Water-immersion ultrasonic scanning microscope sample delivery apparatus and control method

Abstract

The application is suitable for the field of integrated circuit testing equipment and instrument technology, and provides a water immersion type ultrasonic scanning microscope sample conveying device and a control method. The device comprises a wafer supporting table, a trolley, a guide rail, a guide rail support, a push-pull driving mechanism, a liquid tank and a bottom plate. The bottom plate is arranged on the bottom wall of the liquid tank, the guide rail support is arranged on the bottom plate, the guide rail is arranged on the guide rail support, the trolley is arranged on the guide rail, and the wafer supporting table is arranged on the trolley. The heights of the two ends of the guide rail are different, and the lower end of the guide rail is lower than a preset height, and the preset height is the liquid level of the liquid in the liquid tank. The push-pull driving mechanism is arranged on the bottom plate of the liquid tank and connected with the trolley, and the push-pull driving mechanism can control the trolley to move between the two ends of the guide rail. The application improves the efficiency of the wafer replacement process after the wafer detection is completed, and makes the replacement process more rapid and stable.

Description

Technical Field

[0001] This application belongs to the field of integrated circuit testing equipment and instruments technology, and in particular relates to a sample transfer device and control method for an immersion ultrasonic scanning microscope. Background Technology

[0002] Currently, there are many brands of ultrasonic scanning microscopes used for integrated circuit production testing. After each test, changing to the next wafer is mostly done manually, either by draining the water tank or by manually loading and unloading the wafer in the water. This is very inefficient and significantly prolongs the wafer inspection time. While some ultrasonic scanning electron microscopes have automatic sample loading and unloading functions, their complex mechanical structures and high prices limit their versatility in practical production and daily life. Furthermore, these automatic sample loading and unloading functions are not perfect; the replacement process is not smooth enough, causing the wafer to shift and affecting subsequent inspections. Summary of the Invention

[0003] This application provides a sample transfer device and control method for an immersion ultrasonic scanning microscope, which improves the efficiency of the wafer replacement process after wafer inspection and makes the replacement process faster and smoother.

[0004] This application is achieved through the following technical solution:

[0005] In a first aspect, embodiments of this application provide a sample transfer device for an immersion ultrasonic scanning microscope, comprising: a slide stage, a trolley, a guide rail, a guide rail bracket, a push-pull drive mechanism, a liquid tank, and a base plate; the base plate is disposed on the bottom wall of the liquid tank, the guide rail bracket is disposed on the base plate, the guide rail is disposed on the guide rail bracket, the trolley is disposed on the guide rail, and the slide stage is disposed on the trolley; the two ends of the guide rail have different heights, and the lower end of the guide rail is lower than a preset height, the preset height being the liquid level height of the liquid contained in the liquid tank; the push-pull drive mechanism is disposed on the base plate and connected to the trolley, and the push-pull drive mechanism can control the movement of the trolley between the two ends of the guide rail.

[0006] In conjunction with the first aspect, in some possible implementations, the guide rail includes a force-bearing guide rail and a driven guide rail, which are arranged in parallel on both sides of the liquid tank. The two guide rails have the same shape and are located on the same horizontal plane. The two ends of the support platform are slidably arranged in the tracks of the two guide rails. The push-pull drive mechanism is connected to one end of the trolley in the force-bearing guide rail.

[0007] In conjunction with the first aspect, in some possible implementations, the guide rail includes a first track, a second track, and a third track. The first track is a horizontal track located at the bottom, the third track is a horizontal track located at the top, and the second track is located between the first track and the third track. The second track is S-shaped, smoothly connecting the first track and the second track. The part of the second track near the first track is concave, and the part of the second track near the third track is convex.

[0008] In conjunction with the first aspect, in some possible implementations, the push-pull drive mechanism includes: a lead screw, a slide bar, a slider, a first support, a second support, and a push-pull rod; the first and second supports are mounted on the base plate and located outside the guide rail; the lead screw and the slide bar are arranged in parallel between the first and second supports, one end of the lead screw passes through the second support and is connected to the motor, the slider is sleeved on the lead screw and the slide bar, and the slider is threadedly connected to the lead screw; one end of the push-pull rod is connected to the side of the slider near the first support, and the other end is connected to the trolley; the motor drives the lead screw to rotate, causing the slider to move on the slide bar.

