Spectral data processing method based on a spliced array of spectral MEMS Fabry-Perot cavity chips

The spectral data is processed through multi-chip splicing array and cubic spline interpolation method, and the problems of low acquisition efficiency and poor stability of miniaturized near-infrared spectrometers are solved, efficient continuity and stability of spectral data are achieved, and the development of miniaturized near-infrared spectroscopy technology is promoted.

CN116448701BActive Publication Date: 2025-08-05四川启睿克科技有限公司
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Patent Information

Application Number
CN202310284563.7
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2023-03-22
Publication Date
2025-08-05
Estimated Expiration
2043-03-22

AI Technical Summary

Technical Problem

The current spectral MEMS method of the microscopic near-infrared spectrometer has low acquisition efficiency and poor stability, which affects the development of miniaturized near-infrared spectroscopy technology.

Method used

The band range of the traditional single-point spectral MEMS method is covered by a multi-chip splicing array, and the light intensity value of the virtual connection point is calculated by cubic spline interpolation method and smoothly spliced to improve the continuity and stability of the spectral data.

Benefits of technology

This greatly improves the spectrum acquisition efficiency and data stability, and significantly promotes the development of miniaturized near-infrared spectroscopy technology.

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Abstract

The present invention discloses a spectral data processing method based on a spectral MEMS Fabry-Perot cavity chip splicing array, comprising: calculating the wavelength scanning interval of a single-point spectral MEMS Fabry-Perot cavity chip; calculating the number of wavelength points contained in each sub-chip according to the number of chips in a multi-chip splicing array; calculating the band range contained in each sub-chip according to the number of wavelength points of the sub-chip and the wavelength sampling interval; collecting spectral data of a sample to be tested, and calculating the light intensity value of a virtual connection point by using a cubic spline interpolation method; smoothly splicing the spectral data of each sub-chip in the splicing array, and completing the spectral data processing of the splicing array. The present invention improves the efficiency and stability of spectral analysis.
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Description

Technical Field

[0001] The present invention relates to the technical field of spectrum MEMS Fabry-Perot cavity chip data processing, in particular to a spectrum data processing method based on a spectrum MEMS Fabry-Perot cavity chip splicing array. Background Art

[0002] With the development of micro-electromechanical technology, the miniaturization of near-infrared spectrometers has been a development focus in recent years. Currently, the most common miniaturized near-infrared spectrometer is based on the Fabry-Perot (Fabry cavity) interference tunable filter chip. The optical principle of the MEMS Fabry-Perot cavity chip is based on the Fabry-Perot interference principle. The spectrometer chip is made through semiconductor integrated circuit technology. The chip is driven by different voltages to change the cavity length of the MEMS Fabry-Perot cavity chip in real time to obtain different narrow-wave spectra. This type of single-point MEMS spectral chip uses a time-division approach to complete wavelength scanning of the full-scale (FSR) spectral range. This method requires gradually changing the voltage value and then changing the cavity length to collect spectral data of each wavelength point one by one. If the time required for a single-point MEMS spectral chip to collect spectral data of a single wavelength point is 0.5 seconds, and it actually contains M wavelength points, then it can be calculated that the time required to collect a single piece of spectral data of the sample to be tested each time is 0.5*M seconds. The more wavelength points a miniaturized spectrometer contains, the longer it takes to collect a single piece of spectral data. It has disadvantages such as low efficiency and poor stability. Low efficiency and stability will seriously restrict the development of miniaturized near-infrared spectroscopy technology. Therefore, how to improve the collection efficiency and stability of the spectral MEMS Fabry-Perot cavity chip has become a problem that must be solved. Summary of the Invention

[0003] In order to solve the problems existing in the prior art, the purpose of the present invention is to provide a spectral data processing method based on a spectral MEMS Fabry-Perot cavity chip splicing array, which increases the efficiency and stability of spectral analysis.

[0004] To achieve the above object, the technical solution adopted by the present invention is: a spectral data processing method based on a spectral MEMS Fabry-Perot cavity chip splicing array, comprising the following steps:

[0005] Step 1: Calculate the wavelength scanning interval of the single-point spectral MEMS Fabry-Perot cavity chip;

[0006] Step 2: Calculate the number of wavelength points contained in each sub-chip according to the number of chips in the multi-chip splicing array;

[0007] Step 3: Calculate the wavelength range of each sub-chip according to the number of wavelength points of the sub-chip and the wavelength sampling interval;

[0008] Step 4: Collect the spectrum data of the sample to be tested and calculate the light intensity value of the virtual connection point by cubic spline interpolation method;

[0009] Step 5: Smoothly stitch the spectral data of each sub-chip of the stitched array to complete the spectral data processing of the stitched array.

