Resonant Ring High-Power Aging System and Method with Dual-Port Input

Abstract

The present invention relates to a high-power aging system and method for a resonant ring with dual-port input. The system includes a high-power directional coupler, first to second power amplifiers, a low-level control and measurement system, and a high-power transmission line. The input end and the through end of the high-power directional coupler are used as input ports to input power into the resonant ring. The input end and the through end of the high-power directional coupler are respectively connected to the first power amplifier and the second power amplifier. The low-level control and measurement system is connected to the first power amplifier and the second power amplifier to control the output power and / or the output phase difference. By controlling the output phase difference between the first power amplifier and the second power amplifier, the movement of the electromagnetic field standing wave antinode in the resonant ring is realized, so that different positions of the device under test to be aged can be aged by the antinode of the resonant field. The structure of the present invention is simple and reliable, and the operation is easy, and it can be widely applied to the aging of high-power input couplers or dielectric windows.

Description

Technical Field

[0001] The present invention relates to a high-power aging system and method for a resonant ring with dual-port input, and pertains to the field of microwave electro-vacuum devices. Background Art

[0002] In the field of microwave electro-vacuum devices, high-power input couplers or dielectric windows are usually used to transmit power in high-power systems and isolate the vacuum. Before the formal use of high-power input couplers or dielectric windows, high-power aging is required to improve the actual operation stability.

[0003] Existing high-power aging methods for input couplers or dielectric windows are traveling-wave aging and standing-wave resonance aging. To reduce the power required for off-line aging, a traveling-wave resonant ring or standing-wave resonance with single-end input is usually adopted. However, the equivalent power gain of the traveling-wave resonant ring with single-end input is low, and the gain is generally only about 20 times. Although the standing-wave resonance aging method has a high gain, the movable short-circuit plate structure in this method is complex and has poor high-power bearing capacity, resulting in poor stability of standing-wave resonance aging.

[0004] In summary, for the high-power aging of high-power input couplers or dielectric windows, there is a lack of an aging method with a very high equivalent power gain and a simple and reliable structure. Summary of the Invention

[0005] The present invention aims to solve at least one of the technical problems existing in the prior art. For this purpose, in view of the above problems, the object of the present invention is to provide a high-power aging system and method for a resonant ring with dual-port input, which can greatly improve the equivalent power gain of the aging of high-power input couplers or dielectric windows, thereby significantly reducing the power required for aging.

[0006] To achieve the above object of the invention, the technical solution of the present invention is as follows:

[0007] In a first aspect, the present invention provides a high-power aging system for a resonant ring with dual-port input, the system includes a high-power directional coupler, a first to second power amplifier, a low-level control and measurement system, and a high-power transmission line; the input end and the through end of the high-power directional coupler are used as input ports to input power into the resonant ring, and the input end and the through end of the high-power directional coupler are respectively connected to the first power amplifier and the second power amplifier; the low-level control and measurement system is connected to the first power amplifier and the second power amplifier to control the output power and / or the output phase difference, and realizes the movement of the electromagnetic field standing-wave belly in the resonant ring by controlling the output phase difference of the first power amplifier and the second power amplifier, so that different positions of the device under test to be aged can be aged by the belly of the resonant field.

[0008] Furthermore, the system also includes first and second directional couplers for measurement, the input end and the through end of the high-power directional coupler are connected to the first power amplifier and the second power amplifier through the first directional coupler for measurement and the second directional coupler for measurement, respectively, and the low-level control measurement system measures the output power of the two power source amplifiers through the first directional coupler for measurement and the second directional coupler for measurement.

[0009] Furthermore, the system also includes a high-power transmission line and a third directional coupler for measurement. The coupling end and the isolation end of the high-power directional coupler are respectively used to connect the device under test through the high-power transmission line and the third directional coupler for measurement to form a resonant ring. The low-level control measurement system realizes power measurement in the resonant ring through the third directional coupler for measurement.

[0010] Furthermore, the first power amplifier and the second power amplifier each include a circulator and an absorbing load.

[0011] Furthermore, the high-power directional coupler adopts a coaxial or waveguide directional coupler.

[0012] Furthermore, it also includes a vacuum system, which is used for vacuum acquisition of the device under test and vacuum protection during the aging process.

