Patterned PEDOT:PSS hydrogels based on electrochemical pulse deposition and their preparation method

Abstract

This invention proposes a patterned PEDOT:PSS hydrogel based on electrochemical pulse deposition and its preparation method. The preparation apparatus includes an electrolytic cell, an electrochemical workstation, a substrate, a conductive layer, and a sacrificial metal layer. The electrolytic cell contains a PEDOT:PSS aqueous solution. The conductive layer is connected to the working electrode of the electrochemical workstation. Under the excitation of the electrochemical workstation, the sacrificial metal layer forms metal cations, which electrostatically adsorb PEDOT:PSS in the PEDOT:PSS aqueous solution, ultimately forming a patterned shape on the conductive layer using the sacrificial metal layer as a template. This invention achieves thickness control of the patterned PEDOT:PSS hydrogel by adjusting various deposition parameters. The preparation process is simple, low-cost, and highly practical, fully realizing the patterning of PEDOT:PSS hydrogels.

Description

Technical Field

[0001] This invention relates to the fields of electrochemistry, microelectromechanical systems (MEMS), and conductive polymer sensitive materials, specifically to a patterned PEDOT:PSS hydrogel based on electrochemical pulse deposition and its preparation method. Background Technology

[0002] PEDOT:PSS forms macroscopically connected hydrogels at low polymer concentrations, enabling an ideal combination of high conductivity and versatility after processing. This offers the potential to make solid PEDOT:PSS films soft and porous materials. Such materials represent a significant advancement in addressing the mechanical mismatch between electronic and biological systems. However, scalable and robust patterning methods for PEDOT:PSS hydrogels are still needed to achieve the required spatial resolution and integrate them into devices that may consist of many other materials and processing steps.

[0003] Existing patterning methods involve processing pre-prepared hydrogels with custom-designed molds, printing by adjusting the material composition and ratio of inks, or adding other photopolymerizable materials to the raw materials before photolithography or laser scanning. These methods either suffer from the problem of separating the preparation and patterning processes, resulting in insufficient patterning accuracy, or the addition of materials that alter conductivity or adhesion can change the structure of PEDOT:PSS itself.

[0004] To achieve patterned, monolithic fabrication and avoid adding other materials that could affect the final hydrogel's properties, an electrochemical method is employed to provide excitation. Based on the principle of ion-induced hydrogel fabrication, patterned hydrogels can be fabricated. The main principle is to electrically excite the patterned anode metal to form metal cations. These cations disrupt the encapsulation effect of the hydrophilic PPS end on the hydrophobic PEDOT end in the solution, causing the stable chain state to detach from the solution and aggregate and crosslink on the metal anode to form a patterned hydrogel. Using mature photolithography technology to pattern the metal layer ensures patterning resolution. However, the cation-induced mechanism may significantly disrupt the crosslinking effect between the PEDOT and PSS chains. Furthermore, the growth of PEDOT:PSS detached from the solution on the substrate relies on its inherent viscosity, making it difficult to achieve good adhesion when the structure itself is potentially damaged. This study utilizes pulsed voltage and other metals to achieve hydrogel patterning and optimizes its low adhesion and insufficient crosslinking. Summary of the Invention

[0005] Addressing the shortcomings of existing PEDOT:PSS hydrogel preparation methods, this invention aims to achieve patterned preparation of PEDOT:PSS hydrogels. This method can produce high pattern spatial resolution, uniform polymerization, and a simplified process. Based on electrochemical oxidation of the sacrificial metal layer, the oxidized metal ions induce electrostatic adsorption of PEDOT:PSS particles, forming a pattern on the substrate surface consistent with the sacrificial metal layer, thus achieving shape patterning and meeting the application requirements of PEDOT:PSS hydrogels in various devices. Simultaneously, pulsed voltage and other metal ion methods are used to optimize the preparation method, improving the crosslinking degree, stability, and adhesion of the PEOT:PSS hydrogel to the substrate.