[0010] As a further improvement of the present invention, the step 1 is specifically as follows:

[0011] The single-point spectroscopy MEMS Fabry-Perot cavity chip adopts an evenly divided wavelength scanning method, and the wavelength range between every two adjacent wavelength points is equal. If the wavelength range of the single-point spectroscopy MEMS Fabry-Perot cavity chip is (λ2-λ1) and the number of wavelength points is m, then the wavelength range between two adjacent wavelength points of the MEMS Fabry-Perot cavity chip, that is, the wavelength scanning interval λ3, is calculated as:

[0012] λ3=(λ2-λ1) / (m-1).

[0013] As a further improvement of the present invention, the step 2 is specifically as follows:

[0014] A multi-chip splicing array is used to splice and cover the wavelength range of a single-point spectral MEMS Fabry-Perot cavity chip. If the splicing array contains a sub-chips, the number of wavelength points b contained in each sub-chip is:

[0015] b=floor(m / a)

[0016] Wherein, floor(.) is the rounding symbol. If (m / a) is not an integer, [mb*a] wavelength points will overflow. The overflowed wavelength points are distributed one by one to each sub-chip. Then, the number of wavelength points contained in the [mb*a] sub-chips in the spliced array is (b+1).

[0017] As a further improvement of the present invention, the step 3 is specifically as follows:

[0018] Set each sub-chip in the splicing array as (S1, S2, ..., S i ,……,S a ), when (m / a) is an integer, the number of wavelength points contained in each sub-chip is the same, which is b, then the sub-chip S i The included band range is: (λ1+(i-1)*b*λ3, λ1+(i-1)*b*λ3+λ3, …λ1+(i-1)*b*λ3+(b-1)λ3);

[0019] When (m / a) is not an integer, the number of wavelength points contained in the [mb*a] block in the sub-chip is (b+1), and the overflow wavelength points are distributed to each sub-chip one by one starting from S1. When 1≤i≤[mb*a], the sub-chip S iThe included wavelength range is: (λ1+(i - 1)*(b + 1)*λ3, λ1+(i - 1)*(b + 1)*λ3+λ3, …… λ1+(i - 1)*(b + 1)*λ3+bλ3);

[0020] When [m - b*a]<i≤a, the sub-chip S i The included wavelength range is: (λ1+(m - b*a - 1)*(b + 1)*λ3+(i - m + b*a - 1)*b*λ3, λ1+(m - b*a - 1)*(b + 1)*λ3+(i - m + b*a - 1)*b*λ3+λ3, …… λ1+(m - b*a - 1)*(b + 1)*λ3+(i - m + b*a - 1)*b*λ3+(b - 1)λ3).

[0021] As a further improvement of the present invention, step 4 is specifically as follows:

[0022] When splicing the spectral data of two sub-chips, select the median point of the connection segment of the two chips as the virtual connection point T1. Set the wavelength value of each wavelength point of the previous sub-chip as x1, and the light intensity value collected at each wavelength point as y1. Set the wavelength value of the virtual connection point T1 as x0, and the light intensity value collected at the virtual connection point as y0. Calculate the light intensity values of the previous sub-chip and the next sub-chip at the virtual connection point T1 as y0 = C1 and y0 = C2 respectively by cubic spline interpolation method.

[0023] As a further improvement of the present invention, step 5 is specifically as follows:

[0024] Calculate the ratio of the light intensity values of the virtual connection points of two adjacent wavelength ranges, take one of them as the reference spectral data, and perform smooth splicing on the other spectral data in combination with the ratio of the light intensity values of the virtual connection points to complete the splicing of the spectral data of the two sub-chips.

[0025] The miniaturized near-infrared spectrometer of the present invention abandons the traditional single-point spectral MEMS Fabry-Perot cavity chip scheme, and uses multiple chips to splice and cover the wavelength range of the traditional single-point spectral MEMS Fabry-Perot cavity chip, greatly improving the spectral acquisition efficiency and spectral data stability. At the same time, perform smooth splicing on the multi-chip spectral data obtained by acquisition, improve the continuity of the spectral data of the spectral MEMS Fabry-Perot cavity chip splicing array, and further increase the spectral analysis efficiency and analysis stability. This method can well solve the problems of low efficiency and poor stability existing in the traditional single-point spectral MEMS Fabry-Perot cavity chip scheme, and significantly promote the development of miniaturized near-infrared spectroscopy technology.

