A composite robot for substrate magazine pick-and-place transport

Abstract

The application discloses a composite robot for substrate magazine taking and placing transportation, and has the technical scheme as follows: a transportation trolley is arranged between machining devices; a transportation rack is arranged on the transportation trolley and used for accommodating the magazine; and a magazine clamping device is arranged at the machining device or on the transportation trolley and used for clamping and transferring the magazine between the machining device and the transportation rack. The magazine clamping device is used for clamping and transferring the magazine between the transportation rack and the machining device, manual loading and unloading operations of the magazine are not needed, manpower is saved, and production efficiency is improved.

Description

Technical Field

[0001] This invention relates to the technical field of substrate transportation, and more specifically, to a composite robot for picking up and transporting substrate boxes. Background Technology

[0002] During substrate processing, depending on the different production processes, the substrate needs to be processed on multiple different machines, meaning it needs to be processed at different production stages. To facilitate the transportation of substrates between different production stages, they are generally placed in substrate boxes for transport. Multiple substrates can be placed in a substrate box, which protects the substrates during transportation, allowing them to be safely transferred between different production stages.

[0003] When transporting substrate boxes, they can be transported by a transport trolley. However, placing the substrate boxes on the transport trolley and removing them from the transport trolley both require manual operation, which wastes a lot of manpower and reduces production efficiency. Summary of the Invention

[0004] To address the shortcomings of existing technologies, the present invention aims to provide a composite robot for picking up and transporting substrate boxes. This robot uses a box-grabbing device to pick up and transfer boxes between the transport material and the processing equipment, eliminating the need for manual loading and unloading of boxes, thus saving manpower and improving production efficiency.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a composite robot for picking up and transporting substrate boxes, comprising a transport trolley that moves between various processing equipment;

[0006] A transport rack, which is mounted on a transport trolley and used to store material boxes;

[0007] And a material box clamping device, which is used to clamp and transfer material boxes between the processing equipment and the transport rack, and the material box clamping device is installed at the processing equipment or on the transport trolley.

[0008] The present invention is further configured such that: the material box gripping device includes a robotic arm, which is mounted on a transport trolley or next to the production equipment;

[0009] And a gripping mechanism, which is mounted on the robotic arm and moved by the robotic arm;

[0010] The gripping mechanism includes gripping fingers, and two sets of gripping fingers are provided. The two sets of gripping fingers move toward each other and toward each other to achieve clamping and releasing of the material box.

[0011] The present invention is further configured such that: each group of the clamping mechanism includes multiple clamping fingers and the multiple clamping fingers of the two groups correspond one-to-one; the multiple clamping fingers of the same group are arranged along the arrangement direction of the material box; and each material box is clamped by at least two corresponding clamping fingers.

[0012] The present invention is further configured such that: the clamping mechanism further includes a guide rail, the position of which is fixed;

[0013] And a slider, which is disposed on the connecting plate and is capable of sliding on the guide rail along the sliding direction of the gripper finger.

[0014] The present invention is further configured such that: the material box clamping device further includes a material feeding mechanism, the material feeding mechanism includes a material feeding plate, two material feeding plates are provided, at least one of the two material feeding plates is configured as a movable material feeding plate, the movable material feeding plate controls the distance between the two material feeding plates by sliding, and the sliding direction of the movable material feeding plate is set along the arrangement direction of the multiple material boxes.

[0015] The present invention is further configured such that the material box clamping device further includes a pressing mechanism, which presses against the top of the material box.

[0016] The present invention is further configured such that: the transport rack includes a frame body, the frame body is fixedly connected to the top of the transport trolley, and the frame body is provided with multiple accommodating spaces;

[0017] Each of the receiving spaces is provided with a tray, which extends and retracts from the receiving space by sliding, and the tray is used to support the material box;

[0018] And a pressing mechanism for pressing the cassette onto a tray that retracts into a receiving space.