[0006] To achieve the above-mentioned objectives, the technical solution of this invention is as follows:

[0007] A method for preparing patterned PEDOT:PSS hydrogel based on electrochemical pulse deposition is disclosed. The preparation apparatus includes an electrolytic cell 6, an electrochemical workstation 4 that provides excitation to the electrolytic cell, a substrate 1, a conductive layer 2 above the substrate 1, and a sacrificial metal layer 3 above the conductive layer 2. The electrolytic cell 6 contains an aqueous solution of PEDOT:PSS. The substrate 1, conductive layer 2, and sacrificial metal layer 3 are disposed in the aqueous solution of PEDOT:PSS in the electrolytic cell. The sacrificial metal layer 3 is a metal with higher metal activity than the conductive layer 2. The conductive layer 2 is connected to the working electrode of the electrochemical workstation 4. Under the excitation of the electrochemical workstation 4, the sacrificial metal layer 3 forms metal cations. The metal cations electrostatically adsorb PEDOT:PSS in the aqueous solution of PEDOT:PSS, and finally form a patterned shape on the conductive layer 2 with the sacrificial metal layer as a template.

[0008] As a preferred method, the sacrificial metal layer 3 and the conductive layer 2 are formed by one of the following methods: electroplating, evaporation, sputtering, or photolithography, to ensure that the patterning resolution reaches 300µm.

[0009] As a preferred embodiment, substrate 1 is a flexible material; and / or substrate 1 is selected from one of polyethylene terephthalate (PET), polyimide (PI), and polydimethylsiloxane (PDMS), with a thickness of 0.1-0.3 mm. The selection of the substrate depends on the requirements. Under the premise of meeting the requirements, a material with low surface energy is used as the substrate. The substrate should have the characteristics of high flatness, low conductivity, and ease of processing.

[0010] As a preferred embodiment, the conductive layer 2 is a conductive material; and / or the conductive layer 2 is selected from gold, silver, carbon, and platinum, with a thickness of 50-100 nm. Depositing a conductive metal or non-metal on the selected substrate achieves the function of conductive connection and ensures that the conductive layer material plays a role in conducting electricity and supporting and adhering to the PEDOT:PSS hydrogel during the reaction process.

[0011] As a preferred embodiment, the sacrificial metal layer 3 preferentially loses electrons relative to the conductive layer 2 after the circuit is connected, dissolving into the solution as ions; and / or the sacrificial metal layer 3 is selected from one of copper, magnesium, zinc, and iron. Furthermore, its metal reactivity must be higher than that of the conductive layer.

[0012] As a preferred method, the electrochemical workstation 4 provides excitation using constant voltage or pulsed voltage, with platinum as the working electrode, a carbon rod as the counter electrode, and Ag / AgCl as the reference electrode.

[0013] As a preferred embodiment, the PEDOT:PSS aqueous solution 5 is a solution in which PEDOT:PSS and deionized water are uniformly mixed, and the volume ratio of PEDOT:PSS to the mixed solution is 1:10.

[0014] As a preferred method, the preparation method includes the following steps:

[0015] Step 1: Clean the substrate, dry it after cleaning, and store it under vacuum.

[0016] Step 2: Design the pattern and customize a hard mask or photomask;

[0017] Step 3: Using one of the following methods, namely vapor deposition, sputtering, or electroplating, the conductive layer and the sacrificial metal layer are sequentially prepared on the substrate to obtain the conductive layer and the sacrificial metal layer 3 with the designed target pattern.

[0018] Step 4, prepare PEDOT:PSS solution 5;

[0019] Step 5: Apply constant voltage or pulse voltage to the prepared PEDOT:PSS solution using an electrochemical workstation to obtain patterned PEDOT:PSS hydrogel.

[0020] As a preferred embodiment, the constant voltage used in step 5 is 0.1–1.0V, and the time is 2000–3000s; the pulse voltage high level is 0.5–1.0V, the low level is 0V, the duty cycle is 20%–80%, and the time is 2000–8000s.