[0026] The beneficial effects of the present invention are:

[0027] The present invention uses multiple chips to splice and cover the wavelength range of traditional single-point spectral MEMS Fabry-Perot cavity chips. During the acquisition process, each sub-chip in the spliced array performs acquisition work simultaneously. For the same spectral data, the spliced array can greatly reduce the acquisition time of the single-point chip, thereby improving the spectral acquisition efficiency. At the same time, because the number of spectral wavelength points that each sub-chip needs to collect is effectively reduced, the stability of the spectral data is further improved. At the same time, the acquired multi-chip spectral data is smoothly spliced, improving the spectral data continuity of the spectral MEMS Fabry-Perot cavity chip splicing array, further increasing the efficiency and stability of spectral analysis. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 This is a flowchart of an embodiment of the present invention. DETAILED DESCRIPTION

[0029] The embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0030] Example

[0031] A spectral data processing method based on a spectral MEMS Fabry-Perot cavity chip splicing array, comprising:

[0032] Figure 1 101 is to calculate the wavelength scanning interval of a single-point spectroscopy MEMS Fabry-Perot cavity chip. The single-point spectroscopy MEMS Fabry-Perot cavity chip uses an evenly spaced wavelength scanning method, and the wavelength range between each two adjacent wavelength points is equal. If the wavelength range of the single-point spectroscopy MEMS Fabry-Perot cavity chip is (λ1~λ2) and the number of wavelength points is m, the wavelength range between two adjacent wavelength points of the MEMS Fabry-Perot cavity chip, i.e., the wavelength scanning interval λ3, can be calculated as:

[0033] λ3=(λ2-λ1) / (m-1)

[0034] In this embodiment, taking a single-point spectral MEMS Fabry-Perot cavity chip with a wavelength response range of 1350nm to 1850nm and 51 spectral wavelength points as an example, the wavelength scanning interval λ3 of the MEMS Fabry-Perot cavity chip can be calculated using an evenly divided wavelength point division method as follows:

[0035] λ3=(λ2-λ1) / (m-1)=(1850-1350) / (51-1)=10(nm)

[0036] The characteristic wavelength point R of the single-point spectral MEMS Fabry-Perot cavity chip can be further calculated. n for:

[0037] R n =1350+(n-1)*10n≤51

[0038] Where n is the nth wavelength point in the single-point spectral MEMS Fabry-Perot cavity chip. It can be further known that the characteristic wavelength points of the single-point spectral MEMS Fabry-Perot cavity chip are (1350nm, 1360nm, 1370nm...1850nm).

[0039] Figure 1 In 102, the number of wavelength points contained in each sub-chip is calculated based on the number of chips in the multi-chip splicing array. A multi-chip splicing array is used to splice and cover the wavelength range of a traditional single-point spectroscopy MEMS Fabry-Perot cavity chip. If the splicing array contains a sub-chips, the number of wavelength points b contained in each sub-chip can be calculated as:

[0040] b=floor(m / a)

[0041] Where floor(.) is the rounding symbol. If (m / a) is not an integer, [mb*a] wavelength points will overflow. These overflowing wavelength points are distributed one by one to each sub-chip. Further, it can be seen that the number of wavelength points contained in the [mb*a] sub-chips in the spliced array is (b+1).

[0042] In this embodiment, if the tiled array consists of three spectral MEMS Fabry-Perot cavity sub-chips, the number of wavelength points contained in a single sub-chip can be calculated as b = floor(51 / 3) = 17. Since (m / a) is an integer, there are no overflow wavelength points, and the number of wavelength points contained in a single sub-chip is 17. If the tiled array consists of four spectral MEMS Fabry-Perot cavity sub-chips, the number of wavelength points contained in a single sub-chip can be calculated as b = floor(51 / 4) = 12. Since (m / a) is not an integer, there will be overflow wavelength points of [mb*a] = 3. These overflow wavelength points are distributed one by one to each sub-chip. Further, it can be seen that the number of wavelength points contained in the tiled array with [mb*a] = 3 sub-chips is (b+1) = 13.

