Air intake structure and deposition device

Abstract

The application discloses an air inlet structure and a deposition device. The air inlet structure comprises a first bin body, a second bin body and a first dispersion component. The first bin body has a first chamber and a first air inlet communicating with the first chamber. The second bin body is connected to the second bin body and has a second chamber communicating with the first chamber. The first dispersion component is arranged in the first chamber and protrudes towards the first air inlet. Along a first flow direction of the gas relative to the first dispersion component, the first dispersion component has a plurality of groups of first channels. The air passage area of each group of first channels gradually decreases, and / or the distance between each group of first channels gradually increases. The first dispersion component protrudes towards the first air inlet, can guide the flow of the gas away from the first air inlet, avoid the gas gathering near the first air inlet, and reduce the air passage capacity of the end of the first dispersion component away from the first air inlet by combining the differential design of the first channels on the first dispersion component, so that the uniformity of the overall distribution of the gas is improved.

Description

Technical Field

[0001] The present invention relates to the field of vacuum deposition technology, and in particular to an air intake structure and a deposition device. Background Art

[0002] During the coating process, gases (such as process gases or purge isolation gases) need to be introduced into the chamber. Locations far from the air inlet require gas diffusion to reach them, which can easily lead to uneven gas distribution in large chambers. Related technologies address this issue by providing a dispersion plate with multiple vents. Once blocked by the plate, the gas will flow along the plate and pass through the vents at different locations. However, current dispersion plates are flat, perpendicular to the air inlet direction. The gas experiences significant velocity loss upon collision with the plate, resulting in the gas being primarily concentrated near the air inlet, with limited dispersion effectiveness. Summary of the Invention

[0003] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention provides an air intake structure that can improve the dispersion effect of gas.

[0004] The present invention also provides a deposition device using the air intake structure.

[0005] The air intake structure according to the first embodiment of the present invention includes:

[0006] A first chamber body having a first chamber and a first air inlet communicating with the first chamber;

[0007] a second chamber connected to the second chamber and having a second chamber communicating with the first chamber;

[0008] A first dispersing component is arranged in the first chamber, and the first dispersing component is protruded toward the first air inlet. Along the first flow direction of the gas flowing relative to the first dispersing component, the first dispersing component has multiple groups of first channels, and along the first flow direction, the ventilation area of ​​each group of the first channels gradually decreases, and / or the distance between each group of the first channels gradually increases.

[0009] The air intake structure according to the embodiment of the present invention has at least the following beneficial effects:

[0010] The first dispersing component is protruding toward the first air inlet, which can guide the gas to flow away from the first air inlet, avoiding the gas from gathering at a position near the first air inlet. At the same time, combined with the differentiated design of the first channel on the first dispersing component, the ventilation capacity of the first dispersing component away from the first air inlet is reduced, thereby improving the uniformity of the overall gas distribution.

[0011] In other embodiments of the present invention, the air intake structure also includes a second dispersion component, which is arranged in the first chamber and located on the side of the first dispersion component away from the first air inlet. The second dispersion component has multiple groups of second channels, and at least some of the first channels and the second channels are staggered with each other.

[0012] In other embodiments of the present invention, the second dispersing component is arranged to protrude toward the first air inlet, and along the second flow direction of the gas flowing relative to the second dispersing component, the ventilation area of ​​each group of the second channels gradually decreases, and / or the distance between each group of the second channels gradually increases.

[0013] In other embodiments of the present invention, a side of the first dispersing component away from the first air inlet defines a first recessed space, and a portion of the second dispersing component is located in the first recessed space.

[0014] In other embodiments of the present invention, a second recessed space is defined on a side of the second dispersing component away from the first dispersing component, and the air intake structure further includes a third dispersing component having a plurality of third channels, and the third dispersing component is at least partially located in the second recessed space.

[0015] In other embodiments of the present invention, the ventilation area of ​​the first channel gradually increases along the direction in which the gas passes through the first channel, or, along the first flow direction, at least part of the first channel is inclined, and the inclination directions of adjacent inclined first channels are opposite.

[0016] In other embodiments of the present invention, the width of the first chamber is smaller than the length and height, and the first dispersing component is connected to at least two chamber walls of the first chamber in the width direction.

[0017] In other embodiments of the present invention, the air intake structure also includes an adjusting component detachably connected between the first chamber and the second chamber, the adjusting component has a fourth channel, and the first warehouse body and the second warehouse body can be opened relative to each other so that the adjusting component is in a detachable state.

[0018] In other embodiments of the present invention, the air intake structure also includes two groups of air guide components, which are detachably arranged in the second chamber. A gap is formed between the two groups of air guide components for placing the substrate to be processed. The shape of the air guide components is adapted to the shape of the substrate. The first warehouse body and the second warehouse body can be opened relative to each other so that the air guide components are in a detachable state.