[0021] As a preferred method, in step 3, the conductive layer and sacrificial metal layer are prepared by vapor deposition using 99.99% pure gold wire in a vacuum environment of 1×10⁻⁶. -4 Pa, workpiece rotation voltage 10-15V, evaporation current 200-250mA, evaporation rate 1-1.2A / s, evaporation thickness 45-55nm. Using a patterned mask designed according to requirements, a sacrificial layer is further deposited in the evaporated conductive layer, using 99.99% pure copper, in a vacuum environment of 1×10 -4Pa, workpiece rotation voltage 10-15V, evaporation current 200-250mA, evaporation rate 2-2.2A / s, evaporation thickness 240-250nm.

[0022] As a preferred method, the conductive layer and sacrificial metal layer in step 3 are prepared by electroplating, using a mixed electrolyte composed of CuSO4 to electrodeposit copper onto the working electrode (0.01 g / mL). -1 In a mixture of acetic acid and water (4:45 v / v), a constant voltage of -0.4 V was continuously applied for 250 s to obtain a uniform copper coating.

[0023] As a preferred method, in step 4, a PEDOT:PSS aqueous solution is prepared using twice-treated deionized water as the solvent, and the solution is stirred for 15 minutes at room temperature (approximately 25°C) using a magnetic stir bar.

[0024] As a preferred method, electrogelation is performed in step 5 using a bio-logic VSP potentiostat with a graphite rod counter electrode and an Ag / AgCl reference electrode. The operating mode is selected as it, with an operating voltage of 0.5–1.1V and a resolution of 10. -4 Working hours: 0-5×10 3 s,

[0025] Another object of the present invention is to provide a patterned PEDOT:PSS hydrogel based on electrochemical pulse deposition, which is obtained by the above-described preparation method.

[0026] This invention achieves control over the thickness of PEDOT:PSS hydrogel by adjusting various deposition parameters, and at the same time, replacing the sacrificial layer metal can improve the mechanical properties of the prepared PEDOT:PSS hydrogel.

[0027] The beneficial effects of this invention are as follows:

[0028] 1. PEDOT:PSS is a high-conductive polymer with superior conductivity; the hydrogel structure makes it possible to combine high conductivity with other properties. The patterning of PEDOT:PSS hydrogels is achieved through electrochemistry using the principle of ion induction.

[0029] 2. This invention achieves thickness control of patterned PEDOT:PSS hydrogel by adjusting the voltage, working time, and PEDOT:PSS hydrogel solubility during operation.

[0030] 3. This invention achieves the control of the mechanical stability and mechanical properties of patterned PEDOT:PSS hydrogels by adjusting the type of sacrificial metal layer.

[0031] 4. This invention achieves the adjustment of the uniformity of patterned PEDOT:PSS hydrogel by adjusting the voltage width, working time, and duty cycle of the pulse voltage. Attached Figure Description

[0032] Figure 1 This is a schematic diagram of the preparation apparatus of the present invention;

[0033] Figure 2 The chemical structural formula and ball-and-stick model of PEDOT:PSS of the present invention are shown below: (a) PEDOT molecular formula; (b) PSS molecular formula; (c) PEDOT ball-and-stick model; (d) PSS ball-and-stick model.

[0034] Figure 3 This is a schematic diagram of the principle of the present invention. (a) PEDOT:PSS state in solution; (b) PROT:PSS state after the action of copper ions.

[0035] Figure 4 Characterization images of the PEDOT:PSS hydrogel prepared in this invention. (a) Model image; (b) Physical image; (c) SEM cross-section under constant voltage; (d) SEM cross-section under pulsed voltage.

[0036] Figure 5 The present invention provides an IT diagram for the preparation of PEDOT:PSS hydrogels of different concentrations under constant pressure.

