A manufacturing method of a suction cup workbench and a substrate thinning device

Abstract

The present invention discloses a method for manufacturing a suction cup workbench and a substrate thinning device. The method for manufacturing the suction cup workbench comprises: rotating the suction cup workbench to be installed toward the side of a thinning base; using the bolt holes on the base close to the side of the thinning base as reference positions, and determining the bolt installation sequence of the suction cup assembly with reference to the reference positions; controlling the rotation of the base according to the bolt installation sequence so that the bolt holes corresponding to the base are rotated in sequence to be close to the side of the thinning base; and installing the bolts in sequence to fix the suction cup assembly to the base.

Description

Technical Field

[0001] The present invention belongs to the technical field of substrate processing, and in particular relates to a manufacturing method of a suction cup workbench and a substrate thinning device. Background Art

[0002] During the back-end manufacturing stage of integrated circuit / semiconductor (IC) manufacturing, the backside of the substrate needs to be thinned before subsequent packaging in order to reduce the package mounting height, reduce the chip package volume, improve the chip's thermal diffusion efficiency, electrical performance, and mechanical properties, and reduce the chip processing workload. After backside thinning, the chip thickness can even be reduced to less than 5% of the initial thickness.

[0003] In substrate thinning equipment, the chuck table is one of the key components, which is responsible for carrying the substrate and ensuring thinning (grinding) accuracy.

[0004] The installation accuracy of the suction cup workbench, especially the installation accuracy of the suction cup assembly, plays a vital role in achieving the overall grinding effect. The suction cup workbench here refers to the porous ceramic suction cup and its corresponding mounting base.

[0005] As a consumable part, the suction cup assembly needs to be replaced after a certain period of use; on the other hand, when maintenance is required, the installation and disassembly of the suction cup assembly will also be involved.

[0006] The assembly and disassembly of the suction cup assembly at the manufacturing site has limited working space, which affects the working efficiency. In addition, due to the different experience and knowledge accumulation of operators, the corresponding working methods are different when installing the suction cup assembly, which will affect the consistency of the suction cup workbench processing and manufacturing, and to a certain extent affect the installation efficiency and quality of the suction cup assembly, thereby affecting the overall operation of the suction cup workbench and the processing quality of the substrate. Summary of the Invention

[0007] The embodiments of the present invention provide a method for manufacturing a suction cup workbench and a substrate thinning device, aiming to solve at least one of the technical problems existing in the prior art.

[0008] A first aspect of an embodiment of the present invention provides a method for manufacturing a suction cup workbench, comprising:

[0009] S1, rotating the suction cup workbench to be installed toward the side of the thinning base;

[0010] S2, using the bolt holes on the pedestal near the side of the thinned base as reference positions, and determining the bolt installation order of the suction cup assembly with reference to the reference positions;

[0011] S3, controlling the rotation of the pedestal according to the bolt installation sequence so that the bolt holes corresponding to the pedestal are rotated in sequence to be close to the side of the thinned base;

[0012] S4, installing bolts in sequence to fix the suction cup assembly to the base.

[0013] In some embodiments, determining the bolt installation sequence includes:

[0014] S21, using the threaded hole on the pedestal closest to the side of the thinned base as the first bolt hole;

[0015] S22, taking the first bolt hole as a reference, determine the positions of the threaded holes with odd installation numbers in a clockwise or counterclockwise direction, one bolt hole at a time.

[0016] In some embodiments, determining the bolt installation sequence further includes:

[0017] S210, determining a center line passing through the center of the pedestal using the first bolt hole and the third threaded hole as a reference;

[0018] S220, the bolt hole whose center is located on the center line and far away from the first bolt hole and the third bolt hole is the second bolt hole;

[0019] S230 , using the second bolt hole as a reference, determine the positions of the bolt holes with even-numbered installation numbers in a clockwise or counterclockwise direction, one bolt hole at a time.

[0020] In some embodiments, the direction of confirming that the bolt holes correspond to odd-numbered installation numbers is the same as the direction of confirming that the bolt holes correspond to even-numbered installation numbers.

[0021] In some embodiments, the bolt installation torque is increased step by step to a set torque according to the bolt installation sequence.

[0022] In some embodiments, the torque of the mounting bolt is applied three times, at 30-50%, 60-80%, and 100% of the set torque.

