Heating device

Abstract

The heating device has a heating plate and a plurality of heaters. The heating plate has a heating surface and a plurality of recesses on a back surface opposite to the heating surface. The plurality of heaters are respectively located in the plurality of recesses.

Description

Technical Field

[0001] The disclosed embodiments relate to heating devices. Background Technology

[0002] Patent document 1 discloses a heating device in which multiple heaters are arranged parallel to the heating surface of the mold by inserting multiple heaters into multiple holes formed on the side of the mold.

[0003] Prior art literature

[0004] Patent documents

[0005] Patent Document 1: JP 2017-154409 Summary of the Invention

[0006] One embodiment of the heating device includes a heating plate and a plurality of heaters. The heating plate has a heating surface and a plurality of recesses on its back side opposite to the heating surface. The plurality of heaters are respectively located in the plurality of recesses. Attached Figure Description

[0007] Figure 1 This is a side view of the heating device according to the first embodiment.

[0008] Figure 2 This is a top view of the heating device according to the first embodiment.

[0009] Figure 3 yes Figure 2 A cross-sectional view at line III-III.

[0010] Figure 4 yes Figure 2 A cross-sectional view at line IV-IV.

[0011] Figure 5 This is a cross-sectional view of the heating device involved in the first embodiment, variant 1.

[0012] Figure 6 This is a side view of the heating device involved in a variation of the first embodiment, Example 2.

[0013] Figure 7 This is a cross-sectional view of the heating device involved in Modification 2 of the first embodiment.

[0014] Figure 8 This is a side view of the heating device according to the second embodiment.

[0015] Figure 9 This is a top view of the heating device according to the second embodiment.

[0016] Figure 10 yes Figure 9 A cross-sectional view at line XX.

[0017] Figure 11 This is a cross-sectional view of the heating device involved in the second embodiment, variant 1.

[0018] Figure 12 This is a cross-sectional view of the heating device involved in Variation 2 of the second embodiment.

[0019] Figure 13 This is a cross-sectional view of the heating device involved in the second embodiment, variant 3.

[0020] Figure 14 This is a cross-sectional view of the heating device according to the third embodiment.

[0021] Figure 15 This is a cross-sectional view of the heating device according to the fourth embodiment.

[0022] Figure 16 This is a side view of the heating device according to the fifth embodiment.

[0023] Figure 17 This is a cross-sectional view of the heating device according to the fifth embodiment.

[0024] Figure 18 This is a side view of the heating device according to the sixth embodiment.

[0025] Figure 19 This is a cross-sectional view of the heating device according to the sixth embodiment. Detailed Implementation

[0026] Hereinafter, embodiments of the heating device disclosed in this application will be described with reference to the accompanying drawings. However, this disclosure is not limited by the embodiments shown below. Furthermore, it should be noted that the drawings are schematic, and the dimensional relationships and ratios of the elements may differ from those shown. Moreover, the drawings may sometimes contain portions with different dimensional relationships and ratios.

[0027] Furthermore, in the embodiments shown below, expressions such as "fixed," "orthogonal," "perpendicular," or "parallel" are sometimes used, but these expressions do not need to be strictly "certain," "orthogonal," "perpendicular," or "parallel." That is, the above expressions, for example, allow for deviations in manufacturing precision, setting precision, etc.

[0028] <First Implementation>

[0029] Figure 1 This is a side view of the heating device 100 according to the first embodiment. Figure 2This is a top view of the heating device 100 according to the first embodiment. In the following description, the surface of the heating device 100 on the side of the object to be heated when it comes into contact with the object to be heated is called the "upper surface", and the surface on the side opposite to the object to be heated is called the "lower surface". However, the heating device 100 can also be used upside down, for example, and can be used in any orientation.

[0030] Figure 1 The heating device 100 shown has a heating plate 110, a plurality of heaters 120, a fixing plate 130 and a support plate 150.

[0031] The heating plate 110 is, for example, a plate-shaped metal member with an upper surface 110a that can contact the object to be heated. That is, the upper surface 110a of the heating plate 110 serves as the heating surface for the object to be heated. The upper surface 110a is used, for example, in heating a mold, which is an example of an object to be heated. A plurality of recesses 113 are formed on the lower surface 110b of the heating plate 110 on the side opposite to the heating surface (see reference). Figure 3 ).

[0032] Multiple heaters 120 are, for example, ceramic heaters having a ceramic body and a heating resistor located inside the ceramic body. By making the heaters 120 ceramic heaters, thermal adhesion between the metal heating plate 110 and the heaters 120 can be suppressed.

[0033] The length of the heater 120, i.e., the length of the ceramic body, can be set to, for example, 1 mm to 200 mm. Furthermore, the external dimensions of the ceramic body can be set to, for example, 0.5 mm to 100 mm. The shape of the heater 120, i.e., the shape of the ceramic body, is not limited to a cylindrical shape; for example, it can be an elliptical cylinder or a square prism. The material of the ceramic body is, for example, an insulating ceramic. As the material of the ceramic body, for example, oxide ceramics, nitride ceramics, or carbide ceramics can be used. The heating resistor is a component that heats up by the flow of current. The heating resistor can, for example, contain a high-resistivity conductor containing tungsten, molybdenum, etc. The dimensions of the heating resistor can, for example, have a width of 0.1 mm to 5 mm, a thickness of 0.05 mm to 0.3 mm, and a total length of 1 mm to 500 mm. Furthermore, the heating resistor can, for example, be a conductive ceramic containing carbides. In this case, the difference in thermal expansion between the ceramic body and the heating resistor can be reduced. This reduces the thermal stress between the ceramic body and the heating resistor. As a result, the durability of the heater 120 can be improved.

[0034] Multiple heaters 120 are inserted into multiple recesses 113 respectively. That is, the multiple heaters 120 are configured to be perpendicular to the upper surface 110a of the heating surface, i.e. the heating plate 110, by being inserted into multiple recesses 113 respectively.

[0035] In this way, by arranging the multiple heaters 120 perpendicular to the heating surface of the heating plate 110, deviations in the distance between the multiple heaters 120 and the heating surface can be suppressed. As a result, the in-plane heat uniformity of the heating surface, i.e., the upper surface 110a of the heating plate 110, can be improved.

