An unattended laser probe station with automatic sample loading

Abstract

The application provides an unattended laser probe workstation with automatic sample feeding, and belongs to the technical field of industrial laser online detection, and comprises a frame body, a sample feeding unit, an optical unit and a control unit fixed in the frame body, wherein: the sample feeding unit comprises a sample disc, a sample disc rotating mechanism and a Z-axis lifting mechanism arranged in sequence from top to bottom; the optical unit comprises a laser probe module, a laser range finder and an image sensing module, the laser probe module is arranged above the sample feeding unit, the laser range finder is arranged on the side of the laser probe module, and the image sensing module is arranged on the side of the laser probe module; and the control unit is connected with the sample feeding unit, the sample feeding unit and the laser probe unit. The application can realize automatic sample feeding under unattended conditions, is suitable for various harsh industrial production environments, and the optical unit can cooperate with the sample feeding unit to realize real-time positioning of the sample to be detected and automatic adjustment of the detection conditions.

Description

TECHNICAL FIELD

[0001] The present application belongs to the technical field of industrial laser online detection, and more particularly relates to an unattended laser probe workstation with automatic sample feeding. BACKGROUND

[0002] Analytical chemistry is an important means of research and production in the field of engineering and materials. Laser-induced breakdown spectroscopy (hereinafter referred to as "laser probe") is a high-efficiency analysis technology based on atomic emission spectrum theory. It uses a high-energy-density laser pulse to excite the analyzed substance to generate a transient plasma. The characteristic spectral signals emitted by the transient plasma can be collected in real time by a spectral collection system. After the collected spectral signals pass through a spectral analysis instrument, continuous spectral signal intensity information is output, thereby achieving the purpose of qualitative or quantitative detection of the composition of the substance. Therefore, since the laser probe technology was introduced, it has been favored by research fields such as industrial production, aerospace, agricultural production, artistic archaeology, and biomedical treatment, and has been hailed as a "future super star". In 2012 and 2020, Mars was visited by the American "Curiosity" and Chinese "Tianwen-1" Mars probes, respectively, and both probes were equipped with small-sized laser-induced breakdown spectroscopy analysis devices for detecting Martian rocks and life elements.

[0003] At present, when the laser probe technology is used for analysis, the sample needs to be placed on a sample stage. A laser probe emits a pulsed laser beam to excite the surface of the sample. The sample moves with the sample stage to ensure that each position receives the same number of laser pulses. After the sample completes a scan according to the pre-set trajectory, the types, contents, and element segregation of the elements contained in the sample can be obtained. However, when multiple samples need to be analyzed, the conventional laser probe equipment needs to be manually replaced with samples, which has the problems of complex operation and low work efficiency. In addition, the laser probe technology is very suitable for online detection applications in industrial production. However, the industrial production environment is usually harsh, and the industrial raw materials are in a dynamic moving process, making it difficult for operators to extract samples of industrial raw materials. Therefore, the development of laser probe technology is mainly in the direction of automatic sample feeding and unattended operation. However, the existing laser probe equipment in China is mostly based on manned laser probe equipment and does not have remote control and interconnection functions. The data privacy is strong, and the production links and equipment cannot be effectively connected, which hinders the effective application of the laser probe technology in the industrial production field. SUMMARY

[0004] In view of the defects of the prior art, the present application aims to provide an unattended laser probe workstation with automatic sample feeding, which solves the problems of complex operation, low work efficiency, and the need for manned operation of the existing laser probe workstations.

[0005] To achieve the above object, the application provides an unattended laser probe workstation capable of automatic sample feeding, which comprises a frame body and a feeding unit, an optical unit and a control unit fixed inside the frame body, wherein:

[0006] The feeding unit is fixed at the bottom of the frame body and comprises a sample disc, a sample disc rotating mechanism and a Z-axis lifting mechanism arranged in sequence from top to bottom, the sample disc is provided with at least two sample grooves for loading samples to be tested, the sample disc rotating mechanism is used to drive the sample disc to rotate to realize automatic sample changing, and the Z-axis lifting mechanism is used to drive the sample disc to move up and down to realize sample height adjustment.

