A leak detection device and method for electrostatic chuck assembly

Abstract

This invention relates to a leak detection device and method for electrostatic chuck assemblies, belonging to the field of semiconductor equipment technology. The leak detection device includes a leak detection base, which is a box-shaped structure with an open top. A sealing interface flange and an upper blind plate are sequentially arranged on the upper part of the leak detection base, forming a sealed cavity inside. An upper sealing groove is formed on the upper surface of the sealing interface flange, and a sealing ring is disposed therein. The upper blind plate is detachably connected to the sealing interface flange. A leak detection connection part is also provided on the leak detection base. This solution enables separate leak detection of the electrostatic chuck assembly before it is installed in the equipment chamber, solving the problem of low efficiency in existing equipment for leak detection and troubleshooting of electrostatic chuck leaks. Furthermore, it has a simple structure, is easy for clients to use, and has high detection efficiency.

Description

Technical Field

[0001] This invention belongs to the field of semiconductor equipment technology, and specifically relates to a leak detection device and method for an electrostatic chuck assembly. Background Technology

[0002] Electrostatic chuck assemblies are commonly used components in semiconductor equipment (such as chemical vapor deposition equipment). They are integrated from various parts and installed in the vacuum chamber of the equipment. Because their operating environment is vacuum, the sealing performance of the electrostatic chuck assembly is a critical technical indicator, thus requiring leak testing. In practical applications, especially at the customer's site, the electrostatic chuck assembly is typically installed into the equipment chamber before the entire chamber is tested for leak rate. If the leak rate fails due to a problem with the electrostatic chuck assembly, it is necessary to repeatedly disassemble, adjust, or replace the assembly, and then reinstall and test it, resulting in wasted labor and time, impacting production efficiency and costs. Summary of the Invention

[0003] Based on the technical problems existing in the prior art, the present invention provides a leak detection device and method for electrostatic chuck assembly, which realizes the separate leak detection of electrostatic chuck assembly before it is installed in the equipment chamber, solves the problem of low efficiency in existing equipment leak detection and troubleshooting for leaks in electrostatic chuck, and has a simple structure, is easy for customers to use, and has high detection efficiency.

[0004] According to the technical solution of the present invention, the present invention provides a leak detection device for an electrostatic chuck assembly, including a leak detection base, which is a box-shaped structure with an opening at the top. A sealing interface flange and an upper blind plate are sequentially arranged on the upper part of the leak detection base, forming a sealing cavity inside the base. An upper sealing groove is formed on the upper surface of the sealing interface flange, and a sealing ring is arranged therein. The upper blind plate and the sealing interface flange are detachably connected. A leak detection connection part is also provided on the leak detection base.

[0005] Furthermore, the upper end face of the sealing interface flange is provided with several interface threaded holes, and the upper blind plate is provided with several screw through holes. The screw through holes correspond one-to-one with the interface threaded holes, and screws are inserted into them.

[0006] Furthermore, the upper blind plate has a threaded hole for a lifting eye, and a lifting eye bolt is threaded into it.

[0007] Furthermore, the sealing ring includes a large sealing ring arranged circumferentially along the sealing interface flange.

[0008] Furthermore, the sealing ring also includes two smaller sealing rings, which are located inside the larger sealing ring.

[0009] Furthermore, the sealing interface flange and the leak detection base are detachably connected, and an interface sealing ring is provided between the two.

[0010] Furthermore, the leak detection connection is a manual angle valve located on the side of the leak detection base; the first port of the manual angle valve is connected to and communicates with the side of the leak detection base, and the second port of the manual angle valve is used to connect the leak detection equipment.

[0011] Furthermore, a second interface sealing ring and a clamp blind plate are sequentially provided at the opening of the second interface, and a locking clamp is provided on the outside of the second interface, the second interface sealing ring and the clamp blind plate.

[0012] The present invention also provides a method for leak detection of an electrostatic chuck assembly, which is implemented using the electrostatic chuck assembly leak detection device of the present invention, and includes the following steps:

[0013] Connect the leak detection equipment to the leak detection base via the leak detection connection part;

[0014] Perform self-testing and leak detection on the electrostatic chuck assembly with upper blind flange installed, and use leak detection equipment to test the sealing performance of the sealing cavity.