[0019] The present invention is further configured such that: the pressing mechanism includes a pressing plate, each accommodating space corresponds to at least one pressing plate, and the pressing plate presses the material box tightly onto the tray that retracts into the accommodating space.

[0020] The invention is further configured such that the pressing mechanism also includes a lifting component, which is used to drive the pressing plate to move up and down to control the pressing and releasing of the pressing plate on the material box.

[0021] The present invention is further configured such that: telescopic rails are provided on both sides of the tray, the telescopic rails include a fixed part and a sliding part, the fixed part is fixed on the frame, the sliding part slides on the fixed part, and the tray is connected to the sliding part so that the sliding part drives the tray to extend and retract into the receiving space.

[0022] In summary, the present invention has the following advantages over the prior art: the present invention uses a material box clamping device to clamp and transfer the material box between the transport material and the processing equipment, eliminating the need for manual loading and unloading of the material box, saving manpower and improving production efficiency. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the overall structure of the embodiment;

[0024] Figure 2 This is a schematic diagram of the box clamping device in an embodiment;

[0025] Figure 3 This is a schematic diagram of the gripping mechanism in an embodiment;

[0026] Figure 4 for Figure 3 Enlarged schematic diagram of part A;

[0027] Figure 5 This is a schematic diagram illustrating the feeding mechanism in an embodiment;

[0028] Figure 6 This is a schematic diagram of the clamping mechanism in an embodiment;

[0029] Figure 7 This is a schematic diagram of the transport rack used in an embodiment.

[0030] Figure 8 for Figure 7 Enlarged schematic diagram of part B;

[0031] Figure 9 This is a schematic diagram of the pressing mechanism in an embodiment;

[0032] Figure 10 This is a schematic diagram illustrating the lifting component in an embodiment;

[0033] Figure 11 This is a schematic diagram of the tray used in an embodiment.

[0034] In the diagram: 1. Transport trolley; 2. Material box gripping device; 21. Robotic arm; 22. Support plate; 23. Gripping mechanism; 231. Gripping finger; 232. Connecting plate; 233. Guide rail; 234. Slider; 235. Sliding rod; 236. Positioning block; 24. Material feeding mechanism; 241. Material feeding plate; 242. Synchronous belt; 243. Fixing plate; 25. Pressing mechanism; 251. Pressure plate; 252. Spring; 253. Fixing component; 2531. Guide hole; 2532, Limiting hole; 254, Guide rod; 255, Elastic buffer pad; 256, Bolt; 257, Transition sleeve; 3, Transport rack; 31, Frame body; 311, Accommodation space; 32, Pallet; 321, Positioning block; 33, Pressing mechanism; 331, Pressing plate; 332, Mounting plate; 333, Optical axis; 334, Fixed seat; 335, Guide block; 336, Lifting component; 34, Telescopic rail; 341, Fixed part; 342, Sliding part. Detailed Implementation

[0035] To enable those skilled in the art to better understand the technical solutions of the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings. Based on the embodiments in this application, other similar embodiments obtained by those skilled in the art without creative effort should all fall within the scope of protection of this application. Furthermore, directional terms mentioned in the following embodiments, such as "up," "down," "left," and "right," are only for reference to the directions in the accompanying drawings; therefore, the directional terms used are for illustrative purposes and not for limiting the invention.

[0036] The present invention will be further described below with reference to the accompanying drawings and preferred embodiments.

[0037] Example 1: A composite robot for picking up and transporting substrate boxes, see attached document. Figure 1 -Appendix Figure 11 It includes a transport trolley 1 that moves between various processing equipment, a transport rack 3 set on the transport trolley 1, and a box clamping device 2 for clamping and transferring boxes between the processing equipment and the transport rack 3. The box clamping device 2 is set at the processing equipment or on the transport trolley 1.