[0009] In conjunction with the first aspect, in some possible implementations, limit screws are provided on the first and second supports. The limit screws are located at the lower part of the lead screw and slide bar. When the slider moves close to the first or second support, the slider abuts against the limit screw.

[0010] In conjunction with the first aspect, in some possible implementations, a vacuum chuck and a vacuum circuit system are provided on the wafer carrier stage; the vacuum chuck is used to pick up the wafer; the vacuum circuit system is used to connect with the vacuum chuck to provide a vacuum environment for the vacuum chuck; the vacuum circuit system includes a manual valve, a solenoid valve, a vacuum generator, a gas purifier, and vacuum tubing; the vacuum generator is connected to the solenoid valve, the manual valve, and the gas purifier respectively through vacuum tubing; the manual valve is connected to the vacuum chuck through vacuum tubing; the solenoid valve is used to open the vacuum tubing between the vacuum generator and compressed air, allowing compressed air to enter the vacuum generator to form a vacuum; the manual valve opens or closes the vacuum tubing between the vacuum generator and the vacuum chuck; the gas purifier is used to clean the gas in the vacuum generator and output clean gas.

[0011] In conjunction with the first aspect, in some possible implementations, the vacuum circuit system also includes a vacuum release valve; the vacuum release valve is connected to the vacuum generator and is used to open or close the pipeline between the vacuum generator and the manual valve.

[0012] In conjunction with the first aspect, in some possible implementations, the vacuum chuck is provided with a first vacuum suction hole, a cross-shaped groove, an annular groove, and a second vacuum suction hole in the middle. The cross-shaped groove and the annular groove are connected. The first vacuum suction hole is located in the cross-shaped groove and / or the annular groove, and the second vacuum suction hole is evenly distributed outside the annular groove. The first vacuum suction hole, the cross-shaped groove, and the annular groove are used together to adsorb wafers of a first preset size. The first vacuum suction hole is connected to a manual valve. The first vacuum suction hole, the cross-shaped groove, the annular groove, and the second vacuum suction hole are used together to adsorb wafers of a second preset size. The second vacuum suction hole is connected to a manual valve. The second preset size is larger than the first preset size.

[0013] In conjunction with the first aspect, in some possible implementations, the trolley is connected to the guide rail via four rolling bearings. The two sides of the trolley are the force-bearing side and the driven side, respectively. The two bearings on the force-bearing side of the trolley are both triangular flying saucer bearings, and the guide rail on the side corresponding to the force-bearing side of the trolley has a V-groove structure.

[0014] Secondly, embodiments of this application provide a control method for a sample transfer device of an immersion ultrasonic scanning microscope, comprising: moving a trolley from a low position to a high position on a guide rail via a push-pull drive mechanism; controlling a wafer stage to replace the wafer on the wafer stage with a wafer to be inspected; and then moving the trolley from a high position to a low position on the guide rail via the push-pull drive mechanism, so that the wafer is submerged in the water tank, waiting for the wafer to be inspected.

[0015] It is understandable that the beneficial effects of the second aspect mentioned above can be found in the relevant descriptions in the first aspect mentioned above, and will not be repeated here.

[0016] The beneficial effects of the embodiments in this application compared with the prior art are:

[0017] This application automates the traditional manual wafer replacement method by using a trolley, guide rail, guide rail bracket, and push-pull drive mechanism, which improves the efficiency of wafer replacement. Compared with manual wafer replacement, it is less likely to contaminate the liquid in the liquid tank, ensuring the accuracy of subsequent wafer inspection. It also makes the maintenance of the sample transfer device of the immersion ultrasonic scanning microscope simpler.