[0015] If the leak detection device of the electrostatic chuck assembly passes the self-test, the leak detection of the electrostatic chuck assembly continues. The upper blind plate is removed, and the electrostatic chuck assembly is sealed and connected to the sealing interface flange. The leak detection equipment is used again to test the sealing performance of the sealing cavity. Based on this, it is determined whether the leak detection of the electrostatic chuck assembly is qualified.

[0016] Furthermore, when performing leak testing on the electrostatic chuck assembly, the electrostatic chuck assembly is placed upright on the sealing interface flange, with the bottom of the electrostatic chuck assembly located in the sealing cavity and forming a vacuum during leak testing, while the top of the electrostatic chuck assembly is in the atmospheric environment.

[0017] Compared with the prior art, the beneficial technical effects of the present invention are as follows:

[0018] 1. The electrostatic chuck assembly leak detection device and method of the present invention enables leak detection to be performed before the electrostatic chuck assembly is installed in the equipment cavity, solving the problem of wasted time and manpower caused by the existing solution of performing leak detection after installation, reducing unnecessary repetitive work, and achieving the goal of reducing production costs.

[0019] 2. The electrostatic chuck assembly leak detection device and method of the present invention has a simple structure, is easy to use, has a high utilization rate at the client site, and has extremely high practical value.

[0020] 3. The electrostatic chuck assembly leak detection device and method of the present invention places the sealing cavity for leak detection in the lower part of the electrostatic chuck assembly, and its volume is much smaller than that of the equipment chamber. This structural design of the device can reduce the volume, make it easy to carry and move, and meet the requirements of the client's operation.

[0021] 4. When the electrostatic chuck assembly leak detection device and method of the present invention are in use, the upper part of the electrostatic chuck assembly is completely visible, without structural obstruction, and is in an atmospheric environment, which facilitates the use of leak detection equipment to detect leaks and locate leak points. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the structure of a leak detection device according to an embodiment of the present invention in an idle state.

[0023] Figure 2 yes Figure 1 A cross-sectional view of the embodiment shown.

[0024] Figure 3 yes Figure 1 An exploded view of the upper blind plate being disassembled in the illustrated embodiment.

[0025] Figure 4 yes Figure 1 A schematic diagram of the sealing interface flange of the embodiment shown.

[0026] Figure 5 yes Figure 1 A schematic diagram of the leak detection base in the embodiment shown.

[0027] Figure 6 yes Figure 1 The illustrated embodiment is a structural diagram in its working state.

[0028] Figure 7 yes Figure 6 A top-view structural diagram.

[0029] Explanation of reference numerals in the attached figures:

[0030] 1. Install blind flange;

[0031] 11. Eye bolts;

[0032] 12. Threaded hole for lifting eye;

[0033] 13. Through-hole for screws;

[0034] 14. Screws;

[0035] 2. Sealing interface flange;

[0036] 21. Upper sealing groove;

[0037] 22. Large sealing ring;

[0038] 23. Small sealing ring;

[0039] 24. Interface sealing ring;

[0040] 25. Interface threaded hole;

[0041] 26. Airflow channel;

[0042] 3. Leak detection base;

[0043] 4. Leak detection connection part;

[0044] 41. First interface;

[0045] 42. Second interface;

[0046] 43. Second interface sealing ring;

[0047] 44. Clamp blind flange;

[0048] 45. Locking clamps;

[0049] 46. ​​Knob;

[0050] 47. Crimped flange;

[0051] 48. First interface sealing ring;

[0052] 5. Sealed cavity;

[0053] 6. Electrostatic chuck assembly. Detailed Implementation

[0054] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without creative effort are within the scope of protection of this invention.

[0055] It should also be noted that, for ease of description, only the parts relevant to the invention are shown in the accompanying drawings. Unless otherwise specified, the embodiments and features described herein can be combined with each other.

