A rotary silicon carbide crystal growth furnace induction heating system

Abstract

The present invention discloses an induction heating system for a rotating silicon carbide crystal growth furnace, including a heating and cooling subsystem and a crucible rotating system, wherein the heating and cooling subsystem includes a heat preservation structure, a heating component and a cooling component, and the crucible rotating system includes a rotating structure, an insulating protection structure and a crucible structure, and also includes a frame structure, wherein the frame structure includes a body and a machine plate. The present invention adopts a main shaft in a rotating structure to drive the crucible structure to rotate, and when the main shaft rotates, four driven gears drive four L-shaped frames to rotate around the main shaft, so that the horizontal shaft realizes rotation around the main shaft, and at the same time, the horizontal shaft realizes self-rotation due to the meshing relationship between the bevel gear ring and the bevel gear, so that the first balls at the ends of the multiple stabilizing rods support the spherical shaft on the main shaft, ensuring the stable rotation of the main shaft centering, ensuring the stable rotation of the crucible structure, making the temperature field distribution easier to control during heating, ensuring the temperature uniformity, and ensuring the production quality of the crystal.

Description

Technical Field

[0001] The invention relates to the technical field of mechanical equipment, in particular to an induction heating system of a rotating silicon carbide crystal growth furnace. Background Art

[0002] The silicon carbide crystal growth furnace is a high-temperature furnace, which mainly adopts medium-frequency induction heating. The maximum design temperature can reach 2400℃. Since medium-frequency induction heating is mainly based on the principle of electromagnetic induction, high-density magnetic lines are generated in the induction coil through medium-frequency alternating current, and the crystal material in the induction coil is cut to generate large eddy currents and generate heat. Its heating method has a fast heating speed and high production efficiency. In order to ensure the stability of the thermal field distribution when the inner side of the induction coil is heated, a rotating structure will be used to drive the crystal growth crucible to rotate at a uniform speed. However, when rotating, the crystal growth crucible is prone to not being able to rotate centered, and there will be slight irregular vibrations, which will affect the distribution of the temperature field in the crystal growth crucible. Because during the growth process of the crystal, the radial uniformity of the thermal field directly affects the growth quality and defects of the crystal, which will cause defects in crystal production.

[0003] In this regard, the Chinese invention patent with the authorization announcement number CN114411264A discloses an induction heating system for a rotating silicon carbide crystal growth furnace, which includes the base including a fixed seat and a rotating support surrounding the fixed seat; the induction coil is installed on the rotating support, and the rotation of the rotating support drives the induction coil to rotate along the central axis of the induction coil; the rotating fixed seat includes an inner ring of an inlet water-cooled conductive ring and an inner ring of an outlet water-cooled conductive ring fixed on the inner ring of the inlet water-cooled conductive ring; the rotating support includes an outer ring of an inlet water-cooled conductive ring and an outer ring of an outlet water-cooled conductive ring fixed on the outer ring of the inlet water-cooled conductive ring; a water inlet cooling water channel is provided at the connection between the inner ring of the inlet water-cooled conductive ring and the outer ring of the inlet water-cooled conductive ring; a water outlet cooling water channel is provided at the connection between the inner ring of the outlet water-cooled conductive ring and the outer ring of the outlet water-cooled conductive ring;

[0004] The induction heating system of the crystal growth furnace controls the magnetic field distribution of the induction coil by regulating the rotation period and rotation angle of the induction coil, thereby adjusting the distribution of the temperature field. The induction coil is rotated instead of the crucible. However, there is still no smooth rotation structure, and the stable rotation of the induction coil cannot be guaranteed. The temperature field distribution is still difficult, which ultimately affects the quality of crystal growth.

[0005] To this end, we propose an induction heating system for a rotating silicon carbide crystal growth furnace to solve the above problems. Summary of the invention

[0006] The object of the present invention is to provide an induction heating system for a rotary silicon carbide crystal growth furnace to solve the problems raised in the above background technology.

[0007] To achieve the above-mentioned objectives, the present invention provides the following technical solutions: a rotating silicon carbide crystal growth furnace induction heating system, comprising a heating and cooling subsystem and a crucible rotation system, wherein the heating and cooling subsystem comprises a thermal insulation structure, a heating component and a cooling component, and the crucible rotation system comprises a rotating structure, an insulating protection structure and a crucible structure.

[0008] The machine also includes a frame structure, wherein the frame structure includes a machine body and a machine plate, wherein the machine plate is located directly below the machine body, wherein a bottom cavity is provided on the bottom surface of the machine body, wherein a heat preservation structure is fixedly connected in the bottom cavity, wherein a heating component and a cooling component are arranged in the heat preservation structure, wherein a lifting component is vertically fixedly embedded in the center of the machine plate, wherein a rotating structure is arranged on the top of the lifting component;

[0009] The rotating structure comprises a base, the top surface of the base is fixedly connected to the motor bin, the top surface of the motor bin is fixedly connected to the transmission bin, the top surface of the transmission bin is fixedly connected to the top plate, a turning opening is provided at the center of the top surface of the top plate, the turning opening is rotatably connected to the bottom surface of the turntable, the top surface of the turntable is fixedly connected to the insulating protection structure, and a crucible structure is provided inside the insulating protection structure;