[0007] The optical unit is arranged above the feeding unit and is fixed on an optical flat, the optical flat is connected with the frame body through a two-dimensional motion platform, and during work, the optical unit is driven to move through the two-dimensional motion platform to scan and analyze the sample to be tested according to a planned path, the optical unit comprises a laser probe module, a laser range finder and an image sensing module, the laser probe module is arranged above the feeding unit and is used to perform laser probe component analysis on the sample to be tested, the laser range finder is arranged on the side of the laser probe module and is used to measure the height of the optical unit and the sample to be tested, and then the Z-axis lifting mechanism is used for adjustment, and the image sensing module is arranged on the side of the laser probe module and is used to perform real-time positioning and path planning on the sample to be tested.

[0008] The control unit is connected with the feeding unit, the sample disc and the laser probe unit and is used to control the feeding unit, the sample disc and the laser probe unit to realize automatic sample changing and measurement in an unattended manner.

[0009] As a further preferred, the unattended laser probe workstation further comprises a sample disc changing unit arranged outside the frame body and used to replace the sample to be tested, which adopts a suction cup or a mechanical hand.

[0010] As a further preferred, the laser probe module comprises a laser, a laser modulation optical assembly arranged inside an optical cage block, a lens angle adjuster, a coaxial spectrum collector and a telescopic laser focusing objective, wherein: the laser is connected with the back side of the optical cage block and is used to emit laser and irradiate the surface of the sample to be tested after modulation by the laser modulation optical assembly; the lens angle adjuster is connected with the laser modulation optical assembly to adjust the reflection angle thereof; the coaxial spectrum collector is arranged above the optical cage block and is used to coaxially collect the spectrum signal of the sample to be tested; and the telescopic laser focusing objective is connected with the bottom surface of the optical cage block to realize accurate focusing of laser.

[0011] As a further preferred, a laser reducer is arranged on the side of the optical cage block away from the laser, and the laser reducer is used to absorb and reduce the projected laser beam.

[0012] As a further preferred, the laser probe module further comprises a first adjusting mechanism and a second adjusting mechanism, the first adjusting mechanism is arranged between the telescopic laser focusing objective and the optical cage block, and is used to drive the telescopic laser focusing objective to move along the X axis and the Y axis; the second adjusting mechanism is arranged between the coaxial spectrum collector and the optical cage block, and is used to drive the coaxial spectrum collector to move along the X axis and the Y axis.

[0013] As a further preferred, the laser modulation optical assembly comprises a beam shaping mirror and a diffraction cone lens Bessel beam generator arranged in sequence from front to back along the laser propagation direction, the beam shaping mirror is used to shape the incident pulsed Gaussian laser beam into a pulsed flat-top laser beam; the diffraction cone lens Bessel beam generator is used to shape the pulsed flat-top laser beam into a long-focus Bessel laser beam.

[0014] As a further preferred, the laser probe module further comprises a paraxial collection assembly, the paraxial collection assembly comprises a paraxial spectrum collector, a micro angle rotating table and a two-dimensional micro sliding table, the paraxial spectrum collector is arranged on the right side of the optical cage block and is aligned with the sample to be measured, and is used to collect the spectrum signal of the sample to be measured from the paraxial direction, and the paraxial spectrum collector is connected with the micro angle rotating table and the two-dimensional micro sliding table, and in operation, the angle of the paraxial spectrum collector is adjusted by the micro angle rotating table, and the paraxial spectrum collector is driven to move along the X axis and the Y axis by the two-dimensional micro sliding table.

[0015] As a further preferred, the unattended laser probe workstation further comprises a blowing unit, the blowing unit comprises a gas storage tank, a gas nozzle and an exhaust pump, the gas storage tank is fixed on the frame body and connected with the gas nozzle through a pipeline to provide inert gas; the gas nozzle is aligned with the sample disc to blow the surface of the sample to be measured with inert gas; the exhaust pump is arranged at the bottom of the frame body to exhaust air.

