three-way valve

Abstract

The application relates to a three-way valve, which mainly comprises a three-way valve seat in an inner valve sleeve, an opening-adjustable driving assembly assembled on the three-way valve seat, a passive elastic assembly assembled below the three-way valve seat and a lifting connecting rod penetrating through the inner valve sleeve. The first inlet and the second inlet of the three-way valve seat are located at the same horizontal position, the outlet is communicated with the inner valve sleeve, and the three-way valve seat has a symmetrical structure in the horizontal rotation and the longitudinal overturning of the inner valve sleeve. The lifting of the connecting rod simultaneously drives the opening of the upper valve port and the closing of the lower valve port of the inner valve sleeve, and the first inlet is communicated with the outlet; the lowering of the connecting rod simultaneously drives the closing of the upper valve port and the opening of the lower valve port of the inner valve sleeve, and the second inlet is communicated with the outlet; the constraint of the lifting stroke of the connecting rod realizes the controllable mixing of the two inlets in the inner valve sleeve, and realizes the premixing of the equipment liquid inlet. The three-way valve solves the problems of the existing three-way valve, such as the tight closing and durability in the two-in-one-out application and the inability to premix and fine-tune.

Description

Technical Field

[0001] This invention relates to the technical field of three-way valves for conveying fluids, and more particularly to a three-way valve, production equipment using the three-way valve, and assembly method of the three-way valve. One specific application of the three-way valve is for switching control of electronic ultrapure chemicals and / or electronic ultrapure water in semiconductor manufacturing equipment. Background Technology

[0002] A three-way valve is a switching control valve with three ports, typically one inlet and two outlets (one inlet, two outlets), switching fluid between different pipelines at a relatively low frequency. In semiconductor manufacturing equipment, due to the limited space in precision equipment, the number of pipelines entering the equipment is also limited. Therefore, it is necessary to use a three-way valve with two inlets and one outlet (two inlets, one outlet) to reduce the number of pipeline connection ports. For example, a hot water interface and a cold water interface on semiconductor manufacturing equipment (or medical equipment or precision electronic equipment) can be improved to a single hot and cold water interface; a pure water interface and a chemical interface can be improved to a concentration-adjustable chemical interface; and a chemical A interface and a chemical B interface can be improved to a single chemical A / B interface. In this application, the switching frequency of the three-way valve becomes very high. High-frequency switching can easily lead to the valve head not closing the internal flow channel that should be closed tightly. Sometimes, the three-way valve even needs to have a fluid mixing fine-tuning function. Furthermore, the inlet and outlet of a traditional three-way valve are separated by vertical space.

[0003] Invention patent publication number 105972251A discloses a diaphragm for a pneumatic three-way valve and a pneumatic three-way valve. The diaphragm includes a first body and a second body, with the second body disposed on top of the first body to form a first cavity. The first body has a plurality of screw holes surrounding the second body, and the second body has a first damping hole communicating with the first cavity. The pneumatic three-way valve includes the aforementioned diaphragm for a pneumatic three-way valve and a valve status indication system. Existing pneumatic three-way valves utilize the raising and lowering of a long valve stem to move a valve seat at one end. The rising valve seat closes the medium inlet and the first medium outlet at the top, thus opening the medium inlet and the second medium outlet at the bottom. Conversely, the falling valve seat closes the medium inlet and the second medium outlet at the bottom, opening the medium inlet and the second medium outlet at the top. This achieves the switching of the flow path. However, this pneumatic three-way valve is a conventional one-inlet, two-outlet valve. When directly applied to two-inlet, one-outlet applications, the imbalance of force applied by the long valve stem during high-frequency switching can easily cause the valve seat to fail to tightly close the internal flow path. Therefore, it is unsuitable for connection to precision manufacturing equipment, such as those used in semiconductor production.

[0004] Chinese Patent Publication No. CN110332334A discloses a three-way valve, including a valve seat, a cover plate, a valve body, a valve plate, a valve stem, an upper valve core, and a lower valve core. The valve plate has an air inlet chamber, and the valve plate and the valve body form an upper valve chamber. The upper valve core is disposed inside the upper valve chamber. The bottom of the valve body and the valve seat form a lower valve chamber. The lower valve core is disposed inside the lower valve chamber and is movably sleeved on the valve stem, dividing the lower valve chamber into a mating chamber, a working chamber, and an exhaust chamber. A limiting ring is fixedly provided at the lower end of the valve stem. A first valve port is provided between the air inlet chamber and the upper valve chamber. A second valve port is provided between the upper valve chamber and the mating chamber. A third valve port is provided between the working chamber and the exhaust chamber. The upper valve core is driven by the valve stem to open and close at the first valve port and the second valve port. The limiting ring is driven by the valve stem to abut or disengage from the lower end of the lower valve core. The lower valve core is driven by the limiting ring to open and close at the third valve port. In existing technologies, the upper valve core acts as the main valve head. At low pressure, the rising upper valve core seals the upper valve port within the valve body, closing the upper flow channel (corresponding to the inlet). This allows the middle and lower flow channels (corresponding to the working port) to connect with the side lower flow channel (exhaust port) for exhaust. At excessively high pressure, the descending upper valve core seals the lower valve port within the valve body, blocking the upper and middle flow channels. The lower valve core (equivalent to the secondary valve head) also closes the middle and lower flow channels, resulting in a fully closed state. Only when the inlet is under appropriate pressure, with the upper and lower sealing surfaces of the upper valve core neither sealing the upper nor lower valve port within the valve body, can the upper flow channel (inlet) and the middle and lower flow channels (corresponding to the working port) be connected. This existing three-way valve is suitable for gas control, but the chamber contains elastic elements in contact with the fluid, making it unsuitable for the cleanroom requirements of three-way valves used in precision manufacturing equipment. Furthermore, closing the upper and lower valve ports by using the upper and lower edges of the main valve head requires a relatively long valve stem travel; otherwise, the height of the upper and lower valve ports inside the valve cavity would be very short (resulting in a large longitudinal thickness relative to the main valve head, which is not conducive to driving). This is a common and inherent way of thinking in the field of three-way valve technology.

[0005] Chinese patent publication CN110332334A discloses a relatively mature three-way valve structure, including a three-way valve body and a passage control mechanism. A vertical communication cavity is formed between the water supply passage and the backwash passage. The passage control mechanism includes a pressure control chamber and a linkage drive shaft located in the vertical communication cavity. Backwash plugs and water supply plugs are respectively provided at both ends of the linkage drive shaft. A pressure control diaphragm is provided between the pressure control chamber and the vertical communication cavity. One end of the backwash plug of the linkage drive shaft is linked to the diaphragm seat of the pressure control diaphragm. A pressure control channel is provided at the top of the pressure control chamber. The separate axial sealing fits for the water supply passage and the backwash passage eliminate the defects of traditional circumferential friction damage, ensuring reliable sealing during switching between the two passages. The inner conical wall surface of the three-way valve body forms a conical fit structure with the outer peripheral wall of the annular cavity groove. During axial alignment, the three-way valve body forms a secondary seal on both sides. In existing related technologies, a three-way valve is proposed where an annular plug (equivalent to a valve head) is connected to both ends of a linkage drive rod shaft (equivalent to a valve head). The upper annular plug (upper valve head) is blocked above the inlet and outlet pipe ends, while the lower annular plug (lower valve head) is blocked below the inlet and backwash passage. Therefore, this three-way valve is also a one-in-two-out control valve. If the linkage drive rod shaft (equivalent to a valve head connecting rod) switches frequently between two inlets and one outlet, the imbalance of the applied force can easily cause the valve seat to fail to close tightly against the internal flow channel, making it unsuitable for connection to precision manufacturing equipment, such as those used in semiconductor production. Furthermore, the elastic element of this three-way valve is in contact with the fluid, which does not meet the cleanroom requirements for three-way valves and is detrimental to connecting to precision equipment.

[0006] Utility model patent CN217784275U discloses a manual / automatic dual-function pneumatic two-position three-way valve for wellhead control systems. The valve includes a valve body with an end cap on top. A pressure rod is installed at the center of the top of the end cap. The bottom of the pressure rod slides through the end cap and is fitted with a piston rod. A first spring is sleeved on the bottom surface of the piston rod, and a first steel ball is installed at the bottom of the piston rod. A striking pin is installed at the bottom of the first steel ball, and a second steel ball is installed at the bottom of the striking pin. A valve core sleeve is installed below the striking pin and above the second steel ball. A plug is inserted into the bottom of the valve body, with the top of the plug fitting against the bottom of the second steel ball. The valve chamber has an outlet in the middle, a discharge port above the valve chamber, and an inlet below the valve chamber. The switching mode is that the inlet and outlet are connected to supply fluid, and the outlet and discharge port are connected to discharge fluid. It is a variable three-way valve with one inlet and two outlets. In existing related technologies, a novel approach is to replace the valve head connecting rod with a striker, and replace the valve head with steel balls placed at the upper and lower ends of the striker. This may solve the problem of the valve head not closing tightly. However, under high-frequency use, the striker is prone to skew, making it suitable only for gas tees and not for liquid tees with higher fluid resistance. In addition, the elastic element of this tee valve is also in contact with the fluid, which does not meet the cleanroom requirements of tee valves and is not conducive to connecting precision equipment.

