A diffusion welding head structure with a self-contained heating system

Abstract

The present invention proposes a diffusion welding head structure with a built-in heating system, the diffusion welding head structure comprises a metal pressure rod, a guide device and a TZM pressure head, the metal pressure rod comprises an upper metal pressure rod and a lower metal pressure rod, the TZM pressure head comprises an upper TZM pressure head and a lower TZM pressure head, and also comprises a heating system, the heating system comprises a movable molybdenum heating rod, a molybdenum heating plate and a movable soft copper braid, the guide device, the movable molybdenum heating rod and the molybdenum heating plate form a heating chamber, the upper metal pressure rod passes through the molybdenum heating plate and is connected to the upper TZM pressure head, the molybdenum heating plate is evenly installed with molybdenum heating elements, temperature thermocouples and insulating porcelain parts, one end of the movable soft copper braid is connected to the movable molybdenum heating plate rod, and the other end is connected to an external power supply, the present application heats through the heating system of the diffusion welding head structure, and does not require external equipment for heating, which not only effectively saves costs but also effectively improves the heating efficiency of the diffusion welding head structure.

Description

Technical Field

[0001] The invention relates to diffusion welding equipment, in particular to a diffusion welding pressure head structure with a heating system. Background Art

[0002] Diffusion welding refers to a welding method in which the weldments are tightly fitted together and maintained at a certain temperature and pressure for a preset time, so that the atoms between the contact surfaces diffuse into each other to form a connection.

[0003] In the prior art, diffusion welding equipment is generally used to complete diffusion welding of weldments, and it can also be used for vacuum sintering processes of other products. The diffusion welding equipment in the prior art includes a furnace body, a heating device for heating the weldment is arranged in the furnace body, and a loading device for making the two weldments fit tightly together is also arranged, wherein the loading device includes a loading platform, a telescopic mechanism and a pressure head structure for the diffusion welding equipment, wherein the diffusion pressure head includes a loading rod and a loading plate, the loading rod and the loading plate are fixedly connected, the loading platform is fixedly installed in the furnace body, and the loading rod is installed on the telescopic mechanism and can move vertically. When diffusion welding is required, the weldment is stacked on the loading platform, and then the loading rod is moved vertically by the telescopic mechanism, so that the loading plate acts on the weldment, so that the weldment fits tightly together.

[0004] The diffusion welding head often needs to be heated by an external component when it is working. Based on this, it is necessary to add a heating component to heat it. Therefore, in actual use, the cost of the diffusion welding equipment and the area occupied by the equipment are often increased. Summary of the invention

[0005] In order to solve the above technical problems, the present invention proposes a diffusion welding head structure with a built-in heating system. The diffusion welding head structure is heated by the heating system built into the structure, and no external equipment is required for heating. This not only effectively saves costs but also effectively improves the heating efficiency of the diffusion welding head structure.

[0006] To achieve the above object, the technical solution adopted by the present invention is:

[0007] A diffusion welding head structure with a self-contained heating system, characterized in that: the diffusion head structure includes a metal pressure rod, a guide device and a TZM pressure head, the metal pressure rod includes an upper metal pressure rod and a lower metal pressure rod, the TZM pressure head includes an upper TZM pressure head and a lower TZM pressure head, and also includes a vacuum furnace for installing the diffusion welding head structure, the guide device is installed on the vacuum furnace, the upper metal pressure rod is installed in the guide device and extends into the vacuum furnace through the guide device, the upper TZM pressure head is installed at one end of the upper metal pressure rod, the upper metal pressure rod is movably installed in the guide device up and down, the lower metal pressure rod is fixedly installed below the upper metal pressure rod and is located in the vacuum furnace, and the lower TZM pressure head is installed in the lower One end of the metal pressure rod, the upper TZM pressure head is arranged opposite to the lower TZM pressure head, and also includes a heating system, the heating system includes a movable molybdenum heating rod, a molybdenum heating plate and a movable soft copper braid, the lower part of the guide device is opened, one end of the movable molybdenum heating rod is movably installed on both sides of the lower part of the guide device, and the other end is fixed on the two sides of the molybdenum heating plate, the guide device, the movable molybdenum heating rod and the molybdenum heating plate form a heating chamber, the upper metal pressure rod passes through the molybdenum heating plate and is connected to the upper TZM pressure head, the molybdenum heating plate is evenly installed with molybdenum heating elements, temperature thermocouples and insulating porcelain parts, one end of the movable soft copper braid is connected to the movable molybdenum heating plate rod, and the other end is connected to an external power supply.