[0023] A second aspect of an embodiment of the present invention provides a substrate thinning device, comprising:

[0024] Thinning the base;

[0025] A turntable is provided above the thinning base, wherein a plurality of suction cup workstations are spaced apart from each other on the turntable, and the suction cup workstations include a base and a suction cup assembly detachably mounted above the base;

[0026] A grinding module is provided on the side of the thinning base and located above the suction cup workbench;

[0027] When the suction cup assembly is installed or removed, the base rotates intermittently according to the manufacturing method of the suction cup workbench described above, and the operator installs or removes the bolts according to the set sequence to achieve the installation or removal of the suction cup assembly.

[0028] In some embodiments, the substrate thinning apparatus further comprises an installation monitoring component disposed on one side of the turntable, and the installation monitoring component displays the installation sequence of the bolts in a projection manner.

[0029] In some embodiments, the installation monitoring assembly includes a projection device that can rotate synchronously with the pedestal and project characters showing the installation sequence toward the bolt holes corresponding to the pedestal.

[0030] A third aspect of an embodiment of the present invention provides an integrated grinding and polishing device, comprising:

[0031] A front-end module for the equipment, used for enabling the entry and exit of substrates, and arranged at the front end of the integrated grinding and polishing equipment;

[0032] The substrate thinning device described above is used to thin the substrate;

[0033] and a polishing module, which is arranged between the equipment front-end module and the substrate thinning equipment and is used to perform chemical mechanical polishing on the thinned substrate.

[0034] A fourth aspect of an embodiment of the present invention provides a control device, comprising:

[0035] at least one processor; and

[0036] at least one memory having a computer program stored thereon;

[0037] When the computer program is executed by the at least one processor, the at least one processor is caused to perform the method for manufacturing the suction cup workbench according to the above description.

[0038] A fifth aspect of an embodiment of the present invention provides a computer-readable storage medium having a computer program stored thereon. When the computer program is executed by a processor, the processor is caused to execute the method for manufacturing the suction cup workbench as described above.

[0039] The beneficial effects of the present invention include:

[0040] a. During the assembly and manufacturing of the suction cup workbench, the bolts are fixed in a specific order to effectively enhance the fit between the suction cup assembly and the base and ensure the flatness of the top surface of the suction cup workbench;

[0041] b. The bolts connecting the suction cup assembly and the base are fixed in groups of three, forming an isosceles triangle. The center line of the isosceles triangle passes through the center point of the suction cup workbench. This allows the position and posture of the suction cup assembly to be adjusted during the assembly process to ensure the assembly quality of the suction cup workbench.

[0042] c. The substrate thinning equipment provided also includes an installation monitoring component, which displays the installation sequence of the bolts through projection to facilitate the operator to check and confirm the accuracy of the bolt installation during the operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0043] The advantages of the present invention will become clearer and easier to understand through the detailed description made in conjunction with the following drawings, which are only exemplary and do not limit the scope of protection of the present invention, wherein:

[0044] Figure 1 This is a flow chart of a method for manufacturing a suction cup workbench provided by one embodiment of the present invention;

[0045] Figure 2 is a schematic diagram of a substrate thinning apparatus provided by one embodiment of the present invention;

[0046] Figure 3 is a schematic diagram of a suction cup workbench provided in one embodiment of the present invention;

[0047] Figure 4 This is a flow chart for determining a bolt installation sequence provided by an embodiment of the present invention;

[0048] Figure 5 This is a sequence diagram for installing bolt holes with odd numbers provided by one embodiment of the present invention;

[0049] Figure 6 is a flow chart for determining a bolt installation sequence provided by another embodiment of the present invention;

[0050] Figure 7 is a schematic diagram of determining the position of the second bolt hole provided by an embodiment of the present invention;

[0051] Figure 8 yes Figure 5 The sequence diagram of installing the bolt holes with even numbers in the embodiment shown;

[0052] Figure 9 yes Figure 8 Schematic diagram of a triangle formed by a group of three bolt holes in an embodiment;

[0053] Figure 10 is a sequence diagram for installing bolt holes with odd numbers provided by yet another embodiment of the present invention;

[0054] Figure 11 yes Figure 10 Schematic diagram of the bolt installation sequence in the embodiment;

[0055] Figure 12 is a schematic diagram of a substrate thinning device provided by another embodiment of the present invention;

[0056] Figure 13 is a schematic diagram of an installation monitoring component provided by an embodiment of the present invention;

[0057] Figure 14 This is a working principle diagram of a projection device provided by one embodiment of the present invention;

[0058] Figure 15 Schematic diagram of an integrated grinding and polishing device provided by one embodiment of the present invention;

[0059] Figure 16 This is a schematic diagram of a control device provided by an embodiment of the present invention. DETAILED DESCRIPTION

[0060] The technical solutions of the present invention are described in detail below in conjunction with specific embodiments and the accompanying drawings. The embodiments described herein are specific embodiments of the present invention and are used to illustrate the concept of the present invention; these descriptions are explanatory and exemplary and should not be understood as limiting the embodiments of the present invention and the scope of protection of the present invention. In addition to the embodiments described herein, those skilled in the art can also adopt other obvious technical solutions based on the contents disclosed in the claims of this application and its specification, including technical solutions that adopt any obvious replacements and modifications to the embodiments described herein.

