Splitting device

Abstract

The present application provides a kind of breaking device, in the case where repeatedly breaking, can better carry out breaking each time execution.The breaking device has: motor, rotates in horizontal plane;Action conversion mechanism, the lifting action of breaking rod is converted into the rotating action of motor;Motor control unit, controls the action of motor;Torque detection unit, detects the torque of motor;And breaking processing unit, by controlling the action of each part of breaking device, executes breaking to breaking object;By using motor control unit to make motor rotate in the state that breaking object is arranged and fixed to support portion in the state that one main surface is contacted with support portion, make breaking rod drop to the position of the other main surface of breaking object and corresponding to the forming position of scribe, according to the torque change detected by torque detection unit when breaking rod drops, it is judged that breaking object has completed breaking.

Description

TECHNICAL FIELD

[0001] The present application relates to a device for breaking a target object along a scribe line, and particularly to control of the operation thereof. BACKGROUND

[0002] As a method for breaking a plate-shaped breaking target object such as a brittle material substrate such as a glass substrate, a semiconductor substrate, a ceramic substrate, etc., there is known a method in which a scribing process is first performed, and then a breaking process is performed, the scribing process being a process of forming a scribe line on one main surface of the breaking target object, and propagating a vertical crack from the scribe line, and the breaking process being a process of further propagating the crack in the thickness direction by applying an external force, thereby breaking the breaking target object (see, for example, Patent Literature 1).

[0003] The breaking process is generally performed by a breaking device that has a breaking rod that is freely raised and lowered in the vertical direction. The breaking process is generally performed by the following method: a scribe line is formed in advance at a breaking intended position on one main surface side of a breaking target object, and a tip of the breaking rod is brought into abutment against the other main surface of the breaking target object at the breaking intended position, and the tip is further pressed in. In this case, in order to protect or support the breaking target object, the breaking is sometimes performed in a state in which a member such as a film or a tape (dicing tape) is attached to the front surface or the back surface.

[0004] In the case of repeatedly performing the breaking a plurality of times with respect to the same kind of breaking target object, if the conditions of the breaking target object are the same, specifically, if the material or the thickness of the breaking target object, and further the formation state of the scribe line, etc., are the same, then in theory, the breaking should be performed in compliance with one pressing-in condition (amount of pressing-in) that is appropriately defined in advance.

[0005] However, in reality, there are cases in which the tip is not sufficiently pressed in and the breaking cannot be performed well in a state in which the pressing-in condition that should be appropriately defined is deviated, due to the presence of unevenness in the thickness of the breaking target object or the protective member, or unevenness (surface irregularity) in the thickness of a support portion that supports the breaking target object at the time of breaking, or deviation in the driving mechanism of the support portion that positions the breaking position, or the like. Therefore, in order to prevent such a problem of insufficient pressing-in, the amount of pressing-in of the tip in the pressing-in condition that is set at the time of breaking is made to be a little more than the optimum value by several tens of μm or so.

[0006] However, in the above-described state, the setting of the pressing-in condition can lead to the generation of excessive pressing-in. Excessive pressing-in of the breaking rod can lead to the generation of chippings (chips) in the breaking target object. The generation of chippings inevitably deteriorates the breaking quality.

[0007] BACKGROUND ART DOCUMENTS

[0008] PATENT LITERATURE

[0009] Patent Literature 1: Japanese Patent Application Laid-Open No. 2017-13255 SUMMARY

[0010] The present application has been achieved in view of the problems described above, and has an object to provide a breaking device that can perform breaking well each time in a case where breaking is repeatedly performed.

[0011] To solve the problems described above, a first aspect of the present application is a device that breaks a breaking object, which has a scribe line formed in advance in one main surface, from the other main surface side along the scribe line, thereby dividing; the device includes a support portion that places and fixes the breaking object, a breaking rod that is provided above the support portion and has a blade tip at a lower end, a lifting mechanism that lifts and lowers the breaking rod, and a control portion that controls the operation of each portion of the device; and the lifting mechanism has a motor that rotates in a horizontal plane and an operation conversion mechanism that converts the rotational operation of the motor into the lifting operation of the breaking rod; the control portion has a motor control portion that controls the operation of the motor, a torque detection portion that detects the torque acting on the motor, and a breaking processing portion that performs breaking on the breaking object by controlling the operation of each portion of the device; the breaking processing portion judges that the breaking object has completed breaking based on the change in the torque detected by the torque detection portion when the breaking rod is lowered, by causing the motor to rotate using the motor control portion in a state where the breaking object is placed and fixed to the support portion in a state where the one main surface is in contact with the support portion, causing the operation conversion mechanism to operate, and causing the breaking rod to descend to a position of the other main surface of the breaking object and corresponding to the position where the scribe line is formed.

