Microphone assembly, packaging structure and electronic device

Abstract

The present application relates to a kind of microphone assembly, package structure and electronic equipment, wherein microphone assembly includes substrate, support, first membrane structure and second membrane structure, the extension plane of first membrane structure and second membrane structure is parallel with the thickness direction of substrate;First membrane structure constitutes first electrode, and second membrane structure constitutes second electrode, and variable capacitance is formed between first electrode and second electrode, the extension plane of first membrane structure and second membrane structure is parallel with the thickness direction of substrate, that is, first membrane structure and second membrane structure are vertically placed in the cavity of substrate, therefore, if the area of first membrane structure and second membrane structure is increased, it can only need to increase the length of first membrane structure and second membrane structure, without increasing the width of first membrane structure and second membrane structure, product performance is greatly improved, the volume of entire microphone structure increases very little, thereby saving production cost.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of microphones, in particular to a microphone assembly, a packaging structure and an electronic device. BACKGROUND

[0002] The current market capacitive microphone chip is mainly composed of a substrate, a first membrane structure and a back plate. The first membrane structure and the back plate form a parallel-plate capacitor. The first membrane structure deforms under the action of sound pressure, causing the distance between the first membrane structure and the second membrane structure to change, and the capacitance in the controller circuit to change. The controller chip detects the voltage change in the circuit to realize the detection of sound.

[0003] The existing capacitive microphone chip has the second membrane structure and the first membrane structure parallel to the substrate. In order to improve the sensitivity and signal-to-noise ratio of the product, the area of the first membrane structure needs to be increased to increase the capacitance change in the circuit. The increase of the area of the first membrane structure and the second membrane structure will cause the length and width of the microphone structure to increase, thereby increasing the volume of the finished product and increasing the cost. The capacitive microphone with the first membrane structure and the back plate parallel to the substrate needs to be laid flat in array when improving the performance of the product, which increases the volume of the product and increases the cost of the product. SUMMARY

[0004] The microphone assembly, the packaging structure and the electronic device provided by the present application have the extension surfaces of the first membrane structure and the second membrane structure parallel to the thickness direction of the substrate, that is, the first membrane structure and the second membrane structure are vertically placed in the cavity of the substrate. Therefore, if the area of the first membrane structure and the second membrane structure is to be increased, only the length of the first membrane structure and the second membrane structure needs to be increased, without the need to increase the width of the first membrane structure and the second membrane structure, thereby greatly improving the performance of the product. Since the thickness of the first membrane structure and the second membrane structure in the microphone assembly is usually small, multiple arrays can be arranged with very small increase in width when arraying, so that the volume of the entire microphone structure increases very little, thereby saving the production cost. The specific scheme is as follows:

[0005] In a first aspect, a microphone assembly is provided, comprising a substrate, a support, a first membrane structure and a second membrane structure, the support being used to support the first membrane structure and the second membrane structure.

[0006] The extension surfaces of the first membrane structure and the second membrane structure are parallel to the thickness direction of the substrate. The first membrane structure forms a first electrode, the second membrane structure forms a second electrode, and a variable capacitor is formed between the first electrode and the second electrode.

[0007] Further, the support member comprises a first support member and a second support member fixedly connected with the substrate, the first membrane structure and the second membrane structure are located between the first support member and the second support member, the first membrane structure is a vibrating membrane, and the second membrane structure is a stationary membrane or a vibrating membrane, the middle part of the substrate has a cavity, the first support member at least partially encloses one side of the cavity, and the second support member is located in the cavity.

[0008] In the thickness direction of the substrate, one end of the first membrane structure and one end of the second membrane structure are fixedly connected with the first support member respectively, and the other end of the first membrane structure and the other end of the second membrane structure are fixedly connected with the second support member respectively, and the first membrane structure, the second membrane structure, the first support member and the second support member together divide the cavity into at least a vibrating cavity and a back cavity.

[0009] Further, the cavity has two first inner surfaces perpendicular to the first membrane structure and the second membrane structure, and two second inner surfaces parallel to the first membrane structure and the second membrane structure, two sides of the second support member are fixedly connected with the two first inner surfaces respectively, and the other two sides are suspended, wherein the first membrane structure, the second membrane structure, part of the two first inner surfaces, and the second support member together form the vibrating cavity, and the first support member does not enclose the vibrating cavity.

[0010] Further, the cavity has two first inner surfaces perpendicular to the first membrane structure and the second membrane structure, and two second inner surfaces parallel to the first membrane structure and the second membrane structure, three sides of the second support member are fixedly connected with the two first inner surfaces and the second inner surface adjacent to the second membrane structure respectively, and the other side is suspended;

[0011] Wherein, the first membrane structure, the second membrane structure, part of the two first inner surfaces, and the second support member together form the vibrating cavity, the second membrane structure, the second support member, another part of the two first inner surfaces, and the second inner surface adjacent to the second membrane structure together form a back cavity, the back cavity is connected with the vibrating cavity through the hollow area on the second membrane structure, and the first support member does not enclose the back cavity, encloses the vibrating cavity, or the first support member does not enclose the back cavity and the vibrating cavity.

[0012] Furthermore, the cavity has two first inner surfaces perpendicular to the first membrane structure and the second membrane structure, and two second inner surfaces parallel to the first membrane structure and the second membrane structure. Three sides of the second support member are fixedly connected to the two first inner surfaces and the second inner surface adjacent to the first membrane structure, respectively, while the other side is suspended.

[0013] The first membrane structure, the second membrane structure, a portion of the two first inner surfaces, and the second support member together form the vibration cavity. The first membrane structure, the second support member, another portion of the two first inner surfaces, and the second inner surface adjacent to the first membrane structure together form the rear cavity. The rear cavity and the vibration cavity are connected through a perforated area on the second membrane structure. The first support member does not close the rear cavity or the vibration cavity.

[0014] Furthermore, the cavity has two first inner surfaces perpendicular to the first membrane structure and the second membrane structure, and two second inner surfaces parallel to the first membrane structure and the second membrane structure. Three sides of the second support member are fixedly connected to the two first inner surfaces and the second inner surface adjacent to the first membrane structure, respectively, while the other side is suspended.

[0015] The first membrane structure, the second membrane structure, a portion of the two first inner surfaces, and the second support member together form the vibration cavity. The first membrane structure, the second support member, another portion of the two first inner surfaces, and the second inner surface adjacent to the first membrane structure together form the rear cavity. The rear cavity and the vibration cavity are connected through a perforated area on the second membrane structure. The first support member does not enclose the rear cavity and the vibration cavity.

[0016] Furthermore, there are gaps between the first membrane structure and the second membrane structure and the first inner surface of the substrate.

[0017] Furthermore, the hollowed-out areas on the second membrane structure are circular and / or rectangular in shape.

[0018] Furthermore, at least one first venting channel is provided on the area of ​​the first support member that encloses the back cavity.

[0019] Furthermore, when the first support member closes the vibration cavity, at least one through hole is provided in the area of ​​the first support member that closes the vibration cavity.

[0020] Furthermore, the first venting channel is a vent hole and / or a venting groove that penetrates the first support member and has a non-closed profile.

[0021] Further, the first support has a vibration part corresponding to the air release groove, and the vibration part is provided with a reinforcing rib at the root.

[0022] Further, at least one second air release channel is formed on the first membrane structure.

[0023] Further, the second air release channel is an air release hole, and / or an annular or rectangular air release groove penetrating the first membrane structure.

[0024] Further, the first membrane structure and / or the second membrane structure is provided with an anti-sticking structure to prevent the first membrane structure from sticking to the second membrane structure.