[0043] Figure 1 103 is to calculate the wavelength range of each sub-chip according to the number of wavelength points of the sub-chip and the wavelength sampling interval. Set each sub-chip in the spliced array as (S1, S2, ... S a ), when (m / a) is an integer, the number of wavelength points contained in each sub-chip is the same, which is b, then the sub-chip S iThe included wavelength band range is (λ1 + (i - 1)*b*λ3, λ1 + (i - 1)*b*λ3 + λ3, …… λ1 + (i - 1)*b*λ3 + (b - 1)λ3). When (m / a) is not an integer, there are [m - b*a] sub - chips with (b + 1) wavelength points included. The overflow wavelength points are distributed to each sub - chip one by one starting from S1. When 1 ≤ i ≤ [m - b*a], sub - chip S i The included wavelength band range is (λ1 + (i - 1)*(b + 1)*λ3, λ1 + (i - 1)*(b + 1)*λ3 + λ3, …… λ1 + (i - 1)*(b + 1)*λ3 + bλ3). When [m - b*a] < i ≤ a, sub - chip S i The included wavelength band range is (λ1 + (m - b*a - 1)*(b + 1)*λ3 + (i - m + b*a - 1)*b*λ3, λ1 + (m - b*a - 1)*(b + 1)*λ3 + (i - m + b*a - 1)*b*λ3 + λ3, …… λ1 + (m - b*a - 1)*(b + 1)*λ3 + (i - m + b*a - 1)*b*λ3 + (b - 1)λ3).

[0044] The above calculation of the wavelength band range included in each sub - chip is as follows: When (m / a) is an integer, the number of wavelength points included in each sub - chip is the same, all b. Then the wavelength band range included in sub - chip S1 is (λ1, λ1 + λ3, …… λ1 + (b - 1)λ3), the wavelength band range included in sub - chip S2 is (λ1 + bλ3, λ1 + (b + 1)λ3 …… λ1 + (2b - 1)λ3), and so on. When (m / a) is not an integer, there are [m - b*a] sub - chips with (b + 1) wavelength points included. The overflow wavelength points are distributed to each sub - chip one by one starting from S1. Then the wavelength band range included in sub - chip S1 is (λ1, λ1 + λ3, …… λ1 + bλ3), the wavelength band range included in sub - chip S2 is (λ1 + (b + 1)λ3, λ1 + (b + 2)λ3, …… λ1 + (2b + 1)λ3), and so on. When the sub - chip is the S [m-b*a+1] th block, the number of wavelength points included in the sub - chip is reduced to b.

[0045] In this embodiment, if the spliced array is composed of three spectral MEMS Fabry-Perot cavity sub-chips, the number of wavelength points b=17 contained in a single sub-chip can be calculated. Combined with the wavelength scanning interval λ3=10nm, it can be calculated that the band range contained in the sub-chip S1 is 1350nm~1510nm, and the specific wavelength points are (1350nm, 1360nm,...1510nm). Similarly, the band range contained in the sub-chip S2 is calculated to be 1520nm~1680nm, and the specific wavelength points are (1520nm, 1530nm,...1680nm). The band range contained in the sub-chip S3 is calculated to be 1690nm~1850nm, and the specific wavelength points are (1690nm, 1700nm,...1850nm). If the spliced array consists of four spectral MEMS Fabry-Perot cavity sub-chips, we can calculate that the number of wavelength points contained in a single sub-chip is b = 12, and the number of overflow wavelength points is 3. Starting from S1, the overflow wavelength points are distributed one by one to each sub-chip. Then, sub-chip S1, sub-chip S2, and sub-chip S3 all contain 13 wavelength points, and sub-chip S4 contains 12 wavelength points. Combined with the wavelength scanning interval λ3 = 10nm, we can calculate that the band range contained in sub-chip S1 is 1350nm to 1470nm, and the specific wavelength points are (1350nm, 1360nm, ... …1470nm), similarly, the wavelength range of the computing sub-chip S2 is 1480nm~1600nm, and the specific wavelength points are (1480nm, 1490nm, …1600nm), the wavelength range of the computing sub-chip S3 is 1610nm~1730nm, and the specific wavelength points are (1610nm, 1620nm, …1730nm), and the wavelength range of the computing sub-chip S4 is 1740nm~1850nm, and the specific wavelength points are (1740nm, 1750nm, …1850nm).

[0046] Figure 1 In step 104, the spectral data of the sample to be tested is collected and the light intensity values at the virtual connection points are calculated using the cubic spline interpolation method. When collecting the spectral data of the sample to be tested, the a sub-chips in the splicing matrix collect a segment of spectral data. If each segment of spectral data is analyzed separately, the efficiency of the spectral analysis will be greatly reduced. If the a segment of spectral data is directly spliced together without any processing of the splicing points, it is likely to cause problems such as poor spectral data continuity and inaccurate analysis results. This embodiment uses the cubic spline interpolation method to calculate the light intensity values at the virtual connection points between the spectral data of each sub-chip, and uses these connection points as reference points for spectral data splicing. This effectively solves the problems of low spectral data analysis efficiency and poor continuity.

