Apparatus and method for multiplexed imaging measurements

Abstract

The present application relates to a kind of multi-path imaging measurement equipment and method, comprising: lens;Splitting mask plate, the splitting mask plate is arranged in the side of the lens, and the splitting mask plate is configured to the light on the splitting mask plate by the lens incidence is divided into at least two light, at least two light includes total reflection light and total transmission light;And at least two kinds of detector, the at least two kinds of detector are used to receive the total reflection light and total transmission light respectively.The multi-path imaging measurement equipment and method provided in an embodiment of the present application, since splitting mask plate is arranged in the side of lens, splitting mask plate can be divided into total reflection light and total transmission light by incident light, and total reflection and total transmission will not have polarization selectivity, therefore, one equipment can realize different detector to carry out multi-aspect measurement, and it is not easy to cause polarization problem, to improve measurement accuracy.

Description

Technical Field

[0001] This invention relates to the field of industrial imaging inspection technology, and in particular to a device and method for multi-channel imaging measurement. Background Technology

[0002] With the development of technology, the evaluation of the characteristics of display panels or light emitters is becoming increasingly important for product performance. Common light emitters and their display products include different types such as LEDs, microLEDs, miniLEDs, and LDs, and the products they are used in include consumer electronics (such as mobile phone screens, television displays, etc.).

[0003] These display panels or light emitters require various measurements and evaluations, including spectral measurements, display uniformity measurements, and time response measurements. Different devices are used to perform these different measurements. If they are not integrated, the discrete devices will increase the overall size of the device. Therefore, integrated devices are needed to complete the measurements.

[0004] In related technologies, in the current main testing schemes, a beam splitter is generally added behind the lens. Beam splitters include flat beam splitters and cubic prism beam splitters. Due to their large thickness, cubic prisms will have large aberrations when combined with the lens. Flat beam splitters will cause polarization problems. That is, different polarized light has different reflectance ratios. As a result, the product will have different reflection and transmission ratios when it is in different polarization states, which will lead to inaccurate measurements.

[0005] Therefore, it is necessary to design a new multi-channel imaging measurement device and method to overcome the above problems. Summary of the Invention

[0006] This invention provides a device and method for multi-channel imaging measurement to solve the problem of inaccurate measurement in related technologies.

[0007] In a first aspect, a multi-channel imaging measurement device is provided, comprising: a lens; a beam splitter, the beam splitter being disposed on one side of the lens and configured to split light incident on the beam splitter through the lens into at least two light paths, the at least two light paths including a total internal reflection light and a total transmission light; and at least two detectors, the at least two detectors being used to receive the total internal reflection light and the total transmission light, respectively.

[0008] In some embodiments, the beam splitter has a total reflection region and a total transmission region. Light incident on the beam splitter is partially reflected by the total reflection region to form the total reflection light, and partially transmitted by the total transmission region to form the total transmission light.

[0009] In some embodiments, the beam-splitting mask is provided with a plurality of total reflection regions and a plurality of total transmission regions, which are alternately and uniformly distributed.

[0010] In some embodiments, the length of the long side of the total reflection region and the length of the long side of the total transmission region are both less than or equal to one-tenth of the length of the beam-splitting mask.

[0011] In some embodiments, the angle between the beam splitter and the axis of the lens is 45 degrees, and the total reflection region and the total transmission region are of equal size, with the aspect ratio of the total reflection region being 1.414:1.

[0012] In some embodiments, the beam-splitting mask has multiple fully transmissive regions that are spaced apart, and other regions of the beam-splitting mask are fully reflective regions.

[0013] In some embodiments, the beam-splitting mask has multiple total reflection regions, which are spaced apart, and the other regions of the beam-splitting mask are fully transmissive regions.

[0014] In some embodiments, two beam splitters are provided on one side of the lens. The two beam splitters are arranged parallel or perpendicular to each other, and the fully transmissive region on the beam splitter closer to the lens at least partially overlaps with the fully reflective region on the other beam splitter, so that the light incident on the two beam splitters is divided into fully reflected light and fully transmissive light.

[0015] In some embodiments, the at least two detectors are at least two of an imaging chip, a spectrometer, or a photodetector.