[0025] Further, the anti-sticking structure is a protruding structure provided on the side of the first membrane structure and / or the second membrane structure facing the vibration cavity, or the anti-sticking structure is an anti-sticking coating coated on the surface of the side of the first membrane structure and / or the second membrane structure facing the vibration cavity.

[0026] Further, at least part of the first membrane structure is a corrugated membrane, wherein the corrugation of the corrugated membrane is parallel to the second support.

[0027] Further, the effective area of the second membrane structure is smaller than the effective area of the first membrane structure.

[0028] Further, the first membrane structure comprises a first membrane structure body and bending structures at both ends of the first membrane structure body.

[0029] Further, the hollowed-out area on the second membrane structure comprises a plurality of rectangular sub-areas, and the plurality of rectangular sub-areas are equal in size and equally spaced, or the plurality of rectangular sub-areas are unequal in size and / or unequally spaced.

[0030] Further, the hollowed-out area on the second membrane structure comprises a plurality of circular sub-areas, and the plurality of circular sub-areas are equal in size and uniformly distributed, or the plurality of circular sub-areas are unequal in size and / or non-uniformly distributed.

[0031] Further, the assembly further comprises a first electrode lead-out path electrically connected to the first membrane structure and a second electrode lead-out path electrically connected to the second membrane structure.

[0032] The first electrode lead-out path is electrically connected to the first membrane structure through one electrode lead-out point.

[0033] The second electrode lead-out path is electrically connected to the second membrane structure through one electrode lead-out point or a plurality of arrayed electrode lead-out points.

[0034] Further, the assembly further comprises a dustproof structure suspended above the first support and fixedly connected with the first support through a support structure, the dustproof structure covering the vibration cavity and / or the back cavity.

[0035] Further, at least one third air release channel is arranged on the region of the substrate participating in forming the vibration cavity.

[0036] In a second aspect, a packaging structure is provided, comprising a shell, a substrate and the microphone assembly as described above, wherein the microphone assembly is located in a cavity composed of the shell and the substrate.

[0037] The substrate is provided with an acoustic inlet hole for acoustic waves to enter the back cavity of the microphone assembly.

[0038] The ratio of length to width of the shell is greater than 3.

[0039] In a third aspect, a packaging structure is provided, comprising a shell, a substrate and the microphone assembly as described above, wherein the microphone assembly is located in a cavity composed of the shell and the substrate.

[0040] The upper surface of the shell is provided with an acoustic inlet hole for acoustic waves to enter the back cavity of the microphone assembly.

[0041] The ratio of length to width of the shell is greater than 3.

[0042] In a fourth aspect, a microphone assembly is provided, comprising a substrate, a first support and a plurality of second supports fixedly connected with the substrate, and a plurality of first membrane structures and second membrane structure combinations respectively located between the first support and each of the second supports, the middle part of the substrate having a cavity, the first support at least partially enclosing one side of the cavity, and each of the second supports being located in the cavity.

[0043] For each of the first membrane structure and the second membrane structure combination, in the thickness direction of the substrate, one end of the first membrane structure and the second membrane structure in the combination is respectively fixedly connected with the first support, and the other end of the first membrane structure and the second membrane structure in the combination is respectively fixedly connected with the corresponding second support of the combination, the first membrane structure and the second membrane structure in the combination, the first support, and the corresponding second support of the combination together separating the cavity into at least the corresponding vibration cavity and the back cavity of the combination.

[0044] Wherein, the vibration cavities corresponding to all the first membrane structure and the second membrane structure combinations are not communicated with each other, and all the first membrane structure and the second membrane structure combinations correspond to the same back cavity.

[0045] In a fifth aspect, an electronic device is provided, comprising the microphone assembly as described above.

[0046] In a sixth aspect, an electronic device is provided, comprising the packaging structure as described above.

[0047] In the microphone assembly, the packaging structure and the electronic device, the extension surfaces of the first membrane structure and the second membrane structure are parallel to the thickness direction of the substrate, that is, the first membrane structure and the second membrane structure are vertically placed in the cavity of the substrate, thus, if the area of the first membrane structure and the second membrane structure is to be increased, only the length of the first membrane structure and the second membrane structure needs to be increased, without increasing the width of the first membrane structure and the second membrane structure, which greatly improves the product performance; since the thickness of the first membrane structure and the second membrane structure in the microphone assembly is usually small, when array arrangement is performed, a plurality of arrays can be arranged with very small increase in width, thus, the volume of the entire microphone structure increases very little, thereby saving the production cost. The microphone assembly in the present application can have a high aspect ratio and can be applied to products with a high aspect ratio. Similarly, the microphone assembly in the present application can also be applied to products with a low aspect ratio, thus, the application range of the microphone assembly is greatly expanded. Further, in the present application, since the first membrane structure and the second membrane structure are vertically placed in the cavity of the substrate, when particles enter the microphone assembly, they will be deposited on the second support below the vibration cavity, compared with the structure in which the first membrane structure and the second membrane structure are parallel to the substrate, the particles are deposited on the first membrane structure or the second membrane structure, which is easy to cause product failure, the microphone assembly in the present application has good dustproof ability and thus has high reliability. BRIEF DESCRIPTION OF DRAWINGS

[0048] The technical solutions and other beneficial effects of the present application will become apparent from the following detailed description of specific embodiments of the present application, taken in conjunction with the accompanying drawings.

[0049] Figure 1 is a sectional view of the microphone assembly in Embodiment One of the present application in the direction perpendicular to the second membrane structure and the first membrane structure;

[0050] Figure 2A is a perspective view of the microphone assembly in Embodiment One of the present application;

[0051] Figure 2B is a sectional view of the microphone assembly in Embodiment One of the present application made of a second substrate in the direction perpendicular to the second membrane structure and the first membrane structure;

[0052] Figures 3A-3D is a schematic view of the microphone assembly in Embodiment One of the present application with a first air release channel arranged on the first support;

[0053] Figures 4A-4C is a schematic diagram of a second air vent on the first membrane structure in embodiment one of the present application;

[0054] Figures 5A-5D is a schematic diagram of the anti-sticking structure in embodiment one of the present application;

[0055] Figure 6 is a schematic diagram of the corrugated membrane in embodiment one of the present application;

[0056] Figure 7 is a schematic diagram of the first membrane structure partially in a bent structure in embodiment one of the present application;

[0057] Figure 8 is a schematic diagram of the connection between the first membrane structure, the second membrane structure and the electrode path in embodiment one of the present application;

[0058] Figures 9A-9B is a schematic diagram of the dustproof structure in embodiment one of the present application;

[0059] Figure 10 is a schematic diagram of a third air vent on the substrate in embodiment one of the present application;

[0060] Figure 11 is a cross-sectional view of the microphone assembly in embodiment two of the present application in a direction perpendicular to the second membrane structure and the first membrane structure;

[0061] Figures 12A-12D is a schematic diagram of different forms of the hollowed region in embodiment two of the present application;

[0062] Figure 13 is a schematic diagram of the microphone assembly in embodiment three of the present application provided with a through hole at a position where the first support member closes the vibration cavity;

[0063] Figure 14 is a schematic diagram of the microphone assembly in embodiment four of the present application;

[0064] Figures 15A-15B is a cross-sectional view of the microphone assembly in embodiment four of the present application in a direction perpendicular to the second membrane structure and the first membrane structure;

[0065] Figure 16 is a cross-sectional view of the microphone assembly in embodiment five of the present application in a direction perpendicular to the second membrane structure and the first membrane structure

[0066] Figure 17 is a schematic diagram of the packaging structure in embodiment six of the present application;

[0067] Figure 18 is a schematic diagram of the packaging structure in embodiment seven of the present application;

[0068] Figure 19 is a schematic view of a microphone assembly in embodiment eight of the present application. DETAILED DESCRIPTION

[0069] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by a person skilled in the art without creative work fall within the protection scope of the present application.