[0010] The motor compartment is fixed with a driving reduction motor, the rotating shaft end of the driving reduction motor is fixed with a main shaft, the top end of the main shaft passes through the transmission compartment and the top plate and is fixed with the center position of the bottom surface of the turntable, the main shaft is located in the transmission compartment and is fixed with a spherical shaft, the inner bottom surface of the transmission compartment is fixed with a supporting ring, the top surface of the supporting ring is fixed with an inner gear ring, the main shaft is located inside the inner gear ring and is fixedly sleeved with a driving gear, four driven gears are evenly meshed between the driving gear and the inner gear ring, and the driven gear is movably connected to the top surface of the supporting ring;

[0011] The main shaft is located above the driving gear and is rotatably connected to the rotating sleeve. Four L-shaped frames are horizontally fixed to the circumference of the rotating sleeve. The top of the L-shaped frame is horizontally rotatably connected to the transverse shaft. Multiple transverse support plates are horizontally fixed to the inner side of the transmission warehouse. Bevel gear rings are fixed between the multiple transverse support plates. The end of the transverse shaft away from the main shaft is fixed to the bevel gear, and the bevel gear is meshed and connected to the bevel gear ring. Multiple stabilizing bars are fixed to the circumference of the end of the transverse shaft away from the bevel gear. The ends of the multiple stabilizing bars are respectively rollingly connected to multiple first balls, and the multiple first balls contact the surface of the spherical shaft. The middle part of the L-shaped frame is rotatably connected to the rotating shaft end of the driven gear.

[0012] Preferably, the thermal insulation structure includes a graphite thermal insulation shell, which is fixed in the bottom cavity, an inner cavity is opened on the inner bottom surface of the graphite thermal insulation shell, a graphite soft felt is fixed in the inner cavity, a processing cavity is opened at the center of the bottom surface of the graphite soft felt, a heating cavity is opened in the graphite thermal insulation shell at a position outside the processing cavity, a cooling cavity is opened in the graphite thermal insulation shell at a position outside the heating cavity, the heating component is arranged in the heating cavity, the cooling component is arranged in the cooling cavity, and the insulating protection structure is located in the processing cavity.

[0013] Preferably, the top plate is sleeved on the bottom surface of the inner cavity, and a plurality of support rods are vertically and evenly fixed to the top surface of the inner cavity. The bottom ends of the plurality of support rods pass through graphite soft felt and are rotatably connected to a plurality of guide wheels respectively. A top ring groove is provided on the top surface of the turntable, and the bottom surface of the top ring groove is fixed to a circular track. The bottom ends of the support rods are located inside the top ring groove, and the guide wheels are rollingly connected to the circular track.

[0014] Preferably, the insulating protection structure includes a rigid insulating shell and a sealing cover, the rigid insulating shell is fixedly connected to the top surface of the turntable, a placement cavity is provided on the inner top surface of the rigid insulating shell, a crucible structure is placed in the placement cavity, a first recess is provided on the top surface of the placement cavity, a first internal threaded portion is provided on the edge of the first recess, a first external threaded portion is fixedly connected to the peripheral side of the sealing cover, the first external threaded portion is threadedly connected to the first internal threaded portion, and two first recessed handles are provided on the top surface of the sealing cover.

[0015] Preferably, the crucible structure includes a graphite crucible and a pot cover, a third recess is provided on the inner top surface of the graphite crucible, a second recess is provided on the inner side of the graphite crucible below the third recess, a crystallizer assembly is sleeved in the second recess, a second internal threaded portion is provided on the inner side of the third recess, a second external threaded portion is fixedly connected to the outer side of the pot cover, and the second external threaded portion is threadedly connected to the second internal threaded portion, the crystallizer assembly includes a crystallization ring, the crystallization ring is sleeved in the third recess, a notched ring groove is provided on the outer side of the crystallization ring, a convex edge is fixedly connected to the circumferential side of the top surface of the crystallization ring, the convex edge is sleeved on the bottom surface of the third recess, a lower inner cone portion is provided on the inner bottom surface of the crystallization ring, an upper inner cone portion is provided on the inner side of the top surface of the crystallization ring, and two second concave handles are arranged on the top surface of the pot cover.

[0016] Preferably, the heating component includes an electromagnetic induction heater and a spiral induction coil slidably arranged in a heating chamber, the electromagnetic induction heater is fixedly connected to the inside of the machine body, the center of the top surface of the graphite insulation shell is vertically fixedly embedded in the telescopic main rod, the bottom end of the telescopic main rod is located in the heating chamber, the inner side of the bottom end of the telescopic main rod is slidably sleeved on the telescopic slave rod, the bottom end of the telescopic slave rod is fixedly connected to the center position of the n-type frame, the two ends of the bottom surface of the n-type frame are fixedly connected to the top of the spiral induction coil, the side wall of the telescopic main rod is fixedly connected to the side plate, the side plate and the top surface of the n-type frame are fixedly connected to a bellows, the electromagnetic induction heater is fixedly connected and electrically connected to one end of the wire, the wire is fixedly embedded in the side plate and the n-type frame, the wire portion is located on the inner side of the bellows, the wire is electrically connected to the spiral induction coil, the top end of the telescopic main rod is fixedly connected to a second small servo reduction motor, the inner side of the top end of the telescopic slave rod is fixedly connected to a second threaded sleeve, the shaft end of the second small servo reduction motor is fixedly connected to a reciprocating screw, and the reciprocating screw is threadedly connected to the second threaded sleeve.

[0017] Preferably, the cooling assembly includes a cooling water tank and a spiral circulating liquid pipe, the cooling water tank is fixedly connected to the inside of the machine body, the spiral circulating liquid pipe is fixedly connected to the cooling chamber, the top surface of the cooling water tank is fixedly connected to and connected to a circulating pump, the circulating pump is fixedly connected to and connected to one end of two liquid supply and return pipes, the other ends of the two liquid supply and return pipes are fixedly connected to and connected to the spiral circulating liquid pipe, the side wall of the cooling water tank is fixedly connected to and connected to a water inlet, and the end of the water inlet passes through the side wall of the machine body and is threadedly connected to a sealing plug.

