the scatter plot to obtain the relational expression of the pressure value and the flow value comprises:
[0021] Each scatter point is taken as a starting point, and at least one group of target scatter points is determined, each group of target scatter points comprising each scatter point and a preset number of scatter points after the each scatter point;
[0022] Each group of target scatter points is connected to form a line graph corresponding to each group of target scatter points;
[0023] The line graph corresponding to each group of target scatter points is subjected to regression analysis to obtain a relational expression corresponding to each group of target scatter points.
[0024] By adopting the technical solution, at least one group of target scatter points is determined, each group of target scatter point graphs is connected to obtain a corresponding line graph of each group of target scatter point graphs, and then regression analysis is performed on each line graph, so that a corresponding relationship of each group of target scatter points can be obtained. Since at least one group of target scatter points is obtained as a starting point for each scatter point, the relationship can accurately represent the relationship between the pressure value and the flow value near each scatter point, so that the subsequent relationship group is more accurate.
[0025] In a second aspect, the application provides a gas flow control device, which adopts the following technical solution:
[0026] A gas flow control device, comprising: an acquisition module, configured to acquire a first inner diameter value of a first flow restrictor, a second inner diameter value of a second flow restrictor, a first target flow value, and a second target flow value, the first flow restrictor being a flow restrictor of a gas path where a standard gas is located, the second flow restrictor being a flow restrictor of a gas path where a dilution gas is located, the first target flow value being a required flow value at an output end of the first flow restrictor, and the second target flow value being a required flow value at an output end of the second flow restrictor;
[0027] a relationship determination module, configured to determine a first preset relationship group based on the first inner diameter value, and determine a second preset relationship group based on the second inner diameter value, the first preset relationship group comprising at least two relationship formulas corresponding to the first flow restrictor for calculating pressure in different flow intervals, and the second preset relationship group comprising at least two relationship formulas corresponding to the second flow restrictor for calculating pressure in different flow intervals;
[0028] a pressure value determination module, configured to determine a first pressure value based on the first preset relationship group and the first target flow value, and determine a second pressure value based on the second preset relationship group and the second target flow value, the first pressure value being a pressure value at an input end of the first flow restrictor, and the second pressure value being a pressure value at an input end of the second flow restrictor;
[0029] a control module, configured to control a first pressure controller to act based on the first pressure value, and control a second pressure controller to act based on the second pressure value, the first pressure controller being configured to adjust the pressure value at the input end of the first flow restrictor, and the second pressure controller being configured to adjust the pressure value at the input end of the second flow restrictor.
[0030] By adopting the technical scheme, two gas paths are needed for diluting the standard gas, i.e., a gas path where the standard gas is located and a gas path where the dilution gas is located, and the standard gas and the dilution gas are mixed after passing through the flow restrictors to obtain the standard gas with a required concentration. For different dilution concentrations, the required flow rates at the output ends of the two flow restrictors are different, and therefore the obtaining module obtains the flow rate values, i.e., a first target flow rate value and a second target flow rate value, required to reach the dilution concentration. The output flow rate of the flow restrictor output end is related to the input end pressure, and the corresponding relationship between the input end pressure and the output flow rate of the flow restrictor with different inner diameters is different. Therefore, the obtaining module obtains the inner diameters of the flow restrictors on the two gas paths, so as to subsequently determine the required pressures of the input ends of the two flow restrictors. Since the corresponding relationship between the pressure and the flow rate of the flow restrictor is not consistent in different pressure ranges, after the first inner diameter value and the second inner diameter value are obtained, the relationship determining module determines a first preset relationship group corresponding to the first flow restrictor according to the first inner diameter value, and determines a second relationship group according to the second inner diameter value. The above two preset relationship groups each include at least two relationship formulas for calculating the pressure in different flow rate intervals. The pressure value determining module can calculate the first pressure value of the input end of the first flow restrictor and the second pressure value of the output end of the second flow restrictor according to the above two preset relationship groups and the two target flow rate values. Then, the control module controls the first pressure controller on the standard gas path to act according to the first pressure value, so that the standard gas with the first pressure value is generated at the input end of the first flow restrictor, and the standard gas is output at the output end of the first flow restrictor according to the first target flow rate value. The control module controls the second pressure controller on the dilution gas path to act according to the second pressure value, so that the dilution gas with the second pressure value is generated at the input end of the second flow restrictor, and the dilution gas is output at the output end of the second flow restrictor according to the second target flow rate value. In the subsequent process, the standard gas with the required concentration can be diluted and mixed. Since the corresponding preset relationship group is determined according to the inner diameter of the flow restrictor, the first pressure value and the second pressure value can be calculated more accurately, and the gas with the required flow rate can be output more accurately at different pressures.
[0031] In another possible implementation, when determining the first preset relationship group based on the first inner diameter value and determining the second preset relationship group based on the second inner diameter value, the relationship determining module is specifically configured to:
[0032] match the first inner diameter value and the second inner diameter value in a preset relationship formula library to obtain the first preset relationship group corresponding to the first flow restrictor and the second preset relationship group corresponding to the second flow restrictor. The preset relationship formula library includes a plurality of inner diameter values and a plurality of preset relationship groups corresponding to the inner diameter values.
