Heat exchange medium recovery system and recovery method

Abstract

The application provides a heat exchange medium recycling system and method, and belongs to the fields of semiconductor wafer processing equipment and refrigeration technology. The system comprises a separation unit, a cooling unit, a heating unit, a recycling unit and a temperature control unit. The input end of the separation unit is communicated with the output end of a pipeline to be recycled through a pipeline. The output end of the heating unit is connected with the input end of the pipeline to be recycled through a pipeline. The output end of the separation unit is communicated with the cooling unit and the heating unit through pipelines respectively, so that the gas is delivered to the cooling unit and the heating unit respectively. The cooling unit is communicated with the recycling unit through a pipeline, so that the cooled gas-liquid mixture is delivered to the recycling unit. The recycling unit recycles the heat exchange medium from the cooled gas-liquid mixture. According to the characteristics that the vapor pressure of the heat exchange medium changes greatly at different temperatures, the recycling rate of the heat exchange medium in the device is greatly improved, and the debugging cost of the temperature control device is reduced.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of semiconductor wafer processing equipment and refrigeration technology, in particular to a heat exchange medium recovery system and recovery method. BACKGROUND

[0002] In the semiconductor wafer processing equipment, a special temperature control device is needed to maintain the constant temperature in the wafer processing cavity, and a heat exchange medium is provided between the temperature control device and the processing cavity. The temperature control device is filled with heat exchange medium in the factory for equipment debugging, and after the debugging is completed, the heat exchange medium inside the equipment needs to be discharged and reused for subsequent equipment debugging. Since the cost of heat exchange medium is relatively high, the amount of heat exchange medium lost after each debugging is also an important indicator for calculating the cost of equipment debugging.

[0003] Currently, the temperature control device mainly relies on gravity to discharge the heat exchange medium in the pipeline, and then continuously introduces positive pressure air into the internal pipeline of the device to blow out part of the liquid. Since the internal pipeline of the temperature control device uses stainless steel bellows, the pipe wall has a large number of S-shaped folds, and there are water pumps, plate heat exchangers and other internal medium flow channels, which result in that the gravity liquid discharge and positive pressure gas purging method can only recover part of the liquid in the temperature control device, the liquid recovery rate is low, and the equipment debugging cost is increased. SUMMARY

[0004] The present application provides a heat exchange medium recovery system and recovery method to solve the defects in the prior art that the gravity liquid discharge and positive pressure gas purging method can only recover part of the liquid in the temperature control device, the liquid recovery rate is low, and the equipment debugging cost is increased.

[0005] The present application provides a heat exchange medium recovery system, which comprises a separation unit, a cooling unit, a heating unit, a recovery unit and a temperature control unit:

[0006] The input end of the separation unit is communicated with the output end of the pipeline to be recovered through a pipeline, and the pipeline to be recovered contains liquid heat exchange medium to be recovered. The output end of the heating unit is connected with the input end of the pipeline to be recovered through a pipeline, and the heating unit delivers heated gas to the pipeline to be recovered. The heated gas enters the input end of the separation unit after passing through the pipeline to be recovered; the output end of the separation unit is communicated with the cooling unit and the heating unit through a pipeline, respectively, and the gas is delivered to the cooling unit and the heating unit, respectively;

[0007] The cooling unit is communicated with the recovery unit through a pipeline, and the gas input into the separation unit is cooled. The cooled gas-liquid mixture is delivered to the recovery unit, and the recovery unit recovers the heat exchange medium from the cooled gas-liquid mixture;

[0008] The temperature control unit is connected with the recovery unit and the heating unit respectively, and is used for obtaining first temperature information of an input end of the separation unit and second temperature information of an input end of the recovery unit, controlling the heating unit according to the first temperature information, and controlling the recovery unit according to the second temperature information.

[0009] The heating unit comprises a fan and a heater, the fan is connected with the heater, the fan is used for obtaining external air and gas delivered by the separation unit, and the external air and the gas are delivered to the inside of the heater, the heater is used for heating the gas delivered by the fan, and the heated gas enters the pipeline to be recovered.

