Goods transport devices and methods

Abstract

This invention provides an item transport device and method capable of efficiently handling a large number of items. The item transport device includes: a frame; a first transfer loading section connected to the frame and supporting a first type of items from below; a second transfer loading section connected to the frame, located above the first transfer loading section, and supporting the first type of items from below; and a third transfer loading section connected to the frame, located above the second transfer loading section, and supporting a second type of items different from the first type of items from below, wherein the first transfer loading section is driven independently of the second transfer loading section and the third transfer loading section, and the second transfer loading section and the third transfer loading section are driven simultaneously.

Description

Technical Field

[0001] This invention relates to a device and method for transporting goods. Background Technology

[0002] Within semiconductor factories, items (e.g., wafer containment containers, intermediate mask containment containers) are moved using automated transport systems. Automated transport systems include, for example, OHT (overhead hoist transport) and OHS (overhead shuttle). Summary of the Invention

[0003] On the other hand, tower lifts are used to move and transport goods between floors. However, this requires moving goods from transport trolleys such as OHTs to the tower lifts, and there is waiting time before the goods are loaded onto the tower lifts. In other words, a large number of goods are concentrated in the tower lift area.

[0004] The technical problem to be solved by the present invention is to provide a transport device for handling large quantities of items.

[0005] Another technical problem that this invention aims to solve is to provide a method for transporting goods that can efficiently handle large quantities of goods.

[0006] The technical problems of this invention are not limited to those described above. Those skilled in the art can clearly understand other technical problems not mentioned in the following description.

[0007] An aspect of the article transport device of the present invention for solving the above-mentioned technical problems includes: a frame; a first transfer loading section connected to the frame and supporting a first type of article from below; a second transfer loading section connected to the frame, located above the first transfer loading section and supporting the first type of article from below; and a third transfer loading section connected to the frame, located above the second transfer loading section and supporting a second type of article different from the first type of article from below, wherein the first transfer loading section is driven independently of the second transfer loading section and the third transfer loading section, and the second transfer loading section and the third transfer loading section are driven simultaneously.

[0008] Another aspect of the article transport device of the present invention for solving the above-mentioned technical problems includes: a tower lift for transporting articles; an interface component for receiving the articles from the tower lift and storing the articles or transferring the articles to other locations, wherein the tower lift includes: a frame movable in a vertical direction; a robotic arm connected to the frame; a first transfer loading section connected to the robotic arm and supporting a first type of articles from below; and a second transfer loading section connected to the robotic arm, located above the first transfer loading section, and supporting a second type of articles different from the first type of articles from below, wherein, when viewed in the vertical direction, the first transfer loading section and the second transfer loading section are arranged to overlap each other, and the first transfer loading section and the second transfer loading section are simultaneously driven according to the operation of the robotic arm.

[0009] An aspect of the article transport method of the present invention for solving another technical problem mentioned above includes: providing an article transport device, the article transport device including a tower lift and an interface component, the tower lift including: a frame; a first transfer loading section connected to the frame and supporting a first type of article from below; a second transfer loading section connected to the frame, located above the first transfer loading section and supporting the first type of article from below; a third transfer loading section connected to the frame, located above the second transfer loading section and supporting a second type of article different from the first type of article from below, wherein the second transfer loading section and the third transfer loading section are driven simultaneously, and the interface component includes a first support section, a second support section, and a third support section; the first transfer loading section supports the first type of article from below and performs an in-and-out operation to place the first type of article on the first support section, and the third transfer loading section supports the second type of article different from the first type of article from below and performs an in-and-out operation to place the second type of article on the third support section.

[0010] Specific details of other embodiments are included in the detailed description and accompanying drawings. Attached Figure Description

[0011] Figure 1 This is a view used to illustrate an article transport device according to some embodiments of the present invention.

[0012] Figure 2 It is used for explanation Figure 1 A view of the operation of the first conveyor loading section of the tower elevator.