[0008] In the above structure: the application proposes a diffusion welding pressure head structure with a heating system, the diffusion pressure head structure includes a metal pressure rod, a guide device and a TZM pressure head, wherein the metal pressure rod includes an upper metal pressure rod and a lower metal pressure rod, the TZM pressure head includes an upper TZM pressure head and a lower TZM pressure head, the guide device is installed on the vacuum furnace, the upper metal pressure rod is connected to the guide device and extends into the vacuum furnace to achieve installation, the guide device ensures the dynamic seal of the upper metal pressure rod during pressurized displacement, the end of the upper metal pressure rod is connected by an internal threaded flange, which makes it very convenient to replace the seal, the upper TZM pressure head is an actuator for the vacuum furnace to pressurize the workpiece in the hot zone, the upper and lower TZM pressure heads have high strength and low thermal conductivity, which is convenient for heating and welding, the heating system includes a movable molybdenum heating rod, a molybdenum heating plate and a movable soft copper braid, the lower part of the guide device is opened, and the movable molybdenum One end of the heating rod is movably installed on both sides below the guide device, and the other end is fixed on both sides of the molybdenum heating plate. Therefore, the guide device, the movable molybdenum heating rod and the molybdenum heating plate form a heating chamber, which is fixed in the heating chamber by a high-temperature molybdenum bracket and an insulating member. The molybdenum heating elements on the molybdenum heating plate are evenly arranged to ensure the uniformity of the temperature rise of the upper TZM pressure head during heating. The temperature rise and heating of the molybdenum heating elements on the molybdenum heating plate can be achieved by energizing the molybdenum heating elements on the molybdenum heating plate, thereby achieving the temperature rise and heating of the molybdenum heating plate. When in use, the upper TZM pressure head is heated by the molybdenum heating plate in the heating chamber, and the upper metal pressure rod drives the upper TZM pressure head to move upward so that it is close to the molybdenum heating plate, and is quickly heated by the molybdenum heating elements on the molybdenum heating plate. The upper TZM pressure head is installed in a vacuum furnace and has good airtightness, so the heating efficiency of the upper TZM pressure head will be greatly improved.

[0009] As the preferred technical solution of the present invention: it also includes a hydraulic station, a hydraulic cylinder, a pressure frame and a load-bearing platform installed in cooperation with the diffusion welding pressure head structure with a self-contained heating system, the vacuum furnace, the hydraulic station, the hydraulic cylinder and the load-bearing platform are respectively installed and fixed on the pressure frame, the load-bearing platform is located below the vacuum furnace, the hydraulic cylinder is located above the vacuum furnace, the hydraulic station is located above the hydraulic cylinder, the hydraulic station is connected to the hydraulic cylinder, the upper metal pressure rod is movably installed in the hydraulic cylinder, and the hydraulic cylinder adjusts its internal pressure through the hydraulic station to control the upper metal pressure rod to move up and down.

[0010] In the above structure: when the present application is in use, a hydraulic station, a hydraulic cylinder, a pressure frame and a load-bearing platform which are installed in cooperation with the diffusion welding pressure head structure with a self-contained heating system are also provided. The hydraulic station is used to adjust the pressure of the hydraulic cylinder, thereby realizing the control of the up and down movement of the upper metal pressure rod. The connection between the upper metal pressure rod and the hydraulic cylinder is realized by bolts evenly distributed on the flange. Since the bolts have a uniform pre-tightening force during installation, the bending resistance of the connection between the hydraulic cylinder and the upper metal pressure rod is enhanced. The pressure frame is used to realize the installation and fixation of various components. The pressure frame is a four-column structure. The upper TZM pressure head and the upper metal pressure rod are connected by four sets of double-acting cylinders. The four sets of double-acting cylinders bear four-point pressure, not the central load. The four-column pressure frame has been strictly pressure-checked to ensure that there is no obvious elastic deformation and deflection deformation under the pressure of 480T. The small deflection deformation is eliminated by the holding platform to ensure the accuracy of the platform. The load-bearing platform is used to realize the installation and fixation of the vacuum furnace and the lower TZM pressure head. The maintenance platform is also installed on the pressure frame to facilitate the staff to carry out maintenance. The external circulation air cooling system is also installed on the pressure frame. The external circulation air cooling system consists of a high-speed fan, a high-efficiency heat exchanger, a small fixed cover of the heating chamber through which the wind can pass, an external circulation tank, a pipeline, and a furnace guide device. When air-cooling, high-purity nitrogen (or argon) is inflated, and a forced convection cycle is formed under the high-speed fan drive to achieve rapid air cooling of the workpiece. The air cooling pressure is adjustable from 0.8-1.99bar.