[0007] In summary, most existing three-way valves are designed for one inlet and two outlets or modified versions of one inlet and two outlets, with few applications specifically for two inlets and one outlet. Furthermore, the inlet and outlet heights of these existing three-way valves are often arbitrarily configured, which can easily lead to problems such as improper or uncontrolled mixing ratios when directly used (e.g., significant changes in the mixing ratio due to fluid pressure differences caused by pipe height differences and misconnection of the two inlets), insufficient cleanliness within the valve body (e.g., fluid corrosion of the elastic element or contamination of the fluid by the elastic element), and valve head failure to close tightly under high-frequency switching. Summary of the Invention

[0008] The main objective of this invention is to provide a three-way valve, the main improvement of which is to solve the problem that the valve head is easily affected by the connecting rod and cannot be closed tightly when the three-way valve is used in a two-inlet-one-outlet application and high frequency switching. It is particularly suitable for the control of electronic ultrapure chemicals and / or electronic ultrapure water in the semiconductor industry. At the same time, the example three-way valve of this application also has a fine-tuning function of dual fluid premixing.

[0009] The second main objective of this invention is to provide a production device that solves the problems of the limited number of liquid inlet ports and the inability to premix various liquid inlets in a timely manner.

[0010] The third main objective of this invention is to provide a method for assembling a three-way valve, which is easy to assemble and can withstand high-frequency switching, and is particularly suitable for assembling three-way valves with two inlets and one outlet.

[0011] The main objective of this invention is achieved through the following technical solution:

[0012] A three-way valve is proposed, comprising:

[0013] A three-way valve seat has a centrally located inner valve sleeve in its working chamber. The sleeve side of the inner valve sleeve is connected to the outlet. The working chamber is divided into a first inlet flow channel ring and a second inlet flow channel ring outside the inner valve sleeve. The upper and lower ends of the inner valve sleeve each form an upper valve port corresponding to the first inlet flow channel ring and a lower valve port corresponding to the second inlet flow channel ring. The first inlet flow channel ring surrounds the upper valve port and faces the upper opening of the three-way valve seat. The second inlet flow channel ring surrounds the lower valve port and faces the lower opening of the three-way valve seat. The first inlet connecting the first inlet flow channel ring and the second inlet connecting the second inlet flow channel ring are located on the same horizontal line. The three-way valve seat has a symmetrical structure in which the inner valve sleeve is centrally located and can be horizontally rotated to interchange the first and second inlets. It also has a symmetrical structure in which the inner valve sleeve is centrally located and can be vertically flipped to interchange the first and second inlet flow channel rings.

[0014] An adjustable opening drive assembly is mounted above the three-way valve seat. The adjustable opening drive assembly includes a drive cylinder and a piston disc disposed in the drive cylinder. A drive rod is connected below the piston disc. One end of the drive rod is coupled with a valve head type isolation diaphragm. The valve head type isolation diaphragm has an upper valve head with a tight fit hole in the center.

[0015] A passive elastic force assembly is assembled at the bottom of the three-way valve seat. The passive elastic force assembly includes a base, an elastic body disposed in the base, and a valve seat type isolation diaphragm subjected to the elastic force of the elastic body. The valve seat type isolation diaphragm has a valve head bearing with a centrally located shaft alignment structure.

[0016] A connecting rod is disposed on the valve head bearing. The lower end of the connecting rod is formed as a lower valve head, and the upper end of the connecting rod is formed as an upper valve head extension with a smaller diameter. The lower valve head of the connecting rod is limited and fixed to the shaft alignment structure. The upper valve head extension can pass through the shaft tube mixing cavity of the inner valve sleeve, while the lower valve head cannot pass through the shaft tube mixing cavity of the inner valve sleeve. The upper valve head extension of the connecting rod can be tightly fitted into the tight-fitting hole.

[0017] The implementation principle of this basic structural example is as follows: the centrally located inner valve sleeve in the working chamber of the three-way valve seat serves as a mixing chamber for the two inlets, and the two inlets are located on the same horizontal line. Whether the three-way valve rotates horizontally by 180 degrees or flips by 180 degrees, an adjustable opening drive component can be installed above, and a passive elastic component can be installed below. The inner valve sleeve is always centrally located in the working chamber. Combined with the structure and connection relationship of the connecting rod, the upper valve head isolation diaphragm, and the lower valve seat isolation diaphragm, the working chamber is a clean room where the fluid does not come into contact with the elastic object. The inner valve sleeve provides the three-way valve with symmetrical and adjustable micro-control of the first liquid supply mode (connecting rod in the rising fixed position state), the second liquid supply mode (connecting rod in the falling fixed position state), and the mixing mode (connecting rod in the rising height limit state) with the upper valve port open and the lower valve port closed. The lower valve head at the lower end of the connecting rod is integrally fixed to the rod body. The upper valve head extension at the upper end of the connecting rod is not fixed to the upper valve head of the valve head type isolation membrane. The upper valve head is relatively separate from the connecting rod, but integrally fixed to the center of the valve head type isolation membrane. Under high-frequency switching of two inlets and one outlet, the end of the connecting rod away from the adjustable opening drive component will not be excessively tilted. Each time the upper valve port opens and the lower valve port closes, the connecting rod is naturally guided and corrected based on the upper edge of the lower valve head at the lower end of the connecting rod contacting the lower valve port of the inner valve sleeve. This solves the problem that the valve head of the three-way valve is easily affected by the connecting rod and cannot be closed tightly under high-frequency switching in the application of two inlets and one outlet. This example three-way valve is particularly suitable for, but not limited to, the control of electronic ultrapure chemicals and / or electronic ultrapure water in the semiconductor industry; it also has a fine-tuning function of pre-mixing two fluids before liquid is introduced into the equipment.

[0018] In a preferred embodiment, the present invention can be further configured such that: an upper inclined conical surface is formed between the rod body and the upper valve head extension, and a lower inclined conical surface is formed between the rod body and the lower valve head, such that the length of the rod body is less than the mixing chamber length of the inner valve sleeve. Preferably, a hexagonal nut is pre-embedded in the three-way valve seat for use in fixing the drive cylinder and the base.

[0019] By adopting the preferred technical features of the above structure, the upper and lower inclined conical surfaces of the connecting rod are used to shorten the length of the connecting rod, increase the structural strength of the connecting rod, and enhance the mixing effect of the dual fluids introduced into the upper and lower valve ports in the inner valve sleeve.

[0020] In a preferred embodiment, the present invention may be further configured such that: the periphery of the valve head type isolation diaphragm is clamped and fixed between the three-way valve seat and the drive cylinder, and the periphery of the valve seat type isolation diaphragm is clamped and fixed between the three-way valve seat and the base.

[0021] By adopting the preferred technical features of the above structure, and utilizing the clamping and fixing relationship between the valve head type isolation membrane and the valve seat type isolation membrane, the space inside the drive cylinder and the installation space of the valve seat type isolation membrane are both isolated from the working chamber, and the space inside the base is isolated from the working chamber. The fluid will not come into contact with the piston disc and the elastomer. The working chamber is a clean room and can be used as a dual fluid supply switching or / and dual fluid premixed supply.

[0022] In a preferred embodiment, the present invention may be further configured such that a guide rod is provided on one side edge of the piston disc to prevent the piston disc from twisting during the lifting and lowering process.

[0023] By employing the preferred technical features of the above structure, and utilizing the guide rod portion of the piston disc, the piston disc and its drive rod will not twist or rotate during lifting and lowering. The upper valve head of the valve-head type isolation diaphragm, fixedly connected to one end of the drive rod, will also not twist or rotate. Therefore, the soft membrane portion of the valve-head type isolation diaphragm between the upper valve head and the peripheral clamping portion will not bear torsional stress, resulting in a longer service life for the valve-head type isolation diaphragm. The fixed connection between one end of the lower drive rod of the piston disc and the upper valve head facilitates the assembly of the valve-head type isolation diaphragm at the lower port of the drive cylinder of the adjustable-opening drive assembly before clamping.

[0024] In a preferred embodiment, the present invention may be further configured such that: the adjustable opening drive assembly includes an opening adjustment mechanism disposed on the drive cylinder, for changing the maximum opening of the upper valve head corresponding to the upper valve port in the open state, and preventing the lower valve head from completely closing the lower valve port.

[0025] By adopting the preferred technical features of the above structure, and utilizing the opening adjustment mechanism located on the drive cylinder, the maximum opening degree of the upper valve head corresponding to the upper valve port in the open state can be changed. Under the action of the connecting rod, the lower valve head cannot close the lower valve port, that is, neither the upper nor lower valve port is fully open nor fully closed. The two fluids through the upper and lower valve ports will be mixed in the inner valve sleeve and then discharged through the outlet channel. Based on the adjustable characteristics of the opening, the effect of slightly adjustable two-fluid premixing ratio can be achieved.

[0026] In a preferred embodiment, the present invention may be further configured such that the opening adjustment mechanism includes: an upper cover disposed on the drive cylinder, a limiting screw that rotates relative to the upper cover to adjust its own height, and a wheel disposed on the upper cover for driving the limiting screw to rotate, wherein one end of the limiting screw inside the drive cylinder limits the maximum rising height of the piston disc.

[0027] By adopting the preferred technical features of the above structure and utilizing the specific structure of the opening adjustment mechanism, the adjustable opening drive assembly can switch between the second inlet channel being fully open and the first and second inlet channels being mixed in the inner valve sleeve. For example, the drive cylinder is a pneumatic cylinder, and its height is adjusted based on the rotation of the limiting screw. The maximum rising height of the piston disc can be limited by the height of one end of the limiting screw in the drive cylinder, or it can be unlimited by the height of one end of the limiting screw in the drive cylinder, thus enabling the adjustable opening drive assembly to switch between the second inlet channel being fully open and the first inlet channel being fully open.

[0028] In a preferred embodiment, the present invention may be further configured such that the opening adjustment mechanism further includes a limiting wheel, disposed between the drive cylinder and the wheel body, for limiting the minimum height of that end of the limiting screw.