[0013] Figure 3 It is used for explanation Figure 1 A view of the interface component.

[0014] Figure 4This is a view used to illustrate the positional relationship between the first conveyor plate, the first support plate, and the first type of articles when the first conveyor plate transfers the first type of articles.

[0015] Figures 5 to 7 It is used for explanation Figure 1 A view of the operation of the second conveyor loading section of the tower elevator.

[0016] Figure 8 This is a plan view illustrating an article transport device according to an embodiment of the present invention.

[0017] Figure 9 It is used for explanation Figure 8 A view showing the composition of the interface components.

[0018] Figure 10 This is a plan view illustrating an article transport device according to another embodiment of the present invention.

[0019] 0 Figure 11 This is a flowchart illustrating a method for transporting articles according to some embodiments of the present invention. Detailed Implementation

[0020] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. The advantages and features of the present invention, as well as the methods for achieving these advantages and features, will be explained by referring to the following description in conjunction with the accompanying drawings. Figure 1 rise

[0021] The invention becomes clear through a detailed description of the embodiments. However, the invention is not limited to the embodiments disclosed below, but can be implemented in many different forms. This embodiment is only provided to complete the disclosure of the invention and to fully inform those skilled in the art to which this invention pertains.

[0022] Provided to inform the scope of the invention, the invention is defined only by the scope of the claims. Throughout the entire specification, the same reference numerals refer to the same constituent elements.

[0023] To easily describe the relationship between one element or component and another as shown in the figure, spatial relative terms such as "below," "below," "lower," "above," and "upper" can be used.

[0024] It should be understood that, in addition to the orientations shown in the figures, spatial relative terms also include terms that describe the different orientations of elements when used or operated. For example, when the elements shown in the figures are flipped, an element described as "below" or "beneath" another element may be located "above" another element. Thus, the exemplary term "below" can include both below and above orientations. Elements may also be oriented in another direction, thereby allowing spatial relative terms to be interpreted according to orientation.

[0025] While the terms "first," "second," etc., are used to describe various elements, constituent elements, and / or parts, these elements, constituent elements, and / or parts are obviously not limited by these terms. These terms are only used to distinguish one element, constituent element, and / or part from another element, constituent element, and / or part. Therefore, the first element, first constituent element, or first part mentioned below can obviously also be a second element, second constituent element, or second part within the technical concept of this invention.

[0026] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. When describing the invention with reference to the drawings, identical or corresponding constituent elements are given the same reference numerals, regardless of the reference numerals, and repeated descriptions thereof are omitted.

[0027] Figure 1 This is a view used to illustrate an article transport device according to some embodiments of the present invention.

[0028] refer to Figure 1 According to some embodiments of the present invention, the article transport device includes a tower lift 1 and an interface component 70.

[0029] The tower lift 1 moves items in the vertical direction (or vertical direction) (refer to the z-direction in the attached drawings). This tower lift 1 includes a guide rail 81 that extends elongated in the vertical direction and a frame 80 that moves along the guide rail 81.

[0030] In addition, a first robotic arm 15, a second robotic arm 25, a first transfer loading unit 10, a second transfer loading unit 20 and a third transfer loading unit 30 are provided on the frame 80.

[0031] Specifically, each of the first robotic arm 15 and the second robotic arm 25 can perform in-out operations. That is, each of the first robotic arm 15 and the second robotic arm 25 can perform a forward extending operation and a backward withdrawing operation. To achieve this operation, each of the first robotic arm 15 and the second robotic arm 25 can be a linkage capable of performing bending and stretching operations, but is not limited to this. Any configuration can be used as long as it is capable of moving or deforming to pick up items.

[0032] The first transfer loading unit 10 is disposed at one end of the first robotic arm 15 (e.g., the last link). The first transfer loading unit 10 can move forward or backward according to the bending / extending operation of the first robotic arm 15 (refer to the x-direction in the attached drawings).