[0047] In this embodiment, the essence of the spectrum MEMS Fabry-Perot cavity chip collecting the spectrum data of the sample to be tested is to collect and obtain the light intensity value at each wavelength point. If the spliced array consists of three spectrum MEMS Fabry-Perot cavity sub-chips, the wavelength range of sub-chip S1 is 1350nm to 1510nm, and the wavelength range of sub-chip S2 is 1520nm to 1680nm, when the spectrum data of sub-chips S1 and S2 are spliced, the midpoint of the connecting section of the two chips is selected as the virtual connection point, that is, the midpoint of the last wavelength point 1510nm of sub-chip S1 and the first wavelength point 1520nm of sub-chip S2 is taken as the virtual connection point. The wavelength value of the virtual connection point T1 of sub-chips S1 and S2 is:

[0048] T1=(1510+1520) / 2=1515nm

[0049] The wavelength value of each wavelength point of sub-chip S1 is set to x1, the light intensity value collected at each wavelength point is set to y1, the wavelength value 1515nm of the virtual connection point T1 is set to x0, and the light intensity value collected at the virtual connection point is set to y0. The light intensity value y0=C1 of sub-chip S1 at the virtual connection point T1 is calculated by the cubic spline interpolation method. Similarly, the light intensity value C2 of sub-chip S2 at the virtual connection point T1 can be calculated.

[0050] Figure 1 Processing 105 smoothes and stitches the spectral data from each sub-chip in the stitched array, completing the stitched array spectral data processing. Using cubic spline interpolation, the intensity values of the virtual junction points of two adjacent bands are calculated. The ratio of the virtual junction intensities of the two adjacent bands is further calculated. Using one band as the baseline spectral data, the other band is smoothed and stitched together based on the ratio of the virtual junction intensities, completing the stitching of the spectral data from the two sub-chips.

[0051] In this embodiment, the light intensity value ratio of the sample to be tested collected by the sub-chip S1 at the wavelength points (1350nm, 1360nm, ... 1510nm) is set to (P1, P2, ... P 16 ), the light intensity value ratio of the sample to be tested collected by the sub-chip S2 at the wavelength points (1520nm, 1530nm, ... 1680nm) is (Q1, Q2, ... Q 16 ). Smoothly splice the spectrum data of the two sub-chips. Take the spectrum data of sub-chip S1 as the reference data, and combine the light intensity value of the virtual connection point to smoothly splice sub-chip S2. Calculate the smooth splicing coefficient Z:

[0052] Z=C1 / C2

[0053] Combined with the smoothing coefficient, the light intensity value ratio of the sample to be tested collected by the sub-chip S2 at the wavelength point (1520nm, 1530nm, ... 1680nm) is (Q1, Q2, ... Q 16 ) are smoothed, and the smoothed light intensity values are (Q1*Z, Q2*Z, ... Q 16 *Z), and further splicing the sub-chip S1 and the sub-chip S2. The spliced spectrum data contains 34 wavelength points, whose wavelength values are (1350nm, 1360nm, ... 1680nm), and the light intensity values at these wavelength points are (P1, P2, ... P 16 , Q1*Z, Q2*Z, ... Q 16 *Z). This completes the smooth splicing of the two segments of sub-chip spectral data. Similarly, when smooth splicing sub-chip S3, the spectral data after the splicing of sub-chips S1 and S2 is processed as one segment of spectral data. Using the same virtual connection point processing method, the spectral data after the splicing of sub-chips S1 and S2 is used as the reference data. The spectral data of sub-chip S3 is smoothly spliced into the reference data to complete the splicing of the spectral data of the entire spliced array sub-chips.

[0054] The above-described embodiments merely represent specific implementations of the present invention. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the present invention. It should be noted that a person skilled in the art would be able to make numerous variations and improvements without departing from the spirit of the present invention, and all such variations and improvements fall within the scope of protection of the present invention.