[0037] Figure reference numerals: 1-substrate, 2-conductive layer, 3-sacrificial metal layer, 4-electrochemical workstation, 5-PEDOT:PSS aqueous solution, 6-electrolytic cell. Detailed Implementation

[0038] The following specific examples illustrate the implementation of the present invention. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention.

[0039] Example 1

[0040] This embodiment provides an apparatus for preparing patterned PEDOT:PSS hydrogels based on electrochemical pulse deposition, including an electrolytic cell 6, an electrochemical workstation 4 that provides excitation to the electrolytic cell, a substrate 1, a conductive layer 2 above the substrate 1, and a sacrificial metal layer 3 above the conductive layer 2. The electrolytic cell 6 contains an aqueous solution of PEDOT:PSS. The substrate 1, the conductive layer 2, and the sacrificial metal layer 3 are disposed in the aqueous solution of PEDOT:PSS in the electrolytic cell. The sacrificial metal layer 3 is a metal with higher metal activity than the conductive layer 2. The conductive layer 2 is connected to the working electrode of the electrochemical workstation 4. Under the excitation of the electrochemical workstation 4, the sacrificial metal layer 3 forms metal cations. The metal cations electrostatically adsorb PEDOT:PSS in the aqueous solution of PEDOT:PSS, and finally form a patterned shape on the conductive layer 2 with the sacrificial metal layer as a template.

[0041] This embodiment provides a method for preparing patterned PEDOT:PSS hydrogels based on electrochemical pulse deposition, including the following steps:

[0042] Step 1: Clean the 0.1mm thick PET substrate, dry it, and store it under vacuum;

[0043] Step 2: Design the pattern and customize a hard mask or photomask;

[0044] Step 3: Using a vapor deposition method, a conductive layer and a sacrificial metal layer are sequentially prepared on the substrate to obtain a conductive layer and a sacrificial metal layer 3 with the designed target pattern; the conductive layer 2 is gold, and the sacrificial metal layer 3 is magnesium; the vapor deposition process is performed using an evaporation deposition machine with a vacuum degree of 4×10⁻⁶. -4 Pa, Au purity 99.99%, magnesium purity 99.99%, chromium plating 5-10 nm before evaporating the conductive gold layer, in A 50nm thick Au conductive layer was obtained at a rate of [missing information - likely a specific speed or method], and then, under the customized pattern of the mask, [missing information - likely a specific technique or method] was used. The sacrificial layer metal is patterned and custom-deposited at a speed of 240nm, ensuring a patterning resolution of 300um.

[0045] Step 4, prepare a 1-10% volume concentration PEDOT:PSS solution 5; prepare a 5% volume ratio PEDOT:PSS aqueous solution using deionized water twice.

[0046] Step 5: Using an electrochemical workstation, a constant voltage is applied to the prepared PEDOT:PSS solution to obtain a patterned PEDOT:PSS hydrogel. The electrochemical workstation is used as the constant voltage source. The patterned electrode is deposited and connected to a platinum working electrode. A carbon electrode is used as the counter electrode, and Ag / AgCl is used as the reference electrode. All electrodes are placed in 30 ml of a 5% PEDOT:PSS aqueous solution. The operating mode is set to IT, and the constant voltage mode is set to 0.5V for 3000 s. Figure 5 As shown, at a constant potential, as the copper layer is depleted, the anodic current generated by copper oxidation is produced and decreases to zero. The oxidation rate (expressed by the time it takes for the current to drop to zero) depends on the concentration of PEDOT:PSS in the aqueous electrolyte. This is likely because diluting the acidic PEDOT:PSS with water increases the electrolyte pH. With increasing PEDOT:PSS content, the reaction rate increases, as indicated by the steeper slope of the curve in the IT plot, while the initial current increases with increasing conductive medium in the solution.

[0047] A loose, porous PEDOT:PSS patterned hydrogel was obtained. Figure 4 As shown, the freeze-dried sample exhibits a hydrogel-like morphology. Step 5 uses a constant voltage of 0.1–1.0V for 2000–3000s.

