A vacuum plasma surface treatment machine

Abstract

The application belongs to the technical field of plasma processing machines, and discloses a vacuum plasma surface treatment machine, which comprises fixed forks rotationally arranged on the inner wall of a cleaning box body, and the two fixed forks are fixedly provided with rotating mechanisms at one end; a second driving mechanism for driving the rotation of a supporting ring is fixedly arranged at the upper end of one of the fixed forks; a device compartment for fixing the first driving mechanism is arranged on the side wall of the cleaning box body, and a box door for sealing is rotationally arranged on one side of the opening of the cleaning box body. The workpiece is subjected to surface treatment at one time, and the inside of the hole is also well treated, so that the working efficiency is greatly improved and the treatment time is saved.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of plasma processing machines, and particularly relates to a vacuum plasma surface treatment machine. BACKGROUND

[0002] The vacuum plasma machine surface treatment machine is a process equipment for surface treatment pretreatment, and aims to make the surface treatment effect of a product better and more firm. Argon, helium and other gases are excited into plasma groups by a high-voltage electric field and a radio frequency power source. The plasma groups have positive ions, negative ions, free radicals and various active groups, and can act on the surface of the product to remove the original trace contaminants and impurities on the surface. This process can also produce etching effects, can make the sample surface rough, form many fine pits and depressions, increase the roughness ratio of the sample surface, and improve the adhesion and wetting properties of the solid surface.

[0003] The traditional vacuum plasma surface treatment machine sets electrode sheets on both sides, and then places a workpiece between the electrode sheets to perform plasma treatment. Directly placing the workpiece on the bearing platform will cause one side to be unable to perform plasma treatment. The normal treatment time is relatively long, and the other side needs to be treated by plasma again, which consumes a large amount of time and reduces work efficiency. In addition, the workpiece placed on the bearing platform is fixed and cannot be well treated inside some holes. SUMMARY

[0004] (I) Technical problems solved

[0005] To solve the problems in the background art, the application provides a vacuum plasma surface treatment machine, which can perform surface treatment on a workpiece at one time, has good treatment effect on the inside of a hole, greatly improves work efficiency, and saves treatment time.

[0006] (II) Technical solutions

[0007] To achieve the above object, the application provides the following technical solutions: a vacuum plasma surface treatment machine, comprising fixed forks rotatably arranged on both sides of the inner wall of a cleaning box, one end of each of the two fixed forks is fixedly provided with a rotating mechanism;

[0008] The rotating mechanism comprises outer fixed rings fixedly arranged on both sides of the fixed forks, a supporting ring is rotatably arranged between the two outer fixed rings, a clamping mechanism for clamping is fixedly arranged at a corresponding position on the inner wall of the supporting ring, and the upper end of one of the fixed forks is fixedly provided with a second driving mechanism for driving the supporting ring to rotate;

[0009] The clamping mechanism comprises a fixed sleeve fixedly arranged on the supporting ring, a sliding rod for fixing a ball seat is slidably arranged in the fixed sleeve, and a clamping frame is rotatably arranged at one end of the ball seat.

[0010] The cleaning box side wall is provided with a device compartment for fixing the first driving mechanism, and a box door for sealing is rotatably arranged on one side of the opening of the cleaning box.

[0011] In the technical scheme, preferably, the clamping mechanism further comprises a ball groove arranged at one end of the ball seat, a half ball movably arranged in the ball groove, and a fixing column fixed between one end of the half ball and the clamping frame, and the ball groove and the half ball are limited to each other.

[0012] In the technical scheme, preferably, longitudinal sliding grooves are arranged at two sides of the clamping frame, sliding blocks fixed with the upper U-shaped clamping plate are slidably arranged in the two longitudinal sliding grooves, a lower clamping plate corresponding to the upper U-shaped clamping plate is fixed at the lower end of the clamping frame, and the workpiece 10 is clamped between the lower clamping plate and the upper U-shaped clamping plate.