[0038] Specifically, the material box gripping device 2 includes a robotic arm 21, a support plate 22 mounted on the robotic arm 21, and a gripping mechanism 23 mounted on the support plate 22. The robotic arm 21 is mounted on the transport trolley 1 or next to the production equipment. When the robotic arm 21 is mounted on the transport trolley 1, it can move with the trolley 1. When the trolley 1 moves to the side of the equipment to pick up or place the material box, the gripping mechanism 23 can be moved by the robotic arm 21 to complete the task. When the robotic arm 21 is mounted next to the production equipment, one robotic arm 21 is mounted next to each piece of production equipment. When the transport trolley 1 moves to the production equipment, the gripping mechanism 23 is moved by the robotic arm 21 next to the production equipment to pick up or place the material box. In this embodiment, the robotic arm 21 is mounted on the transport trolley 1. The robotic arm 21 is configured as a six-axis robotic arm 21.

[0039] Specifically, the gripping mechanism 23 includes two sets of gripping fingers 231. The gripping and releasing of the material box is achieved by the two sets of gripping fingers 231 moving towards and away from each other. To improve gripping efficiency, multiple material boxes need to be gripped at once during material box gripping. These multiple material boxes are arranged in a horizontal direction. During gripping, the two sets of gripping fingers 231 can be clamped at both ends of the arrangement direction of the multiple material boxes. However, with this clamping method, material boxes near the middle of the arrangement direction are prone to not being completely clamped, making them easy to fall during handling. In this embodiment, two sets of gripping fingers 231 are set to clamp the material boxes from both sides of the arrangement direction. To ensure that each material box can be clamped by the gripping fingers 231, each set of gripping fingers 231 is provided with multiple gripping fingers 231. The two sets of multiple clamping fingers 231 correspond one-to-one. When clamping, the corresponding two clamping fingers 231 clamp the same material box and each material box is set to be clamped by at least the corresponding two clamping fingers 231, so that each material box can be firmly clamped.

[0040] In order to achieve the clamping of the material box by the clamping finger 231, the clamping finger 231 is set to slide in the horizontal direction and the sliding direction of the clamping finger 231 is perpendicular to the arrangement direction of the material box.

[0041] Specifically, in order to maintain the uniform movement of the same group of gripping fingers 231, the gripping mechanism 23 in this embodiment also includes a connecting plate 232. Each group of gripping fingers 231 corresponds to a connecting plate 232. Multiple gripping fingers 231 in the same group are fixedly connected to the connecting plate 232 corresponding to the group of gripping fingers 231. The movement of the connecting plate 232 drives the multiple gripping fingers 231 in the same group to move simultaneously.

[0042] Specifically, the clamping mechanism 23 also includes a power component, which is connected to the connecting plate 232 via a transmission connection. The power component drives the connecting plate 232 to move, thereby causing multiple clamping fingers 231 in the same group to move simultaneously. Specifically, in this embodiment, the power component is set as a cylinder; the clamping mechanism 23 is located at the bottom of the support plate 22, the cylinder body of the power component is fixedly connected to the support frame, and the piston rod is fixedly connected to the connecting plate 232, so that the connecting plate 232 can be moved by the extension and retraction of the piston rod.

[0043] Specifically, in order to guide the sliding direction of the connecting plate 232, the clamping mechanism 23 also includes a guide rail 233 and a slider 234. The guide rail 233 is fixedly connected to the support plate 22, and the slider 234 is fixedly connected to the connecting plate 232. The slider 234 can slide on the guide rail 233 along the sliding direction of the clamping finger 231. In the clamping mechanism 23, at least one set of guide rail 233 and slider 234 is provided. Preferably, in this embodiment, two sets of guide rail 233 and slider 234 are provided and the two sets of guide rail 233 and slider 234 are symmetrically arranged with respect to the length direction of the connecting plate 232.

