Laser scribing device and solar cell processing apparatus

Abstract

The application relates to the technical field of solar cell manufacturing, in particular to a laser scribing device and a solar cell processing equipment. The laser scribing device comprises a base, a rotating base, an arc-shaped sliding rail, a driving device and a laser light splitting module. The base is provided with the arc-shaped sliding rail and the driving device. The upper end surface of the rotating base is provided with the laser light splitting module, the laser light splitting module comprises a plurality of laser beam outlets; the lower end surface of the rotating base is provided with a sliding block, the sliding block is in sliding connection with the arc-shaped sliding rail; and the lower end surface of the rotating base is in driving connection with the driving shaft of the driving device, so that the driving device can drive the rotating base to rotate along the plane where the X axis and the Y axis are located. The laser scribing device can change the line spacing of the laser beam on the solar cell piece, thereby improving the flexible applicability of the laser scribing device, making it applicable to scribing of different laser process patterns; the operation efficiency is improved, and the cost is saved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of solar cell manufacturing, and in particular to a laser scribing device and a solar cell processing equipment. BACKGROUND

[0002] With the development of economy and the progress of science and technology, new energy technology is developing continuously. Solar cells, as one of the products of new energy technology, are favored by people. In the processing of solar cells, the surface of the solar cells needs to be scribed by laser multiple times. At present, the laser scribing process of solar cells has multiple parameter specifications, and higher requirements are put forward for the flexibility and efficiency of laser scribing equipment processing. Although the laser scribing device and multiple laser heads are provided in the laser scribing equipment in the prior art, the line spacing between the laser beams emitted by adjacent laser heads cannot be accurately adjusted, which reduces the flexibility of the use of the laser scribing equipment. When dealing with different laser line spacing scribing processes, the operator needs to redraw the laser pattern and manually adjust the laser parameters, thereby reducing the work efficiency and being not conducive to batch production.

[0003] Therefore, it is urgent to design a laser scribing device and a solar cell processing equipment to solve the above technical problems. SUMMARY

[0004] The first object of the present application is to provide a laser scribing device which can adjust the line spacing between laser beams, improve the flexible applicability of the laser scribing device, and improve the work efficiency.

[0005] To achieve this object, the present application adopts the following technical solutions:

[0006] The present application provides a laser scribing device, comprising:

[0007] a base, wherein an arc-shaped sliding rail and a driving device are arranged on the base;

[0008] a rotating base, wherein a laser light splitting module is arranged on the upper end surface of the rotating base, the laser light splitting module comprises multiple laser beam outlets; a sliding block is arranged on the lower end surface of the rotating base, the sliding block is in sliding connection with the arc-shaped sliding rail; and the lower end surface of the rotating base is in driving connection with the driving shaft of the driving device, so that the driving device can drive the rotating base to rotate in the plane where the X axis and the Y axis are located.

[0009] As an optional technical solution of the laser scribing device, the driving device further comprises a driving shaft, a fixed shaft and a grounding plate, the fixed shaft and the driving shaft are coaxially arranged, and the driving shaft is in clearance fit with the fixed shaft, so that the driving shaft can drive the rotating base to rotate; the fixed shaft is fixedly connected with the base through the grounding plate.

[0010] As an optional technical scheme of the laser scribing device, the laser scribing device comprises a fixing member, the fixing member is arranged between the rotating base and the driving shaft.

[0011] As an optional technical scheme of the laser scribing device, the arc-shaped slide rail is arranged as at least two, the at least two arc-shaped slide rails are arranged to jointly form a circular rotating area, and the driving device is coaxially arranged with the circular rotating area.

[0012] As an optional technical scheme of the laser scribing device, the base is provided with a first supporting member on the end face close to the rotating base, and the arc-shaped slide rail is arranged on the first supporting member.

[0013] As an optional technical scheme of the laser scribing device, the base is provided with a first through hole, the rotating base is provided with a second through hole, the first through hole and the second through hole are coaxially arranged, and the laser beam can pass through the first through hole and the second through hole in sequence after being reflected by the first reflection assembly and then enter the laser beam splitting module for splitting.

[0014] As an optional technical scheme of the laser scribing device, the laser beam splitting module comprises a first reflection unit, a laser beam splitting unit and a second reflection unit, a plurality of laser beam outlets are arranged on the second reflection unit; the laser beam passing through the second through hole is reflected by the first reflection unit, then passes through the laser beam splitting unit and the second reflection unit in sequence, and is emitted from the laser beam outlet.

[0015] As an optional technical scheme of the laser scribing device, the first reflection unit comprises a second reflection assembly, a third reflection assembly, a first light splitting assembly, a fourth reflection assembly and a fifth reflection assembly, the second reflection assembly is arranged at the second through hole, the second reflection assembly is used for reflecting the laser beam on the third reflection assembly and transmitting the laser beam to the first light splitting assembly; the first light splitting assembly is used for splitting the laser beam to the fourth reflection assembly, the fourth reflection assembly reflects the laser beam to the fifth reflection assembly, and the fifth reflection assembly can reflect the laser beam to the laser beam splitting unit.