[0010] The heating unit is controlled according to the first temperature information, and the controlling comprises:

[0011] A first control instruction is obtained according to a difference between the first temperature information and a first preset temperature, wherein the first preset temperature is determined based on the characteristics of the heat exchange medium.

[0012] The power of the heater is adjusted according to the first control instruction.

[0013] The heating unit further comprises a differential pressure regulating valve, the differential pressure regulating valve is arranged between the separation unit and the fan, and is used for regulating the gas pressure difference between the separation unit and the heating unit.

[0014] The heating unit further comprises a check valve, the check valve is arranged at an input end of the fan, and is used for allowing external air to enter the fan when the pipeline pressure at the input end of the fan is lower than the atmospheric pressure.

[0015] The recovery unit comprises a gas-liquid separator and a regulating valve, an input end of the gas-liquid separator is connected with the cooling unit through a pipeline, an output end of the gas-liquid separator is connected with the regulating valve through a pipeline, the gas-liquid separator is used for recovering the heat exchange medium in a liquid state from the gas-liquid mixture, and the gas separated from the gas-liquid mixture is discharged through the regulating valve.

[0016] The recovery unit is controlled according to the second temperature information, and the controlling comprises:

[0017] A second control instruction is obtained according to a difference between the second temperature information and a second preset temperature, wherein the second preset temperature is determined based on the characteristics of the heat exchange medium.

[0018] adjusting the opening degree of the regulating valve according to the second control instruction.

[0019] The cooling unit comprises a compressor, a condenser, a throttling device and an evaporator, the compressor, the condenser, the throttling device and the evaporator form a refrigeration system through pipelines, the gas output by the separation unit forms a gas-liquid mixture after heat exchange through the evaporator, and the gas-liquid mixture enters the recovery unit through pipelines.

[0020] The separation unit is a tee.

[0021] The application further provides a heat exchange medium recovery method based on the heat exchange medium recovery system, and the method comprises the following steps.

[0022] The heating unit delivers heated gas to the pipeline to be recovered, and the heated gas enters the input end of the separation unit after passing through the pipeline to be recovered; wherein, the pipeline to be recovered contains liquid heat exchange medium to be recovered.

[0023] The separation unit delivers the gas output by the pipeline to be recovered to the cooling unit and the heating unit respectively.

[0024] The cooling unit cools the gas input by the separation unit, and delivers the cooled gas-liquid mixture to the recovery unit.

[0025] The recovery unit recovers heat exchange medium from the cooled gas-liquid mixture.

[0026] The temperature control unit is connected with the recovery unit and the heating unit respectively, and is used for acquiring first temperature information of the input end of the separation unit and second temperature information of the input end of the recovery unit, controlling the heating unit according to the first temperature information, and controlling the recovery unit according to the second temperature information.

[0027] The heat exchange medium recovery system and the recovery method provided by the application are provided with a separation unit, a cooling unit, a heating unit, a recovery unit and a temperature control unit, the recovery rate of heat exchange medium in the device is greatly improved according to the characteristic that the vapor pressure of heat exchange medium changes greatly at different temperatures, and the debugging cost of the temperature control device is reduced. BRIEF DESCRIPTION OF DRAWINGS

[0028] In order to make the technical solutions in the present application or prior art clearer, the accompanying drawings needed in the embodiments or prior art description will be briefly introduced. Obviously, the accompanying drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without any creative effort based on these drawings.

