Alignment method for laser imaging exposure machine
By establishing a coordinate system mapping relationship using a back-side camera and a front-side camera in a laser imaging exposure machine, the problems of low recognition and overlap caused by different substrate coating materials in LDI exposure machines are solved, achieving accurate substrate alignment and improved reliability.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- HEFEI CHIP FOUND MICROELECTRONICS EQUIP CO LTD
- Filing Date
- 2023-05-04
- Publication Date
- 2026-05-19
AI Technical Summary
In existing LDI exposure machines, different exposure materials applied to the substrate result in poor visibility of the exposed pattern, low recognition by industrial cameras, and overlapping of exposed patterns affects alignment accuracy.
A laser imaging exposure machine is used to establish a coordinate system mapping relationship using a rear camera and a front camera. By acquiring substrate texture images and establishing the mapping relationship, the dependence on photosensitive materials is reduced, and accurate alignment of the substrate is achieved.
It improves the accuracy and reliability of alignment, reduces the dependence on the exposure target, avoids exposure pattern interference, and enhances the reliability of alignment.
Smart Images
Figure CN116540501B_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of exposure machine technology, and in particular to an alignment method for a laser imaging exposure machine. Background Technology
[0002] In related technologies, LDI exposure machines have substrates coated with exposure materials. By utilizing the light sensitivity and color development of the substrate exposure materials, patterns are exposed, which are then identified and aligned by industrial cameras. However, different substrates are coated with different exposure materials, resulting in poor visibility of the exposed patterns and low recognition by industrial cameras. Furthermore, the exposed patterns of different exposure machines overlap with the exposure target, which seriously affects alignment and subsequent development of the substrate. Summary of the Invention
[0003] The present invention aims to at least solve one of the technical problems existing in the prior art. Therefore, one object of the present invention is to propose an alignment method for a laser imaging exposure machine that reduces the dependence of the exposure target on the photosensitive material, and has the advantages of accurate alignment and high reliability.
[0004] To achieve the above objectives, an alignment method for a laser imaging exposure machine according to an embodiment of the present invention is provided. The exposure machine includes an exposure stage, a front camera, and a back camera. The back camera is mounted on the exposure stage, which is adapted to hold a substrate. The front camera and the back camera are located on opposite sides of the substrate. The method includes: establishing a coordinate system mapping relationship between the back camera, the front camera, and the exposure stage; placing the substrate at a first exposure position and exposing a first side, with the back camera acquiring a texture image of a second side of the substrate at the exposure position; placing the substrate at a second exposure position, with the front camera acquiring a texture image of the second side of the substrate; establishing a coordinate mapping relationship between the back camera and the texture image of the second side of the substrate acquired by the front camera; and obtaining the exposure position of the second side of the substrate based on the coordinate mapping relationship between the texture image acquired by the back camera and the texture image acquired by the front camera.
[0005] The alignment method of the laser imaging exposure machine according to embodiments of the present invention reduces the dependence of the exposure target on the photosensitive material and has the advantages of accurate alignment and high reliability.
[0006] According to some specific embodiments of the present invention, when establishing the coordinate system mapping relationship between the rear camera and the front camera, the coordinates of the front camera coincide with the coordinate system of the exposure platform surface, the front camera is movable relative to the exposure platform, and the rear camera is fixed to the exposure platform.
[0007] According to some specific embodiments of the present invention, establishing the coordinate system mapping relationship between the rear camera and the front camera includes: establishing a first transformation model A1 for the coordinates of the rear camera and the coordinates of the exposure platform; the texture image acquired by the rear camera obtains the corresponding exposure platform coordinates through the first transformation model A1.
[0008] Furthermore, a target is positioned between the front camera and the second camera. Establishing the first transformation model A1 includes: the rear camera acquiring the coordinates S1 of the second feature point of the target, and the front camera acquiring the coordinates S2 of the first feature point of the target; converting the first feature point coordinates into platform coordinates. Using the target coordinate transformation formula The parameters of the first transformation model are calculated to establish the first transformation model A1.
[0009] Furthermore, a glass plate is mounted above the rear camera, and the target is formed on the glass plate.