[0016] As a further preferred, the image sensing module comprises a light source and an industrial camera, the light source is used to provide light for the sample disc, and the industrial camera is used to collect the surface image of the sample to be measured and perform positioning and path planning.

[0017] As a further preferred, the control unit adopts 5G and cloud technology to realize remote real-time control.

[0018] Overall, compared with the prior art, the above technical solutions conceived by the present application have the following beneficial effects:

[0019] 1.The application can realize automatic sample feeding under unattended conditions by setting a sample rotating mechanism and a Z-axis lifting mechanism in the sample feeding unit, is suitable for various harsh industrial production environments, and can effectively improve the efficiency of component detection, and by setting a two-dimensional motion platform, a laser range finder and an image sensing module in the optical unit, the real-time positioning of the sample to be measured and the automatic adjustment of the detection conditions can be realized in cooperation with the sample feeding unit, thereby further improving the measurement accuracy of the unattended laser probe workstation;

[0020] 2.Meanwhile, the structure of the laser probe module is optimized, the lens angle adjuster, the coaxial spectrum collector and the telescopic laser focusing objective are set, and the control unit is cooperated, so that the laser probe automatic measurement can be realized;

[0021] 3.Especially, by optimizing the laser modulation optical assembly, the Gaussian laser beam emitted by the laser can be shaped, the shaped laser beam has uniform and smooth light field intensity scale, and after passing through the laser focusing objective, a longer focal depth can be obtained, so as to reduce the influence of the uneven sample surface on the laser-induced plasma spectrum intensity, thereby enhancing the qualitative and quantitative analysis accuracy of the laser probe module;

[0022] 4.In addition, the control unit of the application adopts 5G and cloud technology, which not only has strong data processing capability, but also has network addressing function, that is, through remote or mobile network nodes, the working state of the laser probe workstation can be controlled and viewed in real time, and the purpose of unattended operation can be achieved through the pre-control instruction;

[0023] 5.The application also sets a purging unit, by controlling the flow rate of inert gas, the inert gas concentration in the space, and the inert gas blowing speed and pressure on the surface of the sample to be measured, the influence of the external environment on the qualitative and quantitative analysis accuracy of the components can be reduced, and the safety of the detection process can be improved for some flammable and explosive substances. BRIEF DESCRIPTION OF DRAWINGS

[0024] Figure 1 is a three-dimensional structural layout schematic diagram of the unattended laser probe workstation with automatic feeding provided by the embodiment of the application;

[0025] Figure 2 is a first angle schematic diagram of the relative position of the optical unit and the sample feeding unit in the unattended laser probe workstation with automatic feeding provided by the embodiment of the application;

[0026] Figure 3 is a second angle schematic diagram of the relative position of the optical unit and the sample feeding unit in the unattended laser probe workstation with automatic feeding provided by the embodiment of the application;

[0027] Figure 4 is a schematic diagram of a laser modulation optical assembly provided by an embodiment of the present application;

[0028] Figure 5 is a schematic diagram of a typical pulsed Gaussian laser beam provided by an embodiment of the present application;

[0029] Figure 6 is a schematic diagram of a typical pulsed flat-top laser beam provided by an embodiment of the present application;

[0030] Figure 7 is a schematic diagram of a typical long-focus-depth Bessel laser beam provided by an embodiment of the present application.

