Workpiece support device for single crystal silicon rod cutting operation

Abstract

A workpiece support device for single crystal silicon rod cutting operation is provided with a workpiece support mechanism, a waste material support mechanism and a horizontal base. The workpiece support mechanism comprises several groups of workpiece supports arranged along the axial direction of the workpiece, and a V-shaped seat and a V-shaped seat height adjustment assembly are arranged on each group of workpiece supports. The waste material support mechanism is installed on the horizontal base of the frontmost group of workpiece supports, and is provided with a support assembly and a position adjustment assembly. The support assembly comprises a first support plate and a second support plate, wherein the lower end of the first support plate is hingedly assembled with the workpiece support, the upper end of the first support plate is hingedly assembled with the position adjustment assembly, and the second support plate is fixedly installed on the first support plate. The second support plate is provided with a V-shaped groove matched with the conical structure of the front end of the workpiece. The application avoids the problem of workpiece edge collapse caused by the broken and fallen waste material under the condition that the waste material is not completely cut, and achieves the purpose of reducing the waste rate and production cost.

Description

TECHNICAL FIELD

[0001] The present application relates to a kind of support devices, especially a workpiece support device for single crystal silicon rod cutting operation. BACKGROUND

[0002] In the processing of quartz crystal, wafer cutting is one of the key control processes, and the single crystal silicon raw material needs to be profiled before wafer cutting to form a given angle of circular cross section long rod. As shown in one of the single crystal silicon long rods 1, the front end is a tapered structure 1-1, according to the process requirements of wafer production, the single crystal silicon long rod 1 needs to be cut into several round rods, and the tapered structure 1-1 at the front end is removed as waste. Figure 1

[0003] Since single crystal silicon is a brittle and hard material, if the tapered structure 1-1 at the front end cannot be reliably supported during cutting of the above single crystal silicon long rod 1, the waste will be broken off under its own gravity before being completely cut, which can easily cause the workpiece to collapse, resulting in an increase in scrap rate and a significant reduction in raw material utilization, thereby increasing production costs. To solve this problem, the workpiece support device needs to be optimized. SUMMARY

[0004] The present application provides a workpiece support device for single crystal silicon rod cutting operation, which aims to provide reliable support for round long rod workpieces with tapered structure at the front end to avoid the problem of workpiece collapse caused by the waste being broken off before being completely cut, thereby reducing the scrap rate and production cost.

[0005] To achieve the above purpose, the present application adopts the following technical solutions:

[0006] A workpiece support device for single crystal silicon rod cutting operation is provided, which comprises a workpiece support mechanism, a waste support mechanism and a horizontal base. The workpiece support mechanism comprises a plurality of groups of workpiece supports arranged along the axial direction of the workpiece, which are fixed on the workbench through the horizontal base. A V-shaped seat and a V-shaped seat height adjustment assembly are provided on each group of workpiece supports. The waste support mechanism is installed on the horizontal base of the frontmost group of workpiece supports, and comprises a support assembly and a position adjustment assembly. The support assembly comprises a first support plate and a second support plate, wherein the lower end of the first support plate is hingedly assembled with the workpiece support, the upper end of the first support plate is hingedly assembled with the position adjustment assembly, and the second support plate is fixedly installed on the first support plate. The second support plate is provided with a V-shaped slot matched with the tapered structure at the front end of the workpiece.

[0007] ​The workpiece support device for single crystal silicon rod cutting operation, in the waste material cutting support mechanism, the position adjusting assembly comprises an adjusting rod, an adjusting block and a hinged seat; the adjusting rod is provided with external threads, and the lower end of the adjusting rod is assembled with the horizontal base through the hinged seat; the adjusting block is provided with a threaded hole matched with the adjusting rod, and the adjusting rod and the adjusting block are assembled to form a screw nut transmission unit, and a first support plate upper end hinged shaft is arranged on the side wall of the adjusting block.

[0008] The workpiece support device for single crystal silicon rod cutting operation, a bearing is arranged at the assembly position of the lower end of the adjusting rod and the hinged seat.

[0009] The workpiece support device for single crystal silicon rod cutting operation, an adjusting rod rotation driving handle is arranged at the upper end of the adjusting rod.

[0010] The workpiece support device for single crystal silicon rod cutting operation, the second support plate is perpendicular to the first support plate.

[0011] The workpiece support device for single crystal silicon rod cutting operation, in the workpiece support mechanism, the V-shaped seat height adjusting assembly comprises a horizontal adjusting screw rod, a lifting frame and a lifting frame assembly seat; the lifting frame is composed of two parts arranged symmetrically left and right, and an upper connecting rod and a lower connecting rod are arranged in each part of the lifting frame, one end of the upper connecting rod and the lower connecting rod is hingedly assembled through a pin shaft, the other end of the upper connecting rod is hingedly assembled with the V-shaped seat, and the other end of the lower connecting rod is hingedly assembled with the lifting frame assembly seat; the horizontal adjusting screw rod is provided with external threads in opposite directions at both ends, and the horizontal adjusting screw rod is arranged in the two threaded holes in opposite directions; the lifting frame assembly seat is fixed on the horizontal base.