[0033] In another possible implementation, the apparatus further includes:
[0034] a real-time acquisition module, configured to acquire a test pressure value at an input end of any flow restrictor and an output flow value at an output end in real time;
[0035] a plotting module, configured to plot a scatter plot based on the test pressure value and the output flow value;
[0036] a regression analysis module, configured to perform regression analysis on the scatter plot to obtain a relationship between the pressure value and the flow value.
[0037] In another possible implementation, the relationship includes a linear relationship and a nonlinear relationship, and the regression analysis module, when performing regression analysis on the scatter plot to obtain the relationship between the pressure value and the flow value, is specifically configured to:
[0038] determine at least one group of target scatter points, each group of target scatter points including each scatter point and a preset number of scatter points after the each scatter point;
[0039] connect the target scatter points in each group to form a line chart corresponding to each group of target scatter points;
[0040] perform regression analysis on the line chart corresponding to each group of target scatter points to obtain a relationship corresponding to each group of target scatter points.
[0041] In a third aspect, the present application provides an electronic device, which adopts the technical scheme as follows:
[0042] An electronic device, comprising:
[0043] at least one processor;
[0044] a memory;
[0045] at least one application program, wherein the at least one application program is stored in the memory and configured to be executed by the at least one processor, and the at least one processor is configured to execute the gas flow control method according to any one of the possible implementation manners of the first aspect.
[0046] In a fourth aspect, the present application provides a computer readable storage medium, which adopts the technical scheme as follows:
[0047] A computer readable storage medium, when the computer program is executed in a computer, the computer is caused to execute the gas flow control method according to any one of the first aspect.
[0048] In summary, the present application includes at least one of the following beneficial technical effects:
[0049] 1. The standard gas is diluted, which needs two gas paths, namely the standard gas path and the dilution gas path, and the two paths are mixed after passing through the flow restrictor to obtain the required concentration of the standard gas. For different dilution concentrations, the required flow rates at the output end of the two flow restrictors are different, so the flow values required to achieve the desired dilution concentration, namely the first target flow value and the second target flow value, are obtained. The output flow of the flow restrictor output end is related to the input end pressure, and the corresponding relationship between the input end pressure and the output flow of the flow restrictor with different inner diameters is different, so the inner diameters of the flow restrictors on the two paths are obtained to determine the required pressures of the input ends of the two flow restrictors. Since the corresponding relationship between the pressure and the flow of the flow restrictor is not consistent at different pressure ranges, after obtaining the first inner diameter value and the second inner diameter value, the first preset relationship group corresponding to the first flow restrictor is determined according to the first inner diameter value, and the second relationship group is determined according to the second inner diameter value. The above two preset relationship groups respectively include at least two relationship formulas for calculating the pressure in different flow intervals. According to the above two preset relationship groups and the two target flow values, the first pressure value of the first flow restrictor input end and the second pressure value of the second flow restrictor output end can be calculated. Then the first pressure controller on the standard gas path is controlled to act according to the first pressure value, so that the standard gas with the first pressure value is generated at the input end of the first flow restrictor, and then the standard gas with the first target flow value is output at the output end of the first flow restrictor. The second pressure controller on the dilution gas path is controlled to act according to the second pressure value, so that the dilution gas with the second pressure value is generated at the input end of the second flow restrictor, and then the dilution gas with the second target flow value is output at the output end of the second flow restrictor. In the subsequent process, the standard gas with the required concentration can be diluted and mixed. Since the corresponding preset relationship group is determined according to the inner diameter of the flow restrictor, the first pressure value and the second pressure value can be calculated more accurately, and the gas with the required flow size can be output more accurately at different pressures.
[0050] 2. After at least one group of target scatter points is determined, each group of target scatter point graphs is connected to obtain a corresponding line graph of each group of target scatter point graphs, and then each line graph is subjected to regression analysis, so that a relationship formula corresponding to each group of target scatter points can be obtained. Since at least one group of target scatter points is obtained from each scatter point as a starting point, the relationship formula can accurately represent the relationship between the pressure value and the flow value near each scatter point, so that the relationship group obtained subsequently is more accurate. BRIEF DESCRIPTION OF DRAWINGS
[0051] Figure 1 is a flow diagram of a gas flow control method according to an embodiment of the present application.
[0052] Figure 2 is a flow diagram of a gas flow control device according to an embodiment of the present application.
[0053] Figure 3 Fig. 1 is a structural schematic diagram of an electronic device according to an embodiment of the present application. DETAILED DESCRIPTION
[0054] The present application will be further described below in conjunction with the accompanying drawings.
[0055] Any modifications made by those of ordinary skill in the art based on the present application without creative contribution should fall within the scope of the patent law as long as they are within the scope of the claims of the present application.
[0056] To make the objectives, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be described clearly and completely below in conjunction with the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only some but not all of the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative contribution should fall within the scope of the protection of the present application.
[0057] In addition, the term "and / or" herein is only used to describe the association relationship of the associated objects, which means that there can be three relationships, for example, A and / or B can mean that A exists alone, A and B exist together, and B exists alone. In addition, the character " / " herein, unless otherwise specified, generally represents an "or" relationship between the associated objects before and after it.