[0018] It should be understood that the above general description and the following detailed description are exemplary and explanatory only, and are not intended to limit this specification. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a schematic diagram of the structure of a sample transfer device for an immersion ultrasonic scanning microscope provided in one embodiment of this application;

[0021] Figure 2 This is a schematic diagram of the push-pull drive mechanism provided in one embodiment of this application;

[0022] Figure 3 This is a schematic diagram of the structure of a vacuum air circuit system provided in an embodiment of this application;

[0023] Figure 4 This is a schematic diagram of the structure of a vacuum chuck provided in one embodiment of this application;

[0024] Figure 5 This is a schematic diagram of the installation of a sample transfer device for an immersion ultrasonic scanning microscope according to an embodiment of this application;

[0025] Figure 6 This is a schematic flowchart of a control method for a sample transfer device of an immersion ultrasonic scanning microscope provided in an embodiment of this application. Detailed Implementation

[0026] In the following description, specific details such as particular system architectures and techniques are set forth for illustrative purposes and not for limitation, in order to provide a thorough understanding of the embodiments of this application. However, those skilled in the art will understand that this application may also be implemented in other embodiments without these specific details. In other instances, detailed descriptions of well-known systems, apparatuses, circuits, and methods have been omitted so as not to obscure the description of this application with unnecessary detail.

[0027] It should be understood that, when used in this application specification and the appended claims, the term "comprising" indicates the presence of the described features, integrals, steps, operations, elements and / or components, but does not exclude the presence or addition of one or more other features, integrals, steps, operations, elements, components and / or a collection thereof.

[0028] It should also be understood that the term “and / or” as used in this application specification and the appended claims means any combination of one or more of the associated listed items and all possible combinations, and includes such combinations.

[0029] As used in this application specification and the appended claims, the term "if" may be interpreted, depending on the context, as "when," "once," "in response to determination," or "in response to detection." Similarly, the phrases "if determined" or "if detected [the described condition or event]" may be interpreted, depending on the context, as meaning "once determined," "in response to determination," "once detected [the described condition or event]," or "in response to detection [the described condition or event]."

[0030] Furthermore, in the description of this application and the appended claims, the terms "first," "second," "third," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0031] References to "one embodiment" or "some embodiments" as described in this specification mean that one or more embodiments of this application include a specific feature, structure, or characteristic described in connection with that embodiment. Therefore, the phrases "in one embodiment," "in some embodiments," "in other embodiments," "in still other embodiments," etc., appearing in different parts of this specification do not necessarily refer to the same embodiment, but rather mean "one or more, but not all, embodiments," unless otherwise specifically emphasized. The terms "comprising," "including," "having," and variations thereof mean "including but not limited to," unless otherwise specifically emphasized.

[0032] Currently, there are many brands of ultrasonic scanning microscopes used for integrated circuit production testing. After each test, changing to the next wafer is mostly done manually, either by draining the water tank or by manually loading and unloading the wafer in the water. This is very inefficient and significantly prolongs the wafer inspection time. While some ultrasonic scanning electron microscopes have automatic sample loading and unloading functions, their complex mechanical structures and high prices limit their versatility in practical production and daily life. Furthermore, these automatic sample loading and unloading functions are not perfect; the replacement process is not smooth enough, causing the wafer to shift and affecting subsequent inspections.

[0033] Based on the above issues, Figure 1A schematic diagram of a sample transfer device for an immersion ultrasonic scanning microscope according to an embodiment of this application is shown. The device includes: a slide stage 101, a trolley 102, a guide rail 103, a guide rail support 104, a push-pull drive mechanism 105, a liquid tank 106, and a base plate 107. The liquid tank 106 consists of side walls and a bottom wall. The base plate 107 is disposed on the bottom wall of the liquid tank 106. The guide rail support 104 is disposed on the base plate 107, the guide rail 103 is disposed on the guide rail support 104, the trolley 102 is disposed on the guide rail 103, and the slide stage 101 is disposed on the trolley 102. The two ends of the guide rail 103 have different heights, and the lower end of the guide rail 103 is below a preset height, which is the liquid level in the liquid tank 106. The push-pull drive mechanism 105 is mounted on the base plate 107 and connected to the trolley 102. The push-pull drive mechanism 105 can control the trolley 102 to move between the two ends of the guide rail 103.

[0034] Specifically, the main body of the receiving platform 101 can be made of aluminum alloy. Two rolling bearings are installed on each side of the trolley 102, and four rolling bearings are installed in the guide rail 103. The trolley 102 reciprocates along the guide rail 103.

[0035] For example, the guide rail 103 includes a force-bearing guide rail and a driven guide rail. The force-bearing guide rail and the driven guide rail are arranged in parallel on both sides of the liquid tank 106. The two guide rails have the same shape and are located on the same horizontal plane. The two ends of the support platform 101 are slidably arranged in the tracks of the two guide rails. The push-pull drive mechanism 105 is connected to one end of the trolley 102 arranged in the force-bearing guide rail.