[0012] A second aspect of the present application is the breaking device of the first aspect, in which the breaking processing portion acquires the value of the torque detected by the torque detection portion at a specific time interval, compares the latest torque value acquired each time when the breaking rod is lowered and the value of the torque is a specific first threshold value or more with a second threshold value that is defined based on the maximum value of the torque acquired before, and judges that the breaking object has completed breaking in a case where the latest torque value is the second threshold value or less, the specific first threshold value corresponding to the torque value when the breaking rod has surely pressed into the breaking object.

[0013] A third aspect of the present application is the breaking device of the second aspect, in which the second threshold value is a value obtained by multiplying the maximum value of the torque by a coefficient a (0 < a < 1).

[0014] According to the first to third aspects of the present application, in the case where the breaking is repeatedly performed, the problem of, for example, insufficient or excessive pressing of the breaking rod, which occurs in the conventional breaking process, does not occur each time, and thus the work can be surely broken.

[0015] Especially, according to the second and third aspects, the breaking completion can be quickly and surely grasped, and thus excessive pressing of the breaking rod can be avoided. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 is a diagram showing the schematic configuration of the breaking device 100.

[0017] Figure 2 is a diagram showing the configuration related to the lifting action control of the breaking rod 1 of the breaking device 100.

[0018] Figure 3 is a diagram showing the rotation of the servo motor 4, the positional relationship change between the work W and the breaking rod 1, and the torque T change of the servo motor 4 during the period from the start to the completion of the breaking process.

[0019] Figure 4 is a diagram showing the sequence of the breaking process. DETAILED DESCRIPTION

[0020] <Outline of Breaking Device>

[0021] Figure 1 is a diagram showing the schematic configuration of the breaking device 100 of the present embodiment. In addition, in Figure 1 , the xyz coordinates of the right-hand system are indicated, that is, the horizontal plane is set as the xy plane, and the vertical direction upward is set as the positive direction of the z axis.

[0022] The breaking device 100 is a device for breaking a breaking object (hereinafter also referred to as a work) W along a breaking intended position. On one main surface side of the work W, a scribe line SL is provided in advance along the breaking intended position.

[0023] The breaking device 100 mainly includes a breaking rod 1 freely liftable in the vertical direction (z axis direction) and having a blade tip 1e having a triangular cross section perpendicular to the length direction at the lower end, and a support portion 2 on which the work W is placed. Figure 1 In the present embodiment, a case where the extending direction (length direction) of the blade tip 1e of the breaking rod 1 provided above the support portion 2 coincides with the y axis direction, and the support portion 2 is a pair of support portions 2a and 2b spaced apart from each other in the x axis direction is exemplified. In addition, the support portion 2 can also be in a form in which at least the uppermost portion is constituted by one continuous elastic body. Further, it can also be in a form in which a driving mechanism not shown performs a forward movement or a rotational movement, and the work W is positioned by the movement.

[0024] When the breaking process of breaking the workpiece W is performed in the breaking apparatus 100, the main surface of the workpiece W, on which the score line SL is provided, becomes the surface in contact with the support portion 2, and the extending direction of the score line SL coincides with the extending direction of the tip 1e of the breaking rod 1 (the y-axis direction in FIG. 1). The workpiece W is placed and fixed to the support portion 2 in this posture by a proper fixing mechanism not shown. Figure 1

[0025] In addition, in the case where the workpiece W is placed and fixed to the support portion 2 in a state where a film or a tape (cutting tape) or the like is attached to the front surface or the back surface, the film or the tape or the like serves to protect or support the workpiece W. Figure 1

[0026] Further, if the workpiece W is placed and fixed in this state, the breaking rod 1 is lowered toward the other main surface, on which the score line SL is not formed, as shown by an arrow AR1. The other main surface becomes the upper surface of the workpiece W at this time. The breaking rod 1 abuts on the breaking position P in the other main surface, which corresponds to the position where the score line SL is formed, and is further pressed down (pressed in). Then, according to the three-point bending principle, the crack of the workpiece W propagates from the score line SL to the breaking position P, and as a result, the workpiece W is divided.