[0070] In the microphone assembly, packaging structure and electronic device in the present application, the extension surfaces of the first membrane structure and the second membrane structure are parallel to the thickness direction of the substrate, that is, the first membrane structure and the second membrane structure are vertically placed in the cavity of the substrate, therefore, if the area of the first membrane structure and the second membrane structure is to be increased, only the length of the first membrane structure and the second membrane structure needs to be increased, without increasing the width of the first membrane structure and the second membrane structure, which greatly improves the product performance. Since the thickness of the first membrane structure and the second membrane structure in the microphone assembly is usually small, when array arrangement is performed, a plurality of arrays can be arranged with very small increase in width, so that the volume of the entire microphone structure increases very little, thereby saving the production cost. The microphone assembly in the present application can have a high aspect ratio, and can be applied to products with a high aspect ratio. Similarly, the microphone assembly in the present application can also be applied to products with a low aspect ratio, therefore, the present application greatly expands the application range of the microphone assembly. Further, in the present application, since the first membrane structure and the second membrane structure are vertically placed in the cavity of the substrate, when particles enter the microphone assembly, they will be deposited on the second support below the vibration cavity, compared with the structure in which the first membrane structure and the second membrane structure are parallel to the substrate, the particles are deposited on the first membrane structure or the second membrane structure, which is easy to cause product failure, the microphone assembly in the present application has good anti-interference ability.

[0071] The microphone assembly, packaging structure and electronic device in the present application will be further described in detail below with reference to specific embodiments.

[0072] Embodiment one

[0073] In combination Figure 1 And Figure 2A A microphone assembly 100 provided in the present embodiment includes a substrate 101, a support, a first membrane structure 104 and a second membrane structure 105, the support is used for supporting the first membrane structure 104 and the second membrane structure 105;

[0074] The extension planes of the first membrane structure 104 and the second membrane structure 105 are parallel to the thickness direction of the substrate 101; the first membrane structure 104 constitutes a first electrode, and the second membrane structure 105 constitutes a second electrode, and a variable capacitance is formed between the first electrode and the second electrode.

[0075] In the embodiment, the extension planes of the first membrane structure 104 and the second membrane structure 105 are parallel to the thickness direction of the substrate 101, that is, the first membrane structure 104 and the second membrane structure 105 are arranged perpendicularly to the substrate 101.

[0076] Further, the support includes a first support 102 and a second support 103 fixedly connected with the substrate 101, and the first membrane structure 104 and the second membrane structure 105 are located between the first support 102 and the second support 103; the first membrane structure 104 is a vibrating membrane, and the second membrane structure 105 is a static membrane or a vibrating membrane; the static membrane can be a back plate, which can be a single-layer or multi-layer membrane structure; the middle part of the substrate has a cavity, the first support 102 at least partially seals one side of the cavity, and the second support 103 is located in the cavity.

[0077] In the thickness direction of the substrate 101, one end of the first membrane structure 104 and one end of the second membrane structure 105 are fixedly connected with the first support 102 respectively, and the other end of the first membrane structure 104 and the other end of the second membrane structure 105 are fixedly connected with the second support 103 respectively; the first membrane structure 104, the second membrane structure 105, the first support 102 and the second support 103 together divide the cavity into at least a vibrating cavity 106 and a back cavity 107.

[0078] Further, the cavity has two first inner surfaces 108 perpendicular to the first membrane structure 104 and the second membrane structure 105, and two second inner surfaces 109 parallel to the first membrane structure 104 and the second membrane structure 105; two sides of the second support 103 are fixedly connected with the two first inner surfaces 108 respectively, and the other two sides are suspended; wherein, the first membrane structure 104, the second membrane structure 105, part of the two first inner surfaces 108, and the second support 103 together form the vibrating cavity 106, and the first support 102 does not seal the vibrating cavity 106.

[0079] In the embodiment, the first membrane structure 104, the second membrane structure 105, the first support 102 and the second support 103 together divide the cavity into the vibrating cavity 106 and the back cavity 107; the vibrating cavity 106 and the back cavity 107 are both in communication with the external air pressure.

[0080] The first support 102 can partially cover the vibrating cavity 106 or can not cover the vibrating cavity 106 at all, as long as the vibrating cavity 106 is not sealed. Figure 1As shown, the first support 102 does not cover the vibration cavity 106 at all.

[0081] In Figure 1 In the microphone assembly shown, the second membrane structure 105 can be a vibrating membrane or a stationary membrane. As an example, when the second membrane structure 105 is a stationary membrane, the sound wave transmitted from the back cavity 107 of the microphone assembly 100 acts on the first membrane structure 104, causing the first membrane structure 104 to deform towards the second membrane structure 105, thereby reducing the distance between the electrodes and increasing the capacitance value of the variable capacitor, which can convert the sound wave signal into an electric signal. Further, in this embodiment, since the first support 102 does not enclose the vibration cavity 106, the resistance to the vibration of the first membrane structure 104 is reduced, improving the performance of the microphone assembly. As an example, when the second membrane structure 105 is a vibrating membrane, the sound wave transmitted from the back cavity 107 of the microphone assembly 100 acts on the first membrane structure 104 and the second membrane structure 105, causing both the first membrane structure 104 and the second membrane structure 105 to deform towards each other.

[0082] The first support 102 and the second support 103 can both be insulating layers.

[0083] Further, in this embodiment, as Figure 1 As shown, the structure of the substrate 101 is related to the processing technology. The substrate 101 as a whole can be a whole or a laminated structure. As shown, the substrate 101 includes a lower substrate 1011, an upper substrate 1012 and an insulating layer 1013. Figure 2B

[0084] Further, the region of the first support 102 enclosing the back cavity 107 is provided with at least one first air release channel 111.

[0085] Further, the first air release channel 111 is an air release hole and / or an air release groove penetrating the first support 102 and having a non-enclosed contour.

[0086] In order to reduce the sound pressure acting on the first membrane structure 104 and avoid the rupture of the first membrane structure 104, the region of the first support 102 enclosing the back cavity 107 is provided with the first air release channel 111, i.e. the region corresponding to the back cavity 107 is provided with the first air release channel 111. The first air release channel 111 can have various forms.

[0087] ​Exemplarily, the first air release passage 111 is in the form of an air release hole, which can be in various shapes such as circular, rectangular, square, triangular, diamond, etc., and when multiple air release holes are provided, the multiple air release holes can be the same or different, where the same means that the shape and size are the same, thus, when the multiple air release holes are different, they can be different in shape or size, or both in shape and size; the arrangement of the multiple air release holes can be uniform or non-uniform on the first support 102, for example, concentrated in a certain area, as shown in Figure 3A which shows that a larger circular air release hole is surrounded by smaller circular air release holes to form an air release structure, and the air release structure is uniformly distributed on the first support 102.

[0088] Exemplarily, the first air release passage 111 is in the form of an air release groove penetrating through the first support 102 and having a non-closed contour, which can be in various shapes such as fan-shaped, non-closed rectangular, etc., and when multiple air release grooves are provided, the multiple air release grooves can be the same or different, where the same means that the shape and size are the same, thus, when the multiple air release grooves are different, they can be different in shape or size, or both in shape and size; the arrangement of the multiple air release grooves can be uniform or non-uniform on the first support 102, for example, concentrated in a certain area, as shown in Figure 3B which shows that the multiple air release grooves are uniformly arranged on the first support 102 and have the same size and shape.