[0013] In the technical scheme, preferably, an electric cylinder is fixed between the upper end of the upper U-shaped clamping plate and the clamping frame, a limiting plate for positioning the clamping frame is fixed at the lower end of the ball seat, and rubber pads for preventing slipping are fixed on the opposite sides of the lower clamping plate and the upper U-shaped clamping plate.

[0014] In the technical scheme, preferably, a third servo motor for driving is fixed at the bottom of the inner cavity of the fixing sleeve, a screw rod is connected to the output shaft of the third servo motor through a shaft coupling, and the screw rod is threadedly arranged in the middle of the sliding rod.

[0015] In the technical scheme, preferably, the rotating mechanism further comprises a ring groove arranged at one side of the two outer fixing rings, a limiting ring fixed at two sides of the supporting ring is rotatably arranged in the ring groove, an outer gear ring is fixed around the outer side of the supporting ring, a fixing groove for accommodating the rotating mechanism is arranged at one side of the fixing fork, and the inner walls of the fixing groove are fixed with the two outer fixing rings.

[0016] In the technical scheme, preferably, the second driving mechanism comprises a second servo motor fixed with the surface of the fixing fork, the output shaft of the second servo motor movably penetrates the side wall of the fixing fork and is fixed with a driving gear meshing with the outer gear ring.

[0017] In the technical scheme, preferably, the first driving mechanism comprises a reducer fixed at the bottom of the device compartment, a first servo motor for driving is fixed on the surface of the reducer, and the output shaft of the first servo motor is fixed with the input shaft of the reducer.

[0018] In the technical scheme, preferably, the two fixing forks are fixed with a connecting shaft movably inserted into the inner wall of the cleaning box at one side of the inner wall of the cleaning box, the connecting shaft at the side of the first servo motor penetrates the inner wall of the cleaning box and is located in the device compartment, and the output shaft of the reducer is fixed with the connecting shaft.

[0019] In the technical scheme, preferably, the cleaning box cavity and the middle part of the box door are both provided with electrode plates for generating plasma, and the two electrode plates correspond to each other; the cleaning box is adapted to the clasp buckle fixed at one end of the box door and forms a locking assembly.

[0020] (III) Beneficial Effects

[0021] Compared with the prior art, the present application has the following beneficial effects:

[0022] The workpiece is clamped by the upper U-shaped clamping plate and the lower clamping plate, the first servo motor drives the fixed fork to rotate through the speed reducer and the connecting shaft, thereby driving the rotating mechanism to rotate, the position of the workpiece in the vacuum treatment machine can be changed, the workpiece is located within the range of plasma generated by the two electrodes, and the treatment effect is improved.

[0023] The second servo motor drives the driving gear to rotate, thereby driving the outer gear ring to rotate between the two outer fixed rings, thereby driving the clamping mechanism to rotate through the support ring, the workpiece can be moved to any position, under the action of gravity when the first driving mechanism and the second driving mechanism work, the workpiece drives the hemisphere to rotate freely and slowly in the ball groove of the ball seat, each surface of the workpiece can be located within the plasma range, thereby increasing the surface treatment effect and the treatment area.

[0024] The third servo motor corresponding to the one-side clamping mechanism drives the screw rod to rotate, thereby driving the sliding rod to move in the fixed sleeve, thereby slowly moving the clamping frame towards the workpiece side until the workpiece is located between the upper U-shaped clamping plate and the lower clamping plate, the upper U-shaped clamping plate corresponding to the one-side clamping mechanism moves downward to clamp one end of the workpiece, the clamping mechanism that originally clamps releases the workpiece, the surface that has not been treated is exposed, and surface treatment is performed, in summary, the device performs surface treatment on the workpiece at one time, thereby automatically operating and automatically processing, the vacuum treatment box does not need to be opened by manual operation, the treatment surface does not need to be replaced, and repeated vacuumizing is not needed, thereby saving a large amount of time. BRIEF DESCRIPTION OF DRAWINGS

[0025] Figure 1 It is a three-dimensional internal schematic view of the cleaning box of the present application;

[0026] Figure 2 It is a schematic view of the position of the box door and the electrode plate of the present application;

[0027] Figure 3 It is a front view schematic view of the internal part of the cleaning box of the present application;

[0028] Figure 4 It is a schematic view of the rotating mechanism, the second driving mechanism and the first driving mechanism of the present application;

[0029] Figure 5This is a top view schematic diagram of the second drive mechanism of the present invention;

[0030] Figure 6 This is an exploded view of the rotating mechanism of the present invention;

[0031] Figure 7 This is a schematic diagram showing the connection between the fixing sleeve, the third servo motor, and the slide bar of the present invention;

[0032] Figure 8 This is an exploded schematic diagram of the clamping mechanism of the present invention.

