A clamping mechanism and semiconductor equipment for flipping large precision parts

Abstract

The present invention relates to the field of semiconductor equipment technology, and specifically, to a clamping mechanism for flipping large precision parts, comprising two groups of first clamping assemblies and a group of second clamping assemblies, the first clamping assembly comprising a first U-shaped base, a first cover, a first fastener, a first adjusting member, a first pad and a second pad; the first U-shaped base has a first U-shaped groove, the first clamping plate or the second clamping plate is correspondingly placed in the first U-shaped groove, and first pads are arranged on four sides of the first clamping plate or the second clamping plate; a first adjusting member is arranged on the first U-shaped base, and a second pad is arranged between the first adjusting member and the large precision part; the second clamping assembly is used to clamp the third clamping plate, and a third pad and / or a fourth pad is arranged at the connection between the second clamping assembly and the third clamping plate; it can prevent damage to the parts while clamping the large precision parts, and ensure safety and reliability.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor equipment, and in particular to a clamping mechanism for flipping large precision parts and semiconductor equipment. Background Art

[0002] For large precision parts in certain semiconductor-specific equipment, special flipping tooling is required, and the flipped parts are connected to the flipping machine through a clamping mechanism.

[0003] The connection between the turning machine and the turned part is generally fixed by bolts, which can achieve basic fastening function.

[0004] The existing connection method requires the use of the bolt holes of the flipped part. For such large precision parts, due to their heavy weight, the bolt holes of the flipped part are easily damaged. In addition, during the flipping process, the friction of the bolt connection cannot withstand the shear force generated by the weight of the large precision part, making it difficult to ensure safety. Summary of the Invention

[0005] The object of the present invention is to provide a clamping mechanism for flipping large precision parts, which can prevent damage to the parts while clamping the large precision parts and ensure safety and reliability.

[0006] Another object of the present invention is to provide a semiconductor device that can prevent damage to large precision parts and ensure safety and reliability when clamping and flipping them.

[0007] The technical solution of the present invention is achieved as follows:

[0008] A clamping mechanism for flipping a large precision part, wherein a coordinate system is established with the center point of the top surface of the large precision part as the origin: the X-axis, the Y-axis, and the Z-axis, wherein the Z-axis is the vertical direction, and the X-axis and the Y-axis are the horizontal directions, a first clamping plate and a second clamping plate are symmetrically provided on two sides of the large precision part about the Y-axis, and a third clamping plate is provided on the third side of the large precision part, the third clamping plate is an axisymmetric structure symmetrical about the Y-axis, and includes two groups of first clamping assemblies and one group of second clamping assemblies, wherein the first clamping assembly includes a first U-shaped base, a first cover plate, a first fastener, a first adjustment member, a first pad, and a second pad;

[0009] The first U-shaped base has a first U-shaped groove, the first U-shaped base and the first cover plate are fastened together by at least two first fasteners, and the first cover plate covers the notch of the first U-shaped groove, the first clamping plate or the second clamping plate is correspondingly placed in the first U-shaped groove, and the four sides of the first clamping plate or the second clamping plate are all in contact with the inner wall of the first U-shaped groove and the inner side surface of the first cover plate through the first pad;

[0010] The first adjusting member is provided on the first U-shaped base, and the second pad is provided between the first adjusting member and the large precision part;

[0011] The second clamping assembly is used to clamp the third clamping plate, and a third pad and / or a fourth pad is provided at the connection between the second clamping assembly and the third clamping plate.

[0012] Furthermore, the notch of the first U-shaped groove of the first U-shaped base is arranged to face upward.

[0013] Furthermore, the first adjusting part is selected as a first adjusting bolt, and the first adjusting bolts are provided in at least two forms. The bottom of the first U-shaped trough is provided with at least two first threaded holes arranged side by side, and the first threaded holes pass through along the X direction. The first threaded holes are provided in a one-to-one correspondence with the first adjusting bolts, and the first adjusting bolts are installed in the first threaded holes. The second pad is provided between the screw end of the first adjusting bolt and the large precision part.

[0014] Furthermore, the first clamping assembly further includes a first top block, which is disposed between the first adjusting bolt and the second pad, and the screw portion of the first adjusting bolt abuts against the first top block.