[0013] In a second aspect, the present invention further provides a burn-in method for a resonant ring high-power burn-in system based on dual-port input, comprising:

[0014] Construct a resonant ring;

[0015] Perform conditioning on the device under test located in the resonant ring, including:

[0016] Power is input into the resonant ring through the input end and the through end of the high-power directional coupler as input ports. The power input into the two ports is equal in magnitude and opposite in direction, and is superimposed to form a standing wave. The output power of the first power amplifier and the second power amplifier is gradually increased through a low-level control and measurement system, and the standing wave electromagnetic field strength in the resonant ring is changed to perform conditioning on the device under test. After completing the conditioning of one position, the output phase of the first power amplifier is kept unchanged, and the phase of the second power amplifier is adjusted using a low-level control and measurement system to move the position of the antinode of the standing wave field, and the conditioning process is repeated to complete the conditioning of the next position. In this way, the position of the antinode of the resonant field is gradually adjusted, so that all positions of the device under test are tempered by the antinode of the resonant field.

[0017] Further, it also includes the steps of preliminary preparation of the device under test, specifically: before aging, the device under test needs to be ultrasonically cleaned, purged with high-purity nitrogen, dried, assembled, vacuum leak-tested, and vacuum baked for degassing in a clean room, and / or: after the resonant loop is formed, it is connected to a vacuum system, and the device under test that needs to be evacuated is evacuated and baked at low temperature.

[0018] Further, constructing the resonant loop includes: measuring the waveguide lengths from the ports of the high-power directional coupler to the third measurement directional coupler and the loop of the device under test, and determining the length of the high-power transmission line according to the aging frequency and the type of transmission line, so that the length of the entire resonant loop is an integer multiple of the waveguide wavelength.

[0019] Further, use the low-level control measurement system to adjust the phase of the second power amplifier to move the position of the standing wave field wave belly, specifically: by maximally adjusting the phase of the second power amplifier by 180°, the wave belly is moved by half a waveguide wavelength.

[0020] Due to the above technical solutions adopted by the present invention, it has the following characteristics:

[0021] 1. The present invention overcomes the characteristic of low equivalent power gain of the single-port input traveling wave resonant loop scheme. By using a high-power directional coupler, two power amplifiers containing circulators and absorption loads, a high-power transmission line, and a low-level control measurement system, it can realize the characteristic of forming a standing wave in the resonant loop with dual-port input, and the equivalent power gain is four times that of the traditional single-port resonant loop scheme, thus being able to reduce the power required for aging.

[0022] 2. Compared with the existing high-power input coupler or dielectric window standing wave resonance aging scheme, the present invention can realize the movement of the standing wave belly in the resonant loop and the characteristic of having no movable shorting plate through the low-level control measurement system, and can avoid using a high-power movable shorting structure with a complex structure, thereby significantly improving the stability of the aging system.

[0023] In summary, the structure of the present invention is simple and reliable, and the operation is easy, and it can be widely applied to the aging of high-power input couplers or dielectric windows. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] By reading the following detailed description of the preferred embodiments, various other advantages and benefits will become clear to those of ordinary skill in the art. The drawings are only for the purpose of showing the preferred embodiments and are not considered to be a limitation of the present invention. Throughout the drawings, the same reference numerals are used to represent the same components. In the drawings:

[0025] Figure 1 It is a schematic diagram of the resonant loop of the embodiment of the present invention.

[0026] Figure 2Schematic diagram of the principle of the burn-in method for a dual-port input resonant loop according to an embodiment of the present invention.

[0027] Figure 3 Schematic diagram of the principle of power distribution, accumulation, and superposition of the burn-in method for a dual-port input resonant loop according to an embodiment of the present invention.

[0028] Figure 4 (a) and (b) are schematic diagrams of the high-power directional coupler structure of the dual-port input resonant loop according to an embodiment of the present invention, including a coaxial type and a waveguide type. Detailed implementation manners

[0029] It should be understood that the terms used herein are for the purpose of describing specific example embodiments only and are not intended to be limiting. Unless the context clearly dictates otherwise, the singular forms "a", "an", and "the" as used herein may also include the plural forms. The terms "comprising", "including", "containing", and "having" are inclusive and thus specify the presence of the stated features, steps, operations, elements, and / or components, but do not preclude the presence or addition of one or more other features, steps, operations, elements, components, and / or combinations thereof. The method steps, processes, and operations described herein are not to be construed as necessarily requiring them to be performed in the particular order described or illustrated, unless the order of performance is explicitly stated. It should also be understood that additional or alternative steps may be used.