[0033] In the diagram: 1. Cleaning box; 2. Clamping mechanism; 21. Clamping frame; 22. Ball seat; 23. Fixing sleeve; 24. Slide rod; 25. Screw; 26. Third servo motor; 27. Limiting plate; 28. Ball groove; 29. ​​Hemisphere; 290. Fixing column; 210. Longitudinal slide groove; 211. Upper U-shaped clamping plate; 212. Electric cylinder; 213. Slider; 214. Rubber pad; 215. Lower clamping plate; 3. Fixing fork; 4. Rotating mechanism; 41. External gear ring; 42. External fixed ring; 43. Ring groove; 44. Support ring; 45. Limiting ring; 5. Box door; 6. Equipment compartment; 7. Second drive mechanism; 71. Second servo motor; 72. Drive gear; 8. First drive mechanism; 81. First servo motor; 82. Connecting shaft; 83. Reducer; 9. Electrode plate; 10. Workpiece; 11. Fixing groove; 12. Buckle; 13. Slot. Detailed Implementation

[0034] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0035] like Figures 1 to 8 As shown, the present invention provides a vacuum plasma surface treatment machine, including fixed forks 3 rotatably disposed on both sides of the inner wall of a cleaning chamber 1, and a rotating mechanism 4 fixed at one end of each of the two fixed forks 3; the rotating mechanism 4 includes outer fixed rings 42 fixed to both sides of the fixed forks 3, a support ring 44 rotatably disposed between the two outer fixed rings 42, and a clamping mechanism 2 for clamping fixed at a corresponding position on the inner wall of the support ring 44; a second driving mechanism 7 for driving the support ring 44 to rotate is fixed at the upper end of one of the fixed forks 3; the clamping mechanism 2 includes a fixed sleeve 23 fixed to the support ring 44, a slide rod 24 for fixing a ball seat 22 is slidably disposed inside the fixed sleeve 23, and a clamping frame 21 is rotatably disposed at one end of the ball seat 22; an equipment compartment 6 for fixing a first driving mechanism 8 is opened on the side wall of the cleaning chamber 1, and a door 5 for sealing is rotatably disposed on one side of the opening of the cleaning chamber 1.

[0036] Among them, the first servo motor 81, the second servo motor 71, the third servo motor 26, the reducer 83, and the electric cylinder 212 are existing technologies, and their structural principles will not be described in detail. The present invention includes a compiler adapted to the first servo motor 81, the second servo motor 71, and the third servo motor 26, a power supply connected to the power grid, a controller, a microcomputer, and switches, etc. Since these are not the main technologies, they will not be described in detail. At the same time, the cleaning chamber 1 is an existing vacuum chamber, which also includes a vacuum device, a plasma generator, etc. The present invention is one of the structures, and the two clamping mechanisms 2 are independently controlled.

[0037] This invention comprises three operational steps: 1. Clamping and fixing the workpiece 10 within a vacuum plasma chamber; 2. Rotating the workpiece 10 for surface treatment; 3. Performing plasma cleaning on surfaces that are obstructed and cannot be cleaned, as detailed below:

[0038] 1. The user places the workpiece 10 to be processed between the upper U-shaped clamping plate 211 and the lower clamping plate 215 of one of the clamping mechanisms 2. Then, the electric cylinder 212 pushes the upper U-shaped clamping plate 211 downward, so that the distance between the upper U-shaped clamping plate 211 and the lower clamping plate 215 is reduced, thereby clamping the workpiece 10. This setting can only clamp one side of the workpiece 10, thereby increasing the processing area of ​​the workpiece 10 and improving the surface treatment effect of the workpiece 10.