[0044] Specifically, the guide rail 233 and the slider 234 are located on the side of the two connecting plates 232 that are close to each other. On the side of each slider 234 away from the connecting plate 232 it is connected to, there is a sliding rod 235 and a positioning block 236. The length direction of the sliding rod 235 is set along the sliding direction of the connecting plate 232. The sliding rod 235 passes through the positioning block 236 along its own length direction and slides on the positioning block 236 along its own length direction. The sliding rod 235 is fixedly connected to the slider 234, and the positioning block 236 is fixedly connected to the support plate 22. When the gripper 231 clamps the material box, the slider 234 contacts the positioning block 236, so that the gripper 231 cannot continue to increase the clamping force on the material box, thereby preventing the gripper 231 from over-clamping the material box and damaging it.

[0045] Specifically, the material box gripping device 2 also includes a material pushing mechanism 24; when multiple material boxes are arranged together, in order to ensure that the grippers can smoothly grip each material box, the material pushing mechanism 24 pushes the material boxes along the arrangement direction of the material boxes, so that the multiple material boxes are pressed together, so that each material box can be gathered together, thereby facilitating the gripping of the material boxes by the grippers.

[0046] Specifically, the feeding mechanism 24 includes two feeding plates 241, which are disposed at the bottom of the support plate 22. At least one of the feeding plates 241 is configured as a movable feeding plate 241. By moving the movable feeding plate 241, the distance between the two feeding plates 241 can be adjusted. Specifically, the two feeding plates 241 are arranged along the arrangement direction of the material boxes, and the moving direction of the movable feeding plate 241 is also arranged along the arrangement direction of the material boxes. By moving the movable feeding plate 241, the distance between the two feeding plates 241 can be shortened, thereby causing multiple material boxes to stick together tightly, thus achieving the aggregation of the material boxes.

[0047] In this embodiment, one of the material-pulling plates 241 is configured as a fixed material-pulling plate 241, and the other material-pulling plate 241 is configured as a movable material-pulling plate 241. The fixed material-pulling plate 241 is fixedly connected to the support plate 22, and the movable material-pulling plate 241 slides on the support plate 22. By sliding the movable material-pulling plate 241, the distance between the two material-pulling plates 241 is changed.

[0048] Specifically, the feeding mechanism 24 also includes a timing belt 242, which is supported by two timing belt 242 wheels, which are rotatably connected to the support plate 22. The length direction of the timing belt 242 wheels is parallel to the sliding direction of the movable feeding plate 241. The movable feeding plate 241 is fixedly connected to the timing belt 242 and is driven to move by the timing belt 242.

[0049] The support plate 22 is fixedly connected to the guide rail 233, and the guide rail 233 is provided with a guide block. The guide block slides on the guide rail 233 along the sliding direction of the movable material feeding plate 241. A fixed plate 243 is fixedly connected to the guide block, the movable material feeding plate 241 is fixedly connected to the fixed plate 243, and the fixed plate 243 is fixedly connected to the timing belt 242.

[0050] Specifically, the material box clamping device 2 also includes a clamping mechanism 25. The clamping mechanism 25 clamps the top of the material box. When the clamping mechanism 23 clamps the material box, the clamping mechanism 25 clamps the top of the material box. There are certain gaps in the vertical direction between the various components of the clamping mechanism 23, between the components, and between the components and the support plate 22. When the robotic arm 21 moves, the material box is prone to swaying up and down. However, by clamping the material box with the clamping mechanism 25, a downward force is applied to the various components of the clamping mechanism 23. The components in the clamping mechanism 23 will not sway up and down due to the gaps, thus making it less likely for the clamped material box to fall.