[0019] In other embodiments of the present invention, the air intake structure also includes a third chamber, which has a third chamber connected to the first chamber, and a second air inlet connected to the third chamber. The third chamber is arranged around the first chamber, wherein the first air inlet is used to introduce the first gas, the second air inlet is used to introduce the second gas, and the third chamber is used to form an air curtain in the second chamber to confine the first gas.

[0020] A deposition device according to a second embodiment of the present invention includes:

[0021] The air intake structure;

[0022] a heating device, thermally connected to at least the air inlet structure, for heating the gas in the first chamber;

[0023] an air intake pipe connected to the first air intake port;

[0024] a flow regulating device connected to the air inlet pipe;

[0025] The controller is used to record the preset flow information of the gas and the preset temperature information of the heating device corresponding to the process information. In response to the input process information, the controller adjusts the intake flow through the flow regulating device and adjusts the heating temperature through the heating device.

[0026] In other embodiments of the present invention, the deposition device also includes a temperature detection device, which is used to detect the temperature of the gas in the first chamber. The controller is used to obtain the first temperature of the heating device, the flow rate of the gas flowing into the first chamber, and the second temperature detected by the temperature detection device. When the second temperature meets the gas temperature required by the current process information, the first temperature is recorded as the preset temperature information corresponding to the current process information and the current flow rate information.

[0027] Additional aspects and advantages of the present invention will be set forth in part in the description which follows and, in part, will be obvious from the description which follows, or may be learned by practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] The present invention will be further described below with reference to the accompanying drawings and embodiments, in which:

[0029] Figure 1 is a cross-sectional view of an air intake structure in an embodiment of the present invention;

[0030] Figure 2 for Figure 1 A three-dimensional diagram of the central air intake structure, with the second compartment hidden in the figure;

[0031] Figure 3 is a schematic diagram of a first storage body in another embodiment of the present invention;

[0032] Figure 4 is a cross-sectional view of an air intake structure in another embodiment of the present invention;

[0033] Figure 5 is an enlarged schematic diagram of the first channel according to an embodiment of the present invention;

[0034] Figure 6 is an enlarged schematic diagram of the first channel of another embodiment of the present invention;

[0035] Figure 7 for Figure 1 A cross-sectional view of the first and second compartments of the central air intake structure in a closed state;

[0036] Figure 8 for Figure 1 A cross-sectional view of the first and second compartments of the central air intake structure in an open state;

[0037] Figure 9 for Figure 1 A side view of the first compartment of the central air intake structure;

[0038] Figure 10 It is a front view of the connection between the first bin and the third bin in another embodiment of the present invention;

[0039] Figure 11 for Figure 10 A three-dimensional schematic diagram of the third warehouse;

[0040] Figure 12 A rear view of the first storage body in another embodiment of the present invention;

[0041] Figure 13 for Figure 12 A three-dimensional schematic diagram of the first warehouse;

[0042] Figure 14 This is a rear view of a plurality of first storage bodies connected in another embodiment of the present invention;

[0043] Figure 15 Schematic diagram of the deposition system of the present invention.

[0044] Reference numerals:

[0045] First housing 100, first chamber 110, first air inlet 120;

[0046] Second chamber 200, second chamber 210;

[0047] A first dispersing component 300, a first channel 310, and a first recessed space 320;

[0048] A second dispersing component 400, a second channel 410, and a second recessed space 420;

[0049] A third dispersing component 500 and a third channel 510;

[0050] Adjusting component 600, fourth channel 610;

[0051] Air guide component 700;

[0052] Heating device 800;

[0053] Air intake duct 900;

[0054] Flow regulating device 1000;

[0055] Temperature detection device 1100

[0056] Controller 1200;

[0057] Fourth dispersing component 1300;

[0058] The third warehouse body 1400. DETAILED DESCRIPTION

[0059] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.

[0060] In the description of the present invention, it should be understood that descriptions involving orientations, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they cannot be understood as limitations on the present invention.

[0061] In the description of the present invention, "several" means more than one, "plurality" means more than two, "greater than," "less than," and "exceed" are understood to exclude the number itself, while "above," "below," and "within" are understood to include the number itself. The use of "first" and "second" in the description is solely for the purpose of distinguishing technical features and should not be construed as indicating or implying relative importance, implicitly specifying the number of the indicated technical features, or implicitly specifying the order of the indicated technical features.

