Clamping jaw mechanism and horizontal coating line
By improving the insulation connection and alternating gripping technology of the gripper mechanism, the production efficiency and yield problems caused by the fixed thickness of the gripper mechanism during a single gripping in the existing technology have been solved, realizing flexible control of the substrate film thickness and improving production efficiency.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2023-04-04
- Publication Date
- 2026-03-27
AI Technical Summary
Existing gripper mechanisms have a fixed thickness of conductive layer on the substrate during a single gripping operation, which cannot adapt to different thickness requirements, resulting in limited production efficiency and yield. In particular, separation and film breakage problems are prone to occur when the anode current exceeds the tolerance range.
Design a gripper mechanism in which the first and second gripper arms are connected by an insulating component, the hinge is an insulator, and is energized only when the gripping surfaces are closed. Combined with a track assembly, the grippers can alternately grip. By using different gripper mechanisms in different areas, low-speed and high-speed coating can be performed, thereby improving the efficiency of the anodic current.
It enables flexible control of the substrate film thickness, reduces the probability of film breakage, and improves production efficiency and yield.
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Figure CN116397307B_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to the field of coating technology, in particular to a clamping jaw mechanism and a horizontal coating line. BACKGROUND
[0002] The relatively mature process of composite copper foil is winding magnetron coating + water plating. The winding magnetron coating machine first coats about 70nm of pure copper on both sides of ultra-thin PET / BOPP, and then coats about 1um of copper on both sides of the water plating line. The double-sided cathode clamping jaw of the water plating line is a key device. During water plating, the double clamping jaw is used to grab and transport the film, and the film is powered to make the film become a cathode. Under the influence of the external electric field, copper ions in the copper sulfate solution diffuse to the surface of the cathode to obtain electrons, and copper atoms are reduced and deposited on the film.
[0003] The existing clamping jaw mechanism includes a first clamping arm, a second clamping arm, a driving structure and an execution assembly. The first clamping arm and the second clamping arm are connected by a hinged assembly. The two ends of the hinged assembly are rotatably arranged on the corresponding clamping arms. The hinged assembly includes a first hinge and a second hinge arranged in parallel. Both the first hinge and the second hinge are conductors. The driving structure is used to drive the clamping surfaces of the first clamping arm and the second clamping arm to remain closed, so that the clamped part is in a conductive state. The driving structure includes two magnets arranged opposite to each other. The execution assembly is used to withstand external force to separate the first clamping arm and the second clamping arm from the driving structure. The execution assembly includes a connecting rod fixed on the second clamping arm and a guide wheel rotatably arranged on the connecting rod. The height of the guide wheel is raised or lowered through a predetermined guide rail, so as to realize the opening or closing action of the clamping surface.
[0004] The clamping jaw mechanism with the above structure is single clamping. The thickness of the conductive layer (magnetron plated copper layer) clamped between the clamping jaws of the substrate is fixed at about 70±5nm. The upper limit of the anode current that can be carried is also limited within the bearing range of 70nm copper. If the anode current is continuously increased to exceed the bearing range, the copper layer and the substrate will separate, thereby causing current abnormal alarm, film breakage and other problems, which directly affects the production efficiency and yield of water plating.
[0005] To solve the above problems, the present application is therefore provided. SUMMARY
[0006] The purpose of the present application is to provide a clamping jaw mechanism and a horizontal coating line, which can improve the production efficiency.
[0007] Based on the above problems, one of the technical solutions provided by the present application is:
[0008] A clamping jaw mechanism, comprising:
[0009] a first clamping arm and a second clamping arm, the first clamping arm and the second clamping arm being connected through a hinged assembly, two ends of the hinged assembly being rotatably arranged on the corresponding clamping arm respectively;
[0010] a driving structure for driving the clamping surfaces of the first clamping arm and the second clamping arm to keep closed so as to make the clamped member in a conductive state;
[0011] an execution assembly for bearing external force to make the first clamping arm and the second clamping arm separate from each other against the driving structure, the execution assembly comprising a connecting rod fixed on the second clamping arm and a guide wheel rotatably arranged on the connecting rod,
[0012] the hinged assembly comprising a first hinged member and a second hinged member arranged in parallel, the first clamping arm comprising a first arm body and a second arm body arranged in parallel, the first arm body and the second arm body being connected through an insulating member, the first hinged member being an insulator, the second hinged member being a conductor, and the insulating member being located between the first hinged member and the second hinged member.