[0051] Specifically, the clamping mechanism 25 includes a clamping plate that fits against the top of the material box and a spring 252 for providing downward pressure to the clamping plate. During the process of the support plate 22 aligning with the material box and moving downward, the clamping plate 251 first contacts the material box, thereby squeezing the spring 252 through the clamping plate 251 until the gripper fingers 231 are located on both sides of the material box. At this time, the spring 252 provides downward pressure to the clamping plate 251. After the gripper fingers 231 clamp the material box and lift the material box upward, the spring 252 applies downward pressure to the clamping mechanism 23, so that each component of the clamping mechanism 23 is pressed at the bottom of the assembly gap in the assembly gap and will not wobble up and down.

[0052] The clamping mechanism 25 also includes a fixing member 253, which is fixedly connected to the support plate 22; a guide rod 254 is fixedly connected to the top of the pressure plate 251, the guide rod 254 is inserted into the fixing member 253 and can slide up and down on the fixing member 253 to guide the movement direction of the pressure plate 251; a spring 252 is sleeved on the guide rod 254, and the two ends of the spring 252 are respectively connected to the fixing member 253 and the pressure plate 251.

[0053] The guide rod 254 has guide holes 2531 on both sides, which are formed on the fixing member 253. The guide holes 2531 penetrate downward through the fixing member 253, and the top of the guide holes 2531 has limit holes 2532, which penetrate upward through the fixing member 253. The size of the limit holes 2532 is larger than the size of the guide holes 2531. A bolt 256 is provided on each side of the guide rod 254. The head of the bolt 256 is located in the limit hole 2532, and the threaded part of the bolt 256 passes through the guide hole 253. 1. It is fixedly connected to the pressure plate 251; the setting of bolt 256 and limiting hole 2532 ensures that the pressure plate 251 will not completely detach from the fixing member 253; specifically, a transition sleeve 257 is provided on the outer sleeve of the screw, the transition sleeve 257 passes through the limiting hole 2532 and its two ends are respectively pressed against the head of bolt 256 and pressure plate 251; an elastic buffer pad 255 is provided between the fixing member 253 and the support plate 22 to prevent the head of bolt 256 from directly contacting the support plate 22 and causing a hard collision.

[0054] Specifically, the transport rack 3 includes a frame 31 fixedly connected to the top of the transport trolley 1, multiple pallets 32 disposed in the frame 31, and a pressing mechanism 33 disposed on the frame 31. Specifically, multiple receiving spaces 311 are provided on the frame 31, and each receiving space 311 is provided with a pallet 32. The pallet 32 ​​extends and retracts from the receiving space 311 by horizontal sliding. When the pallet 32 ​​extends from the receiving space 311, it is convenient to remove the material box on the pallet 32 ​​or place the material box on the pallet 32. After the material box is placed on the pallet 32, the material box is stored in the receiving space 311 by sliding the pallet 32. The pressing mechanism 33 is provided to press the material box tightly onto the pallet 32 ​​that has retracted into the receiving space 311. By accommodating the material box in the accommodating space 311 and pressing the material box with the pressing mechanism 33, the material box stored in the accommodating space 311 is fixed, so that the material box is not easy to collide or tip over during the transportation process of the transport trolley 1, and thus is not easy to damage the substrate in the material box.

[0055] Specifically, the accommodating space 311 extends horizontally through the frame 31, and multiple accommodating spaces 311 are arranged vertically on the frame 31; at least one material box is placed on the top of each pallet 32.

[0056] Specifically, the pressing mechanism 33 includes a pressing plate 331. Each receiving space 311 corresponds to at least one pressing plate 331. The pressing plate 331 corresponding to the receiving space 311 is used to press the material box contained in the receiving space 311, so that the material box is pressed on the tray 32.

[0057] Preferably, in this embodiment, each receiving space 311 corresponds to multiple pressure plates 331, which are arranged horizontally. Specifically, the boxes on the tray 32 are arranged horizontally on the tray 32, and the arrangement direction of the multiple pressure plates 251 in the receiving space 311 is the same as the arrangement direction of the boxes on the tray 32. When the boxes on the tray 32 are stored in the receiving space 311, at least one pressure plate 331 is pressed on each box, so that each box on the tray 32 can be firmly pressed on the tray 32.