[0058] The embodiments of the present application will be further described below in conjunction with the accompanying drawings.
[0059] The embodiments of the present application provide a gas flow control method, which is executed by an electronic device. The electronic device can be a server or a terminal device. The server can be a physical server, a server cluster composed of multiple physical servers, a distributed system, or a cloud server providing cloud computing services. The terminal device can be a smart phone, a tablet computer, a notebook computer, a desktop computer, etc., but is not limited thereto. The terminal device and the server can be directly or indirectly connected through wired or wireless communication, and the embodiments of the present application do not limit this. As shown in FIG. 1, the method comprises steps S101, S102, S103 and S104, wherein, Figure 1
[0060] S101, obtaining a first inner diameter value of a first flow restrictor, a second inner diameter value of a second flow restrictor, a first target flow value and a second target flow value.
[0061] The first flow restrictor is a flow restrictor of a gas path of the standard gas, the second flow restrictor is a flow restrictor of a gas path of the dilution gas, the first target flow value is a flow value required at an output end of the first flow restrictor, and the second target flow value is a flow value required at an output end of the second flow restrictor.
[0062] For the embodiment of the application, the standard gas is a gas with high purity that needs to be diluted, and the dilution gas is an inert gas such as nitrogen. The dilution gas is mixed with the standard gas to obtain the standard gas with a required concentration. In the gas paths of the standard gas or the dilution gas, the respective gas sources are input into the corresponding gas paths, and are preliminarily depressurized by the pressure reducing gauges, so as to reduce the possibility of damage to other devices in the subsequent gas paths due to excessively high pressure of the gas sources.
[0063] After being preliminarily depressurized by the pressure reducing gauges, the standard gas or the dilution gas is secondarily depressurized by the pressure controllers, and is input into the flow restrictors to be restricted in flow, so as to output the gas with a required flow. Since the inner diameter of the flow restrictor has a certain relationship with the output flow of the flow restrictor, the inner diameter of the flow restrictor and the target flow value need to be known.
[0064] Specifically, the user can set the first inner diameter value, the second inner diameter value, the first target flow value, and the second target flow value through a mouse, a keyboard, a touch screen, and the like. The electronic device detects that the user sets the first inner diameter value, the second inner diameter value, the first target flow value, and the second target flow value through the input device, so as to obtain the above data.
[0065] In S102, a first preset relationship formula group is determined based on the first inner diameter value, and a second preset relationship formula group is determined based on the second inner diameter value.
[0066] The first preset relationship formula group includes at least two relationship formulas corresponding to the first flow restrictor for calculating the pressure in different flow intervals, and the second preset relationship formula group includes at least two relationship formulas corresponding to the second flow restrictor for calculating the pressure in different flow intervals.
[0067] For the embodiments of the present application, the inner diameters of the flow restrictors are different, and the corresponding relationships between the gas pressure at the input end of the flow restrictors and the flow rate at the output end are different. Moreover, for the same inner diameter of the flow restrictors, the input pressure and the output flow rate can be in a linear relationship or in a nonlinear relationship in different pressure intervals. For example, for a flow restrictor with a certain inner diameter, when the input pressure is between 17 and 40 pounds per square inch (psia), the pressure and the flow rate are nonlinearly correlated, and the relationship between the pressure and the flow rate can be characterized by a quadratic function, but when the pressure is greater than 40 psia, the pressure and the flow rate are linearly correlated, for example, the relationship between the pressure and the flow rate can be characterized by a linear function. Alternatively, for a flow restrictor with another inner diameter, when the input pressure is between 17 and 20 psia, between 19 and 30 psia, between 25 and 40 psia, between 35 and 60 psia, between 50 and 80 psia, between 70 and 100 psia, and between 90 and 120 psia, the pressure and the flow rate are nonlinearly correlated, and the relationship between the pressure and the flow rate can be characterized by a quadratic function, but the quadratic function relationship between the pressure and the flow rate is different in each pressure interval, and therefore the preset relationship group corresponding to the flow restrictor includes multiple quadratic functions.
[0068] Therefore, the corresponding preset relationship group needs to be determined according to the inner diameter of the flow restrictor to calculate the pressure value required to reach the target flow rate value. The electronic device determines the first preset relationship group corresponding to the standard gas according to the first inner diameter value, thereby calculating the pressure value required at the input end of the first flow restrictor corresponding to the standard gas, and then obtaining the standard gas with the target flow rate at the output end of the first flow restrictor. The electronic device determines the second preset relationship group corresponding to the dilution gas according to the second inner diameter value, thereby calculating the pressure value required at the input end of the second flow restrictor corresponding to the dilution gas, and then obtaining the dilution gas with the target flow rate at the output end of the second flow restrictor.
[0069] S103, determining the first pressure value based on the first preset relationship group and the first target flow rate value, and determining the second pressure value based on the second preset relationship group and the second target flow rate value.
[0070] The first pressure value is the pressure value at the input end of the first flow restrictor, and the second pressure value is the pressure value at the input end of the second flow restrictor.