[0016] As an optional technical scheme of the laser scribing device, the first reflection unit further comprises a third reflection assembly, the third reflection assembly is arranged between the second reflection assembly and the first light splitting assembly along the Z-axis direction, and the height of the third reflection assembly is higher than the height of the second reflection assembly.

[0017] As an optional technical scheme of the laser scribing device, the laser beam splitting unit comprises a second light splitting assembly, the second light splitting assembly is arranged as multiple layers, and adjacent two layers of the second light splitting assembly are arranged in a staggered manner along the Z-axis direction.

[0018] The fourth reflection assembly and the fifth reflection assembly are correspondingly arranged in multiple layers, and the fifth reflection assembly is correspondingly arranged with the second light splitting assembly, so that the fifth reflection assembly of each layer can reflect the laser beam to the second light splitting assembly of each layer.

[0019] As an optional technical solution of the laser scribing device, the laser light splitting module comprises a second support, which is arranged between adjacent two layers of the second light splitting assembly.

[0020] As an optional technical solution of the laser scribing device, the second reflection unit comprises a sixth reflection assembly, which is arranged in multiple layers, and adjacent two layers of the sixth reflection assembly are arranged in a staggered manner along the Z-axis direction, and the sixth reflection assembly is correspondingly arranged with the second light splitting assembly, so that the sixth reflection assembly of each layer can receive the laser beam split by the second light splitting assembly of each layer.

[0021] As an optional technical solution of the laser scribing device, the laser scribing device further comprises a focusing assembly arranged on the upper end surface of the rotating base, and the focusing assembly is used for adjusting the focal length of the laser beam emitted by the laser beam outlet.

[0022] As an optional technical solution of the laser scribing device, the focusing assembly comprises a focusing plate and a motor, the motor is arranged on the upper end surface of the rotating base, the motor is drivingly connected with the focusing plate, the laser beam outlet is opened on the focusing plate, and a lens is arranged in the laser beam outlet.

[0023] As an optional technical solution of the laser scribing device, the driving device is connected with a live wire, a zero wire and a ground wire.

[0024] The second object of the present application is to provide a solar cell processing equipment, which improves the processing efficiency of the solar cell processing equipment, improves the universality of the solar cell processing equipment, and makes it applicable to various laser processing processes, so as to save costs.

[0025] To achieve this object, the present application adopts the following technical solutions:

[0026] The present application provides a solar cell processing equipment, which comprises the above-mentioned laser scribing device.

[0027] The beneficial effects of the present application at least include:

[0028] The application provides a laser scribing device, which comprises a base, a rotating base, an arc-shaped sliding rail, a driving device and a laser light splitting module. The base is provided with the arc-shaped sliding rail and the driving device. The upper end surface of the rotating base is provided with the laser light splitting module, which comprises a plurality of laser beam outlets. The lower end surface of the rotating base is provided with a sliding block, which is in sliding connection with the arc-shaped sliding rail. The lower end surface of the rotating base is in driving connection with the driving shaft of the driving device, so that the driving device can drive the rotating base to rotate in the plane along the X axis and the Y axis. In the application, the base, the rotating base, the arc-shaped sliding rail, the driving device and the laser light splitting module are arranged, so that the driving device drives the rotating base to rotate in the plane along the X axis and the Y axis, thereby changing the line spacing of the laser beam on the solar cell, improving the flexible applicability of the laser scribing device, and making it applicable to scribing of different laser process patterns. Meanwhile, the operator only needs to drive the rotating base to rotate by the driving device, so as to realize adjustment of the line spacing of the plurality of laser beams at the same time, without the operator in the traditional technology to re-draw the laser pattern and manually adjust the laser parameters and the laser head and other complex and tedious steps, thereby improving the work efficiency and saving the cost.

[0029] The application also provides a solar cell processing equipment comprising the above laser scribing device. Since the laser scribing device can adjust the line spacing of the laser beam on the scribed solar cell, the processing efficiency of the solar cell processing equipment is improved, the universality of the solar cell processing equipment is improved, it can be applied to various laser processing processes, and the cost is saved. BRIEF DESCRIPTION OF DRAWINGS

[0030] In order to more clearly illustrate the technical solutions in the embodiments of the application, the drawings needed to be used in the description of the embodiments of the application will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the application, and other drawings can be obtained by those skilled in the art without creative labor on the basis of the contents of the embodiments of the application and the drawings.

[0031] Figure 1 The structural schematic diagram of the laser scribing device provided by the embodiments of the application;

[0032] Figure 2 The structural schematic diagram of the laser scribing device provided by the embodiments of the application from another perspective;

[0033] Figure 3 The principle diagram of the laser scribing device provided by the embodiments of the application for adjusting the line spacing of the laser beam;

[0034] Figure 4A structure schematic view of the rotating base, the laser light splitting module and the focusing assembly provided by the embodiment of the present application.

