Semiconductor work-in-process selection methods and systems, apparatuses, devices, and media

Abstract

The present disclosure relates to a work-in-process (WIP) selection method and device in a semiconductor production process, electronic equipment and a computer readable storage medium, and relates to the technical field of semiconductor production and manufacturing, and can be applied to the scene of WIP selection in a semiconductor production and manufacturing process. The method comprises: obtaining product production requirements, determining a target tail code range and a demand ratio of WIP required by a first process station according to the product production requirements; determining a selection scheme of WIP corresponding to each tail code in the target tail code range according to the target tail code range and the demand ratio; and selecting corresponding WIP at the first process station based on the selection scheme, and pushing the selected WIP to a corresponding lower production process. The present disclosure can avoid a large amount of time consumption caused by manual selection and distribution of online WIP, and can avoid wafer waste caused by possible omissions in manual selection to achieve the required ratio.

Description

Technical Field

[0001] This disclosure relates to the field of semiconductor manufacturing technology, and more specifically, to a method for selecting work-in-process during semiconductor manufacturing, a device for selecting work-in-process during semiconductor manufacturing, an electronic device, and a computer-readable storage medium. Background Technology

[0002] In semiconductor manufacturing, in a production system that uses an assembly line, a conveyor system transports work-in-process (WIP) along workbenches, where a different step of the WIP is completed at each workbench.

[0003] In existing online WIP (Work in Progress) selection solutions, production system staff, based on the information provided by the applicant, including the site number of the semiconductor production process, the required percentage of online WIP branches, and the corresponding product lot (lot) tail code, define the proportion of online WIP branches using a fixed lot tail code or the number of lots to the site. Using the information provided by the applicant, they set the corresponding script code logic in the Specification Manager (SM system) and generate a corresponding code identifier. This code identifier is then linked to the corresponding site via a transport stream, and the relevant configuration is sent to the Material Manager (MM system). At this point, production system engineers can visually see in the MM system the set lot tail code being routed to the corresponding downstream branch (subroute).

[0004] It should be noted that the information disclosed in the background section above is only used to enhance the understanding of the background of this disclosure, and therefore may include information that does not constitute prior art known to those skilled in the art. Summary of the Invention

[0005] The purpose of this disclosure is to provide a method for selecting work-in-process (WIP) in a semiconductor manufacturing process, an apparatus for selecting WIP in a semiconductor manufacturing process, an electronic device, and a computer-readable storage medium, thereby at least to some extent overcoming the problems of excessive time consumption and wafer waste caused by the possibility of omissions in manual selection and allocation when using manual WIP selection on the production line.

[0006] Other features and advantages of this disclosure will become apparent from the following detailed description, or may be learned in part by practice of the invention.

[0007] According to a first aspect of this disclosure, a method for selecting work-in-process (WIP) in a semiconductor manufacturing process is provided, comprising: obtaining product production requirements; determining a target tail code range and a demand ratio of WIP required for a first process station based on the product production requirements; determining a selection scheme for WIP corresponding to each tail code in the target tail code range based on the target tail code range and the demand ratio; and selecting corresponding WIP at the first process station based on the selection scheme, so as to push the selected WIP to the corresponding next-level production process.

[0008] In one exemplary embodiment of this disclosure, before obtaining the product production demand, the method further includes: obtaining process requirements in the semiconductor manufacturing process; determining the product identifier, process site information, process branch information, and the demand ratio of the work-in-process based on the process requirements; and generating the product production demand based on the product identifier, the process site information, the process branch information, and the demand ratio of the work-in-process.

[0009] In one exemplary embodiment of this disclosure, determining the target tail code range and demand ratio of work-in-process inventory required for the first process station based on the product production requirements includes: obtaining the product identifier of the current product from the product production requirements; determining whether the current product is a specified type of product based on the product identifier; if so, determining the target tail code range and demand ratio of the work-in-process inventory corresponding to the current product based on the product production requirements.

[0010] In one exemplary embodiment of this disclosure, determining the selection scheme for work-in-process corresponding to each tail code in the target tail code range based on the target tail code range and the demand ratio includes: determining the allocation ratio of work-in-process corresponding to each tail code based on the target tail code range and the demand ratio; taking product batches that have arrived at the first process station as candidate product batches; and determining the selection scheme for work-in-process corresponding to each tail code based on the candidate product batches and the allocation ratios.