[0036] Multiple recesses 113 into which multiple heaters 120 are respectively inserted are formed on the lower surface 110b of the heating plate 110 on the side opposite to the heating surface with different densities. Figure 2 In the diagram, the upper surface 110a of the heating surface, i.e., the heating plate 110, is shown as a rectangular plate, and the locations where a plurality of recesses 113 are formed are shown. That is, the recesses 113 are sparsely formed in the center of the lower surface 110b, and densely formed in the periphery of the lower surface 110b. In other words, a plurality of recesses 113 are formed such that the density of the recesses 113 is lower closer to the center of the lower surface 110b, and higher closer to the periphery.

[0037] Thus, by adjusting the density of the plurality of recesses 113 on the lower surface 110b of the heating plate 110, opposite to the heating surface, the density of the plurality of heaters 120 inserted into the plurality of recesses 113 can be adjusted. As a result, the uniformity of heat distribution within the upper surface 110a of the heating plate 110 can be further improved. That is, the peripheral portions of the upper surface 110a and lower surface 110b of the heating plate 110 are more susceptible to heat loss from the surrounding atmosphere compared to the central portion. Consequently, the peripheral portions of the upper surface 110a and lower surface 110b of the heating plate 110 may become cooler than the central portion. In this case, since increasing the density of the recesses 113 at the peripheral portion of the lower surface 110b can also increase the density of the heaters 120, the heat generation at the peripheral portion of the upper surface 110a can be relatively increased. Therefore, since the amount of heat generation lost by the surrounding atmosphere is compensated, the uniformity of heat distribution can be further improved.

[0038] Furthermore, in existing heating devices where multiple heaters (e.g., cylindrical heaters) are inserted into multiple holes on the side of the mold, if a defect such as a broken wire in one cylindrical heater occurs during heating, a low-temperature area may sometimes appear in a straight line along that cylindrical heater. Therefore, in existing heating devices, the temperature of the heated object may become uneven. In contrast, the heating device 100 according to this embodiment can narrow the low-temperature area even if a defect such as a broken wire in one heater 120 occurs during heating. Moreover, the heating device 100 according to this embodiment can achieve uniform temperature of the heated object by controlling the output of the heater 120 closest to the heater 120 where the defect occurred. Furthermore, by controlling the output of individual heaters for each arbitrary area, the heating device 100 according to this embodiment can heat only a localized area, rather than the entire area of ​​the heating device 100. This allows for more precise heating of only a specific area of ​​the heated object, enabling the heating of multiple heated objects at different temperatures, and consequently, the simultaneous heat treatment of multiple products.

[0039] Furthermore, the configuration of the recess 113 is not limited to Figure 2 As shown. For example, if a hot spot with a higher temperature than other areas is generated in the upper surface 110a of the heating surface, i.e., the heating plate 110, multiple recesses 113 may be formed so that the density of the recesses 113 is lower in the area corresponding to the hot spot on the lower surface 110b.

[0040] The fixing plate 130 is, for example, a plate-shaped component made of metal. Multiple heaters 120 are fixed on the fixing plate 130.

[0041] The support plate 150 is fixed to the fixing plate 130 by a plurality of columnar members 151 in a state separate from the fixing plate 130. By positioning the support plate 150 separate from the fixing plate 130, space can be ensured between the support plate 150 and the fixing plate 130 for arranging the power supply terminals 122, 123 (described later) of the plurality of heaters 120. Alternatively, the support plate 150 and the plurality of columnar members 151 may be omitted if necessary.

[0042] Figure 3 yes Figure 2 A cross-sectional view at line III-III. Figure 4 yes Figure 2 A cross-sectional view at line IV-IV. Additionally, in Figure 3 as well as Figure 4 The diagram of the support plate 150 and the multiple columnar members 151 is omitted.

[0043] like Figure 3 as well as Figure 4As shown, the heating device 100 is configured to fix a plurality of heaters 120 to the fixing plate 130 and insert them into a plurality of recesses 113 of the heating plate 110 respectively.

[0044] The heating plate 110 has a first plate member 111 and a second plate member 112.

[0045] The first plate member 111 is a plate-shaped member having a heating surface, namely the upper surface 110a of the heating plate 110. The first plate member 111 is joined to the second plate member 112 by a joining member 114, such as a bolt. That is, the lower surface 111a of the first plate member 111, opposite to the upper surface 110a, is the joining surface that joins with the second plate member 112.

[0046] The second plate member 112 is a plate-shaped member having: an upper surface 112a that serves as a mating surface that engages with the mating surface of the first plate member 111; and a lower surface 110b located on the opposite side of the upper surface 112a. A plurality of through holes 112b are formed in the lower surface 110b, and the lower surface 111a of the first plate member 111 is exposed from each of the plurality of through holes 112b.

[0047] Each of the plurality of recesses 113 is formed by each of the plurality of through holes 112b and the lower surface 111a of the first plate member 111 exposed from each of the plurality of through holes 112b. That is, the inner wall surface of each through hole 112b forms the inner side surface of each recess 113, and the lower surface 111a of the first plate member 111 forms the bottom surface of each recess 113. Furthermore, the front ends 120a of the plurality of heaters 120 contact the lower surface 111a of the first plate member 111 when the plurality of heaters 120 are respectively inserted into the plurality of recesses 113. By contacting the front ends 120a of the plurality of heaters 120 with the lower surface 111a in this way, the position of the front ends 120a and the lower surface 111a can be aligned on the same plane. Therefore, the distance between the multiple heaters 120 and the heating surface can be made to match the distance equivalent to the thickness of the first plate member 111, thereby improving the in-plane heat uniformity of the heating surface, i.e., the upper surface 110a of the heating plate 110.

[0048] Furthermore, regarding the contact between the front end 120a of the heater 120 and the lower surface 111a of the first plate member 111, for example, if the front end 120a of the heater 120 is hemispherical, only the front end of the hemisphere may contact the lower surface 111a of the first plate member 111. Additionally, for example, if the heater 120 is cylindrical and has an end face at the front end 120a, the end face of the front end 120a of the heater 120 may make surface contact with the lower surface 111a of the first plate member 111. In this case, the heating rate can be increased. Furthermore, the side portion (edge ​​portion) of the end face may also contact the lower surface 111a of the first plate member 111. In this case, the heating rate can be increased and stress reduced. Furthermore, the front end 120a of the heater 120 and the lower surface 111a of the first plate member 111 can also be configured to be isolated when not in use at room temperature, and to come into contact during use (heating) through the thermal expansion of the heater 120.

[0049] The fixing plate 130 has a plurality of fixing holes 130a at positions corresponding to the plurality of recesses 113. A plurality of heaters 120 are inserted into and fixed in the plurality of fixing holes 130a. Specifically, an internal thread is formed on a portion of the inner wall of each fixing hole 130a. On the other hand, a cylindrical mounting member 121 is mounted on the outer peripheral surface of each heater 120, and an external thread 121a is formed on a portion of the outer peripheral surface of the mounting member 121. The plurality of heaters 120 are fixed to the fixing plate 130 by engaging the external thread 121a with the internal thread of each fixing hole 130a when each heater 120 is inserted into it.