[0029] By employing the preferred technical features of the above structure, the limiting wheel is positioned between the drive cylinder and the wheel body. The relative position of the limiting wheel and the limiting screw is adjustable. When the limiting screw rotates and descends to a fixed point, the limiting wheel will contact the upper part of the upper cover, preventing the limiting screw from rotating further down. Therefore, the height of this fixed point is adjustable, and the minimum opening degree of the upper valve head relative to the upper valve port of the inner valve sleeve can be determined by adjustment. Conversely, the minimum closing degree of the lower valve port of the inner valve sleeve is also determined. As the limiting wheel is adjusted, the opening degree of the upper valve port switches between minimum opening and fully closed, and the opening degree of the lower valve port switches between minimum closed and fully open.

[0030] In a preferred embodiment, the present invention may be further configured such that: the elastic body includes an inner spring and an outer spring, the inner spring is sleeved within the outer spring, the elastic stroke of the inner spring is longer than that of the outer spring, and the unit elastic force of the outer spring is greater than that of the inner spring, so as to provide elastic force with varying degrees of elasticity.

[0031] By adopting the preferred technical features of the above structure and utilizing a specific combination of inner and outer springs, not only can the durability of the elastic body be increased, but the elastic body can also produce a layered change in the elastic stroke. The change point can be controlled at the stroke where the lower valve port of the inner valve sleeve is closed by the lower valve head of the connecting rod or to the degree of near closure, which is conducive to quickly triggering the opening of the lower valve port.

[0032] In a preferred embodiment, the present invention may be further configured such that the passive elastic component further includes an elastic sleeve cover fitted onto the upper end of the elastic body to provide an upward elastic force that prevents skewing of the valve head bearing of the valve seat-type isolation diaphragm and the lower valve head of the connecting rod.

[0033] By employing the preferred technical features of the above structure, the elastic sleeve protects the ejector end of the elastomer from tilting or deflecting during or near the maximum elastic stroke, thus applying a better vertical upward elastic force to the valve head bearing of the valve seat-type isolating diaphragm. The sleeve side of the elastic sleeve also provides compression protection for the elastomer during the minimum elastic stroke.

[0034] In a preferred embodiment, the present invention can be further configured such that the upper part of the elastic sleeve cover and the lower part of the valve head support of the valve seat type isolation membrane are only in contact to prevent detachment.

[0035] By adopting the preferred technical features of the above structure, the upper part of the elastic sleeve and the lower part of the valve head support of the valve seat type isolation diaphragm are in elastic contact, which facilitates easy assembly and replacement.

[0036] The second main objective of this invention is achieved through the following technical solution:

[0037] A production device is proposed, comprising a three-way valve with possible combinations of features as described above, wherein the outlet of the outlet flow channel is connected by a pipe to the device's liquid inlet.

[0038] The third main objective of this invention is achieved through the following technical solution:

[0039] A method for assembling a three-way valve is proposed, including:

[0040] Step S1: Provide a three-way valve seat. The working chamber of the three-way valve seat is provided with a centrally located inner valve sleeve. The sleeve side of the inner valve sleeve is connected to the outlet. The working chamber is divided into a first inlet flow channel ring and a second inlet flow channel ring outside the inner valve sleeve. The upper and lower ends of the inner valve sleeve each form an upper valve port corresponding to the first inlet flow channel ring and a lower valve port corresponding to the second inlet flow channel ring. The first inlet flow channel ring surrounds the upper valve port and faces the upper opening of the three-way valve seat. The second inlet flow channel ring surrounds the lower valve port and faces the lower opening of the three-way valve seat. The first inlet connecting the first inlet flow channel ring and the second inlet connecting the second inlet flow channel ring are located at the same horizontal line position. The three-way valve seat has a symmetrical structure in which the inner valve sleeve is centrally located and can be horizontally rotated to interchange the first inlet and the second inlet. It also has a symmetrical structure in which the inner valve sleeve is centrally located and can be vertically flipped to interchange the first inlet flow channel ring and the second inlet flow channel ring.

[0041] Step S2: Assemble the adjustable opening drive assembly above the three-way valve seat. The adjustable opening drive assembly includes a drive cylinder and a piston disc disposed in the drive cylinder. A drive rod is connected below the piston disc. One end of the drive rod is coupled with a valve head type isolation diaphragm. The valve head type isolation diaphragm has an upper valve head with a tight fit hole in the center.

[0042] Step S3: Assemble the passive elastic component at the bottom of the three-way valve seat. The passive elastic component includes a base, an elastic body disposed within the base, and a valve seat type isolation membrane subjected to the elastic force of the elastic body. The valve seat type isolation membrane has a valve head bearing with a centrally located axial alignment structure, and a connecting rod is disposed on the valve head bearing. The lower end of the connecting rod is formed as a lower valve head, and the upper end of the connecting rod is formed as an upper valve head extension with a smaller diameter. The lower valve head of the connecting rod is limited and fixed to the axial alignment structure. The upper valve head extension can pass through the axial tube mixing cavity of the inner valve sleeve, while the lower valve head cannot pass through the axial tube mixing cavity of the inner valve sleeve. The upper valve head extension of the connecting rod can be tightly fitted into the tight-fitting hole.

[0043] The implementation principle of this basic method example is that, by using steps S1 to S3, a three-way valve that can be assembled relatively easily can be used for two inlets and one outlet, thus solving the problem of the limited number of liquid inlet ports of the equipment and the inability to premix multiple liquid inlets in advance and in a timely manner.

[0044] In a preferred embodiment, the present invention can be further configured as follows:

[0045] In step S3, an upper inclined conical surface is formed between the rod body of the connecting rod and the upper valve head extension, and a lower inclined conical surface is formed between the rod body of the connecting rod and the lower valve head, such that the length of the rod body is smaller than the mixing chamber length of the inner valve sleeve; preferably, in step S1, a hexagonal nut is pre-embedded in the three-way valve seat for use in fixing the drive cylinder and the base.

[0046] Alternatively / in step S2, the periphery of the valve head type isolation diaphragm is clamped and fixed between the three-way valve seat and the drive cylinder; in step S3, the periphery of the valve seat type isolation diaphragm is clamped and fixed between the three-way valve seat and the base; preferably, a guide rod is provided on one side edge of the piston disc to prevent the piston disc from twisting during the lifting and lowering process;

[0047] Or / and, in step S2, the adjustable opening drive assembly includes an opening adjustment mechanism disposed on the drive cylinder, for changing the maximum opening of the upper valve head corresponding to the upper valve port in the open state, and preventing the lower valve head from completely closing the lower valve port;

[0048] Specifically, in step S2, the opening adjustment mechanism includes: an upper cover disposed on the drive cylinder, a limiting screw that rotates relative to the upper cover to adjust its own height, and a wheel disposed on the upper cover for driving the limiting screw to rotate, wherein one end of the limiting screw in the drive cylinder limits the maximum rising height of the piston disc;

[0049] Preferably, in step S2, the opening adjustment mechanism further includes: a limiting wheel, disposed between the drive cylinder and the wheel body, for limiting the minimum height of that end of the limiting screw;

[0050] Or / and, in step S3, the elastic body includes an inner spring and an outer spring, the inner spring is sleeved in the outer spring, the elastic stroke of the inner spring is longer than the elastic stroke of the outer spring, and the unit elastic force of the outer spring is greater than the unit elastic force of the inner spring, so as to provide a layered elastic force.

[0051] Preferably, in step S3, the passive elastic component further includes an elastic sleeve cover, which is fitted onto the upper end of the elastic body to provide an upward elastic force that is not prone to tilting to the valve head support of the valve seat type isolation diaphragm and the lower valve head of the connecting rod.

[0052] More preferably, in step S3, the upper part of the elastic sleeve cover and the lower part of the valve head bearing of the valve seat type isolation membrane are only in contact to prevent detachment.

[0053] In summary, the technical solutions of the present invention regarding structures or methods include at least one of the following technical effects that contribute to the prior art:

[0054] 1. It can be applied to two-inlet-one-outlet applications, solving the problem of insufficient number of liquid inlet ports in equipment. Under the high-frequency switching of two-inlet-one-outlet, there will be no problem of the connecting rod easily tilting, which will cause the valve head to not close tightly. It is suitable for, but not limited to, the control of electronic ultrapure chemicals and / or electronic ultrapure water in the semiconductor industry.

[0055] 2. Assembly is particularly easy. As long as the outlet pipe direction is determined, the three-way valve seat does not have any directional requirements for horizontal rotation or longitudinal flipping during assembly.

[0056] 3. Three-way valves are easy to assemble;

[0057] 4. The three-way valve must be designed so that its working chamber is a clean room;

[0058] 5. After being assembled into the production equipment, the three-way valve can also be used to replace the passive elastomer and / or drive components on the production line. Attached Figure Description

[0059] Figure 1 A cross-sectional schematic diagram of a three-way valve in some preferred embodiments of the present invention is shown;

[0060] Figure 2 A perspective view of the key components of the three-way valve, such as the valve seat and connecting rod, in some preferred embodiments of the present invention is shown.

[0061] Figure 3 A cross-sectional schematic diagram of the key components, such as the valve seat and connecting rod, included in a three-way valve in some preferred embodiments of the present invention is shown.

[0062] Figure 4 An exploded perspective view of the adjustable-opening drive assembly included in a three-way valve in some preferred embodiments of the present invention is shown.

[0063] Figure 5 An exploded perspective view of the passive elastic component included in a three-way valve in some preferred embodiments of the present invention is shown.

[0064] Figure 6 A perspective view of step S2 of the three-way valve assembly method in some preferred embodiments of the present invention, showing the assembly of the three-way valve seat and the adjustable opening drive assembly;

[0065] Figure 7 A cross-sectional schematic diagram is shown in some preferred embodiments of the present invention, corresponding to the three-way valve assembly method, in the pre-step S2 step of partially assembling the adjustable opening drive assembly.