[0089] Exemplarily, the first air release passage 111 can also be a combination of an air release hole and an air release groove with a non-closed contour.

[0090] Further, the first support 102 has a vibration part 112 corresponding to the air release groove, and the root of the vibration part 112 is provided with a reinforcing rib 113.

[0091] When the first air release passage 111 is an air release groove, the first support 102 has a vibration part 112 corresponding to the air release groove, and the angle between the vibration part 112 and the air release groove is changed by the up-down vibration of the vibration part 112, thereby changing the air release amount, and the air release groove and the vibration part 112 can be in various forms, exemplarily, as shown in Figure 3C and Figure 3D which shows that the air release groove is fan-shaped. In order to further improve the strength of the vibration part 112, the root of the vibration part 112 is provided with a reinforcing rib 113, which can be provided on the side of the first support 102 facing the back cavity 107 or on the side of the first support 102 away from the back cavity 107.

[0092] Further, at least one second air release passage 114 is provided on the first membrane structure 104.

[0093] Further, the second air release channel 114 is an air release hole, and / or an air release groove with a rectangular or non-closed contour through the first membrane structure 104.

[0094] To avoid damage to the first membrane structure 104 when the volume is large, at least one second air release channel is provided on the first membrane structure 104.

[0095] Exemplarily, the second air release channel 114 is in the form of an air release hole, which can be circular, rectangular, square, triangular, rhombic, etc. Figure 4A As shown, the second air release channel 114 is an air release hole; and when multiple air release holes are provided, the multiple air release holes can be the same or different, where the same means that the shape and size are the same, so that the multiple air release holes are not the same, which can be different in shape, different in size, or different in both size and shape; the arrangement of the multiple air release holes can be uniform on the first membrane structure 104, or non-uniform.

[0096] Exemplarily, the second air release channel 114 is an air release groove with a rectangular or non-closed contour through the first membrane structure 104, as shown in Figure 4B As shown, the second air release channel 114 is a rectangular air release groove, further, the rectangular air release groove can be provided in multiple ways, which can be perpendicular to the second support 103, or parallel to the second support 103, Figure 4B only the case of being perpendicular to the second support 103 is shown. The shape of the air release groove can also be a non-closed air release groove, such as Figure 4C which is a sector, and of course can also be a non-closed rectangle, etc. When multiple air release grooves are provided, the multiple air release grooves can be the same or different, where the same means that the shape and size are the same, so that the multiple air release grooves are not the same, which can be different in shape, different in size, or different in both size and shape; the arrangement of the multiple air release grooves can be uniform on the first membrane structure 104, or non-uniform on the first membrane structure 104, further, when the second air release channel 114 is a sector, a reinforcing portion can also be provided on the vibrating portion 112 corresponding to the sector of the second air release channel 114.

[0097] Exemplarily, the second air release channel 114 can also be a combination of an air release hole and an air release groove with a rectangular or non-closed contour.

[0098] Further, the first membrane structure 104 and / or the second membrane structure 105 is provided with an anti-sticking structure 115 to prevent the first membrane structure 104 and the second membrane structure 105 from sticking.

[0099] Further, the anti-sticking structure 115 is a protruding structure provided on the side of the first membrane structure 104 and / or the second membrane structure 105 facing the vibration cavity 106, or the anti-sticking structure is an anti-sticking coating coated on the side surface of the first membrane structure 104 and / or the second membrane structure 105 facing the vibration cavity 106.

[0100] In order to prevent the first membrane structure 104 from being bonded with the second membrane structure 105 during deformation, the first membrane structure 104 and / or the second membrane structure 105 is provided with an anti-sticking structure 115 for preventing the first membrane structure 104 from being bonded with the second membrane structure 105. The anti-sticking structure 115 can be provided in various positions, for example, on the side of the first membrane structure 104 facing the vibration cavity 106, for example, on the side of the second membrane structure 105 facing the vibration cavity 106, for example, on the side of both the first membrane structure 104 and the second membrane structure 105 facing the vibration cavity 106. Further, the anti-sticking structure 115 can have various shapes, which generally include a protruding structure and an anti-sticking coating, wherein the protruding structure can have various types, for example, a corrugated protruding structure, as shown in FIG. 1A, a dot-shaped protruding structure, as shown in FIG. 1B, and the like. Figure 5A As shown in FIG. 1A, the corrugations in the corrugated protruding structure can be perpendicular to the second support 103, and the anti-sticking structure 115 is provided on the side of both the first membrane structure 104 and the second membrane structure 105 facing the vibration cavity 106, as shown in FIG. 1A. Figure 5B As shown in FIG. 1B, the corrugations in the corrugated protruding structure can be parallel to the second support 103, and the anti-sticking structure 115 is provided on the side of both the first membrane structure 104 and the second membrane structure 105 facing the vibration cavity 106; for example, the anti-sticking structure 115 can also be a dot-shaped protruding structure, as shown in FIG. 1B. Figure 5C As shown in FIG. 1B, the corrugations in the corrugated protruding structure can be parallel to the second support 103, and the anti-sticking structure 115 is provided on the side of both the first membrane structure 104 and the second membrane structure 105 facing the vibration cavity 106; for example, the anti-sticking structure 115 can also be a dot-shaped protruding structure, as shown in FIG. 1B. Figure 5D As shown in FIG. 1B, the corrugations in the corrugated protruding structure can be parallel to the second support 103, and the anti-sticking structure 115 is provided on the side of both the first membrane structure 104 and the second membrane structure 105 facing the vibration cavity 106; for example, the anti-sticking structure 115 can also be a dot-shaped protruding structure, as shown in FIG. 1B.

[0101] Further, when the anti-sticking structure 115 is an anti-sticking coating, the anti-sticking structure 115 is also provided on the surface of the first support 102 corresponding to the first membrane structure 104 and the second membrane structure 105.

[0102] Further, at least part of the first membrane structure 104 is a corrugated membrane 116, wherein the corrugations of the corrugated membrane 116 are parallel to the second support 103.

[0103] In the embodiment, the corrugated film 116 can improve the stress of the first film structure 104 and improve the sensitivity of the product. The corrugated film 116 can be arranged in various positions. For example, the corrugated film 116 can be arranged on the first film structure 104 near one end of the first support 102 or the second support 103. Alternatively, the corrugated film 116 can be arranged on the first film structure 104 near one end of the first support 102 and near one end of the second support 103. Alternatively, the corrugated film 116 can be arranged on the first film structure 104 at the middle region of the first film structure 104. The corrugated film 116 can be arranged in various ways. For example, as shown in FIG. 12, the corrugated film 116 is arranged on the first film structure 104 near one end of the first support 102 and near one end of the second support 103. The corrugated film 116 is parallel to the second support 103. Figure 6

[0104] Further, the first film structure 104 includes a first film structure body 1041 and a bending structure 1042 arranged at both ends of the first film structure body 1041.

[0105] In the embodiment, the bending structure 1042 is arranged at both ends of the first film structure 104 near the base 101. The bending structure 1042 is fixedly connected to the first support 102. The bending structure 1042 can have various shapes. For example, the bending structure 1042 can have an L shape. Alternatively, as shown in FIG. 13, the bending structure 1042 can have an S shape. The bending structure 1042 arranged at both ends of the first film structure 104 can release the stress of the first film structure 104 and improve the performance of the product. The bending structure 1042 can be deflated at the bending position of the bending structure 1042, thereby improving the mechanical reliability of the product. Figure 7

[0106] Further, as shown in FIG. 14, a gap is formed between the first film structure 104 and the second film structure 105 and the first inner surface 108 of the base 101. That is, the first film structure 104 and the second film structure 105 are not in contact with the base 101, thereby improving the electrical insulation and the mechanical reliability. Figure 7

[0107] Further, the microphone assembly 100 further includes a first electrode lead-out path 117 electrically connected to the first film structure 104 and a second electrode lead-out path 118 electrically connected to the second film structure 105.