[0062] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, and connecting should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0063] In the description of the present invention, reference to terms such as "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the exemplary expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0064] Reference Figure 1 、 Figure 2 The air intake structure in the embodiment of the present invention includes a first chamber body 100, a second chamber body 200 and a first dispersing component 300. The first chamber body 100 is used to connect to the gas source. The gas is dispersed by the first dispersing component 300 in the first chamber body 100 and then flows into the second chamber body 200. The first dispersing component 300 of this embodiment has an air guide surface, which can guide the gas to flow away from the first air inlet, avoiding the gas from gathering at a position near the first air inlet. At the same time, combined with the differentiated design of the first channel on the first dispersing component 300, the ventilation capacity of the first dispersing component 300 away from the first air inlet is reduced, thereby achieving the goal of improving the uniformity of the overall gas distribution.

[0065] It should be noted that when the present invention refers to the positional relationship, it is based on Figure 1 Based on the description, when the placement posture of the air intake structure is relatively Figure 1 When an adjustment occurs, the aforementioned positional relationship will also adaptively change according to the adjustment of the overall posture, and such a change is understandable to those skilled in the art.

[0066] like Figure 1 、 Figure 2 As shown, the first warehouse body 100 and the second warehouse body 200 are both cubes, and the width dimension (e.g., the left-right dimension in the figure) is smaller than the length dimension (e.g., the front-back dimension in the figure) and the height dimension (e.g., the up-down dimension in the figure). It should be understood that the shapes of the first warehouse body 100 and the second warehouse body 200 are not limited to this. For example, referring to Figure 3 The warehouse body may also have a curvature. In other embodiments, the warehouse body may also be a quadrangular pyramid structure, a triangular pyramid structure, a trapezoidal structure, etc.

[0067] The first chamber 100 has a first chamber 110 and a first air inlet 120 connected to the first chamber 110. The first air inlet 120 is used to connect to an external air inlet pipe. Gas can enter the first chamber 110 through the first air inlet 120. Figure 1In the embodiment shown, the first air inlet 120 is provided on one side of the first chamber 110, for example, the front side in the figure, and the opening for communicating the first chamber 110 with the second chamber body 200 is located on the opposite side, for example, the rear side in the figure. In some embodiments, the shape of the first chamber 110 is configured to facilitate gas dispersion, for example, along the direction in which the gas enters from the first air inlet 120, that is, Figure 1 From the front to the back, the cross-sectional area of ​​the first chamber 110 gradually increases, providing sufficient dispersion space for the gas. Figure 1 In the illustrated embodiment, the two oppositely disposed walls of the first chamber 110 along the height direction are inclined, while the two oppositely disposed walls along the width direction remain parallel, thereby enabling the cross-sectional area of ​​the first chamber 110 to gradually increase without increasing the width of the first housing 100. In other embodiments, a plurality of first chambers 110 are disposed within the first housing 100, and the plurality of first chambers 110 are arranged along a set direction. Accordingly, the first housing 100 has a plurality of first air inlets 120 disposed corresponding to the first chambers 110, and each first air inlet 120 is connected to a first chamber 110. By providing a plurality of first air inlets 120, air intake can be achieved at multiple locations, which also facilitates gas dispersion.

[0068] The second chamber 200 has a second chamber 210, which is in communication with the first chamber 110 so that the gas dispersed in the first chamber 110 can flow into the second chamber 210. The second chamber 210 is used to place the substrate to be processed. Depending on the type of gas, the gas entering the second chamber 210 can produce different effects. For example, when the gas entering is a reactive gas, the gas entering the second chamber 210 can be deposited on the surface of the substrate to form a thin film. When the gas entering is an inert gas, the gas entering the second chamber 210 can be used for purging. It should be noted that when the first chamber 100 and the second chamber 200 can be relatively open or closed, the communication between the second chamber 210 and the first chamber 110 means that the two chambers remain in communication when the first chamber 100 and the second chamber 200 are in a closed state.

[0069] The first dispersing component 300 is disposed in the first chamber 110. In some cases, the first dispersing component 300 is connected to the first chamber body 100 to enhance the strength of the first chamber body 100. This will be described in detail in subsequent embodiments. The first dispersing component 300 has a plurality of first channels 310. Figure 1 、 Figure 4 The first channel 310 passes through the first dispersing member 300 substantially along the air inlet direction, allowing the gas to flow from one side to the other side of the first dispersing member 300. The first channel 310 can be a regular structure, such as a round hole, a square hole, a strip groove, etc., or an irregular structure.

[0070] The first dispersing member 300 is disposed to protrude toward the air inlet 120. It should be noted that the protruding arrangement referred to herein includes the first dispersing member 300 protruding toward the air inlet 120 as a whole (e.g. Figure 1 ), also includes a portion of the first dispersing component 300 protruding toward the air inlet 120 (for example Figure 4 In either case, a convex gas-guiding surface is formed on the side of the first dispersing component 300 facing the air inlet 120. The convex gas-guiding surface can be a flat surface as shown in the figure or a curved surface. When the gas enters the first chamber 110 from the air inlet 120, it is blocked by the first dispersing component 300 and flows along the gas-guiding surface of the first dispersing component 300. Since the gas velocity loss is small, it can flow in a direction away from the air inlet 120, thereby avoiding accumulation near the air inlet 120.