[0010] According to some specific embodiments of the present invention, establishing the mapping relationship between the coordinates of the substrate back texture image captured by the back camera and the texture image captured by the front camera includes: matching the texture images of the second side captured by the front camera and the back camera using a matching algorithm; and establishing a second transformation model A2 for the coordinates of the texture images captured by the back camera and the texture images captured by the front camera.
[0011] According to some specific embodiments of the present invention, before matching the texture image captured by the front camera with the texture image captured by the rear camera, the method further includes:
[0012] Filter the coordinates of matching points in the texture images captured by the front and rear cameras.
[0013] a. Set the difference threshold parameter JE between the front and back textures;
[0014] b. Obtain the set of texture matching points for the rear camera X1{1, 2, ..., n}, and obtain the set of texture matching points for the front camera X2{1, 2, ..., n};
[0015] c. Match multiple first matching points C1 in the set X1{1, 2, ..., n} and multiple second matching points C2 in the set X2{1, 2, ..., n}.
[0016] d. The second matching point C2 obtains the corresponding exposure stage coordinates through the first transformation model A1.
[0017] e. Calculate the difference between each first matching point C1 and its corresponding second matching point C2.
[0018] f. Select the first matching point C1 and the corresponding second matching point C2 whose difference value diff is less than or equal to the difference threshold parameter JE.
[0019] Furthermore, the second transformation model A2 for establishing the coordinates of the texture images acquired by the rear camera and the front camera includes:
[0020] Using the coordinate transformation formula of the first matching point Calculate the variable ring model for each pair of first matching points C1 and corresponding second matching points C2.
[0021] The transformation model with the most repetitions is selected as the second transformation model A2 for the coordinates of the texture images captured by the rear camera and the front camera.
[0022] According to some specific embodiments of the present invention, before establishing a second transformation model A2 for the coordinates of the texture image captured by the rear camera and the texture image captured by the front camera;
[0023] Determine whether the first matching point and the second matching point are successfully matched using the matching algorithm;
[0024] If so, a mapping relationship is established between the coordinates of the texture image on the back of the substrate captured by the rear camera and the texture image captured by the front camera.
[0025] If not, then re-filter the coordinates of matching points in the texture images captured by the front and rear cameras.
[0026] According to some specific embodiments of the present invention, the coordinate points of the back exposure pattern of the substrate are synchronously rotated, translated, and scaled to align by the coordinate points of the front exposure pattern of the substrate through the second transformation model A2.
[0027] Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description
[0028] The above and / or additional aspects and advantages of the present invention will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which:
[0029] Figure 1 This is a schematic diagram of the structure of a laser imaging exposure machine according to an embodiment of the present invention;
[0030] Figure 2 This is a schematic diagram of the exposure stage, rear camera, and glass plate of a laser imaging exposure machine according to an embodiment of the present invention;
[0031] Figure 3 This is a flowchart of the first-side exposure of the alignment method of the laser imaging exposure machine according to an embodiment of the present invention;
[0032] Figure 4 This is a flowchart of the second-side exposure process of the alignment method of the laser imaging exposure machine according to an embodiment of the present invention;
[0033] Figure 5 This is a schematic diagram of the texture of a substrate according to an embodiment of the present invention. Attached image description:
[0035] Exposure machine 1, exposure stage 100, front camera 200, rear camera 300, glass plate 400. Detailed Implementation
[0036] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.
[0037] The alignment method of a laser imaging exposure machine according to an embodiment of the present invention is described below with reference to the accompanying drawings.
[0038] like Figures 1-5 As shown, the alignment method of the laser imaging exposure machine according to an embodiment of the present invention is used in an exposure machine 1. The exposure machine 1 includes: an exposure stage 100, a front camera 200, and a back camera 300. The back camera 300 is mounted on the exposure stage 100, the exposure stage 100 is adapted to place a substrate, and the front camera 200 and the back camera 300 are respectively located on opposite sides of the substrate. The method includes:
[0039] Establish the coordinate system mapping relationship between the rear camera, the front camera, and the exposure platform;
[0040] The substrate is placed at the first exposure position and the first side is exposed, while the rear camera captures the texture image of the second side of the substrate at the exposure position;
[0041] The substrate is placed in the second exposure position, and the texture image of the second side of the substrate is captured by the front camera;
[0042] Establish a mapping relationship between the coordinates of the texture images of the second side of the substrate acquired by the rear camera and the front camera;
[0043] The exposure position of the second side of the substrate is obtained by mapping the coordinates of the texture image captured by the rear camera and the texture image captured by the front camera.