[0033] This first conveying and loading unit 10 includes a first conveyor plate 101 and a plurality of first positioning pins 10a. The first conveyor plate 101 is disposed on the last link of the first robotic arm 15, and a first type of article can be placed on the first conveyor plate 101. The first conveyor plate 101 supports the first type of article from below. The plurality of first positioning pins 10a are used to stably fix the article and can be inserted into first mounting slots disposed on the bottom surface of the first type of article.

[0034] The second transfer loading unit 20 and the third transfer loading unit 30 are connected to one end of the second robotic arm 25 (e.g., the last link). The second transfer loading unit 20 and the third transfer loading unit 30 can move forward or backward according to the bending / extending operation of the second robotic arm 25 (refer to the x-direction in the attached drawings).

[0035] This second transfer loading unit 20 includes a second transfer plate 102 and a plurality of second positioning pins 20a. The second transfer plate 102 is connected to the last link of the second robotic arm 25, and the first type of article can be placed on the second transfer plate 102. The second transfer plate 102 supports the first type of article from below. The plurality of second positioning pins 20a are used to stably fix the first type of article and can be inserted into a first mounting slot provided on the bottom surface of the first type of article.

[0036] This third transfer loading unit 30 includes a third transfer plate 103 and a plurality of third positioning pins 30a. The third transfer plate 103 is connected to the last link of the second robotic arm 25, and a second type of article can be placed on the third transfer plate 103. The third transfer plate 103 supports the second type of article from below. The plurality of third positioning pins 30a are used to stably fix the second type of article and can be inserted into a second mounting slot provided on the bottom surface of the second type of article.

[0037] On the other hand, the first type of item and the second type of item are items of different kinds. The first type of item and the second type of item can be containers used to move parts of different kinds, and therefore the shapes or sizes of the containers can be different.

[0038] For example, the first type of item could be a chip receiving container. An example of a chip receiving container could be a FOUP (FrontOpening Unified Pod), but it is not limited to this. The second type of item could be an intermediate mask receiving container. An example of an intermediate mask receiving container could be a POD (Transfer Pod), but it is not limited to this. In this case, the height of the first type of item can be greater than the height of the second type of item.

[0039] When viewed in the extending direction of the frame 80 (i.e., the vertical direction (z direction)), the first transfer loading section 10, the second transfer loading section 20 and the third transfer loading section 30 are arranged to overlap each other.

[0040] On the other hand, since the first transfer loading unit 10 is provided on the first robotic arm 15, and the second transfer loading unit 20 and the third transfer loading unit 30 are provided on the second robotic arm 25, the first transfer loading unit 10 is driven independently of the second transfer loading unit 20 and the third transfer loading unit 30, and the second transfer loading unit 20 and the third transfer loading unit 30 are driven simultaneously. That is, the first transfer loading unit 10 moves in the x-direction according to the bending / extending operation of the first robotic arm 15, and the second transfer loading unit 20 and the third transfer loading unit 30 move in the x-direction according to the bending / extending operation of the second robotic arm 25. When the second transfer loading unit 20 moves, the third transfer loading unit 30 moves together.

[0041] Furthermore, as described above, the first conveyor loading unit 10 and the second conveyor loading unit 20 support the first type of articles from below, and the third conveyor loading unit 30 supports the second type of articles from below. Therefore, compared to moving by grasping the lid of a container, the first conveyor loading unit 10, the second conveyor loading unit 20, and the third conveyor loading unit 30 can move stably and quickly. When moving by grasping the lid of a container, the articles inside the container tend to sway, so slow movement is required. Conversely, when moving while supporting the bottom surface of the container, the articles inside the container are less likely to sway, so faster movement is possible. As a result, since the first conveyor loading unit 10, the second conveyor loading unit 20, and the third conveyor loading unit 30 support the first / second type of articles from below, they move at a constant speed regardless of the type of article. That is, the moving speed of the first conveyor loading unit 10 and the moving speeds of the second and third conveyor loading units 20 can be substantially the same as each other.