[0015] Furthermore, the second clamping assembly includes a second U-shaped base, a second cover plate, a second fastener, a second adjustment member, a third pad, a fourth pad, and a second top block;

[0016] The second U-shaped base has a second U-shaped groove, and the notch of the second U-shaped groove is arranged upward or downward, the second U-shaped base is connected to the second cover plate by at least two second fasteners, and the second cover plate covers the notch of the second U-shaped groove, the third clamping plate is correspondingly placed in the second U-shaped groove, and the third pad and the fourth pad are respectively arranged on the four sides of the second clamping plate, wherein the fourth pad is symmetrically arranged on the upper and lower sides of the second clamping plate, and the third pad is symmetrically arranged on the other two sides of the second clamping plate;

[0017] The second top blocks are symmetrically arranged on both sides of the second U-shaped groove, the third pad is located between the second top block and the second clamping plate, and the second adjustment members are symmetrically arranged on both sides of the second U-shaped base about the Y axis, and one end of the second adjustment member is connected to the second top block.

[0018] Furthermore, the second fastener is a second adjusting bolt, and at least one second threaded hole is opened on both sides of the second U-shaped base, the second threaded hole is arranged to pass through along the X direction, the second threaded hole and the second adjusting bolt are arranged in a one-to-one correspondence, the second adjusting bolt is installed in the second threaded hole, and the screw portion of the second adjusting bolt is in contact with the second top block.

[0019] Furthermore, the notch of the second U-shaped groove is arranged upward.

[0020] Furthermore, both the first fastener and the second fastener are fastening bolts.

[0021] A semiconductor device is also provided, comprising the clamping mechanism for flipping large precision parts, and also comprising a flipping mechanism and a large precision part, wherein the output shaft of the flipping mechanism is connected to the clamping mechanism for flipping large precision parts, and is used to drive the large precision part to flip around Ry, where Ry is the rotation direction around the Y axis.

[0022] Compared with the prior art, the present invention has the following beneficial effects:

[0023] The clamping mechanism includes two groups of first clamping assemblies and a group of second clamping assemblies, the two groups of first clamping assemblies can clamp and fix the first clamping plates and the second clamping plates on both sides, and the second clamping assembly can clamp and fix the third clamping plate. Specifically, the first U-shaped base and the first cover plate of the first clamping assembly are fixed by the first fastener. After clamping the first clamping plate or the second clamping plate, first pads are set on the four sides thereof to prevent the first clamping plate or the second clamping plate from making hard contact with the clamping mechanism to avoid damaging the surface of the part. The two groups of first clamping assemblies can not only lock the large precision parts in the Z direction, but also the two groups of first U-shaped bases can realize rough limiting of the large precision parts in the Y direction. The first top block is adjusted and moved by the axial (X direction) position of the first adjusting member until it contacts the side of the large precision part. When the two first top blocks of the two groups of first clamping assemblies are simultaneously pressed against the two side surfaces of the large precision part, the large precision part can be locked in the X direction. A third pad and / or a fourth pad are provided at the connection between the second clamping assembly and the third clamping plate, which can not only lock the large precision parts in the X direction but also prevent surface damage to the large precision parts. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for use in the embodiments. It should be understood that the following drawings only illustrate certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying any creative work.

[0025] Figure 1 This is a schematic top view of the structure of the clamping mechanism of the present invention clamping a large precision part;

[0026] Figure 2 It is a side view structural schematic diagram of the first clamping assembly of the present invention clamped on the second clamping plate;

[0027] Figure 3 This is a structural schematic diagram of the first clamping assembly of the present invention being clamped on the first clamping plate;

[0028] Figure 4 This is a structural schematic diagram of the second clamping assembly of the present invention being clamped on the third clamping plate;

[0029] Figure 5 This is a schematic structural diagram of the first U-shaped base of the present invention;

[0030] Figure 6 It is a structural schematic diagram of the second U-shaped base of the present invention.

[0031] In the picture:

[0032] 1-large precision parts; 101-first clamping plate; 102-second clamping plate; 103-third clamping plate;

[0033] 2-first clamping assembly; 21-first U-shaped base; 211-first U-shaped groove;

[0034] 22-first cover plate; 23-first fastener; 24-first adjustment member; 25-first pad; 26-second pad; 27-first top block;

[0035] 3-second clamping assembly; 31-second U-shaped base; 311-second U-shaped groove;

[0036] 32 - second cover plate; 33 - second fastener; 34 - second adjustment member; 35 - third pad; 36 - fourth pad; 37 - second top block. DETAILED DESCRIPTION

[0037] To make the objectives, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions of the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings herein can be arranged and designed in various different configurations.