[0071] For the embodiments of the present application, the preset relationship set includes calculation formulas corresponding to different flow rate intervals, so the electronic device can determine the flow rate interval where the target flow rate value is located according to the target flow rate value, and then determine the calculation formula to be used. After the electronic device obtains the first target flow rate value, the first target flow rate value is brought into the first preset relationship set, and the pressure value required for outputting the standard gas with the size of the first target flow rate value is calculated according to the calculation formula corresponding to the interval where the first target flow rate value is located. After the electronic device obtains the second target flow rate value, the second target flow rate value is brought into the second preset relationship set, and the pressure value required for outputting the dilution gas with the size of the second target flow rate value is calculated according to the calculation formula corresponding to the interval where the second target flow rate value is located.
[0072] Further, taking step S102 as an example, there may be an overlap between two adjacent pressure value intervals. Taking “17 to 20 psia” and “19 to 30 psia” as examples, 19 to 20 psia is the overlapping part between the two intervals, which indicates that when the pressure determined according to the target flow rate value is between 19 to 20 psia, the pressure values calculated using the relationship formulas corresponding to the two intervals “17 to 20 psia” and “19 to 30 psia” are both relatively accurate, that is, there is an overlap between the target flow rate value intervals. Since there is an overlap between the pressure value intervals, the corresponding flow rate value intervals also have an overlap. After the electronic device obtains the target flow rate value, the median of each flow rate value interval is calculated, and then the median equal to or closest to the target flow rate value is determined. The fact that the median is equal to or close to the target flow rate value indicates that using the corresponding relationship formula to calculate the pressure value is more accurate, so the flow rate value interval corresponding to the median equal to or closest to the target flow rate value is determined as the target flow rate value interval, and the pressure value corresponding to the target flow rate value is calculated using the relationship formula corresponding to the target flow rate value interval.
[0073] S104, controlling the action of the first pressure controller based on the first pressure value, and controlling the action of the second pressure controller based on the second pressure value.
[0074] The first pressure controller is configured to adjust the pressure value at the input end of the first flow restrictor, and the second pressure controller is configured to adjust the pressure value at the input end of the second flow restrictor.
[0075] For the embodiments of the present application, the electronic device is connected to the first pressure controller through wired or wireless connection, and the electronic device is connected to the second pressure controller through wired or wireless connection. After the electronic device calculates the first pressure value and the second pressure value, the corresponding signals are generated, and the corresponding signals are sent to the first pressure controller and the second pressure controller respectively. After the first pressure controller and the second pressure controller receive the signals, they act to the corresponding states, so that the standard gas and the dilution gas reach the specified pressure values at the input ends of the flow restrictors, i.e. the output ends of the corresponding pressure controllers.
[0076] In a possible implementation of the embodiment, the step S102 of determining the first preset relational expression set based on the first inner diameter value and determining the second preset relational expression set based on the second inner diameter value specifically includes a step S1021 (not shown in the figure), in which,
[0077] In the step S1021, the first preset relational expression set corresponding to the first flow restrictor and the second preset relational expression set corresponding to the second flow restrictor are obtained by matching the first inner diameter value and the second inner diameter value in the preset relational expression library.
[0078] The preset relational expression library includes a plurality of inner diameter values and a plurality of preset relational expression sets corresponding to the inner diameter values.
[0079] For the embodiment, the staff can store each inner diameter value flow restrictor and the relational expression set corresponding to the flow restrictor in the preset relational expression library in advance. The preset relational expression library can be stored in the storage medium in the electronic device or in the cloud server. When the electronic device obtains the first inner diameter value and the second inner diameter value, the first inner diameter value and the second inner diameter value are searched in the preset relational expression library, so that the matched preset relational expression set is found.
[0080] In a possible implementation of the embodiment, the first inner diameter value of the first flow restrictor, the second inner diameter value of the second flow restrictor, the first target flow value, and the second target flow value are obtained, and the steps S105 (not shown in the figure), S106 (not shown in the figure), and S107 (not shown in the figure) are further included, in which,
[0081] In the step S105, the test pressure value at the input end of any flow restrictor and the output flow value at the output end are obtained in real time.
[0082] In the step S106, a scatter plot is drawn based on the test pressure value and the output flow value.
[0083] In the step S107, regression analysis is performed on the scatter plot to obtain a relational expression corresponding to the pressure value and the flow value.
[0084] For the embodiment, the staff sets a pressure sensor at the input end of any flow restrictor, and the pressure sensor collects the pressure value at the input end of the flow restrictor, that is, the test pressure value. The electronic device is connected to the pressure sensor in a wired or wireless manner to obtain the test pressure value. The staff sets a flow sensor at the output end of the flow restrictor, and the flow sensor collects the flow value at the output end of the flow restrictor, that is, the output flow value. The electronic device is connected to the flow sensor in a wired or wireless manner to obtain the output flow value.