[0018] Preferably, the lifting assembly includes an outer square tube, the inner side of the top surface of the outer square tube is slidably sleeved on the inner square tube, the inner side of the top surface of the middle tube is slidably sleeved on the inner square tube, the peripheral side of the top surface of the outer square tube is fixedly embedded in the center position of the machine plate, the top surface of the inner square tube is fixedly connected to the center position of the base, four gear grooves are respectively provided at the center positions of the four sides of the middle tube, four outer racks are respectively vertically fixedly connected to the four sides inside the outer square tube, four inner racks are respectively vertically fixedly connected to the four sides outside the inner square tube, a plurality of gears are evenly connected and rotated in the gear grooves, the inner racks and the outer racks are respectively meshed and connected on both sides of the gears, a first small servo reduction motor is fixedly connected to the center position of the bottom surface of the outer square tube, a screw rod is fixedly connected to the rotating shaft end of the first small servo reduction motor, a first threaded sleeve is fixedly connected to the bottom surface of the middle tube, and the screw rod is threadedly connected to the first threaded sleeve.

[0019] Preferably, the outer side walls of the machine body and the machine plate are vertically fixed with a plurality of legs, a plurality of support components are arranged between the rotating structure and the machine plate, the support components include an outer sleeve vertically fixed in the machine plate, the inner side of the top end of the outer sleeve is slidably sleeved with a middle sleeve, the inner side of the top end of the middle sleeve is slidably sleeved with an inner sleeve, the top end of the inner sleeve is fixed to the bottom surface of the base, a plurality of vertical rods are vertically fixed between the top surface of the base and the transmission bin, a ball groove is provided on the bottom surface of the turntable, a plurality of second balls are rollingly connected in the ball groove, and the second balls contact the bottom surface of the turntable.

[0020] Compared with the prior art, the present invention has the following beneficial effects:

[0021] The present invention adopts a main shaft in a rotating structure to drive the crucible structure to rotate. When the main shaft rotates, four driven gears drive four L-shaped frames to rotate around the main shaft, so that the transverse shaft can realize rotation around the main shaft. At the same time, the transverse shaft realizes self-rotation due to the meshing relationship between the bevel gear ring and the bevel gear. In this way, the first balls at the ends of the multiple stabilizing rods will support the spherical shaft on the main shaft, ensuring the smooth rotation of the main shaft and the smooth rotation of the crucible structure, making the temperature field distribution during heating easier to control, ensuring the temperature uniformity, and ensuring the production quality of the crystal. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a schematic diagram of the main structure of the first, second and third embodiments of the present invention;

[0023] Figure 2It is a schematic diagram of the main body cutaway structure in the first, second and third embodiments of the present invention;

[0024] Figure 3 It is a schematic diagram of the cross-section structure of the rotating structure in the first, second and third embodiments of the present invention;

[0025] Figure 4 For the present invention Figure 3 A schematic diagram of the enlarged structure of the structure at center A;

[0026] Figure 5 It is a schematic diagram of the cutaway structure of the thermal insulation structure in the first and third embodiments of the present invention;

[0027] Figure 6 It is a schematic diagram of the partial cross-section structure of the heating assembly in the first and third embodiments of the present invention;

[0028] Figure 7 It is a schematic diagram of the exploded structure of the insulation protection structure in the first and third embodiments of the present invention;

[0029] Figure 8 It is a schematic diagram of the exploded structure of the crucible structure in the first and third embodiments of the present invention;

[0030] Fig. 9 It is a schematic diagram of the cross-section structure of the lifting assembly in the first and third embodiments of the present invention;

[0031] Fig.10 For the present invention Fig. 9 Schematic diagram of the enlarged structure at point B in the middle.

[0032] In the figure: 1. frame structure; 2. insulation structure; 3. lifting assembly; 4. rotating structure; 5. insulation protection structure; 6. crucible structure; 7. support assembly; 8. heating assembly; 9. cooling assembly; 11. machine body; 12. machine plate; 13. bottom cavity; 14. legs; 21. graphite insulation shell; 22. inner cavity; 23. graphite soft felt; 24. processing cavity; 25. heating cavity; 26. cooling cavity; 27. support rod; 28. guide wheel; 31. outer square cylinder; 32. middle cylinder; 33. inner square cylinder; 34. gear groove; 35. outer rack; 36. inner rack; 3 7. Gear; 38. First small servo reduction motor; 39. Screw; 310. First threaded sleeve; 41. Base; 42. Motor compartment; 43. Transmission compartment; 44. Top plate; 45. Turntable; 46. Turntable; 47. Driving reduction motor; 48. Spindle; 49. Spherical shaft; 410. Internal gear ring; 411. Horizontal support plate; 412. Bevel gear ring; 413. Driving gear; 414. Driven gear; 415. Rotating sleeve; 416. L-shaped frame; 417. Horizontal shaft; 418. Bevel gear; 419. Stabilizer bar; 420. First ball bearing; 421. Support ring; 422, upright; 423, ball groove; 424, second ball; 425, top ring groove; 426, annular track; 51, rigid insulating shell; 52, placement cavity; 53, first notch; 54, first internal threaded portion; 55, sealing cover; 56, first external threaded portion; 57, first inner concave handle; 61, graphite crucible; 62, second notch; 63, third notch; 64, crystallizer assembly; 65, pot cover; 66, second internal threaded portion; 67, second external threaded portion; 68, second inner concave handle; 641, crystallization ring; 642, convex edge; 643 , notched ring groove; 644, upper inner cone; 645, lower inner cone; 71, outer sleeve; 72, middle sleeve; 73, inner sleeve; 81, spiral induction coil; 82, telescopic main rod; 83, telescopic slave rod; 84, n-type frame; 85, electromagnetic induction heater; 86, side plate; 87, bellows; 88, wire; 89, second small servo reduction motor; 810, reciprocating screw; 811, second threaded sleeve; 91, cooling water tank; 92, spiral circulating liquid pipe; 93, circulating pump; 94, liquid supply and return pipe; 95, water inlet; 96, sealing plug. DETAILED DESCRIPTION