[0030] Although the terms first, second, third, etc. may be used herein to describe multiple elements, components, regions, layers, and / or sections, these elements, components, regions, layers, and / or sections should not be limited by these terms. These terms may be used only to distinguish one element, component, region, layer, or section from another. Unless the context clearly indicates otherwise, terms such as "first", "second", and other numerical terms do not imply an order or sequence when used herein. Thus, the first element, component, region, layer, or section discussed below may be referred to as the second element, component, region, layer, or section without departing from the teachings of the example embodiments.

[0031] For ease of description, spatial relative relationship terms may be used herein to describe the relationship of one element or feature shown in the figure to another element or feature, such as "inside", "outside", "inner side", "outer side", "below", "above", etc. Such spatial relative relationship terms are intended to include different orientations of the device in use or operation in addition to the orientation depicted in the figure.

[0032] Due to the lack of an aging method with a very high equivalent power gain and a simple and reliable structure for the existing high-power input couplers or dielectric windows, the present invention provides a high-power aging system and method for a resonant ring with dual-port input, including a high-power directional coupler, a power amplifier containing a circulator and an absorption load, a high-power transmission line, a directional coupler for measurement, and a low-level control and measurement system, etc. Therefore, compared with the existing aging scheme of a single-port input resonant ring for high-power input couplers or dielectric windows, the dual-port input forms a standing wave, which can greatly improve the equivalent power gain and thus significantly reduce the power required for aging. The present invention feeds power into the resonant ring from the input end of the high-power directional coupler and also feeds power into the resonant ring from the through end of the high-power directional coupler. In this way, the traveling waves coupled into the resonant ring from the two ports propagate in opposite directions and have equal amplitudes, forming a standing wave in the resonant ring. However, since the distribution of the standing wave in space is determined, not every point of the device under test can experience the aging at the wave crest. In this case, it is necessary to artificially move the wave belly of the standing wave so that every point of the device under test can experience the aging at the wave crest. Theoretically, as long as the wave belly can be moved by a distance of half a wavelength, which also corresponds to a standing wave phase of 180°, it can be ensured that every point of the device under test can experience the aging at the wave crest. Since the present invention can conveniently control the input phase difference between the two ports through the low-level control system to move the standing wave phase, it can achieve a higher power gain than the single-port input and can also meet the requirement that every point of the device under test experiences the aging at the wave crest.

[0033] Exemplary embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. Although the exemplary embodiments of the present invention are shown in the drawings, it should be understood that the present invention can be implemented in various forms and should not be limited by the embodiments set forth herein. On the contrary, these embodiments are provided so that the present invention can be more thoroughly understood and the scope of the present invention can be completely conveyed to those skilled in the art.

[0034] Explanations of the professional technical terms in the embodiments of the present invention are as follows:

[0035] Traveling wave: If the relative amplitudes at different points in the field change, the wave is called a traveling wave.

[0036] Standing wave: If the relative oscillation amplitudes at different points in the field remain constant, the wave oscillates in time but the distribution of its peak amplitude does not move with space, the wave is called a standing wave. The position with the minimum amplitude is called a node, and the position with the maximum amplitude is called an antinode.

[0037] Traveling-wave resonant ring: As Figure 1 shown, when the circumference of the resonant ring is an integer multiple of the guided wavelength, the electromagnetic field in the resonant ring exists in the form of a traveling wave.

[0038] Embodiment 1: The high-power aging system with double-port input for a high-power input coupler or a dielectric window provided in this embodiment includes a high-power directional coupler, a measurement directional coupler, a power amplifier, a low-level control measurement system, and a high-power transmission line.