[0050] The fixing plate 130 is configured to be isolated from the heating plate 110. For example... Figure 4 As shown, the fixing plate 130 is connected to the heating plate 110 (second plate member 112) by a connecting structure 131, such as bolts, with a gap formed between the fixing plate 130 and the heating plate 110. In this way, by isolating the fixing plate 130 from the heating plate 110, the heating of the plurality of heaters 120 relative to the fixed portion of the fixing plate 130 (e.g., the portion where the mounting member 121 is installed) can be suppressed. On the other hand, since the heat taken from the heating plate 110 is reduced by the fixing plate 130, the heating of the heating plate 110 can be promoted.

[0051] Furthermore, a spacer 140 is disposed between the heating plate 110 and the fixed plate 130. The spacer 140 is cylindrical, allowing the connecting member 131 to pass through. By providing the spacer 140 between the heating plate 110 and the fixed plate 130, the possibility of collision between the fixed plate 130 and the heating plate 110 can be reduced.

[0052] The material of the spacer 140 is preferably a heat-resistant ceramic. For example, oxide ceramics, nitride ceramics, or carbide ceramics can be used as the material for the spacer 140. Therefore, since the thermal expansion and contraction of the spacer 140 can be reduced, the consumption of the spacer 140 can be reduced.

[0053] Multiple heaters 120 have base ends 120b located further away from the heating surface, i.e., the upper surface 110a of the heating plate 110, than the lower surface of the fixing plate 130 on the side opposite to the heating plate 110. Power supply terminals 122 and 123 for supplying power to the multiple heaters 120 are provided at the base ends 120b. In other words, the base ends 120b of the multiple heaters 120 protrude further away from the heating surface, i.e., the upper surface 110a of the heating plate 110, than the lower surface of the fixing plate 130, and power supply terminals 122 and 123 are provided at the respective base ends 120b. By providing power supply terminals 122 and 123 at the base ends 120b protruding further away from the heating surface, i.e., the upper surface 110a of the heating plate 110, the power supply terminals 122 and 123 can be moved away from the heating surface. As a result, thermal protection power supply terminals 122 and 123 can be provided from the heating surface.

[0054] <Modifications of the first embodiment>

[0055] Next, refer to Figure 5 Various modifications of the first embodiment will be described below. Furthermore, in the following description, structures common to the first embodiment described above will be labeled with the same reference numerals, and detailed descriptions will be omitted.

[0056] Figure 5 This is a cross-sectional view of the heating device 100 according to a variation of the first embodiment. Figure 5 The heating device 100 shown mainly consists of the structure of the heating plate and the insertion method of the multiple heaters. Figures 1-4 The heating device 100 shown is different. Specifically, as... Figure 5 As shown, the heating plate 110 has a first plate member 111, a second plate member 112, and a heat insulation member 115.

[0057] The first plate member 111 is a plate-shaped member having a heating surface, namely the upper surface 110a of the heating plate 110. The first plate member 111 is joined to the second plate member 112 by a connecting member 114, such as a bolt, with a heat insulation member 115 disposed between the first plate member 111 and the second plate member 112. That is, the lower surface 111a of the first plate member 111, on the side opposite to the upper surface 110a, is the joining surface that joins with the second plate member 112. A plurality of recesses 111b are formed on the lower surface 111a of the first plate member 111, on the side opposite to the heating surface.

[0058] The second plate member 112 is a plate-shaped member having: an upper surface 112a that serves as a mating surface that engages with the mating surface of the first plate member 111; and a lower surface 110b located on the opposite side of the upper surface 112a. A plurality of through holes 112b are formed in the second plate member 112 at positions corresponding to the plurality of recesses 111b.

[0059] A heat insulation member 115 is inserted between the first plate member 111 and the second plate member 112. The heat insulation member 115 is, for example, a sheet member containing heat-insulating fibers, and has the function of restricting the transfer of heat from the first plate member 111 side to the second plate member 112 side. A plurality of through holes 115a are formed in the heat insulation member 115 at positions corresponding to the plurality of recesses 111b.

[0060] The material of the heat insulation member 115 is preferably, for example, a ceramic with heat insulation properties. As a material for the heat insulation member 115, oxide ceramics, nitride ceramics, or carbide ceramics can be used, for example.

[0061] Each of the plurality of recesses 113 is formed by each of the plurality of through holes 112b, each of the plurality of through holes 115a, and the plurality of recesses 111b. That is, the inner surface of each through hole 112b, the inner surface of each through hole 115a, and the inner surface of each recess 111b form the inner surface of each recess 113, and the bottom surface of each recess 111b forms the bottom surface of each recess 113. Then, the front ends 120a of the plurality of heaters 120 are located within the plurality of recesses 111b while the plurality of heaters 120 are respectively inserted into the plurality of recesses 113.

[0062] By positioning the front ends 120a of the multiple heaters 120 within the multiple recesses 111b, for example, when each front end 120a of the multiple heaters 120 has a maximum heating point with the highest temperature, the maximum heating point can be brought close to the upper surface 110a of the heating surface, i.e., the heating plate 110. As a result, the heating device 100 according to Modified Example 1 can efficiently heat the upper surface 110a of the heating surface, i.e., the heating plate 110. Furthermore, by positioning the front ends 120a of the multiple heaters 120 within the multiple recesses 111b, the maximum heating point can be moved away from the base ends 120b of the multiple heaters 120. As a result, the heating device 100 according to Modified Example 1, since heat from the maximum heating point is difficult to transfer to the power supply terminals 122, 123 provided at the base ends 120b of the multiple heaters 120, the deterioration of the power supply terminals 122, 123 can be suppressed.

[0063] In addition, the front end 120a of each of the multiple heaters 120 may or may not contact the bottom surface of each recess 111b.

[0064] Furthermore, the fixing plate 130 is disposed in isolation from the heating plate 110 by being connected to the heating plate 110 via a columnar connecting metal member 160 of a given length. The length of the connecting metal member 160 can, for example, be greater than... Figure 4 The thickness of the spacer 140 shown is long.