[0048] Example 2

[0049] A patterned PEDOT:PSS hydrogel based on electrochemical pulse deposition and its preparation method, using the preparation apparatus of Example 1, includes the following steps:

[0050] Step 1: Clean the 0.3mm thick PI substrate and store it under vacuum;

[0051] Step 2: Design the pattern and customize a hard mask or photomask;

[0052] Step 3: Using electroplating, a conductive layer and a sacrificial metal layer are sequentially prepared on the substrate to obtain a conductive layer and a sacrificial metal layer 3 with the designed target pattern; the conductive layer 2 is silver with a thickness of 100 nm, and the sacrificial metal layer 3 is copper; copper is electrodeposited on the working electrode (0.01 g / mL) using a mixed electrolyte composed of CuSO4. -1 In a mixture of acetic acid and water (4:45 v / v), a constant voltage of -0.4 V was continuously applied for 250 s to obtain a uniform copper coating. The patterning resolution was ensured to reach 300 μm.

[0053] Step 4: Prepare a 1% volume concentration PEDOT:PSS solution 5; prepare a 5% volume ratio PEDOT:PSS aqueous solution using deionized water twice.

[0054] Step 5: Apply constant voltage to the prepared PEDOT:PSS solution using an electrochemical workstation to obtain a patterned PEDOT:PSS hydrogel. Using the electrochemical workstation as the constant voltage source, a patterned electrode was deposited and connected to a platinum working electrode. A carbon electrode was used as the counter electrode, and Ag / AgCl was used as the reference electrode. All electrodes were placed in 30 ml of a 5% PEDOT:PSS aqueous solution. The operating mode was set to IT, and the constant voltage mode was set to 0.5V for 750 s. A loose, porous PEDOT:PSS hydrogel was obtained.

[0055] Example 3

[0056] A patterned PEDOT:PSS hydrogel based on electrochemical pulse deposition and its preparation method, using the preparation apparatus of Example 1, includes the following steps:

[0057] Step 1: For a PDMS substrate with a thickness of 0.2 mm, remove surface dust by air pressure and store under vacuum;

[0058] Step 2: Design the pattern and customize the photolithography plate;

[0059] Step 3: Using magnetron sputtering, a conductive layer and a sacrificial metal layer are sequentially fabricated on the substrate. The conductive layer 2 is platinum with a thickness of 80 nm, and the sacrificial metal layer 3 is iron with a thickness of 300 nm. The coating process is performed using a magnetron sputtering machine at a vacuum level of 3–3.5 × 10⁻⁶. -3 Pa, platinum purity 99.99%, iron purity 99.99%, in A 50nm thick Au conductive layer was obtained at a rate of [missing information - likely a specific speed or method], and then, under the customized pattern of the mask, [missing information - likely a specific technique or method] was used. The sacrificial layer metal is patterned and custom-deposited at a speed of 240nm, ensuring a patterning resolution of 300um.

[0060] Step 4: Prepare a 10% volume concentration PEDOT:PSS solution 5; Prepare a 5% volume ratio PEDOT:PSS aqueous solution using deionized water twice.

[0061] Step 5: Using an electrochemical workstation, a pulsed voltage is applied to the prepared PEDOT:PSS solution to obtain a patterned PEDOT:PSS hydrogel. Platinum is used as the working electrode, a carbon rod as the counter electrode, and Ag / AgCl as the reference electrode. The high level is 0.5V, the low level is 0V, the duty cycle is 50%, and the pulse width is 1s. Under the action of the pulsed voltage, the concentration of metal cations is controlled. At the high level, the metal dissolves under voltage excitation, breaking the stable equilibrium of the anolyte-attached PEDOT:PSS and achieving phase separation between PEDOT and PSS. At the low level, i.e., at 0V, iron is naturally oxidized in the oxygen environment of water, which can also achieve phase separation between PEDOT and PSS, but the effect is weaker compared to the metal ion solubility under voltage. Under the action of iron ions of different solubility, a polymerization effect with different layered pore spacing was achieved, as shown in Figure (4.d). This shows that the PEDOT:PSS hydrogel with a completely different morphology structure than that obtained by constant voltage is obtained, thus obtaining a loose and porous PEDOT:PSS hydrogel.