[0061] The drawings in this specification are schematic diagrams that assist in explaining the concept of the present invention and schematically represent the shapes of the various parts and their mutual relationships. It should be understood that in order to clearly show the structures of the various components of the embodiments of the present invention, the drawings are not drawn to the same scale, and the same reference numerals are used to represent the same parts in the drawings. In the present invention, substrate (Substrate) is also called wafer (Wafer, W), and its meaning and actual function are equivalent.

[0062] Embodiments of the present disclosure generally relate to a method for manufacturing a suction cup worktable and a substrate thinning apparatus.

[0063] The present invention provides a method for manufacturing a suction cup workbench, the flow chart of which is as follows: Figure 1 As shown, the following steps are included:

[0064] S1, rotating the suction cup workbench 30 to be installed toward the side of the thinning base 10;

[0065] Figure 2FIG1 is a top view of a substrate thinning device provided by an embodiment of the present invention. A turntable 20 is provided above the thinning base 10. Three suction cup worktables 30 are provided above the turntable 20. The suction cup worktables 30 are used for vacuum adsorption of the substrate to be thinned. The suction cup worktables 30 can rotate with the turntable 20 to transfer the suction cup worktables 30 to the substrate to be thinned. Figure 2 Below the grinding module 40, the grinding module 40 is used to thin the substrate.

[0066] Figure 3 FIG2 is a schematic diagram of a suction cup workbench 30 provided in one embodiment of the present invention. The suction cup workbench 30 includes a base 31 and a suction cup assembly 32. The base 31 is disposed above the turntable 20, and the suction cup assembly 32 is detachably mounted above the base 31 by bolts. The manufacturing method of the suction cup workbench described in the present invention mainly involves the installation and fixation of the suction cup assembly 32 to the base 31.

[0067] In step S1, the rotation of the suction cup workbench 30 toward the side of the thinning base 10 means that under the drive of the turntable 20, the suction cup workbench 30 moves toward the left or right side of the thinning base 10, so that the distance between the suction cup workbench 30 and the left side or right side of the thinning base 10 is minimized to improve the convenience of operation.

[0068] As one embodiment of the present invention, an operator can use the control program of the substrate thinning device to automatically rotate the suction cup worktable 30 to be operated to the side of the thinning base 10. Specifically, in the operation interface of the substrate thinning device, the operator clicks to select the suction cup worktable 30 to be operated, and then clicks the run button. The turntable 20 starts to rotate and automatically rotates the selected suction cup worktable 30 to the left or right side of the thinning base 10.

[0069] S2, taking the bolt holes on the pedestal 20 near the side of the thinned base 10 as reference positions, and determining the bolt installation order of the suction cup assembly 32 with reference to the reference positions;

[0070] Specifically, in order to ensure the reliability of the fixation between the suction cup assembly 32 and the base 31, it is necessary to reasonably determine the bolt installation sequence to ensure that all performance of the assembled suction cup workbench 30 is in good condition.

[0071] S3, according to the bolt installation sequence, the rotation of the console 31 is controlled so that the bolt holes corresponding to the console 31 are rotated in sequence to be close to the side of the thinned base 10;

[0072] In step S4 , the operator installs bolts in sequence to fix the suction cup assembly 32 to the base 31 .

[0073] In the present invention, the order in which the bolts connecting the chuck assembly 32 and the base 31 are installed directly affects the various properties of the chuck worktable 30. These properties include, but are not limited to, the flatness of the top surface of the chuck worktable 30, which is directly related to the surface shape of the substrate being processed.

[0074] Figure 4 The flowchart of determining the bolt installation sequence provided by one embodiment of the present invention is used to determine the specific location of the bolt holes with odd installation numbers. The bolts here refer to the bolts connected between the suction cup assembly 32 and the base 31.

[0075] The steps to determine the bolt installation sequence include:

[0076] S21, the threaded hole on the pedestal 31 close to the side of the thinned base 10 is used as the first bolt hole ①;

[0077] S22, taking the first bolt hole ① as the reference, determine the positions of the threaded holes with odd numbers in the clockwise or counterclockwise direction, one bolt hole at a time, such as Figure 5 shown.