[0027] Figure 2 is a diagram schematically showing the configuration related to the control of the lifting action of the breaking rod 1 of the breaking apparatus 100. The breaking apparatus 100 mainly includes: a lifting mechanism 10 responsible for the actual lifting of the breaking rod 1; a controller 20 controlling the actions of each portion of the breaking apparatus 100 including the lifting mechanism 10; and an operation portion 30 operated when an operator inputs a breaking execution instruction or the like.

[0028] The lifting mechanism 10 includes: a servo motor 4 attached to a strong support body (a frame of the lifting mechanism 10, a ceiling, or the like) 3, and a rotation shaft not shown freely rotates in the horizontal plane (in the xy plane); a screw shaft 5 directly connected to the rotation shaft of the servo motor 4, and extending downward vertically; a holder 6 holding the breaking rod 1; a lifting portion 7 to which the holder 6 is detachably fixed; and a nut 8 attached to the lifting portion 7, and screwed with the screw shaft 5, constituting a ball screw. In the lifting mechanism 10, the forward and reverse rotation action of the servo motor 4 within a certain range is converted into the lifting action of the lifting portion 7 within a certain range by the ball screw. In other words, the screw shaft 5, the nut 8, and the lifting portion 7 constitute an action conversion mechanism that converts the rotation action of the servo motor 4 into the lifting action of the breaking rod 1. Further, in a state where the holder 6 holding the breaking rod 1 is fixed in a posture where the tip 1e becomes the lower end, the lifting portion 7 is lowered as the servo motor 4 rotates, whereby the workpiece W can be broken by the breaking rod 1.

[0029] ​​In addition, Figure 2 The configuration of the lifting mechanism 10 and the form of each part shown are merely schematic representations, and the actual configuration can be different from the illustration as long as the same operation is achieved.

[0030] The controller 20 mainly includes a motor control section 21, a torque detection section 22, and a fracture processing section 23.

[0031] The motor control section 21 responds to an operation instruction and a stop instruction from the fracture processing section 23 to issue an operation signal and a stop signal to the servo motor 4, and start and stop the operation of the servo motor 4.

[0032] The torque detection section 22 detects the torque acting on the servo motor 4 when the servo motor 4 is rotating. The torque value detected by the torque detection section 22 is always monitored by the fracture processing section 23 and acquired as needed for determining the fracture state.

[0033] The fracture processing section 23 controls the operation of each part of the fracture device 100 in response to an execution instruction by the operation section 30, whereby the fracture device 100 performs fracture processing on the workpiece W.

[0034] <Fracture Processing>

[0035] Hereinafter, the fracture processing performed in the fracture device 100 will be described. Figure 3 is a graph showing the rotation of the servo motor 4, the change in the positional relationship between the workpiece W and the fracture rod 1, and the change in the torque T of the servo motor 4 from the start to the completion of the fracture processing. In addition, Figure 4 is a graph showing the fracture processing sequence.

[0036] First, the workpiece W is placed and fixed in the posture as described above on the support section 2, and the fracture rod 1 is disposed at a specific initial position, and in this state (t = tl), when an execution instruction of the fracture processing is issued by the operation section 30 (step SI), the fracture processing section 23 issues an instruction to the motor control section 21 to operate the servo motor 4. The motor control section 21 responds to the instruction to issue an operation signal to the servo motor 4, and thereby the servo motor 4 starts rotating, and thereby the fracture rod 1 starts descending (step S2). Thereafter, the fracture rod 1 is continuously descended by rotating the servo motor 4 until a stop instruction is issued from the fracture processing section 23. In addition, at the same time as the fracture rod 1 starts descending, the torque T of the servo motor 4 is also detected using the torque detection section 22, and the value of the torque T is monitored using the fracture processing section 23.

[0037] In more detail, as Figure 3As shown, in order to immediately move the stationary fracture rod 1 after the execution instruction at t=t1, a relatively large acceleration torque Ta is temporarily applied to the servo motor 4 to accelerate the fracture rod 1. However, the torque T value decreases shortly thereafter. After t=t2, the torque T value of the servo motor 4 becomes a roughly fixed value (approximately zero) less than the acceleration torque Ta for a short period of time. As a result, the movement of the fracture rod 1 also becomes approximately constant.