[0033] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0034] Embodiment 1:

[0035] See also Figure 1-10 The present invention provides a technical solution: an induction heating system for a rotating silicon carbide crystal growth furnace, including a heating and cooling subsystem and a crucible rotation system, the heating and cooling subsystem including a thermal insulation structure 2, a heating component 8 and a cooling component 9, the crucible rotation system including a rotating structure 4, an insulating protection structure 5 and a crucible structure 6, the heating and cooling subsystem realizes processing work, the heating component 8 realizes electromagnetic cutting heating, the cooling component 9 is used for annealing and crystal growth, the rotating structure 4 realizes the smooth rotation of the crucible structure 6, and the insulating protection structure 5 is used to protect the crucible structure 6.

[0036] Embodiment 2:

[0037] See also Figure 1-4 , which is the second embodiment of the present invention, and is based on the previous embodiment, and further includes a frame structure 1, the frame structure 1 includes a body 11 and a machine plate 12, the machine plate 12 is located directly below the body 11, a bottom cavity 13 is provided on the bottom surface of the body 11, a heat preservation structure 2 is fixedly connected in the bottom cavity 13, a heating component 8 and a cooling component 9 are arranged in the heat preservation structure 2, a lifting component 3 is vertically fixedly embedded in the center of the machine plate 12, a rotating structure 4 is arranged on the top of the lifting component 3, and the lifting component 3 is used to lift the rotating structure 4 and the crucible structure 6 thereon to rise, so as to facilitate the crucible structure 6 to be placed in the body 11;

[0038] The rotating structure 4 includes a base 41, the top surface of the base 41 is fixedly connected to the motor bin 42, the top surface of the motor bin 42 is fixedly connected to the transmission bin 43, the top surface of the transmission bin 43 is fixedly connected to the top plate 44, a rotating opening 45 is provided at the center of the top surface of the top plate 44, the rotating opening 45 is rotatably connected to the bottom surface of a turntable 46, the top surface of the turntable 46 is fixedly connected to the insulating protection structure 5, a crucible structure 6 is arranged inside the insulating protection structure 5, and the crucible structure 6 is driven to rotate by the turntable 46;

[0039] A driving reduction motor 47 is fixedly connected in the motor bin 42, and the end of the rotating shaft of the driving reduction motor 47 is fixedly connected to a main shaft 48. The top end of the main shaft 48 passes through the transmission bin 43 and the top plate 44 and is fixedly connected to the center position of the bottom surface of the turntable 46. The main shaft 48 is located in the transmission bin 43 and is fixedly connected to a spherical shaft 49. The inner bottom surface of the transmission bin 43 is fixedly connected to a supporting ring 421, and the top surface of the supporting ring 421 is fixedly connected to an inner gear ring 410. The main shaft 48 is located inside the inner gear ring 410 and is fixedly sleeved with a driving gear 413. Four driven gears 414 are evenly meshed between the driving gear 413 and the inner gear ring 410. The driven gears 414 are movably connected to the top surface of the supporting ring 421. The driving reduction motor 47 drives the turntable 46 and the crucible structure 6 to rotate through the main shaft 48.

[0040] The main shaft 48 is located above the driving gear 413 and is rotatably connected to the rotating sleeve 415. Four L-shaped frames 416 are horizontally fixed to the circumference of the rotating sleeve 415. The top of the L-shaped frame 416 is horizontally rotatably connected to the horizontal shaft 417. A plurality of horizontal support plates 411 are horizontally fixed to the inner side of the transmission chamber 43. A bevel gear ring 412 is fixed between the plurality of horizontal support plates 411. The end of the horizontal shaft 417 away from the main shaft 48 is fixed to the bevel gear 418. The bevel gear 418 is meshed and connected to the bevel gear ring 412. A plurality of stabilizing rods 419 are fixed to the circumference of the end of the horizontal shaft 417 away from the bevel gear 418. The ends of the plurality of stabilizing rods 419 are respectively connected to a plurality of first ball bearings in a rolling manner. 420, multiple first balls 420 contact the surface of the spherical shaft 49, the middle part of the L-shaped frame 416 rotates and connects to the shaft end of the driven gear 414. When the main shaft 48 rotates, the four driven gears 414 drive the four L-shaped frames 416 to rotate around the main shaft 48, so that the transverse shaft 417 can rotate around the main shaft 48. At the same time, the transverse shaft 417 can rotate on its own because of the meshing relationship between the bevel gear ring 412 and the bevel gear 418. In this way, the first balls 420 at the ends of the multiple stabilizing rods 419 support the spherical shaft 49 on the main shaft 48, ensuring that the main shaft 48 rotates smoothly and centered, and ensuring the smooth rotation of the crucible structure 6.