[0065] Figure 6 This is a side view of the heating device 100 according to a variation of the first embodiment, Example 2. Figure 7 This is a cross-sectional view of the heating device 100 according to a variation of the first embodiment, Example 2. Figure 6 as well as Figure 7 The heating device 100 shown basically has the same characteristics as Figures 1-4 The heating device 100 shown has the same construction. However, Figure 6 as well as Figure 7 The heating device 100 shown is located at a point where the heating plate 110 is not divided into two components, the first plate component 111 and the second plate component 112. Figures 1-4 The heating device 100 shown is different. Specifically, as... Figure 6 as well as Figure 7 As shown, the heating plate 110 is integrally formed from a metal plate-like member for the portions corresponding to the first plate member 111 and the second plate member 112. As a result, the manufacturing process of the heating device 100 according to the modified example 2 can be simplified.

[0066] As described above, the heating device according to the first embodiment (e.g., heating device 100) includes a heating plate (e.g., heating plate 110) and a plurality of heaters (e.g., heaters 120). The heating plate has a heating surface (e.g., upper surface 110a) and a plurality of recesses (e.g., recesses 113) on its back surface (e.g., lower surface 110b) opposite to the heating surface. The plurality of heaters are respectively located in the plurality of recesses. As a result, the uniformity of heat distribution within the heating surface can be improved.

[0067] Furthermore, the heating plate in the first embodiment is a metal component. The plurality of heaters are ceramic heaters having a ceramic body and a heating resistor located inside the ceramic body. This suppresses thermal adhesion between the metal heating plate and the heaters.

[0068] Furthermore, the heating plate according to the first embodiment has a first plate member (e.g., first plate member 111) and a second plate member (e.g., second plate member 112). The first plate member has: a heating surface; and a mating surface (e.g., lower surface 111a) located opposite the heating surface. The second plate member has: a mated surface that engages with the mating surface; a back surface located opposite the mated surface; and a plurality of through holes (e.g., through holes 112b) extending from the back surface to the mated surface. Each of the plurality of recesses includes each of the plurality of through holes and the mating surface. The front ends (e.g., front ends 120a) of the plurality of heaters respectively contact the mating surfaces. As a result, the distance between the plurality of heaters and the heating surface can be made to match the distance corresponding to the thickness of the first plate member, thereby improving the in-plane heat uniformity of the heating surface.

[0069] Furthermore, the heating device according to the first embodiment also includes a fixing plate (e.g., fixing plate 130). The fixing plate 130 fixes a plurality of heaters at a position separate from the heating plate. This suppresses the heating of the plurality of heaters relative to the fixing portion of the fixing plate and promotes the heating of the heating plate.

[0070] Furthermore, the heating device according to the first embodiment also has a spacer member (e.g., spacer member 140) between the heating plate and the fixed plate. This reduces the possibility of collision between the fixed plate and the heating plate.

[0071] Furthermore, the spacer member according to the first embodiment comprises ceramic. This reduces the consumption of spacer members.

[0072] Furthermore, the fixing plate according to the first embodiment has multiple fixing holes (e.g., fixing hole 130a) at positions corresponding to the multiple recesses, each for inserting and fixing multiple heaters. Each heater has a base end (e.g., base end 120b) located further away from the heating surface than the back side of the fixing plate opposite to the heating plate. Power supply terminals (e.g., power supply terminals 122, 123) are provided at the base ends for supplying power to the multiple heaters. Thus, power can be supplied from the heat protection power supply terminals of the heating surface.

[0073] Furthermore, the heating device according to the first embodiment also includes a support plate (e.g., support plate 150). The support plate is fixed to the fixed plate by a plurality of columnar members (e.g., columnar members 151) in a state separate from the fixed plate. As a result, space for arranging power supply terminals of a plurality of heaters can be ensured between the support plate and the fixed plate.

[0074] Furthermore, in the first embodiment, some of the recesses are densely spaced on the surface and others are sparsely spaced on the back side. This further improves the uniformity of heat distribution within the heating surface.

[0075] Furthermore, the heating device involved in the first embodiment is a mold heating device. This improves the uniformity of heat distribution within the heating surface used in mold heating.

[0076] Furthermore, the heating plate according to the first embodiment has a first plate member, a second plate member, and a heat insulation member (e.g., heat insulation member 115). The first plate member has: a heating surface; a mating surface (e.g., lower surface 111a) located opposite to the heating surface; and a plurality of first recesses (111b) located on the mating surface. The second plate member has: a mating surface that engages with the mating surface; a back surface located opposite to the mating surface; and a plurality of first through holes (e.g., through holes 112b) provided corresponding to the plurality of first recesses and extending from the back surface to the mating surface. The heat insulation member is located between the first plate member and the second plate member and has a plurality of second through holes (e.g., through holes 115a) provided corresponding to the plurality of first recesses. Each of the plurality of recesses is constituted by each of the plurality of first through holes, each of the plurality of second through holes, and each of the plurality of first recesses. The front ends of the plurality of heaters are respectively connected to the plurality of first recesses. Therefore, the heating surface can be heated efficiently, and the deterioration of the power supply terminals located at the base of multiple heaters can be suppressed.

[0077] <Second Implementation Method>

[0078] Figure 8 This is a side view of the heating device 100A according to the second embodiment. Figure 9 This is a top view of the heating device 100A according to the second embodiment. Figure 10 yes Figure 9 A cross-sectional view at line XX. Furthermore, in the following description, the same reference numerals are used for structures common to the modified example 1 of the first embodiment described above, and detailed descriptions are omitted.

[0079] Figures 8-10 The heating device 100A shown mainly describes the structure of the connecting components and the positional relationship between the connecting components and the jointing components, etc. Figure 5 The heating device 100 involved in the variation 1 of the first embodiment shown is different. Figures 8-10 The heating plate 110 of the heating device 100A shown is... Figure 5 The heating plate 110 of the heating device 100 shown also has a first plate member 111, a second plate member 112, and a heat insulation member 115.

[0080] The second plate member 112 is a plate-shaped member having: an upper surface 112a that serves as a mating surface engaging with the mating surface of the first plate member 111; and a lower surface 110b located on the opposite side of the upper surface 112a. A threaded hole 112c is formed in the second plate member 112, passing through the upper surface 112a and the lower surface 110b. For example, a plurality of (here, four) threaded holes 112c are formed in the second plate member 112. An internal thread is formed on the inner wall surface of each threaded hole 112c.

[0081] A mounting plate 130A secures multiple heaters 120 and is isolated from the second plate component 112. (Example) Figure 9 as well as Figure 10 As shown, the fixing plate 130A is connected to the second plate member 112 by means of a connecting structure 131A, such as bolts, with a gap between the fixing plate 130A and the heating plate 110. For example, the fixing plate 130A is connected to the second plate member 112 by a plurality of (here, four) connecting structures 131A.

