A method and system for purifying cabinet air leakage alarm disposal

Abstract

The application provides a kind of purified cabinet gas leakage alarm disposal method and system.The method comprises: according to the gas leakage alarm signal of purified cabinet, determine the first data related to the leaked gas and the second data related to the purified cabinet;According to the first data and the second data, generate gas leakage alarm disposal scheme, and execute.The scheme of the application can determine the most suitable gas leakage alarm disposal scheme, so as to obtain better purified cabinet gas leakage alarm disposal effect.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing technology, and more specifically, to a method, system, electronic device, and computer storage medium for handling air leakage alarms in purification cabinets. Background Technology

[0002] Semiconductor manufacturing requires process gases with very high concentrations (99.9999999%), while the gas concentrations that the plant can provide are generally 6N-7N. If the gas is supplied directly by the plant, the load on the purifier and the cost of regeneration will be huge. Using a purification cabinet can reduce such costs, and the single-unit supply can also ensure the stability and quality of gas flow.

[0003] However, purification cabinets are prone to leakage, and existing technologies for handling such leakage are not yet perfect. This invention aims to optimize them. Summary of the Invention

[0004] In order to at least solve the technical problems existing in the background art, the present invention provides a method, system, electronic device and computer storage medium for handling air leakage alarm in a purification cabinet.

[0005] The first aspect of the present invention provides a method for handling air leakage alarms in a purification cabinet, the method comprising the following steps:

[0006] The first data related to the leaking gas and the second data related to the purification cabinet are determined based on the gas leak alarm signal of the purification cabinet.

[0007] A gas leak alarm handling plan is generated based on the first data and the second data, and then executed.

[0008] In some embodiments, determining the first data of leaked gas based on the gas leak alarm signal of the purification cabinet includes:

[0009] The identification code of the purification cabinet is determined based on the gas leak alarm signal, and the gas input record of the purification cabinet is retrieved based on the identification code.

[0010] The leaked gas type code is determined based on the gas input record, and the first data is derived based on the type code.

[0011] In some embodiments, determining the type code of the leaked gas based on the gas input record includes:

[0012] The first working status data of the purification cabinet is determined based on the second data, and the first time period is determined based on the first working status data.

[0013] The gas input records are matched and calculated based on the first time period to determine the type code and quantity of the leaked gas.

[0014] In some embodiments, generating a gas leak alarm handling plan based on the first data and the second data includes:

[0015] If the type code is a single type, then the first alarm scheme and the first handling scheme are determined according to the type code;

[0016] If the type code is not a single type, then the second alarm scheme and the second handling scheme are determined according to the type code.

[0017] In some embodiments, the length of the first time period is determined based on the efficiency parameter of the purge exhaust of the purification cabinet.

[0018] In some embodiments, the second data associated with the purification cabinet may further include second operating status data of the gas-using equipment;

[0019] The step of generating a gas leak alarm handling plan based on the first data and the second data includes:

[0020] The probability of the gas-using equipment completing its operation in the second time period is evaluated based on the second working status data. The first or second handling plan is then optimized based on the probability of completion to include a gas valve shut-off sub-plan.

[0021] The timing of gas valve closure in the gas valve closure sub-scheme is determined based on the probability of task completion.

[0022] In some embodiments, evaluating the probability of the gas-using equipment completing its operation during a second time period based on the second operating status data includes:

[0023] Based on the second working status data, gas supply prediction data and the operational task attribute data of the gas-consuming equipment during the second time period are calculated.

[0024] The probability of the gas-consuming equipment completing its work in the second time period is evaluated based on the gas supply forecast data and the work task attribute data.

[0025] A second aspect of the present invention provides a purification cabinet leakage alarm and handling system, including an acquisition module, a processing module, and a storage module; the processing module is connected to the acquisition module and the storage module.

[0026] The storage module is used to store executable computer program code;

[0027] The acquisition module is used to acquire first data related to the leaked gas and second data related to the purification cabinet, and transmit them to the processing module.

[0028] The characteristic is that the processing module is configured to execute the method described in any of the preceding methods by calling the executable computer program code in the storage module.

[0029] A third aspect of the present invention also provides an electronic device, comprising: a memory storing executable program code; a processor coupled to the memory; the processor invoking the executable program code stored in the memory to perform the method as described in any of the preceding claims.

[0030] A fourth aspect of the invention provides a computer storage medium storing a computer program that, when executed by a processor, performs the method described in any of the preceding claims.