[0035] Figure 5 A structure schematic view of the rotating base, the laser light splitting module and the focusing assembly provided by the embodiment of the present application from another perspective.

[0036] Reference numerals

[0037] 10, laser beam;

[0038] 100, base; 110, arc-shaped sliding rail; 120, driving device; 1201, driving shaft; 1202, fixed shaft; 1203, grounding plate; 1204, firewire; 1205, zero line; 1206, ground wire; 130, fixing piece; 140, first supporting piece;

[0039] 200, rotating base; 210, sliding block; 220, first reflecting assembly; 230, second through hole;

[0040] 300, laser light splitting module; 310, first reflecting unit; 3101, second reflecting assembly; 3102, third reflecting assembly; 3103, first light splitting assembly; 3104, fourth reflecting assembly; 3105, fifth reflecting assembly; 320, laser light splitting unit; 3201, second light splitting assembly; 3202, second supporting piece; 3203, supporting plate; 330, second reflecting unit; 3301, sixth reflecting assembly;

[0041] 400, focusing assembly; 410, focusing plate; 4101, laser beam outlet; 420, motor. DETAILED DESCRIPTION

[0042] In order to make the technical problems solved by the present application, the technical solutions adopted and the technical effects achieved more clear, the technical solutions of the present application will be further described below with reference to the drawings and through specific embodiments.

[0043] In the description of the present application, unless otherwise explicitly specified and limited, the terms "connected", "connected", "fixed" should be understood in a broad sense, for example, can be fixedly connected, or can be detachably connected, or can be integrated; can be mechanically connected, or can be electrically connected; can be directly connected, or can be indirectly connected through an intermediate medium; can be the internal communication of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0044] In the present application, unless otherwise explicitly specified and limited, the first feature is "on" or "under" the second feature can include that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, the first feature "on", "above" and "over" the second feature includes that the first feature is directly above and obliquely above the second feature, or only indicates that the first feature is higher in horizontal height than the second feature. The first feature "under", "below" and "under" the second feature includes that the first feature is directly below and obliquely below the second feature, or only indicates that the first feature is lower in horizontal height than the second feature.

[0045] In the description of the present embodiment, the terms "upper", "lower", "left", "right" and the like orientation or positional relationship are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first" and "second" are only used to distinguish in description and have no special meaning.

[0046] As shown in Figures 1-4 The present embodiment provides a laser scribing device, which mainly comprises a base 100, a rotating base 200, an arc-shaped sliding rail 110, a driving device 120 and a laser light splitting module 300. The arc-shaped sliding rail 110 and the driving device 120 are arranged on the base 100. The upper end surface of the rotating base 200 is provided with the laser light splitting module 300, which comprises a plurality of laser beam outlets 4101; the lower end surface of the rotating base 200 is provided with a sliding block 210 fixedly connected thereto, the sliding block 210 is in sliding connection with the arc-shaped sliding rail 110; and the lower end surface of the rotating base 200 is in driving connection with a driving shaft 1201 of the driving device 120, so that the driving device 120 can drive the rotating base 200 to perform rotational movement along the plane where the X axis and the Y axis are located. That is, the rotating base 200 performs circular motion around the center of the arc-shaped sliding rail 110, but in actual operation, the rotation angle of the rotating base 200 is usually 0-90 degrees, not a complete circular motion. It should be pointed out that the X axis and the Y axis are the X axis direction and the Y axis direction referred to in the Figure 1

[0047] ​Based on the above design, the arc-shaped slide rails 110 in the embodiment are provided as at least two, the at least two arc-shaped slide rails 110 are collectively arranged to form a circular rotating area, and the driving device 120 is coaxially arranged with the circular rotating area. Exemplarily, the arc-shaped slide rails 110 in the embodiment are provided as four, and the four arc-shaped slide rails 110 all form a certain radian towards the driving device 120, so that the four arc-shaped slide rails 110 can collectively form a circular rotating area, thereby facilitating the driving device 120 to drive the rotating base 200 to rotate along the plane where the X axis and the Y axis are located, and the rotation angle can be set as 0 degree-90 degree. Optionally, a plurality of laser beam outlets 4101 are arranged on the laser light splitting module 300, and the plurality of laser beam outlets 4101 are arranged in a straight line. Exemplarily, in the actual operation process, the solar cell (not shown in the figure) is transmitted along the Y axis direction in Figure 3 , so that when the rotation angle of the driving device 120 driving the rotating base 200 is 0 degree (i.e., the rotating base 200 does not rotate), the laser beams 10 emitted by the plurality of laser beam outlets 4101 are arranged in a straight line along the X axis direction, as shown in Figure 3 , and the line spacing of the laser beams 10 emitted by the plurality of laser beam outlets 4101 is marked as A. When it is needed to change the line spacing of the laser beams 10 along the X axis direction, the driving device 120 can drive the rotating base 200 to rotate along the plane where the X axis and the Y axis are located, so that the straight line where the plurality of laser beam outlets 4101 are located is also deflected by a certain angle (i.e., the straight line where the plurality of laser beam outlets 4101 are located in Figure 3 is in an inclined state), thereby making the line spacing of the laser beams 10 on the solar cell smaller, as shown in Figure 3 , and the line spacing of the laser beams 10 is marked as B. When the rotation angle of the driving device 120 driving the rotating base 200 is 90 degrees, the straight line where the plurality of laser beam outlets 4101 are located is in the same direction as the Y axis direction, and is also in the same direction as the movement direction of the solar cell, and at this time, the laser line drawn on the solar cell is a straight line.