[0013] In some embodiments, the driving structure comprises two magnets fixed on the first clamping arm and the second clamping arm respectively.
[0014] In some embodiments, the first clamping arm is provided with a first extension extending towards the second clamping arm, the second clamping arm is provided with a second extension extending towards the first clamping arm, and the two magnets are fixed on the first extension and the second extension respectively and arranged in parallel.
[0015] In some embodiments, the first clamping arm is provided with a first conductive block, the second clamping arm is provided with a second conductive block, when the clamping surfaces of the first clamping arm and the second clamping arm are in a closed state, the first conductive block abuts against the second extension, and the second conductive block abuts against the first extension.
[0016] In some embodiments, the first conductive block is rotatably arranged on the first clamping arm and connected with the first clamping arm through a first elastic member, and the second conductive block is rotatably arranged on the second clamping arm and connected with the second clamping arm through a second elastic member.
[0017] In some embodiments, the first clamping arm is fixed with a cathode conductive plate.
[0018] In some embodiments, the parts of the first clamping arm and the second clamping arm adjacent to the clamping surfaces are wrapped with an insulating layer, and the insulating layer is arranged away from the clamping surfaces.
[0019] Based on the above problems, the technical solution two provided by the present application is:
[0020] A horizontal coating line comprising the gripper mechanism as claimed in any one of the preceding claims.
[0021] In some embodiments, the horizontal coating line comprises a plurality of first gripper mechanisms and a plurality of second gripper mechanisms arranged at intervals, the connecting rods of the first gripper mechanisms and the second gripper mechanisms having different lengths.
[0022] In some embodiments, the horizontal coating line comprises a first coating zone, a gripper alternation zone, a second coating zone arranged in sequence, and a track assembly extending from the first coating zone to the second coating zone, the track assembly comprising a first track adapted to the first gripper mechanism and a second track adapted to the second gripper mechanism.
[0023] In the first coating zone, the guide surfaces of the first track and the second track are arranged in an up-down manner, the clamping surfaces of the first gripper mechanisms are in an open state, and the clamping surfaces of the second gripper mechanisms are in a closed state.
[0024] In the gripper alternation zone, the guide surfaces of the first track and the second track are located on the same horizontal plane, the clamping surfaces of the first gripper mechanisms are converted from an open state to a closed state, and the clamping surfaces of the second gripper mechanisms are in a closed state.
[0025] In the second coating zone, the guide surfaces of the second track and the first track are arranged in an up-down manner, the clamping surfaces of the first gripper mechanisms are in a closed state, and the clamping surfaces of the second gripper mechanisms are converted from a closed state to an open state.
[0026] Compared with the prior art, the horizontal coating line has the following advantages:
[0027] By setting the first clamping arm in two parts and connecting the two parts with an insulating member, and setting the first hinge member as an insulator, only the two clamping arms are energized when the clamping surfaces are closed, which facilitates selective coating of the substrate. The gripper mechanism with the above structure facilitates the alternating clamping arrangement, so that the substrate is clamped by the second clamping mechanism for low-speed coating in the first coating zone of the horizontal coating line. After coating in the first coating zone, the substrate has a certain thickness of the film layer. Then, the conversion of the gripper mechanism is completed in the gripper alternation zone, and the substrate is clamped by the first clamping mechanism. At this time, the thickness of the film layer of the substrate clamped by the first clamping mechanism is greater than that at the beginning of the first coating zone. The anode current can be increased for high-speed coating, thereby improving the production efficiency. BRIEF DESCRIPTION OF DRAWINGS
[0028] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed to be used in the embodiments will be briefly introduced as follows. The drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without any creative effort on the basis of these drawings.