[0031] The beneficial effects of this invention are as follows:

[0032] When a gas leak is detected, this invention can send a gas leak alarm signal to the corresponding processing unit. The processing unit can determine the relevant data of the leaking gas and the purification cabinet based on the gas leak alarm signal, and determine the most suitable gas leak alarm handling plan accordingly, thereby obtaining a better gas leak alarm handling effect for the purification cabinet. Attached Figure Description

[0033] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0034] Figure 1 This is a schematic flowchart of a method for handling air leakage alarms in a purification cabinet, as disclosed in an embodiment of the present invention.

[0035] Figure 2 This is a schematic diagram of a purification cabinet leakage alarm and handling system disclosed in an embodiment of the present invention. Detailed Implementation

[0036] The exemplary embodiments of this disclosure are described below with reference to the accompanying drawings, including various details of the embodiments to aid understanding, and should be considered merely exemplary. Therefore, those skilled in the art will recognize that various changes and modifications can be made to the embodiments described herein without departing from the scope and spirit of this disclosure. Similarly, for clarity and brevity, descriptions of well-known functions and structures are omitted in the following description.

[0037] See Figure 1 As shown in the figure, an embodiment of the present invention discloses a method for handling air leakage alarms in a purification cabinet, the method comprising the following steps:

[0038] The first data related to the leaking gas and the second data related to the purification cabinet are determined based on the gas leak alarm signal of the purification cabinet.

[0039] A gas leak alarm handling plan is generated based on the first data and the second data, and then executed.

[0040] The purification cabinet is equipped with various leak detectors, such as the Honeywell MIDAS series detectors. When a leak is detected, the leak alarm signal can be sent to the corresponding processing unit. The processing unit can determine the relevant data of the leaking gas and the purification cabinet based on the leak alarm signal, and determine the most suitable leak alarm handling plan accordingly, thereby achieving a better purification cabinet leak alarm handling effect.

[0041] Among them, the leak detector can be installed on the inner wall of the purification cabinet, or at the input and output interfaces of the purification chamber of the purifier, with the latter being preferred.

[0042] In some embodiments, determining the first data of leaked gas based on the gas leak alarm signal of the purification cabinet includes:

[0043] The identification code of the purification cabinet is determined based on the gas leak alarm signal, and the gas input record of the purification cabinet is retrieved based on the identification code.

[0044] The leaked gas type code is determined based on the gas input record, and the first data is derived based on the type code.

[0045] In this embodiment, the leak detector is pre-associated with the purification cabinet in which it is located. Therefore, the identification code of the purification cabinet experiencing a leak can be determined based on the leak alarm signal. This allows for further scheduling of the gas input records for that purification cabinet during the corresponding time period, thereby determining the type code of the leaking gas. Different codes can indicate both the specific type of leaked gas and its hazard level, as well as the appropriate leak handling method.

[0046] It should be noted that, depending on actual production needs, the purification cabinet may require purification of different types of gases. In such cases, purging can be performed only after purging one type of gas. The system will record the gas type and specific time information input to each purification cabinet.

[0047] In some embodiments, determining the type code of the leaked gas based on the gas input record includes:

[0048] The first working status data of the purification cabinet is determined based on the second data, and the first time period is determined based on the first working status data.

[0049] The gas input records are matched and calculated based on the first time period to determine the type code and quantity of the leaked gas.

[0050] In this embodiment, the second data related to the purification cabinet includes the operating status of the purification cabinet, which mainly includes the purification stage and the purge and exhaust stage. If the purifier is operating in the purification stage, the purification chamber contains only a single gas, while in the purge and exhaust stage, the purification chamber contains a mixture of at least two gases. The gas here refers to the process gas itself, excluding impurity gases.

[0051] In response to the two situations mentioned above, this invention determines the first time period for tracing based on the working status data of the purifier, and then calculates the type and quantity of gas input into the purifier by matching the gas input record based on the first time period. This is beneficial for determining a more reasonable gas leak alarm handling scheme in the future.

[0052] In some embodiments, generating a gas leak alarm handling plan based on the first data and the second data includes:

[0053] If the type code is a single type, then the first alarm scheme and the first handling scheme are determined according to the type code;

[0054] If the type code is not a single type, then the second alarm scheme and the second handling scheme are determined according to the type code.

[0055] In this embodiment, when the gas input recorded in the first time period is a single gas type, such as only one gas input or multiple inputs of the same gas type in the first time period, the appropriate alarm scheme and handling scheme can be determined solely based on the specific type attribute of the gas. However, if the gas input recorded in the first time period is not a single gas type, the appropriate alarm scheme and handling scheme need to be determined based on the specific type attribute of each adjacent gas.