[0048] In addition, when the driving device 120 drives the rotating base 200 to rotate along the plane where the X axis and the Y axis are located, the straight line where the plurality of laser beam outlets 4101 are located is also deflected by a certain angle, thereby changing the line spacing of the laser beams 10 along the X axis direction, and the laser marking path is increased to complete the marking process of the entire solar cell along the Y axis direction. Specifically, at the beginning of the laser marking, the solar cell is transmitted along the Y axis direction, Figure 3 , the leftmost laser beam 10 first marks the solar cell, and by lengthening the laser marking path, the rightmost laser beam 10 completes the marking process of the solar cell at the end of the laser marking.

[0049] Optionally, in the embodiment, the sliding block 210 is connected with the lower end surface of the rotating base 200 through a bolt, so as to facilitate the rotating base 200 to rotate along the plane where the X axis and the Y axis are located under the drive of the sliding block 210.

[0050] Optionally, the sliding block 210 is provided as four, and each sliding block 210 is slidably arranged on the slide rail, so as to improve the stability and reliability of the rotating base 200.

[0051] Compared with the prior art, in the embodiment, the base 100, the rotating base 200, the arc-shaped slide rail 110, the driving device 120 and the laser light splitting module 300 are arranged, so that the driving device 120 drives the rotating base 200 to rotate along the plane where the X axis and the Y axis are located, and then the line spacing of the laser beam 10 on the solar cell along the X axis direction is changed, so as to improve the flexible applicability of the laser scribing device, so that it can be applied to scribing of different laser process patterns; at the same time, the operator only needs to drive the rotating base 200 to rotate through the driving device 120, so as to realize the adjustment of the line spacing of each laser beam 10 along the X axis direction, without the operator in the traditional technology to re-draw the laser pattern and manually debug the laser parameters, the laser head and other complex and tedious steps, so as to improve the work efficiency and save the cost.

[0052] As shown in Figure 2 In the embodiment, the driving device 120 further includes a driving shaft 1201, a fixed shaft 1202 and a grounding plate 1203, the fixed shaft 1202 and the driving shaft 1201 are coaxially arranged, and the driving shaft 1201 is in clearance fit with the fixed shaft 1202, so that the driving shaft 1201 can drive the rotating base 200 to rotate relative to the base 100 and the fixed shaft 1202; the fixed shaft 1202 is fixedly connected with the base 100 through the grounding plate 1203. In the embodiment, the clearance fit can be a ball fit, the driving shaft 1201 rotates relative to the fixed shaft 1202, and then drives the rotating base 200 to rotate.

[0053] Further, in the embodiment, the laser scribing device includes a fixing member 130, which is arranged between the rotating base 200 and the driving shaft 1201. Optionally, the fixing member 130 can be a bolt, a screw or the like, which realizes the connection between the driving shaft 1201 and the rotating base 200, and then improves the stability and reliability of the driving shaft 1201 driving the rotating base 200. Preferably, the height of the driving shaft 1201 is higher than that of the fixed shaft 1202, so that the end surface of the fixed shaft 1202 and the lower end surface of the rotating base 200 can maintain a certain gap, and then when the driving shaft 1201 drives the rotating base 200 to rotate, the frictional resistance between the fixed shaft 1202 and the rotating base 200 is reduced, and the reliability is improved.

[0054] Furthermore, such as Figure 2 As shown, in this embodiment, the drive device 120 is connected to a live wire 1204, a neutral wire 1205, and a ground wire 1206. Specifically, the live wire 1204 and the neutral wire 1205 are both mounted on the fixed shaft 1202, and the ground wire 1206 is connected to the grounding plate 1203, thereby improving the safety performance of the laser marking device.

[0055] Optionally, the drive device 120 in this embodiment can be configured as a servo drive motor, or as a drive cylinder, etc. Of course, in some optional embodiments, the drive device 120 can also be configured as other components, which will not be described in detail here.