[0078] Figure 5 In the illustrated embodiment, the base 31 and suction cup assembly 32 are provided with 12 bolt holes. First, the suction cup workbench 30 is rotated toward the side of the thinning base 10. The bolt hole on the base 31 with the shortest distance from the side of the thinning base 10 is designated as the first bolt hole ①. Next, starting with the first bolt hole ①, the positions of the threaded holes with odd numbers are determined in a clockwise direction, one bolt hole at a time. This method determines the installation order for the bolts with odd numbers.

[0079] It can be understood that when determining the threaded holes with odd installation numbers, you can also follow the following steps: After determining the first bolt hole ①, use the first bolt hole ① as a reference, and determine the positions of the threaded holes with odd installation numbers in a counterclockwise direction, one bolt hole at a time.

[0080] Next, you need to determine the installation sequence of the bolts with even installation numbers. The corresponding confirmation steps are as follows: Figure 6 The installation sequence of bolts with even numbers is determined by the following steps:

[0081] S210, taking the first bolt hole ① and the third threaded hole ③ as a reference, determine Figure 3 The center line L of the center of the pedestal 31 is shown, as Figure 7 As shown;

[0082] S220, the bolt hole whose center is located on the center line L and is far away from the first bolt hole ① and the third bolt hole ③ is the second bolt hole ②;

[0083] S230 , using the second bolt hole ② as a reference, determine the positions of the bolt holes with even-numbered installation numbers in a clockwise or counterclockwise direction, one bolt hole at a time.

[0084] Figure 7 In the illustrated embodiment, the second bolt hole ② is far away from the first bolt hole ① and the third bolt hole ③, and the center of the second bolt hole ② is located on the center line L.

[0085] After confirming the second bolt hole ②, follow the clockwise direction and install the bolt holes with even numbers one by one, such as Figure 8 shown.

[0086] Figure 4 and Figure 6 The steps for confirming the bolt installation sequence are shown, namely, respectively determining the bolt holes with odd installation numbers and the bolt holes with even installation numbers.

[0087] When operating the suction cup workbench 30, the bolts are installed in groups of three, and the triangle formed by the connecting line of each group of bolt holes is an isosceles triangle, and the symmetry center line of the isosceles triangle passes through the center point of the suction cup workbench 30.

[0088] Figure 9 The figure shows the connection lines of each group of bolt holes corresponding to the suction cup workbench 30. Twelve bolts are set between the suction cup assembly 32 and the base 31, that is, the suction cup workbench 30 is equipped with 12 sets of bolt holes. Three bolt holes form a group, which can form four isosceles triangles. That is, the connection lines of the corresponding center points of the first bolt hole ①, the second bolt hole ② and the third bolt hole ③ form an isosceles triangle, the connection lines of the corresponding center points of the fourth bolt hole ④, the fifth bolt hole ⑤ and the sixth bolt hole ⑥ form an isosceles triangle, the connection lines of the corresponding center points of the seventh bolt hole ⑦, the eighth bolt hole ⑧ and the ninth bolt hole ⑨ form an isosceles triangle, the connection lines of the corresponding center points of the tenth bolt hole ⑩ and the eleventh bolt hole ⑩ form an isosceles triangle, and the connection lines of the corresponding center points of the tenth bolt hole ⑩ and the eleventh bolt hole ⑩ form an isosceles triangle. and the twelfth bolt hole The lines connecting the corresponding center points form an isosceles triangle.

[0089] Fix the bolts in the above order and symmetrically fix the suction cup workbench 30 in groups so that the bottom surface of the suction cup assembly 32 fits tightly with the top surface of the base 31, which is conducive to ensuring the flatness of the suction cup assembly 32.

[0090] The bolt installation sequence is determined by determining the order of the corresponding bolt holes. This includes confirming the order of the bolt holes with odd installation numbers and confirming the order of the bolt holes with even installation numbers. Once the bolt installation sequence is confirmed, the base 31 of the suction cup worktable 30 can be controlled to rotate to the required bolt holes to the working position. The operator then simply installs the bolts according to the process requirements.

[0091] The operating position here refers to the position where the distance between the suction cup worktable 30 and the side of the thinning base 10 is minimized. Since the base 31 has numerous bolt holes, an operating position indicator can be provided on the thinning base 10 to prevent errors. Specifically, during installation and commissioning of the substrate thinning equipment, the rotation position of the turntable 20 is pre-adjusted. This ensures that the suction cup worktable 30 accurately rotates to the operating position indicator during installation or removal, ensuring accurate operation by the operator.