[0016] Secondly, a method for multi-path imaging measurement is provided, comprising the following steps: light emitted from the sample under test is incident on a beam splitter through a lens, causing the light to be split into at least two paths, wherein the at least two paths include total internal reflection light and total transmission light; and at least two detectors are used to receive the total internal reflection light and the total transmission light respectively.

[0017] In some embodiments, the beam splitter is provided with a total reflection area and a total transmission area. Before the light emitted by the sample to be tested is incident on the beam splitter after passing through the lens, the following steps are taken: adjusting the placement angle of the beam splitter according to a preset transmittance-to-reflection ratio requirement, and adjusting the aspect ratio of the total reflection area and the total transmission area.

[0018] The beneficial effects of the technical solution provided by this invention include:

[0019] This invention provides a device and method for multi-channel imaging measurement. Because a beam splitter is set on one side of the lens, the beam splitter can split the incident light into totally internally reflected light and totally transmitted light, which are received by different detectors. Since totally internally reflected light and totally transmitted light do not have polarization selectivity, a single device can perform multi-faceted measurements with different detectors without easily causing polarization problems, thereby improving measurement accuracy. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 This is a schematic diagram of the structure of a multi-channel imaging measurement device provided in an embodiment of the present invention;

[0022] Figure 2 This is a schematic diagram of the structure of a beam-splitting mask provided in an embodiment of the present invention;

[0023] Figure 3 This is a schematic diagram of another beam-splitting mask provided in an embodiment of the present invention;

[0024] Figure 4 This is a flowchart of a multi-channel imaging measurement method provided in an embodiment of the present invention.

[0025] In the picture:

[0026] 1. Lens; 2. Beam splitter mask; 3. Detection assembly; 31. Detector; 311. Imaging chip; 312. Spectrometer; 4. Sample to be tested. Detailed Implementation

[0027] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0028] This invention provides a device and method for multi-channel imaging measurement, which can solve the problem of inaccurate measurement in related technologies.

[0029] See Figure 1As shown, an embodiment of the present invention provides a multi-channel imaging measurement device, which may include: a lens 1, wherein one end of the lens 1 can face the sample 4 to be measured when in use; a beam splitter 2, wherein the beam splitter 2 is disposed on one side of the lens 1, wherein in this embodiment the beam splitter 2 may be disposed on one side of the lens 1 along the axial direction of the lens 1, and the beam splitter 2 is configured to split the light incident on the beam splitter 2 through the lens 1 into at least two light rays, the at least two light rays including total internal reflection light and total transmission light, that is, the beam splitter 2 can split the incident light into two light rays, one of which is a total internal reflection light and the other is a total transmission light. The beam splitter 2 may also split the incident light into three or more light rays, each of which is a total internal reflection light or a total transmission light. When it is necessary to split the incident light into three or more light rays, two or more beam splitters 2 can be set to achieve this; and at least two types of detectors 31, wherein the at least two types of detectors 31 are respectively used to receive the total internal reflection light and the total transmission light. The detectors 31 can be two or more, and each detector 31 can be of the same or different types. Different detectors 31 can perform measurements in different directions, thereby enabling multi-faceted measurement and evaluation of the sample 4 under test. The spectrophotometer 2 can be one or more.

[0030] In related technologies, due to the operating characteristics of planar beam splitters, light incident on a planar beam splitter exhibits polarization selectivity. Totally internally or totally internally transmitted glass devices do not exhibit polarization selectivity, but they cannot function as beam splitters.

[0031] In this embodiment, a beam splitter 2 is provided on one side of the lens 1. The beam splitter 2 can split the incident light into multiple paths, including totally internally reflected light and totally transmitted light. These totally internally reflected and totally transmitted light can be received by different detectors 31. Since totally internally reflected and totally transmitted light do not exhibit polarization selectivity, a single device can enable different detectors 31 to perform multi-faceted measurements on the product under test without easily causing polarization problems, thereby improving measurement accuracy. This embodiment utilizes a special flat panel device (i.e., the beam splitter 2) to achieve polarization-independent partial transmission and partial reflection, and can simultaneously perform multiple measurements, resulting in high system integration.

[0032] There are many manufacturing processes for the beam-splitting mask 2. One of these processes involves creating a multilayer dielectric film through sputtering. In some embodiments, the beam-splitting mask 2 can actually be a type of optical filter.