[0082] The connecting member 131A has a front end 131Aa that forms an external thread capable of engaging with the internal thread of the threaded hole 112c of the second plate member 112. The front end 131Aa of the connecting member 131A engages with the threaded hole 112c of the second plate member 112 and extends to a length that does not penetrate the heat insulation member 115 in the direction of the first plate member 111. In this embodiment, the front end 131Aa of the connecting member 131A extends from the lower surface 110b of the second plate member 112 in the threaded hole 112c to a position reaching the upper surface 112a, and contacts the surface of the heat insulation member 115 exposed from the threaded hole 112c.

[0083] In this way, by extending the front end 131Aa of the connecting member 131A towards the first plate member 111 without penetrating the heat insulation member 115, contact between the connecting member 131A and the first plate member 111 can be avoided. As a result, heat conduction from the first plate member 111, which has a heating surface, i.e., the upper surface 110a, to the connecting member 131A can be suppressed.

[0084] Furthermore, by bringing the front end 131Aa of the connecting member 131A into contact with the surface of the insulation member 115, the positions of the front ends 131Aa of the multiple connecting members 131A and the surface of the insulation member 115 can be aligned on the same plane. This allows for the uniformization of the heat transfer path length from the first plate member 111 to the front ends 131Aa of the multiple connecting members 131A, resulting in improved heat uniformity of the first plate member 111.

[0085] Furthermore, the connecting member 131A has a spacer member 140A on the outer periphery of the portion located between the fixed plate 130A and the second plate member 112. The spacer member 140A forms a cylinder surrounding the outer periphery of the portion of the connecting member 131A located between the fixed plate 130A and the second plate member 112, and is in contact with both the fixed plate 130A and the second plate member 112. A gap may or may not be provided between the inner peripheral surface of the spacer member 140A and the outer peripheral surface of the connecting member 131A. By surrounding the outer periphery of the connecting member 131A with the cylindrical spacer member 140A, heat release from the connecting member 131A into the surrounding space can be suppressed.

[0086] For example, stainless steel or other metals can be used as the material for the spacer member 140A. This improves the durability of the spacer member 140A and maintains the spacing between the fixing plate 130A and the second plate member 112.

[0087] like Figure 9 as well as Figure 10 As shown, the second plate member 112 is joined to the first plate member 111 by a connecting member 114A, such as a bolt, in a state where a heat insulation member 115 is disposed between the first plate member 111 and the second plate member 112. For example, the second plate member 112 is joined to the first plate member 111 by a plurality of (here, four) connecting members 114A.

[0088] However, the first plate member 111 and the second plate member 112, which have a heating surface, i.e., an upper surface 110a, are thermally connected via a connecting member 114A. In order to further suppress heat conduction from the first plate member 111 to the connecting member 131A, it is important that the positional relationship between the connecting member 131A and the connecting member 114A is such that the heat transfer path from the connecting member 114A to the connecting member 131A is as long as possible.

[0089] Therefore, in the heating device 100A according to this embodiment, such as Figure 9 As shown, the connecting member 131A is located in a position that does not overlap with the joining member 114A when viewed from above. As a result, the heat transfer path from the joining member 114A to the connecting member 131A is lengthened, and consequently, heat conduction from the first plate member 111 to the connecting member 131A via the joining member 114A is more effectively suppressed.

[0090] In addition, such as Figure 9 as well as Figure 10As shown, the connecting member 131A, when viewed from above and from the side, is located at one of a plurality of recesses 113 sandwiched between it and the connecting member 114A. By providing the recess 113 between the connecting member 131A and the connecting member 114A, the heat transfer path from the connecting member 114A to the connecting member 131A becomes a path that bypasses the recess 113. This further suppresses heat conduction from the first plate member 111 to the connecting member 131A via the connecting member 114A. Furthermore, when viewed from above and from the side, the number of recesses 113 sandwiched between the connecting member 131A and the connecting member 114A is not limited to one; it can be two or more.

[0091] Furthermore, the connecting member 131A is located closer to the center of the second plate member 112 than the joining member 114A when viewed from above and from the side. Therefore, since the connecting member 131A supports the area near the center of the heating plate 110, deflection of the center of the heating plate 110 due to its own weight can be suppressed. Moreover, since the joining member 114A is located further away from the center of the second plate member 112 than the connecting member 131A, heat conduction from the center of the heating plate 110 (first plate member 111) to the joining member 114A can be suppressed.

[0092] However, the portion of the first plate member 111 located near the joining member 114A is more susceptible to heat loss from the joining member 114A compared to other portions. Therefore, the portion of the first plate member 111 located near the joining member 114A may have a lower temperature compared to other portions. If the temperature of the portion of the first plate member 111 located near the joining member 114A decreases, there is a possibility that the heat uniformity of the first plate member 111 may be compromised.

[0093] Therefore, in the heating device 100A according to this embodiment, such as Figure 9 As shown, the joining member 114A, when viewed from above, is located closer to the lower surface 110b among the plurality of recesses 113. Figure 10 The recess 113 on the periphery of the reference is further inward. Therefore, since the connecting member 114A is surrounded by a plurality of recesses 113, the portion of the first plate member 111 located near the connecting member 114A is heated by a plurality of heaters 120 respectively inserted into the plurality of recesses 113. As a result, temperature drop in the portion of the first plate member 111 located near the connecting member 114A can be suppressed, and the uniformity of heat distribution in the first plate member 111 can be maintained.

[0094] In addition, such as Figure 10As shown, the connecting member 114A penetrates the heat insulation member 115, and has a spacer member 170 on the outer periphery of the penetrating portion. The spacer member 170 forms a cylindrical shape surrounding the portion of the connecting member 114A that penetrates the heat insulation member 115, and is in contact with the first plate member 111 and the second plate member 112. A gap may or may not be provided between the inner peripheral surface of the spacer member 170 and the outer peripheral surface of the connecting member 114A. By having the outer periphery of the connecting member 114A surrounded by the cylindrical spacer member 170, the heat transfer from the connecting member 114A to the heat insulation member 115 can be suppressed.

[0095] The spacer member 170 is preferably made of ceramic, for example, which has high thermal insulation properties. Materials for the spacer member 170 include, for example, oxide ceramics, nitride ceramics, or carbide ceramics. This further suppresses heat transfer from the connecting member 114A to the thermal insulation member 115.