[0092] Figure 10 This is a schematic diagram of another embodiment of the present invention for determining the bolt installation sequence. In this embodiment, when determining the bolt holes with odd installation numbers, the order of the bolt holes is determined in a counterclockwise direction with one bolt hole alternated. When determining the bolt holes with even installation numbers, the order of the bolt holes is also determined in a counterclockwise direction, such as Figure 11 shown.

[0093] In summary, confirming the direction of the bolt holes corresponding to odd-numbered installation numbers is the same as confirming the direction of the bolt holes corresponding to even-numbered installation numbers. In this way, the bolts can be installed in groups of three, so that the load is applied symmetrically along the center of the suction cup workbench 30, ensuring the flatness of the suction cup assembly 32 when installed and fixed.

[0094] Since the substrate thinning operation is performed in a watery environment, water will inevitably accumulate on the surface of the base 31 when the suction cup assembly 32 is mounted on the base 31. According to the operation method of the present invention, the accumulated water between the suction cup assembly 32 and the base 31 can be drained to the outside, thereby preventing the accumulation of water between the suction cup assembly 32 and the base 31 from affecting the fixing effect of the two.

[0095] Figure 5 and Figure 10 In the embodiment shown, the number of bolt holes corresponding to the suction cup workbench 30 is 12. It is understandable that the number of bolt holes can also be other numbers as long as it is a multiple of three, such as 15, 18, 21, etc.

[0096] When installing the bolts, in addition to following the bolt installation sequence, the bolt installation torque must also be increased step by step to the set torque so that the position and posture of the suction cup assembly 32 can be corrected during the bolt installation process to ensure the surface flatness of the suction cup workbench 30, improve the total thickness variation (TTV) of the substrate thinning, and meet the processing requirements of the substrate surface shape.

[0097] As one embodiment of the present invention, the torque for the mounting bolts can be applied three times, at 30-50%, 60-80%, and 100% of the set torque, respectively. That is, during each installation, a prescribed range of torque is applied to the bolts to adaptively adjust the surface flatness of the suction cup worktable 30 and ensure the quality of the assembly and manufacturing of the suction cup worktable 30.

[0098] Preferably, the torque of the mounting bolts can be applied three times, namely 35-45%, 65-75% and 100% of the set torque, to ensure the fit between the suction cup assembly 32 and the base 31 .

[0099] At the same time, the present invention also provides a substrate thinning device 3, such as Figure 12 As shown, it includes:

[0100] Thinning the base 10;

[0101] A turntable 20 is provided above the thinning base 10 , and a plurality of suction cup worktables 30 are arranged at intervals on the turntable 20 ;

[0102] Specifically, the turntable 20 can rotate around its vertical central axis. Three independently rotatable suction cup worktables 30 are evenly distributed on the turntable 20, namely the first suction cup worktable, the second suction cup worktable and the third suction cup worktable. The upper parts of the three suction cup worktables 30 are configured with porous ceramics to achieve vacuum adsorption of the substrate, and the lines connecting the centers of the three suction cup worktables 30 and the center of the turntable 20 form an angle of 120° with each other.

[0103] Furthermore, the three suction cup workstations 30 correspond to three workstations: rough grinding, fine grinding, and loading and unloading. The two workstations opposite the grinding wheel (located below the grinding module 40) are used for rough grinding and fine grinding, respectively, while the remaining workstation is used for loading, unloading, and cleaning of substrates. The rotation of the turntable 20 drives the three suction cup workstations 30 to switch between these three workstations, allowing the suction cup workstations 30 to carry substrates in a cyclical movement, carrying the substrates through the loading and unloading station, rough grinding, fine grinding, and finally loading and unloading station.

[0104] Figure 3 3 is a schematic diagram of a suction cup workbench 30 provided in one embodiment of the present invention. The suction cup workbench 30 includes a base 31 and a suction cup assembly 32 detachably mounted above the base 31 .

[0105] The grinding module 40 is disposed on a side of the thinning base 10 and located above the chuck workbench 30 .

[0106] Furthermore, the grinding module 40 includes a rough grinding part and a fine grinding part, and its setting position corresponds to the position of the suction cup workbench 30. A grinding wheel is set at the lower part thereof to perform grinding processing on the substrate.

[0107] Figure 12 In the embodiment shown, when the suction cup assembly 32 is installed or removed, the base 31 is intermittently rotated according to the manufacturing method of the suction cup workbench 30 described above, and the operator installs or removes the bolts in a set order to achieve the installation or removal of the suction cup assembly 31.