[0056] It should be noted that the concepts of "first" and "second" mentioned in this invention are only used to distinguish different devices, modules or units, and are not used to limit the order of functions performed by these devices, modules or units or their interdependencies.

[0057] It should be noted that the terms "a" and "a plurality of" used in this invention are illustrative rather than restrictive. Those skilled in the art should understand that, unless otherwise expressly indicated in the context, they should be understood as "one or more".

[0058] This invention provides a leak detection device and method for electrostatic chuck assemblies, enabling leak detection of the electrostatic chuck assembly separately before it is installed in the equipment chamber. This solves the problem of low efficiency in existing equipment leak detection and troubleshooting for leaks in electrostatic chucks. Furthermore, the device is simple in structure, easy for users to use, and has high detection efficiency.

[0059] Please see Figure 1 , Figure 2 An embodiment of the present invention provides a leak detection device for an electrostatic chuck assembly, including a leak detection base 3, such as... Figure 5 As shown, the leak detection base 3 is a box-shaped structure with an opening at the top. A sealing interface flange 2 and an upper blind plate 1 are sequentially arranged above the leak detection base 3, forming a sealing cavity 5 inside. Figure 4 As shown, the sealing interface flange 2 is annular, and an upper sealing groove 21 is provided on its upper surface, in which a sealing ring is provided. The sealing ring abuts against the lower surface of the upper blind plate 1 for sealing.

[0060] The upper blind flange 1 and the sealing interface flange 2 are detachably connected. For example, the upper end face of the sealing interface flange 2 is evenly provided with a number of interface threaded holes 25, and the upper blind flange 1 is provided with a number of screw through holes 13. The screw through holes 13 correspond one-to-one with the interface threaded holes 25, and screws 14 are inserted into them. Since the air pressure in the sealing cavity 5 may still be lower than the outside atmospheric environment after the vacuum is released, making it difficult to remove the upper blind flange 1, it is preferable that the upper blind flange 1 is also provided with a lifting eye threaded hole 12, and a lifting eye bolt 11 is threaded into it. The lifting eye part of the lifting eye bolt 11 is located above the upper blind flange 1, so as to facilitate the removal of the upper blind flange 1 by hand or other tools by pulling the lifting eye.

[0061] In a preferred embodiment, the sealing rings include at least one large sealing ring 22, which is arranged annularly along the sealing interface flange 2. More preferably, it also includes two small sealing rings 23, which are located inside the large sealing ring 22. An electrostatic chuck assembly 6 has two holes at its bottom connecting the upper and lower sides, such as air inlets, for introducing gas into the equipment chamber through the electrostatic chuck assembly 6. The positions of the small sealing rings 23 correspond one-to-one with the air inlets. After installation with the electrostatic chuck assembly 6, the interior of the air inlet is open to the atmosphere at the top, and the small sealing rings 23 seal and block the bottom of the air inlet, forming a seal at the bottom of the electrostatic chuck assembly 6 and preventing it from communicating with the atmosphere. These sealing rings are static seals, and their shapes include, for example, circles, plum blossoms, rectangles, and squares.

[0062] Please see Figure 4Several radially grooved airflow channels 26 are also provided on the inner / outer sides of the upper sealing groove 21. The airflow channels 26 connect the inner / outer sides of the upper sealing groove 21 with the sealing cavity 5 / the outside world, serving as air blowing ports during helium leak detection. Under good airtightness, the sealing ring will seal and block the airflow channels 26; conversely, leakage will occur at the sealing ring, thus enabling convenient, quick, and accurate troubleshooting for leaks at the sealing ring.

[0063] The sealing flange 2 is the connector for the electrostatic chuck assembly 6 being tested. Its shape matches the electrostatic chuck assembly 6; for example, the electrostatic chuck assembly 6 has screw holes for connecting to the equipment chamber, and the threaded holes 25 on the sealing flange 2 correspond to these. The base plate of the electrostatic chuck assembly 6 is generally flat, and components such as pipe fittings may be connected to the lower center of the base plate. The annular central hole of the sealing flange 2 needs to be as large as possible to accommodate the components at the bottom of the electrostatic chuck assembly 6. The function of the sealing flange 2 is to connect the electrostatic chuck assembly 6 to the vacuum leak detection system below and to expose the electrostatic chuck assembly 6 for easy leak detection.