[0031] In all the drawings, the same reference signs are used to represent the same elements or structures, wherein:

[0032] 1-laser, 2-on-axis spectrum collector, 3-optical cage block, 4-industrial camera, 5-laser range finder, 6-sample disc, 7-sample disc rotating mechanism, 8-Z-axis lifting mechanism, 9-first adjusting mechanism, 10-lens angle adjuster, 11-micro angle rotating stage, 12-off-axis spectrum collector, 13-two-dimensional micro slide, 14-optical flat, 15-second adjusting mechanism, 16-light source, 17-laser reducer, 18-spectrum collector fixing seat, 19-telescopic laser focusing objective, 20-gas storage tank, 21-gas nozzle, 22-two-dimensional motion platform, 23-sample to be measured, 24-laser modulation optical structure, 25-frame body, 26-sample chamber, 27-control chamber, 28-optical machine chamber, 29-exhaust pump, 30-beam shaping mirror, 31-diffractive conical lens Bessel beam generator, 32-pulsed Gaussian laser beam, 33-pulsed flat-top laser beam, 34-long-focus-depth Bessel laser beam. DETAILED DESCRIPTION

[0033] In order to make the purpose, technical solutions and advantages of the present application more clear, the present application is further described in detail below in combination with the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and do not limit the present application.

[0034] As shown in Figures 1-3 , the present application provides an unattended laser probe workstation capable of automatic sample feeding, which comprises a frame body 25 and a sample feeding unit, an optical unit and a control unit fixed inside the frame body 25, wherein:

[0035] The inside of the frame body 25 is divided into a sample chamber 26, an optical machine chamber 28 and a control chamber 27, the sample feeding unit is placed in the sample chamber 26, the optical unit is placed in the optical machine chamber 28, the optical machine chamber 28 adopts a sealed design and has the functions of dustproof, waterproof and laser leakage prevention, and the control unit is placed in the control chamber 27;

[0036] The sample injection unit is fixed at the bottom of the frame body 25, which includes a sample disc 6, a sample disc rotating mechanism 7 and a Z-axis lifting mechanism 8 arranged in sequence from top to bottom, the surface of the sample disc 6 is uniformly distributed with at least two sample grooves in the circumferential position, which is used to load the sample to be tested 23, and can ensure that one sample to be tested 23 is analyzed while another sample to be tested 23 is in the waiting position; the sample disc rotating mechanism 7 is used to drive the sample disc 6 to rotate to realize automatic sample change; the Z-axis lifting mechanism 8 is used to drive the sample disc 6 to move up and down to realize sample height adjustment, which can be driven by a stepping motor or a servo motor as a power source;

[0037] The optical unit is arranged above the sample injection unit and is fixed on the optical flat plate 14, which is connected with the frame body 25 through the two-dimensional motion platform 22, and moves through the two-dimensional motion platform 22 during work to scan and analyze the sample to be tested 23 at high precision and high speed according to the planned path. The optical unit includes a laser probe module, a laser range finder 5 and an image sensing module. The laser probe module is arranged above the sample injection unit and is used for laser probe composition analysis of the sample to be tested. The laser range finder 5 is arranged on the left side of the laser probe module and is located at the front position between the image sensing module and the optical cage block 3, and ensures that the sample to be tested 23 on the sample disc 6 can move into the ranging range of the laser range finder 5 during the rotation of the sample disc 6, and is used for measuring the height of the optical unit and the sample to be tested 23. The laser range finder 5 is used in combination with the Z-axis lifting mechanism 8 to realize real-time measurement and self-height calibration of the height of the sample to be tested 23. The longitudinal height information of the surface topography of the sample to be tested 23 can be obtained in real time by scanning the surface of the sample to be tested 23 by the laser range finder 5. When the sample to be tested 23 rotates to the laser probe analysis position, the height of the sample to be tested 23 analysis position can be adjusted to the focal plane of the telescopic laser focusing objective lens 19 by the Z-axis lifting mechanism 8, so as to ensure that the surface of the sample to be tested 23 is at the best excitation position. The image sensing module is arranged on the side of the laser probe module and above the sample disc 6, and is used for real-time positioning and path planning of the sample to be tested 23, which includes a light source 16 and an industrial camera 4. The light source 16 is used to provide light for the sample disc 6, and the industrial camera 4 is used to shoot and store the topographic image information of the sample to be tested 23 in real time, so as to provide the sample lateral space coordinates, surface topography and other information for the laser probe analysis, thereby realizing automatic identification, positioning and path planning, and providing the best analysis strategy for the laser probe analysis;