[0038] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention as claimed, but rather merely represents selected embodiments of the present invention. All other embodiments derived by persons of ordinary skill in the art based on the embodiments of the present invention without creative effort shall fall within the scope of protection of the present invention.

[0039] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings.

[0040] In the description of the present invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer" and the like indicate positions or locations based on the positions shown in the accompanying drawings, or the positions or locations in which the inventive product is typically placed when in use. These terms are intended solely to facilitate the description of the present invention and to simplify the description, and are not intended to indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on the present invention. Furthermore, the terms "first," "second," and "third," etc., are used solely to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0041] Furthermore, terms such as "horizontal," "vertical," and "overhanging" do not necessarily imply that a component must be absolutely horizontal or overhanging, but rather that it can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but rather that it can be slightly tilted.

[0042] In the description of the present invention, it should also be noted that, unless otherwise expressly specified or limited, the terms "disposed," "installed," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed connections, detachable connections, or integral connections; they may refer to mechanical connections or electrical connections; they may refer to direct connections or indirect connections through an intermediate medium; and they may refer to internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0043] The following embodiments of the present invention are described in detail with reference to the accompanying drawings. In the absence of conflict, the following embodiments and features in the embodiments may be combined with each other.

[0044] Example 1

[0045] Connecting a large precision part 1 to it via the flip mechanism is quite difficult, mainly because the large precision part 1 is heavy. Once the flip mechanism is connected to it, it is easy to cause damage due to its own weight. Large precision part 1 is a precision component, and damage to it will affect its precision performance, which can have serious consequences.

[0046] In view of the problems existing in the prior art, this embodiment provides a clamping mechanism for flipping large precision parts. Figures 1-6 , the large precision part 1 is a rectangular structure, and its top surface is square. In this embodiment, taking the top surface of the large precision part 1 as an example, and the rectangular top surface has a longer side M and a shorter side N, the top surface of the large precision part 1 is parallel to the horizontal plane when it is in the initial state. Taking the initial state of the large precision part 1 as an example, a coordinate system is established with the center point of the top surface of the large precision part 1 as the origin: X-axis, Y-axis and Z-axis, wherein the Z-axis is the vertical direction, which can also be called the up and down direction or the longitudinal direction; the X-axis and the Y-axis are in the horizontal direction, the X-axis can be called the left and right direction, and the Y-axis can be called the front and back direction. It should be noted that the position of the large precision part 1 can be changed in actual application. This embodiment only takes this coordinate system as an example to illustrate the orientation and facilitate detailed explanation.

[0047] A first clamping plate 101 and a second clamping plate 102 are symmetrically arranged on both sides of the large precision part 1 (located on the longer sides M of both sides) about the Y axis. A third clamping plate 103 is arranged on the third side of the large precision part 1 (located on one of the shorter sides N). The third clamping plate 103 is an axisymmetric structure symmetrical about the Y axis, that is, the third clamping plate 103 is arranged at the center of the shorter side N. Preferably, the first clamping plate 101 and the second clamping plate 102 are arranged on the longer side M and away from one end of the third clamping plate 103. The first clamping plate 101, the second clamping plate 102 and the third clamping plate 103 are all plate-shaped, so that they can be clamped and fixed by the first clamping assembly 2 and the second clamping assembly 3 respectively. The purpose of the first clamping plates 101 on both sides being symmetrical about the Y-axis and the second clamping plates 102 themselves being symmetrical about the Y-axis is that, due to the symmetrical structure, when the flipping mechanism is connected to it through the clamping mechanism and drives the large precision part 1 to rotate and flip around the Y-axis, the large precision part 1 can be subjected to force more evenly at each position, so that it will not shake during the flipping process, making the flipping more stable.

[0048] The clamping mechanism includes two groups of first clamping components 2 and one group of second clamping components 3 . The two groups of first clamping components 2 are used to clamp the first clamping components 2 and the second clamping components 3 respectively. The second clamping components 3 are used to clamp the third clamping plate 103 .