[0108] During the installation operation of the suction cup workbench 30, following the bolt installation sequence shown above helps to adapt to the processing error between the bottom surface of the suction cup assembly 32 and the top surface of the base 31, ensures the fit between the suction cup assembly 32 and the base 31, and improves the flatness of the top surface of the suction cup workbench 30.

[0109] In the present invention, the rotation of the base 31 of the suction cup worktable 30 is controlled by the control unit of the substrate thinning equipment. If the control unit fails, it is difficult for the operator to detect abnormalities in the bolt installation sequence, which may affect the flatness of the assembled suction cup worktable 30.

[0110] In order to prevent the control unit from malfunctioning and affecting the assembly quality of the suction cup workbench 30, Figure 12 The illustrated substrate thinning apparatus 3 further includes an installation monitoring assembly 50 disposed on one side of the turntable 20. The installation monitoring assembly 50 displays the bolt installation sequence in a projected manner, allowing the operator to verify the bolt installation sequence based on the projected display to ensure the accuracy of the assembly of the suction cup assembly 32.

[0111] Figure 13 yes Figure 12 Schematic diagram of the installation monitoring component 50, the installation monitoring component 50 includes a fixing frame 51, the fixing frame 51 is an L-shaped structure, and a projection device 52 is provided at its end.

[0112] The projection device 52 includes a light source and a lens assembly, such as Figure 14 As shown, the light emitted by the light source is refracted by the lens and transmitted to the film, and the light continues to transmit along another set of lenses to magnify the bolt installation sequence diagram and project the sequence diagram onto the top surface of the base 31. Among them, the bolt installation sequence diagram is set on the film.

[0113] It is understandable that the projection device 52 may also adopt other working principles to realize the projection of the bolt installation sequence diagram onto the pedestal 31 .

[0114] As one embodiment of the present invention, the projection device 52 rotates synchronously with the base 31 and projects characters indicating the installation sequence toward the corresponding bolt holes on the base 31. Specifically, a stepper motor is positioned above the projection device 52, and its rotational motion aligns with that of the motor on the base 31. This allows the operator to verify the correct installation sequence while installing the bolts, further ensuring the quality of the assembly of the suction cup worktable 30.

[0115] At the same time, the present invention also provides a grinding and polishing integrated equipment, the schematic diagram of which is as follows Figure 15 As shown, it includes:

[0116] The equipment front-end module 1 is used to realize the entry and exit of the substrate, and the equipment front-end module 1 is arranged at the front end of the integrated grinding and polishing equipment;

[0117] The substrate thinning device 3 described above is used to thin the substrate;

[0118] And a polishing module 2, which is arranged between the equipment front-end module 1 and the substrate thinning equipment 3, is used to perform chemical mechanical polishing on the thinned substrate.

[0119] Specifically, the equipment front-end module 1 is arranged at the front end side of the integrated grinding and polishing equipment. It is a transition module for transporting the substrate from the outside to the inside of the equipment machine, and is used to realize the entry and exit of the substrate to achieve "dry in and dry out" of the substrate.

[0120] The substrate thinning device 3 is arranged at the end of the thinning device, and is used to grind the substrate, for example, perform rough grinding and fine grinding, or perform rough grinding or fine grinding.

[0121] The polishing module 2 is arranged between the equipment front-end module 1 and the substrate thinning equipment 3. It is used to perform chemical mechanical polishing on the substrate after completing the grinding of the substrate using a carrier head that can adjust the pressure according to the thickness distribution of the substrate. It also has the function of transferring the substrate between these three modules.

[0122] The device front-end module 1 includes a substrate storage unit 11 and a first transmission unit 12 .

[0123] The polishing module 2 includes a second transfer unit 21 , a third transfer unit 22 , a chemical mechanical polishing unit 23 and a single chamber cleaning device 24 .

[0124] The substrate thinning apparatus 3 further includes a fourth transport unit 33 .

[0125] The following combination Figure 15 Briefly describe the operating procedures of the integrated grinding and polishing equipment, including:

[0126] The pick-and-place robot of the first transfer unit 12 takes the substrate from the substrate transfer box of the substrate storage unit 11;

[0127] The substrate is transferred to the fixed buffer portion 211 of the second transfer unit 21 by a pick-and-place robot;

[0128] The dry robot of the third transfer unit 22 transports the substrate placed in the fixed buffer section 211 to the mobile buffer section 212 . At this time, the mobile buffer section 212 is close to the fixed buffer section 211 .

