A platform and testing method for comprehensive performance testing of a liquid vaporizer

Abstract

The application discloses a platform and a testing method for comprehensive performance testing of a liquid vaporizer, and relates to the technical field of liquid vaporizers. The platform comprises a carrier gas tank, a liquid tank, a liquid vaporizer, a gas flow controller, a liquid flow meter, a vacuum pump, a vacuum gauge, a steam flow meter, a pressure regulating valve, a temperature controller, an aerosol monitor and a control terminal, and an observation window is arranged on a steam pipe at an outlet of the liquid vaporizer. The testing platform is provided with the observation window and the aerosol monitor, can record the fluid state (whether obvious liquid fluid appears) at the outlet of the liquid vaporizer and the mist content in the steam at any time, can measure the vaporization capacity of the liquid vaporizer, can test the service life of the liquid vaporizer by using the testing platform, and fills the blank of the prior art. In addition, the carrier gas tank and the liquid tank can be replaced with different media, so that the testing platform can test the vaporization capacity of the liquid vaporizer according to different media, and has a wide application range.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of liquid vaporizer, more particularly to a platform and method for testing comprehensive performance of liquid vaporizer. BACKGROUND

[0002] The electronic component product industry such as semiconductor and liquid crystal is developing continuously, and all requirements for clean in manufacturing environment, manufacturing device and using component are realized. The liquid vaporizer is mainly applied to chemical gas supply equipment of semiconductor manufacturing factory. At present, the technology for testing vaporization capacity and life of liquid vaporizer has not been reported in prior art.

[0003] Therefore, how to provide a platform and method for testing comprehensive performance of liquid vaporizer to fill the gap in prior art is a problem to be solved by those skilled in the art. SUMMARY

[0004] Therefore, the present application provides a platform and method for testing comprehensive performance of liquid vaporizer to fill the gap in prior art.

[0005] In order to achieve the above purpose, the present application adopts the following technical solutions:

[0006] A platform for testing comprehensive performance of liquid vaporizer comprises:

[0007] A carrier gas tank, two gas outlets of the carrier gas tank are connected with inlets of a first manual diaphragm valve and a second manual diaphragm valve respectively;

[0008] A liquid tank, an air inlet at the top of the liquid tank is connected with an outlet of the second manual diaphragm valve, and a liquid outlet pipe of the liquid tank is connected with an inlet of a third manual diaphragm valve;

[0009] A liquid vaporizer, a carrier gas inlet of the liquid vaporizer is connected with an outlet of the first manual diaphragm valve through a carrier gas pipe, a liquid inlet of the liquid vaporizer is connected with an outlet of the third manual diaphragm valve through a liquid pipe, a gas flow controller is connected on the carrier gas pipe, a liquid flow meter is connected on the liquid pipe, a vacuum pump is connected with a steam outlet of the liquid vaporizer through a steam pipe, a vacuum gauge, a steam flow meter and a pressure regulating valve are connected on the pipeline between the liquid vaporizer and the vacuum pump, and an observation window is arranged on the steam pipe close to the steam outlet of the liquid vaporizer;

[0010] A temperature controller, the temperature controller is electrically connected with a heating rod of a mixing part and a heating rod of a vaporization part of the liquid vaporizer;

[0011] An aerosol monitor, laser emitted by a laser emitter of the aerosol monitor penetrates into the vapor pipe through the observation window;

[0012] A control terminal, the control terminal is electrically connected with the gas flow controller, the piezoelectric control valve and the gas control valve of the liquid vaporizer, the liquid flow meter, the vacuum gauge, the vapor flow meter and the aerosol monitor.

