Micromechanical gyroscope and electronic product

Abstract

The application provides a micromechanical gyroscope and an electronic product. The micromechanical gyroscope comprises a driving assembly, a detection assembly, two first connecting assemblies and two second connecting assemblies. The driving assembly comprises a first driving piece, a second driving piece and a driving device, the driving device is used for driving the first driving piece and the second driving piece to move; the detection assembly comprises two first detection pieces arranged along a third direction, two second detection pieces arranged along a fourth direction and a detection device, the detection device is used for detecting the movement distance of the first detection piece and / or the second detection piece along a fifth direction; and the first connecting assembly and the second connecting assembly rotate around their centers respectively, so that the second detection piece can reciprocate along the third direction and the first detection piece can reciprocate along the fourth direction. The micromechanical gyroscope and the electronic product can realize differential detection, effectively immune the influence of acceleration impact and orthogonal error.

Claims

1. A micromechanical gyroscope, characterized in that, The micromechanical gyroscope includes: The drive assembly (1) includes a first drive member (11), a second drive member (12) and a drive device. The drive device is used to drive the first drive member (11) and the second drive member (12) to move, so that when the first drive member (11) moves along a first direction (L), the second drive member (12) can move along a second direction (K) perpendicular to the first direction (L). The detection component (2) includes two first detection elements (21) arranged along a third direction (X), two second detection elements (22) arranged along a fourth direction (Y), and a detection device (23), the detection device (23) being used to detect the movement distance of the first detection elements (21) and / or the second detection elements (22) along a fifth direction (Z); Two first connecting components (3) are distributed along the fourth direction (Y). Each first connecting component (3) is connected to the adjacent first driving member (11), second driving member (12) and second detection member (22). The first connecting component (3) rotates about its center so that the second detection member (22) can reciprocate along the third direction (X). Two second connecting components (4) are distributed along the third direction (X). Each second connecting component (4) is connected to the adjacent first driving member (11), second driving member (12) and first detection member (21). The second connecting component (4) rotates about its center so that the first detection member (21) can reciprocate along the fourth direction (Y). The first connecting component (3) and the second connecting component (4) both include a rotating component (31), a connecting beam (32) and a first flexible beam (33), and the micromechanical gyroscope also includes a first fixing component (5); The two first driving members (11) and the two second driving members (12) are symmetrically distributed along the rotating member (31), and the two first driving members (11) and the two second driving members (12) are connected to the rotating member (31) through the connecting beam (32) to drive the rotating member (31) to rotate relative to the first fixed member (5); The first detection element (21) and / or the second detection element (22) are connected to the rotating element (31) via the first flexible beam (33); Wherein, the first direction (L) and the third direction (X) have a preset angle, and the fifth direction (Z) is perpendicular to the first direction (L) and the third direction (X).

2. The micromechanical gyroscope according to claim 1, characterized in that, Along the first direction (L), the drive device controls the two first drive members (11) to move in opposite directions; Along the second direction (K), the drive device controls the two second drive members (12) to move in opposite directions; When the two first driving members (11) approach each other, the two second driving members (12) move away from each other; When the two first driving members (11) move away from each other, the two second driving members (12) move closer to each other.

3. The micromechanical gyroscope according to claim 2, characterized in that, Both the first driving member (11) and the second driving member (12) are provided with mounting holes (111), and the driving device is located in the mounting holes (111); Along the fifth direction (Z), the detection device (23) is located above the first detection element (21) and has a gap between it and the first detection element (21); And / or, along the fifth direction (Z), the detection device (23) is located above the second detection element (22) and has a gap between it and the second detection element (22).

4. The micromechanical gyroscope according to claim 1, characterized in that, Both the first connecting component (3) and the second connecting component (4) include a second flexible beam (34), one end of which is connected to the rotating member (31) and the other end is connected to the first fixing member (5).

5. The micromechanical gyroscope according to claim 1, characterized in that, The micromechanical gyroscope also includes a second fixing member (6) and a guide beam (61), one end of which is connected to the second fixing member (6) and the other end is connected to the first driving member (11) or the second driving member (12); Along the circumference of the first drive member (11) and / or the second drive member (12), a plurality of second fixing members (6) are spaced apart to restrict the movement of the first drive member (11) and / or the second drive member (12).

6. The micromechanical gyroscope according to claim 1, characterized in that, The micromechanical gyroscope also includes a third fixed member (7) and a third flexible beam (71). One end of the third flexible beam (71) is connected to the third fixed member (7), and the other end is connected to the first detection member (21) or the second detection member (22) to restrict the movement of the first detection member (21) or the second detection member (22).

7. The micromechanical gyroscope according to claim 1, characterized in that, The micromechanical gyroscope also includes a central connector (8) and a fourth flexible beam (81). Along the third direction (X), the two ends of the central connector (8) are respectively connected to the two first detection elements (21) through the fourth flexible beam (81); Along the fourth direction (Y), the two ends of the central connector (8) are connected to the two second detection elements (22) respectively through the fourth flexible beam (81).

8. The micromechanical gyroscope according to claim 3, characterized in that, A driving capacitor is formed between the driving device and the first driving member (11) and / or the second driving member (12); A detection capacitor (231) is formed between the detection device (23) and the first detection element (21) and / or the second detection element (22).

9. An electronic product, characterized in that, The electronic products include: ontology; A micromechanical gyroscope is mounted on the main body, wherein the micromechanical gyroscope is the micromechanical gyroscope as described in any one of claims 1-8.

Images