[0033] Furthermore, the multi-channel imaging measurement device may include a detection component 3, which may include at least two types of detectors 31, that is, at least two types of detectors 31 may be integrated on the detection component 3.

[0034] See Figure 2 and Figure 3 As shown, in some embodiments, the beam splitter 2 may have a total reflection region and a total transmission region. Light incident on the beam splitter 2 may be partially reflected by the total reflection region to form total reflection light, and partially transmitted by the total transmission region to form total transmission light. The total reflection region has a transmittance of 0% and a reflectance of 100%, while the total transmission region has a transmittance of 100% and a reflectance of 0%. The black area in the figure represents the total transmission region, and the white area represents the total reflection region.

[0035] See Figure 2 As shown, in some optional embodiments, the beam splitter 2 has multiple total reflection regions and multiple total transmission regions. That is, the multiple total reflection regions and multiple total transmission regions are independent, and are alternately and evenly distributed, allowing for a more uniform distribution of the total reflection and total transmission regions on the beam splitter 2. The shape of each total reflection region and each total transmission region can be rectangular, square, or circular, or other irregular structures. Furthermore, the shape and size of each total reflection region and each total transmission region can be the same or different. In this embodiment, it is preferred that both the total reflection and total transmission regions be rectangular, and that the alternating distribution of the total reflection and total transmission regions forms a rectangular checkerboard pattern. Of course, in other embodiments, other distribution structures are also possible.

[0036] Preferably, to improve imaging uniformity, the length of the long side of both the total reflection region and the total transmission region can be less than or equal to one-tenth of the length of the beam splitter 2. That is, the length of the long side of the total reflection region or the total transmission region is generally set to 1 / 10 or less of the length of the long side of the beam splitter 2. Of course, imaging can still be achieved with a length greater than 1 / 10, but some non-uniformity will exist in the imaging.

[0037] In some embodiments, generally, if the beam splitter 2 is placed at 45 degrees, that is, the angle between the beam splitter 2 and the axis of the lens 1 is 45 degrees, when a transmission ratio and a reflection ratio of 50:50 are required, the dimensions of the total reflection area and the total transmission area can be set to be equal, and the aspect ratio of the total reflection area is 1.414:1, and the aspect ratio of the total transmission area is also 1.414:1.

[0038] Of course, in other embodiments, the beam splitter 2 can also be placed at other angles, which can adjust the aspect ratios of the total reflection area and the total transmission area to achieve different transmission-to-reflection ratios.

[0039] See Figure 3 As shown, the total reflection and total transmission regions on the beam splitter mask 2 do not necessarily need to be fixed as a rectangular checkerboard pattern; they can also be other distribution structures, as long as the interior of each total reflection or total transmission region is polarization-independent total reflection or total transmission. In some optional embodiments, the beam splitter mask 2 can have multiple total transmission regions, which are spaced apart, and the other regions of the beam splitter mask 2 are total reflection regions. That is, in this embodiment, except for the spaced-apart total transmission regions, the other regions on the beam splitter mask 2 can be connected into one area, and the connected area is a total reflection region. In the figure, the black part is the total transmission region, and the white part is the total reflection region.

[0040] In some other embodiments, the beam splitter 2 may also have multiple total reflection regions, which are spaced apart, and the other regions of the beam splitter 2 are fully transmissive regions. That is, in this embodiment, apart from the spaced total reflection regions, the other regions on the beam splitter 2 can be connected into one area, and the connected areas are all fully transmissive regions.

[0041] In some optional embodiments, two beam-splitting masks 2 may be provided on one side of the lens 1. The two beam-splitting masks 2 may be arranged parallel or perpendicular to each other. Furthermore, the fully transmissive region on the beam-splitting mask 2 closer to the lens 1 at least partially overlaps with the fully reflective region on the other beam-splitting mask 2, so that light incident on both beam-splitting masks 2 is split into fully reflected and fully transmitted light. When one beam-splitting mask 2 is positioned at 45°, the other beam-splitting mask 2 may also be positioned at the same 45° angle, or it may be positioned at a different 45° angle, making the two beam-splitting masks perpendicular to each other. Of course, besides being parallel or perpendicular, the two beam-splitting masks 2 may also be positioned at any other angle. In this embodiment, by using two beam-splitting masks 2, multiple beam splitting can be achieved, allowing one device to perform multiple measurements.