[0013] According to the above technical scheme, compared with the prior art, the present application provides a platform for comprehensive performance test of a liquid vaporizer, which is provided with an observation window and an aerosol monitor, and can record the fluid state (whether obvious liquid fluid appears) at the outlet of the liquid vaporizer and the mist content in the vapor at any time, so that the vaporization capacity of the liquid vaporizer can be measured, and the service life of the liquid vaporizer can also be tested using the test platform, which fills the gap in the prior art. In addition, different medium carrier gas tanks and liquid tanks can be replaced, so that the test platform can test the vaporization capacity of the liquid vaporizer according to different media, and has a wide range of applications.

[0014] Further, the vapor pipe is wrapped with an electric heating belt on the pipe wall near the position of the vapor outlet of the liquid vaporizer, and the temperature controller is electrically connected with the electric heating belt.

[0015] The above technical scheme has the beneficial effect that the outlet of the liquid vaporizer can be heated to prevent the vapor at the outlet from condensing and affecting the test effect.

[0016] Further, the first pressure reducing valve and the second pressure reducing valve are installed on the two gas outlets of the carrier gas tank, the outlet of the first pressure reducing valve is connected with the inlet of the first manual diaphragm valve, and the outlet of the second pressure reducing valve is connected with the inlet of the second manual diaphragm valve.

[0017] The above technical scheme has the beneficial effect that the pressure of the gas source at the outlet of the carrier gas tank can be adjusted to meet the test requirements.

[0018] Further, a pressure sensor is installed on the carrier gas pipe, the pressure sensor is located on the outlet side of the gas flow controller, and the pressure sensor is electrically connected with the control terminal.

[0019] The above technical scheme has the beneficial effect that the pressure sensor can monitor the inlet pressure of the liquid vaporizer carrier gas when the first pressure reducing valve is adjusted, so that the adjustment of the first pressure reducing valve is more accurate.

[0020] Further, the vapor pipe is connected with a manual angle valve on the pipeline between the pressure regulating valve and the vacuum pump.

[0021] The beneficial effects of the above technical solutions are that the pressure and switch of the steam pipe outlet gas path can be controlled.

[0022] The test steps of the vaporization capacity of the liquid vaporizer using the test platform are as follows:

[0023] Step S1-1: Connect the pipeline and check the air tightness of the pipeline platform.

[0024] Step S2-1: Open the first manual diaphragm valve, use the carrier gas in the carrier gas tank to circulate and clean the pipeline platform to remove air in the pipeline, and then close the first manual diaphragm valve.

[0025] Step S3-1: Control the heating rods of the mixing part and the vaporization part of the liquid vaporizer to a predetermined temperature through the temperature controller.

[0026] Step S4-1: Set the gas flow controller to a predetermined flow rate, set the liquid flow meter to a predetermined flow rate, and send a signal from the liquid flow meter to the piezoelectric control valve of the liquid vaporizer, and adjust the opening degree of the piezoelectric control valve to make the actual liquid flow rate reach the predetermined flow rate, and adjust the outlet steam pressure of the liquid vaporizer to a predetermined pressure through the pressure regulating valve.

[0027] Step S5-1: Open the first manual diaphragm valve, the second manual diaphragm valve, and the third manual diaphragm valve, and open the gas control valve of the liquid vaporizer, so that the carrier gas of the carrier gas tank enters the carrier gas inlet of the liquid vaporizer, and the other carrier gas enters the liquid tank to press the liquid inside to the liquid inlet of the gas control valve of the liquid vaporizer.

[0028] Step S6-1: Record the steam flow of the steam pipe through the steam flow meter, and record and observe the fluid state in the steam pipe and the mist content in the steam through the aerosol monitor.

[0029] Further, in the step S3-1, the electric heating belt is also controlled to a predetermined temperature by the temperature controller.

[0030] Further, in the step S5-1, the pressure of the two outlets of the carrier gas tank is also adjusted to a predetermined pressure through the first pressure reducing valve and the second pressure reducing valve, and when adjusting the first pressure reducing valve, the pressure sensor is used to monitor the pressure of the liquid vaporizer carrier gas inlet.

[0031] Further, in the step S2-1, the vacuum pump and the manual angle valve are also opened.