[0029] Figure 1 is a principle block diagram of the heat exchange medium recovery system provided by the present application;

[0030] Figure 2 is a vaporization pressure and temperature relationship curve diagram of the heat exchange medium provided by the present application;

[0031] Figure 3 is a structure diagram of the heat exchange medium recovery system provided by the present application;

[0032] Figure 4 is one of the flow diagrams for controlling the heating unit provided by the present application;

[0033] Figure 5 is the other of the flow diagrams for controlling the heating unit provided by the present application;

[0034] Figure 6 is one of the flow diagrams for controlling the recovery unit provided by the present application;

[0035] Figure 7 is the other of the flow diagrams for controlling the recovery unit provided by the present application;

[0036] Figure 8 is a principle block diagram of the temperature control unit provided by the present application;

[0037] Figure 9 is a flow diagram of the heat exchange medium recovery method provided by the present application.

[0038] Reference signs:

[0039] 100-separation unit, 200-cooling unit, 210-compressor, 220-condenser, 230-throttling device, 240-evaporator, 300-heating unit, 310-fan, 320-heater, 330-pressure difference regulating valve, 340-check valve, 400-recovery unit, 410-gas-liquid separator, 420-regulating valve, 500-temperature control unit, 510-first temperature sensor, 520-second temperature sensor, 530-processor, 600-pipeline to be recovered. DETAILED DESCRIPTION

[0040] In order to make the objects, technical solutions and advantages of the present application clearer, the following will clearly and completely describe the technical solutions in the present application with reference to the drawings in the present application. Obviously, the described embodiments are only a part of embodiments of the present application, but not all embodiments of the present application. Based upon the embodiments in the present application, all other embodiments obtained by those ordinarily skilled in the art without creative efforts should fall into the scope of the present application.

[0041] In the description of the embodiments of the present application, it should be noted that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, and are only used to facilitate the description of the embodiments of the present application and simplify the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the embodiments of the present application. In addition, the terms "first", "second", "third" are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance.

[0042] In the description of the embodiments of the present application, it should be noted that unless otherwise explicitly specified and limited, the terms "connected", "connected" should be understood broadly, for example, can be fixedly connected, can be detachably connected, or integrally connected, can be mechanically connected, or electrically connected, can be directly connected, or indirectly connected through an intermediate medium. For those of ordinary skill in the art, the specific meaning of the above terms in the embodiments of the present application can be understood according to the specific circumstances.

[0043] In the embodiments of the present application, unless otherwise explicitly specified and limited, the first feature is "on" or "under" the second feature, which can be that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature "above", "above" and "above" the second feature can be that the first feature is directly above or obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "below" and "below" the second feature can be that the first feature is directly below or obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0044] In the description of the specification, the description of the terms "one embodiment", "some embodiments", "an example", "a specific example", or "some examples" and the like means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the application. In the specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any suitable manner in any one or more embodiments or examples. In addition, the person skilled in the art can combine and combine the different embodiments or examples described in the specification and the features of the different embodiments or examples without contradiction.

[0045] Figure 1 is the principle block diagram of the heat exchange medium recovery system provided by the application, as Figure 1 shown, the application provides a heat exchange medium recovery system, which comprises a separation unit 100, a cooling unit 200, a heating unit 300, a recovery unit 400 and a temperature control unit 500:

[0046] The input end of the separation unit 100 is communicated with the output end of the to-be-recovered pipeline 600 through a pipeline, the to-be-recovered pipeline 600 contains the heat exchange medium to be recovered, the output end of the heating unit 300 is connected with the input end of the to-be-recovered pipeline 600 through a pipeline, the heating unit 300 delivers the heated gas to the to-be-recovered pipeline 600, and the heated gas enters the input end of the separation unit 100 after passing through the to-be-recovered pipeline 600; The output end of the separation unit 100 is communicated with the cooling unit 200 and the heating unit 300 respectively through a pipeline, and the gas is delivered to the cooling unit 200 and the heating unit 300 respectively; The heating unit 300 heats the gas to a first preset temperature.