[0071] Since the first dispersing component 300 has a convex gas-guiding surface, the gas can easily flow along the surface of the first dispersing component 300. Therefore, the gas may gather at the angle between the cavity wall of the first chamber 110 and the first dispersing component 300. To solve this problem, the first flow direction of the gas relative to the first dispersing component 300, that is, Figure 1 In the direction indicated by the arrow parallel to the air guide surface of the first dispersing component 300, the multiple groups of first channels 310 are distributed in sequence, and along the first flow direction, the ventilation area of ​​each group of first channels 310 gradually decreases, and / or the distance between each group of first channels 310 gradually increases. In short, along the first flow direction, the ventilation capacity of the first dispersing component 300 gradually decreases.

[0072] The ventilation capacity is lowest at the position farthest from the first air inlet, that is, the aforementioned angle position where gas accumulation is likely to occur. Thus, even if there is more gas at the angle position, the amount of gas that can pass through the first dispersing component 300 is relatively reduced, thereby achieving balance and improving the problem of uneven gas distribution.

[0073] It should be noted that this embodiment does not limit the number of groups of first channels 310 and the number of first channels 310 contained in each group. The number of first channels 310 in different groups may be equal or unequal. A group of first channels 310 contains at least one first channel 310. When the ventilation area of ​​the first channels 310 decreases along the first flow direction, the first channels 310 with equal ventilation areas are grouped together. When the spacing between the first channels 310 decreases along the first flow direction, the first channels 310 with equal spacing are grouped together. For example, the first dispersing component 300 is provided with 6 first channels 310 along the first flow direction, the ventilation areas of the 1st to 3rd first channels 310 are equal, the ventilation area of ​​the 4th first channel 310 is smaller than the ventilation area of ​​the 3rd first channel 310, the ventilation areas of the 5th and 6th first channels 310 are equal and smaller than the 4th first channel 310, then the 1st to 3rd first channels 310 are listed as the first group, the 4th first channel 310 is listed as the second group, and the 5th and 6th first channels 310 are listed as the third group. It should be noted that the grouping of the first channels 310 can be adjusted according to the protrusion degree of the first dispersing component 300. If the protrusion degree is large, the air guiding surface is steeper, the gas flow rate along the air guiding surface is faster, and it is relatively easier to gather at the angle. If the protrusion degree is small, the air guiding surface is flatter, the gas flow rate along the air guiding surface is slower, and it is easier to pass through the first dispersing component 300 from the passing first channel 310 during the flow process, and the gas reaching the angle will be relatively reduced. In other examples, when the air guiding surface on the first dispersing component 300 is set to be relatively flat, the first dispersing component 300 can be divided into only two groups along the first flow direction, wherein the first group contains most of the first channels 310, and the ventilation capacity of the first channels 310 in the first group is the same or slightly reduced, and the first channels 310 in the second group are located at the end of the first dispersing component 300 away from the first air inlet 120, and its ventilation capacity is lower than the ventilation capacity of the first channels 310 in the first group.

[0074] This embodiment is not limited to the aforementioned grouping method, and it is sufficient to ensure that the ventilation capacity of the first dispersing component 300 shows a downward trend along the first flow direction.

[0075] Based on the above, this embodiment is provided with a first dispersing member 300 protruding toward the first air inlet 120. Gas entering from the first air inlet 120 can flow along the first dispersing member 300, avoiding accumulation near the first air inlet 120. At the same time, along the first flow direction, the ventilation capacity of the first dispersing member 300 decreases, with the ventilation capacity being lowest at the end farther from the first air inlet 120. Even if gas accumulates at a location farther from the first air inlet 120, the amount of gas passing through the first dispersing member 300 per unit time can be balanced. In short, after being dispersed by the first dispersing member 300, the gas can be well dispersed after passing through the first dispersing member 300, and the problem of uneven gas distribution is improved.

[0076] In some embodiments, reference Figure 1 The air intake structure also includes a second dispersing component 400, which is arranged in the first chamber 110 and is located on the side of the first dispersing component 300 away from the first air inlet 120, such as the rear side in the figure. The second dispersing component 400 has multiple groups of second channels 410, and at least some of the first channels 310 and the second channels 410 are staggered with each other. That is, at least in some areas, after passing through the first dispersing component 300, the gas cannot directly pass through the second dispersing component 400, but must flow along the gap between the first dispersing component 300 and the second dispersing component 400 for a distance and then pass through the second dispersing component 400 from the second channel 410. Therefore, the dispersion effect of the gas can be enhanced and further uniformity can be achieved. It should be noted that the shape of the second channel 410 and the meaning of the grouping can be understood with reference to the first channel 310.