[0044] For example, the upper surface of the exposure stage has mounting holes for a back-side camera, which is located on the back side of the substrate, while the front-side camera faces the first side of the substrate. The texture image on the back side of the substrate is determined by the substrate's own material and is independent of whether it is exposed. The exposure process is divided into front-side and back-side exposure of the substrate. The exposure head is located above the exposure stage. First, the first side of the substrate is exposed. After the first side exposure is completed, the substrate is flipped so that the back side faces the exposure head above the exposure stage, and then the back side of the substrate is exposed. The first and second side exposures of the substrate are aligned using the alignment method of the laser imaging exposure machine of this invention, ensuring that the first and second side exposure images of the substrate are aligned.
[0045] According to the alignment method of the laser imaging exposure machine of the present invention, a coordinate mapping relationship is first established between the back camera, the front camera, and the exposure stage. The coordinate system of the back camera is transformed to be consistent with that of the front camera and the exposure stage, so that the back camera can be converted to the same stage coordinates as the front camera. Simultaneously with the first exposure of the substrate, the back camera acquires a texture image of the back side. After acquiring the texture image of the back side, the back camera flips the substrate and the front camera acquires another texture image of the back side. An image processing algorithm extracts the texture features of the back surface of the substrate, and then uses the image processing algorithm for texture matching, detecting and matching the texture feature points of the substrate, thereby aligning the exposure pattern of the first side of the substrate with the exposure pattern of the back side. Compared with the traditional inner layer alignment method, the alignment method of the laser imaging exposure machine of the present invention does not require a self-exposure target for alignment, reducing the dependence of the exposure target on the photosensitive material. Furthermore, since no self-exposure target pattern is needed, there is no interference with the exposed substrate pattern, resulting in higher reliability.
[0046] Therefore, the alignment method of the laser imaging exposure machine according to the embodiments of the present invention reduces the dependence of the exposure target on the photosensitive material and has the advantages of accurate alignment and high reliability.
[0047] In some specific embodiments of the present invention, when establishing the coordinate system mapping relationship between the rear camera and the front camera, the coordinates of the front camera coincide with the coordinate system of the exposure stage surface, the front camera is movable relative to the exposure stage, and the rear camera is fixed to the exposure stage.
[0048] Since the front camera's motion coordinate system coincides with the platform coordinate system, a mapping relationship can be established between the front camera's coordinate system and the platform coordinate system, allowing the coordinates of the front camera moving on the platform to be converted into platform coordinates. The rear camera is fixed to the exposure stage and light source. Multiple rear cameras can be installed as needed, with the optimal focal plane of the rear camera adjusted to the exposure stage surface.
[0049] In some specific embodiments of the present invention, such as Figure 3 As shown, establishing the coordinate system mapping relationship between the rear camera and the front camera includes:
[0050] Establish a first transformation model A1 for the coordinates of the rear camera and the exposure stage surface;
[0051] The texture image captured by the rear camera is used to obtain the corresponding exposure stage coordinates through the first transformation model A1.
[0052] Therefore, by establishing a mapping relationship between the rear camera coordinate system and the platform coordinate system, the coordinates of the rear camera when it moves on the platform can be converted into platform coordinates, thereby calibrating the position of the rear camera.
[0053] Furthermore, a target is positioned between the front camera and the second camera. Establishing the first transformation model A1 includes: the rear camera acquiring the coordinates S1 of the second feature point of the target, and the front camera acquiring the coordinates S2 of the first feature point of the target; converting the coordinates of the first feature point into table coordinates. Using the target coordinate transformation formula The parameters of the first transformation model are calculated to establish the first transformation model A1.