[0038] If, after a specific time Δta has elapsed since the fracture rod 1 begins to descend (step S3), the fracture processing unit 23 acquires the value of the torque T monitored at that time (step S4) and determines whether the value of the torque T is above a specific threshold Tb (step S5). This determination is performed to ascertain whether the fracture rod 1 has indeed begun to press into the workpiece W.

[0039] Here, the threshold Tb is the value of the torque T corresponding to the state where the breaking rod 1 has been firmly pressed into the workpiece W. The value of the threshold Tb can be determined in advance based on the material or thickness of the workpiece W, the specifications of the breaking rod 1, etc. However, to prevent incorrect judgment, the threshold Tb is set to a value greater than the acceleration torque Ta. Furthermore, although it also depends on the descent speed of the breaking rod 1, the value of Δta is preferably specified to be about 0.125 msec to 1 msec.

[0040] If it is Figure 3 As shown, strictly speaking, at the time t = t3, the fracture rod 1 comes into contact with the workpiece W, and then the fracture rod 1 is pressed into the workpiece W, so the value of torque T also increases. However, in this embodiment, it is only at the later time t = t4, that is, when the value of torque T becomes Tb, that it is determined whether the pressing of the fracture rod 1 into the workpiece W is completed.

[0041] In addition, such as Figure 3 As shown, the fracture rod 1, which maintains a constant speed before contacting the workpiece W, moves to a state where it contacts and presses into the workpiece W.

[0042] If the value of torque T obtained in step S4 is less than the threshold Tb (step S5 is NO), the processing after step S3 is repeated. That is, after a specific time Δta, the fracture processing unit 23 obtains the value of torque T again and compares it with the threshold Tb.

[0043] On the other hand, if the value of the torque T obtained in step S4 is above the threshold Tb (if step S5 is Yes (TES)), the fracture processing unit 23 sets the value of the torque T at that time to the maximum value T. max (Step S6)

[0044] Furthermore, at a later point in time Δtb (step S7), the fracture processing unit 23 acquires the value of the torque T monitored at that time (step S8) and determines whether the value of the torque T is the threshold αT. max Hereinafter, αT max Defined as the maximum value T max The value obtained by multiplying by a specific coefficient α (0 < α < 1) (step S9).

[0045] The determination is based on the following: After the fracture rod 1 begins to press into the workpiece W, the torque T of the servo motor 4 gradually increases, reaching its maximum value at the moment when the crack extending from the scribing line SL reaches another main surface and is about to complete fracture. As the workpiece W completes fracture, the torque T decreases sharply. Threshold αT max It is the value of torque T that is equivalent to the state where the value has been determined to have decreased after reaching the maximum value, that is, the value of torque T that is determined to have completed the fracture. Figure 3 In the case shown, after t=t3, the value of the increased torque T reaches its maximum value Tc. After that, although it fluctuates greatly, it continues to decrease. At the time t=t5, the workpiece W breaks.

[0046] Specifically, it utilizes the maximum value T of the latest torque T relative to the constantly updated Δtb over time. max If the ratio is less than or equal to a predetermined coefficient α, it can be determined that the workpiece W has completed fracture. Furthermore, the value of coefficient α can be determined through prior experimentation based on the material or thickness of workpiece W, the specifications of the fracture rod 1, etc. However, for example, if α = 0.01, and the value of torque T decreases by more than 1% from its maximum value, then it can be determined that workpiece W has completed fracture. Additionally, although it also depends on the descent speed of the fracture rod 1, the value of Δtb is preferably specified to be approximately 0.125 msec to 1 msec (e.g., 0.5 msec).

[0047] The torque T value obtained in step S8 is determined to exceed the threshold αT. max If step S9 is not performed, the process after step S6 is repeated. That is, the fracture processing unit 23 resets the value of the torque T, which is the object of determination, to its maximum value T. max After a specific time Δtb, the value of torque T is obtained again and compared with the threshold αT. max Comparison. Of course, in cases such as Figure 3 During the period from t=t4 to t=t5, when the value of torque T continuously increases, the most recently obtained value of torque T is different from the previously set value of T. max The value is larger, so it will not be misjudged as yes in step S9.