[0039] As Figure 2 shown, the input end (port a) and the through end (port b) of the high-power directional coupler 1 are used as input ports to input power into the resonant ring, and the power accumulates and superposes within the resonant ring to form a standing-wave electromagnetic field. The input end and the through end of the high-power directional coupler 1 are respectively connected to the power amplifier 4 and the power amplifier 5 through the measurement directional coupler 2 and the measurement directional coupler 3. The low-level control measurement system 6 measures the output power and phase of the two power source amplifiers respectively through the measurement directional coupler 2 and the measurement directional coupler 3, controls the output power of the power source amplifiers 4 and 5, changes the intensity of the standing-wave electromagnetic field within the resonant ring, and realizes the movement of the standing-wave wave belly within the resonant ring by controlling the output phase difference between the two power source amplifiers, so as to achieve the goal that the device under test can be completely covered by the standing-wave wave belly.

[0040] The coupled end (port c) and the isolated end (port d) of the high-power directional coupler 1 are respectively connected to the device under test 9 through the high-power transmission line 7 and the measurement directional coupler 8 to form a resonant ring. The low-level control measurement system 6 is used to measure the power within the resonant ring through the measurement directional coupler 8, and determine the output power of the two power amplifiers required according to the target aging power of the device under test 9.

[0041] Furthermore, both the power amplifier 4 and the power amplifier 5 include a circulator 41(51) and an absorption load 42(52), which provide input power for the resonant ring and absorb the power coming from the opposite direction.

[0042] The high-power directional coupler 1 is completely symmetric. When power is fed from the through end, a part of the power will be absorbed by the dummy load of the first power amplifier 4 through the input end, and the other part will enter the resonant ring through the isolated end of the high-power directional coupler 1. When the circumference of the resonant ring is an integer multiple of the guided wavelength, the electromagnetic field within the resonant ring exists in a traveling-wave state. Therefore, any point of the device under test can experience the aging of the wave peak. Only at this time, the traveling wave has the opposite propagation direction and the same amplitude as the traveling wave entering from the input end.

[0043] As Figure 3 shown, when the circumference L of the resonant ring is the guided wavelength λ gWhen it is an integer multiple N, part of the power input from the input port is absorbed by the dummy load 52 of the power amplifier 5 through the through port via the circulator 51, and the other part is coupled into the resonant ring. The power entering the resonant ring accumulates continuously, causing the standing wave electric field intensity in the loop to increase continuously, thereby obtaining a very high equivalent power gain. Similarly, part of the power input from the through port is absorbed by the dummy load 42 of the power amplifier 4 through the input port via the circulator 41, and the other part is coupled into the resonant ring. The power entering the resonant ring accumulates continuously, causing the standing wave electric field intensity in the loop to increase continuously, thereby obtaining a high equivalent power gain. The power coupled into the resonant ring from the input port and the through port is equal in magnitude and opposite in direction, and the two are superimposed to form a standing wave. Therefore, the equivalent power gain of the double-port input resonant ring is four times that of the single-port input resonant ring. In this embodiment, by changing the input phase difference between the two power amplifiers, the movement of the standing wave antinode can be achieved, so that different positions of the high-power input coupler or dielectric window to be aged can be aged by the antinode of the resonant field.

[0044] In a preferred embodiment of the present invention, as Figure 4 shown, the high-power directional coupler 1 includes a directional coupler in two structures of coaxial or waveguide. As Figure 4 (a) is a coaxial feed tube type high-power directional coupler, Figure 4 (b) is a rectangular waveguide type high-power directional coupler.

[0045] In a preferred embodiment of the present invention, the low-level control measurement system 6 can control the input amplitude and phase of the two power amplifiers, lock the amplitude and phase difference between the two, and adjust the frequency through the signal source to make the equivalent power gain in the loop maximum to track the resonant state of the resonant ring. It can also implement the execution of ARC protection, vacuum protection of the device under test, and power measurement, etc.

[0046] In a preferred embodiment of the present invention, the high-power transmission line 7 is a component of the resonant ring. The main function of the high-power transmission line 7 is power transmission. The high-power transmission line 7 can be a coaxial rigid feed tube. The high-power transmission line 7 has two ports. The connection method of the outer conductor can be flange connection or clamp connection, and the inner conductor is connected through a ferrule.

[0047] In a preferred embodiment of the present invention, the measurement directional coupler is used for monitoring the power in the two input ends and the resonant ring, facilitating power measurement and low-level control. The input end and the through end of the measurement directional coupler are connected to the main transmission line, and the coupled end and the isolation end of the measurement directional coupler are used to monitor the forward power and the reflected power in the main line.