[0129] The mobile buffer unit 212 carries the substrate and moves close to the substrate thinning device 3;

[0130] The simple robot of the fourth transport unit 33 moves the substrate placed in the mobile buffer 212 to the turntable 20, so that the substrate is fixed on the suction cup workbench 30 corresponding to the current loading and unloading station;

[0131] The turntable 20 rotates 120° in the forward direction, and the substrate moves to the rough grinding station for rough grinding.

[0132] After the rough grinding is completed, the turntable 20 rotates forward 120 degrees, and the substrate moves to the fine grinding station for fine grinding.

[0133] After the fine grinding is completed, the turntable 20 rotates 240° in the opposite direction and the substrate moves to the loading and unloading station;

[0134] After grinding, the substrate is cleaned and dried by a cleaning mechanism at the loading and unloading station, and then removed by a simple robot and placed in the mobile buffer 212;

[0135] The mobile buffer unit 212 moves to the other end so that the wet robot of the third transfer unit removes the substrate and places it on the loading and unloading unit of the chemical mechanical polishing unit 23; the loading and unloading unit here refers to a device (loadcup) for loading and unloading substrates.

[0136] The substrate is polished in the chemical mechanical polishing unit 23 ; the substrate is chemically mechanically polished using a carrier head capable of adjusting the loading pressure according to the thickness distribution of the substrate.

[0137] After the chemical mechanical polishing is completed, the substrate is taken out from the loading and unloading part by the wet robot of the third transfer unit 22 and then sent to the single chamber cleaning device 24;

[0138] The substrate is cleaned and dried in the single chamber cleaning device 24;

[0139] After the substrate is cleaned and dried, the pick-and-place robot of the first transfer unit 12 takes the clean substrate out of the single-chamber cleaning device 24 and sends it to a substrate transfer box for storage.

[0140] Figure 15In the embodiment shown, the suction cup workbench 30 in the substrate thinning device 3 is arranged in accordance with Figure 4 and Figure 6 Determine the bolt installation sequence according to the method shown in Figure 1 The manufacturing method shown assembles the suction cup workbench 30 to ensure that the suction cup assembly 32 fits tightly with the base 31.

[0141] Figure 16 is a schematic diagram of an embodiment of a control device provided by the present invention. In this embodiment, the control device includes: a processor, a memory, and a computer program stored in the memory and executable on the processor. When the processor executes the computer program, the steps of each embodiment described above in the method embodiment are implemented. Alternatively, when the processor executes the computer program, the functions of each module / unit described above in the system embodiment are implemented.

[0142] Control devices refer to terminals with data processing capabilities, including but not limited to computers, workstations, servers, and even some high-performance smartphones, PDAs, tablets, personal digital assistants (PDAs), smart TVs, etc.

[0143] The control device may include, but is not limited to, a processor and a memory. It will be understood by those skilled in the art that Figure 16 These are merely examples of control devices and do not constitute limitations on the control device. The control device may include more or fewer components than shown in the figure, or a combination of certain components, or different components. For example, the control device may also include input and output devices, network access devices, buses, etc.

[0144] The processor may be a central processing unit (CPU), other general-purpose processors, digital signal processors (DSP), application-specific integrated circuits (ASIC), field-programmable gate arrays (FPGA) or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, etc.

[0145] The memory can be an internal storage unit of the control device, such as the control device's hard drive or memory. It can also be an external storage device of the control device, such as a plug-in hard drive, a SmartMedia Card (SMC), a Secure Digital (SD) card, or a flash memory card. Furthermore, the memory can include both the internal storage unit and external storage devices of the control device. The memory is used to store computer programs and other programs and data required by the control device. The memory can also be used to temporarily store data that has been output or is about to be output.

[0146] At the same time, the present invention also provides a computer-readable storage medium on which a computer program is stored. When the computer program is executed by a processor, the processor executes the manufacturing method of the suction cup workbench as described above.

[0147] In the present invention, "computer-readable media" includes at least two types of computer-readable media, namely, computer-readable storage media and communication media.

[0148] Computer-readable storage media includes volatile and nonvolatile, removable and non-removable media implemented in any method or technology for storage of information such as computer-readable instructions, data structures, program modules or other data.

[0149] Computer-readable storage media include, but are not limited to, RAM, ROM, EEPROM, flash memory or other memory technology, CD-ROM, digital versatile disks (DVD), or other optical storage devices, magnetic cassettes, magnetic tape, magnetic disk storage devices or other magnetic storage devices, or any other non-transmission media that can be used to store information for access by an electronic device. In contrast, communication media can embody computer-readable instructions, data structures, program modules, or other data in a modulated data signal such as a carrier wave or other transport mechanism. Computer-readable storage media as defined herein does not include communication media.