[0042] Use later Figure 2 , Figure 5 , Figure 6 and Figure 7 The specific operation of the first transfer loading unit 10, the second transfer loading unit 20, and the third transfer loading unit 30 is described.

[0043] The interface component 70 includes multiple support portions 71, 72, and 73. For example, the multiple support portions 71, 72, and 73 may be arranged in the vertical direction (reference numeral z-direction), but are not limited thereto. The first support portion 71 and the second support portion 72 may be areas for supporting a first type of article, and the third support portion 73 may be areas for supporting a second type of article, but are not limited thereto. The multiple support portions 71, 72, and 73 may be provided on the support column 79, but are not limited thereto.

[0044] The interface component 70 may be a storage device for storing Class I or Class II articles, or a conveying device for conveying Class I or Class II articles, but is not limited thereto.

[0045] Figure 2 It is used for explanation Figure 1 A view of the operation of the first conveyor loading section of the tower elevator. Figure 3 It is used for explanation Figure 1 A view of the interface component. Figure 4 This is a view used to illustrate the positional relationship between the first conveyor plate, the first support plate, and the first type of articles when the first conveyor plate transfers the first type of articles.

[0046] First, refer to Figure 2The first conveyor plate 101 of the first conveyor loading section 10 directly supports the first type of article T1 below. The first type of article T1 may be a wafer receiving container. For example, a first mounting groove 19 is formed on the bottom surface of the first type of article T1 (see reference). Figure 4 ), and the first positioning pin 10a of the first conveyor plate 101 (reference) Figure 4 Insert into the first mounting slot 19 (reference) Figure 4 )middle.

[0047] Next, the frame 80 moves in the z direction, so that the first conveyor plate 101 is located at a height corresponding to the first support 71.

[0048] Next, the first robotic arm 15 extends in the x direction, causing the first conveyor plate 101 and the first support portion 71 to overlap.

[0049] Next, the first type of item T1 located on the first conveyor plate 101 is moved to the first support 71.

[0050] Specifically, Figure 3 The diagram shows a first support portion 71 disposed on the support column 79. The first support portion 71 includes a first support plate 71b and a plurality of fourth locating pins 71a formed on the first support plate 71b. A groove 71c is formed in the first support plate 71b. Although not shown separately, the second support portion 72 and the third support portion 73 have substantially the same shape as the first support portion 71.

[0051] refer to Figure 4 The first conveyor plate 101 enters in the direction of the groove 71c of the first support plate 71b (i.e., the x-direction). Upon entry, the height of the first conveyor plate 101 is slightly higher than the height of the first support plate 71b. Then, with the first conveyor plate 101 supporting the first type of article T1, the first conveyor plate 101 moves downwards (i.e., in the z-direction) so that the first conveyor plate 101 intersects with the first support plate 71b. As a result, the plurality of fourth positioning pins 71a of the first support plate 71b are inserted into the first hooking slot 19 of the first type of article T1, and the plurality of first positioning pins 10a of the first conveyor plate 101 are removed from the first hooking slot 19. Therefore, the first type of article T1 is moved from the first conveyor plate 101 to the first support plate 71b.

[0052] When the first type of item T1, which is placed on the first support plate 71b, is moved to the first conveyor plate 101, the operation is as follows.

[0053] The first conveyor plate 101 enters in the direction of the slot 71c of the first support plate 71b (i.e., the x-direction). Upon entry, the height of the first conveyor plate 101 is slightly lower than the height of the first support plate 71b. This is to prevent the first conveyor plate 101 from colliding with the first type of article T1. Next, the first conveyor plate 101 moves upward (i.e., in the z-direction) so that it intersects with the first support plate 71b. As a result, a plurality of first positioning pins 10a of the first conveyor plate 101 are inserted into the first mounting slots 19 of the first type of article T1, and a plurality of fourth positioning pins 71a of the first support plate 71b are removed from the first mounting slots 19. Therefore, the first type of article T1 is moved from the first support plate 71b to the first conveyor plate 101.