[0039] 2. After fixing, it should be noted that the clamping frame 21 of the two clamping mechanisms 2 is in a vertical state under normal conditions. One side of the clamping frame 21 abuts against the limiting plate 27, and the limiting plate 27 limits the position of the clamping frame 21. The upper U-shaped clamping plate 211 and the lower clamping plate 215 of the other clamping mechanism 2 are always kept in an open or closed state. Under normal conditions, one end of the workpiece 10 corresponds to the opening of the upper U-shaped clamping plate 211 and the lower clamping plate 215 of the other clamping mechanism 2. The first servo motor 81 and the second servo motor 71 simultaneously receive the electrical signal from the compiler and start working. The first servo motor 81 drives the fixed fork 3 to rotate through the reducer 83 and the connecting shaft 82, thereby driving the rotating mechanism 4 to rotate around the connecting shaft 82 as the axis. This can change the position of the workpiece 10 inside the vacuum processing machine. Since the plasma generated by the two electrodes has a certain range, this setting can move the workpiece 10 into the processing range and improve the processing effect.

[0040] The second servo motor 71 drives the drive gear 72 to rotate, thereby causing the outer gear ring 41 to rotate between the two outer fixed rings 42. This, in turn, drives the clamping mechanism 2 to rotate via the support ring 44. This configuration allows for 360-degree rotation, enabling the workpiece 10 to be moved to any position. When the first drive mechanism 8 and the second drive mechanism 7 are working, the hemisphere 29 will rotate freely within the ball groove 28 of the ball seat 22, ensuring that every surface of the workpiece 10 is within the plasma range. This enhances the surface treatment effect and increases the treatment area. For example, under normal conditions, the fixed column 290 and the ball seat 22 are at an inclined angle. When the clamping mechanism 2 holding the workpiece 10 rotates to the top of the outer fixed ring 42, the workpiece 10, under the influence of gravity, will cause the fixed column 290 and the hemisphere 29 to be aligned with the ball groove 28 on the same axis, allowing for surface treatment at different positions on the workpiece 10. It should be noted that the above process needs to be performed slowly. Because the workpiece 10 can change angles, it also has a good treatment effect on the interior of the holes in the workpiece 10, greatly improving work efficiency and saving processing time.

[0041] Third, after most of the workpiece 10 has undergone surface treatment, it needs to be rotated to its normal position. At this time, the third servo motor 26 of the corresponding clamping mechanism 2 receives the compiler signal and drives the screw 25 to rotate, thereby driving the slide bar 24 to move within the fixed sleeve 23. This causes the clamping frame 21 to slowly move towards the workpiece 10 until the workpiece 10 is located between the upper U-shaped clamping plate 211 and the lower clamping plate 215. At this time, the electric cylinder 212 of the corresponding clamping mechanism 2 is energized, driving the upper U-shaped clamping plate 211 to move downward, thereby clamping one end of the workpiece 10. The clamping mechanism 2, which was originally clamped, releases the workpiece 10, exposing the untreated surface. Then, the vacuum treatment machine repeats the steps one and two above to treat the surface of the workpiece 10. Through the above operation, the workpiece 10 can be surface treated in one go, thus achieving automatic operation and automatic processing capabilities. It is not necessary to manually open the vacuum treatment box, change the treatment surface, or repeatedly evacuate, which wastes a lot of time and the gas inside, increasing the cost of use.

[0042] like Figure 1 , 3 As shown in Figures 4 and 8, the clamping mechanism 2 also includes a ball groove 28 at one end of the ball seat 22. A hemisphere 29 is movably disposed in the ball groove 28. The hemisphere 29 is engaged with and moves in the ball groove 28. A fixing post 290 is fixedly connected between one end of the hemisphere 29 and the clamping frame 21. The hemisphere 29 and the fixing post 290 are integrally cast to increase structural stability. The ball groove 28 and the hemisphere 29 limit each other. The bottom of the inner cavity of the fixing sleeve 23 is fixed to the mounting end of the third servo motor 26 by screws. The output shaft of the third servo motor 26 is connected to a screw 25 through a coupling. The screw 25 and the middle of the slide rod 24 are threaded. The middle of the slide rod 24 is provided with an internal thread groove and is connected to the screw 25.