[0066] Figure 8 A cross-sectional schematic diagram showing the step S2 following the connecting member in a three-way valve assembly method according to some preferred embodiments of the present invention is shown.

[0067] Figure 9 A perspective view of step S3 of the three-way valve assembly method in some preferred embodiments of the present invention, showing the assembly of the three-way valve seat and the passive elastic component;

[0068] Figure 10 The diagram illustrates a cross-sectional view of step S3 in the three-way valve assembly method of some preferred embodiments of the present invention after assembling the three-way valve seat and the passive elastic component.

[0069] Reference numerals: 10. Three-way valve seat; 11. Working chamber; 12. Inner valve sleeve; 12a. Upper valve port; 12b. Lower valve port; 13. Outlet; 14. First inlet; 15. Second inlet; 16. First inlet flow channel annulus; 17. Second inlet flow channel annulus; 18. Hexagonal nut; 20. Adjustable opening drive assembly; 21. Drive cylinder; 22. Piston disc; 22a. Guide rod; 23. Drive rod; 24. Upper connecting rod; 30. Passive spring assembly; 31. Base; 31a. Reinforcing rib groove; 32. 32a. Elastic body; 32b. Inner spring; 33. Outer spring; 34. Elastic sleeve cover; 35. Base plate; 36. Lower connecting rod; 40. Dust plug; 41. Connecting rod; 42. Lower valve head; 43. Upper valve head extension; 44. Upper inclined conical surface; 50. Valve head type isolation diaphragm; 51. Upper valve head; 52. Tight-fitting hole; 60. Valve seat type isolation diaphragm; 61. Valve head bearing; 62. Shaft alignment structure; 70. Opening adjustment mechanism; 71. Top cover; 72. Limiting screw; 73. Wheel body; 74. Limiting wheel. Detailed Implementation

[0070] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments for understanding the inventive concept of the present invention, and cannot represent all embodiments, nor are they interpreted as the only embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art under the premise of understanding the inventive concept of the present invention are within the scope of protection of the present invention.

[0071] It should be noted that if directional indicators (such as up, down, left, right, front, back, etc.) are involved in the embodiments of the present invention, these directional indicators are only used to explain the relative positional relationships and movement of the components in a specific posture. If the specific posture changes, the directional indicators will also change accordingly. To better understand the technical solution of the present invention, the three-way valve of the present invention will be described and explained in further detail below, but this should not be construed as limiting the scope of protection of the present invention.

[0072] See Figures 1 to 5 Some embodiments of this application first provide a three-way valve, Figure 1Draw a cross-sectional schematic diagram of the three-way valve. Figure 2 A three-dimensional schematic diagram of the key components of a three-way valve, including the valve seat and connecting rod, is shown. Figure 3 and Figure 2 correspond, Figure 2 This is an exploded 3D view of the key components before assembly. Figure 3 for Figure 2 A cross-sectional schematic diagram of the key components after assembly. The three-way valve mainly includes a three-way valve seat 10, an adjustable-opening drive assembly 20 located above the valve seat, a passive elastic assembly 30 located below the valve seat, and a connecting rod 40 movable within the three-way valve seat 10. The key components of the three-way valve include the three-way valve seat 10 and the connecting rod 40, wherein the secondary key components adjacent to the connecting rod 40 are the valve head type isolation diaphragm 50 and the valve seat type isolation diaphragm 60. Figure 4 An exploded three-dimensional diagram of the adjustable-aperture drive component 20 is shown. Figure 5 An exploded perspective view of the passive elastic component 30 is shown. The three-way valve of this embodiment has unique advantages in a two-inlet, one-outlet application, including but not limited to: high-frequency switching of the two inlet fluids without easily damaging the connecting rod 40 and causing the valve to not close tightly; precise premixing control of multiple inlet fluids (before introducing them into the production equipment); and ease of assembly. "Two inlets" specifically refers to the first inlet 14 and the second inlet 15 of the three-way valve seat 10, through which two fluids are introduced into the three-way valve seat 10; "one outlet" specifically refers to the outlet 13 of the three-way valve seat 10, through which fluid can be discharged to the production equipment. After the switching operation of the three-way valve of this embodiment, the fluid discharged from the outlet 13 can be the first fluid introduced by the first inlet 14, the second fluid introduced by the second inlet 15, or a mixed fluid introduced by both the first inlet 14 and the second inlet 15. The first and second fluids are usually different, including hot and cold water of different temperatures, chemicals of different concentrations, chemicals of different compositions, and dual-inlet fluid combinations where pure water and chemicals are introduced together. In a few applications where a single type of fluid introduction device cannot be interrupted, the first and second fluids can be the same.

[0073] See Figure 1 , Figure 2 and Figure 3The main function of the connecting rod 40 is to connect the valve head type isolation diaphragm 50 and the valve seat type isolation diaphragm 60. The upper end of the connecting rod 40 is not fixedly connected to the valve head type isolation diaphragm 50, nor is the lower end of the connecting rod 40 fixedly connected to the valve seat type isolation diaphragm 60. The term "fixed connection" includes welding, integral connection, and screw connection, but does not include tight fit or axial alignment limiting relationships. The lower valve head 41 is integrally formed with the connecting rod 40, meaning the lower valve head 41 is not located on the valve seat type isolation diaphragm 60; the upper valve head 51 is integrally formed with the valve head type isolation diaphragm 50, meaning the upper valve head 51 is not integrally formed with the connecting rod 40. The connecting rod 40 has a detachable assembly structure that is larger at the bottom and smaller at the top, with a thinner rod body. Under high-frequency switching of two inputs and one output, the lower valve head 41 and the upper valve head 51 can self-adjust to effectively and individually close the lower valve port 12b and the upper valve port 12a, that is, refer to... Figure 3 Compared to the time immediately after assembly and the time after a period of use, the rod body of the connecting rod 40 can rotate slightly relative to the valve head bearing 61 of the valve seat type isolating diaphragm 60, and the rod body of the connecting rod 40 can deflect slightly axially relative to the axis of the upper valve head 51 of the valve head type isolating diaphragm 50. Therefore, in order to better close the lower valve port 12b and the upper valve port 12a separately at different times, the relative rotation angle and / or horizontality of the lower valve head 41 and the upper valve head 51 can vary slightly.

[0074] See Figure 1 , Figure 2 and Figure 3 The main function of the three-way valve seat 10 is to provide a working chamber 11 for switching and / or mixing two types of introduced fluids. The working chamber 11 within the three-way valve seat 10 is equipped with a centrally located inner valve sleeve 12. The sleeve side of the inner valve sleeve 12 is connected to the outlet 13. The two fluids are introduced through the first inlet 14 and the second inlet 15, respectively. The working chamber 11 is divided outside the inner valve sleeve 12 into a first inlet flow channel annulus 16 and a second inlet flow channel annulus 17. The aforementioned dividing structure is integrally connected to the centrally located inner valve sleeve 12. The upper end of the inner valve sleeve 12 forms an upper valve port 12a corresponding to the first inlet flow channel annulus 16, and the lower end of the inner valve sleeve 12 forms a lower valve port 12b corresponding to the second inlet flow channel annulus 17 (see reference). Figure 3 The first inlet flow channel annular port 16 surrounds the upper valve port 12a and faces the upper opening of the three-way valve seat 10 (see reference). Figure 2 The second inlet flow channel annular port 17 surrounds the lower valve port 12b and faces the lower opening of the three-way valve seat 10 (see reference). Figure 6The first inlet 14, connecting the first inlet flow channel ring 16, and the second inlet 15, connecting the second inlet flow channel ring 17, are located on the same horizontal line. The three-way valve seat 10 has a symmetrical structure in which the inner valve sleeve 12 of the first inlet 14 and the second inlet 15 are centered and interchanged horizontally, and also has a symmetrical structure in which the inner valve sleeve 12 of the first inlet flow channel ring 16 and the second inlet flow channel ring 17 are centered and interchanged vertically. The aforementioned horizontal rotation is specifically 180 degrees, in which the positions of the first inlet 14 and the second inlet 15 are exchanged, while the inner valve sleeve 12 remains in a symmetrical centered structure. Figure 3 (See reference); the aforementioned longitudinal flip is specifically 180 degrees, where the first inlet flow channel annulus 16 and the second inlet flow channel annulus 17 exchange positions, while the inner valve sleeve 12 remains in a centered symmetrical structure. When horizontally rotated and then longitudinally flipped, it indicates that the first inlet 14 and the second inlet 15 exchange positions, and the first inlet flow channel annulus 16 and the second inlet flow channel annulus 17 also exchange positions, while the inner valve sleeve 12 remains in a centered symmetrical structure. This not only facilitates assembly, but also ensures that the connecting rod 40 passing through the inner valve sleeve 12 has symmetrical movement, making it more durable and reducing the elastic deviation error of the three-way valve seat 10 under high-frequency switching of the introduced fluid. For more details, see reference. Figure 3 When the connecting rod 40 is subjected to a large upward elastic force from below, the lower valve head 41 of the connecting rod 40 will close the connection between the lower valve port 12b of the inner valve sleeve 12 and the second inlet 15 (second inlet flow channel annulus 17). At this time, the first inlet 14 and the outlet 13 are connected, and the upper drive mechanism of the rod does not change the closing tightness of the lower valve head 41. When the connecting rod 40 is subjected to a large downward elastic force, the upper valve head 51 of the valve head type isolation diaphragm 50 will close the connection between the upper valve port 12a of the inner valve sleeve 12 and the first inlet 14 (first inlet flow channel annulus 16). At this time, the second inlet 15 and the outlet 13 are connected, and the lower elastic mechanism of the rod does not change the closing tightness of the upper valve head 51.