[0047] The cooling unit 200 is communicated with the recovery unit 400 through a pipeline, cools the gas input by the separation unit 100 to a second preset temperature, and delivers the cooled gas-liquid mixture to the recovery unit 400, and the recovery unit 400 recovers the heat exchange medium from the cooled gas-liquid mixture;

[0048] Wherein, the temperature control unit 500 is connected with the recovery unit 400 and the heating unit 300 respectively, for acquiring the first temperature information of the input end of the separation unit 100 and the second temperature information of the input end of the recovery unit 400, controlling the heating unit 300 according to the first temperature information, and controlling the recovery unit 400 according to the second temperature information;

[0049] The first preset temperature and the second preset temperature are determined based on the characteristics of the heat exchange medium.

[0050] Specifically, the heat exchange medium is determined according to the processing characteristics of the semiconductor wafer, the first preset temperature is a temperature range in which the heat exchange medium is converted from liquid to gas, the second preset temperature is a temperature range in which the gaseous heat exchange medium is converted into liquefied heat exchange medium, and the value range of the first preset temperature and the second preset temperature is related to the characteristics of the heat exchange medium.

[0051] Figure 8 is a principle block diagram of the temperature control unit provided by the application, as Figure 8 shown, the temperature control unit 500 comprises a first temperature sensor 510, a second temperature sensor 520 and a processor 530, the first temperature sensor 510 is arranged between the separation unit 100 and the pipe to be recovered 600, and is used for detecting the first temperature information, the second temperature sensor 520 is arranged between the cooling unit 200 and the recovery unit 400, and is used for detecting the second temperature information, and the processor 530 is used for controlling the heating unit 300 according to the first temperature information and controlling the recovery unit 400 according to the second temperature information.

[0052] Figure 2 is a vaporization pressure-temperature relationship curve diagram of the heat exchange medium provided by the application, the horizontal axis is temperature, and the vertical axis is vaporization pressure. Figure 2 As shown in the accompanying drawings, the vaporization pressure of the electronic fluorinated liquid has a significant downward trend between 60 DEG C and 0 DEG C, so the electronic fluorinated liquid can be heated to 60 DEG C first, a large amount of liquid of the electronic fluorinated liquid will volatilize into the gas in the pipe, then the gas is cooled to 0 DEG C, a large amount of fluorinated liquid will be condensed and separated out, and the condensed liquid can be collected to complete the recovery of the fluorinated liquid.

[0053] The application utilizes the heating unit 300 to heat the gas, then blows the high-temperature gas into the pipe to be recovered 600 with residual electronic fluorinated liquid, so that the liquid in the pipe to be recovered 600 is heated to above 60 DEG C, at this time, a large amount of electronic fluorinated liquid volatilizes into gas, after the steam in the pipe in this state is discharged from the pipe to be recovered 600, part of the steam enters the cooling unit 200 and is cooled to about 0 DEG C, during the gas cooling process, a large amount of electronic fluorinated liquid is condensed into liquid, the gas-liquid mixture enters the recovery unit 400 with the gas flow to be separated, the non-condensable gas is discharged to the external environment, the condensed electronic fluorinated liquid is left at the bottom of the container, and is collected and reused subsequently, and the other part of the steam enters the heating unit 300 to be recycled, thereby improving the recovery rate.

[0054] It can be understood that the application is provided with a separation unit 100, a cooling unit 200, a heating unit 300, a recovery unit 400 and a temperature control unit 500, according to the characteristics that the steam pressure of the heat exchange medium changes greatly at different temperatures, the recovery rate of the heat exchange medium in the device is greatly improved, and the debugging cost of the temperature control device is reduced.

[0055] Figure 3 is a structural schematic diagram of the heat exchange medium recovery system provided by the application, as shown in Figure 3 On the basis of the above embodiment, as an optional embodiment, the heating unit 300 comprises a fan 310 and a heater 320, the fan 310 is connected with the heater 320, the fan 310 is used for obtaining external air and gas delivered by the separation unit 100, and the external air and the gas are delivered to the inside of the heater 320, the heater 320 is used for heating the gas delivered by the fan, and the heated gas enters the to-be-recovered pipeline 600.

[0056] Optionally, the fan 310 is a centrifugal fan 310, and the heater 320 can be composed of a ceramic heating sheet or a metal heating wire.