[0012] The workpiece support device for single crystal silicon rod cutting operation, semicircular toothed plates are arranged at the assembly end of the upper connecting rod and the V-shaped seat and the assembly end of the lower connecting rod and the lifting frame assembly seat, the tooth types of the two groups of upper connecting rod semicircular toothed plates in the left and right two parts of the lifting frame are meshed with each other, and the tooth types of the two groups of lower connecting rod semicircular toothed plates are meshed with each other.

[0013] The workpiece support device for single crystal silicon rod cutting operation, a horizontal adjusting screw rod rotation driving handle is arranged at one end of the horizontal adjusting screw rod.

[0014] The application provides a workpiece support device for single crystal silicon rod cutting operation, which can provide reliable support for a round long rod workpiece with a tapered structure at the front end through cooperation of a workpiece support mechanism and a waste material support mechanism to be cut, thereby avoiding the workpiece edge collapse problem caused by the tapered structure waste material not being completely cut and falling off, and achieving the purpose of reducing the waste rate and production cost. The application can also quickly adjust the height position of the workpiece through a V-shaped seat height adjustment assembly, and quickly adjust the spatial posture and position of the V-shaped groove on the second support plate through the position adjustment assembly of the waste material support mechanism to be cut, so that workpieces of different sizes can match the operation range of the cutting equipment, thereby improving the universal performance of the workpiece support device for single crystal silicon rod cutting operation. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 is a schematic view of a round long rod workpiece structure to be cut with a tapered structure at the front end;

[0016] Figure 2 is a schematic view of the application cooperating with the workpiece structure;

[0017] Figure 3 is a schematic view of the main structure of the application;

[0018] Figure 4 is the A view of Figure 3 ;

[0019] Figure 5 is a schematic view of the V-shaped seat height adjustment assembly in the workpiece support mechanism;

[0020] Figure 6 is the B view of Figure 5 ;

[0021] Figure 7 is a schematic view of the waste material support mechanism to be cut;

[0022] Figure 8 is the C view of Figure 7 .

[0023] Explanation of the reference numerals in the drawings:

[0024] 1 is a single crystal silicon long rod (workpiece), and 1-1 is a tapered structure;

[0025] 2 is a workpiece support mechanism, 2-1 is a V-shaped seat, 2-2 is a V-shaped seat height adjustment assembly, 2-2-1 is an upper connecting rod, 2-2-2 is a lower connecting rod, 2-2-3 is a lifting frame assembly seat, 2-2-4 is a horizontal adjustment screw rod rotary drive handle, 2-2-5 is a horizontal adjustment screw rod, and 2-2-6 is a semicircular tooth plate;

[0026] 3 is a waste material support mechanism to be cut off, 3-1 is a first support plate, 3-2 is a second support plate, 3-2-1 is a V-shaped slot, 3-3 is an adjusting rod rotation driving handle, 3-4 is an adjusting rod, 3-5 is an adjusting block, 3-6 is a first support plate upper end hinged shaft, 3-7 is a hinged seat, 3-8 is a bearing;

[0027] 4 is a horizontal base. DETAILED DESCRIPTION

[0028] The application will be further described below in conjunction with the drawings and specific embodiments.

[0029] Referring to Fig. 1, a single crystal silicon long rod 1 raw material for wafer cutting, the front end of which is a tapered structure 1-1, needs to be cut into several segments of round rods according to the process requirements of wafer production, and the tapered structure 1-1 at the front end is removed after cutting as waste.

[0030] Referring to Figure 2 , Figure 3 , Figure 4 , in the process of cutting off the waste material of the tapered structure 1-1 of the single crystal silicon long rod 1, in order to avoid the problem of workpiece edge collapse caused by the broken and fallen waste material when it is not completely cut off, the application provides a workpiece support device for cutting off the single crystal silicon rod material, which is provided with a workpiece support mechanism 2, a waste material support mechanism 3 to be cut off and a horizontal base 4; wherein the workpiece support mechanism 2 includes several groups of workpiece supports arranged along the axial direction of the workpiece, which are all fixed on the workbench through the horizontal base 5, the number of workpiece supports is determined according to the number of segments to be cut, a V-shaped seat 2-1 and a V-shaped seat height adjusting assembly 2-2 are arranged on each group of workpiece supports, the V-shaped seat 2-1 provides radial positioning and support for the round rod type workpiece, and the V-shaped seat height adjusting assembly 2-2 is used to adjust the height position of the workpiece; the waste material support mechanism 3 to be cut off is installed on the horizontal base 4 of the first group of workpiece supports.