[0085] The worker gradually adjusts the pressure at the input end of the flow restrictor to obtain corresponding flow sizes at different pressures. Then the electronic device generates a coordinate system according to the pressure (x) and the flow (y), and then determines points on the coordinate system according to the test pressure values and the corresponding output flow values. Thus, a scatter plot is formed. The scatter plot contains the relationship between pressure and flow. After obtaining the scatter plot, the electronic device performs regression analysis on the scatter plot to determine whether the pressure and flow are in a linear relationship or a nonlinear relationship, and then obtains a relationship formula corresponding to the pressure values and the flow values.
[0086] In a possible implementation of the embodiment of the application, the relationship formula includes a linear relationship formula and a nonlinear relationship formula. The regression analysis of the scatter plot in step S107 obtains a relationship formula corresponding to the pressure values and the flow values, and specifically includes step S1071 (not shown in the figure), step S1072 (not shown in the figure), and step S1073 (not shown in the figure), wherein,
[0087] The relationship formula includes a linear relationship formula and a nonlinear relationship formula. The regression analysis of the scatter plot obtains a relationship formula corresponding to the pressure values and the flow values, and includes:
[0088] S1071, starting from each scatter point and determining at least one group of target scatter points.
[0089] Each group of target scatter points includes each scatter point and a preset number of scatter points after the scatter point.
[0090] S1072, connecting each group of target scatter points to form a line chart corresponding to each group of target scatter points.
[0091] S1073, performing regression analysis on the line chart corresponding to each group of target scatter points to obtain a relationship formula corresponding to each group of target scatter points.
[0092] In this embodiment, the electronic device sequentially connects each group of target scatter points to obtain a line graph corresponding to each group of target scatter points. When collecting flow values corresponding to different pressure values, the operator can select pressure value points at the same interval or at different intervals. For example, a pressure value point is determined every 1 psia between 17 and 20 psia, every 2 psia between 20 and 30 psia, every 5 psia between 30 and 40 psia, and every 10 psia above 40 psia, and so on. The electronic device determines the relationship based on a preset number of scatter points. Assuming the preset number is 4, for example, there are 8 scatter points, corresponding to 17 psia, 18 psia, 19 psia, 20 psia, 22 psia, 24 psia, 26 psia, and 28 psia. The electronic device uses each scatter point as a starting point and selects three points after that scatter point as a group of target scatter points, until there are fewer than three scatter points following a certain starting point. Taking the above eight scatter points as an example, the following groups of target scatter points are determined: 17 to 20 psia, 18 to 22 psia, 19 to 24 psia, 20 to 26 psia, and 22 to 28 psia. The range between the start and end points of each group of target scatter points is the pressure value interval corresponding to each group of target scatter points. The electronic device connects the target scatter points to obtain the corresponding line graph for each group of target scatter points, and then determines the relationship based on the pressure value and the corresponding flow rate value of each group of target scatter points. The electronic device performs linear or nonlinear fitting on the line graph corresponding to each group of target scatter points to obtain the optimal relationship. Specifically, the electronic device can input the scatter graph corresponding to each group of target scatter points into software and plugins for fitting, or it can use a preset model for fitting.
[0093] The above embodiments describe a gas flow control method from the perspective of process flow. The following embodiments describe a gas flow control device from the perspective of virtual module or virtual unit. For details, please refer to the following embodiments.
[0094] This application provides a gas flow control device 20, such as... Figure 2 As shown, the gas flow control device 20 may specifically include:
[0095] The acquisition module 201 is used to acquire the first inner diameter value of the first flow limiter, the second inner diameter value of the second flow limiter, the first target flow rate value, and the second target flow rate value. The first flow limiter is the flow limiter of the gas path where the standard gas is located, the second flow limiter is the flow limiter of the gas path where the dilution gas is located, the first target flow rate value is the flow rate value required at the output end of the first flow limiter, and the second target flow rate value is the flow rate value required at the output end of the second flow limiter.
[0096] The relationship determination module 202 is configured to determine a first preset relationship group based on the first inner diameter value and determine a second preset relationship group based on the second inner diameter value. The first preset relationship group includes at least two relationship formulas corresponding to the first flow restrictor for calculating pressure in different flow intervals. The second preset relationship group includes at least two relationship formulas corresponding to the second flow restrictor for calculating pressure in different flow intervals.
[0097] The pressure value determination module 203 is configured to determine a first pressure value based on the first preset relationship group and the first target flow value and determine a second pressure value based on the second preset relationship group and the second target flow value. The first pressure value is the pressure value at the input end of the first flow restrictor. The second pressure value is the pressure value at the input end of the second flow restrictor.
[0098] The control module 204 is configured to control the first pressure controller to act based on the first pressure value and control the second pressure controller to act based on the second pressure value. The first pressure controller is configured to adjust the pressure value at the input end of the first flow restrictor. The second pressure controller is configured to adjust the pressure value at the input end of the second flow restrictor.