[0108] The first electrode lead-out path 117 is electrically connected to the first film structure 104 through an electrode lead-out point 119.

[0109] The second electrode lead-out path 118 is electrically connected to the second film structure 105 through an electrode lead-out point 119 or a plurality of arrayed electrode lead-out points 119. ​​​

[0110] In the embodiment, the second electrode lead-out passage 118 is connected to the second membrane structure 105 in two ways, one is through an electrode lead-out point 119 to be electrically connected to the second membrane structure 105, and the other is through a plurality of arrayed electrode lead-out points 119 to be electrically connected to the second membrane structure 105. The arrayed form of the plurality of electrode lead-out points 119 can improve the conduction rate of the microphone assembly and reduce the product failure rate.

[0111] Exemplarily, as shown in Figure 8 , the first electrode lead-out passage 117 is electrically connected to the first membrane structure 104 through an electrode lead-out point 119, and the second electrode lead-out passage 118 is electrically connected to the second membrane structure 105 through a plurality of electrode points.

[0112] Further, the microphone assembly 100 further comprises a dustproof structure 121 suspended above the first support 102 and fixedly connected to the first support 102 through a support structure 120, and the dustproof structure 121 covers the vibration cavity 106.

[0113] In order to further play a dustproof effect and reduce the product failure rate, as shown in Figure 9A , the dustproof structure 121 is arranged above the first support 102, and the dustproof structure 121 covers the vibration cavity 106 to prevent impurities from entering the vibration cavity 106. The support structure 120 can be a plurality of support members arranged at the edge of the dustproof structure 121, and in order to play a good ventilation effect, as shown in Figure 9B , at least one ventilation hole 1211 can be formed on the dustproof structure 121, and the shape of the ventilation hole 1211 can be various, such as circular, rectangular, triangular, etc. When a plurality of ventilation holes 1211 are arranged, the shapes of the ventilation holes 1211 can be the same or different, and the ventilation holes 1211 can be uniformly distributed or non-uniformly distributed.

[0114] Further, at least one third air release passage 122 is arranged on the region of the substrate 101 participating in forming the vibration cavity 106.

[0115] As shown in Figure 10 , by opening the third air release passage 122 on the substrate 101, the damping of the sound pressure in the vibration cavity 106 is reduced, the noise of the product is reduced, and the signal-to-noise ratio is improved. The structure of the third air release passage 122 can be an air release hole or an air release groove, and the shape and distribution of the air release hole and the air release groove can be referred to the description of the first air release passage 111 and the second air release passage 114, which will not be repeated here.

[0116] Embodiment Two

[0117] As shown in Figure 11As shown, this is the microphone assembly 100 provided in this embodiment. In this microphone assembly 100, unlike the microphone assembly 100 in Embodiment 1, the second membrane structure 105 is a stationary membrane. The cavity has two first inner surfaces 108 perpendicular to the first membrane structure 104 and the second membrane structure 105, and two second inner surfaces 109 parallel to the first membrane structure 104 and the second membrane structure 105. The three sides of the second support member 103 are fixedly connected to the two first inner surfaces 108 and the second inner surface 109 adjacent to the second membrane structure 105, respectively, and the other side is suspended.

[0118] The first membrane structure 104, the second membrane structure 105, a portion of the two first inner surfaces 108, and the second support member 103 together form the vibration cavity 106. The second membrane structure 105, the second support member 103, another portion of the two first inner surfaces 108, and the second inner surface 109 adjacent to the second membrane structure 105 together form the rear cavity 123. The rear cavity 123 and the vibration cavity 106 are connected through the hollow area 110 on the second membrane structure 105. The first support member 102 does not close the rear cavity 123 but closes the vibration cavity 106.

[0119] It is understood that the non-enclosed nature described in this embodiment can mean that the first support member 102 partially covers the rear cavity 123, or it can mean that the rear cavity 123 is not covered at all, as long as the non-enclosed effect is achieved.

[0120] In this embodiment, the rear cavity 123 serves two purposes. On the one hand, when the sound wave enters from the back cavity 107 and acts on the first membrane structure 104, the air in the vibration cavity 106 can enter the rear cavity 123 through the hollow area 110. At this time, the rear cavity 123 acts as a vent. On the other hand, the sound wave can also enter from the rear cavity 123, pass through the hollow area 110, and act on the first membrane structure 104. At this time, the rear cavity 123 acts as a sound intake.

[0121] Furthermore, the effective area of ​​the second membrane structure 105 is smaller than the effective area of ​​the first membrane structure 104.

[0122] In this embodiment, the facing area of ​​the second membrane structure 105 and the first membrane structure 104 is reduced, thereby reducing parasitic capacitance and improving product performance. The effective area of ​​the second membrane structure 105 is smaller than the effective area of ​​the first membrane structure 104. Furthermore, to achieve this effect, the size of the hollow area of ​​the second membrane structure 105 can be adjusted.

[0123] Furthermore, the hollowed-out area 110 on the second membrane structure 105 includes multiple rectangular sub-regions, which are equal in size and equally spaced, or the multiple rectangular sub-regions are unequal in size and / or not equally spaced.

[0124] Furthermore, the hollowed-out area 110 on the second membrane structure 105 includes multiple circular sub-regions, which are of equal size and uniformly distributed, or the multiple circular sub-regions are of unequal size and / or non-uniformly distributed.

[0125] The hollowed-out area 110 can have various shapes and arrangements. For example, the hollowed-out area 110 includes multiple rectangular sub-areas, such as... Figure 12A As shown, multiple rectangular sub-regions are of equal size and equally spaced, for example, as... Figure 12B As shown, multiple rectangular sub-regions are of unequal size and arranged at equal intervals; exemplarily, multiple rectangular sub-regions are of equal size and arranged at non-equal intervals; exemplarily, multiple rectangular sub-regions are of unequal size and arranged at non-equal intervals; exemplarily, multiple rectangular sub-regions are of unequal size and arranged at non-equal intervals; the hollowed-out region 110 on the second membrane structure includes multiple circular sub-regions, exemplarily, such as... Figure 12C As shown, multiple circular sub-regions are of equal size and uniformly distributed; alternatively, multiple circular sub-regions are of unequal size and arranged at equal intervals; alternatively, multiple circular sub-regions are of equal size and arranged at non-equal intervals; alternatively, as shown... Figure 12D As shown, multiple circular sub-regions are of different sizes and are arranged at non-equidistant intervals.

[0126] Furthermore, such as Figure 12B As shown, the rectangular sub-region in the middle is larger than the rectangular sub-region at the edge. That is, the arrangement of the second membrane structure 105 with a large gap in the middle and a small gap at the edge can reduce the noise of the microphone during operation and improve the signal-to-noise ratio of the product.

[0127] like Figure 12D As shown, multiple circular sub-regions are of different sizes and are arranged at non-equidistant intervals. The circular sub-regions in the middle are smaller than those at the edges, and the spacing between the circular sub-regions in the middle is greater than the spacing between the circular sub-regions at the edges. This arrangement increases the capacitance of the deformed area, which can improve the sensitivity of the product and thus improve the signal-to-noise ratio of the product.

[0128] In this embodiment, the second electrode lead-out path 118 is electrically connected to the second membrane structure 105 through a plurality of arrayed electrode lead-out points 119, and each non-perforated area of ​​the second membrane structure 105 corresponds to an electrode lead-out point 119, such as... Figure 12A As shown, the second membrane structure 105 is rectangular strip in shape, therefore, each rectangular strip corresponds to an electrode lead-out point.