[0041] Embodiment 3:

[0042] See also Figure 1-10 , which is the third embodiment of the present invention. This embodiment is based on the previous embodiment. The insulation structure 2 includes a graphite insulation shell 21, which is fixed in the bottom cavity 13. An inner cavity 22 is provided on the inner bottom surface of the graphite insulation shell 21. A graphite soft felt 23 is fixed in the inner cavity 22. A processing cavity 24 is provided at the center of the bottom surface of the graphite soft felt 23. A heating cavity 25 is provided in the graphite insulation shell 21 at the outer position of the processing cavity 24. A cooling cavity 26 is provided in the graphite insulation shell 21 at the outer position of the heating cavity 25. The heating component 8 is arranged in the heating cavity 25, and the cooling component 9 is arranged in the cooling cavity 26. The insulating protection structure 5 is located in the processing cavity 24, so as to heat the crucible structure 6 in the insulating protection structure 5.

[0043] The top plate 44 is sleeved on the bottom surface of the inner cavity 22, and a plurality of support rods 27 are vertically and evenly fixed to the top surface of the inner cavity 22. The bottom ends of the plurality of support rods 27 pass through the graphite soft felt 23 and are rotatably connected to a plurality of guide wheels 28 respectively. A top ring groove 425 is provided on the top surface of the turntable 46, and a circular track 426 is fixed to the bottom surface of the top ring groove 425. The bottom end of the support rod 27 is located inside the top ring groove 425, and the guide wheel 28 is rollingly connected to the circular track 426 to support the turntable 46.

[0044] The insulating protection structure 5 includes a rigid insulating shell 51 and a sealing cover 55. The rigid insulating shell 51 is fixedly connected to the top surface of the turntable 46. A placement cavity 52 is provided on the inner top surface of the rigid insulating shell 51. The crucible structure 6 is placed in the placement cavity 52. ​​A first recess 53 is provided on the top surface of the placement cavity 52. ​​A first internal threaded portion 54 is provided on the edge of the first recess 53. A first external threaded portion 56 is fixedly connected to the circumference of the sealing cover 55. The first external threaded portion 56 is threadedly connected to the first internal threaded portion 54. Two first recessed handles 57 are provided on the top surface of the sealing cover 55 to protect the internal crucible structure 6.

[0045] The crucible structure 6 includes a graphite crucible 61 and a pot cover 65. A third notch 63 is provided on the inner top surface of the graphite crucible 61. A second notch 62 is provided on the inner side of the graphite crucible 61 below the third notch 63. A crystallizer assembly 64 is sleeved in the second notch 62. A second internal threaded portion 66 is provided on the inner side of the third notch 63. A second external threaded portion 67 is fixedly connected to the outer side of the pot cover 65. The second external threaded portion 67 is threadedly connected to the second internal threaded portion 66. The crystallizer assembly 64 includes a crystallization ring 641. The crystallization ring 641 is sleeved in the third notch 63. A notch ring groove 64 is provided on the outer side of the crystallization ring 641. 3. The convex edge 642 is fixedly connected to the peripheral side of the top surface of the crystallization ring 641, and the convex edge 642 is sleeved on the bottom surface of the third recess 63. The lower inner cone 645 is provided on the inner bottom surface of the crystallization ring 641, and the upper inner cone 644 is provided on the inner side of the top surface of the crystallization ring 641. Two second concave handles 68 are provided on the top surface of the pot cover 65. Two conical openings are formed on the inner side of the crystallizer assembly 64 through the upper inner cone 644 and the lower inner cone 645, so that the crystallizer assembly 64 is closer to the inner wall of the graphite crucible 61 to the greatest extent, ensuring that the temperature of the crystallizer assembly 64 will not be too low, thereby improving the crystal growth effect and reducing the probability of polycrystalline connection.

[0046] The heating assembly 8 includes an electromagnetic induction heater 85 and a spiral induction coil 81 slidably disposed in the heating chamber 25. The electromagnetic induction heater 85 is fixedly connected to the inside of the machine body 11. The center of the top surface of the graphite insulation shell 21 is vertically fixedly embedded with a telescopic main rod 82. The bottom end of the telescopic main rod 82 is located in the heating chamber 25. The inner side of the bottom end of the telescopic main rod 82 is slidably sleeved with a telescopic slave rod 83. The bottom end of the telescopic slave rod 83 is fixedly connected to the center position of the n-type frame 84. The two ends of the bottom surface of the n-type frame 84 are fixedly connected to the top of the spiral induction coil 81. The side wall of the telescopic main rod 82 is fixedly connected to a side plate 86. A corrugated tube 87 is fixedly connected between the side plate 86 and the top surface of the n-type frame 84. The electromagnetic induction heater 85 is fixedly connected to and electrically connected to one end of a wire 88. The wire 88 It is fixedly embedded in the side plate 86 and the n-shaped frame 84, and the wire 88 is partially located on the inner side of the bellows 87. The wire 88 is electrically connected to the spiral induction coil 81. The top of the telescopic main rod 82 is fixedly connected to the second small servo reduction motor 89, and the top of the telescopic slave rod 83 is fixedly connected to the second threaded sleeve 811. The shaft end of the second small servo reduction motor 89 is fixedly connected to the reciprocating screw rod 810, and the reciprocating screw rod 810 is threadedly connected to the second threaded sleeve 811. The telescopic slave rod 83 is driven by the second small servo reduction motor 89 to move back and forth vertically, thereby realizing the reciprocating vertical movement of the spiral induction coil 81, changing the temperature field distribution in the spiral induction coil 81, and making the crucible structure 6 heat more evenly.