[0056] For example, if the gas is only an inert / rare gas, an alarm signal can be sent to a designated alarm device to control the inert / rare gas absorption pump to recover the inert / rare gas to a designated recovery bottle. If the gas contains corrosive gases in addition to inert gases, an alarm signal can be sent to a designated alarm device, and the corrosive gas absorption pump can be controlled to discharge the corrosive gases to a disposal unit, and so on. Of course, a gas separation pump can also be connected after the absorption pump to separate and reuse certain separable leaked gases. The specific disposal method can be determined based on the type of leaked gas, and this invention is not specifically limited.

[0057] The alarm can be an audible and visual alarm installed on the purification cabinet, an alarm indicator button on the monitoring interface of the monitoring terminal in the monitoring center, or even a mobile alarm device equipped by on-site personnel. This invention does not impose any specific limitations.

[0058] In some embodiments, the length of the first time period is determined based on the efficiency parameter of the purge exhaust of the purification cabinet.

[0059] In this embodiment, the purifiers equipped in the purification cabinet have different purging and exhaust efficiencies. Furthermore, the purifiers also have different efficiency parameters due to the interference characteristics of impurities in the initially input gases and the difficulty of purging and exhausting. These efficiency parameters reflect the purging and exhausting time. Based on this, the present invention determines the length of the first time period according to the purging and exhausting efficiency parameters of the purification cabinet. The length of the first time period is negatively correlated with the efficiency parameters; that is, the higher the efficiency parameter, the faster the purification cabinet will exhaust the initially input gases. At a certain level, only the subsequently input gases can be identified as leaking gases. Conversely, both initially and subsequently input gases that are adjacent in time are treated as leaking gases.

[0060] Clearly, the length of the first time period is a backward scale based on the current moment or the moment when the gas leak alarm signal is received.

[0061] In some embodiments, the second data associated with the purification cabinet may further include second operating status data of the gas-using equipment;

[0062] The step of generating a gas leak alarm handling plan based on the first data and the second data includes:

[0063] The probability of the gas-using equipment completing its operation in the second time period is evaluated based on the second working status data. The first or second handling plan is then optimized based on the probability of completion to include a gas valve shut-off sub-plan.

[0064] The timing of gas valve closure in the gas valve closure sub-scheme is determined based on the probability of task completion.

[0065] In this embodiment, the purified gas output from the purification cabinet is used by the semiconductor manufacturing equipment. If a leak occurs in the purification cabinet, the semiconductor manufacturing equipment may be at different stages of production. Therefore, this invention further analyzes the second operating status data of the semiconductor manufacturing equipment and assesses whether it can complete the current operation process within a second time period, thereby determining when to close the input and / or output gas valves of the purification cabinet.

[0066] The length of the second time period can be determined based on parameters such as the purification efficiency of the purifier, the leakage rate, and the gas pressure and flow rate of the gas supply pipeline of the gas-using equipment. Clearly, the second time period characterizes the expected duration for which the purification cabinet can stably supply gas to the semiconductor manufacturing equipment from the moment the leakage occurs.

[0067] In some embodiments, evaluating the probability of the gas-using equipment completing its operation during a second time period based on the second operating status data includes:

[0068] Based on the second working status data, gas supply prediction data and the operational task attribute data of the gas-consuming equipment during the second time period are calculated.

[0069] The probability of the gas-consuming equipment completing its work in the second time period is evaluated based on the gas supply forecast data and the work task attribute data.

[0070] In this embodiment, the job task attribute data of the semiconductor manufacturing equipment can be used to analyze the independence of the current job task. For example, if the second time period includes job tasks for different wafers, the independence of the current job task is high, that is, the impact of the current job task being interrupted is small; if the second time period includes job tasks for multiple processes of a single wafer, the independence of the current job task is low, that is, the impact of the current job task being interrupted is large.

[0071] To address the above situation, this invention calculates gas supply prediction data based on the second operating state data, specifically the performance parameters of the purification cabinet's ability to supply purified gas to the semiconductor manufacturing equipment even in the event of a gas leak. Then, it calculates the operational task attribute data of the semiconductor manufacturing equipment based on the second operating state data, which is primarily characterized by the aforementioned indexed independence. Therefore, the probability of task completion is determined based on the gas supply prediction and whether the current task can be interrupted.

[0072] Examples are given below:

[0073] Gas supply forecast data indicates that after a gas leak, the purification cabinet can only supply gas above the gas supply target until the first moment.