[0077] In this embodiment, the second dispersing component 400 may be a flat plate structure, or a protruding structure similar to the first dispersing component 300 .

[0078] When the air intake structure is provided with a second dispersion component 400, in some embodiments, referring to Figure 1 The second dispersing component 400 is arranged to protrude toward the first air inlet 120. Along the second flow direction of the gas flowing relative to the second dispersing component 400, the ventilation area of ​​each group of second channels 410 gradually decreases, and / or the distance between each group of second channels 410 gradually increases. Since gas easily accumulates at the angle between the first dispersing component 300 and the cavity wall, even if the ventilation capacity of the first dispersing component 300 is designed differently, in some cases there will still be a situation where more gas passes through the angle. On this basis, by designing the ventilation capacity of the second dispersing component 400 differently, the problem of uneven distribution can be further improved. It should be noted that the specific grouping scheme of the second channels 410 can be understood with reference to the first channels 310.

[0079] When the air intake structure is provided with a second dispersion component 400, in some embodiments, referring to Figure 1 The first dispersing member 300 is a dispersing plate. The first dispersing member 300 as a whole protrudes toward the first air inlet 120. Therefore, a first concave space 320 is defined or recessed on the side away from the first air inlet 120. The second dispersing member 400 part (the protruding part) is located in the first concave space 320. It can be understood that if the first dispersing member 300 adopts Figure 4 In the structure shown, the first chamber 110 needs to have a larger size in the front-to-back direction to accommodate the first dispersing component 300 and the second dispersing component 400. However, due to the volume of the equipment, the first chamber 110 cannot be increased indefinitely. On this basis, by arranging the protruding portion of the second dispersing component 400 in the first recessed space 320 of the first dispersing component 300, it helps to place the first dispersing component 300 and the second dispersing component 400 in a limited space.

[0080] When the air intake structure is provided with a second dispersion component 400, in some embodiments, referring to Figure 1 The second dispersing component 400 is also a dispersing plate. It protrudes entirely toward the first air inlet 120, thereby defining, or rather, recessing, a second recessed space 420 on the side away from the first air inlet 120. In this embodiment, the air inlet structure further comprises a third dispersing component 500 having a plurality of third channels 510 that extend through the third dispersing component 500 generally in the direction of air inlet. The third dispersing component 500 is at least partially located in the second recessed space 420, further dispersing the gas while allowing the first dispersing component 300, the second dispersing component 400, and the third dispersing component 500 to be accommodated within a limited space. For example, the third dispersing component 500 is entirely located in the second recessed space 420, thereby maximizing the space within the chamber to accommodate more dispersing components without increasing the size of the chamber. Adapting to the shape of the second dispersing component 400, the third dispersing component 500 is also positioned to protrude toward the first air inlet 120.

[0081] In some embodiments, reference Figure 5 , along the direction in which the gas passes through the first channel 310, the ventilation area of ​​the first channel 310 gradually increases. For example, the first channel 310 is a conical hole, so that the gas flowing out of the first channel 310 can flow in all directions, which facilitates uniform distribution of the gas.

[0082] In other embodiments, referring to Figure 6At least some of the first channels 310 are arranged obliquely along the aforementioned first flow direction (i.e., the direction of the arrow in the figure), and adjacent obliquely arranged first channels 310 are inclined in opposite directions. This also allows the gas flowing out of the first channels 310 to flow in all directions. Specifically, in the illustrated embodiment, four obliquely arranged first channels 310 are shown along the arrow directions. The first and third first channels 310 have the same inclination direction, and the second and fourth first channels 310 have the same inclination direction, but in the opposite direction to the first and third first channels 310.

[0083] It should be noted that, in this embodiment, a first channel 310 perpendicular to the first dispersing component 300 may be provided between adjacent inclined first channels 310 , that is, the gas can flow in three directions after passing through the first dispersing component 300 .

[0084] It should also be noted that, although the above embodiment is described using the first channel 310 as an example, it can be applied to other dispersed components.

[0085] In some embodiments, the first dispersing component 300 is connected to at least two cavity walls in the width direction of the first chamber 110, that is, it acts as a reinforcement. As can be seen from the above, the width of the first chamber 110 is smaller than the length and height, so the cavity wall in the width direction forms a large-area thin-walled structure. When the external heating device heats the first chamber body 100 (the purpose of heating is to heat the internal gas), the first chamber body 100 will deform due to the heating, for example, the cavity wall in the width direction bulges outward, causing the heating device and the first chamber body 100 to separate from each other in certain positions. On the one hand, this will affect the heating efficiency and cause the internal gas temperature to be uneven. On the other hand, for certain types of heating devices, long-term dry burning will cause damage to the heating device. Based on this, by connecting the first dispersing component 300 to the two cavity walls in the width direction of the first chamber 110, the strength of the thin-walled structure can be increased, reducing or avoiding deformation of the cavity wall due to heat. That is, the first dispersing component 300 of this embodiment can be used for both gas dispersion and chamber body reinforcement. In addition, the first dispersing component 300 is connected to the cavity wall of the chamber 110 on all sides, which further increases the strength while preventing the gas from passing directly through the gap between the first dispersing component 300 and the cavity wall without being dispersed.