[0043] Using the above scheme: The third servo motor 26 receives the compiler signal, and the output shaft of the third servo motor 26 drives the screw 25 to rotate, thereby driving the slide bar 24 to move within the fixed sleeve 23, so that the clamping frame 21 moves slowly towards the workpiece 10 to achieve the clamping action. The servo motor has the advantage of high precision, and the clamping force can also be increased by adding a reduction device to reduce the speed and increase the torque of the servo motor. The hemisphere 29 and the ball groove 28 limit each other, so the hemisphere 29 will not fall off even if it rotates freely within the ball groove 28. The fixed column 290 plays a connecting and fixing role, thereby connecting and fixing the hemisphere 29 to the clamping frame 21.

[0044] like Figure 1 , 3 As shown in Figures 4, 7, and 8, the clamping frame 21 has longitudinal sliding grooves 210 on both sides. Sliding blocks 213, fixed to the upper U-shaped clamping plate 211, slide inside the two longitudinal sliding grooves 210. The upper U-shaped clamping plate 211 and the sliding blocks 213 are welded and fixed. A lower clamping plate 215, corresponding to the upper U-shaped clamping plate 211, is fixed at the lower end of the clamping frame 21. The workpiece 10 is clamped between the lower clamping plate 215 and the upper U-shaped clamping plate 211. An electric cylinder 212 is fixed between the upper end of the upper U-shaped clamping plate 211 and the clamping frame 21. The two ends of the electric cylinder 212 are connected to the upper end of the upper U-shaped clamping plate 211 and the clamping frame 21 by screws. 1. Fixed: A limiting plate 27 for positioning the clamping frame 21 is welded and fixed to the lower end of the ball seat 22. Rubber pads 214 for anti-slip are attached and fixed to the side opposite to the lower clamping plate 215 and the upper U-shaped clamping plate 211. The rotating mechanism 4 also includes annular grooves 43 opened on one side of the two outer fixing rings 42. The inner side of the annular grooves 43 is provided with limiting rings 45 fixed to both sides of the support ring 44. An outer toothed ring 41 is fixed around the outer side of the support ring 44. A fixing groove 11 for accommodating the rotating mechanism 4 is opened on one side of the fixing fork 3. The inner walls of the fixing groove 11 are fixed to the two outer fixing rings 42 on both sides.

[0045] The above scheme is adopted: the longitudinal sliding groove 210 slides and limits the upper U-shaped clamping plate 211, increasing the structural stability. The longitudinal sliding groove 210 is preferably a T-shaped groove, which has a good limiting effect. The telescopic end of the electric cylinder 212 extends and pushes the upper U-shaped clamping plate 211 to move downward in the longitudinal sliding groove 210, so that the distance between the upper U-shaped clamping plate 211 and the lower clamping plate 215 becomes smaller until it contacts and abuts against the surface of the workpiece 10, thereby clamping the workpiece 10. This setting can only clamp one side of the workpiece 10, thereby increasing the processing area of ​​the workpiece 10 and improving the surface treatment effect of the workpiece 10. The rubber pad 214 can increase the friction of the device to fix the workpiece 10, thereby making the workpiece 10 more firmly fixed and preventing it from falling off during rotation. At the same time, it can protect the surface of the workpiece 10 from damage due to excessive force. The outer gear ring 41 drives the limiting rings 45 on both sides of the support ring 44 to rotate in the annular groove 43 of the outer fixed ring 42, thereby limiting and supporting the support ring 44, so that the rotation of the support ring 44 is smoother.

[0046] like Figure 1 , 3 As shown in Figure 5, two fixed forks 3 are fixed on one side of the inner wall of the cleaning box 1 and are connected to the inner wall of the cleaning box 1 by a connecting shaft 82. The connecting shaft 82 located on one side of the first servo motor 81 passes through the inner wall of the cleaning box 1 and is located in the equipment compartment 6, and is fixed to the output shaft of the reducer 83.