[0057] It can be understood that, by arranging the fan 310 and the heater 320, heating can be performed, and the heated gas can be delivered to the to-be-recovered pipeline 600 by the fan 310, so that the recovery efficiency is improved, and the to-be-recovered pipeline 600 is also convenient to replace.

[0058] Figure 4 is one of the flowcharts for controlling the heating unit provided by the application; Figure 5 is another flowchart for controlling the heating unit provided by the application; as shown in Figure 4 and Figure 5 On the basis of the above embodiment, as an optional embodiment, the heating unit 300 is controlled according to the first temperature information, comprising:

[0059] S41, a first control instruction is obtained according to the difference between the first temperature information and the first preset temperature, wherein the first preset temperature is determined based on the characteristics of the heat exchange medium;

[0060] S42, the power of the heater 320 is adjusted according to the first control instruction.

[0061] In step S41, the processor 530 takes the difference between the first temperature information and the first preset temperature as an input value of a first PID (Proportion Integration Differentiation) algorithm, and the first PID algorithm outputs a first duty cycle (i.e., a first control instruction), the value of the first duty cycle ranges from 0 to 100, corresponding to full off and full on of the heater 320, and the first temperature information and the first duty cycle are negatively correlated. The heater is in a PMW debugging mode, and the PID output value is a duty cycle of 0-100, representing the time ratio of the power-on time to the power-off time in a unit period of time.

[0062] Specifically, if the temperature of the gas flowing out of the pipeline 600 to be recycled is lower than 60℃, the heating power of the heater 320 is increased to increase the temperature of the gas entering the pipeline 600 to be recycled, and thus the heat exchange amount of the circulating gas in the heating unit 300 is increased, so that more heat enters the pipeline 600 to be recycled, and the heat is transferred to the electronic fluorination liquid stored in the internal pipeline, so that the electronic fluorination liquid is volatilized and heated to 60℃ and discharged from the pipeline 600 to be recycled. Conversely, when the measurement value of the first temperature sensor 510 is higher than 60℃, the heating power of the heater 320 is reduced.

[0063] It can be understood that the first PID algorithm is used to ensure the temperature stability of the system and improve the recovery rate.

[0064] On the basis of the above embodiment, as an optional embodiment, the heating unit 300 further comprises a pressure difference regulating valve 330 arranged between the separation unit 100 and the fan 310, for regulating the gas pressure difference between the separation unit 100 and the heating unit 300.

[0065] It can be understood that the pressure difference regulating valve 330 can maintain a positive pressure difference before and after the valve, i.e., a positive pressure difference along the flow direction can be maintained in the second branch pipeline formed by the separation unit 100 and the cooling unit 200, so that the high-temperature gas passing through the first temperature sensor 510 continuously enters the cooling unit 200.

[0066] On the basis of the above embodiment, as an optional embodiment, the heating unit 300 further comprises a check valve 340 arranged at the input end of the fan 310, for allowing external air to enter the fan 310 when the pipeline pressure at the input end of the fan 310 is lower than the atmospheric pressure.

[0067] It can be understood that the check valve 340 in communication with the atmospheric environment is arranged at the inlet pipeline of the fan 310, and when the pipeline pressure at the inlet of the fan 310 is lower than the atmospheric pressure, the ambient air enters the circulating pipeline through the check valve 340, so that the pipeline pressure at the inlet of the fan 310 is kept not lower than the atmospheric pressure.

[0068] As an optional embodiment based on the above embodiment, the recovery unit 400 comprises a gas-liquid separator 410 and a regulating valve 420, an input end of the gas-liquid separator 410 is connected with the cooling unit 200 through a pipeline, and an output end of the gas-liquid separator 410 is connected with the regulating valve 420 through a pipeline, the gas-liquid separator 410 is used for recovering the heat exchange medium in a liquid state from the gas-liquid mixture, and the gas separated from the gas-liquid mixture is discharged through the regulating valve 420.