[0011] As a preferred technical solution of the present invention: a furnace is provided in the vacuum furnace, and the upper TZM pressure head, the lower TZM pressure head and the molybdenum heating plate are all located in the furnace.

[0012] In the above structure: the upper TZM pressure head, the lower TZM pressure head and the molybdenum heating plate are all located in the furnace. The size and shape of the furnace are designed to minimize deformation. The furnace has good insulation and heat preservation properties, which is convenient for heating the upper TZM pressure head and the molybdenum heating plate.

[0013] As a preferred technical solution of the present invention: the vacuum furnace is a double-wall water-cooled sandwich structure, cooling water flows between the sandwiches, water-cooled electrodes are installed on the sandwiches, and the water-cooled electrodes are connected to an external power supply.

[0014] In the above structure: the vacuum furnace is a double-walled water-cooled sandwich structure, cooling water is passed between the sandwiches, and water cooling is achieved through water-cooled electrodes. A water cooling system is set in the double-walled water-cooled sandwich structure. The water cooling system includes ball valves, pipes, connectors, return pipes, etc. The cooling water points include furnace body, furnace cover, water-cooled electrodes, upper and lower metal pressure rods, hydraulic stations and vacuum units, etc.; ensure that the outer surface temperature of the vacuum furnace is not greater than 45°C or the temperature rise is less than 20°C. The water cooling system is used for cooling the furnace door, furnace shell, water-cooled electrodes, vacuum units and other parts. An electric contact pressure gauge is also installed in the water cooling system, which can provide alarm and interlocking protection when the system water pressure is insufficient. The main inlet and outlet pipes are flange-connected. A water indicator is installed on each branch pipe to facilitate viewing of the water flow status.

[0015] As a preferred technical solution of the present invention: insulating porcelain tubes are respectively installed on both side walls of the upper TZM pressure head.

[0016] In the above structure: insulating porcelain tubes are respectively installed on the two side walls of the upper TZM pressure head, which can prevent interference between the two upper TZM pressure heads when they are parallel.

[0017] As a preferred technical solution of the present invention: the movable stroke of the upper TZM pressure head is 270 mm, the moving speed is 0-10 mm / s, and the displacement control accuracy is greater than or equal to 0.05 mm.

[0018] As a preferred technical solution of the present invention: the pressure control range of the upper TZM pressure head is that the maximum pressure of each upper TZM pressure head is 120t, the minimum pressure is not greater than 1-2t, and the overall parallelism of the upper TZM pressure head and the lower TZM pressure head is greater than or equal to 0.1mm.

[0019] As a preferred technical solution of the present invention: the molybdenum heating element is a high-temperature flexible molybdenum-lanthanum alloy strip or rod.

[0020] In the above structure: the molybdenum heating element is a high-temperature flexible molybdenum-lanthanum alloy strip or rod, which has a good heating efficiency, so the heating speed of the upper TZM pressure head will be faster.

[0021] Compared with the prior art, the present invention has the following beneficial effects:

[0022] The present invention provides an oil heating system to heat the upper TZM pressure head through the heating system without relying on external equipment for heating, which can effectively save enterprise costs and improve the heating efficiency of the diffusion welding pressure head structure.

[0023] The heating system includes a movable molybdenum heating rod, a molybdenum heating plate and a movable soft copper braid. The upper metal pressure rod drives the upper TZM pressure head to move up and down. When the upper metal pressure rod drives the upper TZM pressure head to move upward and close to the molybdenum heating plate, the upper TZM pressure head can be heated. After heating, the upper metal pressure rod moves downward and cooperates with the lower TZM pressure head to achieve welding. The invention has a simple structure, is easy to use, and has high working efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a schematic diagram of the cross-sectional structure of the present invention;

[0025] Figure 2 It is a schematic diagram of the structure of the upper TZM pressure head in the present invention;

[0026] Figure 3 It is a schematic diagram of the structure of the molybdenum heating plate in the present invention;

[0027] Figure 4 It is a schematic diagram of the installation and use structure of the present invention.