[0047] The above scheme is adopted: the two fixed forks 3 support the rotating mechanism 4 through the connecting shaft 82, so that the rotating mechanism 4 is suspended inside the cleaning chamber 1, which facilitates rotation. The equipment compartment 6 is used to place the driving equipment, protect the driving device, and make the plasma treatment machine more aesthetically pleasing.

[0048] like Figure 4 , 5 As shown, the second drive mechanism 7 includes a mounting end of the fixed fork 3 and the second servo motor 71 fixed by screws. The output shaft of the second servo motor 71 movably passes through the side wall of the fixed fork 3 and is fixedly connected to a drive gear 72 that meshes with the external gear ring 41. The output shaft of the second servo motor 71 and the drive gear 72 are interference-fitted.

[0049] The above scheme is adopted: the output shaft of the second servo motor 71 drives the drive gear 72 to rotate, thereby driving the outer gear ring 41 to rotate between the two outer fixed rings 42, so that the clamping mechanism 2 can rotate 360 ​​degrees to improve the surface treatment effect of the workpiece 10.

[0050] like Figure 3 , 4 As shown, the first drive mechanism 8 includes a reducer 83 fixed to the bottom of the equipment compartment 6. A first servo motor 81 for driving is fixed on the surface of the reducer 83. The output shaft of the first servo motor 81 is fixedly connected to the input shaft of the reducer 83.

[0051] The above scheme is adopted: the output shaft of the first servo motor 81 drives the reducer 83 to work, the reducer 83 drives the connecting shaft 82 to rotate, thereby driving the fixed fork 3 to rotate. The fixed fork 3 drives the rotating mechanism 4 to rotate around the connecting shaft 82 as the axis, which can change the position of the workpiece 10 inside the vacuum treatment machine. This setting requires the fixed fork 3 to rotate slowly in order to improve the surface treatment effect of the workpiece 10.

[0052] like Figure 1 , 2 As shown, the inner cavity of the cleaning chamber 1 and the middle of the door 5 are both provided with electrode plates 9 for generating plasma, and the two electrode plates 9 correspond to each other. The slot 13 located at the upper end of the equipment compartment 6 of the cleaning chamber 1 is adapted to the buckle 12 fixed at one end of the door 5 and forms a locking assembly.

[0053] Using the above solution: an external control device energizes the two electrode plates 9, ionizes the gas, and forms plasma. A plasma region is generated between the two electrode plates 9. The workpiece 10 is placed in this region to achieve the surface treatment effect. The slot 13 is equipped with a latch, which can lock the latch 12. Any lock with this structure on the market is applicable to seal the cleaning box 1 and the door 5. It is not limited to the locking device mentioned in this invention.

[0054] Working principle and usage process of this invention:

[0055] The user first opens the door 5, then places the workpiece 10 to be processed between the upper U-shaped clamping plate 211 and the lower clamping plate 215 of one of the clamping mechanisms 2. Then, power is transmitted via an electric wire to energize the electric cylinder 212, causing its telescopic end to extend and push the upper U-shaped clamping plate 211 downwards, reducing the distance between the upper U-shaped clamping plate 211 and the lower clamping plate 215. This allows the rubber pad 214 to contact and press against the surface of the workpiece 10, thus clamping the workpiece 10. This setup only clamps one side of the workpiece 10. After fixing, the door 5 and the cleaning chamber 1 are closed by locking the slot 13 and the buckle 12. A vacuum is then applied to the inside of the cleaning chamber 1 using a vacuum device. It should be noted that, under normal conditions, the clamping frame 21 of both clamping mechanisms 2 is in a vertical position, with one side of the clamping frame 21 abutting against the limiting plate 27. The limiting plate 27 restricts the position of the clamping frame 21. The upper U-shaped clamping plate 211 and lower clamping plate 215 of one clamping mechanism 2 are always kept in an open or closed state. Under normal conditions, one end of the workpiece 10 corresponds to the opening of the upper U-shaped clamping plate 211 and lower clamping plate 215 of the other clamping mechanism 2. The first servo motor 81 and the second servo motor 71 simultaneously receive the electrical signal from the compiler and start to work. The output shaft of the first servo motor 81 drives the input shaft of the reducer 83 to rotate, thereby making the reducer 83 work. The output shaft of the reducer 83 drives the connecting shaft 82 to rotate, thereby driving the fixed fork 3 to rotate. The fixed fork 3 drives the rotating mechanism 4 to rotate around the connecting shaft 82 as the axis. During this rotation, the hemisphere 29 rotates in the ball groove 28 and causes the clamping frame 21 to move and slide on the limiting plate 27. Under the action of gravity, the workpiece 10 is always perpendicular to the ground and changes the position of the workpiece 10 inside the vacuum processing machine.