[0064] In a preferred embodiment, such as Figure 2 As shown, the sealing interface flange 2 and the leak detection base 3 are detachably connected, for example, similar to the upper blind plate 1, using screws. The lower surface of the sealing interface flange 2 has a lower sealing ring groove, in which an interface sealing ring 24 is placed. The interface sealing ring 24 seals against the sealing interface flange 2 and the leak detection base 3. By making the sealing interface flange 2 a detachable screw-connected structure, it is possible to replace and be compatible with different electrostatic chuck assemblies, making it more flexible and convenient to use.

[0065] A leak detection connection part 4 is also provided on the leak detection base 3. The leak detection connection part 4 can be a pipe or the like for connection, preferably a manual angle valve provided on the side of the leak detection base 3. One end of the manual angle valve is a first interface 41, and the other end is a second interface 42. The manual angle valve has a knob 46 for adjusting the connection between the first interface 41 and the second interface 42. The first interface 41 of the manual angle valve is connected to and communicates with the side of the leak detection base 3, and the second interface 42 of the manual angle valve is used to connect a leak detection device, such as a helium leak detector (also known as a helium mass spectrometer leak detector).

[0066] More specifically, such as Figure 3 , Figure 3 , Figure 5As shown, the leak detection base 3 has a through hole and a threaded hole around the through hole on its side wall. The first interface 41 of the manual angle valve is sealed by the first interface sealing ring 48 against the periphery of the through hole on the side wall of the leak detection base 3. A crimping flange 47 is also fitted over the first interface 41. The crimping flange 47 has a through hole and is connected to the threaded hole on the side wall of the leak detection base 3 by screws. The open end of the second interface 42 is sequentially provided with a second interface sealing ring 43 and a clamp blind plate 44. A locking clamp 45 is provided on the outside of the second interface 42, the second interface sealing ring 43, and the clamp blind plate 44. The locking clamp 45 is used to press and lock the clamp blind plate 44. The clamp blind plate 44 and the open end of the second interface 42 are sealed by the second interface sealing ring 43, thus playing a role in dust prevention and pollution prevention when the leak detection device is idle or carried and moved by personnel. When performing leak detection, the clamp blind plate 44 is removed and replaced with the pipe of the leak detection device, and then the connection is sealed by the second interface sealing ring 43 and the locking clamp 45. This structure is preferred because the locking clamp 45 is detachable, which facilitates quick connection.

[0067] Based on the leak detection device of the present invention, the present invention provides a leak detection method for an electrostatic chuck assembly, taking the structure of the preferred embodiment above as an example, which includes the following steps:

[0068] First, prepare by debugging the leak detection equipment, such as the helium leak detector. After removing the clamp blind plate 44, connect the leak detection equipment to the leak detection base 3 through the leak detection connection part 4, and prepare to start the leak detection test.

[0069] Then, perform self-testing and leak detection of the device, that is, perform self-testing and leak detection of the electrostatic chuck assembly leak detection device with upper blind plate 1 installed, rotate knob 46 to connect the manual angle valve to the leak detection device and the sealing cavity 5, and use the leak detection device to test the sealing performance of the sealing cavity 5.

[0070] If the leak detection device of the electrostatic chuck assembly passes the self-test, then the leak detection of the electrostatic chuck assembly 6 continues. Specifically, screw 14 is removed, the upper blind plate 1 is removed, and the screw 14 that was just removed is used again to reconnect the electrostatic chuck assembly 6 to the sealing interface flange 2 in a sealing connection. After the connection is completed, the state is as follows. Figure 6 , Figure 7 As shown, the sealing performance of the sealing cavity 5 is tested again using a leak detection device, and the leak detection performance of the electrostatic chuck assembly 6 is determined accordingly.