[0038] The control unit is connected with the sample feeding unit, the sample releasing unit and the laser probe unit, and is used for controlling the sample feeding unit, the sample releasing unit and the laser probe unit to realize automatic sample changing and measurement in an unattended manner. The control unit adopts 5G and cloud technologies, that is, adopts 5G chips and communication technologies, and is compatible with cloud service functions, so that remote real-time regulation and control can be realized. The control unit not only has powerful data processing capability, but also has network addressing function, that is, the working state of the laser probe workstation can be controlled and viewed in real time through a remote or mobile network node, and the unattended purpose can also be achieved through pre-prepared control instructions.

[0039] Further, the unattended laser probe workstation further comprises a sample releasing unit, which is arranged outside the frame body 25. The sample releasing unit preferably adopts a suction cup or a mechanical hand, and is used for replacing the sample to be measured 23 to realize automatic continuous taking and placing operation of the sample to be measured. When one sample groove in the sample disc 6 is rotated to below the laser light outlet, other sample grooves can be synchronously waiting for the sample releasing unit to grab the sample to be measured 23 and place it in the idle sample groove. When the last sample to be measured 23 is analyzed, the sample disc 6 can be rotated to realize rapid switching of the sample to be analyzed. At the same time, the sample releasing unit can remove the analyzed sample from the sample groove and place a new sample to be measured 23, so as to improve the efficiency of component detection, realize unattended automatic and intelligent analysis, and be suitable for various harsh industrial production environments.

[0040] Further, the laser probe module comprises a laser 1, a laser modulation optical assembly 24 arranged inside the optical cage block 3, a mirror angle adjuster 10, a coaxial spectrum collector 2, a telescopic laser focusing objective lens 19 and a laser reducer 17. The laser 1 is connected with the rear side of the optical cage block 3, and is used for emitting laser and modulating the laser through the laser modulation optical assembly 24 to irradiate the surface of the sample to be measured. In working, the laser beam emitted by the laser 1 is reflected to the surface of the sample to be measured 23 on the sample disc 6 through the laser modulation optical assembly 24, and the spectrum signal from the sample to be measured 23 is transmitted to the coaxial spectrum collector 2 above the optical cage block 3. The laser modulation optical assembly 24 is used for reflecting only the laser beam in the wavelength range, and transmitting other wavelengths of light. The wavelength of the laser is generally 1064nm, and the spectrum bandwidth is generally 200-1100nm. Therefore, the laser beam is reflected through the laser modulation optical assembly 24, and the spectrum signal of the sample is transmitted.

[0041] As shown in FIG. 1, the laser probe workstation comprises a frame body 25, a sample disc 6, a sample feeding unit, a sample releasing unit and a laser probe unit. Figures 4-7As shown, the laser modulation optical assembly 24 includes a beam shaping mirror 30 and a diffraction conical lens Bessel beam generator 31 arranged in sequence from front to back along the laser propagation direction, which can modulate the intensity distribution, spatial distribution and transmission characteristics of the incident laser beam, the beam shaping mirror 30 is used to shape the incident pulsed Gaussian laser beam 32 into a circular or square pulsed flat-top laser beam 33; the diffraction conical lens Bessel beam generator 31 is used to shape the pulsed flat-top laser beam 33 into a long-focus Bessel laser beam 34 with long-focus characteristics;

[0042] The lens angle adjuster 10 is rigidly connected with the laser modulation optical assembly 24, and by rotating the rotating part outside the lens angle adjuster 10, the reflection angle of the laser modulation optical assembly 24 can be adjusted, so as to achieve the purpose of optical coaxiality;

[0043] The coaxial spectrum collector 2 is arranged above the optical cage block 3 and is used for coaxially collecting the spectrum signal of the sample 23 to be measured, preferably using a fiber coupler, which can couple the spectrum signal with a bandwidth of 200-1100nm into an optical fiber, and the coaxial spectrum collector 2 is connected with a spectrum collection optical fiber such as a quartz optical fiber, etc., which focuses and couples the spectrum signal out;