[0056] like Figure 2 As shown, in this embodiment, a first support member 140 is provided on the end face of the base 100 near the rotating platform 200, and an arc-shaped slide rail 110 is disposed on the first support member 140. Exemplarily, four first support members 140 are provided, meaning the number of arc-shaped slide rails 110, sliders 210, and first support members 140 is consistent. Along the Z-axis direction, the sum of the heights of the first support members 140, arc-shaped slide rails 110, and sliders 210 is the same as the height of the drive shaft 1201, meaning the upper surface of the slider 210 and the upper surface of the drive shaft 1201 are on the same horizontal plane. The provision of the first support member 140 facilitates raising the slider 210 and the slide rail to a certain height, thereby improving the reliability of the drive device 120 driving the rotating platform 200.

[0057] like Figure 4 As shown, in this embodiment, the base 100 is provided with a first through hole (not shown in the figure), and the rotating platform 200 is provided with a second through hole 230. The first through hole and the second through hole 230 are coaxially arranged. After being reflected by the first reflecting component 220, the laser beam 10 can pass through the first through hole and the second through hole 230 in sequence and enter the laser beam splitting module 300 for beam splitting. A reflector is provided inside the first reflecting component 220 for reflecting the laser beam 10. The coaxial arrangement of the first through hole and the second through hole 230 improves the reliability of the laser beam 10 transmission and avoids the base 100 or the rotating platform 200 obstructing the laser beam 10, thus preventing the transmission path of the laser beam 10 from being blocked.

[0058] Furthermore, such as Figure 4As shown, in the embodiment, the laser beam splitting module 300 comprises a first reflection unit 310, a laser beam splitting unit 320 and a second reflection unit 330, a plurality of laser beam outlets 4101 are arranged on the second reflection unit 330; the laser beam 10 passing through the second through hole 230 is reflected by the first reflection unit 310, then passes through the laser beam splitting unit 320 and the second reflection unit 330 in turn, and the laser beam 10 is emitted by the laser beam outlet 4101. The laser beam splitting unit 320 and the second reflection unit 330 are arranged opposite to each other in the embodiment. Along the Y-axis direction, the first reflection unit 310 is located between the laser beam splitting unit 320 and the second reflection unit 330. By this layout mode, the area of the rotating base 200 is saved, the space of the laser scribing device along the Z-axis direction is saved, and the laser scribing device is compact in structure and low in cost.

[0059] Specifically, in the embodiment, the first reflection unit 310 comprises a second reflection assembly 3101, a third reflection assembly 3102, a first splitting assembly 3103, a fourth reflection assembly 3104 and a fifth reflection assembly 3105. The second reflection assembly 3101 is arranged at the second through hole 230. The second reflection assembly 3101 first reflects the laser to the third reflection assembly 3102, and the third reflection assembly 3102 reflects the laser beam 10 to the first splitting assembly 3103. The first splitting assembly 3103 is used for splitting the laser beam 10 to two fourth reflection assemblies 3104. The fourth reflection assembly 3104 can reflect the laser beam 10 to the fifth reflection assembly 3105, and then transmit the laser beam 10 to the laser beam splitting unit 320. The third reflection assembly 3102 is arranged between the second reflection assembly 3101 and the first splitting assembly 3103. Along the Z-axis direction, the height of the third reflection assembly 3102 is higher than the height of the second reflection assembly 3101.

[0060] In actual operation process, the laser beam 10 passing through the second through hole 230 is first reflected by the second reflection assembly 3101 to the third reflection assembly 3102. The laser beam 10 is lifted along the Z-axis direction by the third reflection assembly 3102, then is split by the first splitting assembly 3103, and then is transmitted to the fourth reflection assembly 3104. The fourth reflection assembly 3104 reflects the laser beam 10 to the fifth reflection assembly 3105, and then transmits the laser beam 10 to the laser beam splitting unit 320. The laser beam 10 is split again by the laser beam splitting unit 320. The split laser beam 10 can be transmitted to the second reflection unit 330. Finally, the laser beam 10 is reflected by the laser beam outlet 4101 of the second reflection unit 330, and the laser scribing process of the solar cell is realized.

[0061] In actual operation, since the second reflection assembly 3101 is located between the laser light splitting unit 320 and the second reflection unit 330, in order to avoid the problem of the second reflection assembly 3101 blocking the laser beam 10, the height of the second reflection assembly 3101 is usually low. By adding the third reflection assembly 3102, and along the Z-axis direction, the height of the third reflection assembly 3102 is higher than the height of the second reflection assembly 3101. In this way, the third reflection assembly 3102 can increase the height of the laser beam 10 in the Z-axis direction, thereby facilitating the splitting and reflection of the laser by the later light splitting assembly, forming a multi-layer laser beam. Exemplarily, the third reflection assembly 3102 includes two mirrors, and the two mirrors are arranged in a staggered manner along the Z-axis direction, that is, the two mirrors are at different heights, so that the laser beam 10 reflected by the second reflection assembly 3101 can be reflected by the two mirrors with different heights to raise the height of the laser beam 10, and then the raised laser beam 10 enters the first light splitting assembly 3103 to split into two laser beams 10, thereby facilitating the fourth reflection assembly 3104 at different heights to reflect and transmit the laser beam 10 to the fifth reflection assembly 3105, and then reflect and transmit to the laser light splitting unit 320 again.