[0036] For example, the guide rail 103 includes a first rail, a second rail, and a third rail. The first rail is a horizontal rail located at the bottom, the third rail is a horizontal rail located at the top, and the second rail is located between the first rail and the third rail. The second rail is S-shaped, smoothly connecting the first rail and the second rail. The portion of the second rail near the first rail is concave, and the portion of the second rail near the third rail is convex.

[0037] For example, Figure 2A schematic diagram of the push-pull drive mechanism provided in this application embodiment is shown. The push-pull drive mechanism 105 includes: a lead screw 201, a slide bar 202, a slider 203, a first support 204, a second support 205, and a push-pull rod 206. The first support 204 and the second support 205 are disposed on the base plate 107 and located outside the guide rail 103. The lead screw 201 and the slide bar 202 are arranged in parallel between the first support 204 and the second support 205. One end of the lead screw 201 passes through the second support 205 and is connected to a motor. The slider 203 is sleeved on the lead screw 201 and the slide bar 202, and the slider 203 is threadedly connected to the lead screw 201. One end of the push-pull rod 206 is connected to the side of the slider 203 near the first support 204, and the other end is connected to the trolley 102. The motor drives the lead screw 201 to rotate, causing the slider 203 to move on the slide bar 202.

[0038] Specifically, the lead screw 201 can adopt a seven-start thread, and the lead screw 201 adopts an external thread, while the slider 203 adopts an internal thread. The lead screw 201 is a ball screw with a large-stroke multi-start trapezoidal thread, with a stroke of 28mm and a pitch of 4mm. The multi-start thread is a thread formed by two or more equally spaced helical lines on the shaft. With each rotation, it can move several times the pitch, and the threads are evenly stressed on both sides during operation.

[0039] Specifically, in some embodiments, the push-pull rod 206 and the slider 203 can be connected by a universal straight rod ball joint bearing 207, which facilitates the adjustment of the direction of the push-pull rod 206. In order to meet the size requirements of the push-pull drive mechanism 105, a length adjustment screw 208 can also be provided on the push-pull rod 206 to make the length of the push-pull rod 206 adjustable to meet the needs of actual work.

[0040] Specifically, in some embodiments, the push-pull rod 206 and the trolley 102 can be connected by a bent-rod ball joint bearing 209, which facilitates the push-pull rod 206 to apply stress to the trolley 102, enabling the trolley 102 to move normally. As mentioned above, both ends of the push-pull rod 206 can be hinge structures, that is, both a universal straight-rod ball joint bearing 207 and a bent-rod ball joint bearing 209 can be present simultaneously.

[0041] Specifically, a coupling 210 is provided at the end of the lead screw 201 that is connected to the motor, which makes it easier for the motor to drive the lead screw 201 to rotate.

[0042] For example, limit screws 211 can be provided on the first support 204 and the second support 205, and the limit screws 211 are located at the lower part of the lead screw 201 and the slide bar 202. When the slider 203 moves close to the first support 204 or the second support 205, the slider 203 abuts against the limit screw 211. The height of the first support 204 and the second support 205 is higher than the liquid surface, which reduces the contact between the push-pull rod 206 and the liquid, reduces the contamination of the liquid, and can improve the detection accuracy.

[0043] Specifically, the limit screw 211 is adjustable in length and is used to adjust the two extreme positions of the slider 203, serving as a mechanical limit and protection function. In the event of a stepper motor drive malfunction, it limits the extreme positions of the slider 203, thereby protecting the trolley 102 from collisions.

[0044] In some embodiments, the push-pull drive mechanism 105 may be disposed on the base plate 107 between the force-bearing guide rail and the side wall of the liquid tank 106.

[0045] For example, the wafer stage 101 is provided with a vacuum chuck 1011 and a vacuum circuit system 1012. The vacuum chuck 1011 is used to pick up the wafer, and the vacuum circuit system 1012 is used to connect to the vacuum chuck 1011 to provide a vacuum environment for the vacuum chuck 1011.