[0032] Further, the test steps of the service life of the liquid vaporizer using the test platform are as follows:

[0033] Step S1-2: install the liquid vaporizer on the test platform;

[0034] Step S2-2: open the first manual diaphragm valve, use the carrier gas in the carrier gas tank to perform a cyclic purge cleaning of the pipeline platform to remove air in the pipeline, and then close the first manual diaphragm valve;

[0035] Step S3-2: control the heating of the mixing part of the liquid vaporizer to 140℃ and the heating of the heating rod of the vaporization part to 200℃ by the temperature controller, and stabilize for 30min after reaching the set temperature to ensure sufficient heating;

[0036] Step S4-2: turn on the power supply of the liquid flowmeter, input a forced closing signal to the piezoelectric valve of the liquid vaporizer, and make the piezoelectric valve in a closed state;

[0037] Step S5-2: turn on the power supply of the gas flow controller, and control the carrier gas flow entering the liquid vaporizer to be 10 SLM;

[0038] Step S6-2: control the liquid flow of the vaporizer by the liquid flowmeter, and cycle the flow range from 20% to 80% every 3s, and then from 80% to 20% every 3s, to 100,000 times, pause the life test, and perform a sealing pressure test and a vaporization capacity test on the measured liquid vaporizer, and if qualified, continue the life test. BRIEF DESCRIPTION OF DRAWINGS

[0039] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or the prior art description. Obviously, the drawings in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings can be obtained without creative labor based on the provided drawings.

[0040] Figure 1 The accompanying drawings provide a structural schematic view of a platform for comprehensive performance test of a liquid vaporizer. DETAILED DESCRIPTION

[0041] The technical solutions in the embodiments of the present application will be described clearly and completely in the following with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some embodiments of the present application, not all embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the present application.

[0042] As Figure 1As shown, the embodiment of the present application discloses a platform for comprehensive performance test of liquid vaporizer, which comprises:

[0043] The carrier gas tank 1 is connected with the inlet of the first manual diaphragm valve 2 and the inlet of the second manual diaphragm valve 3 through two gas outlets.

[0044] The liquid tank 4 is connected with the outlet of the second manual diaphragm valve 3 through the gas inlet at the top of the liquid tank 4, and the outlet pipe of the liquid tank 4 is connected with the inlet of the third manual diaphragm valve 5.

[0045] The liquid vaporizer 6 is connected with the outlet of the first manual diaphragm valve 2 through the carrier gas inlet of the liquid vaporizer 6 and the carrier gas pipe 7, and is connected with the outlet of the third manual diaphragm valve 5 through the liquid inlet of the liquid vaporizer 6 and the liquid pipe 8; the gas flow controller 9 is connected on the carrier gas pipe 7, and the liquid flow meter 10 is connected on the liquid pipe 8; the steam outlet of the liquid vaporizer 6 is connected with the vacuum pump 12 through the steam pipe 11, and the vacuum gauge 13, the steam flow meter 14 and the pressure regulating valve 15 are connected on the steam pipe 11 between the liquid vaporizer 6 and the vacuum pump 12; the observation window 16 is arranged on the steam pipe 11 near the steam outlet of the liquid vaporizer 6.

[0046] The temperature controller 17 is electrically connected with the heating rod of the mixing part and the heating rod of the vaporizing part of the liquid vaporizer 6.

[0047] The aerosol monitor 18 is arranged on the steam pipe 11, and the laser emitted by the laser emitter of the aerosol monitor 18 enters the steam pipe 11 through the observation window 16.

[0048] The control terminal 19 (which can be a computer, a PLC platform, or a single controller such as a temperature controller, a flow controller, a pressure controller, etc.) is electrically connected with the gas flow controller 9, the piezoelectric control valve and the gas control valve of the liquid vaporizer 6, the liquid flow meter 10, the vacuum gauge 13, the steam flow meter 14 and the aerosol monitor 18.