[0028] List of reference numerals:

[0029] 1. Upper metal pressure rod; 2. Upper TZM pressure head; 3. Lower metal pressure rod; 4. Lower TZM pressure head; 5. Guide device; 6. Movable molybdenum heating rod; 7. Molybdenum heating plate; 8. Temperature thermocouple; 9. Heating chamber; 10. Movable soft copper braid; 11. Vacuum furnace; 12. Furnace core; 13. Insulating porcelain tube; 14. Insulating porcelain parts; 15. Molybdenum heating element; 16. Hydraulic station; 17. Hydraulic cylinder; 18. Pressure frame; 19. Load-bearing platform; 20. External circulation air cooling system; 21. Maintenance platform; 22. Water-cooled electrode. Implementation

[0030] The present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments:

[0031] like Figure 1-4 As shown: the present invention proposes a diffusion welding head structure with a self-contained heating system, the diffusion head structure includes a metal pressure rod, a guide device 5 and a TZM pressure head, the metal pressure rod includes an upper metal pressure rod 1 and a lower metal pressure rod 3, the TZM pressure head includes an upper TZM pressure head 2 and a lower TZM pressure head 4, and also includes a vacuum furnace 11 for installing the diffusion welding head structure, the guide device 5 is installed on the vacuum furnace 11, the upper metal pressure rod 1 is installed in the guide device 5 and extends into the vacuum furnace 11 through the guide device 5, the upper TZM pressure head 2 is installed at one end of the upper metal pressure rod 1, the upper metal pressure rod 1 is movably installed in the guide device 5 up and down, the lower metal pressure rod 3 is fixedly installed below the upper metal pressure rod 1 and is located in the vacuum furnace 11, the lower TZM pressure head 4 is installed in the lower At one end of the metal pressure rod 3, the upper TZM pressure head 2 is arranged opposite to the lower TZM pressure head 4, and also includes a heating system, the heating system includes a movable molybdenum heating rod 6, a molybdenum heating plate 7 and a movable soft copper braid 10, the lower part of the guide device 5 is opened, one end of the movable molybdenum heating rod 6 is movably installed on both sides of the lower part of the guide device 5, and the other end is fixed on the two sides of the molybdenum heating plate 7, the guide device 5, the movable molybdenum heating rod 6 and the molybdenum heating plate 7 form a heating chamber 9, the upper metal pressure rod 1 passes through the molybdenum heating plate 7 and is connected to the upper TZM pressure head 2, the molybdenum heating plate 7 is evenly installed with molybdenum heating elements 15, temperature thermocouples 8 and insulating porcelain parts 14, one end of the movable soft copper braid 10 is connected to the movable molybdenum heating plate 7 rod, and the other end is connected to an external power supply.

[0032] The present application proposes a diffusion welding head structure with a self-contained heating system, the diffusion head structure includes a metal pressure rod, a guide device 5 and a TZM pressure head, wherein the metal pressure rod includes an upper metal pressure rod 1 and a lower metal pressure rod 3, the TZM pressure head includes an upper TZM pressure head 2 and a lower TZM pressure head 4, the guide device 5 is installed on a vacuum furnace 11, the upper metal pressure rod 1 is connected to the vacuum furnace 11 through the guide device 5 to achieve installation, the guide device 5 ensures the dynamic sealing of the upper metal pressure rod 1 during pressurization and displacement, the end of the upper metal pressure rod 1 is connected by an internal threaded flange, so that it is very convenient to replace the seal, the upper TZM pressure head 2 is an actuator of the vacuum furnace 11 to achieve pressurization of the workpiece in the hot zone, the upper and lower TZM pressure heads 4 have high strength and low thermal conductivity, which is convenient for heating and welding, the heating system includes a movable molybdenum heating rod 6, a molybdenum heating plate 7 and a movable soft copper braid 10, the lower part of the guide device 5 is opened, and one side of the movable molybdenum heating rod 6 is provided with an opening. The two ends are movably mounted on both sides below the guide device 5, and the other ends are fixed on both sides of the molybdenum heating plate 7. Therefore, the guide device 5, the movable molybdenum heating rod 6 and the molybdenum heating plate 7 form a heating chamber 9, which is fixed in the heating chamber 9 by a high-temperature molybdenum bracket and an insulating member. The molybdenum heating elements 15 on the molybdenum heating plate 7 are evenly arranged to ensure the uniformity of the temperature rise of the upper TZM pressure head 2 during heating. The temperature rise and heating can be achieved by energizing the molybdenum heating elements 15 on the molybdenum heating plate 7, thereby achieving the temperature rise and heating of the molybdenum heating plate 7. When in use, the heating of the upper TZM pressure head 2 is achieved by the molybdenum heating plate 7 in the heating chamber 9. The upper metal pressure rod 1 drives the upper TZM pressure head 2 to move upward so that it is close to the molybdenum heating plate 7, and is quickly heated by the molybdenum heating elements 15 on the molybdenum heating plate 7. The upper TZM pressure head 2 is installed in the vacuum furnace 11 and has good airtightness, so the heating efficiency of the upper TZM pressure head 2 will be greatly improved.