[0011] In one exemplary embodiment of this disclosure, the method further includes: the sum of the allocation ratios of all work-in-process corresponding to all tail codes in the target tail code range is equal to the demand ratio.

[0012] In one exemplary embodiment of this disclosure, determining the selection scheme for the work-in-process corresponding to each tail code based on the candidate product batch and each of the allocation ratios includes: sequentially performing a batch selection step on the work-in-process corresponding to each tail code according to the candidate product batch and each of the allocation ratios to obtain a batch selection scheme for each tail code; and generating the selection scheme based on the obtained batch selection scheme.

[0013] In one exemplary embodiment of this disclosure, the batch selection step includes: obtaining the numerical distribution corresponding to the tail code; determining the corresponding number of selectable batches based on the distribution ratio of the tail code and the numerical distribution; and determining the product batch corresponding to the tail code from the candidate product batches based on the number of selectable batches, as the target product batch corresponding to the tail code.

[0014] In one exemplary embodiment of this disclosure, determining the corresponding number of selectable batches based on the allocation ratio of the tail code and the numerical distribution includes: obtaining the number of candidate batches of the candidate product batches; determining the minimum selection ratio corresponding to the tail code based on the number of candidate batches and the numerical distribution; and determining the number of selectable batches based on the minimum selection ratio and the allocation ratio.

[0015] In one exemplary embodiment of this disclosure, the number of batch selection schemes is multiple, and generating the selection scheme based on the obtained batch selection schemes includes: determining the batch selection execution logic corresponding to each batch selection scheme; and combining the multiple batch selection execution logics to generate the selection scheme.

[0016] In one exemplary embodiment of this disclosure, multiple batch selection execution logics are combined to generate the selection scheme, including: combining multiple batch selection execution logics to obtain an initial selection scheme; configuring a corresponding scheme execution identifier for the initial selection scheme; and associating and mapping the scheme execution identifier with the initial selection scheme to obtain the selection scheme.

[0017] In one exemplary embodiment of this disclosure, selecting the corresponding work-in-process at the first process station based on the selection scheme includes: obtaining the scheme execution identifier corresponding to the selection scheme; adding the scheme execution identifier to a target field in the first process station to trigger the generation of an executable selection scheme; and selecting the corresponding work-in-process at the first process station according to the executable selection scheme.

[0018] In one exemplary embodiment of this disclosure, the method further includes: obtaining a second process station; the second process station is a process station whose tail code of the required work-in-process has the same tail code as the first process station; determining the same tail code corresponding to the first process station and the second process station; determining the unselected work-in-process corresponding to the same tail code, and having the second process station select the corresponding work-in-process from the unselected work-in-process according to product production requirements.

[0019] According to a second aspect of this disclosure, a work-in-process (WIP) selection system for semiconductor manufacturing is provided, comprising: a production demand generation module for generating corresponding product production demands based on semiconductor manufacturing process requirements; a WIP tail code determination module for determining a target tail code range and demand ratio of WIP required in the production process based on the product production demands; a tail code selection module for determining an allocation ratio of WIP corresponding to each tail code based on the target tail code range and demand ratio, thereby generating an initial selection scheme corresponding to the WIP based on the allocation ratio; the sum of multiple allocation ratios equals the demand ratio; a scheme generation module for configuring a corresponding scheme execution identifier for the initial selection scheme, associating and mapping the selection scheme with the scheme execution identifier to generate a selection scheme; and a scheme execution module for writing the selection scheme to a target field at a first process station, triggering the generation of an executable selection scheme, selecting corresponding WIP at the first process station according to the executable selection scheme, and pushing the selected WIP to the corresponding lower-level production process.

[0020] According to a third aspect of this disclosure, a work-in-process (WIP) selection apparatus in a semiconductor manufacturing process is provided, comprising: a selection demand determination module, configured to acquire product production demand and determine a target tail code range and demand ratio of WIP required for a first process station based on the product production demand; a selection scheme determination module, configured to determine a selection scheme for WIP corresponding to each tail code in the target tail code range based on the target tail code range and the demand ratio; and a WIP selection module, configured to select corresponding WIP at the first process station based on the selection scheme, so as to push the selected WIP to the corresponding next-level production process.