[0031] Referring to Figure 3 , Figure 4 , Figure 5 , Figure 6The workpiece support device for single crystal silicon rod cutting operation has the following advantages: the V-shaped seat height adjusting assembly 2-2 of each group of workpiece supports in the workpiece support mechanism 2 comprises a horizontal adjusting screw 2-2-5, a lifting frame and a lifting frame assembly seat 2-2-3; the lifting frame is composed of two parts arranged symmetrically left and right, and an upper connecting rod 2-2-1 and a lower connecting rod 2-2-2 are arranged in each part; one end of the upper connecting rod 2-2-1 and the lower connecting rod 2-2-2 is hingedly assembled, the other end of the upper connecting rod 2-2-1 is hingedly assembled with the V-shaped seat 2-1, and the other end of the lower connecting rod 2-2-2 is hingedly assembled with the lifting frame assembly seat 2-2-3 fixed on the horizontal base 4; the horizontal adjusting screw 2-2-5 is provided with external threads in opposite directions at both ends, and the lifting frame assembly seat 2-2-3 is provided with screw holes in opposite directions at the hingedly assembled pin shafts of the upper connecting rod 2-2-1 and the lower connecting rod 2-2-2 of the left and right parts of the lifting frame; the horizontal adjusting screw 2-2-5 is fitted in the two screw holes in opposite directions, and a horizontal adjusting screw rotating drive handle 2-2-4 is arranged at one end of the horizontal adjusting screw 2-2-5.

[0032] Still referring to Figure 3 、 Figure 4 、 Figure 5 、 Figure 6 In the preferred embodiment of the workpiece support device for single crystal silicon rod cutting operation, the assembly end of the upper connecting rod 2-2-1 and the V-shaped seat 2-1, and the assembly end of the lower connecting rod 2-2-2 and the lifting frame assembly seat 2-2-3 are provided with semicircular tooth plates 2-2-6; the teeth of the semicircular tooth plates 2-2-6 of the two groups of upper connecting rods 2-2-1 in the left and right parts of the lifting frame are meshed with each other; and the teeth of the semicircular tooth plates 2-2-6 of the two groups of lower connecting rods 2-2-2 are meshed with each other.

[0033] Referring to Figure 3 、 Figure 4 、 Figure 7 、 Figure 8 The workpiece support device for single crystal silicon rod cutting operation has the following advantages: the workpiece support device for single crystal silicon rod cutting operation has the following advantages: the V-shaped seat height adjusting assembly 2-2 of each group of workpiece supports in the workpiece support mechanism 2 comprises a horizontal adjusting screw 2-2-5, a lifting frame and a lifting frame assembly seat 2-2-3; the lifting frame is composed of two parts arranged symmetrically left and right, and an upper connecting rod 2-2-1 and a lower connecting rod 2-2-2 are arranged in each part; one end of the upper connecting rod 2-2-1 and the lower connecting rod 2-2-2 is hingedly assembled, the other end of the upper connecting rod 2-2-1 is hingedly assembled with the V-shaped seat 2-1, and the other end of the lower connecting rod 2-2-2 is hingedly assembled with the lifting frame assembly seat 2-2-3 fixed on the horizontal base 4; the horizontal adjusting screw 2-2-5 is provided with external threads in opposite directions at both ends, and the lifting frame assembly seat 2-2-3 is provided with screw holes in opposite directions at the hingedly assembled pin shafts of the upper connecting rod 2-2-1 and the lower connecting rod 2-2-2 of the left and right parts of the lifting frame; the horizontal adjusting screw 2-2-5 is fitted in the two screw holes in opposite directions, and a horizontal adjusting screw rotating drive handle 2-2-4 is arranged at one end of the horizontal adjusting screw 2-2-5.

[0034] Referring to Figures 2 to 8The workpiece support device for single crystal silicon rod cutting operation provided by the application, when the single crystal silicon long rod 1 raw material cutting operation is performed, first, the workpiece is placed on the V-shaped seat 2-1 of the workpiece support mechanism 2 through the transfer equipment; then, according to the workpiece size parameters and the operation range of the cutting equipment, the installation height of the workpiece is determined, and then the height of the V-shaped seat 2-1 is adjusted through the V-shaped seat height adjusting assembly, and the specific steps of the V-shaped seat 2-1 height adjustment are as follows: the horizontal adjusting screw rod rotating drive handle 2-2-4 is operated, the horizontal adjusting screw rod 2-2-5 is controlled to rotate, the two parts of the left-right symmetrical arrangement of the lifting frame are driven to move towards each other or away from each other, at the same time, the included angle of the hinged assembled upper connecting rod 2-2-1 and the lower connecting rod 2-2-2 is increased or decreased, the lifting movement of the V-shaped seat 2-1 assembled with the left and right two groups of upper connecting rods 2-2-1 is realized, in the process, the teeth of the semicircular toothed plates 2-2-6 of the two groups of upper connecting rods 2-2-1 in the left and right two parts of the lifting frame are meshed with each other, the teeth of the semicircular toothed plates 2-2-6 of the two groups of lower connecting rods 2-2-2 are meshed with each other, thereby ensuring the balance stability of the left and right two parts of the lifting frame in the lifting process; the spatial position and posture of the first support plate 3-1 and the second support plate 3-2 are adjusted through the position adjusting assembly in the waste material support mechanism 3, so that the V-shaped groove 3-2-1 on the second support plate 3-2 is attached to the conical structure 1-1 at the front end of the workpiece; the cutting equipment is started, and the conical structure 1-1 at the front end of the workpiece is cut off.