[0044] The telescopic laser focusing objective 19 is connected with the bottom surface of the optical cage block 3 to realize accurate focusing of the laser, and the shaped laser beam has uniform and smooth light field intensity graduation, and at the same time, a longer focal depth can be obtained after passing through the telescopic laser focusing objective 19, so as to reduce the influence of the uneven surface of the sample 23 to be measured on the laser-induced plasma spectrum intensity, thereby enhancing the qualitative and quantitative analysis accuracy of the laser probe workstation;

[0045] The laser reducer 17 is arranged on the side of the optical cage block 3 away from the laser 1, and is usually made of a metal material with good thermal conductivity, and has an irregular and rough surface structure such as a conical shape or a spiral shape, which is used to absorb and reduce the transmitted laser beam, avoid the influence of the reflected laser on the optical path, form a ghost image and cause damage to the optical path, and at the same time, the absorbed laser energy can be transmitted in the form of heat energy;

[0046] Therefore, the optical cage block 3 can optically coaxially conduct the laser beam to the sample surface, and can also optically coaxially conduct the spectrum signal from the sample to the spectrum collection assembly, and the overall optical structure is compact and easy to realize.

[0047] Further, the laser probe module further comprises a first adjusting mechanism 9 and a second adjusting mechanism 15. The first adjusting mechanism 9 is arranged between the telescopic laser focusing objective 19 and the optical cage block 3, and is configured to drive the telescopic laser focusing objective 19 to move along the X-axis and the Y-axis by means of a screw rod and a nut matching technology. The telescopic laser focusing objective 19 can be accurately focused by the first adjusting mechanism 9 in cooperation with the telescopic function of the telescopic laser focusing objective 19. The second adjusting mechanism 15 is arranged between the coaxial spectrum collector 2 and the optical cage block 3, and is configured to drive the coaxial spectrum collector 2 to move along the X-axis and the Y-axis by means of a screw rod and a nut matching technology. The coaxial spectrum collector 2 can be accurately focused by the second adjusting mechanism 15 to ensure accurate collection of the spectrum signal, improve the coupling and transmission efficiency of the spectrum signal, and improve the detection limit.

[0048] Further, the laser probe module further comprises a side-axis collection assembly. The side-axis collection assembly comprises a side-axis spectrum collector 12, a micro-angle rotating table 11 and a two-dimensional micro sliding table 13. The side-axis spectrum collector 12 is arranged on the right side of the optical cage block 3 and is aligned with the sample 23 to be measured, and is configured to collect the spectrum signal of the sample 23 to be measured from the side. Meanwhile, the side-axis spectrum collector 12 is fixed on the side of the micro-angle rotating table 11 by means of a spectrum collector fixing seat 18, and the micro-angle rotating table 11 is connected with the two-dimensional micro sliding table 13. In operation, the angle of the side-axis spectrum collector 12 is adjusted by means of the micro-angle rotating table 11, and the side-axis spectrum collector 12 is driven to move along the X-axis and the Y-axis by means of the two-dimensional micro sliding table 13, so that the side-axis spectrum collector 12 can be directly aligned with the sample 23 to be measured to collect the spectrum signal. The side-axis spectrum collector 12 preferably adopts an optical fiber coupler, which can couple the spectrum signal with a bandwidth of 200-1100 nm into an optical fiber.