[0075] See also Figure 1 and Figure 4The adjustable-opening drive assembly 20 is mounted above the three-way valve seat 10. Its main function is to drive the connecting rod 40 relative to the longitudinal height of the inner valve sleeve 12. It is typically a pneumatic cylinder, but can also be a hydraulic cylinder. The adjustable-opening drive assembly 20 includes a drive cylinder body 21 and a piston disc 22 disposed within the drive cylinder body 21. Based on the pressure difference between the upper and lower parts of the piston disc 22, the piston disc 22 can move up and down. A drive rod 23 is connected below the piston disc 22. One end of the drive rod 23 is connected to a valve head type isolating diaphragm 50, which has an upper valve head 51 with a centrally located tight-fitting hole 52. The term "adjustable-opening" indicates that the stroke of the connecting rod 40 can be adjusted in the middle section, neither closing the lower valve port 12b nor the upper valve port 12a of the inner valve sleeve 12. Both fluids can flow into the inner valve sleeve 12 simultaneously, creating a fluid mixing effect.

[0076] See also Figure 1 and Figure 5 The passive elastic component 30 is assembled at the bottom of the three-way valve seat 10. The main function of the passive elastic component 30 is to provide the elastic force for the connecting rod 40 to move upward. The passive elastic component 30 includes a base 31, an elastic body 32 disposed in the base 31, and a valve seat type isolation diaphragm 60 subjected to the elastic force of the elastic body 32. The valve seat type isolation diaphragm 60 has a valve head bearing 61 with a centrally located shaft alignment structure 62. In this embodiment, the shaft alignment structure 62 is a shaft blind hole, and the connecting rod 40 has a corresponding shaft. However, it is not limited to this embodiment; the shaft alignment structure 62 can also be a shaft, and the connecting rod 40 can have a corresponding shaft blind hole.

[0077] See also Figure 2 and Figure 3The connecting rod 40 is mounted on the valve head bearing 61. The lower end of the connecting rod 40 is formed as a lower valve head 41, and the upper end of the connecting rod 40 is formed as an upper valve head extension 42 with a smaller diameter. The lower valve head 41 of the connecting rod 40 is limited and fixed to the shaft alignment structure 62. The upper valve head extension 42 can pass through the shaft tube mixing cavity of the inner valve sleeve 12, while the lower valve head 41 cannot pass through the shaft tube mixing cavity of the inner valve sleeve 12. The upper valve head extension 42 of the connecting rod 40 can be tightly fitted to the tight fit hole 52. In this embodiment, taking the inner tube diameter of the first inlet 14 and the second inlet 15 as 10mm as an example, the diameter of the shaft tube mixing chamber of the inner valve sleeve 12 is between 12 and 20mm, and the diameter of the lower valve head 41 of the connecting rod 40 is between 15 and 24mm, that is, the diameter of the lower valve head 41 is between 1.2 and 1.3 times the diameter of the shaft tube mixing chamber of the inner valve sleeve 12; the diameter of the upper valve head extension 42 of the connecting rod 40 is between 12 and 23mm, that is, the diameter of the upper valve head extension 42 can be between 0.8 and 0.95 times the diameter of the shaft tube mixing chamber of the inner valve sleeve 12. The diameter of the rod body of the connecting rod 40 can be between 4 and 12mm, that is, the diameter of the rod body of the connecting rod 40 can be between 0.35 and 0.5 times the diameter of the shaft tube mixing chamber of the inner valve sleeve 12. Without affecting the flow rate, the switching and mixing of the three-way valve can operate.

[0078] The implementation principle of this basic structural example is as follows: The centrally located inner valve sleeve 12 within the working chamber 11 of the three-way valve seat 10 serves as a mixing chamber for the two inlet fluids. The first inlet 14 and the second inlet 15 are located on the same horizontal line. Whether the three-way valve rotates horizontally or flips 180 degrees, an adjustable-opening drive assembly 20 can be mounted above, and a passive elastic assembly 30 can be mounted below. The inner valve sleeve 12 is always centrally located within the working chamber 11. Combined with the structure and connection relationship of the connecting rod 40, the upper valve head type isolation diaphragm 50, and the lower valve seat type isolation diaphragm 60, the working chamber 11 is a clean room where the fluid does not contact the elastic object. The inner valve sleeve 12 provides the three-way valve with a symmetrically adjustable and micro-controlled first liquid supply mode: the upper valve port 12a is open, and the lower valve port 12b is closed (when the connecting rod 40 is in a rising fixed-point state, such as...). Figure 3The second liquid supply mode (connecting rod 40 is in the descending fixed position state) is shown in the figure. The upper valve port 12a is closed and the lower valve port 12b is open. The mixed mode (connecting rod 40 is in the rising height limit state) is shown in the figure. The lower valve head 41 at the lower end of the connecting rod 40 is integrally fixed to the rod body. The upper valve head extension 42 at the upper end of the connecting rod 40 is not fixed to the upper valve head 51 of the valve head isolation diaphragm 50. The upper valve head 51 is relatively separated from the connecting rod 40, but integrally fixed to the center of the valve head isolation diaphragm 50. In high-frequency switching with two inlets and one outlet, the end of the connecting rod 40 away from the adjustable opening drive assembly 20 (lower valve head 41) will not be excessively tilted. Each time the upper valve port 12a opens and the lower valve port 12b closes, the connecting rod 40 is naturally corrected by the upper edge of the lower valve head 41 at the lower end of the connecting rod 40 contacting the lower valve port 12b of the inner valve sleeve 12. This solves the problem that the valve head of the three-way valve is easily affected by the connecting rod 40 and cannot be closed tightly during high-frequency switching in the application of two inlets and one outlet. This example three-way valve is particularly suitable for, but not limited to, the control of electronic ultrapure chemicals and / or electronic ultrapure water in the semiconductor industry; it also has a fine-tuning function of pre-mixing two fluids before liquid is introduced into the equipment.

[0079] In a better example, see Figure 2 and Figure 3 An upward-sloping conical surface 43 is formed between the rod body of the connecting rod 40 and the upper valve head extension 42, and a downward-sloping conical surface 44 is formed between the rod body of the connecting rod 40 and the lower valve head 41, such that the length of the rod body is less than the length of the mixing chamber of the inner valve sleeve 12. By utilizing the upward-sloping conical surface 43 and the downward-sloping conical surface 44 of the connecting rod 40, the length of the rod body is shortened, the structural strength of the connecting rod 40 is increased, and the mixing effect of the two fluids introduced into the inner valve sleeve 12 by the upper and lower valve ports 12b is enhanced. The angles of the upward-sloping conical surface 43 and the downward-sloping conical surface 44 relative to the horizontal plane are approximately 40 to 60 degrees; the larger the angle, the closer it is to vertical. The upward-sloping conical surface 43 and the downward-sloping conical surface 44 respectively strengthen the connection strength between the upper valve head extension 42 and the lower valve head 41 corresponding to the rod body of the connecting rod 40, and also have the effect of improving the mixing efficiency when the corresponding fluid is introduced. One specific material of the connecting rod 40 may be polytetrafluoroethylene (PTFE), which is insoluble in water, has toughness, and is resistant to chemical corrosion. Specifically, the bottom of the lower valve head 41 of the connecting rod 40 has a limiting annular groove structure, and the valve head bearing 61 of the valve seat type isolation diaphragm 60 has a corresponding limiting boss structure.

[0080] In a better example, see Figure 3 and Figure 4 The peripheral portion of the valve head type isolation diaphragm 50 is clamped and fixed between the three-way valve seat 10 and the drive cylinder 21; see reference Figure 3 and Figure 5The peripheral portion of the valve seat type isolation diaphragm 60 is clamped and fixed between the three-way valve seat 10 and the base 31. Utilizing the clamping and fixing relationship between the valve head type isolation diaphragm 50 and the valve seat type isolation diaphragm 60, the internal space of the cylinder 21 (such as...) is driven. Figure 1 The space above the valve head type isolation diaphragm 50 and located in the lower opening space of the drive cylinder 21) and the space for mounting the valve seat type isolation diaphragm (such as...) Figure 1 The valve head type isolation membrane 50 and the valve seat type isolation membrane 60 are both isolated from the working chamber 11. The space inside the base 31 is isolated from the working chamber 11, so the fluid will not come into contact with the piston disc 22 and the elastomer 32. The working chamber 11 is a clean room and can be used for dual-fluid supply switching or / and dual-fluid premixed supply. The valve head type isolation membrane 50 and the valve seat type isolation membrane 60 each have a soft membrane portion formed between their center and peripheral parts.

[0081] In a better example, see Figure 4 The piston disc 22 has a guide rod portion 22a on one side edge to prevent the piston disc 22 from twisting during lifting and lowering. The guide rod portion 22a is eccentrically positioned, while the drive rod 23 is axially positioned. The drive cylinder 21 has a corresponding guide groove. Based on the guidance of the guide rod portion 22a of the piston disc 22 in the drive cylinder 21, the piston disc 22 and its drive rod 23 will not twist or rotate during lifting and lowering. The upper valve head 51 of the valve head type isolation diaphragm 50, which is fixedly connected to one end of the drive rod 23, will also not twist or rotate. The soft membrane portion of the valve head type isolation diaphragm 50 between the upper valve head 51 and the surrounding clamping portion will not bear torsional stress, resulting in a longer service life for the valve head type isolation diaphragm 50. The fixed connection between one end of the lower drive rod 23 of the piston disc 22 and the upper valve head 51 facilitates the assembly of the valve head type isolation diaphragm 50 at the lower port of the drive cylinder 21 of the adjustable opening drive assembly 20 before clamping. (See reference...) Figure 1 The outer periphery of the piston disc 22 and the periphery of the drive rod 23 can be fitted with soft elastic sealing rings of corresponding sizes.