[0046] Figure 3 A schematic diagram of the vacuum circuit system 1012 provided in this application embodiment is shown. The vacuum circuit system 1012 includes a manual valve 301, a solenoid valve 302, a vacuum generator 303, a gas purifier 304, and a vacuum pipeline. The vacuum generator 303 is connected to the solenoid valve 302, the manual valve 301, and the gas purifier 304 via the vacuum pipeline. The manual valve 301 is connected to the vacuum suction cup 1011 via the vacuum pipeline. The solenoid valve 302 is used to open the vacuum pipeline between the vacuum generator 303 and compressed air, allowing compressed air to enter the vacuum generator 303 to form a vacuum. The manual valve 301 opens or closes the vacuum pipeline between the vacuum generator 303 and the vacuum suction cup 1011. The gas purifier 304 is used to clean the gas in the vacuum generator 303 and output clean gas. The inner diameter of the vacuum pipeline can be 4mm. The vacuum generator 303 is a single-unit structure and adopts the working principle of a venturi tube. The manual valve 301 is a swing handle valve KHO-3-PK-3, and the silencer and purifier at the compressed air outlet is SMCAMC320-F03BD, which is installed above the liquid level in the liquid tank.

[0047] Specifically, after the gas purifier 304 outputs clean gas, it creates a positive pressure clean space above the liquid and inside the control box.

[0048] Specifically, Figure 1The sample transfer device of the immersion ultrasonic scanning microscope also includes a vacuum air circuit system drag chain 108. The vacuum air circuit system 1012 is connected to the outside of the liquid tank 106 through the vacuum air circuit system drag chain 108. In addition, the vacuum air circuit system drag chain 108 moves with the trolley 102 and plays a role in protecting the vacuum pipeline.

[0049] For example, the vacuum circuit system 1012 also includes a vacuum release valve 305. The vacuum release valve 305 is connected to the vacuum generator 303 and is used to open and close the pipeline between the vacuum generator 303 and the manual valve 301, thereby controlling the vacuum environment inside the pipeline. When the vacuum circuit system 1012 has the vacuum release valve 305, the vacuum chuck 1011's suction and release actions on the wafer are achieved through the vacuum release valve 305, thus preventing liquid from being drawn into the vacuum pipeline. The vacuum release valve 305 is model S3HL-08.

[0050] Specifically, the vacuum circuit system 1012 may also include a manual regulating valve 306, which assists the solenoid valve 302 in sending compressed air into the vacuum generator 303.

[0051] For example, Figure 4 A schematic diagram of the vacuum suction cup provided in this application embodiment is shown. The vacuum suction cup 1011 has a first vacuum suction hole 401, a cross-shaped groove 402, an annular groove 403, and a second vacuum suction hole 404 in the middle. The cross-shaped groove 402 and the annular groove 403 are connected. The first vacuum suction hole 401 is located in the cross-shaped groove 402 and / or the annular groove 403. The second vacuum suction hole 404 is evenly distributed on the outside of the annular groove 403.

[0052] The first vacuum suction port 401, the cross-shaped groove 402, and the annular groove 403 are used together to adsorb wafers of a first preset size. The first vacuum suction port 401 is connected to the manual valve 301. When the vacuum generator 303 creates a vacuum, since the cross-shaped groove 402 and the annular groove 403 are connected, the first vacuum suction port 401 is located in the cross-shaped groove 402 and / or the annular groove 403, creating a negative pressure in the area of ​​the cross-shaped groove 402 and the annular groove 403. At this time, under the influence of atmospheric pressure, the wafer will be tightly adsorbed onto the vacuum chuck 1011.

[0053] The first vacuum suction port 401, the cross-shaped groove 402, the annular groove 403, and the second vacuum suction port 404 are used together to suction wafers of a second preset size. The second vacuum suction port 404 is connected to the manual valve 301. The second preset size is larger than the first preset size. Specifically, the first preset size can be 6 inches, and the second preset size can be 8 inches. The vacuum suction cup 1011 is mounted on the wafer support stage through the mounting hole 407. When suctioning large wafers, in addition to the negative pressure formed in the areas of the cross-shaped groove 402 and the annular groove 403, the second vacuum suction port 404 also works to strengthen the suction force and prevent the wafer from falling.