[0048] In a preferred embodiment of the present invention, a vacuum system 10 is further included. The vacuum system 10 is used for vacuum acquisition of the device under test 9 and vacuum protection during the aging process. Further, the vacuum system 10 may be a vacuum pump group capable of providing vacuum for the device under test.

[0049] In a preferred embodiment of the present invention, the device under test 9 may be a high-power input coupler or a dielectric window.

[0050] Embodiment 2: The present invention also provides a dual-port input resonant loop aging method for a high-power input coupler or a dielectric window, including:

[0051] S1. Preliminary preparation of the device under test

[0052] Specifically, the high-power input coupler or dielectric window to be tested needs to be ultrasonically cleaned, purged with high-purity nitrogen, dried, assembled, vacuum leak-tested, and vacuum baked at 120 °C for outgassing in a clean room before aging, so as to reduce the surface contamination of the device under test and reduce the high-power aging time.

[0053] S2. Construct the resonant loop

[0054] Specifically, use a vector network analyzer to measure the waveguide length from the port of the high-power directional coupler to the loop of the measurement directional coupler 8 and the device under test 9. According to the aging frequency and the type of transmission line, determine the length of the high-power transmission line 7 so that the length of the entire resonant loop is an integer multiple of the waveguide wavelength.

[0055] After the resonant loop is formed, connect the vacuum pump group, and evacuate and bake the device under test that needs to be evacuated at low temperature, so as to reduce the breakdown electric field of the device under test and shorten the aging time.

[0056] S4. Measure the microwave characteristics of the resonant loop

[0057] Specifically, connect the through port of the high-power directional coupler to a 50-ohm load terminal. Use a two-port vector network analyzer. Connect port 1 of the network analyzer to the input port of the high-power directional coupler, and connect port 2 of the vector network analyzer to the coupling end of the resonant loop measurement directional coupler 3 to measure the characteristics of the traveling-wave resonant loop, including the resonant frequency, loaded quality factor, and equivalent power gain of the resonant loop.

[0058] S5. Build and age the dual-port power input system

[0059] Specifically, after the traveling-wave resonant ring is built, a two-port input assembly is carried out. A test directional coupler and a power source amplifier with a circulator and an absorption load are respectively connected to the input end and the through end of the high-power directional coupler 1. The measurement directional coupler 2 and the measurement directional coupler coupler 3 connected to the high-power directional coupler 1 extract signals. The amplitude and phase difference of the two input power source amplifiers are controlled by the low-level control measurement system 6, and the output power of the power amplifier can be gradually increased to age the high-power input coupler or the dielectric window.

[0060] Furthermore, the forward and reverse powers in the resonant ring are measured by the test directional coupler 7 in the ring through the low-level control measurement system 6. The maximum threshold of the forward power of the applied power source should be limited by ensuring the safety of the dielectric window in the measured dielectric window or high-power input coupler. Therefore, when implementing the present invention, a temperature measurement device and a spark detection device need to be installed near the high-power input coupler or the dielectric window to ensure the safety of the dielectric window.

[0061] S6. After aging at one position is completed, keep the output phase of the power amplifier 4 unchanged, and use the low-level control measurement system 6 to adjust the phase of the power amplifier 5 to move the position of the standing-wave field wave belly. Repeat the above process to complete the aging at the next position, and so on, gradually adjust the position of the resonant field wave belly. By changing the phase of the power amplifier 5 by a maximum of 180 degrees, the wave belly moves half a guided wavelength, ensuring that all parts of the high-power input coupler or the dielectric window are aged by the standing-wave field wave belly.

[0062] In summary, compared with the existing method of aging the single-port input resonant ring of the coupler or the dielectric window, the present invention can significantly improve the power gain, and the gain is 4 times that of the single-port input resonant ring, thus significantly reducing the power required for aging. Compared with the existing standing-wave resonance aging scheme of the coupler or the dielectric window, it can avoid using a high-power movable short-circuit structure with a complex structure, and realizes the movement of the standing-wave phase through the low-level control measurement system 6, thereby significantly improving the stability of the aging system. Therefore, the two-port input standing-wave resonance aging scheme of the present invention has a simple structure and a significant power gain, and can be practically applied in related fields.