[0082] For a better example, see [link / reference]. Figure 1 and Figure 4The adjustable-opening drive assembly 20 includes an opening adjustment mechanism 70 mounted on the drive cylinder 21. This mechanism changes the maximum opening of the upper valve head 51 corresponding to the upper valve port 12a in the open state, preventing the lower valve head 41 from completely closing the lower valve port 12b. By using the opening adjustment mechanism 70 mounted on the drive cylinder 21, the maximum opening of the upper valve head 51 corresponding to the upper valve port 12a in the open state can be changed. Under the action of the connecting rod 40, the lower valve head 41 cannot close the lower valve port 12b; that is, neither the upper nor lower valve ports 12b are fully open nor fully closed. The two fluids flowing through the upper and lower valve ports 12b are mixed within the inner valve sleeve 12 and then discharged through the outlet 13. Based on the adjustable opening characteristics, the premixing ratio of the two fluids can be slightly adjusted.

[0083] For a better example, see [link / reference]. Figure 1 and Figure 4 The opening adjustment mechanism 70 includes: an upper cover 71 disposed on the drive cylinder 21; a limiting screw 72 that rotates relative to the upper cover 71 to adjust its own height; and a wheel 73 disposed on the upper cover 71 for driving the limiting screw 72 to rotate. The limiting screw 72, located at one end within the drive cylinder 21, limits the maximum rising height of the piston disc 22. The wheel 73 can specifically be a handwheel, but is not limited to any particular type; it can also be a mechanical gear. In addition to the fixed connection between the wheel 73 and the limiting screw 72, for example, the upper end of the limiting screw 72 may have a transverse radial hole (e.g.,...). Figure 4As shown, the wheel body 73 has a transverse positioning screw hole, into which a grommet is laterally engaged. One end of the grommet can extend into a radial hole, creating a fixed connection between the wheel body 73 and the limiting screw 72. Alternatively, if a mechanical gear is used, the wheel body 73 should maintain a constant height position during rotation. The wheel body 73 and the limiting screw 72 have a rotational linkage but not a height linkage. Specifically, this is a combination of a guide groove cap and a screw with a guide bar. The rotation of the wheel body 73 drives the rotation of the limiting screw 72, which changes the height position relative to the upper cover 71. The rise of the piston disc 22 is limited by the lower end of the limiting screw 72. By utilizing the specific structure of the opening adjustment mechanism 70, the adjustable opening drive assembly 20 can switch between the second inlet 15 flow channel being fully open and the first and second inlet 15 flow channels being mixed within the inner valve sleeve 12. For example, if the drive cylinder 21 is a pneumatic cylinder, its height can be adjusted based on the rotation of the limiting screw 72. The maximum rising height of the piston disc 22 can be limited to the height of one end of the limiting screw 72 within the drive cylinder 21, allowing the adjustable opening drive assembly 20 to switch between the second inlet 15 flow channel being fully open and the first inlet 14 flow channel not being fully open. When the limiting screw 72 rises sufficiently, the maximum rising height of the piston disc 22 can also be unlimited by the height of one end of the limiting screw 72 within the drive cylinder 21, allowing the adjustable opening drive assembly 20 to switch between the second inlet 15 flow channel being fully open and the first inlet 14 flow channel being fully open. The limiting screw 72 can also be provided with a peripheral elastic sealing ring near its lower contact end. In addition, an identification plate can be attached to the top surface of the wheel 73 to identify which one is turning left or right, which increases the sinking height of the limiting screw 72.

[0084] For a better example, see [link / reference]. Figure 1 and Figure 4The opening adjustment mechanism 70 further includes a limiting wheel 74, disposed between the drive cylinder 21 and the wheel body 73, for limiting the minimum height of one end of the limiting screw 72. The limiting wheel 74 can rotate relative to the limiting screw 72 to change the relative position of the limiting wheel 74 on the limiting screw 72. Typically, the limiting wheel 74 is adjusted after the limiting screw 72 is adjusted to determine the minimum downward height of the limiting screw 72. The limiting wheel 74 is positioned between the drive cylinder 21 and the wheel 73. The relative position of the limiting wheel 74 and the limiting screw 72 is adjustable. When the limiting screw 72 rotates and descends to a fixed point, the limiting wheel 74 will touch the upper part of the upper cover 71, preventing the limiting screw 72 from rotating further. Therefore, the height of this fixed point is adjustable, and the minimum opening degree of the upper valve head 51 to the upper valve port 12a of the inner valve sleeve 12 can be determined by adjustment. Conversely, the minimum closing degree of the lower valve port 12b of the inner valve sleeve 12 is also determined. As the limiting wheel 74 is adjusted, the opening degree of the upper valve port 12a switches between minimum opening and fully closed, and the opening degree of the lower valve port 12b switches between minimum closed and fully open. The limiting wheel 74 and the limiting screw 72 can be connected by screws or by a washer to restrict rotation.

[0085] For a better example, see [link / reference]. Figure 1 and Figure 5 The elastic body 32 includes an inner spring 32a and an outer spring 32b. The inner spring 32a is fitted inside the outer spring 32b. The elastic stroke of the inner spring 32a is longer than that of the outer spring 32b, and the unit elastic force of the outer spring 32b is greater than that of the inner spring 32a, thus providing a layered elastic force. This specific combination of the inner spring 32a and the outer spring 32b not only increases the durability of the elastic body 32 but also allows for a layered change in the elastic stroke. The point of change can be controlled at the point where the lower valve port 12b of the inner valve sleeve 12 is closed by the lower valve head 41 of the connecting rod 40 or to a near-closed position, facilitating rapid triggering of the opening of the lower valve port 12b. The wire diameter of the inner spring 32a is approximately 0.4 to 0.8 times that of the outer spring 32b, providing a smaller unit elastic force at a fixed stroke. The outer spring 32b not only restrains the inner spring 32a from twisting, but also enhances the elastic force in the opening direction of the lower valve port 12b, preventing excessive pressure between the upper valve port 12a and the upper valve head 51 when the upper valve port 12a is closed, thus reducing the durability of the valve head isolation diaphragm 50. Figure 3As shown, the upper valve port 12a and the lower valve port 12b can be externally beveled to increase the closing density of the upper valve port 12a and the lower valve port 12b. The elastic body 32, with the inner and outer springs coaxially sleeved, can increase the durability of the upper valve head 51 of the valve head type isolation diaphragm 50 and the lower valve head 41 of the connecting rod 40.

[0086] For a better example, see [link / reference]. Figure 1 and Figure 5 The passive elastic component 30 further includes an elastic sleeve 33, which fits onto the upper end of the elastomer 32 to provide a non-skewed upward elastic force to the valve head support 61 of the valve seat type isolation diaphragm 60 and the lower valve head 41 of the connecting rod 40. The elastic sleeve 33 protects the ejected end of the elastomer 32 from skewing or deflecting during or near the maximum elastic stroke, allowing for better vertical upward elastic force to be applied to the valve head support 61 of the valve seat type isolation diaphragm 60. The elastomer 32 does not directly contact the valve seat type isolation diaphragm 60 with elastic force, and the sleeve side of the elastic sleeve 33 also provides compression protection for the elastomer 32 during the minimum elastic stroke. For a specific example, see [reference needed]. Figure 5 The base 31, used for mounting the elastomer 32 and the elastic sleeve 33, has a reinforced rib groove 31a formed in the inner side wall of the cavity, which increases the structural strength of the base 31 and reduces its weight; see reference Figure 3 When the lower valve head 41 opens the lower valve port 12b, the soft membrane portion of the valve seat type isolation diaphragm 60 is in a stretched state and can be slightly embedded into the opening end of the reinforcing rib groove 31a to obtain better support and protection. In a preferred example, see [reference needed]. Figure 1 The upper part of the elastic sleeve cover 33 and the lower part of the valve head support 61 of the valve seat type isolation diaphragm 60 are only in contact to prevent detachment. The elastic contact between the upper part of the elastic sleeve cover 33 and the lower part of the valve head support 61 of the valve seat type isolation diaphragm 60 facilitates easy assembly and replacement. Specifically, the elastic sleeve cover 33 has a central opening, and the valve head support 61 of the valve seat type isolation diaphragm 60 has a countersunk head that can be inserted into the central opening. The upper opening of the elastic body 32 allows for the fitting and limiting of the countersunk head, forming a mechanical assembly that is easy to assemble and disassemble.

[0087] Some embodiments of this application also provide a method of using a three-way valve. A production device includes a three-way valve with the possible combinations of features described above. The outlet 13, corresponding to the flow channel of outlet 13, is connected to the device's liquid inlet via a pipe. This production device is specifically semiconductor manufacturing equipment, medical equipment, or precision electronic equipment. Originally, two liquid inlets were required. After using the three-way valve of this invention, only one liquid inlet is used, and the two fluids can be pre-mixed within the inner valve sleeve 12 of the three-way valve. The mixing ratio can be adjusted according to the lifting height position of the connecting rod 40. (See also...) Figure 1 and Figure 3 The adjustment method is as follows: the rotation of the wheel body 73 changes the height position of the limiting screw 72 and its lower end, causing it to descend. Under the drive of the adjustable opening drive assembly 20, the piston disc 22 rises and touches the lower end of the limiting screw 72. At this time, the lower valve head 41 cannot completely close the lower valve port 12b, and correspondingly, the upper valve head 51 cannot completely close the upper valve port 12a. Naturally, liquid can enter from the lower valve port 12b and the upper valve port 12a at the same time and be mixed in the shaft tube mixing chamber of the inner valve sleeve 12.