[0074] If the second time period includes tasks for different wafers, and the task for the current wafer can be completed in the second time period before the first time period, then the probability of task completion is high, and the gas valve closing sub-scheme is executed at a suitable time after the second time period, that is, the task of semiconductor manufacturing equipment is temporarily interrupted; if the task for the current wafer can only be completed in the third time period after the first time period, then the probability of task completion is low, and the gas valve closing sub-scheme is executed at a suitable time earlier than the first time period, that is, the task for the current wafer is abandoned.

[0075] If the second time period contains multiple processes for a single wafer, and all processes for the current wafer need to be completed by the fourth time before the first time, then the probability of completion is high, and the gas valve closing sub-scheme is executed at a suitable time after the fourth time, that is, the semiconductor manufacturing equipment's operation is temporarily interrupted; if the operation for the current wafer can only be completed by the fifth time after the first time, then the probability of completion is low, and the gas valve closing sub-scheme is executed at a suitable time earlier than the first time, that is, the operation for the current wafer is abandoned.

[0076] See Figure 2 As shown in the figure, this embodiment of the invention also discloses a purification cabinet leakage alarm and handling system, including an acquisition module, a processing module, and a storage module; the processing module is connected to the acquisition module and the storage module;

[0077] The storage module is used to store executable computer program code;

[0078] The acquisition module is used to acquire first data related to the leaked gas and second data related to the purification cabinet, and transmit them to the processing module.

[0079] The characteristic feature is that the processing module is used to execute the method described in the foregoing embodiments by calling the executable computer program code in the storage module.

[0080] This invention also discloses an electronic device, comprising: a memory storing executable program code; a processor coupled to the memory; the processor calling the executable program code stored in the memory to execute the method described in the foregoing embodiments.

[0081] This invention also discloses a computer storage medium storing a computer program, which is executed by a processor to perform the methods described in the foregoing embodiments.

[0082] This invention also discloses a computer program product that executes the methods described in the foregoing embodiments when it is run.

[0083] Various embodiments of the systems and techniques described above herein can be implemented in digital electronic circuit systems, integrated circuit systems, field-programmable gate arrays (FPGAs), application-specific integrated circuits (ASICs), application-specific standard products (ASSPs), systems-on-a-chip (SoCs), complex programmable logic devices (CPLDs), computer hardware, firmware, software, and / or combinations thereof. These various embodiments may include implementations in one or more computer programs that can be executed and / or interpreted on a programmable system including at least one programmable processor, which may be a dedicated or general-purpose programmable processor, capable of receiving data and instructions from a storage system, at least one input device, and at least one output device, and transmitting data and instructions to the storage system, the at least one input device, and the at least one output device.

[0084] The program code used to implement the methods of this disclosure may be written in any combination of one or more programming languages. This program code may be provided to a processor or controller of a general-purpose computer, special-purpose computer, or other programmable data processing apparatus, such that when executed by the processor or controller, the program code causes the functions / operations specified in the flowcharts and / or block diagrams to be implemented. The program code may be executed entirely on a machine, partially on a machine, as a standalone software package partially on a machine and partially on a remote machine, or entirely on a remote machine or server.

[0085] In the context of this disclosure, a machine-readable medium can be a tangible medium that may contain or store a program for use by or in conjunction with an instruction execution system, apparatus, or device. A machine-readable medium can be a machine-readable signal medium or a machine-readable storage medium. A machine-readable medium can be, but is not limited to, electronic, magnetic, optical, electromagnetic, infrared, or semiconductor systems, apparatus, or devices, or any suitable combination of the foregoing. More specific examples of machine-readable storage media include electrical connections based on one or more wires, portable computer disks, hard disks, random access memory (RAM), read-only memory (ROM), erasable programmable read-only memory (EPROM or flash memory), optical fiber, portable compact disk read-only memory (CD-ROM), optical storage devices, magnetic storage devices, or any suitable combination of the foregoing.

[0086] To provide interaction with a user, the systems and techniques described herein can be implemented on a computer having: a display device for displaying information to the user (e.g., a CRT (cathode ray tube) or LCD (liquid crystal display) monitor); and a keyboard and pointing device (e.g., a mouse or trackball) through which the user provides input to the computer. Other types of devices can also be used to provide interaction with the user; for example, feedback provided to the user can be any form of sensory feedback (e.g., visual feedback, auditory feedback, or tactile feedback); and input from the user can be received in any form (including sound input, voice input, or tactile input).