[0049] Specifically, the first clamping assembly 2 includes a first U-shaped base 21, a first cover plate 22, a first fastener 23, a first adjusting member 24, a first pad 25, and a second pad 26. The first U-shaped base 21 has a first U-shaped groove 211. The first U-shaped base 21 and the first cover plate 22 are fastened together by at least two of the first fasteners 23. After the first cover plate 22 and the first U-shaped base 21 are fixedly connected, the first cover plate 22 covers the notch of the first U-shaped groove 211.

[0050] In this embodiment, the notch of the first U-shaped groove 211 is set to face directly upward, and the first cover plate 22 is located on the top of the first U-shaped base 21. During actual installation, taking the installation on the first clamping plate 101 as an example, the first clamping plate 101 is first placed in the first U-shaped groove 211, and the first pads 25 are set on the three inner walls of the first U-shaped groove 211. The three sides of the first clamping plate 101 are all in contact with the inner wall of the first U-shaped groove 211 through the first pads 25. Afterwards, the first pad 25 is also laid on the top of the first clamping plate 101, and then the first cover plate 22 is covered on the first U-shaped groove 211 and fastened to the first U-shaped base 21 through the first fasteners 23. The top of the first clamping plate 101 is also in contact with the bottom of the first cover plate 22 through the first pads 25.

[0051] It should be noted that the first fasteners 23 may be fastening bolts, ropes (steel wires), top wires, etc., and the first cover plate 22 and the two ends of the first U-shaped base 21 may be tied and fixed by means of steel wires, etc., or they may be reversely locked and fixed by means of top wires. In the present embodiment, the first fasteners 23 are preferably fastening bolts, which are referred to as first fastening bolts for the sake of distinction, and the first cover plate 22 and the four corners of the first U-shaped base 21 are locked and fixed by means of four first fastening bolts. In addition, since the thickness and width of the first clamping plate 101 may be different or the same, when its thickness and width are different, the lengths of the first pads 25 on its four sides are adaptively changed according to its thickness and width. For example, the design lengths of the two first pads 25 on the top and bottom sides correspond to the width of the first clamping plate 101, and the design lengths of the two first pads 25 on the other two sides correspond to the thickness of the first clamping plate 101, such as Figure 3 shown.

[0052] The first adjusting member 24 is provided on the first U-shaped base 21, and the second pad 26 is provided between the first adjusting member 24 and the large precision part 1. After the first U-shaped base 21 is installed, the large precision part 1 can be roughly limited in the Y direction. The first adjusting member 24 is then installed on the first U-shaped base 21. There are two ways to select the first adjusting member 24:

[0053] The first type: the first adjustment member 24 can be an electric push rod or a telescopic cylinder. Taking the telescopic cylinder as an example, the cylinder body of the telescopic cylinder is fixed to the first U-shaped base 21, and the telescopic rod is arranged along the X direction. The telescopic rod of the telescopic cylinder is extended to press against the side wall of the large precision part 1. In order to prevent the telescopic rod of the telescopic cylinder from directly and rigidly contacting the large precision part 1, a second pad 26 is provided between the telescopic rod of the telescopic cylinder and the large precision part 1 to avoid damage to the large precision part 1.

[0054] Second, the first adjusting member 24 can also be selected as a first adjusting bolt. The first adjusting bolt has a nut portion and a screw portion. At least two first threaded holes are arranged side by side at the bottom of the first U-shaped base 21. The first threaded holes are preferably designed to be two or three. The number of the first adjusting bolts corresponds to the number of the first threaded holes, and the first adjusting bolts are correspondingly installed in the first threaded holes. The nut portion of the first adjusting bolt is located on the outside and the screw portion is located on the inside. It is arranged along the X direction. By screwing its nut portion, the screw portion can be tightened against the side wall of the large precision part 1. In order to avoid direct hard contact with the large precision part 1, a first top block 27 and a second pad 26 are arranged on the inner side of the two or three first adjusting bolts, and the first top block 27 contacts the large precision part 1 through the second pad 26. The first top block 27 can expand the contact area with the large precision part 1. The first pad 25 and the second pad 26 are made of flexible materials, wherein the second pad 26 can convert the hard contact between the first top block 27 and the large precision part 1 into flexible contact, thereby playing a protective role and preventing damage.

[0055] In this embodiment, the first adjusting member 24 adopts the second method.