[0099] The embodiment of the present application provides a gas flow control device, wherein two gas paths are required for diluting standard gas, i.e., a gas path where the standard gas is located and a gas path where dilution gas is located, the standard gas and the dilution gas are mixed after passing through flow restrictors to obtain standard gas with a required concentration, for different dilution concentrations, required flow rates of the two gas paths at the output end of the flow restrictors are different, therefore, the acquisition module 201 acquires flow rate values reaching the required dilution concentration, i.e., a first target flow rate value and a second target flow rate value, the output flow rate of the output end of the flow restrictor is related to the input end pressure, and the corresponding relationship between the input end pressure and the output flow rate of the flow restrictor with different inner diameters is different, therefore, the acquisition module 201 acquires the inner diameters of the flow restrictors on the two gas paths, so as to subsequently determine required pressures of the input ends of the two flow restrictors, because the corresponding relationship between the pressure and the flow rate of the flow restrictor is not consistent under different pressure ranges, therefore, after the first inner diameter value and the second inner diameter value are acquired, the relationship determination module 202 determines a first preset relationship group corresponding to the first flow restrictor according to the first inner diameter value, and determines a second relationship group according to the second inner diameter value, the above two preset relationship groups respectively include at least two relationship formulas for calculating pressure in different flow rate intervals, the pressure value determination module 203 can calculate a first pressure value of the input end of the first flow restrictor and a second pressure value of the output end of the second flow restrictor according to the above two preset relationship groups and the two target flow rate values, then the control module 204 controls the first pressure controller on the standard gas path to act according to the first pressure value, so that the standard gas with the first pressure value is generated at the input end of the first flow restrictor, and then the standard gas is output at the output end of the first flow restrictor according to the first target flow rate value, the control module 204 controls the second pressure controller on the dilution gas path to act according to the second pressure value, so that the dilution gas with the second pressure value is generated at the input end of the second flow restrictor, and then the dilution gas is output at the output end of the second flow restrictor according to the second target flow rate value, and then the standard gas with the required concentration can be diluted and mixed, because the corresponding preset relationship group is determined according to the inner diameter of the flow restrictor, therefore, the first pressure value and the second pressure value can be calculated more accurately, and then the gas with the required flow rate can be output more accurately under different pressures.
[0100] In a possible implementation of the embodiment of the present application, when the relationship determination module 202 determines the first preset relationship group based on the first inner diameter value and determines the second preset relationship group based on the second inner diameter value, the relationship determination module 202 is specifically configured to:
[0101] The first inner diameter value and the second inner diameter value are matched in a preset relationship formula library to obtain the first preset relationship group corresponding to the first flow restrictor and the second preset relationship group corresponding to the second flow restrictor, the preset relationship formula library includes a plurality of inner diameter values and a plurality of preset relationship formula groups corresponding to the plurality of inner diameter values.
[0102] In a possible implementation of the embodiment of the application, the device 20 further includes:
[0103] The real-time acquisition module is configured to acquire, in real time, a test pressure value at an input end of any flow restrictor and an output flow value at an output end of the flow restrictor.
[0104] The drawing module is configured to draw a scatter plot based on the test pressure value and the output flow value.
[0105] The regression analysis module is configured to perform regression analysis on the scatter plot to obtain a relationship between the pressure value and the flow value.
[0106] In a possible implementation of the embodiment of the application, the relationship includes a linear relationship and a nonlinear relationship, and when the regression analysis module performs regression analysis on the scatter plot to obtain the relationship between the pressure value and the flow value, the regression analysis module is specifically configured to:
[0107] determine at least one group of target scatter points, each group of target scatter points including each scatter point and a preset number of scatter points after the each scatter point;
[0108] connect the target scatter points in each group to form a line chart corresponding to each group of target scatter points;
[0109] perform regression analysis on the line chart corresponding to each group of target scatter points to obtain a relationship corresponding to each group of target scatter points.
[0110] Those skilled in the art can clearly understand that, for the convenience and brevity of description, the specific working process of the gas flow control device 20 described above can refer to the corresponding process in the foregoing method embodiments, which will not be described herein.
[0111] In the embodiment of the application, an electronic device is provided, as shown in Figure 3 The electronic device 30 shown in Figure 3 The electronic device 30 shown in the embodiment includes a processor 301 and a memory 303. The processor 301 and the memory 303 are connected, for example, through a bus 302. Optionally, the electronic device 30 can further include a transceiver 304. It should be noted that in actual applications, the transceiver 304 is not limited to one, and the structure of the electronic device 30 does not constitute a limitation on the embodiments of the application.
[0112] The processor 301 can be a CPU (Central Processing Unit), a general-purpose processor, a DSP (Digital Signal Processor), an ASIC (Application Specific Integrated Circuit), an FPGA (Field Programmable Gate Array) or other programmable logic device, transistor logic device, hardware component, or any combination thereof. It can implement or execute various exemplary logical blocks, modules and circuits described in connection with the disclosure. The processor 301 can also be a combination of computing functions, such as one or more microprocessor combinations, combinations of DSP and microprocessor, etc.
[0113] The bus 302 can include a path for transmitting information between the above-mentioned components. The bus 302 can be a PCI (Peripheral Component Interconnect) bus or an EISA (Extended Industry Standard Architecture) bus, etc. The bus 302 can be divided into an address bus, a data bus, a control bus, etc. For convenience of representation, Figure 3 In the figure, only one thick line is used, but it does not mean that there is only one bus or one type of bus.