[0086] It should be noted that, in some embodiments, when the second dispersing component 400 is provided, the second dispersing component 400 is also connected to at least two cavity walls in the width direction of the first cavity 110 , thereby further increasing the strength.

[0087] In some embodiments, reference Figure 1The air intake structure also includes a fourth dispersing member 1300, located on the side of the second dispersing member 400 or the third dispersing member 500 away from the first air inlet 120, to further enhance gas dispersion. The gas is already relatively uniform after passing through the first dispersing member 300 and the second dispersing member 400 (or the third dispersing member 500). Therefore, the fourth dispersing member 1300 can be a flat plate, thus reducing the space occupied within the chamber.

[0088] In some embodiments, reference Figure 1 、 Figure 7 、 Figure 8 and Figure 9 The air intake structure also includes an adjusting component 600 that is detachably connected between the first chamber 110 and the second chamber 210. For different processes, the amount of gas required to enter the second chamber 210 from the first chamber 110 is also different. By setting a detachable adjusting component 600, different adjusting components 600 can be replaced according to different processes to adjust the gas flow rate from the first chamber 110 into the second chamber 210.

[0089] The regulating component 600 has a fourth channel 610 for gas to pass through. The fourth channel 610 can be a plurality of holes distributed along the height direction, or a slot extending along the height direction. By changing the size of the holes, the spacing between the holes, the length of the slot, the width of the slot, etc., the flow rate of the gas passing through the fourth channel 610 can be adjusted. Figure 9 As shown in the example, the adjustment component 600 has a plurality of fourth channels 610 arranged along the width direction, and each fourth channel 610 includes a plurality of holes evenly distributed along the length direction.

[0090] In this embodiment, the first chamber 100 and the second chamber 200 can be opened relative to each other, so that the adjustment member 600 is in a detachable state. Specifically, the first chamber 100 and the second chamber 200 can rotate relative to each other. For example, the second chamber 200 is connected to the first chamber 100 via a rotating shaft, so that the second chamber 200 can rotate relative to the first chamber 100. The adjustment member 600 is clamped between the first chamber 100 and the second chamber 200. In this way, when the second chamber 200 is opened, the adjustment member 600 is opened. Figure 7 Turn the closed position to Figure 8 In the open position shown, the adjustment member 600 is in a detachable state. Taking the figure as an example, a mounting groove is formed on the side of the first housing 100 facing the second housing 200, and the adjustment member 600 is embedded in the mounting groove. It is understood that the mounting groove can also be formed on the side of the second housing 200 facing the first housing 100.

[0091] In some embodiments, reference Figure 1 and Figure 2The air intake structure also includes two sets of air guide components 700, which are removably mounted within the second chamber 210. A gap is formed between the two sets of air guide components 700 for placing the substrate to be processed. The shape of the air guide components 700 adapts to the shape of the substrate and guides the gas flowing into the second chamber 210 so that the gas is concentrated near the substrate. Substrates come in a variety of shapes. By providing removable air guide components 700, different shapes can be replaced according to the substrate shape, eliminating the need to design multiple second chamber bodies 200 based on the substrate shape, which helps reduce costs.

[0092] As shown in the figure, for example, the first and second housings 100 and 200 can be opened relative to each other, allowing the air guide component 700 to be detachable. Specifically, the first and second housings 100 and 200 can rotate relative to each other. For example, the second housing 200 is connected to the first housing 100 via a rotating shaft, allowing the second housing 200 to rotate relative to the first housing 100. A mounting groove is formed on the side of the second housing 200 facing the first housing 100. The air guide component 700 includes a first portion for forming the aforementioned gap and a second portion embedded in the mounting groove. The air guide component 700 is fixed to the second housing 200 by clamping or by threaded fasteners.

[0093] It should be noted that, in the aforementioned embodiments, in addition to being able to disperse the gas, each dispersion component can also extend the residence time of the gas in the first chamber 110, so that the external heating device can raise the gas to the temperature required for the process. At the same time, the longer the heating time, the more helpful it is to ensure the uniformity of the gas temperature.