[0056] The above is the detailed installation process for installing one set of first clamping assemblies 2 on the first clamping plate 101. Similarly, the installation of another set of first clamping assemblies 2 on the second clamping plate 102 follows the same procedure and will not be further described here. When the first adjustment bolts on both sides of the two sets of first clamping assemblies 2 are tightened against the side walls of the large precision component 1, the large precision component 1 is locked in the X direction.

[0057] The second clamping assembly 3 is used to clamp the third clamping plate 103, and a third pad 35 or a fourth pad 36 is provided at the connection between the second clamping assembly 3 and the third clamping plate 103, so as to avoid direct hard contact with the large precision part 1 through the third pad 35 and / or the fourth pad 36.

[0058] Specifically, the second clamping assembly 3 includes a second U-shaped base 31, a second cover plate 32, a second fastener 33, a second adjusting member 34, a third pad 35, a fourth pad 36 and a second top block 37, and the third pad 35 and the fourth pad 36 are both made of flexible material.

[0059] The second U-shaped base 31 has a second U-shaped groove 311, with the notch of the second U-shaped groove 311 facing upward or downward. The second U-shaped base 31 is connected to the second cover plate 32 via at least two second fasteners 33, and the second cover plate 32 covers the notch of the second U-shaped groove 311. The third clamping plate 103 is correspondingly placed in the second U-shaped groove 311.

[0060] The second fastening members 33 are preferably second fastening bolts, and the number of the second fastening bolts is set to four. The four second fastening bolts are used to lock and fix the second cover plate 32 and the second U-shaped base 31 at four corners.

[0061] During actual installation, the notch of the second U-shaped groove 311 is preferably set to face upward, and the third pad 35 and the fourth pad 36 are respectively set on the four sides of the second clamping plate 102, wherein the fourth pad 36 is symmetrically set on the upper and lower sides of the second clamping plate 102, and the third pad 35 is symmetrically set on the left and right sides of the second clamping plate 102; first, the third clamping plate 103 is correspondingly placed in the second U-shaped groove 311, and there is a certain movable space between the third pads 35 on both sides and the side walls of the second U-shaped groove 311, and second top blocks 37 are set in the movable space on both sides, and second adjustment members 34 are set on both sides of the second U-shaped base 31. There are two options for the second adjustment member 34:

[0062] The first type is that the second adjustment member 34 uses an electric push rod or a telescopic cylinder. Taking the telescopic cylinder as an example for specific description, the telescopic cylinders on both sides are arranged along the X direction. One end of the telescopic cylinder is fixed to the side wall of the second U-shaped groove 311, and the other end is abutted against the third clamping plate 103 through the second top block 37 and the third pad 35. The telescopic cylinders on both sides cooperate with each other to extend or retract to realize the movement of the second clamping assembly 3 in the X direction;

[0063] The second type is that the second adjusting member 34 uses a second adjusting bolt, and at least one second threaded hole is opened side by side on both sides of the second U-shaped base 31. Preferably, two second threaded holes are opened side by side on each side, and the second adjusting bolt is installed in the second threaded hole, and the axial direction of the second adjusting bolt is X-direction. The second adjusting bolt has a nut part and a screw part, the nut part is located on the outside of the second U-shaped groove 311, and the screw part is located on the inside of the second U-shaped groove 311, and the screw part is in contact with the second top block 37. By adjusting the second adjusting bolts on both sides, the second clamping assembly 3 can be moved in the X-direction.

[0064] In this embodiment, the second adjusting member 34 preferably adopts the second solution.

[0065] In the present application, the first U-shaped base 21 and the first cover plate 22 of the first clamping assembly 2 are connected and fixed by first fastening bolts, and the two groups of first clamping assemblies 2 respectively clamp the first clamping plate 101 and the second clamping plate 102, and first pads 25 are arranged on the four sides of the first clamping plate 101 and the second clamping plate 102 to prevent the first clamping plate 101 or the second clamping plate 102 from making hard contact with the first clamping assembly 2 to avoid damaging the surface of the part. The two groups of first clamping assemblies 2 can not only lock the large precision part 1 in the Z direction, but also the two groups of first U-shaped bases 21 can realize the rough limitation of the large precision part 1 in the Y direction. The first top block 27 is adjusted and moved by the axial (X direction) position of the first adjusting bolt until it contacts the side of the large precision part. When the two first top blocks 27 of the two groups of first clamping assemblies 2 are simultaneously pressed against the two sides of the large precision part 1, the large precision part 1 can be locked in the X direction. The second clamping assembly 3 clamps the third clamping plate 103, and a third pad 35 and a fourth pad 36 are respectively provided on the four sides of the third clamping plate 103, which can not only lock the large precision part 1 in the X direction, but also prevent the surface damage of the large precision part 1.