[0021] In one exemplary embodiment of this disclosure, the work-in-process selection device in the semiconductor manufacturing process further includes a product demand determination module, used to obtain process requirements in the semiconductor manufacturing process; determine the product identifier, process station information, process branch information, and the demand ratio of the current product based on the process requirements; and generate the product production requirements based on the product identifier, the process station information, the process branch information, and the demand ratio of the work-in-process.

[0022] In one exemplary embodiment of this disclosure, the selection demand determination module includes a selection demand determination unit, used to obtain the product identifier of the current product from the product production demand; determine whether the current product is a specified type of product based on the product identifier; if so, determine the target tail code range and demand ratio of the work-in-process corresponding to the current product according to the product production demand.

[0023] In one exemplary embodiment of this disclosure, the selection scheme determination module includes a selection scheme determination unit, configured to determine the allocation ratio of work-in-process corresponding to each of the target tail codes based on the target tail code range and the demand ratio; to take the product batches that have arrived at the first process station as candidate product batches; and to determine the selection scheme of work-in-process corresponding to each of the tail codes based on the candidate product batches and the allocation ratios.

[0024] In one exemplary embodiment of this disclosure, the selection scheme determination unit includes a selection scheme generation unit, configured to sequentially perform batch selection steps on the work-in-process corresponding to each of the candidate product batches and each of the allocation ratios, so as to obtain a batch selection scheme corresponding to each of the tail codes; and generate the selection scheme based on the obtained batch selection scheme.

[0025] In one exemplary embodiment of this disclosure, the scheme generation unit includes a batch selection subunit, which is used to obtain the numerical distribution corresponding to the tail code, determine the corresponding number of selectable batches according to the allocation ratio of the tail code and the numerical distribution, and determine the product batch corresponding to the tail code from the candidate product batches according to the number of selectable batches, as the target product batch corresponding to the tail code.

[0026] In one exemplary embodiment of this disclosure, the batch selection subunit is configured to perform: obtaining the number of candidate batches of the candidate product batch; determining the minimum selection ratio corresponding to the tail code based on the number of candidate batches and the numerical distribution; and determining the number of selectable batches based on the minimum selection ratio and the allocation ratio.

[0027] In one exemplary embodiment of this disclosure, the selection scheme generation unit includes a first scheme generation subunit, which is used to determine the batch selection execution logic corresponding to each of the batch selection schemes; and to combine and process multiple batch selection execution logics to generate the selection scheme.

[0028] In one exemplary embodiment of this disclosure, the selection scheme generation unit further includes a second scheme generation subunit, which is used to combine and process multiple batch selection execution logics to obtain an initial selection scheme; configure a corresponding scheme execution identifier for the initial selection scheme; and associate and map the scheme execution identifier with the initial selection scheme to obtain the selection scheme.

[0029] In one exemplary embodiment of this disclosure, the work-in-process selection module includes a first work-in-process selection unit, configured to obtain a scheme execution identifier corresponding to the selection scheme; add the scheme execution identifier to a target field in the first process station to trigger the generation of an executable selection scheme; and select the corresponding work-in-process at the first process station according to the executable selection scheme.

[0030] In one exemplary embodiment of this disclosure, the work-in-process selection module further includes a second work-in-process selection unit, used to obtain a second process station; the second process station is a process station whose tail code of the required work-in-process has the same tail code as the first process station; the same tail code corresponding to the first process station and the second process station is determined; the unselected work-in-process corresponding to the same tail code is determined, and the second process station selects the corresponding work-in-process from the unselected work-in-process according to the product production requirements.

[0031] According to a fourth aspect of this disclosure, an electronic device is provided, comprising: a processor; and a memory storing computer-readable instructions that, when executed by the processor, implement a work-in-process selection method in a semiconductor manufacturing process according to any one of the preceding claims.

[0032] According to a fifth aspect of this disclosure, a computer-readable storage medium is provided having a computer program stored thereon, which, when executed by a processor, implements a work-in-process selection method in a semiconductor manufacturing process according to any one of the preceding claims.