[0049] In the test platform, the pipe wall near the steam outlet of the liquid vaporizer 6 is wrapped with the electric heating belt 20, and the temperature controller 17 is electrically connected with the electric heating belt 20.

[0050] In the test platform, the first pressure reducing valve 21 and the second pressure reducing valve 22 are arranged on the two gas outlets at the bottom of the carrier gas tank 1, the outlet of the first pressure reducing valve 21 is connected with the inlet of the first manual diaphragm valve 2, and the outlet of the second pressure reducing valve 22 is connected with the inlet of the second manual diaphragm valve 3.

[0051] In the test platform, the pressure sensor 23 is arranged on the carrier gas pipe 7, the pressure sensor 23 is located on the outlet side of the gas flow controller 9, and the pressure sensor 23 is electrically connected with the control terminal 19.

[0052] In the test platform, the steam pipe 11 is connected with a manual angle valve 24 on the pipeline between the pressure regulating valve 15 and the vacuum pump 12.

[0053] In the above test platform, the first pressure reducing valve and the second pressure reducing valve are used to adjust the gas source pressure at the outlet of the carrier gas tank; the first manual diaphragm valve and the second manual diaphragm valve are used to control the opening and closing of the gas source; the third manual diaphragm valve is used to control the opening and closing of the liquid pipe; the gas flow controller (MFC) is used to control the carrier gas flow entering the liquid vaporizer; the pressure sensor is used to detect the carrier gas pressure; the liquid flow meter (LFM) is used to monitor the liquid flow and feed back the flow signal to the liquid vaporizer; the vacuum gauge is used to monitor the outlet vacuum degree (i.e. the outlet pressure) of the liquid vaporizer; the electric heating belt makes the temperature of the steam pipe reach a predetermined temperature, preventing the steam in the steam pipe from condensing and affecting the test results; the aerosol monitor has a laser probe that emits laser light that can pass through the observation window to irradiate the inside of the steam pipe, facilitating the monitoring of the mist content in the steam in the steam pipe and the liquid vaporizer outlet fluid state, so as to determine whether the vaporization capacity of the liquid vaporizer meets the requirements; the steam flow meter (MFM) is used to monitor the steam flow at the outlet of the liquid vaporizer; the pressure regulating valve is used to adjust the steam outlet pressure of the liquid vaporizer; the manual angle valve is used to control the opening and closing of the steam pipe outlet gas path; and the vacuum pump is used to obtain vacuum at the outlet of the liquid vaporizer to simulate the negative pressure environment used by the liquid vaporizer, so as to ensure that the vaporization capacity test results match the vaporization capacity of the liquid vaporizer in the actual use environment.

[0054] The test steps of the liquid vaporizer 6 using the above test platform are as follows:

[0055] Step S1-1: connect the pipeline and check the air tightness of the pipeline platform; if the air tightness meets the requirements, proceed to the next step, otherwise, repair the pipeline until the air tightness meets the requirements;

[0056] Step S2-1: open the first manual diaphragm valve 2, and use the carrier gas in the carrier gas tank 1 to perform cyclic purging and cleaning of the pipeline platform to remove air in the pipeline, so as to avoid affecting the test results due to the presence of air in the pipeline platform; after purging, close the first manual diaphragm valve 2;

[0057] Step S3-1: control the heating rods of the mixing part and the vaporization part of the liquid vaporizer 6 to heat to 140℃ and 160℃-200℃ respectively by the temperature controller 17 (control period ≤1s), and control the electric heating belt 20 to heat to 160℃-200℃, and stabilize for 30min to ensure sufficient heating;