[0047] The cooling assembly 9 includes a cooling water tank 91 and a spiral circulating liquid pipe 92. The cooling water tank 91 is fixedly connected to the inside of the machine body 11, and the spiral circulating liquid pipe 92 is fixedly connected to the cooling chamber 26. The top surface of the cooling water tank 91 is fixedly connected to and connected to a circulating pump 93. The circulating pump 93 is fixedly connected to and connected to one end of two liquid supply and return pipes 94. The other ends of the two liquid supply and return pipes 94 are fixedly connected to and connected to the spiral circulating liquid pipe 92. The side wall of the cooling water tank 91 is fixedly connected to and connected to a water inlet 95. The end of the water inlet 95 passes through the side wall of the machine body 11 and is threadedly connected to a sealing plug 96 for annealing and crystal growth.

[0048] The lifting assembly 3 includes an outer square tube 31, the inner side of the top surface of the outer square tube 31 is slidably sleeved with the middle tube 32, the inner side of the top surface of the middle tube 32 is slidably sleeved with the inner square tube 33, the peripheral side of the top surface of the outer square tube 31 is fixedly embedded in the center position of the machine plate 12, the top surface of the inner square tube 33 is fixedly connected to the center position of the base 41, four gear grooves 34 are respectively provided at the center positions of the four sides of the middle tube 32, four outer racks 35 are respectively vertically fixedly connected to the four sides of the outer square tube 31, and four inner racks 35 are respectively vertically fixedly connected to the four sides of the inner square tube 33. 6. Multiple gears 37 are connected and rotate evenly in the gear groove 34. The two sides of the gear 37 are respectively meshed with the inner rack 36 and the outer rack 35. The center of the bottom surface of the outer square cylinder 31 is fixedly connected to the first small servo reduction motor 38. The shaft end of the first small servo reduction motor 38 is fixedly connected to the screw rod 39. The bottom surface of the middle square cylinder 32 is fixedly connected to the first threaded sleeve 310. The screw rod 39 is threadedly connected to the first threaded sleeve 310. The triple conveying structure makes the stroke longer and reduces the occupied height of the lifting component 3.

[0049] A plurality of legs 14 are vertically fixed to the outer side walls of the machine body 11 and the machine plate 12. A plurality of support assemblies 7 are arranged between the rotating structure 4 and the machine plate 12. The support assembly 7 comprises an outer sleeve 71 vertically fixed to the machine plate 12. The inner side of the top end of the outer sleeve 71 is slidably sleeved with a middle sleeve 72. The inner side of the top end of the middle sleeve 72 is slidably sleeved with an inner sleeve 73. The top end of the inner sleeve 73 is fixed to the bottom surface of the base 41. A plurality of vertical rods 422 are vertically fixed between the top surface of the base 41 and the transmission compartment 43. A ball groove 423 is provided on the bottom surface of the rotating port 45. A plurality of second balls 424 are rollingly connected in the ball groove 423. The second balls 424 contact the bottom surface of the turntable 46.

[0050] Embodiment 4:

[0051] See also Figure 1-10, which is the fourth embodiment of the present invention. This embodiment is based on the above three embodiments. When the present invention is used, the silicon carbide seed crystal is installed on the bottom surface of the pot cover 65 in the crucible structure 6, the high-purity silicon carbide powder as a raw material is placed on the inner bottom surface of the graphite crucible 61, the crystallizer assembly 64 is placed in the third recess 63, the pot cover 65 is installed by thread, the crucible structure 6 is placed in the insulating protection structure 5, and then the lifting assembly 3 is used to place it in the processing chamber 24, the crucible structure 6 is driven to rotate by driving the reduction motor 47, the speed is maintained as required, and the heating assembly 8 is used for heating. After the heating is completed as required, the crucible structure 6 is removed after annealing by the cooling assembly 9, and the crystallizer assembly is taken out. Part 64 can be taken out of the silicon carbide crystal; the present invention adopts the main shaft 48 in the rotating structure 4 to drive the crucible structure 6 to rotate. When the main shaft 48 rotates, the four driven gears 414 drive the four L-shaped frames 416 to rotate around the main shaft 48, so that the horizontal shaft 417 can rotate around the main shaft 48. At the same time, the horizontal shaft 417 can rotate on its own because of the meshing relationship between the bevel gear ring 412 and the bevel gear 418. In this way, the first balls 420 at the ends of the multiple stabilizing rods 419 will support the spherical shaft 49 on the main shaft 48, ensuring that the main shaft 48 rotates smoothly in a centered manner, ensuring the smooth rotation of the crucible structure 6, making it easier to control the temperature field distribution during heating, ensuring the temperature uniformity, and ensuring the production quality of the crystal.