[0054] Figures 5 to 7 It is used for explanation Figure 1 A view of the operation of the second conveyor loading section of the tower elevator.

[0055] refer to Figure 5 The second conveyor plate 102 of the second conveyor loading unit 20 supports the first type of article T1 from below, and the third conveyor plate 103 is empty.

[0056] Next, the frame 80 moves in the z direction, so that the second conveyor plate 102 is located at a height corresponding to the second support 72.

[0057] Next, the second robotic arm 25 extends in the x direction, causing the second conveyor plate 102 and the second support portion 72 to overlap.

[0058] Next, the first type of item T1 located on the second conveyor plate 102 is moved to the second support 72.

[0059] refer to Figure 6 The third conveyor plate 103 of the third conveyor loading section 30 supports the second type of article T2 from below, and the second conveyor plate 102 is empty. The second type of article T2 can be an intermediate mask receiving container. For example, a second mounting groove is formed on the bottom surface of the second type of article T2, and the third positioning pin 30a of the third conveyor plate 103 (see reference) Figure 8 Insert it into the second mounting slot.

[0060] Next, the frame 80 moves in the z direction, so that the third conveyor plate 103 is located at a height corresponding to the third support 73.

[0061] Next, the second robotic arm 25 extends in the x direction, causing the third transfer plate 103 and the third support 73 to overlap.

[0062] Next, the second type of item T2 located on the third conveyor plate 103 is moved to the third support 73.

[0063] Specifically, the third conveyor plate 103 enters in the direction of the groove of the third support plate of the third support portion 73 (i.e., the x-direction). Upon entry, the height of the third conveyor plate 103 is slightly higher than the height of the third support plate. Then, with the third conveyor plate 103 supporting the second type of article T2, the third conveyor plate 103 moves downward (i.e., in the z-direction) so that the third conveyor plate 103 intersects with the third support plate. As a result, the plurality of fifth positioning pins of the third support plate are inserted into the second mounting slot of the second type of article T2, and the plurality of third positioning pins 30a of the third conveyor plate 103 are removed from the second mounting slot. Therefore, the second type of article T2 is moved from the third conveyor plate 103 to the third support plate.

[0064] When the second type of item T2, which is placed on the third support plate, is moved to the third conveyor plate 103, the operation is as follows.

[0065] The third conveyor plate 103 enters in the direction of the groove of the third support plate (i.e., the x-direction). Upon entry, the height of the third conveyor plate 103 is slightly lower than the height of the third support plate. This is to prevent the third conveyor plate 103 from colliding with the second type of article T2. Next, the third conveyor plate 103 moves upward (i.e., in the z-direction) so that it intersects with the third support plate 73. As a result, the plurality of third locating pins 30a of the third conveyor plate 103 are inserted into the second hooking slot of the second type of article T2, and the plurality of fifth locating pins of the third support plate are removed from the second hooking slot. Therefore, the second type of article T2 is moved from the third support plate to the third conveyor plate 103.

[0066] refer to Figure 7 The second conveyor plate 102 of the second conveyor loading unit 20 supports the first type of article T1 from below, and the third conveyor plate 103 supports the second type of article T2 from below.

[0067] Next, the frame 80 moves in the z direction, so that the second conveyor plate 102 is located at a height corresponding to the second support 72, and the third conveyor plate 103 is located at a height corresponding to the third support 73.

[0068] Next, the second robotic arm 25 extends in the x direction, causing the second conveyor plate 102 and the second support portion 72 to overlap, and the third conveyor plate 103 and the third support portion 73 to overlap.