[0069] The circulating gas flowing out of the pipeline 600 to be recovered is divided into two branches after passing through the first temperature sensor 510, the gas in the first branch reenters the centrifugal fan 310 to continue circulation after passing through the differential pressure regulating valve 330, and the gas in the second branch enters the regulating valve 420 after passing through the cooling unit 200 heat release side pipeline, the second temperature sensor 520 and the gas-liquid separator 410, and is discharged into the atmosphere.

[0070] It can be understood that, by arranging the regulating valve, the application can ensure that the gas entering the cooling unit 200 heat release side can be sufficiently cooled, and the recovery rate is improved.

[0071] Figure 6 is one of the process flow diagrams for controlling the recovery unit provided by the application; Figure 7 is another process flow diagram for controlling the recovery unit provided by the application; as shown in Figure 6 and Figure 7 As an optional embodiment based on the above embodiment, the application comprises the following steps in the step of controlling the recovery unit 400 according to the second temperature information:

[0072] S61, obtaining a second control instruction according to a difference between the second temperature information and a second preset temperature, wherein the second preset temperature is determined based on the characteristics of the heat exchange medium;

[0073] S62, adjusting the opening degree of the regulating valve 420 according to the second control instruction.

[0074] In step S61, the processor 530 takes the difference between the second temperature information and the second preset temperature as an input value of a second PID (Proportion Integration Differentiation) algorithm, the value range of the output value of the second PID algorithm is 0-100, corresponding to the minimum and maximum opening degrees of the regulating valve, and the second temperature information and the second output value are negatively correlated. The regulating valve is in a continuous opening degree adjustment mode, the PID output is an opening degree ratio between 0-100%, and the angle value corresponding to the rotation of the valve core of the regulating valve.

[0075] Specifically, when the second temperature sensor 520 measures a value lower than 0℃, the second PID algorithm adjusts the regulating valve opening to increase, so that the second branch gas flow ratio is increased, and more circulating gas enters the cooling unit 200 to exchange heat and be cooled down; on the contrary, when the second temperature sensor 520 measures a value higher than 0℃, the second PID algorithm adjusts the regulating valve opening to decrease, so that the second branch gas flow ratio is decreased, and it is ensured that the gas entering the heat releasing side of the cooling unit 200 can be sufficiently cooled down.

[0076] It can be understood that, by the second PID algorithm, it is ensured that the gas entering the heat releasing side of the cooling unit 200 can be sufficiently cooled down, and the recovery rate is improved.

[0077] On the basis of the above embodiment, as an optional embodiment, the cooling unit 200 comprises a compressor 210, a condenser 220, a throttling device 230 and an evaporator 240, the compressor 210, the condenser 220, the throttling device 230 and the evaporator 240 form a refrigeration system through pipelines, the gas output by the separation unit 100 forms a gas-liquid mixture after heat exchange through the evaporator 240, and the gas-liquid mixture enters the recovery unit 400 through pipelines.

[0078] Specifically, the heat exchange side of the cooling unit 200 is the heat exchange side of the evaporator 240.

[0079] Optionally, the separation unit 100 is a three-way pipe, used for dividing the circulating gas into two branches.

[0080] In summary, the present application can quickly and effectively discharge the electronic fluorination liquid in the pipeline, and collect most of the electronic fluorination liquid in liquid state for reuse. The loss of electronic fluorination liquid in the debugging link can be reduced, and the debugging cost can be reduced.

[0081] The heat exchange medium recovery method provided by the present application is described below, and the heat exchange medium recovery method described below can be correspondingly referred to the heat exchange medium recovery system described above.