[0062] Example 4

[0063] This embodiment provides a patterned PEDOT:PSS hydrogel based on electrochemical pulse deposition and its preparation method, including the following steps:

[0064] Step 1: After cleaning the 0.15mm thick PDMS substrate, remove the surface dust with high-purity nitrogen and store it under vacuum.

[0065] Step 2: Design the pattern and customize the photomask; the conductive layer 2 is graphene with a thickness of 60nm, and the sacrificial metal layer 3 is zinc;

[0066] Step 3: A conductive layer and a sacrificial metal layer were prepared using photolithography. Graphene was then deposited onto PMMA using chemical vapor deposition. The PMMA was placed on a PDMS substrate, and acetone and deionized water were used to remove the PMMA, achieving the fabrication and transfer of 60mm graphene. The graphene was then spin-coated with positive photoresist S1813 at 4000 rpm for 30 seconds, exposed to ultraviolet light (365nm, 10mW) for 12 seconds, developed with MIF-321 developer for 1 minute, rinsed with DI water for 1 minute, and then dried with an N2 gun. Evaporation deposition was performed using an evaporation coating machine at a vacuum degree of 4×10⁻⁶. -4 Pa, iron purity is 99.99%, with The sacrificial metal layer is deposited at a speed of 240 nm, and then the photoresist is removed using acetone and DI to obtain a patterned sacrificial metal layer.

[0067] Step 4, prepare a 1-10% volume concentration PEDOT:PSS solution 5; prepare a 5% volume ratio PEDOT:PSS aqueous solution using deionized water twice.

[0068] Step 5: Using an electrochemical workstation, a pulsed voltage is applied to the prepared PEDOT:PSS solution to obtain a patterned PEDOT:PSS hydrogel. Platinum is used as the working electrode, a carbon rod as the counter electrode, and Ag / AgCl as the reference electrode. The high level is 0.5V, the low level is 0V, the duty cycle is 50%, and the pulse width is 1s. Under the action of the pulsed voltage, the concentration of metal cations is controlled. At the high level, the metal dissolves under voltage excitation, breaking the stable equilibrium of the anolyte-attached PEDOT:PSS and achieving phase separation between PEDOT and PSS. At the low level, i.e., at 0V, iron is naturally oxidized in the oxygen environment of water, which can also achieve phase separation between PEDOT and PSS, but the effect is weaker compared to the metal ion solubility under voltage. Under the action of iron ions of different solubility, a polymerization effect with different layered pore spacing was achieved, as shown in Figure (4.d). This shows that the PEDOT:PSS hydrogel with a completely different morphology structure than that obtained by constant voltage is obtained, thus obtaining a loose and porous PEDOT:PSS hydrogel.

[0069] Example 5

[0070] A patterned PEDOT:PSS hydrogel based on electrochemical pulse deposition and its preparation method, comprising the following steps:

[0071] (1) Cut 99.99% copper foil with a thickness of 0.05mm to a size of 1cm×2cm. Use 1000-grit sandpaper to polish both sides to remove the surface oxide layer. Then use diluted acetic acid for acidification treatment and ultrasonic cleaning for 20min.

[0072] (2) Prepare a PEDOT:PSS aqueous solution with a volume ratio of 10% by using two deionized water solutions.

[0073] (3) An electrochemical workstation was used as the constant voltage source, with a platinum working electrode, a carbon counter electrode, and an Ag / AgCl reference electrode, all placed in a 30 ml volume of 5% PEDOT:PSS aqueous solution. The operating mode was set to step voltage mode, with a high voltage of 0.5 V, a low voltage of 0 V, a duty cycle of 50%, a pulse width of 1 s, and a total working time of 6000 s. A PEDOT:PSS hydrogel with obvious stratification was obtained, and the thickness was significantly increased, with a significant reduction in the phenomenon of detachment from the substrate. As shown in Figure (4d), obvious stratification appeared in the morphology of the hydrogel under pulse voltage. By controlling the voltage pulse width and duty cycle, ordered in-situ growth of PEDOT:PSS can be achieved.