[0029] Figure 1 Fig. 1 is a structural schematic diagram of a clamping jaw mechanism in the prior art;
[0030] Figure 2 Fig. 2 is a structural schematic diagram of an embodiment of a clamping jaw mechanism of the present application;
[0031] Figure 3 Fig. 3 is a structural schematic diagram of a horizontal coating line in the prior art; Figure 2 Fig. 4 is a structural schematic diagram of the horizontal coating line in the prior art in an open state;
[0032] Figure 4 Fig. 5 is a structural schematic diagram of an embodiment of a horizontal coating line of the present application;
[0033] Figure 5 Fig. 6 is a structural schematic diagram of the horizontal coating line of the present application in an open state; Figure 4 Fig. 7 is a partial enlarged view of A in Fig. 6;
[0034] Figure 6 Fig. 8 is a partial enlarged view of B in Fig. 6; Figure 4 Fig. 9 is a partial enlarged view of C in Fig. 6;
[0035] Figure 7 Fig. 10 is a structural schematic diagram of the cooperation between a guide wheel and a guide rail in an embodiment of the present application; Figure 4 Fig. 11 is a structural schematic diagram of the cooperation between a guide wheel and a guide rail in an embodiment of the present application;
[0036] Figure 8 Fig. 12 is a structural schematic diagram of the cooperation between a guide wheel and a guide rail in an embodiment of the present application;
[0037] Fig. 13 is a structural schematic diagram of the cooperation between a guide wheel and a guide rail in an embodiment of the present application;
[0038] 100, first clamping arm; 200, second clamping arm; 300, first hinge; 400, second hinge; 500, magnet; 600, connecting rod; 700, guide wheel;
[0039] 1, first clamping arm; 1-1, first arm body; 1-2, second arm body; 1-3, first extension; 2, second clamping arm; 2-1, second extension; 3, first hinge; 4, second hinge; 5, insulating piece; 6, magnet; 7, first conductive block; 8, second conductive block; 9, first elastic piece; 10, second elastic piece; 11, connecting rod; 12, guide wheel; 13, cathode conductive plate; 14, insulating layer; 15, copper plating tank; 16, track assembly; 16-1, first track; 16-2, second track; 17, anode plate assembly; 18, clamped piece; 19, guide rail;
[0040] H1, first clamping jaw mechanism; H2, second clamping jaw mechanism. DETAILED DESCRIPTION
[0041] The above scheme is further described in the following in connection with specific examples. It should be understood that these examples are used to illustrate the present application and are not intended to limit the scope of the present application. The implementation conditions used in the examples can be further adjusted according to the conditions of specific manufacturers, and the implementation conditions not mentioned are usually the conditions in conventional experiments.
[0042] Reference is made to Figure 2 and Figure 3 , which is a structural schematic diagram of Example 1 of the present application, and provides a clamping jaw mechanism, which includes a first clamping arm 1, a second clamping arm 2, a driving structure, and an execution assembly.
[0043] The first clamping arm 1 and the second clamping arm 2 are connected through a hinged assembly, both ends of the hinged assembly are rotatably arranged on the corresponding clamping arms, in this example, the clamping portions of the first clamping arm 1 and the second clamping arm 2 are in L-shaped structure, and the horizontal portions of the first clamping arm 1 and the second clamping arm 2 form clamping surfaces (as shown in Figure 4 ) for clamping a clamped member 18 (for example, a magnetic control rear copper foil). Among them, the first clamping arm 1 is fixed with a cathode conductive plate 13 for connecting the cathode to realize the cathode conduction.