[0082] Figure 9 is a flow diagram of a heat exchange medium recovery method provided by the present application, as Figure 9 The present application further provides a heat exchange medium recovery method, which is realized based on the heat exchange medium recovery system, and the method comprises the following steps:

[0083] S910, based on the heating unit, heat-exchanged gas is delivered to the pipeline to be recovered, and the heat-exchanged gas enters the input end of the separation unit after passing through the pipeline to be recovered; wherein, the pipeline to be recovered contains heat exchange medium to be recovered;

[0084] S920, based on the separation unit, the gas output by the pipeline to be recycled is respectively transported to the cooling unit and the heating unit;

[0085] S930, based on the cooling unit, the gas input by the separation unit is cooled, and the cooled gas-liquid mixture is transported to the recycling unit;

[0086] S940, based on the recycling unit, the heat exchange medium is recovered from the cooled gas-liquid mixture;

[0087] The temperature control unit is connected with the recycling unit and the heating unit respectively, and is used to obtain first temperature information of the input end of the separation unit and second temperature information of the input end of the recycling unit, control the heating unit according to the first temperature information, and control the recycling unit according to the second temperature information.

[0088] In one embodiment, the heating unit comprises a fan and a heater, the fan is connected with the heater, the fan is used to obtain external air and gas transported by the separation unit, and the external air and gas are transported to the inside of the heater, the heater is used to heat the gas transported by the fan, and the heated gas enters the pipeline to be recycled.

[0089] In one embodiment, the control of the heating unit according to the first temperature information comprises:

[0090] According to the difference between the first temperature information and the first preset temperature, a first control instruction is obtained, wherein the first preset temperature is determined based on the characteristics of the heat exchange medium;

[0091] According to the first control instruction, the power of the heater is adjusted.

[0092] In one embodiment, the heating unit further comprises a differential pressure regulating valve, which is arranged between the separation unit and the fan, and is used to adjust the gas pressure difference between the separation unit and the heating unit.

[0093] In one embodiment, the heating unit further comprises a check valve, which is arranged at the input end of the fan, and is used to make external air enter the fan when the pipeline pressure at the input end of the fan is lower than the atmospheric pressure.

[0094] In one embodiment, the recycling unit comprises a gas-liquid separator and a regulating valve, the input end of the gas-liquid separator is connected with the cooling unit through a pipeline, and the output end is connected with the regulating valve through a pipeline, the gas-liquid separator is used to recover the heat exchange medium in liquid state from the gas-liquid mixture, and the gas separated from the gas-liquid mixture is discharged through the regulating valve.

[0095] In one embodiment, the controlling the recovery unit according to the second temperature information comprises:

[0096] According to the difference between the second temperature information and the second preset temperature, a second control instruction is obtained, wherein the first preset temperature is determined based on the characteristics of the heat exchange medium;

[0097] According to the second control instruction, the opening degree of the adjusting valve is adjusted.

[0098] In one embodiment, the cooling unit comprises a compressor, a condenser, a throttling device and an evaporator, the compressor, the condenser, the throttling device and the evaporator form a refrigeration system through pipelines, the gas output by the separation unit forms a gas-liquid mixture after heat exchange through the evaporator, and the gas-liquid mixture enters the recovery unit through pipelines.

[0099] In one embodiment, the separation unit is a three-way.

[0100] The heat exchange medium recovery system and the recovery method provided by the application are provided with a separation unit, a cooling unit, a heating unit, a recovery unit and a temperature control unit, according to the characteristics that the vapor pressure of the heat exchange medium changes greatly at different temperatures, the recovery rate of the heat exchange medium in the device is greatly improved, and the debugging cost of the temperature control device is reduced.

[0101] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the application, and not to limit them; although the application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement for part of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the application.