[0129] Furthermore, such as Figure 13As shown, at least one through hole 124 is provided on the area of ​​the vibration chamber 106 enclosed by the first support member 102. At this time, enclosing the vibration chamber 106 has a certain dustproof effect, and the through hole 124 has a certain air release function. It can be an air release hole or an air release groove. The shape and distribution of the air release hole and the air release groove can be referred to the description of the first air release channel 111 and the second air release channel 114, and will not be repeated here.

[0130] When the dustproof structure 121 is suspended on the first support member 102 in this embodiment, the dustproof structure 121 needs to cover the rear cavity.

[0131] Other structural details in this embodiment are the same as in Embodiment 1, and it can achieve the technical effects described in Embodiment 1, so they will not be repeated here.

[0132] Example 3

[0133] like Figure 14 The microphone assembly 100 shown in this embodiment differs from the microphone assembly 100 in Embodiment 2 in that the first support member 102 does not enclose the rear cavity 123 and the vibration cavity 106.

[0134] In this embodiment, the "non-enclosed" state can mean that the first support member 102 partially covers the rear cavity 123 and the vibration cavity 106, or it can mean that it does not cover the rear cavity 123 and the vibration cavity 106 at all, as long as the non-enclosed effect is achieved. In this embodiment, the second membrane structure 105 is a static membrane.

[0135] In this embodiment, the sound waves can only enter from the back cavity 107 and act on the first membrane structure 104. The air in the vibration cavity 106 can enter the rear cavity 123 through the hollow area 110. Therefore, the rear cavity 123 only serves to release air.

[0136] The other detailed structures in this embodiment are the same as those in Embodiment 1 and Embodiment 2, and can achieve the technical effects described in Embodiment 1 and Embodiment 2, so they will not be repeated here.

[0137] Example 4

[0138] like Figure 15A As shown, this is the microphone assembly 100 provided in this embodiment. In this microphone assembly 100, unlike the microphone assembly 100 in Embodiment 2, the cavity has two first inner surfaces 108 perpendicular to the first membrane structure 104 and the second membrane structure 105 and two second inner surfaces 109 parallel to the first membrane structure 104 and the second membrane structure 105. The three sides of the second support member 103 are fixedly connected to the two first inner surfaces 108 and the second inner surface 109 adjacent to the first membrane structure 104, respectively, and the other side is suspended.

[0139] The first membrane structure 104, the second membrane structure 105, the partial area of the two first inner surfaces 108, and the second support 103 jointly form the vibration cavity 106, the first membrane structure 104, the second support 103, another partial area of the two first inner surfaces 108, and the second inner surface 109 adjacent to the first membrane structure 104 jointly form the back cavity 123, the back cavity 107 is communicated with the vibration cavity 106 through the hollow area 110 on the second membrane structure 105, and the first support 102 does not seal the back cavity 123 and seals the vibration cavity 106.

[0140] It can be understood that the unsealing in the embodiment can be that the first support 102 partially covers the back cavity 123 or completely does not cover the back cavity 123, as long as the unsealing effect is achieved.

[0141] Further, as shown in Figure 15B , the first support 102 is provided with at least one through hole 124 on the area sealing the vibration cavity 106, at this time, the vibration cavity 106 is sealed to achieve a certain dustproof effect, and the through hole 124 plays a certain role in air release, which can be an air release hole or an air release groove. The shape and distribution of the air release hole and the air release groove can be referred to the description of the first air release channel 111 and the second air release channel 114, which will not be repeated here.

[0142] In the embodiment, the back cavity 123 plays two roles, on the one hand, when the sound wave from the back cavity 123 acts on the first membrane structure 104, the air in the vibration cavity 106 can enter the back cavity 107 through the hollow area 110, at this time, the back cavity 123 plays a role in sound entering, and the back cavity 107 plays a role in air release, on the other hand, the sound wave can also enter from the back cavity 107 and act on the first membrane structure 104 after passing through the hollow area 110, at this time, the back cavity 123 plays a role in providing a deformation space for the first membrane structure 104.

[0143] When the dustproof structure 121 is suspended on the first support 102 in the embodiment, the dustproof structure 121 needs to cover the back cavity.

[0144] In the embodiment, the second membrane structure 105 is a static membrane. Other details in the embodiment are the same as those in Embodiment 1 and Embodiment 2, and the technical effects described in Embodiment 1 and Embodiment 2 can be achieved, which will not be repeated here.

[0145] As shown in Figure 15B , the first support 102 is provided with at least one through hole 124 on the area sealing the vibration cavity 106, the structure of the through hole 124 can be an air release hole or an air release groove, and the shape and distribution of the air release hole and the air release groove can be referred to the description of the first air release channel 111 and the second air release channel 114, which will not be repeated here.

[0146] Embodiment Five

[0147] As shown in FIG. 6, different from the microphone assembly 100 in Embodiment Four, the first support 102 does not enclose the back cavity 123 and the vibration cavity 106. Figure 16

[0148] In the present embodiment, the non-enclosure described can be that the first support 102 partially covers the back cavity 123 and the vibration cavity 106, or completely covers the back cavity 123 and the vibration cavity 106, as long as the effect of non-enclosure can be achieved.

[0149] In the present embodiment, after the sound wave enters the back cavity 123 and acts on the first membrane structure 104, the air in the vibration cavity 106 can enter the back cavity 107 through the hollow area 110, thus the back cavity 107 only plays a role of air release.

[0150] In the present embodiment, the second membrane structure 105 is a stationary membrane. Other details of the present embodiment are the same as those in Embodiments One and Two, and the technical effects described in Embodiments One and Two can be achieved, which will not be described herein.

[0151] Embodiment Six

[0152] As shown in FIG. 7, the present application provides a packaging structure 200, which comprises a shell 201, a substrate 202 and a microphone assembly 100, the microphone assembly 100 being located in a cavity formed by the shell 201 and the substrate 202. Figure 17 The substrate 202 is provided with an acoustic inlet hole 203 for sound to enter, and the sound wave enters the back cavity 107 of the microphone assembly 100 after entering the acoustic inlet hole 203.

[0153] Further, the ratio of the length to the width of the shell 201 is greater than 3.

[0154] The packaging structure 200 in the present embodiment has a high length-width ratio, so that the packaging structure 200 is suitable for products such as notebook computers which require the packaging structure to be in a narrow and long type.

[0155] Further, the packaging structure 200 further comprises a signal processing element 204, the signal processing element 204 being electrically connected to the microphone assembly 100 through a conductive element 205. Exemplarily, the signal processing element 204 can be an ASIC (Application Specific Integrated Circuit), and the conductive element 205 can be a gold wire.

[0156]

[0157] ​​Furthermore, in order to achieve better sound intake effect, the sound intake hole 203 is set to correspond with the back cavity 107.

[0158] The encapsulation structure 200 in this embodiment is suitable for rear-entry sound, exemplarily, as the microphone assembly in any of the embodiments of Embodiment 1, Embodiment 2, Embodiment 3, and Embodiment 4.

[0159] Example 7

[0160] like Figure 18 As shown, the present invention provides a packaging structure 200, which includes a housing 201, a substrate 202 and a microphone assembly 100, wherein the microphone assembly 100 is located in the cavity formed by the housing 201 and the substrate 202.

[0161] The upper surface of the housing 201 is provided with a sound inlet hole 203 for sound inlet. After the sound waves enter through the sound inlet hole 203, they are transmitted into the rear cavity 123 of the microphone assembly 100.

[0162] The encapsulation structure 200 in this embodiment is suitable for a forward tone, exemplarily, as the microphone assembly in any of the embodiments in Embodiment 5.