[0044] The driving structure is used to drive the clamping surfaces of the first clamping arm 1 and the second clamping arm 2 to keep closed, so that the clamped member 18 is in a conductive state, and the clamped member 18 becomes a cathode, and then the clamped member 18 is placed in a copper sulfate solution, under the action of an external electric field (for example, an anode plate assembly 17 is arranged), copper can be plated on the clamped member 18. In this example, the driving structure includes two magnets 6 fixed on the first clamping arm 1 and the second clamping arm 2 respectively, and the closure of the clamping surfaces between the first clamping arm 1 and the second clamping arm 2 is realized through the attraction between the two magnets 6.
[0045] The execution assembly is used to bear external force to make the first clamping arm 1 and the second clamping arm 2 separate from each other against the driving structure, specifically, the execution assembly includes a connecting rod 11 fixed on the second clamping arm 2 and a guide wheel 12 rotatably arranged on the connecting rod 11, when installed, a predetermined guide rail 19 is arranged, as shown in Figure 8 , the guide wheel 12 is in rolling cooperation with the guide rail 19, and by raising or lowering the height of the guide rail 19, the second clamping arm 2 is raised or lowered, so that the clamping surfaces are separated or closed.
[0046] In order to realize the alternate clamping of the plated member according to the need, improve the production efficiency, the hinge assembly and the structure of the clamping arm are improved, wherein the hinge assembly comprises a first hinge 3 and a second hinge 4 arranged in parallel, the first clamping arm 1 comprises a first arm body 1-1 and a second arm body 1-2 arranged in parallel, the first arm body 1-1 and the second arm body 1-2 are connected through an insulating piece 5 (such as PP material), the first hinge 3 is an insulator (such as PP material), the second hinge 4 is a conductor (such as a metal connecting block), and the insulating piece 5 is located between the first hinge 3 and the second hinge 4, so that the conduction only occurs when the clamping surfaces of the first clamping arm 1 and the second clamping arm 2 are closed, and the alternate clamping of the clamped member 18 is facilitated.
[0047] In order to facilitate the installation of the driving structure, a first extension 1-3 extending to the second clamping arm 3 is arranged on the first clamping arm 1, a second extension 2-1 extending to the first clamping arm 1 is arranged on the second clamping arm 2, and two magnets 6 are fixed on the first extension 1-3 and the second extension 2-1 and arranged in parallel.
[0048] When the clamping surfaces of the first clamping arm 1 and the second clamping arm 2 are closed, in order to improve the conduction efficiency, a first conductive block 7 is arranged on the first clamping arm 1, and a second conductive block 8 is arranged on the second clamping arm 2, when the clamping surfaces of the first clamping arm 1 and the second clamping arm 2 are closed, the first conductive block 7 abuts against the second extension 2-1, and the second conductive block 8 abuts against the first extension 1-3.
[0049] In order to improve the clamping force on the clamped member 18, the first conductive block 7 is rotatably arranged on the first clamping arm 1 and connected with the first clamping arm 1 through a first elastic piece 9, and the second conductive block 8 is rotatably arranged on the second clamping arm 2 and connected with the second clamping arm 2 through a second elastic piece 10, wherein the first elastic piece 9 and the second elastic piece 10 can be a tension spring.
[0050] In order to avoid the copper plating of the clamping jaw mechanism body, the part adjacent to the clamping surface on the first clamping arm 1 and the second clamping arm 2 comprises an insulating layer 14, which is arranged away from the clamping surface, that is, does not affect the conduction of the clamped member 18.
[0051] As Figures 4 to 7As shown, the present invention also discloses a horizontal coating line, including the aforementioned gripper mechanism and track assembly 16. Specifically, it includes a plurality of first gripper mechanisms H1 and a plurality of second gripper mechanisms H2 arranged at intervals, wherein the connecting rods 11 of the first gripper mechanisms H1 and the second gripper mechanisms H2 have different lengths. For example, the length of the connecting rod 11 of the first gripper mechanism H1 is 60 mm, and the length of the connecting rod 11 of the second gripper mechanism H2 is 30 mm. The track assembly 16 includes a first track 16-1 and a second track 16-2 arranged in parallel. The first track 16-1 is adapted to the first gripper mechanism H1, and the second track 16-2 is adapted to the second gripper mechanism H2. By setting different heights for the first track 16-1 and the second track 16-2, the first gripper mechanism H1 and the second gripper mechanism H2 can be used for alternating gripping.