[0069] Next, the first type of item T1 located on the second conveyor plate 102 is moved to the second support 72, and the second type of item T2 located on the third conveyor plate 103 is moved to the third support 73.

[0070] Figure 8 This is a plan view illustrating an article transport device according to an embodiment of the present invention. Figure 9 It is used for explanation Figure 8 A view showing the composition of the interface components.

[0071] refer to Figure 8 The guide rail 81 extends vertically, and the frame 80 can move along the guide rail 81. A first transfer loading section 10, a second transfer loading section 20, and a third transfer loading section 30 are provided on the frame 80. Positioning pins 10a, 20a, and 30a are provided on each of the first transfer loading section 10, the second transfer loading section 20, and the third transfer loading section 30.

[0072] The interface component 70 includes multiple support structures 3a, 4a, 5a, and 6a. For example... Figure 8 As shown, support components 3a, 4a, 5a, and 6a can be arranged around the periphery of the tower elevator 1. The first support component 3a includes support portions 1131, 1132, and 1133 arranged in the vertical direction; the second support component 4a includes support portions 1141, 1142, and 1143 arranged in the vertical direction; the third support component 5a includes support portions 1151, 1152, and 1153 arranged in the vertical direction; and the fourth support component 6a includes support portions 1161, 1162, and 1163 arranged in the vertical direction. Although each support component 3a, 4a, 5a, and 6a is shown to include three support portions, this is not a limitation. Furthermore, although four support components 3a, 4a, 5a, and 6a are shown arranged around the periphery of the tower elevator 1, this is not a limitation. Two, three, or more support components may also be arranged.

[0073] exist Figure 8 The diagram shows support components 3a and 4a for storing a first type of article T1, and other support components 5a and 6a for storing a second type of article T2, but is not limited thereto. For example, Figure 9 The support portions 1131, 1132, 1141, 1142, 1151, 1152, 1161, and 1162 arranged on the first and second layers can be used to store first-class articles T1, and the support portions 1133, 1143, 1153, and 1163 arranged on the third layer can be used to store second-class articles T2.

[0074] Tower lift 1 based on robotic arms 15, 25 (reference) Figure 1 The operation of the tower crane 1 provides the first type of article T1 or the second type of article T2 to the predetermined support parts of the support structures 3a, 4a, 5a, and 6a. Conversely, the tower crane 1 can provide the first type of article T1 or the second type of article T2 according to the operation of the robotic arms 15, 25 (see reference). Figure 1 The operation involves picking up either a first-class article T1 or a second-class article T2 from the predetermined support portion of the support components 3a, 4a, 5a, and 6a.

[0075] Figure 10 This is a plan view illustrating an article conveying device according to another embodiment of the present invention. For ease of explanation, the description will primarily focus on its use. Figure 8 The characteristics described are different.

[0076] refer to Figure 10 The interface component 70 includes multiple support structures 3, 4, 5, and 6. Each of the support structures 3, 4, 5, and 6 can be in the form of a conveyor. For example, support structures 3 and 4 can move a first type of item T1 to a preset position, and the other support structures 5 and 6 can move a second type of item T2 to other preset positions. Each of the support structures 3, 4, 5, and 6 can be configured as a multi-layered conveyor.

[0077] Figure 11 This is a flowchart illustrating a method for transporting articles according to some embodiments of the present invention.

[0078] refer to Figure 1 and Figure 11 It provides an item transport device (S310) including a tower lift 1 and an interface component 70.

[0079] Specifically, the tower lift 1 includes: a frame 80; a first conveying and loading unit 10, disposed on the frame 80 and supporting a first type of article T1 from below; a second conveying and loading unit 20, disposed on the frame 80, located above the first conveying and loading unit 10, and supporting the first type of article T1 from below; and a third conveying and loading unit 30, disposed on the frame 80, located above the second conveying and loading unit 20, and supporting a second type of article T2, different from the first type of article T1, from below. Furthermore, the second conveying and loading unit 20 and the third conveying and loading unit 30 are driven simultaneously.