[0062] As shown in Figure 4 In this embodiment, the laser light splitting unit 320 includes a plurality of second light splitting assemblies 3201, and the plurality of second light splitting assemblies 3201 are arranged in multiple layers, and adjacent two layers of second light splitting assemblies 3201 are arranged in a staggered manner along the Z-axis direction. The fourth reflection assembly 3104 and the fifth reflection assembly 3105 are arranged in multiple layers, and exemplarily, the fourth reflection assembly 3104 and the fifth reflection assembly 3105 are both arranged as two layers of mirrors arranged in an up-down manner, which is not limited in this embodiment. The fifth reflection assembly 3105 is arranged in the same layer corresponding to the second light splitting assembly 3201, so that the fifth reflection assembly 3105 can reflect the laser beam 10 to the second light splitting assembly 3201 arranged in the same layer. The second reflection unit 330 includes a plurality of sixth reflection assemblies 3301, and the plurality of sixth reflection assemblies 3301 are arranged in multiple layers, and adjacent two layers of sixth reflection assemblies 3301 are arranged in a staggered manner along the Z-axis direction. The sixth reflection assembly 3301 is arranged one by one corresponding to the second light splitting assembly 3201, so that each layer of the sixth reflection assembly 3301 can receive the laser beam 10 split by the second light splitting assembly 3201 arranged in the same layer.

[0063] Exemplarily, in the embodiment, along the direction of the Z axis, the fifth reflection assembly 3105 is arranged in two layers, the plurality of second light splitting assemblies 3201 is arranged in two layers, and the plurality of sixth reflection assemblies 3301 is arranged in two layers. The fifth reflection assembly 3105, the second light splitting assembly 3201, and the sixth reflection assembly 3301 of each layer are correspondingly arranged. Specifically, the second light splitting assembly 3201 of each layer includes a plurality of light splitters, for example, six light splitters are arranged in the first layer, and six light splitters are arranged in the second layer, and the light splitters of the two layers are staggered. The sixth reflection assembly 3301 of each layer includes a plurality of mirrors, for example, six mirrors are arranged in the first layer, and six mirrors are arranged in the second layer, and the mirrors of the two layers are staggered. Each mirror corresponds to a laser beam outlet 4101, that is, twelve laser beam outlets 4101 are arranged. By arranging the second light splitting assembly 3201 and the sixth reflection assembly 3301 in two layers in a staggered manner, the number of light splitting of the laser scribing device can be increased, the volume of the laser scribing device can be reduced, the volume of the laser scribing device can be miniaturized and compactified, and the working efficiency of the laser scribing can be improved.

[0064] In actual operation, the laser beams 10 split by the first light splitting assembly 3103 can enter the fourth reflection assembly 3104 of each layer, respectively, and then are reflected by the fourth reflection assembly 3104 of each layer to the fifth reflection assembly 3105 arranged correspondingly, and then are reflected to the corresponding second light splitting assembly 3201 for light splitting. Each light splitter directs the split laser beams 10 to the mirrors of the sixth reflection assembly 3301, and finally the mirrors reflect the laser beams 10 to be emitted from the laser beam outlets 4101.

[0065] Please continue to refer to Figure 4 In the embodiment, the laser light splitting module 300 includes a second support 3202 arranged between the second light splitting assemblies 3201 of adjacent two layers. The arrangement of the second support 3202 is beneficial to supporting the second light splitting assembly 3201 of the upper layer, and improves the stability and reliability of the second light splitting assembly 3201.

[0066] Optionally, in the embodiment, a support plate 3203 is protrudingly arranged on the second support 3202, and the support plate 3203 is used for fixedly supporting the fifth reflection assembly 3105 of the upper layer, so as to avoid the phenomenon of shaking and instability of the fifth reflection assembly 3105 in operation, and improve the stability and reliability of the fifth reflection assembly 3105.

[0067] Optionally, in the embodiment, the first light splitting assembly 3103 can be a light splitter, the structure of the first light splitting assembly 3103 is consistent with that of the light splitter in the second light splitting assembly 3201, and the light splitter can be provided with 2, 3, 4, 5 or the like number of light output holes, so as to split the laser beam 10. It should be noted that the light splitter is a standard part, and the specific structure and working principle inside the light splitter belong to the prior art, which will not be described in detail here.

[0068] Optionally, in the embodiment, the structures of the first reflecting assembly 220, the second reflecting assembly 3101, the third reflecting assembly 3102, the fourth reflecting assembly 3104, the fifth reflecting assembly 3105 and the sixth reflecting assembly 3301 are consistent, all belong to general modules, and belong to any one of the elements for reflecting the laser beam 10 in the prior art. Optionally, the first reflecting assembly 220, the second reflecting assembly 3101, the third reflecting assembly 3102, the fourth reflecting assembly 3104, the fifth reflecting assembly 3105 and the sixth reflecting assembly 3301 are all provided with a mirror for reflecting the laser beam 10.