[0094] In some embodiments, reference Figure 10 、 Figure 11 The air intake structure further includes a third chamber 1400, which has a third chamber connected to the second chamber 210. That is, both the first chamber 100 and the third chamber 1400 are connected to the second chamber 200. As shown in the figure, the third chamber 1400 is an annular structure with an empty installation space in the middle. The first chamber 100 is installed in the installation space, so that the third chamber 1400 is as shown in FIG. Figure 11 As shown, it is arranged around the first storage body 100.

[0095] The third chamber body 1400 also has a second air inlet connected to the third chamber. The gas introduced from the second air inlet passes through the third chamber and then enters the second chamber 210. Correspondingly, the gas introduced from the first air inlet 120 passes through the first chamber 110 and enters the second chamber 210 after being dispersed by the aforementioned dispersion components. Specifically, the first air inlet 120 is used to introduce a first gas, such as a process gas, and the second air inlet is used to introduce a second gas, such as an inert gas. In this way, after the inert gas enters the second chamber 210 through the third chamber body 1400, a gas curtain surrounding the first gas can be formed, thereby confining the first gas to the area where the substrate is located, thereby improving the film forming efficiency and the utilization rate of the first gas.

[0096] In some embodiments, the first housing 100 includes Figure 1 In addition to the cubic structure shown, it can also be set to Figure 12 、 Figure 13 The quadrangular pyramid structure shown in FIG. 1 , wherein the first air inlet 120 is provided on the end surface of the small end of the quadrangular pyramid structure. Figure 14 The air intake structure includes multiple first bin bodies 100, which are arranged in parallel and connected into an integrated structure. Each first bin body 100 is connected to the second bin body 200. In this way, gas can be introduced into each first bin body 100, thereby playing a dispersing role. Combined with the dispersion of gas in each first bin body 100, the uniformity of gas distribution can be further improved.

[0097] The embodiment of the present invention also provides a deposition device, referring to Figure 15 , including a heating device 800, an air intake pipe 900, a flow regulating device 1000, a controller 1200, and the air intake structure of each of the aforementioned embodiments. The heating device 800 is thermally connected to at least the first chamber 100 and can heat the internal gas through the first chamber 100. Specifically, the heating device 800 is attached to the outer surface of the first chamber 100. In some embodiments, the heating device 800 can also be thermally connected to the second chamber 200.

[0098] The air intake pipe 900 is connected to the first air intake port 120, and the flow regulating device 1000 is connected to the air intake pipe 900 for regulating the flow. Figure 15 As shown in the example, a first flow path for passing process gas and a second flow path for introducing inert gas are provided, and a flow regulating device 1000 is provided on each flow path. In order to realize gas switching, valves are provided on the first flow path and the second flow path.

[0099] For different process routes, the gas flow rate and heating temperature are also different. Based on this, the controller 1200 is used to record the flow rate information corresponding to the process information, and the first temperature information of the heating device 800 corresponding to the process information. When the user inputs or other devices input the process information to the controller 1200, in response to the input process information, the controller 1200 adjusts the intake flow rate through the flow regulating device 1000 so that the intake flow rate meets the flow rate required by the process, and adjusts the heating temperature through the heating device 800 so that the heating temperature of the gas meets the temperature required by the process. In this way, the user does not need to repeatedly input a large amount of parameter information, which can simplify the user's operation and avoid the influence of erroneous input information on the deposition quality.

[0100] It should be noted that the controller 1200 can record the preset temperature information and preset flow information by direct user input or automatically during the adjustment process. For example, for the preset flow information, the gas flow required for a certain process can be obtained through calculation or actual testing to form a database, and then the database can be imported into the controller 1200 to establish a mapping relationship between the process information and the flow.

[0101] The heating device 800 is disposed outside the first chamber 100. Therefore, there may be a discrepancy between the heating temperature of the heating device 800 and the actual heating temperature of the gas. Typically, the heating temperature of the heating device 800 is greater than the actual heating temperature of the gas. However, the controller 1200 can directly control the heating device 800. Therefore, in some embodiments, the deposition apparatus is further provided with a feedback adjustment step to ensure that the gas heating temperature meets the temperature required by the process. Specifically, the deposition apparatus further includes a temperature detection device 1100, which is used to detect the temperature of the gas within the first chamber 110 and to feed the detected temperature back to the controller 1200. For ease of explanation, the temperature detected by the temperature detection device 1100 is referred to as the second temperature. In addition, the controller 1200 is also used to obtain the heating temperature of the heating device 800. For the sake of convenience, the heating temperature of the heating device 800 is recorded as the first temperature. It should be noted that there is a correlation between the first temperature and the second temperature. Specifically, when the heating temperature of the heating device 800 is adjusted to a certain temperature, this temperature is called the first temperature, and the gas temperature of the first chamber 110 after stabilization is called the second temperature. That is, each first temperature has a corresponding second temperature.