[0033] In this embodiment: it also includes a hydraulic station 16, a hydraulic cylinder 17, a pressure frame 18 and a load-bearing platform 19 installed in cooperation with the diffusion welding pressure head structure with a self-contained heating system. The vacuum furnace 11, the hydraulic station 16, the hydraulic cylinder 17 and the load-bearing platform 19 are respectively installed and fixed on the pressure frame 18. The load-bearing platform 19 is located below the vacuum furnace 11, the hydraulic cylinder 17 is located above the vacuum furnace 11, the hydraulic station 16 is located above the hydraulic cylinder 17, the hydraulic station 16 is connected to the hydraulic cylinder 17, and the upper metal pressure rod 1 is movably installed in the hydraulic cylinder 17. The hydraulic cylinder 17 adjusts its internal pressure through the hydraulic station 16 to control the upper metal pressure rod 1 to move up and down.

[0034] When the present application is in use, a hydraulic station 16, a hydraulic cylinder 17, a pressure frame 18 and a load-bearing platform 19 which are installed in cooperation with the diffusion welding pressure head structure with a self-contained heating system are also provided. The hydraulic station 16 is used to adjust the pressure of the hydraulic cylinder 17, so as to control the up and down movement of the upper metal pressure rod 1. The connection between the upper metal pressure rod 1 and the hydraulic cylinder 17 is achieved by bolts evenly distributed on the flange. Since the bolts have a uniform pre-tightening force during installation, the bending resistance of the connection between the hydraulic cylinder 17 and the upper metal pressure rod 1 is enhanced. The pressure frame 18 is used to realize the installation and fixation of various components. The pressure frame 18 is a four-column structure. The upper TZM pressure head 2 and the upper metal pressure rod 1 are connected by four sets of double-acting cylinders. The four sets of double-acting oil cylinders bear four-point pressure, not the central load. The four-column pressure frame 18 has been strictly pressure-checked to ensure that there is no obvious elastic deformation and deflection deformation under the pressure of 480T. The small deflection deformation is eliminated by the holding platform to ensure the accuracy of the platform. The load-bearing platform 19 is used to realize the installation and fixation of the vacuum furnace 11 and the lower TZM pressure head 4. The maintenance platform 21 is also installed on the pressure frame 18 to facilitate the staff to carry out maintenance. The external circulation air cooling system 20 is also installed on the pressure frame 18. The external circulation air cooling system 20 consists of a high-speed fan, a high-efficiency heat exchanger, a small fixed cover of the heating chamber 9 through which the wind can pass, an external circulation tank, a pipeline, a furnace guide device, etc. During air cooling, high-purity nitrogen (or argon) is inflated, and a forced convection cycle is formed under the high-speed fan drive to achieve rapid air cooling of the workpiece. The air cooling pressure is adjustable from 0.8-1.99bar.

[0035] In this embodiment: a furnace 12 is provided in the vacuum furnace 11, and the upper TZM pressure head 2, the lower TZM pressure head 4 and the molybdenum heating plate 7 are all located in the furnace 12. The upper TZM pressure head 2, the lower TZM pressure head 4 and the molybdenum heating plate 7 are all located in the furnace 12, and the size and shape of the furnace 12 are designed to minimize deformation. The furnace 12 has good insulation and heat preservation properties, which is convenient for the upper TZM pressure head 2 and the molybdenum heating plate 7 to heat.

[0036] In this embodiment: the vacuum furnace 11 is a double-walled water-cooled sandwich structure, cooling water flows between the sandwiches, and a water-cooled electrode 22 is installed on the sandwich, and the water-cooled electrode 22 is connected to an external power supply. The vacuum furnace 11 is a double-walled water-cooled sandwich structure, cooling water flows between the sandwiches, and water cooling is achieved through the water-cooled electrode 22. A water cooling system is set in the double-walled water-cooled sandwich structure, and the water cooling system includes a ball valve, a pipeline, a connector, a return pipe, etc. The cooling water points include the furnace body, the furnace cover, the water-cooled electrode 22, the upper and lower metal pressure rods 3, the hydraulic station 16, and the vacuum unit, etc.; ensure that the outer surface temperature of the vacuum furnace 11 is not greater than 45°C or the temperature rise is less than 20°C. The water cooling system is used for cooling the furnace door, the furnace shell, the water-cooled electrode 22, the vacuum unit and other parts. An electric contact pressure gauge is also installed in the water cooling system, which can provide alarm and interlocking protection when the system water pressure is insufficient. The main inlet and outlet pipes are flange-connected. A water indicator is installed on each branch pipe to facilitate viewing of the water flow status.