[0114] The memory 303 can be a ROM (Read Only Memory) or other type of static storage device that can store static information and instructions, a RAM (Random Access Memory) or other type of dynamic storage device that can store information and instructions, an EEPROM (Electrically Erasable Programmable Read Only Memory), a CD-ROM (Compact Disc Read Only Memory) or other optical disk storage, an optical disk storage (including a compact disk, a laser disk, an optical disk, a digital versatile disk, a Blu-ray disk, etc.), a magnetic disk storage medium or other magnetic storage device, or any other medium capable of carrying or storing desired program code in the form of instructions or data structures and capable of being accessed by a computer, but not limited thereto.
[0115] The memory 303 is configured to store application program codes for implementing the solutions of the present application, and the processor 301 is configured to execute the application program codes stored in the memory 303.
[0116] The electronic device includes, but is not limited to, a mobile terminal such as a mobile phone, a notebook computer, a digital broadcast receiver, a PDA (Personal Digital Assistant), a PAD (Tablet Personal Computer), a PMP (Portable Multimedia Player), a car terminal (for example, a car navigation terminal), and the like, and a stationary terminal such as a digital TV, a desktop computer, and the like. It can also be a server or the like. Figure 3 The electronic device shown is merely an example, and should not impose any limitation on the functions and use range of the embodiments of the present application.
[0117] The embodiment of the present application provides a computer readable storage medium, which stores a computer program, and when the computer program is run on a computer, the computer can execute the corresponding content in the foregoing method embodiment. Compared with the related art, in the embodiment of the present application, two gas paths are needed for diluting the standard gas, that is, a gas path where the standard gas is located and a gas path where the dilution gas is located, and the standard gas and the dilution gas are mixed after passing through the flow restrictors to obtain the standard gas with a required concentration. For different dilution concentrations, the required flow rates of the two gas paths at the output end of the flow restrictors are different, so the flow rate values, that is, the first target flow rate value and the second target flow rate value, reaching the required dilution concentration are obtained. The output flow rate of the output end of the flow restrictor is related to the input end pressure, and the corresponding relationship between the input end pressure and the output flow rate of the flow restrictor with different inner diameters is different. Therefore, the inner diameters of the flow restrictors on the two gas paths are obtained, so that the required pressures of the input ends of the two flow restrictors are determined. Since the corresponding relationship between the pressure and the flow rate of the flow restrictor is not consistent in different pressure ranges, after the first inner diameter value and the second inner diameter value are obtained, the first preset relationship group corresponding to the first flow restrictor is determined according to the first inner diameter value, and the second relationship group is determined according to the second inner diameter value. The above two preset relationship groups respectively include at least two relationship formulas for calculating the pressure in different flow rate intervals. According to the above two preset relationship groups and the two target flow rate values, the first pressure value of the input end of the first flow restrictor and the second pressure value of the output end of the second flow restrictor can be calculated. Then, the first pressure controller on the standard gas path is controlled to act according to the first pressure value, so that the standard gas with the first pressure value is generated at the input end of the first flow restrictor, and then the standard gas with the first target flow rate value is output at the output end of the first flow restrictor. The second pressure controller on the dilution gas path is controlled to act according to the second pressure value, so that the dilution gas with the second pressure value is generated at the input end of the second flow restrictor, and then the dilution gas with the second target flow rate value is output at the output end of the second flow restrictor. In the subsequent process, the standard gas with the required concentration can be diluted and mixed. Since the corresponding preset relationship groups are determined according to the inner diameters of the flow restrictors, the first pressure value and the second pressure value can be calculated more accurately, and then the gas with the required flow rate can be output more accurately at different pressures.
[0118] It should be understood that although the steps in the flowcharts of the drawings are shown in a sequential order following the arrows, the steps are not necessarily executed in the order indicated by the arrows. Unless explicitly stated otherwise herein, the execution of the steps is not strictly limited to the order indicated by the arrows, and can be executed in other orders. Moreover, at least some of the steps in the flowcharts of the drawings can include multiple sub-steps or multiple stages, which are not necessarily executed at the same time, but can be executed at different times, and the execution order of which is not necessarily sequential, but can be round-robin or alternating with at least some of the other steps or sub-steps or stages of other steps.
[0119] The above only describes some embodiments of the present application, and it should be pointed out that for those skilled in the art, without departing from the principles of the present application, a number of improvements and refinements can be made, which should also be considered as the protection scope of the present application.