[0042] Of course, in other embodiments, three or more beam-splitting masks 2 can be set on one side of the lens 1 to form more beam splitting. The beam-splitting masks 2 can be set in parallel or at any other angle, as long as the fully transmissive area on the previous beam-splitting mask 2 and the fully reflective area on the next beam-splitting mask 2 at least partially overlap. This arrangement ensures that the light incident on all beam-splitting masks 2 can be split into fully reflected light and fully transmissive light.

[0043] See Figure 1 As shown, in some embodiments, the at least two detectors 31 can be at least two of the following: an imaging chip 311, a spectrometer 312, or a photodetector 31. The spectrometer 312 can perform spectral measurements on the sample 4. Generally, the two paths of spectral dispersion can be interchanged. That is, the transmitted portion can be used for imaging and spectral measurement, while the reflected portion can be used for imaging, spectral measurement, or other forms of detection, such as a high-speed photodetector 31. The two detectors 31 shown in the figure are the spectrometer 312 and the imaging chip 311, respectively. The imaging chip 311 receives fully transmitted light, and the spectrometer 312 receives fully reflected light. Of course, the positions of the imaging chip 311 and the spectrometer 312 can also be interchanged, meaning the imaging chip 311 receives fully reflected light, and the spectrometer 312 receives fully transmitted light. Furthermore, in other embodiments, the detector 31 that receives fully transmitted light can be set as a photodetector 31, or the detector 31 that receives fully reflected light can be set as a photodetector 31.

[0044] Of course, in order to perform more comprehensive measurements and evaluations on the sample 4, such as uniformity measurement or time response measurement, a corresponding detector 31 can be selected to achieve the above measurements.

[0045] By setting up a beam splitter 2, the present invention can split incident light into totally internally reflected light and totally transmitted light, eliminating the polarization effect of ordinary beam splitters and improving the integration of the device.

[0046] See Figure 4 As shown, this embodiment of the invention also provides a method for multi-channel imaging measurement, which may include the following steps:

[0047] Step 1: The light emitted from the sample 4 to be tested is incident on the beam splitter 2 through the lens 1, so that the light is split into at least two paths by the beam splitter 2, wherein the at least two paths include total internal reflection light and total transmission light.

[0048] Step 2: Use at least two types of detectors 31 to receive the total internal reflection light and the total internal transmission light, respectively.

[0049] Furthermore, in some embodiments, the beam splitter 2 is provided with a total reflection region and a total transmission region. Before the light emitted from the sample 4 is incident on the beam splitter 2 through the lens 1, the process may further include: adjusting the placement angle of the beam splitter 2 according to a preset transmission-to-reflection ratio requirement, and adjusting the aspect ratios of the total reflection region and the total transmission region. Generally, if the beam splitter is placed at a 45-degree angle, when a transmission ratio and reflection ratio of 50:50 are required, the aspect ratio of each total reflection region is 1.414:1, and the aspect ratio of each total transmission region is also 1.414:1. Similarly, the beam splitter can also be placed at other angles, in which case the corresponding aspect ratios can be adjusted to achieve different transmission-to-reflection ratios.

[0050] In some optional embodiments, in step 2, at least two detectors 31 can be at least two of the following: an imaging chip 311, a spectrometer 312, or a photodetector 31. The spectrometer 312 can perform spectral measurements on the sample 4. Generally, the two paths of spectral dispersion can be interchanged. That is, the transmitted portion can be used for imaging and spectral measurement, while the reflected portion can be used for imaging, spectral measurement, or other forms of detection, such as a high-speed photodetector 31. The two detectors 31 shown in the figure are the spectrometer 312 and the imaging chip 311, respectively. The imaging chip 311 receives fully transmitted light, and the spectrometer 312 receives fully reflected light. Of course, the positions of the imaging chip 311 and the spectrometer 312 can also be interchanged, meaning the imaging chip 311 receives fully reflected light, and the spectrometer 312 receives fully transmitted light. Furthermore, in other embodiments, the detector 31 that receives fully transmitted light can be set as a photodetector 31, or the detector 31 that receives fully reflected light can be set as a photodetector 31.