[0150] Throughout this specification, reference to terms such as "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples" means that a specific feature, structure, material, or characteristic described in conjunction with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, illustrative uses of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0151] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to the embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the claims and their equivalents.

Claims

1. A method for manufacturing a suction cup workbench, characterized in that: The following steps are involved: S1, rotating the suction cup workbench to be installed toward the side of the thinning base; S2, using the bolt holes on the pedestal near the side of the thinned base as reference positions, and determining the bolt installation order of the suction cup assembly with reference to the reference positions; S3, controlling the rotation of the pedestal according to the bolt installation sequence so that the bolt holes corresponding to the pedestal are rotated in sequence to be close to the side of the thinned base; S4, installing bolts in sequence to fix the suction cup assembly to the base; Determination of the bolt installation sequence includes: S21, using the threaded hole on the pedestal closest to the side of the thinned base as the first bolt hole; S22, taking the first bolt hole as a reference, determine the positions of the threaded holes with odd installation numbers in a clockwise or counterclockwise direction, one bolt hole at a time; Determining the bolt installation sequence also includes: S210, determining a center line passing through the center of the pedestal using the first bolt hole and the third threaded hole as a reference; S220, the bolt hole whose center is located on the center line and far away from the first bolt hole and the third bolt hole is the second bolt hole; S230, using the second bolt hole as a reference, determine the positions of the bolt holes with even installation numbers in a clockwise or counterclockwise direction, one bolt hole at a time; The bolts are installed in groups of three, and the triangle formed by the connecting line of each group of bolt holes is an isosceles triangle, and the center line of symmetry of the isosceles triangle passes through the center point of the suction cup workbench; the suction cup workbench is symmetrically fixed in groups, so that the bottom surface of the suction cup assembly is tightly fitted with the top surface of the base, and the accumulated water between the suction cup assembly and the base is drained to the outside to avoid water accumulation between the suction cup assembly and the base.

2. The method for manufacturing a suction cup workbench according to claim 1, wherein: Confirm that the direction of the bolt holes corresponding to the odd-numbered installation numbers is the same as the direction of the bolt holes corresponding to the even-numbered installation numbers.

3. The method for manufacturing a suction cup workbench according to claim 1, wherein: According to the bolt installation sequence, increase the bolt installation torque step by step to the set torque.

4. The method for manufacturing a suction cup workbench according to claim 3, wherein: The torque for the mounting bolts is applied three times, at 30-50%, 60-80% and 100% of the set torque.

5. A substrate thinning device, characterized in that: include: Thinning the base; A turntable is provided above the thinning base, wherein a plurality of suction cup workstations are spaced apart from each other on the turntable, and the suction cup workstations include a base and a suction cup assembly detachably mounted above the base; A grinding module is provided on the side of the thinning base and located above the suction cup workbench; When the suction cup assembly is installed or removed, the base rotates intermittently according to the manufacturing method of the suction cup workbench described in any of claims 1 to 4, and the operator installs or removes the bolts in a set order to achieve the installation or removal of the suction cup assembly.

6. The substrate thinning device according to claim 5, wherein: It also includes an installation monitoring component, which is arranged on one side of the turntable, and the installation monitoring component displays the installation sequence of the bolts in a projection manner.

7. The substrate thinning device according to claim 6, wherein: The installation monitoring component includes a projection device, which can rotate synchronously with the base and project characters showing the installation sequence toward the bolt holes corresponding to the base.

8. A grinding and polishing integrated equipment, characterized in that: include: A front-end module for the equipment, used for enabling the entry and exit of substrates, and arranged at the front end of the integrated grinding and polishing equipment; The substrate thinning device according to any of claims 5 to 7, used for thinning the substrate; and a polishing module, which is arranged between the equipment front-end module and the substrate thinning equipment and is used to perform chemical mechanical polishing on the thinned substrate.

9. A control device, characterized in that: include: at least one processor; as well as at least one memory having a computer program stored thereon; When the computer program is executed by the at least one processor, the at least one processor is caused to perform the method for manufacturing a suction cup worktable according to any one of claims 1 to 4. 10 . A computer-readable storage medium having a computer program stored thereon, wherein when the computer program is executed by a processor, the processor is caused to execute the method for manufacturing a suction cup workbench according to claim 1 .

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