[0033] The technical solution provided in this disclosure may include the following beneficial effects:

[0034] The work-in-process (WIP) selection method in the semiconductor manufacturing process of the exemplary embodiments of this disclosure, on the one hand, can automatically determine the WIP selection scheme based on product production requirements, realizing automated online selection of WIP and avoiding the problem of excessive time consumption caused by manual WIP selection, thus greatly improving WIP selection efficiency. On the other hand, by selecting WIP based on the target tail code range and the demand ratio, WIP that meets the demand ratio can be selected, avoiding omissions that may occur during manual selection, thereby improving resource utilization and product availability.

[0035] It should be understood that the above general description and the following detailed description are exemplary and explanatory only, and are not intended to limit this disclosure. Attached Figure Description

[0036] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this disclosure and, together with the description, serve to explain the principles of this disclosure. It is obvious that the drawings described below are merely some embodiments of this disclosure, and those skilled in the art can obtain other drawings based on these drawings without any inventive effort. In the drawings:

[0037] Figure 1 A flowchart illustrating a work-in-process selection method in a semiconductor manufacturing process according to an exemplary embodiment of the present disclosure is shown schematically.

[0038] Figure 2 A flowchart illustrating a process for generating a work-in-process selection scheme according to an exemplary embodiment of the present disclosure is shown.

[0039] Figure 3 The illustration schematically shows the flow of work-in-process with the same tail code range at different process stations according to an exemplary embodiment of the present disclosure.

[0040] Figure 4 The illustration shows the effect of reusing the same last code in work-in-progress within a conflicting site range according to an exemplary embodiment of the present disclosure.

[0041] Figure 5 A block diagram illustrating a work-in-process selection system in a semiconductor manufacturing process according to an exemplary embodiment of the present disclosure is shown.

[0042] Figure 6 A block diagram schematically illustrates a work-in-process selection apparatus in a semiconductor manufacturing process according to an exemplary embodiment of the present disclosure;

[0043] Figure 7 A block diagram of an electronic device according to an exemplary embodiment of the present disclosure is shown schematically;

[0044] Figure 8 The illustration shows a schematic diagram of a computer-readable storage medium according to an exemplary embodiment of the present disclosure. Detailed Implementation

[0045] Exemplary embodiments will now be described more fully with reference to the accompanying drawings. However, these exemplary embodiments can be implemented in many forms and should not be construed as limited to the embodiments set forth herein; rather, they are provided so that this disclosure will be thorough and complete, and will fully convey the concept of the exemplary embodiments to those skilled in the art. The same reference numerals in the drawings denote the same or similar parts, and therefore repeated descriptions of them will be omitted.

[0046] Furthermore, the described features, structures, or characteristics can be combined in any suitable manner in one or more embodiments. Numerous specific details are provided in the following description to give a thorough understanding of embodiments of this disclosure. However, those skilled in the art will recognize that the technical solutions of this disclosure can be practiced without one or more of the specific details described, or other methods, components, apparatuses, steps, etc., can be employed. In other instances, well-known structures, methods, apparatuses, implementations, materials, or operations are not shown or described in detail to avoid obscuring various aspects of this disclosure.

[0047] The block diagrams shown in the accompanying drawings are merely functional entities and do not necessarily correspond to physically independent entities. That is, these functional entities can be implemented in software, or in one or more software-hardened modules, or in different network and / or processor devices and / or microcontroller devices.

[0048] Existing online WIP selection methods typically rely on manual selection. Due to the limited number of Lot tail codes (0-9), when WIP branches out in a specified proportion with Temporary Engineering Change Notices (TECNs), the Lot tail codes are concentrated. Furthermore, according to the latest selection principles, some Lot tail codes are fixed for TECN experimental needs. If the old online WIP selection method is still used, it is easy for one party to use the experimental Lot tail code while the other party cannot, causing conflicts, affecting online production experiments, and consequently impacting subsequent process experiments.

[0049] Based on this, in this example embodiment, a method for selecting work-in-process in a semiconductor manufacturing process is first provided. The method for selecting work-in-process in a semiconductor manufacturing process disclosed herein can be implemented using a server, or it can be implemented using a terminal device. The terminal described in this disclosure may include mobile terminals such as mobile phones, tablets, laptops, handheld computers, and personal digital assistants (PDAs), as well as fixed terminals such as desktop computers. Figure 1 This illustration schematically depicts a process flow diagram of a work-in-process selection method in a semiconductor manufacturing process according to some embodiments of the present disclosure. Reference Figure 1 The method for selecting work-in-process during the semiconductor manufacturing process may include the following steps:

[0050] Step S110: Obtain product production requirements and determine the target tail code range and demand ratio of work-in-process at the first process station based on the product production requirements.