[0071] It should be noted that during leak testing of the electrostatic chuck assembly 6, the assembly is placed upright on the sealing flange 2, with its bottom below the sealed cavity 5 creating a vacuum during leak testing, while the top of the assembly is exposed to the atmosphere. Traditional leak testing methods essentially involve enclosing the electrostatic chuck assembly 6 in a sealed environment within the equipment chamber, thus preventing direct contact for inspection. In contrast, the component being inspected in this invention is entirely exposed to the air, facilitating direct contact and inspection, resulting in higher efficiency.

[0072] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A leak detection device for an electrostatic chuck assembly, characterized in that, The system includes a leak detection base (3), which is a box-shaped structure with an open top. A sealing interface flange (2) and an upper blind plate (1) are sequentially arranged above the leak detection base (3), forming a sealing cavity (5) inside. An upper sealing groove (21) is provided on the upper surface of the sealing interface flange (2), and a sealing ring is placed therein. The upper blind plate (1) and the sealing interface flange (2) are detachably connected. A leak detection connection part (4) is also provided on the leak detection base (3). When performing leak detection on the electrostatic chuck assembly (6), the upper blind plate (1) is removed, and the electrostatic chuck assembly (6) is sealed and connected to the sealing interface flange (2). The electrostatic chuck assembly (6) is placed upright on the sealing interface flange (2). The bottom of the electrostatic chuck assembly (6) is located in the sealing cavity (5) and a vacuum is formed during leak detection. The top of the electrostatic chuck assembly (6) is in the atmospheric environment so that it can directly contact the electrostatic chuck assembly (6) for inspection and troubleshooting.

2. The electrostatic chuck assembly leak detection device as described in claim 1, characterized in that, The upper end face of the sealing interface flange (2) is provided with a number of interface thread holes (25), and the upper blind plate (1) is provided with a number of screw through holes (13). The screw through holes (13) correspond one-to-one with the interface thread holes (25) and screws (14) are inserted into them.

3. The electrostatic chuck assembly leak detection device as described in claim 1, characterized in that, The upper blind plate (1) has a lifting eye threaded hole (12) and a lifting eye bolt (11) is threaded into it.

4. The electrostatic chuck assembly leak detection device as described in claim 1, characterized in that, The sealing ring includes a large sealing ring (22) which is arranged circumferentially along the sealing interface flange (2).

5. The electrostatic chuck assembly leak detection device as described in claim 4, characterized in that, The sealing ring also includes two small sealing rings (23), which are located inside the large sealing ring (22).

6. The electrostatic chuck assembly leak detection device as described in claim 1, characterized in that, The sealing interface flange (2) and the leak detection base (3) are detachably connected, and an interface sealing ring (24) is provided between them.

7. The electrostatic chuck assembly leak detection device according to any one of claims 1-6, characterized in that, The leak detection connection part (4) is a manual angle valve disposed on the side of the leak detection base (3); the first port (41) of the manual angle valve is connected and communicates with the side of the leak detection base (3), and the second port (42) of the manual angle valve is used to connect the leak detection equipment.

8. The electrostatic chuck assembly leak detection device as described in claim 7, characterized in that, The second interface (42) is provided with a second interface sealing ring (43) and a clamp blind plate (44) in sequence at the opening. A locking clamp (45) is provided on the outside of the second interface (42), the second interface sealing ring (43) and the clamp blind plate (44).

9. A method for leak detection of an electrostatic chuck assembly, characterized in that, It is implemented using the electrostatic chuck assembly leak detection device according to any one of claims 1-8, and includes the following steps: The leak detection device is connected to the leak detection base (3) through the leak detection connection part (4); The electrostatic chuck assembly with the upper blind plate (1) installed is subjected to self-test and leak detection. The leak detection equipment is used to test the sealing performance of the sealing cavity (5). If the leak detection device of the electrostatic chuck assembly passes the self-test, the leak detection of the electrostatic chuck assembly (6) continues. The upper blind plate (1) is removed, and the electrostatic chuck assembly (6) is sealed and connected to the sealing interface flange (2). The leak detection device is used again to test the sealing performance of the sealing cavity (5). Based on this, it is determined whether the leak detection of the electrostatic chuck assembly (6) is qualified.

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