[0048] On the other hand, in a case where it is determined that the value of the latest torque T acquired in step S8 is the threshold value αT max In a case where the answer is YES in step S9, since the work W has completed the breaking before the point of time, the breaking processing section 23 issues an instruction to the motor control section 21 to stop the servo motor 4. The motor control section 21 responds to the instruction and issues a stop signal to the servo motor 4, thereby stopping the servo motor 4 from rotating, and thus stopping the breaking lever 1 from descending (step S10). In a case where the answer is NO in step S9, since the work W has not completed the breaking before the point of time, the breaking processing section 23 issues an instruction to the motor control section 21 to continue the breaking. The motor control section 21 responds to the instruction and continues the breaking. Figure 3 In the present embodiment, the breaking lever 1 is stopped from descending at t = t6. Also, based on the stopping of the descent of the breaking lever 1, the breaking processing is completed (step Sll).

[0049] In the breaking processing of the present embodiment performed in the above sequence, the completion of the breaking of the work W can be determined surely based on the change in the torque value of the servo motor 4, and then the breaking lever 1 can be stopped quickly. Therefore, even in a case where the work W or the like has a thickness unevenness, or the support section 2 has a thickness unevenness (surface unevenness) at the time of breaking, or the like, the problem of the insufficient or excessive pressing of the breaking lever 1 that occurs in the conventional breaking processing does not occur, and thus the work W can be broken surely. In this case, the breaking processing section 23 can be said to function as a breaking completion determination section that determines that the work W has completed the breaking.

[0050] Also, this means that, in a case where the breaking is repeated, the breaking can be performed well each time.

[0051] Incidentally, in this case, the distance traveled by the breaking lever 1 from the time when the breaking is actually completed, that is, t = t5 to the time when the breaking lever 1 is stopped from descending, that is, t = t6, depends on the descending speed of the breaking lever 1 or the processing speed of the controller 20, and the like, and thus cannot be generalized, but if the work W is a glass substrate, for example, the distance can be limited to several μm at the maximum and as much as possible. This value is smaller than the pressing amount (several tens of μm or so) added to the originally optimal pressing amount in order to avoid the insufficient pressing in the conventional breaking processing.

[0052] Further, in the breaking processing of the present embodiment, since the completion of the breaking can be grasped quickly and surely, the excessive pressing of the breaking lever can be avoided.

[0053] As described above, according to the present embodiment, the completion of the breaking of the work can be determined surely based on the change in the torque of the servo motor that lowers the breaking lever, and then the breaking lever can be stopped quickly. Thus, even in a case where the breaking is repeated, the problem of the insufficient or excessive pressing of the breaking lever that occurs in the conventional breaking processing does not occur each time, and thus the work can be broken surely.

Claims

1. A fracture device, characterized in that, The object to be fractured is pre-marked along one main surface and then fractured from the other main surface along the marked lines, thereby breaking it apart. have: Support section, for mounting and fixing the fractured object; A fracture rod is disposed above the support portion and has a blade tip at its lower end; A lifting mechanism is used to raise and lower the fractured rod; and The control unit controls the operation of each part of the device; and The lifting mechanism has the following features: The motor rotates in the horizontal plane; and The motion conversion mechanism converts the rotational motion of the motor into the lifting motion of the breaking rod; The control unit has: The motor control unit controls the operation of the motor; A torque detection unit detects the torque acting on the motor; and The fracture processing unit performs fracture on the fracture target by controlling the operation of each part of the device; The fracture processing unit operates by rotating the motor controlled by the motor control unit while the fracture object is fixed to the support with one main surface in contact with the support, thereby activating the action conversion mechanism and causing the fracture rod to descend from above the fracture object to the other main surface of the fracture object, corresponding to the position where the scribing line is formed. After the fracture rod begins to descend, before it comes into contact with the fracture target, the value of the torque detected by the torque detection unit is repeatedly acquired at specific time intervals; Each time the value of the torque is obtained, the value of the torque is compared with a specific first threshold, wherein the specific first threshold is equivalent to the value of the torque when the fracture rod has been reliably pressed into the fracture object; After determining that the value of the torque is above the first threshold, each time the value of the torque is obtained, the latest value of the torque is compared with a second threshold defined based on the maximum value of the previously obtained torque. If the latest value of the torque is below the second threshold, it is determined that the fracture of the fracture object has been completed.

2. The fracturing device according to claim 1, characterized in that: The second threshold is the value obtained by multiplying the maximum value of the torque by a coefficient α (0 < α < 1).

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