Claims

1. A spectrum data processing method based on a spectral MEMS Fabry-Perot cavity chip splicing array, characterized in that: The following steps are involved: Step 1: Calculate the wavelength scanning interval of the single-point spectral MEMS Fabry-Perot cavity chip; Step 2: Calculate the number of wavelength points contained in each sub-chip according to the number of chips in the multi-chip splicing array; Step 3: Calculate the wavelength range of each sub-chip according to the number of wavelength points of the sub-chip and the wavelength scanning interval; The step 3 is specifically as follows: Set each sub-chip in the splicing array as (S1, S2, ..., S i ,……,S a ), when (m / a) is an integer, the number of wavelength points contained in each sub-chip is the same, which is b, then the sub-chip S i The included band range is: (λ1+(i-1)*b*λ3, λ1+(i-1)*b*λ3+λ3, …λ1+(i-1)*b*λ3+(b-1)λ3); When (m / a) is not an integer, the number of wavelength points contained in the [mb*a] block in the sub-chip is (b+1), and the overflow wavelength points are distributed to each sub-chip one by one starting from S1. When 1≤i≤[mb*a], the sub-chip S i The included band range is: (λ1+(i-1)*(b+1)*λ3, λ1+(i-1)*(b+1)*λ3+λ3, …λ1+(i-1)*(b+1)*λ3+bλ3); When [m - b*a] < i ≤ a, the sub-chip S i The included band range is: (λ1 + (m - b*a - 1)*(b + 1)*λ3 + (i - m + b*a - 1)*b*λ3, λ1 + (m - b*a - 1)* (b+1)*λ3+(i-m+b*a-1)*b*λ3+λ3,...λ1+(mb*a-1)*(b+1)*λ3+(i-m+b*a-1)*b*λ3+(b-1)λ3); The wavelength range of the single-point spectral MEMS Fabry-Perot cavity chip is (λ2-λ1), the number of wavelength points is m, the wavelength scanning interval is λ3, the spliced array contains a sub-chips, and the number of wavelength points contained in each sub-chip is b; Step 4: Collect the spectrum data of the sample to be tested and calculate the light intensity value of the virtual connection point by cubic spline interpolation method; Step 5: Smoothly stitch the spectral data of each sub-chip of the stitched array to complete the spectral data processing of the stitched array.

2. The spectral data processing method based on the spectral MEMS Fabry-Perot cavity chip splicing array according to claim 1 is characterized in that: The step 1 is specifically as follows: The single-point spectroscopy MEMS Fabry-Perot cavity chip adopts an evenly divided wavelength scanning method, and the wavelength range between every two adjacent wavelength points is equal. If the wavelength range of the single-point spectroscopy MEMS Fabry-Perot cavity chip is (λ2-λ1) and the number of wavelength points is m, then the wavelength range between two adjacent wavelength points of the MEMS Fabry-Perot cavity chip, that is, the wavelength scanning interval λ3, is calculated as: λ3=(λ2-λ1) / (m-1).

3. The spectral data processing method based on the spectral MEMS Fabry-Perot cavity chip splicing array according to claim 2 is characterized in that: The step 2 is specifically as follows: A multi-chip splicing array is used to splice and cover the wavelength range of a single-point spectral MEMS Fabry-Perot cavity chip. If the splicing array contains a sub-chips, the number of wavelength points b contained in each sub-chip is: b=floor(m / a) Wherein, floor(.) is the rounding symbol. If (m / a) is not an integer, [mb*a] wavelength points will overflow. The overflowed wavelength points are distributed one by one to each sub-chip. Then, the number of wavelength points contained in the [mb*a] sub-chips in the spliced array is (b+1).

4. The spectral data processing method based on the spectral MEMS Fabry-Perot cavity chip splicing array according to claim 1 is characterized in that: The step 4 is specifically as follows: When splicing the spectral data of two sub-chips, the median point of the connecting segment of the two chips is selected as the virtual connecting point T1, the wavelength value of each wavelength point of the previous sub-chip is set to x1, the light intensity value collected at each wavelength point is set to y1, the wavelength value of the virtual connecting point T1 is set to x0, and the light intensity value collected at the virtual connecting point is set to y0. The light intensity values of the previous sub-chip and the next sub-chip at the virtual connecting point T1 are calculated by the cubic spline interpolation method as y0=C1 and y0=C2 respectively.

5. The spectral data processing method based on the spectral MEMS Fabry-Perot cavity chip splicing array according to claim 4 is characterized in that: The step 5 is specifically as follows: The ratio of the light intensity values of the virtual connection points of two adjacent bands is calculated. One of the bands is used as the benchmark spectral data. The other band of spectral data is smoothly spliced in combination with the ratio of the light intensity values of the virtual connection points to complete the splicing of the spectral data of the two sub-chips.

Citation Information

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