[0058] Specifically, the pressing mechanism 33 also includes a lifting component 336, which is used to drive the pressing plate 331 to move up and down, thereby controlling the pressing and releasing of the pressing plate 331 on the material box.

[0059] Specifically, the lifting component 336 is configured as a cylinder; the cylinder body of the lifting component 336 is fixedly connected to the frame 31, and in this embodiment, a fixed seat 334 is fixedly connected to the frame 31, and the cylinder body of the lifting component 336 is fixedly connected to the fixed seat 334.

[0060] Specifically, the pressing mechanism 33 includes an optical shaft 333 and a mounting plate 332. Each accommodating space 311 corresponds to a mounting plate 332. The mounting plate 332 is fixedly connected to the pressing plate 331 in the accommodating space 311, so that the mounting plate 332 can simultaneously drive multiple pressing plates 331 in the accommodating space 311 to move up and down together.

[0061] The optical axis 333 is vertically set and fixedly connected to all the mounting plates 332. The piston rod of the power component is fixedly connected to the optical axis 333 through a plate. The power component drives the optical axis 333 to move in the vertical direction, thereby driving the mounting plate 332 to move vertically and thus driving the pressure plate 331 to move in the vertical direction.

[0062] Specifically, the transport rack 3 also includes guide blocks 335. Each optical axis 333 corresponds to at least one guide block 335. The optical axis 333 passes through the guide block 335 in a vertical direction and can slide vertically on the guide block 335. The vertical sliding of the optical axis 333 can be guided by the guide blocks 335. Specifically, each optical axis 333 corresponds to two guide blocks 335. The two guide blocks 335 are arranged in a vertical direction and are fixedly connected to the frame 31.

[0063] Preferably, in this embodiment, two optical axes 333 are provided, and the two optical axes 333 are arranged in a horizontal direction.

[0064] Specifically, in this embodiment, the two ends of the accommodating space 311 are respectively set as an open end and a closed end. The tray 32 extends out of the accommodating space 311 from the open end of the accommodating space 311, while a baffle is set at the closed end of the accommodating space 311 to prevent the tray 32 from sliding out of the closed end of the accommodating space 311. The baffle is fixedly connected to one side of the frame 31 and blocks the trays 32 in the multiple accommodating spaces 311.

[0065] Specifically, a positioning block 321 is provided on the top of the pallet 32. The positioning block 321 is located at the front end and rear end of the pallet 32 ​​in the direction of extending out of the receiving space 311. The positioning block 321 is used to prevent the material box from sliding off the pallet 32.

[0066] Specifically, two telescopic rails 34 are provided on both sides of the pallet 32. The telescopic rails 34 include a fixed part 341 and a sliding part 342. The fixed part 341 is fixed on the frame 31, and the sliding part 342 is provided on the fixed part 341 and can slide on the fixed part 341. The sliding direction of the sliding part 342 on the fixed part 341 is the same as the sliding direction of the pallet 32.

[0067] Specifically, a front baffle and a rear baffle are respectively provided at both ends of the fixing part 341. The front baffle and the rear baffle are fixed on the frame 31 so that the position of the fixing part 341 on the frame 31 is fixed.

[0068] Specifically, at least one of the telescopic rails 34 is equipped with a cylinder, the cylinder body is fixedly connected to the fixed part 341, and the piston rod of the cylinder is fixedly connected to the sliding part 342. The sliding part 342 is controlled to slide on the fixed part 341 by the extension and retraction of the piston rod of the cylinder.

[0069] Example 2: A composite robot for picking up and transporting substrate boxes. The difference between this example and Example 1 is that the box gripping device 2 further includes a camera assembly, a laser sensor, and a tilt sensor. The camera assembly includes a light source and a camera. The camera assembly, laser sensor, and tilt sensor are all mounted on the support plate 22. The support plate 22 and the box can be positioned by the camera assembly, laser sensor, and tilt sensor, so that the gripping mechanism 23 and the feeding mechanism 24 can be aligned with the box.