[0058] Step S4-1: Set the gas flow controller 9 to 1 SLM-10 SLM, set the liquid flow meter 10 to a predetermined flow rate, and send a signal from the liquid flow meter 10 to the piezoelectric control valve of the liquid vaporizer 6, so that the piezoelectric control valve adjusts the opening size to make the actual liquid flow rate reach the predetermined flow rate, so that the mixed flow rate of the liquid and the carrier gas in the liquid vaporizer is 3-18 g / min, and the outlet steam pressure of the liquid vaporizer 6 is adjusted to 300 Torr-760 Torr through the pressure regulating valve 15;

[0059] Step S5-1: Open the first manual diaphragm valve 2, the second manual diaphragm valve 3, the third manual diaphragm valve 5, and open the gas control valve of the liquid vaporizer 6, so that the carrier gas of the carrier gas tank 1 enters the carrier gas inlet of the liquid vaporizer 6, and the other carrier gas enters the liquid tank 4 to press the liquid inside to the liquid inlet of the gas control valve of the liquid vaporizer 6;

[0060] Step S6-1: Record the steam flow rate of the steam pipe 11 through the steam flow meter 14, and record the observation of the fluid state in the steam pipe 11 and the mist content in the steam through the aerosol monitor 18, if there is no obvious liquid fluid in the steam pipe and the mist content in the steam is less than the rated value, it indicates that the vaporization capacity of the liquid vaporizer is good, if there is obvious liquid fluid in the steam pipe and the mist content in the steam exceeds the rated value, it indicates that the vaporization capacity of the liquid vaporizer is weak, which does not meet the requirements, at this time, the setting parameters of the liquid vaporizer need to be adjusted and the vaporization capacity test is performed again.

[0061] In step S5-1, the pressure of the two outlets of the carrier gas tank 1 is adjusted to a predetermined pressure through the first pressure reducing valve 21 and the second pressure reducing valve 22, and when the first pressure reducing valve 21 is adjusted, the pressure sensor 23 is used to monitor the carrier gas inlet pressure of the liquid vaporizer 6.

[0062] In step S2-1, the vacuum pump 12 and the manual angle valve 24 are also opened.

[0063] In the above test platform and test method, the observation window and the aerosol monitor are configured, the fluid state (whether there is obvious liquid fluid) at the outlet of the liquid vaporizer and the mist content in the steam can be recorded at any time, and the vaporization capacity of the liquid vaporizer can be measured, which fills the gap in the prior art. In addition, different medium carrier gas tanks and liquid tanks can be replaced, so that the test platform can test the vaporization capacity of the liquid vaporizer according to different media, and has a wide range of applications.

[0064] The application also provides a test step for the service life of the liquid vaporizer 6 using the above test platform, which is as follows:

[0065] Step S1-2: Install the liquid vaporizer 6 on the test platform;

[0066] Step S2-2: open the first manual diaphragm valve 2, and use the carrier gas in the carrier gas tank 1 to cyclically purge and clean the pipeline platform to remove air in the pipeline, and then close the first manual diaphragm valve 2;

[0067] Step S3-2: control the heating of the mixing part of the liquid vaporizer 6 to 140 DEG C and the heating rod of the vaporizing part to 200 DEG C by the temperature controller 17, and stabilize for 30 min after reaching the set temperature to ensure sufficient heating;

[0068] Step S4-2: turn on the power supply of the liquid flowmeter 10, and input a forced closing signal to the piezoelectric valve of the liquid vaporizer 6 to make the piezoelectric valve in a closed state;

[0069] Step S5-2: turn on the power supply of the gas flow controller 9, and control the carrier gas flow entering the liquid vaporizer 6 to be 10 SLM;

[0070] Step S6-2: control the liquid flow of the vaporizer 6 by the liquid flowmeter 10, and cycle the flow range from 20% to 80% for 3 s, and then from 80% to 20% for 3 s, and cycle to 100,000 times, pause the life test, and perform a sealing pressure test and a vaporization capacity test on the measured liquid vaporizer 6, and if qualified, continue the life test.

[0071] The life test can be connected with a steam outlet pipeline (including a pressure regulating valve, a vacuum pump, etc.), or can not be connected, and when connected, the steam outlet pressure can be adjusted to 300 Torr.