Claims
1. A gas flow control method, characterized by, The method comprises the following steps: acquiring a first inner diameter value of a first flow restrictor, a second inner diameter value of a second flow restrictor, a first target flow value and a second target flow value, the first flow restrictor being a flow restrictor of a gas path where standard gas is located, the second flow restrictor being a flow restrictor of a gas path where dilution gas is located, the first target flow value being a required flow value at an output end of the first flow restrictor, and the second target flow value being a required flow value at an output end of the second flow restrictor; determining a first preset relational expression group based on the first inner diameter value and determining a second preset relational expression group based on the second inner diameter value, the first preset relational expression group comprising at least two relational expressions corresponding to the first flow restrictor for calculating pressure in different flow intervals, the second preset relational expression group comprising at least two relational expressions corresponding to the second flow restrictor for calculating pressure in different flow intervals, the relational expressions being obtained by drawing a scatter plot of test pressure values at an input end of the flow restrictor and output flow values at an output end of the flow restrictor in real time and performing regression analysis, the relational expressions comprising linear relational expressions and nonlinear relational expressions, and there being overlap between different flow intervals; calculating a median value of each flow interval, determining a flow interval corresponding to a median value equal to or closest to the first target flow value as a first flow interval, and determining a flow interval corresponding to a median value equal to or closest to the second target flow value as a second flow interval; calculating a first pressure value based on a relational expression corresponding to the first flow interval, the first pressure value being a pressure value at an input end of the first flow restrictor; calculating a second pressure value based on a relational expression corresponding to the second flow interval, the second pressure value being a pressure value at an input end of the second flow restrictor; controlling a first pressure controller to act based on the first pressure value and controlling a second pressure controller to act based on the second pressure value, the first pressure controller being configured to adjust the pressure value at the input end of the first flow restrictor, and the second pressure controller being configured to adjust the pressure value at the input end of the second flow restrictor.
2. The gas flow control method of claim 1, wherein The method further comprises the following steps: matching the first inner diameter value and the second inner diameter value in a preset relational expression library to obtain the first preset relational expression group corresponding to the first flow restrictor and the second preset relational expression group corresponding to the second flow restrictor, the preset relational expression library comprising a plurality of inner diameter values and a plurality of preset relational expression groups corresponding to the plurality of inner diameter values.
3. The gas flow control method of claim 1, wherein The method further comprises the following steps: obtaining test pressure values at an input end of any flow restrictor and output flow values at an output end of the flow restrictor in real time; drawing a scatter plot based on the test pressure values and the output flow values; performing regression analysis on the scatter plot to obtain relational expressions corresponding to the pressure values and the flow values.
4. The gas flow control method of claim 3, wherein The method further comprises the following steps: taking each scatter point as a starting point and determining at least one group of target scatter points, each group of target scatter points comprising the each scatter point and a preset number of scatter points after the each scatter point. Connecting each group of target scatter points to form a corresponding line chart of each group of target scatter points; Performing regression analysis on the line chart corresponding to each group of target scatter points to obtain a corresponding relationship of each group of target scatter points.
5. A gas flow control device, characterized by, It comprises: An acquisition module is configured to acquire a first inner diameter value of a first flow restrictor, a second inner diameter value of a second flow restrictor, a first target flow value, and a second target flow value. The first flow restrictor is a flow restrictor in a gas path of standard gas. The second flow restrictor is a flow restrictor in a gas path of dilution gas. The first target flow value is a required flow value at an output end of the first flow restrictor. The second target flow value is a required flow value at an output end of the second flow restrictor. A relationship determination module is configured to determine a first preset relationship group based on the first inner diameter value and determine a second preset relationship group based on the second inner diameter value. The first preset relationship group comprises at least two relationship formulas corresponding to the first flow restrictor for calculating pressure in different flow intervals. The second preset relationship group comprises at least two relationship formulas corresponding to the second flow restrictor for calculating pressure in different flow intervals. A preset relationship formula is obtained by drawing a scatter plot of a test pressure value at an input end of a flow restrictor and an output flow value at an output end of the flow restrictor in real time and performing regression analysis. The relationship comprises a linear relationship formula and a nonlinear relationship formula. There is an overlap between different flow intervals. A pressure value determination module is configured to: Calculate a median value of each flow interval, determine a flow interval corresponding to a median value equal to or closest to the first target flow value as a first flow interval, and determine a flow interval corresponding to a median value equal to or closest to the second target flow value as a second flow interval. Calculate a first pressure value based on a relationship formula corresponding to the first flow interval. The first pressure value is a pressure value at an input end of the first flow restrictor. Calculate a second pressure value based on a relationship formula corresponding to the second flow interval. The second pressure value is a pressure value at an input end of the second flow restrictor. A control module is configured to control a first pressure controller to act based on the first pressure value and control a second pressure controller to act based on the second pressure value. The first pressure controller is configured to adjust the pressure value at the input end of the first flow restrictor. The second pressure controller is configured to adjust the pressure value at the input end of the second flow restrictor.
6. A gas flow control device according to claim 5, wherein The device further comprises: A real-time acquisition module is configured to acquire a test pressure value at an input end of a flow restrictor and an output flow value at an output end of the flow restrictor in real time. A drawing module is configured to draw a scatter plot based on the test pressure value and the output flow value. A regression analysis module is configured to perform regression analysis on the scatter plot to obtain a relationship formula corresponding to the pressure value and the flow value.
7. An electronic device, comprising: It comprises: At least one processor; A memory; At least one application program, wherein the at least one application program is stored in the memory and configured to be executed by the at least one processor. The at least one application program is configured to execute a gas flow control method according to any one of claims 1-4.
8. A computer-readable storage medium having stored thereon a computer program, characterized in that, When the computer program is executed in a computer, the computer is configured to execute a gas flow control method according to any one of claims 1-4.
Citation Information
Patent Citations
Gas mass flow control method and device
CN113721673A