[0102] In addition to being affected by the first temperature, the second temperature is also affected by the gas flow rate. The controller 1200 can obtain the first temperature of the heating device 800, the flow rate of the incoming gas, and the second temperature detected by the temperature detection device 1100. When the second temperature meets the temperature required by the current process, the first temperature at this time is recorded as the preset temperature information corresponding to the current process and the current flow rate. In this way, the mapping relationship between the actual heating temperature of the gas and the flow rate, process information, and heating temperature of the heating device can be realized.

[0103] While the embodiments of the present invention have been described in detail above with reference to the accompanying drawings, the present invention is not limited to the embodiments described above. Various modifications may be made within the scope of knowledge possessed by a person skilled in the art without departing from the spirit of the present invention. Furthermore, the embodiments of the present invention and the features thereof may be combined with one another unless there is a conflict.

Claims

1. Air intake structure, characterized in that: include: A first chamber body having a first chamber and a first air inlet communicating with the first chamber; a second chamber connected to the first chamber and having a second chamber communicating with the first chamber; a first dispersing member disposed in the first chamber, the first dispersing member being protruding toward the first air inlet, the first dispersing member forming a protruding air guide surface on a side facing the first air inlet, the air guide surface being capable of guiding air to flow in a direction away from the first air inlet, the first dispersing member having a plurality of groups of first channels along a first flow direction of air relative to the first dispersing member, and the ventilation area of ​​each group of the first channels gradually decreasing along the first flow direction, and / or the distance between each group of the first channels gradually increasing; The air intake structure also includes a second dispersing component, which is arranged in the first chamber and located on a side of the first dispersing component away from the first air inlet. The second dispersing component has multiple groups of second channels, and at least some of the first channels and the second channels are staggered with each other.

2. The air intake structure according to claim 1, characterized in that: The second dispersing component is protruding toward the first air inlet, and along the second flow direction of the gas relative to the second dispersing component, the ventilation area of ​​each group of the second channels gradually decreases, and / or the distance between each group of the second channels gradually increases.

3. The air intake structure according to claim 1, characterized in that: A first recessed space is defined on a side of the first dispersing component away from the first air inlet, and a portion of the second dispersing component is located in the first recessed space.

4. The air intake structure according to claim 3, characterized in that: A second recessed space is defined on a side of the second dispersing component away from the first dispersing component. The air intake structure further includes a third dispersing component having a plurality of third channels. The third dispersing component is at least partially located in the second recessed space.

5. The air intake structure according to claim 1, characterized in that: The ventilation area of ​​the first channel gradually increases along the direction in which gas passes through the first channel, or, along the first flow direction, at least part of the first channel is inclined, and the inclined directions of adjacent inclined first channels are opposite.

6. The air intake structure according to claim 1, characterized in that: The width of the first chamber is smaller than the length and height, and the first dispersing component is connected to at least two chamber walls of the first chamber in the width direction.

7. The air intake structure according to claim 1, characterized in that: The air intake structure further includes an adjusting component detachably connected between the first chamber and the second chamber, the adjusting component having a fourth channel, and the first bin body and the second bin body can be opened relative to each other so that the adjusting component is in a detachable state.

8. The air intake structure according to claim 1, characterized in that: The air intake structure also includes two groups of air guide components, which are detachably arranged in the second chamber. A gap is formed between the two groups of air guide components for placing the substrate to be processed. The shape of the air guide components is adapted to the shape of the substrate. The first warehouse body and the second warehouse body can be opened relative to each other so that the air guide components are in a detachable state.

9. The air intake structure according to claim 1, characterized in that: The air intake structure also includes a third chamber, which has a third chamber connected to the first chamber, and a second air inlet connected to the third chamber. The third chamber is arranged around the first chamber, wherein the first air inlet is used to introduce the first gas, the second air inlet is used to introduce the second gas, and the third chamber is used to form an air curtain in the second chamber to confine the first gas.

10. A deposition device, characterized in that include: The air intake structure according to any one of claims 1 to 9; a heating device, thermally connected to at least the air inlet structure, for heating the gas in the first chamber; an air intake pipe connected to the first air intake port; a flow regulating device connected to the air inlet pipe; The controller is used to record the preset flow information of the gas and the preset temperature information of the heating device corresponding to the process information. In response to the input process information, the controller adjusts the intake flow through the flow regulating device and adjusts the heating temperature through the heating device.

11. The deposition device according to claim 10, characterized in that: The deposition device also includes a temperature detection device, which is used to detect the temperature of the gas in the first chamber. The controller is used to obtain the first temperature of the heating device, the flow rate of the gas flowing into the first chamber, and the second temperature detected by the temperature detection device. When the second temperature meets the gas temperature required by the current process information, the first temperature is recorded as the preset temperature information corresponding to the current process information and the current flow rate information.

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