[0163] Furthermore, the length-to-width ratio of the shell 201 is greater than 3.

[0164] The packaging structure 200 in this embodiment has a high aspect ratio, making it suitable for products such as laptops that require a long and narrow packaging structure.

[0165] Furthermore, the package structure 200 also includes a signal processing element 204, which is electrically connected to the microphone assembly 100 via a conductive element 205. For example, the signal processing element 204 may be an ASIC (Application Specific Integrated Circuit), and the conductive element 205 may be a gold wire.

[0166] Furthermore, to prevent external impurities from entering the microphone assembly 100, the sound inlet 203 is staggered with the microphone assembly 100.

[0167] Example 8

[0168] like Figure 19As shown, a microphone assembly 100 includes a substrate 101, a first support 102 and a second support 103 fixedly connected with the substrate 101, and a plurality of first membrane structures 104 and second membrane structures 105 combinations between the first support 102 and each second support 103 respectively, the middle part of the substrate 101 has a cavity, the first support 102 at least partially encloses one side of the cavity, and each second support 103 is located in the cavity;

[0169] For each first membrane structure 104 and second membrane structure 105 combination, in the thickness direction of the substrate 101, one end of the first membrane structure 104 and the second membrane structure 105 in the combination is fixedly connected with the first support 102 respectively, and the other end of the first membrane structure 104 and the second membrane structure 105 in the combination is fixedly connected with the corresponding second support 103 of the combination respectively, the first membrane structure 104 and the second membrane structure 105 in the combination, the first support 102, and the corresponding second support 103 of the combination together at least divide the cavity into the corresponding vibration cavity 106 and back cavity 107 of the combination;

[0170] Among them, all the vibration cavities 106 corresponding to the first membrane structure 104 and the second membrane structure 105 combinations are not communicated with each other, and all the first membrane structure 104 and the second membrane structure 105 combinations correspond to the same back cavity 107.

[0171] The microphone assembly 100 in the embodiment includes multiple groups of first membrane structures 104 and second membrane structures 105, which are arranged side by side in the cavity, and the area of the first membrane structure 104 and the second membrane structure 105 is expanded by array arrangement, thereby improving the performance of the microphone assembly 100.

[0172] The specific structural details of the microphone assembly 100 in the embodiment are described in embodiments one to five, which will not be repeated here.

[0173] Embodiment nine

[0174] The embodiment provides an electronic device, including the microphone assembly 100 in any one of embodiments one to five, and embodiment eight.

[0175] The electronic device in the embodiment has the beneficial effects described in embodiments one to five and embodiment eight, which will not be repeated here.

[0176] Embodiment ten

[0177] The embodiment provides an electronic device, including the packaging structure 200 in any one of embodiments six and seven.

[0178] The electronic device in this embodiment has the beneficial effects described in Embodiment Six and Embodiment Seven, which will not be repeated here.

[0179] It can be understood that the various numbers involved in the embodiments of the present application are only for the convenience of differentiation in the description, and are not used to limit the scope of the embodiments of the present application. The size of the serial numbers of the above processes does not mean the order of execution, and the execution order of the processes should be determined according to their functions and inherent logic.

[0180] The microphone assembly, packaging structure and electronic device provided by the embodiments of the present application are described in detail above, and the principles and implementation manners of the present application are described by applying specific examples. The above embodiment description is only used to help understand the method of the present application and its core idea; at the same time, for those skilled in the art, according to the idea of the present application, the specific implementation manner and application range will be changed, and the above description should not be understood as a limitation on the present application.

Claims

1. A microphone assembly, characterized in that, The system includes a substrate (101), a support member, a dustproof structure (121), a first membrane structure (104), and a second membrane structure (105). The first membrane structure (104) is a vibrating membrane, and the second membrane structure (105) is a static membrane or a vibrating membrane. The support member is used to support the first membrane structure (104) and the second membrane structure (105). The extension surfaces of the first membrane structure (104) and the second membrane structure (105) are parallel to the thickness direction of the substrate (101). The first membrane structure (104) constitutes a first electrode, and the second membrane structure (105) constitutes a second electrode. A variable capacitor is formed between the first electrode and the second electrode. The support includes a first support (102) fixedly connected to the base (101), the base (101) having a cavity in the middle, the first support (102) at least partially enclosing one side of the cavity, the dustproof structure (121) being suspended above the first support (102) and fixedly connected to the first support (102) through a support structure (120), and the dustproof structure having at least one vent hole.

2. The microphone assembly as claimed in claim 1, characterized in that, The support member further includes a second support member (103), the first membrane structure (104) and the second membrane structure (105) are located between the first support member (102) and the second support member (103), and the second support member (103) is located in the cavity; In the thickness direction of the substrate (101), one end of the first membrane structure (104) and the second membrane structure (105) are fixedly connected to the first support member (102), and the other end of the first membrane structure (104) and the second membrane structure (105) are fixedly connected to the second support member (103). The first membrane structure (104), the second membrane structure (105), the first support member (102) and the second support member (103) together divide the cavity into at least a vibration cavity (106) and a back cavity (107).

3. The microphone assembly as claimed in claim 2, characterized in that, The cavity has two first inner surfaces (108) perpendicular to the first membrane structure (104) and the second membrane structure (105) and two second inner surfaces (109) parallel to the first membrane structure (104) and the second membrane structure (105). Two sides of the second support member (103) are fixedly connected to the two first inner surfaces (108) respectively, and the other two sides are suspended. The first membrane structure (104), the second membrane structure (105), a portion of the two first inner surfaces (108) and the second support member (103) together form the vibration cavity (106), and the first support member (102) does not enclose the vibration cavity (106).

4. The microphone assembly as claimed in claim 2, characterized in that, The second membrane structure (105) is a static membrane. The cavity has two first inner surfaces (108) perpendicular to the first membrane structure (104) and the second membrane structure (105), and two second inner surfaces (109) parallel to the first membrane structure (104) and the second membrane structure (105). Three sides of the second support member (103) are fixedly connected to the two first inner surfaces (108) and the second inner surface (109) adjacent to the second membrane structure (105), respectively, and the other side is suspended. The first membrane structure (104), the second membrane structure (105), a portion of the two first inner surfaces (108), and the second support member (103) together form the vibration cavity (106). The second membrane structure (105), the second support member (103), another portion of the two first inner surfaces (108), and the second inner surface (109) adjacent to the second membrane structure (105) together form the rear cavity. The rear cavity and the vibration cavity (106) are connected through the hollow area (110) on the second membrane structure (105). The first support member (102) does not close the rear cavity or close the vibration cavity (106), or the first support member (102) does not close the rear cavity and the vibration cavity (106).

5. The microphone assembly as claimed in claim 2, characterized in that, The second membrane structure (105) is a static membrane. The cavity has two first inner surfaces (108) perpendicular to the first membrane structure (104) and the second membrane structure (105) and two second inner surfaces (109) parallel to the first membrane structure (104) and the second membrane structure (105). The three sides of the second support member (103) are fixedly connected to the two first inner surfaces (108) and the second inner surface (109) adjacent to the first membrane structure (104), respectively, and the other side is suspended. The first membrane structure (104), the second membrane structure (105), a portion of the two first inner surfaces (108), and the second support member (103) together form the vibration cavity (106). The first membrane structure (104), the second support member (103), another portion of the two first inner surfaces (108), and the second inner surface (109) adjacent to the first membrane structure (104) together form the rear cavity. The back cavity (107) and the vibration cavity (106) are connected through the hollow area (110) on the second membrane structure (105). The first support member (102) does not close the rear cavity but closes the vibration cavity (106).