[0063] Each embodiment in this specification is described in a progressive manner. For the same or similar parts among the embodiments, reference can be made to each other, and the key point of each embodiment is to illustrate the differences from other embodiments. In the description of this specification, the descriptions with reference to terms such as "a preferred embodiment", "furthermore", "specifically", "in this embodiment", etc. mean that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the embodiments of this specification. In this specification, the schematic expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in a suitable manner in any one or more embodiments or examples. In addition, without contradiction, those skilled in the art can combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples.

[0064] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements for some of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A high-power aging system for a resonant ring with dual-port input, characterized in that The system includes a high-power directional coupler, first to second power amplifiers, a low-level control measurement system, and a high-power transmission line; The input end and the through end of the high-power directional coupler are used as input ports to input power into the resonant ring. The input end and the through end of the high-power directional coupler are respectively connected to the first power amplifier and the second power amplifier; The low-level control measurement system is connected to the first power amplifier and the second power amplifier to control the output power and / or the output phase difference. By controlling the output phase difference between the first power amplifier and the second power amplifier, the movement of the electromagnetic field standing wave antinode in the resonant ring is realized, so that different positions of the device under test to be aged can be aged by the antinode of the resonant field; The system further includes first to second measurement directional couplers. The input end and the through end of the high-power directional coupler are respectively connected to the first power amplifier and the second power amplifier through the first measurement directional coupler and the second measurement directional coupler. The low-level control measurement system measures the output powers of the two power source amplifiers through the first measurement directional coupler and the second measurement directional coupler respectively; The system further includes a high-power transmission line and a third measurement directional coupler. The coupled end and the isolated end of the high-power directional coupler are respectively used to connect the device under test through the high-power transmission line and the third measurement directional coupler to form a resonant ring. The low-level control measurement system realizes the power measurement in the resonant ring through the third measurement directional coupler.

2. The high-power aging system of the resonant ring with dual-port input according to claim 1, wherein Both the first power amplifier and the second power amplifier include a circulator and an absorption load.

3. The resonant ring high-power aging system with dual-port input according to claim 1, characterized in that The high-power directional coupler adopts a coaxial or waveguide directional coupler.

4. The resonant ring high-power aging system with dual-port input according to claim 1, characterized in that It further includes a vacuum system, which is used for vacuum acquisition of the device under test and vacuum protection during the aging process.

5. A aging method for a high-power aging system of a resonant ring with dual-port input according to any one of claims 1 to 4, characterized in that It includes: Construct a resonant ring; Age the device under test located in the resonant ring, including: Input power into the resonant ring through the input end and the through end of the high-power directional coupler as input ports. The powers input by the two ports are equal in magnitude and opposite in direction, and are superimposed to form a standing wave; Gradually increase the output powers of the first power amplifier and the second power amplifier through the low-level control measurement system, and change the intensity of the standing wave electromagnetic field in the resonant ring to age the device under test; After aging at one position is completed, keep the output phase of the first power amplifier unchanged, and use the low-level control measurement system to adjust the phase of the second power amplifier to move the position of the standing wave field antinode, repeat the aging process, complete the aging at the next position, and so on, gradually adjust the position of the resonant field antinode, so that all positions of the device under test are aged by the antinode of the resonant field.

6. The sophistication method according to claim 5, characterized in that, It includes: It further includes the steps of preliminary preparation of the device under test, specifically: Before aging, the device under test needs to be ultrasonically cleaned, purged with high-purity nitrogen, dried, assembled, vacuum leak detected, and vacuum baked to remove gas in a clean room, and / or: After the resonant ring is formed, connect the vacuum system, and evacuate and perform low-temperature baking on the device under test that needs to be evacuated.

7. The sophistication method according to claim 5 or 6, characterized in that, Construct a resonant ring, including: Measure the waveguide length from the port of the high-power directional coupler to the third directional coupler for measurement and the loop of the device under test. According to the burn-in frequency and the type of transmission line, determine the length of the high-power transmission line so that the length of the entire resonant loop is an integer multiple of the waveguide wavelength.

8. The sophistication method according to claim 5 or 6, characterized in that, Use the low-level control measurement system to adjust the phase of the second power amplifier to move the position of the standing wave field antinode. Specifically: by maximally adjusting the phase of the second power amplifier by 180°, the antinode is moved by half a waveguide wavelength.

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