[0096] <Modifications of the second embodiment>

[0097] Next, refer to Figures 11-13 Various modifications of the second embodiment will be described below. Furthermore, in the following description, the same reference numerals are used for structures common to the second embodiment described above, and detailed descriptions are omitted.

[0098] Figure 11 This is a cross-sectional view of the heating device 100A according to a variation of the second embodiment 1. Figure 11 The heating device 100A shown mainly consists of the front end 131Aa of the connecting structural component 131A. Figures 8-10 The heating device shown is different from the 100A.

[0099] Figure 11 The front end 131Aa of the connecting member 131A shown extends from the lower surface 110b of the second plate member 112 in the threaded hole 112c to a position that does not reach the upper surface 112a. Furthermore, a gap 112d is formed between the end face of the front end 131Aa and the surface of the heat insulation member 115 exposed from the threaded hole 112c.

[0100] A gas, such as air, may be present in the gap 112d. The air in the gap 112d has a lower thermal conductivity than the thermal insulation member 115. Therefore, by forming the gap 112d between the end face of the front end 131Aa of the connecting member 131A and the surface of the thermal insulation member 115, heat conduction from the thermal insulation member 115 to the connecting member 131A can be suppressed. As a result, heat conduction from the first plate member 111, which has a heating surface, i.e., the upper surface 110a, to the connecting member 131A via the thermal insulation member 115 can be suppressed.

[0101] Figure 12This is a cross-sectional view of the heating device 100A according to a variation of the second embodiment. Figure 12 The heating device 100A shown mainly consists of the structure of the front end 131Aa of the connecting structural member 131A and the structure of the heat insulation member 115. Figures 8-10 The heating device shown is different from the 100A.

[0102] Figure 12 The front end 131Aa of the connecting member 131A shown extends from the lower surface 110b of the second plate member 112 in the threaded hole 112c to a position that does not reach the upper surface 112a. Furthermore, the front end 131Aa of the connecting member 131A contacts a portion of the heat insulation member 115 that fills the threaded hole 112c.

[0103] In this way, by bringing a portion of the heat-insulating member 115 filling the threaded hole 112c into contact with the front end 131Aa of the connecting member 131A, the thickness of the heat-insulating member 115 can be locally increased at the position corresponding to the front end 131Aa of the connecting member 131A. As a result, heat conduction from the first plate member 111 having the heating surface, i.e., the upper surface 110a, to the connecting member 131A via the heat-insulating member 115 can be suppressed.

[0104] Figure 13 This is a cross-sectional view of the heating device 100A according to the modified example 3 of the second embodiment. Figure 13 The heating device 100A shown mainly consists of the front end 131Aa of the connecting structural component 131A. Figures 8-10 The heating device shown is different from the 100A.

[0105] Figure 13 The front end 131Aa of the connecting member 131A shown protrudes from the threaded hole 112c toward the heat insulation member 115 and extends toward the first plate member 111, and is embedded in the interior of the heat insulation member 115.

[0106] In this way, by embedding the front end 131Aa of the connecting member 131A inside the insulation member 115, the positional deviation of the insulation member 115 can be suppressed.

[0107] As described above, the heating device according to the second embodiment (e.g., heating device 100A) also includes a fixing plate (e.g., fixing plate 130A) and a connecting member (e.g., connecting member 131A). The fixing plate fixes a plurality of heaters (e.g., heater 120) at a position separated from the second plate member (e.g., second plate member 112). The connecting member connects the fixing plate and the second plate member. The connecting member engages with a threaded hole (e.g., threaded hole 112c) provided in the second plate member at its front end, and extends toward the first plate member with a length that does not penetrate the heat insulation member (e.g., heat insulation member 115). As a result, heat conduction from the first plate member (e.g., first plate member 111) of the heating surface to the connecting member can be suppressed.

[0108] Furthermore, in the second embodiment, the front end of the connecting member extends from the back side (e.g., lower surface 110b) to the mating surface (e.g., upper surface 112a) via the threaded hole, and contacts the surface of the heat-insulating member exposed from the threaded hole. This allows for the uniformization of the heat transfer path length from the first plate member to the front ends of the multiple connecting members, resulting in improved heat uniformity of the first plate member.

[0109] Furthermore, the connecting member according to the second embodiment can also extend from the back side in the threaded hole to a position that does not reach the mating surface, and be separately disposed from the surface of the heat insulation member exposed from the threaded hole. This suppresses heat conduction from the first plate member with the heating surface to the connecting member via the heat insulation member.

[0110] Furthermore, in the second embodiment, the front end of the connecting member can extend from the back side in the threaded hole to a position that does not reach the mating surface, and contact a portion of the heat insulation member filling the threaded hole. This suppresses heat conduction from the first plate member with the heating surface to the connecting member via the heat insulation member.

[0111] Furthermore, in the second embodiment, the front end of the connecting member can also protrude from the threaded hole toward the heat insulation member and extend toward the first plate member, being embedded inside the heat insulation member. This suppresses positional deviation of the heat insulation member.

[0112] Furthermore, the heating device according to the second embodiment also includes a joining member (e.g., joining member 114A) for joining the second plate member to the first plate member. The joining member is located at a position that does not overlap with the connecting member when viewed from above. As a result, heat conduction from the first plate member to the connecting member via the joining member is further suppressed.

[0113] Furthermore, the heating device according to the second embodiment has at least one of a plurality of recesses between the connecting member and the joining member. This further suppresses heat conduction from the first plate member to the connecting member via the joining member.

[0114] Furthermore, in the second embodiment, the connecting member is located closer to the center of the second plate member than the joining member. This suppresses deflection of the center of the heating plate due to its own weight and also suppresses heat conduction from the center of the heating plate to the joining member.

[0115] Furthermore, in the second embodiment, the joining member is located further inward than the recess closest to the rear periphery among the plurality of recesses. Therefore, the portion of the first plate member located near the joining member is heated by the plurality of heaters inserted into the plurality of recesses, thus suppressing temperature drop in that portion and maintaining uniform heating of the first plate member.

[0116] Furthermore, the joining member according to the second embodiment has a first spacer member (e.g., spacer member 170). The first spacer member is an annular body, surrounded by a heat-insulating member, and in contact with the first plate member and the second plate member. As a result, heat transfer from the joining member to the heat-insulating member can be suppressed.

[0117] Furthermore, the first spacer member according to the second embodiment comprises ceramic. This further suppresses heat transfer from the joining member to the insulation member.

[0118] Furthermore, the connecting member according to the second embodiment has a second spacer member (e.g., spacer member 140A). The second spacer member is a cylindrical body that is in contact with the fixing plate and the second plate member. As a result, the heat release of the connecting member into the space surrounding the connecting member can be suppressed.