6. The microphone assembly as claimed in claim 2, characterized in that, The second membrane structure (105) is a static membrane. The cavity has two first inner surfaces (108) perpendicular to the first membrane structure (104) and the second membrane structure (105) and two second inner surfaces (109) parallel to the first membrane structure (104) and the second membrane structure (105). The three sides of the second support member (103) are fixedly connected to the two first inner surfaces (108) and the second inner surface (109) adjacent to the first membrane structure (104), respectively, and the other side is suspended. The first membrane structure (104), the second membrane structure (105), a portion of the two first inner surfaces (108), and the second support member (103) together form the vibration cavity (106). The first membrane structure (104), the second support member (103), another portion of the two first inner surfaces (108), and the second inner surface (109) adjacent to the first membrane structure (104) together form the rear cavity. The back cavity (107) and the vibration cavity (106) are connected through the hollow area (110) on the second membrane structure (105). The first support member (102) does not close the rear cavity and the vibration cavity (106).

7. The microphone assembly as claimed in any one of claims 3 to 6, characterized in that, There are gaps between the first membrane structure (104) and the second membrane structure (105) and the first inner surface (108) of the substrate (101).

8. The microphone assembly as claimed in any one of claims 4 to 6, characterized in that, The hollowed-out area (110) on the second membrane structure (105) is circular and / or rectangular in shape.

9. The microphone assembly as claimed in any one of claims 3 to 6, characterized in that, The first support member (102) has at least one first venting channel (111) in the area of ​​the back cavity (107) that is closed.

10. The microphone assembly as claimed in any one of claims 4 to 6, characterized in that, When the first support member (102) closes the vibration cavity (106), at least one through hole (124) is provided in the area of ​​the first support member (102) that closes the vibration cavity (106).

11. The microphone assembly as claimed in claim 9, characterized in that, The first venting channel (111) is a venting hole and / or a venting groove that penetrates the first support member (102) and has a non-closed profile.

12. The microphone assembly as claimed in claim 8, characterized in that, The first support member (102) has a vibration part (112) corresponding to the venting groove, and a reinforcing rib (113) is provided at the root of the vibration part (112).

13. The microphone assembly as claimed in any one of claims 3-6, characterized in that, At least one second venting channel (114) is provided on the first membrane structure (104).

14. The microphone assembly as claimed in claim 13, characterized in that, The second venting channel is a vent hole, and / or an annular or rectangular venting groove penetrating the first membrane structure (104).

15. The microphone assembly as claimed in any one of claims 3-6, characterized in that, The first membrane structure (104) and / or the second membrane structure (105) are provided with an anti-adhesion structure (115) to prevent the first membrane structure (104) from sticking to the second membrane structure (105).

16. The microphone assembly as claimed in claim 15, characterized in that, The anti-stick structure (115) is a protrusion structure provided on the side of the first membrane structure (104) and / or the second membrane structure (105) facing the vibration cavity (106), or the anti-stick structure (115) is an anti-stick coating applied to the surface of the first membrane structure (104) and / or the second membrane structure (105) facing the vibration cavity (106).

17. The microphone assembly as claimed in any one of claims 3-6, characterized in that, At least a portion of the first membrane structure (104) is a corrugated membrane (116), wherein the corrugations of the corrugated membrane (116) are parallel to the second support member (103).

18. The microphone assembly as claimed in any one of claims 4-6, characterized in that, The effective area of ​​the second membrane structure (105) is smaller than the effective area of ​​the first membrane structure (104).

19. The microphone assembly as claimed in any one of claims 3-6, characterized in that, The first membrane structure (104) includes a first membrane structure body (1041) and bent structures (1042) located at both ends of the first membrane structure body (1041).

20. The microphone assembly as claimed in claim 8, characterized in that, The hollowed-out area (110) on the second membrane structure (105) includes multiple rectangular sub-regions, which are equal in size and equally spaced, or the multiple rectangular sub-regions are unequal in size and / or not equally spaced.

21. The microphone assembly as claimed in claim 8, characterized in that, The hollowed-out area (110) on the second membrane structure (105) includes multiple circular sub-regions, which are equal in size and uniformly distributed, or the multiple circular sub-regions are unequal in size and / or non-uniformly distributed.

22. The microphone assembly as claimed in any one of claims 3-6, characterized in that, The microphone assembly includes a first electrode lead-out passage (117) electrically connected to the first diaphragm structure (104) and a second electrode lead-out passage (118) electrically connected to the second diaphragm structure (105). The first electrode lead-out path (117) is electrically connected to the first membrane structure (104) through an electrode lead-out point (119); The second electrode lead-out path (118) is electrically connected to the second membrane structure (105) through an electrode lead-out point (119).

23. The microphone assembly as claimed in any one of claims 3 to 6, characterized in that, The dustproof structure (121) covers the vibration chamber (106) and / or the rear chamber (123).

24. The microphone assembly as claimed in any one of claims 3 to 6, characterized in that, At least one third venting channel (122) is provided on the region of the substrate (101) that participates in forming the vibration cavity (106).

25. A packaging structure (200), characterized in that, The packaging structure (200) includes a housing (201), a substrate (202), and a microphone assembly (100) as described in any one of claims 3-5, wherein the microphone assembly (100) is located within the cavity formed by the housing (201) and the substrate (202); The substrate (202) has a sound inlet hole (203) for sound inlet. After the sound wave enters through the sound inlet hole (203), it is transmitted into the back cavity (107) of the microphone assembly (100). The length-to-width ratio of the shell (201) is greater than 3.

26. A packaging structure (200), characterized in that, The packaging structure (200) includes a housing (201), a substrate (202), and a microphone assembly (100) as described in claim 6, wherein the microphone assembly (100) is located within the cavity formed by the housing (201) and the substrate (202); The upper surface of the housing (201) is provided with a sound inlet hole (203) for sound inlet. After the sound wave enters through the sound inlet hole (203), it is transmitted into the rear cavity of the microphone assembly (100). The length-to-width ratio of the shell (201) is greater than 3.

27. A microphone assembly, characterized in that, The microphone assembly includes a base (101), a first support (102) fixedly connected to the base (101) and a plurality of second supports (103), and a plurality of first membrane structures (104) and second membrane structures (105) respectively located between the first support (102) and each of the second supports (103). The base (101) has a cavity in the middle, the first support (102) at least partially enclosing one side of the cavity, and each of the second supports (103) is located in the cavity. For each combination of the first membrane structure (104) and the second membrane structure (105), the extension surfaces of the first membrane structure (104) and the second membrane structure (105) are parallel to the thickness direction of the substrate (101); in the thickness direction of the substrate (101), one end of the first membrane structure (104) and the second membrane structure (105) in the combination are fixedly connected to the first support member (102), and the other end of the first membrane structure (104) and the second membrane structure (105) in the combination are fixedly connected to the second support member (103) corresponding to the combination. The first membrane structure (104) and the second membrane structure (105), the first support member (102), and the second support member (103) corresponding to the combination together divide the cavity into at least the vibration cavity (106) and the back cavity (107) corresponding to the combination. Wherein, the first membrane structure (104) is a vibrating membrane, the second membrane structure (105) is a stationary membrane or a vibrating membrane, the vibration cavities (106) corresponding to all combinations of the first membrane structure (104) and the second membrane structure (105) are not connected to each other, and all combinations of the first membrane structure (104) and the second membrane structure (105) correspond to the same back cavity (107).

28. An electronic device, characterized in that, Includes the microphone assembly (100) as claimed in any one of claims 1-24, 27.

29. An electronic device, characterized in that, Includes the packaging structure (200) as described in claim 25 or 26.

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