[0072] Therefore, the service life of the liquid vaporizer can also be tested by using the test platform, and the comprehensive performance test of the liquid vaporizer can be realized.

[0073] The embodiments in the specification are described in a progressive manner, and each embodiment focuses on the difference from other embodiments, and the same or similar parts of each embodiment can be referred to each other. For the device disclosed in the embodiments, since it corresponds to the method disclosed in the embodiments, the description is relatively simple, and the related parts can be referred to the method part.

[0074] The above description of the disclosed embodiments enables a person skilled in the art to implement or use the present application. Various modifications to the embodiments will be apparent to those skilled in the art, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the present application. Therefore, the present application will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A platform for comprehensive performance testing of a liquid vaporizer, characterized in that, It comprises: a carrier gas tank (1), the two-way outlet of the carrier gas tank (1) is connected with the inlet of the first manual diaphragm valve (2) and the inlet of the second manual diaphragm valve (3) respectively; a liquid tank (4), the gas inlet at the top of the liquid tank (4) is connected with the outlet of the second manual diaphragm valve (3), and the liquid outlet pipe of the liquid tank (4) is connected with the inlet of the third manual diaphragm valve (5); a liquid vaporizer (6), the carrier gas inlet of the liquid vaporizer (6) is connected with the outlet of the first manual diaphragm valve (2) through the carrier gas pipe (7), the liquid inlet of the liquid vaporizer (6) is connected with the outlet of the third manual diaphragm valve (5) through the liquid pipe (8), the carrier gas pipe (7) is connected with the gas flow controller (9), the liquid pipe (8) is connected with the liquid flow meter (10), the steam outlet of the liquid vaporizer (6) is connected with the vacuum pump (12) through the steam pipe (11), the steam pipe (11) is connected with the vacuum gauge (13), the steam flow meter (14) and the pressure regulating valve (15) on the pipeline between the liquid vaporizer (6) and the vacuum pump (12), and the steam pipe (11) is provided with an observation window (16) near the steam outlet of the liquid vaporizer (6); a temperature controller (17), the temperature controller (17) is electrically connected with the mixed part heating rod and the vaporization part heating rod of the liquid vaporizer (6); an aerosol monitor (18), the laser emitted by the laser emitter of the aerosol monitor (18) enters the steam pipe (11) through the observation window (16); a control terminal (19), the control terminal (19) is electrically connected with the gas flow controller (9), the piezoelectric control valve and the gas control valve of the liquid vaporizer (6), the liquid flow meter (10), the vacuum gauge (13), the steam flow meter (14) and the aerosol monitor (18).

2. The platform for comprehensive performance testing of a liquid vaporizer of claim 1, wherein, The steam pipe (11) is wrapped with an electric heating belt (20) on the pipe wall near the steam outlet of the liquid vaporizer (6), and the temperature controller (17) is electrically connected with the electric heating belt (20).

3. The platform for comprehensive performance testing of a liquid vaporizer of claim 2, wherein, It also comprises a first pressure reducing valve (21) and a second pressure reducing valve (22) installed on the two-way outlet of the carrier gas tank (1), the outlet of the first pressure reducing valve (21) is connected with the inlet of the first manual diaphragm valve (2), and the outlet of the second pressure reducing valve (22) is connected with the inlet of the second manual diaphragm valve (3).

4. The platform for comprehensive performance testing of a liquid vaporizer of claim 3, wherein, It also comprises a pressure sensor (23) installed on the carrier gas pipe (7), the pressure sensor (23) is located on the outlet side of the gas flow controller (9), and the pressure sensor (23) is electrically connected with the control terminal (19).

5. The platform for comprehensive performance testing of a liquid vaporizer according to claim 1 or 2, wherein, The steam pipe (11) is connected with a manual angle valve (24) on the pipeline between the pressure regulating valve (15) and the vacuum pump (12).