[0052] To improve production efficiency, the horizontal coating line also includes a first coating area, a gripper alternation area, and a second coating area arranged sequentially. The first coating area has three copper plating tanks 15, the gripper alternation area has one copper plating tank 15, and the second coating area has four copper plating tanks 15. Each copper plating tank 15 is equipped with an anode plate assembly 17. On both sides of the eight copper plating tanks 15 in the conveying direction, there are several first gripper mechanisms H1 and several second gripper mechanisms H2. The several first gripper mechanisms H1 and several second gripper mechanisms H2 are arranged in a ring at intervals and are driven by corresponding drive systems to clamp the clamped part 18 and move it within the eight copper plating tanks 18 to achieve copper plating. The drive system is prior art and will not be described in detail in this invention.
[0053] like Figure 5 As shown, in the first coating area, the guide surfaces of the first track 16-1 and the second track 16-2 are arranged vertically. At this time, the guide wheel 12 of the first gripper mechanism H1 is in rolling engagement with the first track 16-1, and the clamping surface of the first gripper mechanism H1 is in an open state. The guide wheel 12 of the second gripper mechanism H2 is in rolling engagement with the second track 16-2, and the clamping surface of the second gripper mechanism H2 is in a closed state. The clamped part 18 is an ultra-thin PET / BOPP that has been coated with a layer of pure copper of about 70nm on both sides by a magnetron sputtering coating machine. The second gripper mechanism H2 clamps the clamped part 18 with a copper layer thickness of 70mm and performs low-speed copper plating.
[0054] like Figure 6 As shown, in the alternating gripper zone, the first track 16-1 is lowered and is on the same horizontal plane as the guide surface of the second track 16-2. The gripping surface of the first gripper mechanism H1 changes from the open state to the closed state, and the gripping surface of the second gripper mechanism H2 is in the closed state. That is, the first gripper mechanism H1 and the second gripper mechanism H2 simultaneously grip the clamped part 18. At this time, the thickness of the single-sided copper layer on the clamped part 18 is 250±20nm.
[0055] likeFigure 7 As shown, in the second plating area, the second track 16-2 is lifted, which is arranged above and below the guide surface of the first track 16-1, that is, the clamping surface of the first clamping mechanism H1 is in a closed state, and the clamping surface of the second clamping mechanism H2 is switched from a closed state to an open state. At this time, the single-side copper layer thickness of the clamped part 18 clamped by the first clamping mechanism H1 is about 250 mm, the anode current can be increased, high-speed copper plating can be carried out, and finally the single-side copper plating thickness reaches 1 μm, thereby improving the production efficiency.
[0056] The working principle of the present application is as follows:
[0057] The clamped part 18 (copper foil roll) is placed into the feeding shaft of the water plating line, and at this time the single-side copper plating thickness of the copper foil is about 70±5 nm; after the film is worn by the operator, water plating is started, and the copper foil is clamped by the clamping jaw when it comes out of the feeding roll and enters the first copper plating tank 15 in the first plating area; in the first plating area, the first clamping mechanism H1 is opened, and the second clamping mechanism H2 is closed, the second clamping mechanism H2 is connected to the cathode current of the double-side copper layer, and the anode is opened, so that the copper foil starts to be plated with copper; when the copper plating tank enters the clamping jaw alternation area, the first clamping mechanism H1 and the second clamping mechanism H2 are both closed, and a buffer zone is provided for the anode and cathode current of the first clamping mechanism H1, at this time the single-side copper thickness of the copper foil clamped by the first clamping mechanism H1 is about 250±20 nm; after the clamping jaw alternation area is finished, the second clamping mechanism H2 is opened, and the first clamping mechanism H1 continues to be closed; in the second plating area, the first clamping mechanism H1 continuously connects the cathode current and increases the anode current output, realizes high-speed copper plating, and finally the single-side copper plating thickness reaches 1 μm.