[0054] Specifically, in some embodiments, the vacuum circuit system 1012 may further include multiple manual valves 301, such as a first manual valve 3011 and a second manual valve 3022. Correspondingly, a first vacuum suction port 401 is connected to the first manual valve 3011, and a second vacuum suction port 404 is connected to the second manual valve 3012. The manual valves 301 are used to select and pick up wafers of different sizes. When picking up smaller wafers, the first manual valve 3011 can be activated; when picking up larger wafers, both the first manual valve 3011 and the second manual valve 3012 can be activated.

[0055] Specifically, when the first manual valve 3011 is connected to the first vacuum suction port 401 through the vacuum pipeline, a right-angle elbow 405 is used to facilitate the connection of the vacuum pipeline into the vacuum suction cup 1011, making this section of the vacuum pipeline more durable and less likely to break easily, thus affecting the use of the suction cup.

[0056] Similarly, when the second vacuum suction port 404 is connected to the second manual valve 3012 through a vacuum pipeline, two T-connectors 406 and one right-angle connector 405 are used to take into account the positions of the three second vacuum suction ports. The first T-connector is used at the position where it connects to the first second vacuum suction port, the second T-connector is used at the position where it connects to the second second vacuum suction port, and a right-angle connector is used at the position where it connects to the third vacuum suction port. This arrangement makes the space occupied by the vacuum pipeline smaller and the vacuum pipeline shorter.

[0057] Specifically, in practical use, the second vacuum suction port 404 can also be used to adsorb wafers of a second preset size separately.

[0058] For example, the trolley 102 is connected to the guide rail 103 via four rolling bearings. The two sides of the trolley 102 are the force-bearing side and the driven side, respectively. The two bearings on the force-bearing side of the trolley 102 are both triangular flying saucer bearings, and the guide rail on the side corresponding to the force-bearing side of the trolley 102 has a V-groove structure. The end of the push-pull rod 206 connected to the trolley 102 is the power side of the trolley.

[0059] Specifically, the trolley 102 moves smoothly and uniformly on the guide rail 103. The driven side guide rail has a planar structure, while the force-bearing side guide rail has a V-groove structure. Together with the disc bearing, these features enable motion constraints on the trolley 102.

[0060] Specifically, in actual testing, such as Figure 5 As shown, the sample transfer device for the immersion ultrasonic scanning microscope is housed within a cabinet. The cabinet is divided into upper and lower sections: the upper section houses the sample transfer device, forming a sealed space through side and front / rear doors; the lower section serves as a support frame. The liquid tank is 600mm wide and 1300mm long, made of plexiglass, with inlet and outlet ports and mounting holes for related components machined into its walls. The tank is secured to a crossbeam in the center of the cabinet by four supports. The cabinet structure and dimensions can be adjusted according to actual applications and designed for compatibility with the ultrasonic scanning electron microscope used.

[0061] The aforementioned immersion ultrasonic scanning microscope sample transfer device automates the traditional manual wafer replacement method through a trolley, guide rail, guide rail bracket, and push-pull drive mechanism, improving the efficiency of wafer replacement. Compared with manual wafer replacement, it is less likely to contaminate the liquid in the liquid tank, ensuring the accuracy of subsequent wafer inspection. At the same time, it also makes the maintenance of the immersion ultrasonic scanning microscope sample transfer device simpler.

[0062] Figure 6 This is a schematic flowchart of a control method for a sample transfer device of an immersion ultrasonic scanning microscope according to an embodiment of this application, with reference to... Figure 6 The control method for the sample transfer device of the immersion ultrasonic scanning microscope is described in detail below:

[0063] Step 501: Move the trolley from the low position to the high position on the guide rail using a push-pull drive mechanism.

[0064] Step 502: Control the wafer carrier stage to replace the wafer on the wafer carrier stage with the wafer to be tested.

[0065] Step 503: The trolley is then moved from the high position to the low position of the guide rail by the push-pull drive mechanism, so that the wafer is submerged in the water tank and ready for wafer inspection.

[0066] The above-mentioned control method for the sample transfer device of the immersion ultrasonic scanning microscope automates the traditional manual wafer replacement method, improving the efficiency of wafer replacement. Compared with manual wafer replacement, it is less likely to contaminate the liquid in the liquid tank, ensuring the accuracy of subsequent wafer inspection. At the same time, it also makes the maintenance of the sample transfer device of the immersion ultrasonic scanning microscope simpler.