[0069] In addition, for the specific arrangement of the first reflecting unit 310, it at least includes one light splitting assembly and a plurality of reflecting assemblies, and can split the laser to form at least two layers of transmission laser beams, and transmit to the laser light splitting unit, which will not be limited here.

[0070] As shown in FIG. 4, Figure 5 As shown in FIG. 4, in the embodiment, the laser scribing device further comprises a focusing assembly 400, the focusing assembly 400 is arranged on the upper end surface of the rotating base 200, and the focusing assembly 400 is used for adjusting the focal length of the laser beam 10 emitted by the laser beam outlet 4101, so that the laser scribing device can meet the process requirements of actual laser scribing.

[0071] Further, the focusing assembly 400 in the embodiment comprises a focusing plate 410 and a motor 420, the motor 420 is arranged on the upper end surface of the rotating base 200, the motor 420 is drivingly connected with the focusing plate 410, the laser beam outlet 4101 is opened on the focusing plate 410, and a lens is arranged in the laser beam outlet 4101. When it is necessary to adjust the focal length of the laser beam 10, the motor 420 can drive the focusing plate 410 to realize lifting movement along the Z-axis direction, so as to realize that the focusing plate 410 moves away from or approaches the sixth reflecting assembly 3301, and then the focal point distance of the lens converging the laser beam 10 is changed. The motor 420 is signal connected with a controller (not shown in the figure), and an operator can control the forward rotation or reverse rotation of the motor 420 through the controller, so as to realize the driving of the motor 420 to the focusing plate 410, and realize automatic focusing. It should be noted that the way of the controller controlling the motor 420 belongs to the prior art, which will not be described in detail here.

[0072] Exemplarily, the motor 420 can be provided as two, and driving of the focusing plate 410 is realized through the two motors 420, stability and reliability of the focusing plate 410 in the lifting motion process are improved, the phenomenon of virtual focus is avoided, and the precision and efficiency of laser scribing are improved.

[0073] The embodiment further provides a solar cell processing equipment, which comprises the feeding device, the discharging device and the above laser scribing device. The feeding end of the laser scribing device is communicated with the feeding device (not shown in the figure), and the discharging end of the laser scribing device is communicated with the discharging device (not shown in the figure), thereby facilitating quantitative production of the solar cell processing equipment and improving production efficiency. Since the laser scribing device can realize adjustment of the laser beam 10 line spacing on the scribed solar cell, the processing efficiency of the solar cell processing equipment is improved, the universality of the solar cell processing equipment is improved, the solar cell processing equipment can be applied to various laser processing processes, and the purpose of saving cost is achieved.

[0074] Obviously, the above only describes the preferred embodiments of the present application and the applied technical principles. Those skilled in the art will understand that the present application is not limited to the specific embodiments herein, and various obvious changes, re-adjustments and substitutions can be made by those skilled in the art without departing from the protection scope of the present application. Therefore, although the present application is described in more detail through the above embodiments, the present application is not limited to the above embodiments, and more other equivalent embodiments can be included without departing from the concept of the present application, and the scope of the present application is determined by the appended claims.

[0075] Note that in the description of the present specification, the description referring to the terms "some embodiments", "other embodiments", and the like means that the specific features, structures, materials or characteristics described in connection with the embodiments or examples are included in at least one embodiment or example of the present application. The illustrative expressions of the above terms in the present specification do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

Claims

1. A laser scribe apparatus characterized by, The utility model relates to a laser scribing device, including: a base (100) provided with an arc-shaped slide rail (110) and a driving device (120) on the base (100); a rotating base (200) provided with a laser light splitting module (300) on the upper end surface of the rotating base (200), the laser light splitting module (300) including a plurality of laser beam outlets (4101); the laser beam outlets (4101) are arranged towards the Z-axis direction; the lower end surface of the rotating base (200) is provided with a sliding block (210), the sliding block (210) is in sliding connection with the arc-shaped slide rail (110); and the lower end surface of the rotating base (200) is in driving connection with the driving shaft (1201) of the driving device (120), so that the driving device (120) can drive the rotating base (200) to rotate in the XY plane; the X-axis direction, the Y-axis direction and the Z-axis direction are perpendicular to each other in pairs; the base (100) is provided with a first through hole, and the laser scribing device further includes a first reflection assembly (220), the first reflection assembly (220) is located below the base (100), and the first reflection assembly is used for reflecting a laser beam (10) through the first through hole; the rotating base (200) is provided with a second through hole (230), the first through hole and the second through hole (230) are coaxially arranged, and the laser beam (10) reflected by the first reflection assembly (220) can pass through the first through hole and the second through hole (230) in sequence and then enter the laser light splitting module (300) for light splitting; the laser light splitting module (300) includes a first reflection unit (310), a laser light splitting unit (320) and a second reflection unit (330), the second reflection unit (330) is provided with a plurality of laser beam outlets (4101); the laser beam (10) passing through the second through hole (230) is reflected by the first reflection unit (310) and then passes through the laser light splitting unit (320) and the second reflection unit (330) in sequence, and the laser beam (10) is emitted by the laser beam outlet (4101); the laser light splitting unit (320) includes a second light splitting assembly (3201), the second light splitting assembly (3201) is arranged in multiple layers, and adjacent two layers of the second light splitting assembly (3201) are arranged in a staggered manner along the Z-axis direction.