[0037] In this embodiment, insulating porcelain tubes 13 are respectively installed on the two side walls of the upper TZM pressure head 2. The insulating porcelain tubes 13 are respectively installed on the two side walls of the upper TZM pressure head 2 to prevent interference between the two upper TZM pressure heads 2 when they are parallel.

[0038] In this embodiment: the movable stroke of the upper TZM ram 2 is 270 mm, the moving speed is 0-10 mm / s, and the displacement control accuracy is greater than or equal to 0.05 mm.

[0039] In this embodiment: the pressure control range of the upper TZM ram 2 is that the maximum pressure of each upper TZM ram 2 is 120t, the minimum pressure is not greater than 1-2t, and the overall parallelism of the upper TZM ram 2 and the lower TZM ram 4 is greater than or equal to 0.1mm.

[0040] In this embodiment, the molybdenum heating element 15 is a high-temperature flexible molybdenum-lanthanum alloy strip or rod. The molybdenum heating element 15 is a high-temperature flexible molybdenum-lanthanum alloy strip or rod, which has good heating efficiency, so the upper TZM pressure head 2 will be heated faster.

[0041] After the present invention is installed according to the technical requirements and it is confirmed that there are no missing parts and it is well grounded, the whole machine is debugged and accepted according to the following items.

[0042] 1. Inspection items

[0043] 1) Appearance quality inspection: The outer surface should be smooth and flat, without serious pressure pits and mechanical scratches.

[0044] 2) Check the certificates and instructions of major purchased parts.

[0045] 3) Measure the insulation resistance of the heating component ≥ 20KΩ.

[0046] 4) All systems are installed correctly. Check that the compressed gas source, refill gas source, power supply, and cooling water source all meet the requirements and are ready for trial operation.

[0047] 2. Cold commissioning

[0048] 1) Add 4# vacuum pump oil to the oil cup at the connection between the upper metal pressure rod 1 and the guide device 5, and always maintain the oil level.

[0049] 2) Check that all oil pipes are correctly installed according to the hydraulic system manual, add the specified hydraulic oil (M-HL46 anti-wear hydraulic oil, the oil cleanliness reaches NAS7 level) into the hydraulic cylinder 17 and the oil level meets the requirements.

[0050] 3) Start the hydraulic station 16 and adjust the relief valves on the high-pressure side and the low-pressure side respectively, run the cylinder without load (the upper and lower TZM pressure heads 4 should not touch each other, and no pads should be added between the TZM pressure heads), adjust the upward and downward speeds of the cylinder; give instructions to the servo valve and check whether it is normal.

[0051] 4) When the hydraulic cylinder 17 stops at different positions, check whether the displacement sensor indication is normal.

[0052] 5) When the equipment needs to be recalibrated, place the weighing sensor and force pad between the upper and lower pressure heads and gradually perform pressure and pressure maintenance tests from small tonnage to 120 tons.

[0053] 6) Debugging of the air-cooling fan. After starting the fan, the fan impeller rotates smoothly without any abnormal phenomenon.

[0054] 3. Hot test oven

[0055] When the vacuum degree in the vacuum furnace 11 is not less than 13.3 Pa, the furnace is powered on. During the whole process of the furnace temperature slowly rising to 1300° C., the vacuum degree in the vacuum furnace 11 should not be less than 13.3 Pa.

[0056] After sufficient baking and degassing, when the furnace temperature drops below 100°C, the measured pressure rise rate should be ≤0.26Pa / h.

[0057] The measurement of ultimate vacuum degree should meet the technical requirement value.

[0058] 4. Gas backfill debugging

[0059] When the furnace is in a vacuum state, close the vacuum valve, observe the vacuum gauge, slowly open the manual charging switch, and fill the vacuum furnace 11 with high-purity argon gas to a predetermined pressure (should be ≤0.15MPa). The system is normal.

[0060] 1. Furnace preparation

[0061] 1) Check whether the electrical connectors are tight and whether all components are clean and normal.