[0056] When the second servo motor 71 is powered on, its output shaft drives the drive gear 72 to rotate, which in turn drives the outer gear ring 41 to rotate. The outer gear ring 41 drives the limiting rings 45 on both sides of the support ring 44 to rotate within the annular grooves 43 of the outer fixed ring 42, thereby limiting and supporting the support ring 44. This, in turn, drives the clamping mechanism 2 to rotate. This configuration allows for 360-degree rotation, enabling the workpiece 10 to be moved to any position. As the clamping mechanism 2 rotates to different positions, the posture of the workpiece 10 will also change. The workpiece 10 is always perpendicular to the ground due to gravity. The first drive mechanism 8 cooperates with the rotating mechanism 4. When the second drive mechanism 7 is working, the hemisphere 29 will rotate freely in the ball groove 28 of the ball seat 22, so that each surface of the workpiece 10 is within the plasma range. For example, under normal conditions, the fixed column 290 and the ball seat 22 are tilted at an angle. When the clamping mechanism 2 that holds the workpiece 10 rotates to the top of the outer fixed ring 42, the workpiece 10 will be driven by gravity to move the fixed column 290 and the hemisphere 29 and the ball groove 28 to the same axis, so that the surfaces of different positions of the workpiece 10 can be processed. It should be noted that the above process needs to be carried out slowly. Because the workpiece 10 can change angles, it also has a good processing effect on the inside of the holes of the workpiece 10.

[0057] After most of the surface treatment of workpiece 10 is completed, workpiece 10 needs to be rotated to its normal position. At this time, the third servo motor 26 of the corresponding clamping mechanism 2 receives the compiler signal, the output shaft of the third servo motor 26 rotates and drives the screw 25 to rotate, thereby driving the slide bar 24 to move within the fixed sleeve 23, so that the clamping frame 21 moves slowly toward the workpiece 10 until the workpiece 10 is between the upper U-shaped clamping plate 211 and the lower clamping plate 215. At this time, the electric cylinder 212 of the corresponding clamping mechanism 2 is energized and drives the upper U-shaped clamping plate 211 to move downward, thereby clamping one end of the workpiece 10. The clamping mechanism 2 that was originally clamped releases the workpiece 10, exposing the untreated surface. Then, the vacuum treatment machine repeats the above steps one and two to treat the surface of workpiece 10. Through the above operation, the surface treatment of workpiece 10 can be performed in one go, thus achieving automatic operation and automatic processing capabilities.

[0058] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0059] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A vacuum plasma surface treatment machine, characterized in that: The cleaning box (1) includes two fixed forks (3) that are rotatably mounted on both sides of the inner wall of the cleaning box, and a rotating mechanism (4) is fixed at one end of each of the two fixed forks (3); The rotating mechanism (4) includes an outer fixed ring (42) fixed to both sides of the fixed fork (3), a support ring (44) is rotatably provided between the two outer fixed rings (42), a clamping mechanism (2) for clamping is fixed at a corresponding position on the inner wall of the support ring (44), and a second driving mechanism (7) for driving the support ring (44) to rotate is fixed at the upper end of one of the fixed forks (3). The clamping mechanism (2) includes a fixed sleeve (23) fixed to the support ring (44), and a sliding rod (24) for fixing the ball seat (22) is slidably provided inside the fixed sleeve (23). One end of the ball seat (22) is rotatably provided with a clamping frame (21). The cleaning box (1) has an equipment compartment (6) on its side wall for fixing the first drive mechanism (8), and a door (5) for sealing is provided on one side of the opening of the cleaning box (1).