Claims

1. A workpiece support apparatus for a single crystal silicon rod cutting operation, characterized by: It is provided with workpiece support mechanism (2), the support mechanism of waste material to be cut off (3) and horizontal base (4); The workpiece support mechanism (2) includes several groups of workpiece supports arranged along the workpiece axial direction, which are all fixed on the workbench through the horizontal base (4), and V-shaped seat (2-1) and V-shaped seat height adjustment assembly (2-2) are arranged on each group of workpiece supports; The support mechanism of waste material to be cut off (3) is installed on the horizontal base (4) of the first group of workpiece supports, and is provided with a support assembly and a position adjustment assembly, the support assembly includes a first support plate (3-1) and a second support plate (3-2), wherein the lower end of the first support plate (3-1) is hingedly assembled with the workpiece support, the upper end of the first support plate (3-1) is hingedly assembled with the position adjustment assembly, the second support plate (3-2) is fixedly installed on the first support plate (3-1), and the second support plate (3-2) is provided with a V-shaped slot (3-2-1) matched with the tapered structure (1-1) at the front end of the workpiece; In the support mechanism of waste material to be cut off (3), the position adjustment assembly includes an adjusting rod (3-4), an adjusting block (3-5) and a hinged seat (3-7); The adjusting rod (3-4) is provided with external threads, and the lower end of the adjusting rod is assembled with the horizontal base (4) through the hinged seat (3-7); The adjusting block (3-5) is provided with a threaded hole matched with the adjusting rod (3-4), and the adjusting rod (3-4) and the adjusting block (3-5) are assembled to form a screw nut transmission unit, and a first support plate upper end hinge shaft (3-6) is arranged on the side wall of the adjusting block (3-5); An adjusting rod rotation driving handle (3-3) is arranged at the upper end of the adjusting rod (3-4); The second support plate (3-2) is perpendicular to the first support plate (3-1).

2. The work support apparatus for single crystal silicon rod cutting operation according to claim 1, characterized by: A bearing (3-8) is arranged at the assembly position of the lower end of the adjusting rod (3-4) and the hinged seat (3-7).

3. The work support apparatus for single crystal silicon rod cutting operation according to claim 1 or 2, characterized by: In the workpiece support mechanism (2), the V-shaped seat height adjustment assembly (2-2) includes a horizontal adjusting screw rod (2-2-5), a lifting frame and a lifting frame assembly seat (2-2-3); The lifting frame is composed of two parts arranged symmetrically left and right, and an upper connecting rod (2-2-1) and a lower connecting rod (2-2-2) are arranged in each part, one end of the upper connecting rod (2-2-1) and the lower connecting rod (2-2-2) is hingedly assembled, the other end of the upper connecting rod (2-2-1) is hingedly assembled with the V-shaped seat (2-1), and the other end of the lower connecting rod (2-2-2) is hingedly assembled with the lifting frame assembly seat (2-2-3); The horizontal adjusting screw rod (2-2-5) is provided with external threads in opposite directions at both ends, and the horizontal adjusting screw rod (2-2-5) is arranged in the two threaded holes in opposite directions; The lifting frame assembly seat (2-2-3) is fixed on the horizontal base (4).

4. The work support apparatus for single crystal silicon rod cutting operation according to claim 3, characterized by: Half-round toothed plates (2-2-6) are arranged at the assembly end of the upper connecting rod (2-2-1) and the V-shaped seat (2-1) and the assembly end of the lower connecting rod (2-2-2) and the lifting frame assembly seat (2-2-3), the tooth types of the half-round toothed plates (2-2-6) of the two groups of upper connecting rods (2-2-1) in the left and right two parts of the lifting frame are engaged with each other, and the tooth types of the half-round toothed plates (2-2-6) of the two groups of lower connecting rods (2-2-2) are engaged with each other.

5. The work support apparatus for single crystal silicon rod cutting operation according to claim 4, characterized by: A horizontal adjustment screw rotating driving handle (2-2-4) is arranged at one end of the horizontal adjustment screw (2-2-5).

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