[0074] The above embodiments are merely illustrative of the principles and effects of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in the present invention should still be covered by the claims of the present invention.

Claims

1. A method for the preparation of patterned PEDOT:PSS hydrogel based on electrochemical pulse deposition, characterized by: The preparation device comprises an electrolytic cell (6), an electrochemical workstation (4) for providing excitation to the electrolytic cell, a substrate (1), a conductive layer (2) above the substrate (1), and a sacrificial metal layer (3) above the conductive layer (2). The electrolytic cell (6) is provided with a PEDOT:PSS aqueous solution. The substrate (1), the conductive layer (2), and the sacrificial metal layer (3) are arranged in the PEDOT:PSS aqueous solution in the electrolytic cell. The sacrificial metal layer (3) is a metal with higher activity than the conductive layer (2). The conductive layer (2) is connected to a working electrode of the electrochemical workstation (4). The sacrificial metal layer (3) forms metal cations under the excitation of the electrochemical workstation (4). The metal cations electrostatically adsorb the PEDOT:PSS in the PEDOT:PSS aqueous solution (5), and finally form a patterned shape of the sacrificial metal layer on the conductive layer (2). The sacrificial metal layer (3) loses electrons preferentially relative to the conductive layer (2) after being connected to a circuit, and dissolves into the solution to become ions. The sacrificial metal layer (3) is selected from one of copper, magnesium, zinc, and iron. The electrochemical workstation is used to apply a pulse voltage to the prepared PEDOT:PSS solution to obtain a patterned PEDOT:PSS hydrogel. The high level of the pulse voltage is 0.5-1.0 V, the low level is 0 V, the duty cycle is 20%-80%, and the time is 2000-8000 s. The substrate (1) is made of a flexible material, and the substrate (1) is selected from one of polyethylene terephthalate (PET), polyimide (PI), and polydimethylsiloxane (PDMS). The conductive layer (2) is selected from one of gold, silver, graphene, and platinum. The preparation method comprises the following steps: Step 1: washing the substrate and then blowing dry and storing in vacuum; Step 2: designing a pattern and customizing a hard mask plate or a photoetching plate; Step 3: using one of evaporation, sputtering, and electroplating to sequentially prepare the conductive layer and the sacrificial metal layer on the substrate to obtain the conductive layer and the sacrificial metal layer (3) with the designed target pattern; Step 4: configuring a PEDOT:PSS solution (5); Step 5: using the electrochemical workstation to apply a pulse voltage to the prepared PEDOT:PSS solution to obtain a patterned PEDOT:PSS hydrogel.

2. The method of claim 1, wherein the electrochemically pulsed deposition based patterning of PEDOT:PSS hydrogel is characterized by: The sacrificial metal layer (3) and the conductive layer (2) are formed by one of electroplating, evaporation, sputtering, and photoetching, and the patterned resolution reaches 300 um.

3. The method of claim 1, wherein the electrochemically pulsed deposition based patterning of PEDOT:PSS hydrogel is characterized by: The electrochemical workstation (4) uses platinum as a working electrode, a carbon rod as a counter electrode, and Ag / AgCl as a reference electrode.

4. The method of claim 1, wherein the electrochemically pulsed deposition based patterning of PEDOT:PSS hydrogel is characterized by: The PEDOT:PSS aqueous solution (5) is a solution obtained by uniformly mixing PEDOT:PSS and deionized water, and the volume ratio of PEDOT:PSS to the mixed solution is 1:

10.

5. A patterned PEDOT:PSS hydrogel based on electrochemical pulse deposition, characterized in that The method is obtained by any one of claims 1-4.

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