Claims

1. A heat medium recovery system characterized by comprising: The system comprises a separation unit, a cooling unit, a heating unit, a recovery unit and a temperature control unit: The input end of the separation unit is connected with the output end of a pipeline to be recovered through a pipeline, and the pipeline to be recovered contains liquid heat exchange medium to be recovered; the output end of the heating unit is connected with the input end of the pipeline to be recovered through a pipeline, and the heating unit delivers heated gas to the pipeline to be recovered; the gas after passing through the pipeline to be recovered enters the input end of the separation unit; the output end of the separation unit is connected with the cooling unit and the heating unit through pipelines respectively, and the gas is delivered to the cooling unit and the heating unit respectively; The cooling unit is connected with the recovery unit through a pipeline, and the gas input into the separation unit is cooled, and the cooled gas-liquid mixture is delivered to the recovery unit; the recovery unit recovers the heat exchange medium from the cooled gas-liquid mixture; The temperature control unit is connected with the recovery unit and the heating unit respectively, and is used to acquire first temperature information of the input end of the separation unit and second temperature information of the input end of the recovery unit, control the heating unit according to the first temperature information, and control the recovery unit according to the second temperature information.

2. The heat medium recovery system according to claim 1, wherein The heating unit comprises a fan and a heater, the fan is connected with the heater, the fan is used to acquire external air and gas delivered by the separation unit, and deliver the external air and the gas to the inside of the heater; the heater is used to heat the gas delivered by the fan, and the heated gas enters the pipeline to be recovered.

3. The heat medium recovery system according to claim 2, wherein The control of the heating unit according to the first temperature information comprises: According to the difference between the first temperature information and a first preset temperature, a first control instruction is obtained, wherein the first preset temperature is determined based on the characteristics of the heat exchange medium; The power of the heater is adjusted according to the first control instruction.

4. The heat medium recovery system according to claim 2, wherein The heating unit further comprises a differential pressure regulating valve, which is arranged between the separation unit and the fan, and is used to adjust the gas pressure difference between the separation unit and the heating unit.

5. The heat medium recovery system according to claim 2, wherein The heating unit further comprises a check valve, which is arranged at the input end of the fan, and is used to make the external air enter the fan when the pipeline pressure at the input end of the fan is lower than the atmospheric pressure.

6. The heat medium recovery system according to claim 1, wherein The recovery unit comprises a gas-liquid separator and a regulating valve, the input end of the gas-liquid separator is connected with the cooling unit through a pipeline, and the output end is connected with the regulating valve through a pipeline; the gas-liquid separator is used to recover the heat exchange medium in liquid state from the gas-liquid mixture, and the gas separated from the gas-liquid mixture is discharged through the regulating valve.

7. The heat medium recovery system according to claim 6, wherein The control of the recovery unit according to the second temperature information comprises: According to the difference between the second temperature information and a second preset temperature, a second control instruction is obtained, wherein the second preset temperature is determined based on the characteristics of the heat exchange medium; The opening degree of the regulating valve is adjusted according to the second control instruction.

8. The heat medium recovery system according to claim 1, wherein The cooling unit comprises a compressor, a condenser, a throttling device and an evaporator, the compressor, the condenser, the throttling device and the evaporator form a refrigeration system through pipes, the gas output by the separation unit forms a gas-liquid mixture after heat exchange through the evaporator, and the gas-liquid mixture enters the recovery unit through pipes.

9. The heat medium recovery system according to claim 1, wherein The separation unit is a tee joint.

10. A heat medium recovery method characterized by comprising: The heat exchange medium recovery system based on any one of claims 1-9 is realized, and the method comprises: Based on the heating unit, the heated gas is delivered to the pipeline to be recovered, and after passing through the pipeline to be recovered, the heated gas enters the input end of the separation unit; wherein the liquid heat exchange medium to be recovered exists in the pipeline to be recovered; Based on the separation unit, the gas output by the pipeline to be recovered is delivered to the cooling unit and the heating unit respectively; Based on the cooling unit, the gas input by the separation unit is cooled, and the cooled gas-liquid mixture is delivered to the recovery unit; Based on the recovery unit, the heat exchange medium is recovered from the cooled gas-liquid mixture; Wherein, the temperature control unit is connected with the recovery unit and the heating unit respectively, for obtaining the first temperature information of the input end of the separation unit and the second temperature information of the input end of the recovery unit, controlling the heating unit according to the first temperature information, and controlling the recovery unit according to the second temperature information.

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