[0088] exist Figures 6 to 10 In this application, some embodiments also provide a method for assembling a three-way valve, including the following steps: step S1 of providing a three-way valve seat 10, step S2 of assembling an adjustable-opening drive assembly 20 above the three-way valve seat 10, and step S3 of assembling a passive elastic assembly 30 at the bottom of the three-way valve seat 10. The order of implementation of steps S2 and S3 can be sequential or interchanged.

[0089] See step S1 Figure 2 , Figure 3 and Figure 4A three-way valve seat 10 is provided. A centrally located inner valve sleeve 12 is provided within the working chamber 11 of the three-way valve seat 10. The sleeve side of the inner valve sleeve 12 is connected to the outlet 13. The working chamber 11 is divided outside the inner valve sleeve 12 into a first inlet flow channel annulus 16 and a second inlet flow channel annulus 17. The upper and lower ends of the inner valve sleeve 12 each form an upper valve port 12a corresponding to the first inlet flow channel annulus 16 and a lower valve port 12b corresponding to the second inlet flow channel annulus 17. The first inlet flow channel annulus 16 surrounds the upper valve port 12a and faces the three-way valve seat 10. The upper opening, the second inlet flow channel ring 17 surrounds the lower valve port 12b and faces the lower opening of the three-way valve seat 10, the first inlet 14 connecting the first inlet flow channel ring 16 and the second inlet 15 connecting the second inlet flow channel ring 17 are located on the same horizontal line, the three-way valve seat 10 has a horizontally rotating symmetrical structure in which the inner valve sleeve 12 of the first inlet 14 and the second inlet 15 are centered and interchanged, and also has a vertically flipping symmetrical structure in which the inner valve sleeve 12 of the first inlet flow channel ring 16 and the second inlet flow channel ring 17 are centered and interchanged.

[0090] See step S2. Figure 5 and Figure 6 An adjustable-opening drive assembly 20 is mounted above the three-way valve seat 10. The adjustable-opening drive assembly 20 includes a drive cylinder 21 and a piston disc 22 disposed within the drive cylinder 21. A drive rod 23 is connected below the piston disc 22, and a valve head type isolation diaphragm 50 is attached to one end of the drive rod 23. The valve head type isolation diaphragm 50 has an upper valve head 51 with a centrally located tight-fitting hole 52. In a preferred embodiment, a guide rod portion 22a is provided on one side edge of the piston disc 22 to prevent the piston disc 22 from twisting during lifting and lowering.

[0091] In step S2, the adjustable-opening drive assembly 20 includes an opening adjustment mechanism 70, disposed on the drive cylinder 21, for changing the maximum opening degree of the upper valve head 51 corresponding to the upper valve port 12a in the open state, and preventing the lower valve head 41 from completely closing the lower valve port 12b. In a specific example, in step S2, the opening adjustment mechanism 70 includes: an upper cover 71 disposed on the drive cylinder 21; a limiting screw 72 that rotates relative to the upper cover 71 to adjust its own height; and a wheel 73 disposed on the upper cover 71 for driving the limiting screw 72 to rotate, wherein one end of the limiting screw 72 within the drive cylinder 21 limits the maximum rising height of the piston disc 22. The limiting screw 72 may have external threads, and the upper cover 71 has a corresponding axial threaded hole. In a more specific preferred example, in step S2, the opening adjustment mechanism 70 further includes a limiting wheel 74, disposed between the drive cylinder 21 and the wheel body 73, for limiting the minimum height of that end of the limiting screw 72.

[0092] See Figure 7 Step S2 specifically includes a preliminary step: first, completing the main body installation of the adjustable opening drive assembly 20. The upper cover 71 and the limiting screw 72 of the opening adjustment mechanism 70 can be initially installed together with the drive cylinder 21. (See reference...) Figure 1 The final step in step S2 is to connect the upper valve head 51 of the valve head type isolation diaphragm 50 with the drive rod 23 of the piston disc 22. See below for further details. Figure 8 In step S2, the drive cylinder 21 of the adjustable-opening drive assembly 20 and the three-way valve seat 10 are combined, and the peripheral part of the valve head isolation diaphragm 50 is simultaneously clamped and fixed before the wheel 73 and the limiting wheel 74 are installed. The three-way valve seat 10, the drive cylinder 21 and the upper cover 71 are fixed by the upper connecting rod 24.

[0093] See step S3. Figure 9 and Figure 10 The passive elastic component 30 is assembled at the bottom of the three-way valve seat 10. The passive elastic component 30 includes a base 31, an elastic body 32 disposed in the base 31, and a valve seat type isolation diaphragm 60 subjected to the elastic force of the elastic body 32. The valve seat type isolation diaphragm 60 has a valve head support 61 with a centrally located shaft alignment structure 62, and a connecting rod 40 is disposed on the valve head support 61. The lower end of the connecting rod 40 is formed as a lower valve head 41, and the upper end of the connecting rod 40 is formed as an upper valve head extension 42 with a smaller diameter. The lower valve head 41 of the connecting rod 40 is limited and fixed to the shaft alignment structure 62. The upper valve head extension 42 can pass through the shaft tube mixing cavity of the inner valve sleeve 12, while the lower valve head 41 cannot pass through the shaft tube mixing cavity of the inner valve sleeve 12. The upper valve head extension 42 of the connecting rod 40 can be tightly fitted into the tight fit hole 52.

[0094] The implementation principle of the above method example is that by using steps S1 to S3, a three-way valve that can be used for two inlets and one outlet can be assembled relatively easily, solving the problem of the limited number of liquid inlet ports of the equipment and the inability to premix multiple liquid inlets in advance and in a timely manner.

[0095] In a preferred example, in step S2, see [reference] Figure 1 and Figure 3 The periphery of the valve head type isolation diaphragm 50 is clamped and fixed between the three-way valve seat 10 and the drive cylinder 21. In step S3, the periphery of the valve seat type isolation diaphragm 60 is clamped and fixed between the three-way valve seat 10 and the base 31. Step S3 specifically includes a preliminary step, first completing the main body installation of the passive elastic component 30. In step S3, during the installation and connection of the passive elastic component 30 and the three-way valve seat 10, the peripheral portion of the valve seat type isolation diaphragm 60 is simultaneously clamped and fixed.

[0096] In a preferred example, in step S3, refer to Figure 9 and Figure 10 The elastic body 32 includes an inner spring 32a and an outer spring 32b. The inner spring 32a is sleeved within the outer spring 32b. The elastic stroke of the inner spring 32a is longer than that of the outer spring 32b, and the unit elastic force of the outer spring 32b is greater than that of the inner spring 32a, thus providing a layered elastic force. In a preferred example, in step S3, the passive elastic component 30 further includes an elastic sleeve 33, which is fitted onto the upper end of the elastic body 32 to provide a non-tilting upward elastic force to the valve head support 61 of the valve seat type isolation diaphragm 60 and the lower valve head 41 of the connecting rod 40. In a more preferred example, in step S3, the upper part of the elastic sleeve 33 and the lower part of the valve head support 61 of the valve seat type isolation diaphragm 60 are only in contact to prevent detachment.

[0097] In a preferred example, in step S3, refer to Figure 3 The connecting rod 40 forms an upper inclined cone surface 43 between the rod body and the upper valve head extension 42, and the connecting rod 40 forms a lower inclined cone surface 44 between the rod body and the lower valve head 41, such that the length of the rod body is smaller than the length of the shaft tube mixing chamber of the inner valve sleeve 12.

[0098] In a specific example, in step S3, refer to [reference needed]. Figure 9 and Figure 10 The passive elastic component 30 also includes a base plate 34, a lower connecting rod 35, and a dust plug 36 located below the base 31. The lower connecting rod 35 passes through the base plate 34 and the base 31, and connects to the internal threaded hole of the three-way valve seat 10. (See reference...) Figure 8The internal threaded hole of the three-way valve seat 10 can be used not only for the upper connecting rod 24 but also for the lower connecting rod 35. In a more preferred example, the internal threaded hole is a hexagonal nut 18 pre-embedded in the three-way valve seat 10 (see reference). Figure 6 and Figure 8 As provided, the three-way valve seat 10 has a corresponding hexagonal hole. (See also...) Figure 6 The hexagonal nut 18 embedded in the three-way valve seat 10 achieves a shared fixing of the drive cylinder 21 and the base 31; in this example, the clamping of the isolation membrane and the fixing of the upper cover 71 and the base plate 34 are also completed, making assembly extremely convenient and secure. (See reference...) Figure 9 The base plate 34 has an outer connecting part protruding from the base 31 for fixing the integral three-way valve. (See reference...) Figure 9 and Figure 10 The dust plug 36 is embedded in the corresponding recess of the mating hole of the base plate 34 after the lower connecting rod 35 is installed, so as to prevent dust and foreign objects from adhering to the mating hole of the lower connecting rod 35.

[0099] The embodiments described herein are preferred embodiments for facilitating understanding or implementation of the technical solutions of the present invention, and are not intended to limit the scope of protection of the present invention. All equivalent changes made in accordance with the structure, shape, and principle of the present invention should be covered within the scope of protection claimed by the present invention.