[0049] Further, the unattended laser probe workstation further comprises a blowing unit, the blowing unit comprising a gas storage tank 20, a gas nozzle 21 and an exhaust pump 29 to form an inert gas storage and delivery unit, the gas storage tank 20 being fixed on the rack body 25 and connected with the gas nozzle 21 through a pipeline for providing inert gas; the gas nozzle 21 is aligned with the sample disc 6 to blow the surface of the sample 23 to be tested with inert gas, and the inert gas blowing speed and blowing pressure and other parameters can be controlled by the gas nozzle 21; the exhaust pump 29 is arranged at the bottom of the rack body 25 for exhausting the air in the sample chamber 26 to reduce the oxygen content in the sample chamber 26, and the exhaust pump 29 can also realize internal circulation of the inert gas to improve the utilization rate of the inert gas. During operation, the gas nozzle 21 sprays gas at the laser focus point on the surface of the sample 23 to be tested to create favorable conditions for plasma excitation: first, a certain gas protection environment can be formed on the surface of the sample 23 to be tested to isolate oxygen and other active elements in the air; second, dust on the surface of the sample 23 to be tested and floating dust in the air can be blown away to reduce the interference of impurity absorption of laser energy excitation with effective spectral signals, thereby improving the detection accuracy and reliability of the detection results.

[0050] The unattended laser probe workstation provided by the application has the following technical advantages: first, high analysis efficiency, which can meet the requirements of industrial online detection; second, automatic and intelligent component detection under unattended conditions; third, integration of a laser modulation optical system and an inert gas device, strong anti-interference ability of the laser probe system, good analysis precision and stability, and safe and controllable analysis process.

[0051] The working principle of the unattended laser probe workstation provided by the application is as follows: the laser beam is reflected by the laser modulation optical assembly 24 and vertically downwardly enters the telescopic laser focusing objective lens 19, is focused to the surface of the sample 23 to be tested to excite the material to form plasma, the plasma is collected by the telescopic laser focusing objective lens 19, is coupled into the coaxial spectrum collector 2 upwardly through the coaxial spectrum collection system, and the plasma can also be directly coupled into the spectrum collection optical fiber through the collection of the paraxial spectrum collector 12.

[0052] Those skilled in the art can easily understand that the above description is only a preferred embodiment of the application and is not used to limit the application, and any modification, equivalent replacement and improvement made within the spirit and principle of the application shall be included in the protection scope of the application.

Claims

1. An unattended laser probe station capable of automatic sample loading, characterized by, The unattended laser probe workstation comprises a frame (25) and a sample feeding unit, an optical unit, a sample placing unit and a control unit fixed in the frame (25), wherein: The sample feeding unit is fixed at the bottom of the frame (25) and comprises a sample disc (6), a sample disc rotating mechanism (7) and a Z-axis lifting mechanism (8) arranged in sequence from top to bottom, the sample disc (6) is provided with at least two sample grooves for loading a sample (23) to be measured, the sample disc rotating mechanism (7) is used to drive the sample disc (6) to rotate to realize automatic sample changing, and the Z-axis lifting mechanism (8) is used to drive the sample disc (6) to move up and down to realize sample height adjustment. The optical unit is arranged above the sample feeding unit and is fixed on an optical flat (14), the optical flat (14) is connected with the frame (25) through a two-dimensional motion platform (22), and during work, the optical unit is driven by the two-dimensional motion platform (22) to move to scan and analyze the sample (23) according to a planned path, the optical unit comprises a laser probe module, a laser range finder (5) and an image sensing module, the laser probe module is arranged above the sample feeding unit and is used to perform laser probe component analysis on the sample to be measured, the laser range finder (5) is arranged on the side of the laser probe module and is used to measure the height of the optical unit and the sample (23) to be measured, and then the Z-axis lifting mechanism (8) is adjusted, and the image sensing module is arranged on the side of the laser probe module and is used to perform real-time positioning and path planning on the sample (23) to be measured. The sample placing unit is arranged outside the frame (25) and is used to replace the sample (23) to be measured, and a suction cup or a mechanical hand is adopted. The control unit is connected with the sample feeding unit, the sample placing unit and the laser probe module and is used to control the sample feeding unit, the sample placing unit and the laser probe module to realize automatic sample changing and measurement in an unattended manner.