2. The laser scribe apparatus of claim 1, wherein, the driving device (120) further includes a driving shaft (1201), a fixed shaft (1202) and a grounding plate (1203), the fixed shaft (1202) and the driving shaft (1201) are coaxially arranged, and the driving shaft (1201) is in clearance fit with the fixed shaft (1202), so that the driving shaft (1201) can drive the rotating base (200) to rotate; and the fixed shaft (1202) is fixedly connected with the base (100) through the grounding plate (1203).

3. The laser scribe apparatus of claim 1, wherein, The arc-shaped slide rails (110) are arranged as at least two, and the at least two arc-shaped slide rails (110) jointly enclose a circular rotating area, and the driving device (120) is coaxially arranged with the circular rotating area.

4. The laser scribe apparatus of claim 3, wherein, The base (100) is provided with a first support (140) on the end face close to the rotating base (200), and the arc-shaped slide rails (110) are arranged on the first support (140).

5. The laser scribe apparatus of claim 1, wherein, The first reflection unit (310) comprises a second reflection assembly (3101), a third reflection assembly (3102), a first light splitting assembly (3103), a fourth reflection assembly (3104) and a fifth reflection assembly (3105). The second reflection assembly (3101) is arranged at the second through hole (230), and is used for reflecting the laser beam (10) onto the third reflection assembly (3102) and transmitting the laser beam (10) to the first light splitting assembly (3103). The first light splitting assembly (3103) is used for splitting the laser beam (10) to the fourth reflection assembly (3104), the fourth reflection assembly (3104) reflects the laser beam to the fifth reflection assembly (3105), and the fifth reflection assembly (3105) can reflect the laser beam (10) to the laser light splitting unit (320).

6. The laser scribe apparatus of claim 5, wherein, The third reflection assembly (3102) is arranged between the second reflection assembly (3101) and the first light splitting assembly (3103), and along the Z-axis direction, the height of the third reflection assembly (3102) is higher than the height of the second reflection assembly (3101).

7. The laser scribe apparatus of claim 5, wherein, The fourth reflection assembly (3104) and the fifth reflection assembly (3105) are correspondingly arranged as multiple layers, and the fifth reflection assembly (3105) is correspondingly arranged with the second light splitting assembly (3201), so that the fifth reflection assembly (3105) of each layer can reflect the laser beam (10) to the second light splitting assembly (3201) of each layer.

8. The laser scribe apparatus of claim 7, wherein, The laser light splitting module (300) comprises a second support (3202), the second support (3202) is arranged between adjacent two layers of the second light splitting assembly (3201), and the second support (3202) is connected with the base (100).

9. The laser scribe apparatus of claim 7, wherein, The second reflection unit (330) comprises a plurality of sixth reflection assemblies (3301), and the plurality of sixth reflection assemblies (3301) are arranged as multiple layers. Adjacent two layers of the sixth reflection assemblies (3301) are arranged in a staggered manner along the Z-axis direction, and the sixth reflection assemblies (3301) are one-to-one correspondingly arranged with the second light splitting assemblies (3201), so that the sixth reflection assembly (3301) of each layer can receive the laser beam (10) split by the second light splitting assembly (3201) of each layer.

10. The laser scribe apparatus of claim 1, wherein, The laser scribing device further comprises a focusing assembly (400) arranged on the upper end surface of the rotating base (200), and the focusing assembly (400) is used for adjusting the focal length of the laser beam (10) emitted by the laser beam outlet (4101).

11. The laser scribe apparatus of claim 10, wherein, The focusing assembly (400) comprises a focusing plate (410) and a motor (420), the motor (420) is arranged on the upper end surface of the rotating base (200), the motor (420) is drivingly connected with the focusing plate (410), the laser beam outlet (4101) is arranged on the focusing plate (410), and a lens is arranged in the laser beam outlet (4101).

12. Solar cell processing apparatus comprising an infeed device and an outfeed device, characterized in that The solar cell processing equipment further comprises the laser scribing device according to any one of claims 1-11, a feeding end of the laser scribing device is communicated with the feeding device, and a discharging end of the laser scribing device is communicated with the discharging device.

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