[0087] The systems and technologies described herein can be implemented in computing systems that include backend components (e.g., as a data server), or computing systems that include middleware components (e.g., an application server), or computing systems that include frontend components (e.g., a user computer with a graphical user interface or web browser through which a user can interact with embodiments of the systems and technologies described herein), or any combination of such backend, middleware, or frontend components. The components of the system can be interconnected via digital data communication of any form or medium (e.g., a communication network). Examples of communication networks include local area networks (LANs), wide area networks (WANs), and the Internet.

[0088] Computer systems can include clients and servers. Clients and servers are generally located far apart and typically interact via communication networks. Client-server relationships are created by computer programs running on the respective computers and having a client-server relationship with each other. Servers can be cloud servers, servers in distributed systems, or servers incorporating blockchain technology.

[0089] It should be understood that the various forms of processes shown above can be used to rearrange, add, or delete steps. For example, the steps described in this disclosure can be executed in parallel, sequentially, or in different orders, as long as the desired result of the technical solution disclosed in this disclosure can be achieved, and this is not limited herein.

[0090] The specific embodiments described above do not constitute a limitation on the scope of protection of this disclosure. Those skilled in the art should understand that various modifications, combinations, sub-combinations, and substitutions can be made according to design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this disclosure should be included within the scope of protection of this disclosure.

Claims

1. A method for purifying cabinet gas leakage alarm disposal, characterized in that, The method comprises the following steps: determining first data related to the leaked gas and second data related to the purification cabinet according to the gas leakage alarm signal of the purification cabinet; generating a gas leakage alarm disposal scheme according to the first data and the second data, and executing the scheme; the first data related to the leaked gas is determined according to the gas leakage alarm signal of the purification cabinet, comprising: determining the identity code of the purification cabinet according to the gas leakage alarm signal, and calling the gas input record of the purification cabinet according to the identity code; determining the type code of the leaked gas according to the gas input record, and obtaining the first data according to the type code; the first data includes the specific type of the leaked gas, the danger of the leaked gas, and the appropriate leakage disposal method; the determination of the type code of the leaked gas according to the gas input record comprises: determining the first working state data of the purification cabinet according to the second data, and determining the first time period according to the first working state data; the working state mainly includes the purification stage and the purging and exhausting stage, and only a single gas is contained in the purification cavity in the purification stage, and a mixed gas composed of at least two gases is contained in the purification cavity in the purging and exhausting stage; matching and calculating the gas input record according to the first time period to determine the type code and the type number of the leaked gas; the length of the first time period is determined according to the efficiency parameter of the purging and exhausting of the purification cabinet; the generation of the gas leakage alarm disposal scheme according to the first data and the second data comprises: if the type code is single, determining the first alarm scheme and the first disposal scheme according to the type code; if the type code is not single, determining the second alarm scheme and the second disposal scheme according to the type code; the second data related to the purification cabinet further comprises the second working state data of the gas-using equipment; the generation of the gas leakage alarm disposal scheme according to the first data and the second data further comprises: evaluating the operation completion probability of the gas-using equipment in the second time period according to the second working state data, and optimizing the first disposal scheme or the second disposal scheme according to the operation completion probability, so that it contains a gas valve closing sub-scheme; wherein the gas valve closing time of the gas valve closing sub-scheme is determined according to the operation completion probability; the evaluation of the operation completion probability of the gas-using equipment in the second time period according to the second working state data comprises: calculating the gas supply prediction data and the operation task attribute data of the gas-using equipment in the second time period according to the second working state data; evaluating the operation completion probability of the gas-using equipment in the second time period according to the gas supply prediction data and the operation task attribute data.

2. The method of claim 1, wherein the method further comprises: The length of the first time period is determined according to the efficiency parameter of the purging and exhausting of the purification cabinet.

3. A gas leakage alarm disposal system for a purification cabinet, comprising an acquisition module, a processing module and a storage module; the processing module is connected with the acquisition module and the storage module; the storage module is used for storing executable computer program codes; The acquisition module is configured to acquire first data related to the leaked gas and second data related to the purification cabinet, and transmit the first data and the second data to the processing module. characterized in that The processing module is configured to execute the method according to any one of claims 1-2 by calling the executable computer program code in the storage module.

4. An electronic device comprising: A memory storing executable program code; A processor coupled with the memory; wherein the processor calls the executable program code stored in the memory to execute the method according to any one of claims 1-2.

5. A computer storage medium having stored thereon a computer program, characterized in that: The computer program, when executed by the processor, performs the method according to any one of claims 1-2.

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