[0070] The above description is merely a preferred embodiment of the present invention. The scope of protection of the present invention is not limited to the above embodiments. All technical solutions falling within the scope of the present invention's concept are within the scope of protection of the present invention. It should be noted that for those skilled in the art, any improvements and modifications made without departing from the principles of the present invention should also be considered within the scope of protection of the present invention.

Claims

1. A composite robot for picking up and transporting substrate boxes, characterized in that: Includes a transport trolley (1) that moves between various processing equipment; A transport rack (3) is mounted on a transport trolley (1) and is used to store material boxes. And a box clamping device (2), which is used to clamp and transfer boxes between the processing equipment and the transport rack (3), and the box clamping device (2) is set at the processing equipment or on the transport trolley (1); The material box clamping device (2) includes a robotic arm (21), which is mounted on the transport trolley (1) or next to the production equipment; And a gripping mechanism (23), which is mounted on the robotic arm (21) and moved by the robotic arm (21); The clamping mechanism (23) includes clamping fingers (231), and the clamping fingers (231) are provided in two sets. The two sets of clamping fingers (231) move toward each other and away from each other to achieve clamping and releasing of the material box. Each group of the clamping mechanism (23) includes multiple clamping fingers (231), and the multiple clamping fingers (231) of the two groups correspond one-to-one. The multiple clamping fingers (231) of the same group are arranged along the arrangement direction of the material box, and each material box is clamped by at least two corresponding clamping fingers (231). The clamping mechanism (23) further includes a guide rail (233), the position of which is fixed; And a slider (234), which is disposed on a connecting plate (232) and is capable of sliding on a guide rail (233) along the sliding direction of the gripper (231); The material box clamping device (2) further includes a material feeding mechanism (24), which includes a feeding plate (241). There are two feeding plates (241), and at least one of the feeding plates (241) is configured as a movable feeding plate (241). The movable feeding plate (241) controls the distance between the two feeding plates (241) by sliding. The sliding direction of the movable feeding plate (241) is set along the arrangement direction of the multiple material boxes.

2. The composite robot for picking up and transporting substrate boxes according to claim 1, characterized in that: The material box clamping device (2) further includes a pressing mechanism (25), which presses against the top of the material box.

3. The composite robot for picking up and transporting substrate boxes according to claim 1, characterized in that: The transport rack (3) includes a frame (31), which is fixedly connected to the top of the transport trolley (1), and the frame (31) is provided with multiple accommodating spaces (311); A tray (32) is provided in each of the receiving spaces (311). The tray (32) extends and retracts from the receiving space (311) by sliding. The tray (32) is used to carry the material box. And a pressing mechanism (33) for pressing the cassette onto a tray (32) that retracts into the receiving space (311).

4. A composite robot for picking up and transporting substrate boxes according to claim 3, characterized in that: The pressing mechanism (33) includes a pressing plate (331), and each receiving space (311) corresponds to at least one pressing plate (331). The pressing plate (331) presses the material box onto the tray (32) that retracts into the receiving space (311).

5. A composite robot for picking up and transporting substrate boxes according to claim 4, characterized in that: The pressing mechanism (33) also includes a lifting component (336), which is used to drive the pressing plate (331) to move up and down to control the pressing plate (331) to press and release the material box.

6. A composite robot for picking up and transporting substrate boxes according to claim 5, characterized in that: The tray (32) is provided with telescopic rails (34) on both sides. The telescopic rails (34) include a fixed part (341) and a sliding part (342). The fixed part (341) is fixed on the frame (31), and the sliding part (342) slides on the fixed part (341). The tray (32) is connected to the sliding part (342), so that the sliding part (342) drives the tray (32) to extend and retract into the receiving space (311).

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