[0066] Example 2

[0067] like Figures 1-6 This embodiment provides a semiconductor device, including the clamping mechanism for flipping large precision parts described in Example 1, and also including a flipping mechanism (not shown) and a large precision part 1. The output shaft of the flipping mechanism is connected to the clamping mechanism for flipping large precision parts. Specifically, the axial direction of the output shaft of the flipping mechanism is the Y direction, and the output shaft of the flipping mechanism is fixedly connected to the second clamping assembly 3. When the flipping mechanism is in operation, it is used to drive the large precision part 1 to flip around Ry, where Ry is the rotation direction around the Y axis.

[0068] The advantage of adopting the above structure is that through the mutual compression of the base (first U-shaped base 21 and second U-shaped base 31), the top block (first top block 27 and second top block 37), the cover plate (first cover plate 22 and second cover plate 32), the bolts (first fastening bolt, second fastening bolt, first adjustment bolt and second adjustment bolt), and the clamped large precision part 1, the large precision part 1 is tightened in the X and Z directions and roughly limited in the Y direction. The base, top block, cover plate, and bolts primarily bear tensile and compressive forces. Furthermore, during the 360° rotation of the part about the Y axis, the X and Z directions alternately bear the weight of the part, but the base, top block, cover plate, and bolts primarily bear tensile and compressive forces.

[0069] The beneficial effects of the technical solution of the present invention are:

[0070] 1. The first clamping plate 101, the second clamping plate 102 and the third clamping plate 103 of the large precision part 1 to be flipped are placed on the first U-shaped base 21 and the second U-shaped base 31 of two groups of first clamping components 2 and one group of second clamping components 3 and locked to achieve the Z-direction fastening of the large precision part 1.

[0071] 2. A first adjusting bolt and a second adjusting bolt are respectively provided in the two groups of first clamping assemblies 2 and the one group of second clamping assemblies 3. Through the tightening action of the first adjusting bolt and the second adjusting bolt, the X-direction tightening of the large precision part 1 to be flipped is achieved.

[0072] 3. Before flipping, the base bears the pressure generated by the part's gravity. When the part flips 90° about the Y-axis, the top block and adjustment bolts (first and second adjustment bolts) bear the pressure generated by the gravity of the large precision part 1. When the large precision part 1 flips 180° about the Y-axis, the cover bears the pressure generated by the gravity of the large precision part 1, while the fastening bolts (first and second fastening bolts) bear the tension generated by the gravity of the large precision part 1. In other words, during the flipping process of the large precision part 1, all components in the clamping mechanism are primarily subjected to either compression or tension. This ensures the safety of the clamping mechanism for large parts with high gravity while fully utilizing the material.

[0073] 4. Processing errors may cause virtual connection between the large precision part 1 to be flipped and the parts of the clamping mechanism. Providing flexible pads (first pad 25, second pad 26, third pad 35 and fourth pad 36) in the middle position can effectively reduce this virtual connection and prevent the surface of the large precision part 1 from being damaged.