2. The unattended laser probe station capable of automatic sample loading of claim 1, wherein, The laser probe module comprises a laser (1), a laser modulation optical assembly (24) arranged in an optical cage block (3), a lens angle adjuster (10), a coaxial spectrum collector (2) and a telescopic laser focusing objective lens (19), wherein: the laser (1) is connected with the rear side of the optical cage block (3) and is used to emit laser and irradiate the surface of the sample to be measured after being modulated by the laser modulation optical assembly (24); the lens angle adjuster (10) is connected with the laser modulation optical assembly (24) to adjust the reflection angle thereof; the coaxial spectrum collector (2) is arranged above the optical cage block (3) and is used to coaxially collect the spectrum signal of the sample (23) to be measured; and the telescopic laser focusing objective lens (19) is connected with the bottom surface of the optical cage block (3) to realize accurate focusing of laser.

3. The unattended laser probe station capable of automatic sample loading of claim 2, wherein, The side of the optical cage block (3) away from the laser (1) is provided with a laser reducer (17), and the laser reducer (17) is used to absorb and reduce the projected laser beam.

4. The unattended laser probe station capable of automatic sample loading of claim 2, wherein, The laser probe module further comprises a first adjusting mechanism (9) and a second adjusting mechanism (15), the first adjusting mechanism (9) is arranged between the telescopic laser focusing objective lens (19) and the optical cage block (3) and is used to drive the telescopic laser focusing objective lens (19) to move along the X axis and the Y axis, and the second adjusting mechanism (15) is arranged between the coaxial spectrum collector (2) and the optical cage block (3) and is used to drive the coaxial spectrum collector (2) to move along the X axis and the Y axis.

5. The unattended laser probe station capable of automatic sample loading of claim 2, wherein, The laser modulation optical assembly (24) comprises, from front to back along the laser propagation direction, a beam shaping mirror (30) and a diffraction cone lens Bessel beam generator (31), the beam shaping mirror (30) is used for shaping the incident pulsed Gaussian laser beam (32) into a pulsed flat-top laser beam (33), and the diffraction cone lens Bessel beam generator (31) is used for shaping the pulsed flat-top laser beam (33) into a long-focus Bessel laser beam (34).

6. The unattended laser probe station capable of automatic sample loading of claim 1, wherein, The laser probe module further comprises a paraxial collection assembly, the paraxial collection assembly comprises a paraxial spectrum collector (12), a micro angle rotating table (11) and a two-dimensional micro sliding table (13), the paraxial spectrum collector (12) is arranged on the right side of the optical cage block (3) and is aligned with the sample to be measured (23) and is used to collect the spectrum signal of the sample to be measured (23) from the paraxial direction, meanwhile, the paraxial spectrum collector (12) is connected with the micro angle rotating table (11) and the two-dimensional micro sliding table (13), in operation, the angle of the paraxial spectrum collector (12) is adjusted by the micro angle rotating table (11), and the paraxial spectrum collector (12) is driven to move along the X axis and the Y axis by the two-dimensional micro sliding table (13).

7. The unattended laser probe station capable of automatic sample loading of claim 1, wherein, The unattended laser probe workstation further comprises a purging unit, the purging unit comprises a gas storage tank (20), a gas nozzle (21) and an exhaust pump (29), the gas storage tank (20) is fixed on the frame body (25) and is connected with the gas nozzle (21) through a pipeline and is used to provide inert gas, the gas nozzle (21) is aligned with the sample disc (6) to purify the surface of the sample to be measured (23) by using inert gas, and the exhaust pump (29) is arranged at the bottom of the frame body (25) and is used to exhaust air.

8. The unattended laser probe station capable of automatic sample loading of claim 1, wherein, The image sensing module comprises a light source (16) and an industrial camera (4), the light source (16) is used to provide light for the sample disc (6), and the industrial camera (4) is used to collect the surface image of the sample to be measured (23) and to perform positioning and path planning.

9. The unattended laser probe station capable of automatic sample loading of any one of claims 1-8, wherein, The control unit adopts 5G and cloud technology to realize remote real-time regulation and control.

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