6. A method of testing a platform for comprehensive performance testing of a liquid vaporizer as claimed in claim 4, characterized in that, The test steps of the vaporization capacity of the liquid vaporizer (6) are as follows: Step S1-1: connect the pipeline and check the air tightness of the pipeline platform; Step S2-1: open the first manual diaphragm valve (2), and use the carrier gas in the carrier gas tank (1) to perform cyclic purging and cleaning on the pipeline platform to remove air in the pipeline, and then close the first manual diaphragm valve (2); Step S3-1: control the heating rods of the mixing part and the vaporization part of the liquid vaporizer (6) to be heated to a predetermined temperature respectively by the temperature controller (17); Step S4-1: set the gas flow controller (9) to a predetermined flow rate, set the liquid flow meter (10) to a predetermined flow rate, and send a signal to the piezoelectric control valve of the liquid vaporizer (6) by the liquid flow meter (10), so that the piezoelectric control valve adjusts the opening degree to make the actual liquid flow rate reach the predetermined flow rate, and adjust the steam pressure at the outlet of the liquid vaporizer (6) to a predetermined pressure by the pressure regulating valve (15); Step S5-1: open the first manual diaphragm valve (2), the second manual diaphragm valve (3), and the third manual diaphragm valve (5), and open the gas control valve of the liquid vaporizer (6), so that the carrier gas of the carrier gas tank (1) enters the carrier gas inlet of the liquid vaporizer (6) and the other carrier gas enters the liquid tank (4) to pressurize the liquid in the liquid tank (4) to the liquid inlet of the gas control valve of the liquid vaporizer (6); Step S6-1: record the steam flow rate of the steam pipe (11) by the steam flow meter (14), and record and observe the fluid state in the steam pipe (11) and the mist content in the steam by the aerosol monitor (18).

7. The method of claim 6, wherein the platform is used for comprehensive performance testing of a liquid vaporizer. In the step S3-1, the electric heating belt (20) is also controlled by the temperature controller (17) to be heated to a predetermined temperature.

8. The method of claim 6, wherein the platform for comprehensive performance testing of a liquid vaporizer is characterized by, In the step S5-1, the pressures of the two outlets of the carrier gas tank (1) are also adjusted to a predetermined pressure by the first pressure reducing valve (21) and the second pressure reducing valve (22), and when the first pressure reducing valve (21) is adjusted, the pressure sensor (23) is used to monitor the pressure of the carrier gas inlet of the liquid vaporizer (6).

9. The method of claim 6, wherein, In the step S2-1, the vacuum pump (12) and the manual angle valve (24) are also opened.

10. The method of claim 6, wherein, The test steps of the service life of the liquid vaporizer (6) are as follows: Step S1-2: install the liquid vaporizer (6) on a test platform; Step S2-2: open the first manual diaphragm valve (2), and use the carrier gas in the carrier gas tank (1) to perform cyclic purging and cleaning on the pipeline platform to remove air in the pipeline, and then close the first manual diaphragm valve (2); Step S3-2: control the heating rods of the mixing part and the vaporization part of the liquid vaporizer (6) to be heated to a predetermined temperature respectively by the temperature controller (17); Step S4-2: turn on the power supply of the liquid flow meter (10), input a forced closing signal to the piezoelectric valve of the liquid vaporizer (6), and make the piezoelectric valve in a closed state; Step S5-2: turn on the power supply of the gas flow controller (9), and control the carrier gas flow rate entering the liquid vaporizer (6) to be 10 SLM; Step S6-2: control the liquid flow of the vaporizer (6) by the liquid flow meter (10), adjust the flow range from 20% to 80% for 3s, then from 80% to 20% for 3s, and repeat the cycle for 100,000 times, pause the life test, and conduct a sealing pressure test and a vaporization capacity test on the measured liquid vaporizer (6), and if qualified, continue the life test.

Images