[0054] For example, after a certain exposure time, calibration can be performed at any time using the first transformation model A1 to ensure that the front camera and the back camera maintain coordinate correspondence at all times, and that the coordinates of the back camera at each position can be converted into table coordinates. By simultaneously acquiring the coordinates of the target center point by the back camera and the front camera, a mapping relationship between the coordinate systems of the back camera and the front camera is established, and the first transformation model A1 is calculated. Since the coordinate system of the front camera coincides with the table coordinate system, the coordinates of the back camera can be converted into table coordinates after being transformed by the first transformation model A1, thereby completing the calibration of the back camera.
[0055] Furthermore, such as Figure 2 As shown, a glass plate 400 is mounted above the rear camera, and a target is formed on the glass plate 400. For example, the glass plate 400 is constructed with a circular target. The rear camera and the front camera simultaneously acquire the coordinates of the center point of the target on the glass plate 400, thus establishing a coordinate system mapping relationship between the rear camera and the front camera.
[0056] In some specific embodiments of the present invention, such as Figure 4 As shown, the mapping relationship between the coordinates of the texture images of the second surface of the substrate acquired by the rear camera and the front camera is established, including:
[0057] The texture images of the second side captured by the front camera and the rear camera are matched using a matching algorithm;
[0058] A second transformation model A2 is established for the coordinates of the texture images captured by the rear camera and the front camera.
[0059] After the back camera acquires the texture image of the second substrate, the approximate position of the texture image acquired on the second substrate can be calculated since the position of the back camera is calibrated by the first transformation model A1. The front camera is then moved to the corresponding position to acquire the texture image. The front and back cameras obtain two identical texture images. Then, the features of the texture images of the first and second surfaces are extracted respectively, and these texture features are matched. The coordinates of the texture image acquired by the back camera are converted into the coordinates of the exposure stage surface, thereby obtaining the positional relationship of the two identical texture images and deriving the second transformation model A2. The first and second surfaces of the substrate are aligned using the second transformation model A2. No exposure target is needed, and there is no interference with the exposure patterns of the first and second surfaces of the substrate.
[0060] Further, refer to Figure 4 Before matching the texture image captured by the front camera with the texture image captured by the rear camera, the coordinates of the matching points of the texture images captured by the front camera and the rear camera are filtered to select the first matching point C1 matched by the front camera and the second matching point C2 matched by the rear camera. Using the coordinates of the first matching point C1 matched by the front camera and the second matching point C2 matched by the rear camera, the second transformation model A2 is established.
[0061] From numerous matching points of the front and rear cameras, a matching algorithm is used to select the first matching point C1 and the second matching point C2 that can match the feature corner coordinates. Specifically, the local curvature of the image is calculated using the Hessian matrix, and pixels that meet the conditions are selected as texture feature points by setting the parameters of the matrix, thus obtaining the first matching point C1 and the second matching point C2. The matched pixels are extracted, and the fast nearest neighbor algorithm is used to extract the pairwise matching points C1 and C2 based on Hamming distance and feature point gradient direction. It can be understood that the texture of the region with the greater the change in pixel value is more obvious, and the pairwise matching points C1 and C2 are extracted in the areas with obvious texture.
[0062] Since the rear camera has been calibrated with the front camera, the corner coordinates C1 and C2 can be converted into the coordinates corresponding to the table surface. By using the coordinate relationship between the matching first matching point C1 and the matching second matching point C2, a second transformation model A2 can be established, which can map the shape of the first exposure pattern to the second exposure pattern, ensuring that the exposure shape of the second exposure pattern is aligned with the shape of the first exposure pattern.
[0063] In some specific embodiments of the present invention, before matching the texture image captured by the front camera with the texture image captured by the rear camera, the method further includes:
[0064] The coordinates of matching points in the texture images captured by the front and rear cameras are filtered using the following steps:
[0065] a. Set the difference threshold parameter JE between the front and back textures;
[0066] b. Obtain the set of texture matching points for the rear camera X1{1, 2, ..., n}, and obtain the set of texture matching points for the front camera X2{1, 2, ..., n};
[0067] c. Match multiple first matching points C1 in the set X1{1, 2, ..., n} and multiple second matching points C2 in the set X2{1, 2, ..., n}.
[0068] d. The second matching point C2 obtains the corresponding exposure stage coordinates through the first transformation model A1.
[0069] e. Calculate the difference between each first matching point C1 and its corresponding second matching point C2.