[0052] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A rotary silicon carbide crystal growth furnace induction heating system, characterized in that: It comprises a heating and cooling subsystem and a crucible rotation system, wherein the heating and cooling subsystem comprises a heat preservation structure (2), a heating component (8) and a cooling component (9), and the crucible rotation system comprises a rotation structure (4), an insulating protection structure (5) and a crucible structure (6); The machine also comprises a frame structure (1), wherein the frame structure (1) comprises a machine body (11) and a machine plate (12), wherein the machine plate (12) is located directly below the machine body (11), wherein a bottom cavity (13) is provided on the bottom surface of the machine body (11), wherein a heat preservation structure (2) is fixedly connected in the bottom cavity (13), wherein a heating component (8) and a cooling component (9) are arranged in the heat preservation structure (2), wherein a lifting component (3) is vertically fixedly embedded in the center of the machine plate (12), and a rotating structure (4) is arranged at the top of the lifting component (3); The rotating structure (4) comprises a base (41), the top surface of the base (41) is fixedly connected to a motor bin (42), the top surface of the motor bin (42) is fixedly connected to a transmission bin (43), the top surface of the transmission bin (43) is fixedly connected to a top plate (44), a rotating opening (45) is provided at the center of the top surface of the top plate (44), the rotating opening (45) is rotatably connected to the bottom surface of a turntable (46), the top surface of the turntable (46) is fixedly connected to an insulating protection structure (5), and a crucible structure (6) is provided inside the insulating protection structure (5); The motor compartment (42) is fixedly connected to a driving reduction motor (47), the rotating shaft end of the driving reduction motor (47) is fixedly connected to a main shaft (48), the top end of the main shaft (48) passes through the transmission compartment (43) and the top plate (44) and is fixedly connected to the center position of the bottom surface of the turntable (46), the main shaft (48) is located in the transmission compartment (43) and is fixedly connected to a spherical shaft (49), the inner bottom surface of the transmission compartment (43) is fixedly connected to a supporting ring (421), the top surface of the supporting ring (421) is fixedly connected to an inner gear ring (410), the main shaft (48) is located inside the inner gear ring (410) and is fixedly sleeved with a driving gear (413), four driven gears (414) are evenly meshed between the driving gear (413) and the inner gear ring (410), and the driven gear (414) is movably connected to the top surface of the supporting ring (421); The main shaft (48) is located above the driving gear (413) and is rotatably sleeved with a rotating sleeve (415). Four L-shaped frames (416) are horizontally fixed to the circumference of the rotating sleeve (415). The top of the L-shaped frame (416) is horizontally rotatably connected to a transverse shaft (417). A plurality of transverse support plates (411) are horizontally fixed to the inner side of the transmission chamber (43). A bevel gear ring (412) is fixed between the plurality of transverse support plates (411). The transverse shaft (417) is one inch away from the main shaft (48). The end is fixedly connected to a bevel gear (418), and the bevel gear (418) is meshedly connected to a bevel gear ring (412). The transverse axis (417) is fixedly connected to a plurality of stabilizing rods (419) on the circumferential side of one end away from the bevel gear (418). The ends of the plurality of stabilizing rods (419) are respectively rollingly connected to a plurality of first balls (420), and the plurality of first balls (420) contact the surface of the spherical shaft (49). The middle part of the L-shaped frame (416) is rotatably connected to the rotating shaft end of the driven gear (414).

2. The induction heating system for a rotating silicon carbide crystal growth furnace according to claim 1, characterized in that: The thermal insulation structure (2) comprises a graphite thermal insulation shell (21), the graphite thermal insulation shell (21) is fixedly connected to the bottom cavity (13), an inner cavity (22) is provided on the inner bottom surface of the graphite thermal insulation shell (21), a graphite soft felt (23) is fixedly connected to the inner cavity (22), a processing cavity (24) is provided at the center of the bottom surface of the graphite soft felt (23), a heating cavity (25) is provided in the graphite thermal insulation shell (21) at a position outside the processing cavity (24), a cooling cavity (26) is provided in the graphite thermal insulation shell (21) at a position outside the heating cavity (25), the heating component (8) is arranged in the heating cavity (25), the cooling component (9) is arranged in the cooling cavity (26), and the insulating protection structure (5) is located in the processing cavity (24).

3. The induction heating system for a rotating silicon carbide crystal growth furnace according to claim 2, characterized in that: The top plate (44) is sleeved on the bottom surface of the inner cavity (22); a plurality of support rods (27) are vertically and evenly fixed to the top surface of the inner cavity (22); the bottom ends of the plurality of support rods (27) pass through the graphite soft felt (23) and are rotatably connected to a plurality of guide wheels (28); a top ring groove (425) is provided on the top surface of the turntable (46); the bottom surface of the top ring groove (425) is fixedly connected to a circular track (426); the bottom ends of the support rods (27) are located inside the top ring groove (425); and the guide wheels (28) are rollingly connected to the circular track (426).

4. The induction heating system for a rotating silicon carbide crystal growth furnace according to claim 1, characterized in that: The insulating protection structure (5) comprises a rigid insulating shell (51) and a sealing cover (55), wherein the rigid insulating shell (51) is fixedly connected to the top surface of the turntable (46), a placement cavity (52) is provided on the inner top surface of the rigid insulating shell (51), a crucible structure (6) is placed in the placement cavity (52), a first recess (53) is provided on the top surface of the placement cavity (52), a first internal threaded portion (54) is provided on the edge of the first recess (53), a first external threaded portion (56) is fixedly connected to the circumference of the sealing cover (55), the first external threaded portion (56) is threadedly connected to the first internal threaded portion (54), and two first internally recessed handles (57) are provided on the top surface of the sealing cover (55).