[0074] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the above embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A clamping mechanism for turning over a large precision part, wherein a coordinate system is established with the center point of the top surface of the large precision part (1) as the origin: an X-axis, a Y-axis and a Z-axis, wherein: The Z axis is a vertical direction, and the X axis and the Y axis are horizontal directions. A first clamping plate (101) and a second clamping plate (102) are symmetrically arranged on both sides of the large precision part (1) about the Y axis. A third clamping plate (103) is arranged on the third side of the large precision part (1). The third clamping plate (103) is an axisymmetric structure symmetrical about the Y axis, and is characterized in that it includes two groups of first clamping assemblies (2) and one group of second clamping assemblies (3). The first clamping assembly (2) includes a first U-shaped base (21), a first cover plate (22), a first fastener (23), a first adjusting member (24), a first pad (25) and a second pad (26). The first U-shaped base (21) has a first U-shaped groove (211), the first U-shaped base (21) and the first cover plate (22) are fastened together by at least two first fasteners (23), and the first cover plate (22) covers the notch of the first U-shaped groove (211), the first clamping plate (101) or the second clamping plate (102) is correspondingly placed in the first U-shaped groove (211), and the four sides of the first clamping plate (101) or the second clamping plate (102) are all fitted with the inner wall of the first U-shaped groove (211) and the inner side surface of the first cover plate (22) through the first pad (25); The first adjusting member (24) is provided on the first U-shaped base (21), and the second pad (26) is provided between the first adjusting member (24) and the large precision part (1); The second clamping assembly (3) is used to clamp the third clamping plate (103), and a third pad (35) and / or a fourth pad (36) are provided at the connection between the second clamping assembly (3) and the third clamping plate (103).

2. The clamping mechanism for turning over large precision parts according to claim 1, characterized in that: The notch of the first U-shaped groove (211) of the first U-shaped base (21) is arranged to face upward.

3. The clamping mechanism for turning over large precision parts according to claim 2, characterized in that: The first adjusting member (24) is selected as a first adjusting bolt, and the first adjusting bolts are provided in at least two numbers. The bottom of the first U-shaped groove (211) is provided with at least two first threaded holes arranged side by side. The first threaded holes penetrate along the X direction. The first threaded holes are provided in a one-to-one correspondence with the first adjusting bolts, and the first adjusting bolts are installed in the first threaded holes. The second pad (26) is provided between the screw end of the first adjusting bolt and the large precision part (1).

4. The clamping mechanism for turning over large precision parts according to claim 3, characterized in that: The first clamping assembly (2) further includes a first top block (27), which is arranged between the first adjusting bolt and the second pad (26), and the screw portion of the first adjusting bolt abuts against the first top block (27).

5. The clamping mechanism for turning over large precision parts according to claim 1, characterized in that: The second clamping assembly (3) comprises a second U-shaped base (31), a second cover plate (32), a second fastener (33), a second adjusting member (34), a third pad (35), a fourth pad (36) and a second top block (37); The second U-shaped base (31) has a second U-shaped groove (311), and the notch of the second U-shaped groove (311) is arranged upward or downward, the second U-shaped base (31) is connected to the second cover plate (32) by at least two second fasteners (33), and the second cover plate (32) covers the notch of the second U-shaped groove (311), the third clamping plate (103) is correspondingly placed in the second U-shaped groove (311), and the third pad (35) and the fourth pad (36) are respectively arranged on the four sides of the second clamping plate (102), wherein the fourth pad (36) is symmetrically arranged on the upper side and the lower side of the second clamping plate (102), and the third pad (35) is symmetrically arranged on the other two sides of the second clamping plate (102); The second top block (37) is symmetrically arranged on both sides of the second U-shaped groove (311), the third pad (35) is located between the second top block (37) and the second clamping plate (102), and the second adjustment member (34) is symmetrically arranged on both sides of the second U-shaped base (31) about the Y axis, and one end of the second adjustment member (34) is connected to the second top block (37).

6. The clamping mechanism for turning over large precision parts according to claim 5, characterized in that: The second fastener (33) is a second adjusting bolt, and at least one second threaded hole is provided on both sides of the second U-shaped base (31), the second threaded hole is arranged to penetrate along the X direction, the second threaded hole and the second adjusting bolt are arranged in a one-to-one correspondence, the second adjusting bolt is installed in the second threaded hole, and the screw portion of the second adjusting bolt abuts against the second top block (37).

7. The clamping mechanism for turning over large precision parts according to claim 5, characterized in that: The notch of the second U-shaped groove (311) is arranged upward.

8. The clamping mechanism for turning over large precision parts according to claim 5, characterized in that: The first fastener (23) and the second fastener (33) are both fastening bolts.

9. A semiconductor device, characterized in that: The invention comprises a clamping mechanism for flipping large precision parts according to any one of claims 1 to 8.

10. The semiconductor device according to claim 9, wherein It also includes a flipping mechanism and a large precision part (1), wherein the output shaft of the flipping mechanism is connected to the clamping mechanism for flipping the large precision part and is used to drive the large precision part (1) to flip around Ry, where Ry is the rotation direction around the Y axis.

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