[0070] f. Select the first matching point C1 and the corresponding second matching point C2 whose difference value diff is less than or equal to the difference threshold parameter JE.
[0071] For example, each time, three corresponding first matching points C1 and second matching points C2 are randomly selected from sets X1 and X2. Each time, matching points with a difference value diff less than or equal to a difference threshold parameter are selected from the three corresponding first matching points C1 and second matching points C2, and these points are stored in the set. Steps c and d are repeated multiple times to select multiple matching points that meet the conditions.
[0072] In some specific embodiments of the present invention, the second transformation model A2 for establishing the coordinates of the texture images acquired by the rear camera and the front camera includes:
[0073] Using the coordinate transformation formula of the first matching point Calculate the variable ring model for each pair of first matching points C1 and corresponding second matching points C2.
[0074] The transformation model with the most repetitions is selected as the second transformation model A2 for the coordinates of the texture images captured by the rear camera and the front camera.
[0075] First, the second matching point C2 is converted into the corresponding exposure stage coordinates using the first transformation model A1. Since the camera motion coordinate system coincides with the exposure machine platform coordinate system, the coordinates of the first matching point C1 on the first surface and the first matching point C2 on the second surface are unified to the coordinates of the exposure platform. That is, the second matching point C2 is converted into the corresponding exposure platform coordinates through the first transformation model A1. Thus, the exposure platform coordinates of the second-side texture image are obtained. The accuracy of the second transformation model A2 is ensured by selecting the transformation model with the most repetitions as the second transformation model for the coordinates of the texture images captured by the rear and front cameras. Using the texture images captured by the front and rear cameras of the substrate, the texture image captured by the front camera can be transformed into the texture image captured by the rear camera through the second transformation model A2. Similarly, the coordinates of the exposed pattern on the first side of the substrate can also be obtained from the exposed pattern on the rear camera through the second transformation model A2. The coordinates of the exposed patterns on the second side of the substrate can all be obtained through the second transformation model A2, ensuring that the exposed patterns on the first and second sides are perfectly aligned.
[0076] In some specific embodiments of the present invention, such as Figure 4 As shown, before establishing the second transformation model A2 for the coordinates of the texture image captured by the rear camera and the texture image captured by the front camera;
[0077] Determine whether the first matching point and the second matching point are successfully matched using the matching algorithm;
[0078] If so, then establish a mapping relationship between the coordinates of the texture image on the back of the substrate captured by the rear camera and the texture image captured by the front camera.
[0079] If not, then re-filter the coordinates of matching points in the texture images captured by the front and rear cameras.
[0080] If the first and second matching points match successfully, meaning the image processing system has obtained images of the same location in the texture images from the front and rear cameras, a complete mapping relationship can be established. If the first and second matching points do not match successfully, it may be because the feature corner points of the first and second matching points are not obvious and cannot be obtained. In this case, it is necessary to filter the first and second matching points again to find better ones.
[0081] In some specific embodiments of the present invention, the coordinate points of the back exposure pattern of the substrate are aligned by synchronous rotation, translation, and scaling of the coordinate points of the exposure pattern on the first side of the substrate through the second transformation model A2.
[0082] The exposure patterns on the first and second sides of the substrate are not necessarily identical, but the coordinates of the first and second sides of the substrate relative to the exposure stage must remain the same. After the second transformation model A2, the change in the exposure position of the first side of the substrate is synchronously transformed by the second transformation model A2. For example, if the first side of the substrate is rotated 90° for exposure, the second side of the substrate is also synchronously transformed by the second transformation model and rotated 90° for exposure, thereby ensuring the alignment accuracy of the exposure positions of the first and second sides of the substrate.
[0083] Other configurations and operations of the alignment method of the laser imaging exposure machine according to embodiments of the present invention are known to those skilled in the art and will not be described in detail here.
[0084] In the description of this specification, references to terms such as "specific embodiment" or "specific example" refer to a specific feature, structure, material, or characteristic described in connection with that embodiment or example, which is included in at least one embodiment or example of the present invention. In this specification, illustrative expressions of the above terms do not necessarily refer to the same embodiment or example.
[0085] Although embodiments of the invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.