[0067] To more clearly explain the above control method, the work and specific operations required after wafer inspection include the following steps:

[0068] Step A1, Preparing Working Conditions. Before starting work, open the manual air inlet valve of the compressed air and open the solenoid valve. The compressed air passes through the vacuum generator to create a vacuum, which is then supplied to the vacuum pipeline. The compressed air flowing out of the vacuum generator is reused and passes through the clean gas generator to produce clean gas, providing a positive pressure clean environment above the liquid tank.

[0069] In step A2, the trolley moves from the low position to the high position. The computer control system issues a command to move the support platform to the high position. The stepper motor drives the lead screw to rotate, causing the slider to move along the slide rail. The slider pushes the pull rod. The two ends of the pull rod are connected to the rolling bearings of the slider and the trolley respectively through hinge structures. The pull rod pushes the rolling bearings of the trolley to move upward along the S-shaped guide rail until it reaches the high position. The stepper motor encoder provides feedback signals for controlling speed and position.

[0070] Step A3, wafer retrieval operation at the high position. After the trolley stops at the high position, move the vacuum adsorption release valve to the "release" position. The vacuum release valve connects to the atmosphere, releasing the vacuum in the vacuum groove under the wafer carrier, allowing the wafer retrieval operation to proceed.

[0071] Step A4, wafer placement operation at the high position. First, place the next wafer to be inspected into the corresponding position on the wafer stage. If the wafer size changes, operate the 6-inch wafer vacuum valve and the 8-inch wafer vacuum valve to select the corresponding size (6-inch or 8-inch). If it is a 6-inch wafer, open the 6-inch wafer vacuum valve and close the 8-inch wafer vacuum valve. Vacuum is applied through the center hole of the wafer stage and the connecting cross-shaped and annular grooves, adsorbing the wafer onto the worktable. If it is an 8-inch substrate, simultaneously open both the 6-inch wafer vacuum valve and the 8-inch wafer vacuum valve so that the three external holes on the wafer stage are also connected to vacuum, which, together with the center hole, adsorbs the wafer onto the worktable.

[0072] Step A5: The trolley moves from the high position to the low position. When the control system issues a command for the wafer support platform to move to the low position, the stepper motor drives the lead screw to rotate in the opposite direction, causing the slider to move along the slide bar. The slider pulls the tie rod. The tie rod pulls the rolling bearing of the trolley downwards along the S-shaped guide rail until it reaches the low position. At this point, the stepper motor is braked, causing the wafer to remain submerged in the water and stationary, awaiting detection by the acoustic scanner. The trolley's position can also be set in the computer operating software, with position feedback provided by the stepper motor encoder.

[0073] Step A6: Complete the ultrasonic scanning inspection at the low position. After the inspection is completed, repeat step 1 until all wafers have been inspected, then close the air intake solenoid valve.

[0074] Steps A1 to A6 complete one full process. If the test is complete and no further testing of the next wafer is required, the compressed air intake valve needs to be manually closed.

[0075] It should be understood that the sequence number of each step in the above embodiments does not imply the order of execution. The execution order of each process should be determined by its function and internal logic, and should not constitute any limitation on the implementation process of the embodiments of this application.

[0076] The above-described embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application, and should all be included within the protection scope of this application.

Claims

1. A sample transfer device for a water immersion ultrasonic scanning microscope, comprising: Plate receiving stage, trolley, guide rail, guide rail bracket, push-pull drive mechanism, liquid tank and base plate; The base plate is disposed on the bottom wall of the liquid tank, the guide rail bracket is disposed on the base plate, the guide rail is disposed on the guide rail bracket, the trolley is disposed on the guide rail, and the plate support is disposed on the trolley; the two ends of the guide rail are at different heights, and the lower end of the guide rail is lower than a preset height, the preset height being the liquid level height of the liquid in the liquid tank; the plate support is provided with a vacuum suction cup and a vacuum air circuit system; The push-pull drive mechanism is disposed on the bottom plate of the liquid tank and connected to the trolley. The push-pull drive mechanism can control the trolley to move between the two ends of the guide rail. The push-pull drive mechanism includes: a lead screw, a slide bar, a slider, a first support, a second support, and a push-pull rod. The guide rail includes a force-bearing side guide rail and a driven side guide rail. The force-bearing side guide rail and the driven side guide rail are arranged in parallel on both sides of the liquid tank. The two guide rails have the same shape and are located on the same horizontal plane. The two ends of the plate support are slidably arranged in the tracks of the two guide rails. The push-pull drive mechanism is connected to one end of the trolley in the force-bearing side guide rail. The guide rail includes a first rail, a second rail, and a third rail. The first rail is a horizontal rail located at the bottom, the third rail is a horizontal rail located at the top, and the second rail is located between the first rail and the third rail. The second track is S-shaped, smoothly connecting the first track and the second track. The portion of the second track near the first track is concave, and the portion of the second track near the third track is convex.