[0058] The following is a comparison of the clamping jaw mechanism in the prior art and the clamping jaw mechanism of the present application:
[0059]
[0060] In summary, the clamping jaw mechanism of the structure can be alternately clamped, which can obviously improve the running speed and reduce the film breakage probability. The above examples are only for illustrating the technical concept and characteristics of the present application, the purpose is to enable those skilled in the art to understand the content of the present application and to implement it, and cannot limit the protection scope of the present application. Any equivalent transformation or modification made according to the spirit and essence of the present application should be covered within the protection scope of the present application.
Claims
1. A clamping mechanism comprising: a first clamping arm and a second clamping arm connected through a hinged assembly, two ends of the hinged assembly being rotatably arranged on the corresponding clamping arm; a driving structure for driving the clamping surfaces of the first and second clamping arms to keep closed so as to make the clamped object in a conductive state; an execution assembly for bearing external force to make the first and second clamping arms separate from each other against the driving structure, the execution assembly comprising a connecting rod fixed on the second clamping arm and a guide wheel rotatably arranged on the connecting rod, characterized in that: the driving structure comprises two magnets fixed on the first and second clamping arms respectively; the hinged assembly comprises a first hinged member and a second hinged member arranged in parallel, the first clamping arm comprises a first arm body and a second arm body arranged in parallel, the first arm body and the second arm body are connected through an insulating member, the first hinged member is an insulator, the second hinged member is a conductor, and the insulating member is located between the first hinged member and the second hinged member; the first clamping arm is provided with a first extension part extending towards the second clamping arm, the second clamping arm is provided with a second extension part extending towards the first clamping arm, and the two magnets are fixed on the first and second extension parts respectively and arranged in parallel; the first clamping arm is provided with a first conductive block, and the second clamping arm is provided with a second conductive block, when the clamping surfaces of the first and second clamping arms are in a closed state, the first conductive block abuts against the second extension part, and the second conductive block abuts against the first extension part; the first conductive block is rotatably arranged on the first clamping arm and connected with the first clamping arm through a first elastic member, and the second conductive block is rotatably arranged on the second clamping arm and connected with the second clamping arm through a second elastic member. The first clamping arm is fixed with a cathode conductive plate. The portions of the first and second clamping arms adjacent to the clamping surfaces are wrapped with an insulating layer, and the insulating layer is arranged away from the clamping surfaces. The horizontal coating line comprises a plurality of first clamping mechanisms and a plurality of second clamping mechanisms arranged at intervals, the lengths of the connecting rods of the first clamping mechanisms and the second clamping mechanisms are different. The horizontal coating line comprises a first coating area, a clamping-alternating area, a second coating area arranged in sequence, and a track assembly extending from the first coating area to the second coating area, the track assembly comprises a first track matched with the first clamping mechanism and a second track matched with the second clamping mechanism; In the first coating area, the guide surfaces of the first track and the second track are arranged in parallel, the clamping surfaces of the first clamping mechanism are in an open state, and the clamping surfaces of the second clamping mechanism are in a closed state; In the clamping-alternating area, the guide surfaces of the first track and the second track are located on the same horizontal plane, the clamping surfaces of the first clamping mechanism are changed from an open state to a closed state, and the clamping surfaces of the second clamping mechanism are in a closed state. 2. The jaw mechanism of claim 1, wherein: 3. The jaw mechanism of claim 1, wherein: 4. A horizontal coating line, characterized in that: 5. The horizontal coater line of claim 4, wherein: 6. The horizontal coater line of claim 5, wherein: In the second coating area, the second track is arranged above the guide surface of the first track, the clamping surface of the first clamping mechanism is in the closed state, and the clamping surface of the second clamping mechanism is switched from the closed state to the open state.
Citation Information
Patent Citations
Clamping jaw mechanism and horizontal coating line
CN220183411U