Claims
1. A method for aligning a laser imaging exposure machine, characterized in that, An exposure machine is used, the exposure machine comprising: an exposure stage, a front camera, and a back camera, the back camera being mounted on the exposure stage, the exposure stage being adapted to place a substrate, the front camera and the back camera being located on opposite sides of the substrate, the method comprising: Establish the coordinate system mapping relationship between the rear camera, the front camera, and the exposure platform; The substrate is placed at a first exposure position and its first side is exposed, while the rear camera captures a texture image of the second side of the substrate at the exposure position. The substrate is placed in the second exposure position, and the texture image of the second side of the substrate is captured by the front camera; Establish a mapping relationship between the coordinates of the texture images of the second surface of the substrate captured by the rear camera and the front camera; A first transformation model A1 is established to represent the coordinates of the rear camera and the coordinates of the exposure stage surface; The texture image captured by the rear camera is used to obtain the corresponding exposure stage coordinates through the first transformation model A1. The exposure position of the second side of the substrate is obtained based on the mapping relationship between the coordinates of the texture image captured by the rear camera and the texture image captured by the front camera. Wherein, when establishing the coordinate system mapping relationship between the rear camera and the front camera, the coordinates of the front camera coincide with the coordinate system of the exposure stage surface, the front camera is movable relative to the exposure stage, and the rear camera is fixed to the exposure stage. Establishing the coordinate mapping relationship between the rear camera and the front camera of the substrate second-side texture image acquired by the substrate includes: The texture images of the second side captured by the front camera and the rear camera are matched using a matching algorithm; A second transformation model A2 is established for the coordinates of the texture images captured by the rear camera and the front camera; Before matching the texture image captured by the front camera with the texture image captured by the rear camera, the method further includes: The process of filtering matching points in the texture images captured by the front camera and the rear camera includes the following steps: a. Set the difference threshold parameter JE between the front and back textures; b. Obtain the set of texture matching points for the rear camera X1, and obtain the set of texture matching points for the front camera X2; c. Match multiple first matching points C1 in set X1 and multiple second matching points C2 in set X2. d. The second matching point C2 obtains the corresponding exposure stage coordinates through the first transformation model A1. ; e. Calculate the difference between each first matching point C1 and its corresponding second matching point C2. , f. Select the first matching point C1 and the corresponding second matching point C2 whose difference value diff is less than or equal to the difference threshold parameter JE.
2. The alignment method of the laser imaging exposure machine according to claim 1, characterized in that, A target is positioned between the front camera and the rear camera. Establishing the first transformation model A1 includes: The rear camera acquires the coordinates S1 of the second feature point of the target, and the front camera acquires the coordinates S2 of the first feature point of the target; Convert the coordinates of the first feature point into table coordinates. ; Using the target coordinate transformation formula The parameters of the first transformation model are calculated to establish the first transformation model A1.
3. The alignment method of the laser imaging exposure machine according to claim 2, characterized in that, A glass plate is mounted above the rear camera, and the target is formed on the glass plate.
4. The alignment method of the laser imaging exposure machine according to claim 1, characterized in that, The second transformation model A2 for establishing the coordinates of the texture images acquired by the rear camera and the front camera includes: Using the coordinate transformation formula of the first matching point Calculate the transformation model for each pair of the first matching point C1 and the corresponding second matching point C2. ; The transformation model with the most repetitions is selected as the second transformation model A2 for the coordinates of the texture images captured by the rear camera and the front camera.
5. The alignment method of the laser imaging exposure machine according to claim 1, characterized in that, Before establishing the second transformation model A2 for the coordinates of the texture image captured by the rear camera and the texture image captured by the front camera; Determine whether the first matching point and the second matching point are successfully matched using the matching algorithm; If so, a mapping relationship is established between the coordinates of the texture image on the back of the substrate captured by the rear camera and the texture image captured by the front camera. If not, then re-filter the coordinates of matching points in the texture images captured by the front and rear cameras.
6. The alignment method of the laser imaging exposure machine according to claim 1, characterized in that, The coordinate points matching the back exposure pattern of the substrate are synchronously rotated, translated, and scaled to align with the coordinate points of the front exposure pattern of the substrate through the second transformation mode A2.