[0119] Furthermore, the second spacer member according to the second embodiment is made of metal. This improves the durability of the spacer member and maintains a fixed distance between the fixing plate and the second plate member.

[0120] <Third Implementation Method>

[0121] Figure 14 This is a cross-sectional view of the heating device 100B according to the third embodiment. Furthermore, in the following description, the same reference numerals are used for structures common to the second embodiment described above, and detailed descriptions are omitted.

[0122] Figure 14 The heating device 100B shown makes the structure of the first plate member and Figures 8-10 The heating device shown is different from the 100A. Specifically, in Figure 14 In the heating device 100B shown, the first plate member 111 has a groove 111c on its lower surface 111a. The groove 111c extends from the periphery of the lower surface 111a toward the center, and the opening at the top is closed by the heat insulation member 115.

[0123] In this way, by providing a groove 111c on the lower surface 111a of the first plate member 111, the thermal expansion and thermal contraction of the first plate member 111 caused by the heat cycle can be absorbed through the groove 111c.

[0124] In addition, in the first plate member 111, a transverse hole or a longitudinal hole is provided instead of a groove 111c.

[0125] <Fourth Implementation>

[0126] Figure 15 This is a cross-sectional view of the heating device 100C according to the fourth embodiment. Furthermore, in the following description, the same reference numerals are used for structures common to the third embodiment described above, and detailed descriptions are omitted.

[0127] Figure 15 The heating device 100C shown is similar to the one with a temperature sensing element. Figure 14 The heating device 100B shown is different. Specifically, in Figure 15 In the heating device 100C shown, the first plate member 111 has a temperature sensing element 180 inserted into the slot 111c. A thermocouple can be used as the temperature sensing element 180, for example.

[0128] Thus, by inserting the temperature sensing element 180 into the groove 111c of the first plate member 111, the temperature of the first plate member 111 can be measured.

[0129] <Fifth Implementation>

[0130] Figure 16 This is a side view of the heating device 100D according to the fifth embodiment. Figure 17 This is a cross-sectional view of the heating device 100D according to the fifth embodiment. Furthermore, in the following description, structures common to the modified example 2 of the first embodiment described above are labeled with the same reference numerals, and detailed descriptions are omitted.

[0131] Figure 16 as well as Figure 17 The heating device 100D shown mainly consists of a fixed plate and other similar structures. Figure 6 as well as Figure 7 The heating device 100 involved in the variation 2 of the first embodiment shown is different. Specifically, the fixing plate 130B has a third plate member 132, a fourth plate member 133, and a heat insulation member 135.

[0132] The third plate member 132 is a metal plate-shaped member having a facing surface 132a opposite to the heating plate 110. The third plate member 132 is joined to the fourth plate member 133 by a connecting member (not shown) such as a bolt, with a heat insulation member 135 disposed between the third plate member 132 and the fourth plate member 133.

[0133] The fourth plate member 133 is a metal plate-shaped member that engages with the back side of the third plate member 132 opposite to the opposing surface 132a. Multiple heaters 120 are fixed to the fourth plate member 133. Specifically, the fourth plate member 133 has multiple fixing holes 130a at positions corresponding to multiple recesses 113, through which multiple heaters 120 are inserted and fixed. Specifically, an internal thread is formed on a portion of the inner wall of each fixing hole 130a. On the other hand, a cylindrical mounting member 121 is mounted on the outer peripheral surface of each heater 120, and an external thread 121a is formed on a portion of the outer peripheral surface of the mounting member 121. The multiple heaters 120 are fixed to the fourth plate member 133 by engaging with the internal thread of each fixing hole 130a when each heater 120 is inserted through it. In addition, through holes that allow the heater 120 to be inserted are formed in the third plate member 132 and the heat insulation member 135 corresponding to the fixing hole 130a.

[0134] The heat insulation member 135 is inserted between the third plate member 132 and the fourth plate member 133. The heat insulation member 135 is, for example, a sheet member containing heat-insulating fibers, which has the function of restricting the transfer of heat from the third plate member 132 side to the fourth plate member 133 side.

[0135] The material of the heat insulation member 135 is preferably, for example, a ceramic with heat insulation properties. As a material for the heat insulation member 135, oxide ceramics, nitride ceramics, or carbide ceramics can be used, for example.

[0136] Thus, by having a heat insulation member 135 on the fixing plate 130B, the heating of the plurality of heaters 120 relative to the fixing portion of the fixing plate 130B (e.g., the portion where the mounting member 121 is installed) can be suppressed.

[0137] <Sixth Implementation>

[0138] Figure 18 This is a side view of the heating device 100E according to the sixth embodiment. Figure 19 This is a cross-sectional view of the heating device 100E according to the sixth embodiment. Furthermore, in the following description, the same reference numerals are used for structures common to the modified example 2 of the first embodiment described above, and detailed descriptions are omitted.

[0139] Figure 18 as well as Figure 19 The heating device 100E shown is mainly similar to the one with heat insulation plates. Figure 6 as well as Figure 7 The heating device 100 involved in the variation 2 of the first embodiment shown is different. Specifically, Figure 18 as well as Figure 19The heating device 100E shown has a heat insulation plate 190 located between the heating plate 110 and the fixed plate 130.

[0140] The heat insulation plate 190 has a fifth plate member 191, a sixth plate member 192, and a heat insulation member 195. The fifth plate member 191, the sixth plate member 192, and the heat insulation member 195 are respectively formed with multiple through holes that can be inserted into the multiple heaters 120 fixed to the fixed plate 130.

[0141] The fifth plate member 191 is a metal plate-shaped member having a facing surface 191a opposite to the heating plate 110. The fifth plate member 191 is joined to the sixth plate member 192 by a connecting member (not shown), such as bolts, with a heat insulation member 195 disposed between the fifth plate member 191 and the sixth plate member 192. Furthermore, the fifth plate member 191 is isolated from the heating plate 110 by being connected to it via a columnar connecting metal member 196 of a given length. The length of the connecting metal member 196 can, for example, be greater than... Figure 6 as well as Figure 7 The thickness of the spacer 140 shown is long.

[0142] The sixth plate member 192 is a metal plate-shaped member that joins the back side of the fifth plate member 191 opposite to the opposing surface 191a. A columnar connecting metal member 197 of the sixth plate member is connected to a fixing plate 130, thus isolating it from the fixing plate 130. The length of the connecting metal member 197 can, for example, be greater than... Figure 6 as well as Figure 7 The thickness of the spacer 140 shown is long.