5. The induction heating system for a rotating silicon carbide crystal growth furnace according to claim 4, characterized in that: The crucible structure (6) comprises a graphite crucible (61) and a pot cover (65); a third recess (63) is provided on the inner top surface of the graphite crucible (61); a second recess (62) is provided on the inner side of the graphite crucible (61) below the third recess (63); a crystallizer assembly (64) is sleeved in the second recess (62); a second internal threaded portion (66) is provided on the inner side of the third recess (63); a second external threaded portion (67) is fixedly connected to the outer side of the pot cover (65); the second external threaded portion (67) is threadedly connected to the second internal threaded portion (66); the structure The crystallizer assembly (64) includes a crystallization ring (641), which is sleeved in the third recess (63). A notch ring groove (643) is provided on the outer side of the crystallization ring (641). A convex edge (642) is fixedly connected to the circumferential side of the top surface of the crystallization ring (641). The convex edge (642) is sleeved on the bottom surface of the third recess (63). A lower inner cone (645) is provided on the inner bottom surface of the crystallization ring (641). An upper inner cone (644) is provided on the inner side of the top surface of the crystallization ring (641). Two second concave handles (68) are provided on the top surface of the pot cover (65).

6. The induction heating system for a rotating silicon carbide crystal growth furnace according to claim 2, characterized in that: The heating assembly (8) comprises an electromagnetic induction heater (85) and a spiral induction coil (81) slidably arranged in a heating chamber (25); the electromagnetic induction heater (85) is fixedly connected to the inside of the machine body (11); the center of the top surface of the graphite insulation shell (21) is vertically fixedly embedded with a telescopic main rod (82); the bottom end of the telescopic main rod (82) is located in the heating chamber (25); the inner side of the bottom end of the telescopic main rod (82) is slidably sleeved with a telescopic secondary rod (83); the bottom end of the telescopic secondary rod (83) is fixedly connected to the center position of an n-shaped frame (84); the two ends of the bottom surface of the n-shaped frame (84) are fixedly connected to the top of the spiral induction coil (81); the side wall of the telescopic main rod (82) is fixedly connected to a side plate (86); the side plate (86) is connected to the side wall of the telescopic main rod (82); A bellows (87) is fixedly connected between the top surfaces of the n-shaped frame (84); the electromagnetic induction heater (85) is fixedly connected and electrically connected to one end of a wire (88); the wire (88) is fixedly embedded in the side plate (86) and the n-shaped frame (84); a portion of the wire (88) is located inside the bellows (87); the wire (88) is electrically connected to the spiral induction coil (81); a second small servo reduction motor (89) is fixedly connected to the top of the telescopic main rod (82); a second threaded sleeve (811) is fixedly connected to the inside of the top of the telescopic slave rod (83); a reciprocating screw (810) is fixedly connected to the rotating shaft end of the second small servo reduction motor (89); and the reciprocating screw (810) is threadedly connected to the second threaded sleeve (811).

7. The induction heating system for a rotating silicon carbide crystal growth furnace according to claim 1, characterized in that: The cooling assembly (9) comprises a cooling water tank (91) and a spiral circulating liquid pipe (92); the cooling water tank (91) is fixedly connected to the inside of the machine body (11); the spiral circulating liquid pipe (92) is fixedly connected to the cooling chamber (26); the top surface of the cooling water tank (91) is fixedly connected to and connected to a circulating pump (93); the circulating pump (93) is fixedly connected to and connected to one end of two liquid supply and return pipes (94); the other ends of the two liquid supply and return pipes (94) are fixedly connected to and connected to the spiral circulating liquid pipe (92); the side wall of the cooling water tank (91) is fixedly connected to and connected to a water inlet (95); the end of the water inlet (95) passes through the side wall of the machine body (11) and is threadedly connected to a sealing plug (96).

8. The induction heating system for a rotating silicon carbide crystal growth furnace according to claim 1, characterized in that: The lifting assembly (3) comprises an outer square tube (31), the inner side of the top surface of the outer square tube (31) is slidably sleeved on the inner square tube (32), the inner side of the top surface of the middle square tube (32) is slidably sleeved on the inner square tube (33), the circumferential side of the top surface of the outer square tube (31) is fixedly embedded in the center position of the machine plate (12), the top surface of the inner square tube (33) is fixedly connected to the center position of the base (41), four gear grooves (34) are respectively provided at the center positions of the four sides of the middle square tube (32), four external racks (35) are respectively vertically fixedly connected to the four sides of the outer square tube (31), and the inner square tube (33) is fixedly connected to the center position of the base (41). 3) Four inner racks (36) are respectively vertically fixed to the four outer sides; a plurality of gears (37) are evenly rotated and connected in the gear groove (34); the inner racks (36) and the outer racks (35) are respectively meshed and connected on both sides of the gears (37); a first small servo reduction motor (38) is fixed to the center of the bottom surface of the outer square tube (31); a screw rod (39) is fixed to the rotating shaft end of the first small servo reduction motor (38); a first threaded sleeve (310) is fixed to the bottom surface of the inner square tube (32); and the screw rod (39) is threadedly connected to the first threaded sleeve (310).

9. The induction heating system for a rotating silicon carbide crystal growth furnace according to claim 1, characterized in that: The outer walls of the machine body (11) and the machine plate (12) are vertically fixed with a plurality of legs (14); a plurality of support components (7) are arranged between the rotating structure (4) and the machine plate (12); the support components (7) include an outer sleeve (71) vertically fixed inside the machine plate (12); the inner side of the top end of the outer sleeve (71) is slidably sleeved with a middle sleeve (72); the inner side of the top end of the middle sleeve (72) is slidably sleeved with an inner sleeve (73); the top end of the inner sleeve (73) is fixedly connected to the bottom surface of the base (41); a plurality of vertical rods (422) are vertically fixedly connected between the top surface of the base (41) and the transmission bin (43); a ball groove (423) is provided on the bottom surface of the rotating port (45); a plurality of second balls (424) are rollingly connected in the ball groove (423); the second balls (424) contact the bottom surface of the rotating table (46).

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