[0080] The interface component 70 includes a first support portion 71, a second support portion 72, and a third support portion 73.

[0081] Next, refer to Figure 2 and Figure 11 The first conveying and loading unit 10 supports the first type of article T1 from below and performs an in-and-out operation to place the first type of article T1 on the first support unit 71 (S320).

[0082] Next, refer to Figure 6 and Figure 11 The third transfer loading unit 30 supports the second type of article T2, which is different from the first type of article T1, from below, and performs an in-and-out operation to place the second type of article T2 on the third support unit 73 (S330).

[0083] The time required for the first transfer loading unit 10 to perform the loading / unloading operation and the time required for the third transfer loading unit 30 to perform the loading / unloading operation can be the same for each other.

[0084] As described above, since the first transfer loading unit 10, the second transfer loading unit 20, and the third transfer loading unit 30 support the container from below and move the container instead of grasping the lid of the container, the entry and exit operation times of the first transfer loading unit 10, the second transfer loading unit 20, and the third transfer loading unit 30 can be the same for each other.

[0085] The embodiments of the present invention have been described above with reference to the accompanying drawings. However, those skilled in the art will understand that the present invention can be implemented in other specific ways without changing its technical concept or essential features. Therefore, it should be understood that the embodiments described above are exemplary in all respects and not restrictive.

Claims

1. A goods transport device, comprising: frame; A first conveying and loading unit is connected to the frame and supports the first type of articles from below; The second transfer loading unit is connected to the frame, located above the first transfer loading unit, and supports the first type of articles from below; A third conveying and loading unit is connected to the frame, located above the second conveying and loading unit, and supports a second type of article that is different from the first type of article from below; The second support is configured to load the first type of articles received from the second transfer loading section; as well as A third support portion is configured to load the second type of articles received from the third transfer loading portion, wherein the third support portion is arranged above the second support portion. The first transfer loading unit is driven independently of the second transfer loading unit and the third transfer loading unit, and the second transfer loading unit and the third transfer loading unit are driven simultaneously.

2. The article conveying device according to claim 1, wherein, The frame moves in the vertical direction, and When viewed in the vertical direction, the first transfer loading section, the second transfer loading section, and the third transfer loading section are arranged to overlap each other.

3. The article conveying device according to claim 1, wherein, With the second transfer loading section supporting the first type of articles and the third transfer loading section empty, Each of the second and third transfer loading sections extends toward the second and third support sections, such that the second transfer loading section transfers the first type of article to the second support section.

4. The article conveying device according to claim 1, wherein, With the second transfer loading section empty and the third transfer loading section supporting the second type of articles, Each of the second and third transfer loading sections extends toward the second and third support sections, such that the third transfer loading section transfers the second type of articles to the third support section.

5. The article conveying device according to claim 1, wherein, With the second transfer loading section supporting the first type of article and the third transfer loading section supporting the second type of article, Each of the second and third transfer loading sections extends toward the second and third support sections, such that the second transfer loading section transfers the first type of article to the second support section and the third transfer loading section transfers the second type of article to the third support section.

6. The article conveying device according to claim 1, wherein, The time required for the first transfer loading unit to perform the loading and unloading operation for placing the first type of article on the first support of the interface component and the time required for the third transfer loading unit to perform the loading and unloading operation for placing the second type of article on the third support of the interface component are the same for each other.

7. The article conveying device according to claim 1, wherein, The first transfer loading unit is operated by a first robotic arm connected to the frame, and The second and third transfer loading units are operated by a second robotic arm connected to the frame.

8. The article conveying device according to claim 1, wherein, The second transfer loading section includes a first transfer plate and a plurality of first positioning pins arranged on the first transfer plate. The second support portion includes a first support plate and a plurality of second locating pins arranged on the first support plate, and A first hook groove for inserting the first positioning pin and the second positioning pin is formed on the bottom surface of the first type of article.