[0143] The heat insulation member 195 is inserted between the fifth plate member 191 and the sixth plate member 192. The heat insulation member 195 is, for example, a sheet member containing heat-insulating fibers, and has the function of suppressing the transfer of heat from the fifth plate member 191 side to the sixth plate member 192 side.

[0144] The material of the heat insulation member 195 is preferably, for example, a ceramic with heat insulation properties. As a material for the heat insulation member 195, oxide ceramics, nitride ceramics, or carbide ceramics can be used, for example.

[0145] In this way, by providing a heat insulation plate 190 between the heating plate 110 and the fixed plate 130, the temperature rise of the fixed plate 130 can be suppressed.

[0146] Further effects and variations can be readily derived by those skilled in the art. Therefore, the invention is not limited to the specific, detailed, and representative embodiments characterized and described above. Thus, various modifications can be made without departing from the spirit or scope of the invention as defined by the appended claims and their equivalents.

[0147] -Symbol Explanation-

[0148] Heating devices 100, 100A~100E

[0149] 110 heating plate

[0150] 110a upper surface

[0151] 110b lower surface

[0152] 111 First plate component

[0153] 111a Lower surface

[0154] 111b recess

[0155] 111c groove

[0156] 112 Component of the second plate

[0157] 112a Upper surface

[0158] 112b Through Hole

[0159] 112c threaded hole

[0160] 112d gap

[0161] 113 concavity

[0162] 114, 114A Jointing Components

[0163] 115 Thermal insulation components

[0164] 115a Through Hole

[0165] 120 heater

[0166] 120a front end

[0167] 120b base terminal

[0168] 121 Installation Components

[0169] 121a External Thread

[0170] Power supply terminals 122 and 123

[0171] 130, 130A, 130B Fixing Plate

[0172] 130a Fixing Hole

[0173] 131, 131A connecting structural components

[0174] 131Aa Frontend

[0175] 132 Component of the 3rd Plate

[0176] 132a Opposite surface

[0177] 133 Component of Plate 4

[0178] 135 thermal insulation components

[0179] 140, 140A Spacing Members

[0180] 170 spacer components

[0181] 180 temperature sensing element

[0182] 190 heat insulation board

[0183] Component 191, Plate 5

[0184] 191a Opposite Surface

[0185] 192 6th plate component

[0186] 195 Thermal insulation components.

Claims

1. A heating device, comprising: A heating plate having a heating surface and a plurality of recesses on its back side opposite to the heating surface; and Multiple heaters, each located in one of the multiple recesses, The heating plate has: The first plate member has the heating surface and a mating surface located opposite the heating surface; and The second plate member has a mating surface that engages with the mating surface, a back surface located opposite to the mating surface, and a plurality of through holes extending from the back surface to the mating surface. The plurality of recesses are each formed by each of the plurality of through holes and the mating surface.

2. The heating device according to claim 1, wherein, The front ends of the plurality of heaters respectively contact the mating surface.

3. A heating device, comprising: A heating plate having a heating surface and a plurality of recesses on its back side opposite to the heating surface; and Multiple heaters, each located in one of the multiple recesses, The heating plate has: The first plate member has the heating surface, a mating surface located opposite to the heating surface, and a plurality of first recesses located on the mating surface; The second plate member has a mating surface that engages with the mating surface, a back surface located opposite the mating surface, and a plurality of first through holes corresponding to the plurality of first recesses and extending from the back surface to the mating surface; and A heat-insulating member, located between the first plate member and the second plate member, has a plurality of second through holes corresponding to the plurality of first recesses. The plurality of recesses are respectively formed by each of the plurality of first through holes, each of the plurality of second through holes, and each of the plurality of first recesses.

4. The heating device according to claim 3, wherein, The front ends of the plurality of heaters are respectively connected to the plurality of first recesses.

5. The heating device according to claim 1 or 3, wherein, The heating plate is a metal component. The plurality of heaters are ceramic heaters having a ceramic body and a heating resistor located inside the ceramic body.

6. The heating device according to claim 1 or 3, wherein, A fixing plate for fixing the plurality of heaters is also provided at a location separate from the heating plate.

7. The heating device according to claim 6, wherein, A spacer member is also provided between the heating plate and the fixing plate.

8. The heating device according to claim 7, wherein, The spacer member comprises ceramic.

9. The heating device according to claim 6, wherein, The fixing plate has multiple fixing holes at positions corresponding to the multiple recesses, which respectively allow the multiple heaters to be inserted and fixed. The plurality of heaters have base ends located further away from the heating surface on the back side of the fixed plate, opposite to the heating plate. The base has a power supply terminal for supplying power to the plurality of heaters.

10. The heating device according to claim 3, wherein, The heating device also has: A fixing plate, which fixes the plurality of heaters at a position separate from the second plate member; and A connecting structural member that connects the fixing plate and the second plate component. The connecting member engages its front end with the threaded hole of the second plate member and extends toward the first plate member in a length that does not penetrate the insulation member.

11. The heating device according to claim 10, wherein, The connecting member extends from the back side in the threaded hole to a position that does not reach the mating surface, and is located at a position separate from the surface of the thermal insulation member exposed from the threaded hole.

12. The heating device according to claim 10 or 11, wherein, The heating device further includes a connecting member that connects the second plate member to the first plate member. The joining member is located in a position that does not overlap with the connecting member when viewed from above.

13. The heating device according to claim 12, wherein, At least one of the plurality of recesses is provided between the connecting member and the joining member.

14. The heating device according to claim 12, wherein, The connecting member is located closer to the center of the second plate member than the joining member.

15. The heating device according to claim 12, wherein, The engaging member is located further inward than the recess closest to the periphery of the back side among the plurality of recesses.

16. The heating device according to claim 12, wherein, The joining member has a first spacer member. The first spacer is an annular body, surrounded by the heat insulation member, and connected to the first plate member and the second plate member.

17. The heating device according to claim 11, wherein, The connecting member has a second spacer member. The second spacer is a cylindrical body that is connected to the fixing plate and the second plate member.

18. The heating device according to claim 1 or 3, wherein, The plurality of recesses are densely spaced on the surface and sparsely spaced on the back side.

19. The heating device according to claim 3 or 4, wherein, The first plate member has a groove that extends from the periphery of the mating surface toward the center and is closed by the heat insulation member.

20. The heating device according to claim 19, wherein, The first plate component has a temperature measuring element in the groove.

21. The heating device according to claim 1 or 3, wherein, The heating device is a mold heating device.

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