[0062] 2) Turn on the main switch and sub-switches of the water cooling system to ensure that the water pressure is between 0.15MPa and 0.25MPa.

[0063] 3) The insulation resistance of the water-cooled electrode 22 to the ground should be greater than 1KΩ

[0064] 4) Turn on the main power of the device.

[0065] 5) Turn on the main switch of the voltage regulator and electrical control cabinet.

[0066] 6) Start the oil pump of hydraulic station 16 and check whether the system pressure is correct as required.

[0067] 7) Adjust the temperature controller to meet the requirements of thermal process regulations.

[0068] 2. Furnace opening steps

[0069] 1) Open the furnace cover, load the workpiece into the furnace, then close the furnace cover and lock the corner cylinder.

[0070] 2) Start the mechanical pump, open the bypass valve, and open the high vacuum valve.

[0071] 3) When the vacuum degree in the vacuum furnace 11 is ≤800Pa, start the Roots pump.

[0072] 4) When the vacuum degree in the vacuum furnace 11 is ≤20Pa, open the main valve and delay the start of the diffusion pump heating.

[0073] 5) When the vacuum degree in the vacuum furnace 11 is ≤10Pa, heat the diffusion pump and when it reaches temperature (about 40 to 50 minutes), close the bypass valve, open the high vacuum valve, and use the diffusion pump to evacuate the furnace body.

[0074] 6) When the vacuum degree in the vacuum furnace 11 reaches the specified value of the process, turn on the power for heating and check that the temperature controller is in the "RUN / operation" state to heat up and keep warm.

[0075] 7) According to the process requirements of vacuum furnace 11, start the low-pressure side (1-3 MPa) hydraulic directional valve, pressurize the workpiece by the upper TZM pressure head 2, close the low-pressure side (1-3 MPa) hydraulic directional valve, start the servo valve, and increase and maintain the pressure according to the set program.

[0076] 8) After the insulation is completed, turn off the power to stop heating and stop the pressure head from applying pressure.

[0077] 9) Close the high vacuum valve, stop the diffusion pump heating, check the cooling of the diffusion pump body, and stop the Roots pump.

[0078] 10) Open the inflation valve according to process requirements and fill the furnace with nitrogen (argon) gas.

[0079] 1) When the vacuum is filled with nitrogen (argon) gas to 0.06MPa, stop the charging valve and start the air cooling fan immediately. After a delay, continue to charge nitrogen (argon) gas to the charging pressure required by the process (<0.1MPa) and stop charging. Cool the workpiece with air.

[0080] 12) When the temperature inside the vacuum furnace drops below 50°C, stop the air cooling fan, open the vacuum furnace 11 vent valve, restore the vacuum furnace 11 pressure to atmospheric pressure, and close the vacuum furnace 11 vent valve.

[0081] 13) When the oil temperature of the diffusion pump is lower than 50°C (i.e. the diffusion pump stops heating for about 1 hour), close the high vacuum valve and stop the mechanical pump.

[0082] 14) Open the furnace cover and take out the workpiece.

[0083] 15) Stop hydraulic station 16,

[0084] 3. Shutdown

[0085] 1) Close the furnace cover to prevent contamination in the furnace. If the furnace is shut down for a long time, open the bypass valve and start the mechanical pump to keep the furnace in a vacuum state above -0.06MPa, then close the bypass valve and stop the mechanical pump.

[0086] 2) Turn off the main water switch and each part switch.

[0087] 3) Turn off the industrial computer and the main power switch.

[0088] The present invention provides an oil heating system to heat the upper TZM pressure head 2 through the heating system without relying on external equipment for heating, which can effectively save enterprise costs and improve the heating efficiency of the diffusion welding pressure head structure.

[0089] The heating system includes a movable molybdenum heating rod 6, a molybdenum heating plate 7 and a movable soft copper braid 10. The upper metal pressure rod 1 drives the upper TZM pressure head 2 to move up and down. When the upper metal pressure rod 1 drives the upper TZM pressure head 2 to move upward and close to the molybdenum heating plate 7, the upper TZM pressure head 2 can be heated. After heating, the upper metal pressure rod 1 moves downward and cooperates with the lower TZM pressure head 4 to achieve welding. The invention has a simple structure, is easy to use, and has high work efficiency.

[0090] The above description is only a preferred embodiment of the present invention and does not constitute any other form of limitation to the present invention. Any modification or equivalent change made based on the technical essence of the present invention still falls within the scope of protection required by the present invention.