2. The vacuum plasma surface treatment machine according to claim 1, characterized in that: The clamping mechanism (2) further includes a ball groove (28) opened at one end of the ball seat (22), a hemisphere (29) is movably provided in the ball groove (28), a fixed column (290) is fixedly connected between one end of the hemisphere (29) and the clamping frame (21), and the ball groove (28) and the hemisphere (29) limit each other.

3. The vacuum plasma surface treatment machine according to claim 2, characterized in that: The clamping frame (21) has longitudinal sliding grooves (210) on both sides. The two longitudinal sliding grooves (210) are slidably provided with sliders (213) fixed to the upper U-shaped clamping plate (211). The lower end of the clamping frame (21) is fixed with a lower clamping plate (215) corresponding to the upper U-shaped clamping plate (211). The lower clamping plate (215) and the upper U-shaped clamping plate (211) clamp the workpiece (10).

4. The vacuum plasma surface treatment machine according to claim 3, characterized in that: An electric cylinder (212) is fixed between the upper end of the upper U-shaped clamp (211) and the clamping frame (21). A limiting plate (27) for positioning the clamping frame (21) is fixed at the lower end of the ball seat (22). Rubber pads (214) for anti-slip are attached and fixed on the side of the lower clamp (215) opposite to the upper U-shaped clamp (211).

5. The vacuum plasma surface treatment machine according to claim 1, characterized in that: The bottom of the inner cavity of the fixed sleeve (23) is fixed with a third servo motor (26) for driving. The output shaft of the third servo motor (26) is connected to a screw (25) through a coupling, and the screw (25) and the slide rod (24) are threaded together in the middle.

6. The vacuum plasma surface treatment machine according to claim 1, characterized in that: The rotating mechanism (4) further includes an annular groove (43) opened on one side of the two outer fixed rings (42). The annular groove (43) is rotatably provided with limiting rings (45) fixed to both sides of the support ring (44). An outer toothed ring (41) is fixed around the outer side of the support ring (44). A fixing groove (11) for accommodating the rotating mechanism (4) is opened on one side of the fixing fork (3). The inner walls of the fixing groove (11) are fixed to both sides of the two outer fixed rings (42).

7. The vacuum plasma surface treatment machine according to claim 6, characterized in that: The second drive mechanism (7) includes a second servo motor (71) fixedly connected to the surface of the fixed fork (3). The output shaft of the second servo motor (71) movably passes through the side wall of the fixed fork (3) and is fixedly connected to a drive gear (72) that meshes with the external gear ring (41).

8. The vacuum plasma surface treatment machine according to claim 1, characterized in that: The first drive mechanism (8) includes a reducer (83) fixed at the bottom of the equipment compartment (6), and a first servo motor (81) for driving is fixed on the surface of the reducer (83). The output shaft of the first servo motor (81) is fixedly connected to the input shaft of the reducer (83).

9. The vacuum plasma surface treatment machine according to claim 8, characterized in that: The two fixed forks (3) are fixed on one side of the inner wall of the cleaning box (1) and are connected to the inner wall of the cleaning box (1) by a connecting shaft (82). The connecting shaft (82) located on the side of the first servo motor (81) passes through the inner wall of the cleaning box (1) and is located in the equipment compartment (6), and is fixed to the output shaft of the reducer (83).

10. The vacuum plasma surface treatment machine according to claim 1, characterized in that: The inner cavity of the cleaning box (1) and the middle of the door (5) are provided with electrode plates (9) for generating plasma, and the two electrode plates (9) correspond to each other. The slot (13) provided on the upper end of the equipment compartment (6) of the cleaning box (1) is adapted to the buckle (12) fixed at one end of the door (5) and forms a locking assembly.

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