9. The article conveying device according to claim 1, wherein, The third conveying and loading section includes a second conveyor plate and a plurality of third positioning pins arranged on the second conveyor plate. The third support includes a second support plate and a plurality of fourth locating pins arranged on the second support plate, and A second hooking groove for inserting the third positioning pin and the fourth positioning pin is formed on the bottom surface of the second type of article.

10. The article conveying device according to claim 1, wherein, The first type of item is a wafer containment container, and the second type of item is an intermediate mask containment container.

11. An article transport device, comprising: Tower elevators are used to transport goods. An interface component for receiving the item from the tower elevator, storing the item, or transferring the item to another location. The tower elevator includes: The frame moves vertically. A robotic arm is connected to the frame; A first transfer loading unit is connected to the robotic arm and supports the first type of article from below; and The second transfer loading unit, connected to the robotic arm, is located above the first transfer loading unit and supports a second type of article from below, which is different from the first type of article. When viewed in the vertical direction, the first transfer loading section and the second transfer loading section are arranged to overlap each other, and The first and second transfer loading units are driven simultaneously according to the operation of the robotic arm. The interface component includes: A first support portion, configured to load articles of the first type; and A second support portion is configured to load the second type of articles, and the second support portion is arranged above the first support portion.

12. The article conveying device according to claim 11, wherein, The first conveying and loading unit includes a first conveyor plate and a plurality of first positioning pins arranged on the first conveyor plate. The first support portion includes a first support plate and a plurality of second locating pins arranged on the first support plate, and A first hook groove for inserting the first positioning pin and the second positioning pin is formed on the bottom surface of the first type of article.

13. The article conveying device according to claim 11, wherein, The second conveying and loading section includes a second conveyor plate and a plurality of third positioning pins arranged on the second conveyor plate. The second support portion includes a second support plate and a plurality of fourth locating pins arranged on the second support plate, and A second hooking groove for inserting the third positioning pin and the fourth positioning pin is formed on the bottom surface of the second type of article.

14. The article conveying device according to claim 11, wherein, The first type of item is a wafer containment container, and the second type of item is an intermediate mask containment container.

15. A method for transporting goods, comprising: A goods transport device is provided, comprising a tower lift and an interface component. The tower lift includes: a frame; a first transfer loading section connected to the frame and supporting a first type of goods from below; a second transfer loading section connected to the frame, located above the first transfer loading section, and supporting the first type of goods from below; and a third transfer loading section connected to the frame, located above the second transfer loading section, and supporting a second type of goods different from the first type of goods from below, wherein the second transfer loading section and the third transfer loading section are driven simultaneously. The interface component includes: a first support section; a second support section configured to load the first type of goods received from the second transfer loading section; and a third support section configured to load the second type of goods, wherein the third support section is arranged above the second support section. The first conveying and loading unit supports the first type of articles from below and performs an infeed / outfeed operation to place the first type of articles onto the first support unit. The third conveying and loading unit supports the second type of article, which is different from the first type of article, from below, and performs an in-and-out operation to place the second type of article on the third support unit.

16. The method for transporting articles according to claim 15, wherein, The time required for the first conveying and loading unit to perform the loading and unloading operation is the same as the time required for the third conveying and loading unit to perform the loading and unloading operation.

17. The method for transporting articles according to claim 15, wherein, The third transfer loading unit performs the loading / unloading operation when the second transfer loading unit is empty.

18. The method for transporting articles according to claim 15, wherein, The first type of item is a wafer containment container, and the second type of item is an intermediate mask containment container.

19. The article conveying device according to claim 1, wherein, The second support portion and the third support portion are arranged in the same direction.

20. The method for transporting articles according to claim 15, wherein, The first type of articles and the second type of articles are loaded in the same direction via the second support and the third support, respectively.

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