Claims

1. A three-way valve, characterized in that, The three-way valve, suitable for high-frequency switching with two inputs and one output, includes: A three-way valve seat has a centrally located inner valve sleeve in its working chamber. The sleeve side of the inner valve sleeve is connected to the outlet. The working chamber is divided into a first inlet flow channel ring and a second inlet flow channel ring outside the inner valve sleeve. The upper and lower ends of the inner valve sleeve each form an upper valve port corresponding to the first inlet flow channel ring and a lower valve port corresponding to the second inlet flow channel ring. The first inlet flow channel ring surrounds the upper valve port and faces the upper opening of the three-way valve seat. The second inlet flow channel ring surrounds the lower valve port and faces the lower opening of the three-way valve seat. The first inlet connecting the first inlet flow channel ring and the second inlet connecting the second inlet flow channel ring are located on the same horizontal line. The three-way valve seat has a symmetrical structure in which the inner valve sleeve is centrally located and can be horizontally rotated to interchange the first and second inlets. It also has a symmetrical structure in which the inner valve sleeve is centrally located and can be vertically flipped to interchange the first and second inlet flow channel rings. An adjustable opening drive assembly is mounted above the three-way valve seat. The adjustable opening drive assembly includes a drive cylinder and a piston disc disposed in the drive cylinder. A drive rod is connected below the piston disc. One end of the drive rod is coupled with a valve head type isolation diaphragm. The valve head type isolation diaphragm has an upper valve head with a tight fit hole in the center. A passive elastic force assembly is assembled at the bottom of the three-way valve seat. The passive elastic force assembly includes a base, an elastic body disposed in the base, and a valve seat type isolation diaphragm subjected to the elastic force of the elastic body. The valve seat type isolation diaphragm has a valve head bearing with a centrally located shaft alignment structure. A connecting rod is disposed on the valve head bearing. The lower end of the connecting rod is formed as a lower valve head, and the upper end of the connecting rod is formed as an upper valve head extension with a smaller diameter. The lower valve head of the connecting rod is limited and fixed to the shaft alignment structure. The upper valve head extension can pass through the shaft tube mixing cavity of the inner valve sleeve, while the lower valve head cannot pass through the shaft tube mixing cavity of the inner valve sleeve. The upper valve head extension of the connecting rod can be tightly fitted into the tight-fitting hole. The piston disc has a guide rod on one side edge to prevent it from twisting during lifting and lowering; the connecting rod is allowed to have a slight axial deviation relative to the axis of the upper valve head of the valve head isolation diaphragm.

2. The three-way valve according to claim 1, characterized in that, The connecting rod body forms an upper inclined cone surface with the upper valve head extension body, and the connecting rod body forms a lower inclined cone surface with the lower valve head, such that the length of the rod body is smaller than the mixing chamber length of the inner valve sleeve.

3. The three-way valve according to claim 2, characterized in that, A hexagonal nut is pre-embedded in the three-way valve seat for use in fixing the drive cylinder and the base.

4. The three-way valve according to claim 1, characterized in that, The periphery of the valve head type isolation diaphragm is clamped and fixed between the three-way valve seat and the drive cylinder body, and the periphery of the valve seat type isolation diaphragm is clamped and fixed between the three-way valve seat and the base.

5. The three-way valve according to claim 1, characterized in that, The adjustable opening drive assembly includes an opening adjustment mechanism disposed on the drive cylinder, used to change the maximum opening of the upper valve head corresponding to the upper valve port in the open state, and to prevent the lower valve head from completely closing the lower valve port.

6. The three-way valve according to claim 5, characterized in that, The opening adjustment mechanism includes: an upper cover disposed on the drive cylinder body, a limiting screw that rotates relative to the upper cover to adjust its own height, and a wheel disposed on the upper cover for driving the limiting screw to rotate, wherein one end of the limiting screw in the drive cylinder body limits the maximum rising height of the piston disc.

7. The three-way valve according to claim 6, characterized in that, The opening adjustment mechanism further includes a limiting wheel, which is disposed between the drive cylinder and the wheel body, for limiting the minimum height of that end of the limiting screw.

8. The three-way valve according to any one of claims 1-7, characterized in that, The elastic body includes an inner spring and an outer spring, with the inner spring sleeved inside the outer spring. The elastic stroke of the inner spring is longer than that of the outer spring, and the unit elastic force of the outer spring is greater than that of the inner spring, so as to provide elastic force with varying degrees of elasticity.

9. The three-way valve according to claim 8, characterized in that, The passive elastic component also includes an elastic sleeve cap, which fits onto the upper end of the elastic body to provide an upward elastic force that prevents tilting of the valve head bearing of the valve seat-type isolation diaphragm and the lower valve head of the connecting rod.

10. The three-way valve according to claim 9, characterized in that, The upper part of the elastic sleeve cover and the lower part of the valve head bearing of the valve seat type isolation membrane are only in contact to prevent detachment.

11. A production equipment, characterized in that, Includes a three-way valve as described in any one of claims 1-10, with the outlet connected to the equipment's liquid inlet via a pipe.

12. A method for assembling a three-way valve, characterized in that, The three-way valve is suitable for high-frequency switching with two inlets and one outlet, and the assembly method includes: S1. A three-way valve seat is provided. The working chamber of the three-way valve seat is provided with a centrally located inner valve sleeve. The sleeve side of the inner valve sleeve is connected to the outlet. The working chamber is divided into a first inlet flow channel ring and a second inlet flow channel ring outside the inner valve sleeve. The upper and lower ends of the inner valve sleeve each form an upper valve port corresponding to the first inlet flow channel ring and a lower valve port corresponding to the second inlet flow channel ring. The first inlet flow channel ring surrounds the upper valve port and faces the upper opening of the three-way valve seat. The second inlet flow channel ring surrounds the lower valve port and faces the lower opening of the three-way valve seat. The first inlet connecting the first inlet flow channel ring and the second inlet connecting the second inlet flow channel ring are located at the same horizontal line position. The three-way valve seat has a symmetrical structure in which the inner valve sleeve is centrally located and can be horizontally rotated to interchange the first inlet and the second inlet. It also has a symmetrical structure in which the inner valve sleeve is centrally located and can be vertically flipped to interchange the first inlet flow channel ring and the second inlet flow channel ring. S2. The adjustable opening drive assembly is mounted above the three-way valve seat. The adjustable opening drive assembly includes a drive cylinder and a piston disc disposed in the drive cylinder. A drive rod is connected below the piston disc. One end of the drive rod is coupled with a valve head type isolation diaphragm. The valve head type isolation diaphragm has an upper valve head with a tight-fitting hole in the center. A guide rod is provided on one side edge of the piston disc to prevent the piston disc from twisting during the lifting and lowering process. S3. Assemble the passive elastic component at the bottom of the three-way valve seat. The passive elastic component includes a base, an elastic body disposed within the base, and a valve seat type isolation diaphragm subjected to the elastic force of the elastic body. The valve seat type isolation diaphragm has a valve head bearing with a centrally located axial alignment structure, and a connecting rod is disposed on the valve head bearing. The lower end of the connecting rod is formed as a lower valve head, and the upper end of the connecting rod is formed as an upper valve head extension with a smaller diameter. The lower valve head of the connecting rod is limited and fixed to the axial alignment structure. The upper valve head extension can pass through the axial tube mixing cavity of the inner valve sleeve, while the lower valve head cannot pass through the axial tube mixing cavity of the inner valve sleeve. The upper valve head extension of the connecting rod can be tightly fitted into the tight-fitting hole. A slight axial deviation is allowed between the rod body and the axis of the upper valve head of the valve head type isolation diaphragm.

13. The assembly method of the three-way valve according to claim 12, characterized in that: In step S3, an upper inclined cone surface is formed between the rod body and the upper valve head extension, and a lower inclined cone surface is formed between the rod body and the lower valve head, such that the length of the rod body is smaller than the mixing chamber length of the inner valve sleeve.

14. The assembly method of the three-way valve according to claim 13, characterized in that: In step S1, a hexagonal nut is pre-embedded in the three-way valve seat for use in fixing the drive cylinder and the base.

15. The assembly method of the three-way valve according to claim 12, characterized in that: In step S2, the periphery of the valve head type isolation diaphragm is clamped and fixed between the three-way valve seat and the drive cylinder; in step S3, the periphery of the valve seat type isolation diaphragm is clamped and fixed between the three-way valve seat and the base.

16. The assembly method of the three-way valve according to claim 15, characterized in that: In step S2, the adjustable opening drive assembly includes an opening adjustment mechanism disposed on the drive cylinder, used to change the maximum opening of the upper valve head corresponding to the upper valve port in the open state, and to prevent the lower valve head from completely closing the lower valve port.

17. The assembly method of the three-way valve according to claim 16, characterized in that: In step S2, the opening adjustment mechanism includes: an upper cover disposed on the drive cylinder, a limiting screw that rotates relative to the upper cover to adjust its own height, and a wheel disposed on the upper cover for driving the limiting screw to rotate, wherein one end of the limiting screw in the drive cylinder limits the maximum rising height of the piston disc.

18. The assembly method of the three-way valve according to claim 17, characterized in that: In step S2, the opening adjustment mechanism further includes a limiting wheel, which is disposed between the drive cylinder and the wheel body, for limiting the minimum height of that end of the limiting screw.

19. The assembly method of the three-way valve according to claim 12, characterized in that: In step S3, the elastic body includes an inner spring and an outer spring. The inner spring is sleeved inside the outer spring. The elastic stroke of the inner spring is longer than that of the outer spring. The unit elastic force of the outer spring is greater than that of the inner spring, so as to provide elastic force with varying degrees.

20. The assembly method of the three-way valve according to claim 19, characterized in that: In step S3, the passive elastic component further includes an elastic sleeve cover, which is fitted onto the upper end of the elastic body to provide an upward elastic force that prevents the valve head bearing of the valve seat-type isolation diaphragm and the lower valve head of the connecting rod from tilting.

21. The assembly method of the three-way valve according to claim 20, characterized in that: In step S3, the upper part of the elastic sleeve cover and the lower part of the valve head support of the valve seat type isolation membrane are only in contact to prevent detachment.

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