Claims

1. A diffusion welding head structure with a built-in heating system, characterized in that: The invention comprises a metal pressure rod, a guide device (5) and a TZM pressure head, wherein the metal pressure rod comprises an upper metal pressure rod (1) and a lower metal pressure rod (3), and the TZM pressure head comprises an upper TZM pressure head (2) and a lower TZM pressure head (4); and further comprises a vacuum furnace (11) for installing a diffusion welding pressure head structure, wherein the guide device (5) is installed on the vacuum furnace (11), the upper metal pressure rod (1) is installed in the guide device (5) and extends into the vacuum furnace (11) through the guide device (5), the upper TZM pressure head (2) is installed at one end of the upper metal pressure rod (1), the upper metal pressure rod (1) is movably installed in the guide device (5) up and down, the lower metal pressure rod (3) is fixedly installed below the upper metal pressure rod (1) and is located in the vacuum furnace (11), the lower TZM pressure head (4) is installed at one end of the lower metal pressure rod (3), and the upper TZM pressure rod (1) is installed at one end of the lower metal pressure rod (3). The head (2) is arranged opposite to the lower TZM pressure head (4), and also includes a heating system, the heating system includes a movable molybdenum heating rod (6), a molybdenum heating plate (7) and a movable soft copper braid (10), the lower part of the guide device (5) is opened, one end of the movable molybdenum heating rod (6) is movably mounted on both sides of the lower part of the guide device (5), and the other end is fixed on both sides of the molybdenum heating plate (7), the guide device (5), the movable molybdenum heating rod (6) and the molybdenum heating plate (7) form a heating chamber (9), the upper metal pressure rod (1) passes through the molybdenum heating plate (7) and is connected to the upper TZM pressure head (2), the molybdenum heating plate (7) is evenly mounted with molybdenum heating elements (15), temperature thermocouples (8) and insulating porcelain parts (14), one end of the movable soft copper braid (10) is connected to the rod of the movable molybdenum heating plate (7), and the other end is connected to an external power supply.

2. The diffusion welding head structure with a self-contained heating system according to claim 1, characterized in that: The invention also comprises a hydraulic station (16), a hydraulic cylinder (17), a pressure frame (18) and a load-bearing platform (19) which are installed in cooperation with the diffusion welding pressure head structure with a self-contained heating system. The vacuum furnace (11), the hydraulic station (16), the hydraulic cylinder (17) and the load-bearing platform (19) are respectively installed and fixed on the pressure frame (18). The load-bearing platform (19) is located below the vacuum furnace (11). The hydraulic cylinder (17) is located above the vacuum furnace (11). The hydraulic station (16) is located above the hydraulic cylinder (17). The hydraulic station (16) is connected to the hydraulic cylinder (17). The upper metal pressure rod (1) is movably installed in the hydraulic cylinder (17). The hydraulic cylinder (17) adjusts its internal pressure through the hydraulic station (16) to control the upper metal pressure rod (1) to move up and down.

3. The diffusion welding head structure with a self-contained heating system according to claim 1, characterized in that: A furnace chamber (12) is provided in the vacuum furnace (11), and the upper TZM pressure head (2), the lower TZM pressure head (4) and the molybdenum heating plate (7) are all located in the furnace chamber (12).

4. The diffusion welding head structure with a self-contained heating system according to claim 3, characterized in that: The vacuum furnace (11) is a double-walled water-cooled sandwich structure, cooling water flows between the sandwiches, and water-cooled electrodes (22) are installed on the sandwiches. The water-cooled electrodes (22) are connected to an external power supply.

5. The diffusion welding head structure with a self-contained heating system according to claim 1, characterized in that: Insulating porcelain tubes (13) are respectively installed on the two side walls of the upper TZM pressure head (2).

6. The diffusion welding head structure with a self-contained heating system according to claim 5, characterized in that: The upper TZM pressure head (2) has a movable stroke of 270 mm, a moving speed of 0 to 10 mm / s, and a displacement control accuracy greater than or equal to 0.05 mm.

7. The diffusion welding head structure with a self-contained heating system according to claim 1, characterized in that: The pressure control range of the upper TZM pressure head (2) is such that the maximum pressure of each upper TZM pressure head (2) is 120t and the minimum pressure is not greater than 1-2t, and the overall parallelism between the upper TZM pressure head (2) and the lower TZM pressure head (4) is greater than or equal to 0.1mm.

8. The diffusion welding head structure with a self-contained heating system according to claim 1, characterized in that: The molybdenum heating element (15) is a high-temperature flexible molybdenum-lanthanum alloy strip or rod.

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