[0051] Of course, in order to perform more comprehensive measurements and evaluations on the sample 4, such as uniformity measurement or time response measurement, a corresponding detector 31 can be selected to achieve the above measurements.

[0052] In the description of this invention, it should be noted that the terms "upper," "lower," etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. Unless otherwise expressly specified and limited, the terms "installed," "connected," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication between two elements. For those skilled in the art, the specific meaning of the above terms in this invention can be understood according to the specific circumstances.

[0053] It should be noted that in this invention, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0054] The above description is merely a specific embodiment of the present invention, enabling those skilled in the art to understand or implement the invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention. Therefore, the present invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features claimed herein.

Claims

1. A multi-channel imaging measurement device, characterized in that, It includes: Lens (1); A beam splitter (2) is disposed on one side of the lens (1) and the beam splitter (2) is configured to split the light incident on the beam splitter (2) through the lens (1) into at least two light rays, the at least two light rays including total internal reflection light rays and total transmission light rays; and at least two detectors (31), said at least two detectors (31) being used to receive the total internal reflection light and the total internal transmission light, respectively; The beam splitter (2) is provided with a total reflection area and a total transmission area. The light rays incident on the beam splitter (2) are partially reflected by the total reflection area to form the total reflection light rays, and partially transmitted by the total transmission area to form the total transmission light rays. The beam-splitting mask (2) has multiple fully transmissive regions, which are spaced apart, and the other regions of the beam-splitting mask (2) are totally reflective regions; or, The beam splitter mask (2) is provided with multiple total reflection regions, which are distributed at intervals, and the other regions of the beam splitter mask (2) are all-transmittance regions.

2. The multi-channel imaging measurement device as described in claim 1, characterized in that: The beam-splitting mask (2) is provided with multiple total reflection regions and multiple total transmission regions, which are evenly distributed alternately.

3. The multi-channel imaging measurement device as described in claim 1 or 2, characterized in that: The length of the long side of the total reflection region and the length of the long side of the total transmission region are both less than or equal to one-tenth of the length of the beam splitter (2).

4. The multi-channel imaging measurement device as described in claim 1, characterized in that: The angle between the beam splitter mask (2) and the axis of the lens (1) is 45 degrees, and the total reflection area and the total transmission area are equal in size, with the aspect ratio of the total reflection area being 1.414:

1.

5. The multi-channel imaging measurement device as described in claim 1, characterized in that: Two beam splitting masks (2) are provided on one side of the lens (1). The two beam splitting masks (2) are arranged parallel to each other or perpendicular to each other. The total transmission area on the beam splitting mask (2) that is biased towards the lens (1) overlaps at least partially with the total reflection area on the other beam splitting mask (2), so that the light incident on the two beam splitting masks (2) is divided into total reflection light and total transmission light.

6. The multi-channel imaging measurement device as described in claim 1, characterized in that: The at least two detectors (31) are at least two of the following: an imaging chip (311), a spectrometer (312), or a photodetector (31).

7. A method for multi-channel imaging measurement, characterized in that, It includes the following steps: The light emitted from the sample to be tested (4) is incident on the beam splitter (2) through the lens (1), so that the light is split into at least two paths by the beam splitter (2), wherein the at least two paths include total internal reflection and total transmission; The total internal reflection light and the total internal transmission light are received using at least two detectors (31), respectively; The beam splitter (2) is provided with a total reflection area and a total transmission area. The light rays incident on the beam splitter (2) are partially reflected by the total reflection area to form the total reflection light rays, and partially transmitted by the total transmission area to form the total transmission light rays. The beam-splitting mask (2) has multiple fully transmissive regions, which are spaced apart, and the other regions of the beam-splitting mask (2) are totally reflective regions; or, The beam splitter mask (2) is provided with multiple total reflection regions, which are distributed at intervals, and the other regions of the beam splitter mask (2) are all-transmittance regions.

8. The method for multi-channel imaging measurement as described in claim 7, characterized in that, The beam splitter mask (2) has a total reflection region and a total transmission region. Before the light emitted from the sample to be tested (4) passes through the lens (1) and enters the beam splitter mask (2), it includes: According to the preset transmittance-to-reflectance ratio requirements, adjust the placement angle of the beam splitter (2) and adjust the aspect ratios of the total reflection area and the total transmission area.

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