2. The sample transfer device for an immersion ultrasonic scanning microscope as described in claim 1, characterized in that, The first support and the second support are mounted on the base plate and located outside the guide rail; The lead screw and the slide bar are arranged in parallel between the first support and the second support. One end of the lead screw passes through the second support and is connected to the motor. The slider is sleeved on the lead screw and the slide bar, and the slider is threadedly connected to the lead screw. One end of the push-pull rod is connected to the side of the slider near the first support, and the other end is connected to the trolley; The motor drives the lead screw to rotate, causing the slider to move on the slide rod.

3. The sample transfer device for an immersion ultrasonic scanning microscope as described in claim 2, characterized in that, Limit screws are provided on the first support and the second support. The limit screws are located at the lower part of the lead screw and the slide rod. When the slider moves close to the first support or the second support, the slider abuts against the limit screw.

4. The sample transfer device for an immersion ultrasonic scanning microscope as described in claim 1, characterized in that, The vacuum chuck is used to pick up the wafer; The vacuum air circuit system is used to connect with the vacuum suction cup to provide a vacuum environment for the vacuum suction cup; The vacuum circuit system includes a manual valve, a solenoid valve, a vacuum generator, a gas purifier, and a vacuum pipeline. The vacuum generator is connected to the solenoid valve, the manual valve, and the gas purifier through the vacuum pipeline. The manual valve is connected to the vacuum suction cup through the vacuum pipeline. The solenoid valve is used to open the vacuum pipeline between the vacuum generator and the compressed air, allowing compressed air to enter the vacuum generator to form a vacuum. The manual valve opens or closes the vacuum pipeline between the vacuum generator and the vacuum suction cup. The gas purifier is used to clean the gas in the vacuum generator and output clean gas.

5. The sample transfer device for an immersion ultrasonic scanning microscope as described in claim 4, characterized in that, The vacuum circuit system also includes a vacuum release valve; the vacuum release valve is connected to the vacuum generator and is used to open or close the pipeline between the vacuum generator and the manual valve.

6. The sample transfer device for an immersion ultrasonic scanning microscope as described in claim 4, characterized in that, The vacuum suction cup is provided with a first vacuum suction hole, a cross-shaped groove, an annular groove and a second vacuum suction hole in the middle. The cross-shaped groove and the annular groove are connected. The first vacuum suction hole is located in the cross-shaped groove and / or the annular groove. The second vacuum suction hole is evenly distributed outside the annular groove. The first vacuum suction port, the cross-shaped groove, and the annular groove are used together to adsorb a wafer of a first preset size. The first vacuum suction port is connected to the manual valve. The first vacuum suction port, the cross-shaped groove, the annular groove, and the second vacuum suction port are used together to adsorb wafers of a second preset size. The second vacuum suction port is connected to the manual valve. The second preset size is larger than the first preset size.

7. The sample transfer device for an immersion ultrasonic scanning microscope as described in claim 1, characterized in that, The trolley is connected to the guide rail via four rolling bearings. The two sides of the trolley are the force-bearing side and the driven side, respectively. The two bearings on the force-bearing side of the trolley are triangular flying saucer bearings, and the guide rail on the side corresponding to the force-bearing side of the trolley has a V-groove structure.

8. A control method for a sample transport device of a water immersion ultrasonic scanning microscope, characterized in that, The method is applied to the sample transfer device for the immersion ultrasonic scanning microscope according to any one of claims 1-7; the method includes: The trolley is moved from the low position to the high position on the guide rail by a push-pull drive mechanism; The control stage replaces the wafers on the stage with the wafers to be tested; Then, the push-pull drive mechanism moves the trolley from the high position of the guide rail to the low position, so that the wafer is submerged in the water tank and ready for inspection.

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