[0051] Step S120: Based on the target tail code range and the demand ratio, determine the selection scheme of work-in-process corresponding to each tail code in the target tail code range.

[0052] Step S130: Based on the selected scheme, select the corresponding work-in-process at the first process station, and push the selected work-in-process to the corresponding lower-level production process.

[0053] According to the work-in-process (WIP) selection method in the semiconductor manufacturing process of this example embodiment, on the one hand, the selection scheme of WIP can be automatically determined based on product production requirements, realizing an automated online selection scheme for WIP and avoiding the problem of excessive time consumption caused by manual WIP selection, thus greatly improving WIP selection efficiency. On the other hand, by selecting WIP based on the target tail code range and the demand ratio, WIP that meets the demand ratio can be selected, avoiding omissions that may occur during manual selection, thereby improving resource utilization and product availability.

[0054] The method for selecting work-in-process during the semiconductor manufacturing process in this example embodiment will be further explained below.

[0055] In step S110, the product production requirements are obtained, and the target tail code range and demand ratio of the work-in-process required by the first process station are determined based on the product production requirements.

[0056] In some exemplary embodiments of this disclosure, product manufacturing requirements may be a requirements document based on the semiconductor manufacturing process. The first process station may be the process station where the work-in-process (WIP) selection scheme is currently determined. The target tail code range may be the range corresponding to the tail code of the WIP during WIP selection. The demand ratio may be the proportion of WIP required during product manufacturing.

[0057] In semiconductor manufacturing, various product types are typically produced, requiring multiple production lines with different product manufacturing needs. Before semiconductor manufacturing begins, product manufacturing requirements are obtained, which usually include the tail code range and required proportion of work-in-process (WIP) at each process station. This embodiment uses the determination of the WIP selection scheme for the first process station as an example. After obtaining the product manufacturing requirements, the target tail code range and required proportion of WIP for the first process station can be determined from these requirements. The target tail code range is typically determined by the tail code distribution of WIP already arrived at the first process station, and the required proportion is usually determined based on the applicant's needs.

[0058] In one exemplary embodiment of this disclosure, process requirements in the semiconductor manufacturing process are obtained; the product identifier, process site information, process branch information, and work-in-process demand ratio of the current product are determined based on the process requirements; and product manufacturing requirements are generated based on the product identifier, process site information, process branch information, and work-in-process demand ratio.

[0059] Here, process requirements can be the requirement documents corresponding to all process stations in the semiconductor manufacturing process. For example, process requirements can be the online TECN requirements submitted by the applicant based on the process requirements. The product identifier of the current product can be a unique identifier used to identify a specific product. Process station information can be the basic information of the process stations involved in the semiconductor manufacturing process. Process branch information can be the basic information of the subordinate branch stations included in the process station.

[0060] refer to Figure 2 , Figure 2 A flowchart illustrating the generation of a work-in-process selection scheme according to an exemplary embodiment of this disclosure is shown. In step S210, a requirements document provided by the applicant is obtained. Before product manufacturing, the applicant can submit online TECN requirements based on the production characteristics of different process stations, i.e., a document containing all process instruction requirements information.

[0061] After obtaining the process requirements, the product identifier for the currently manufactured product can be determined from these requirements. Each product has a unique product identifier to distinguish it from other products to be manufactured. The process requirements also include relevant information about all process stations in the production line, i.e., route information. Process station information can include the required work-in-process (WIP) information for that process station. Additionally, the process requirements may include process branch information, which can include information about the subordinate branch stations included in the first process station. The work-in-process (WIP) demand ratio can be the proportion of WIP required for the first process station and its corresponding process branch stations. After determining the product identifier, process station information, process branch information, and WIP demand ratio from the process requirements, product production requirements can be generated based on this information, serving as the basis for subsequent WIP selection.

[0062] In one exemplary embodiment of this disclosure, the product identifier of the current product is obtained from the product production requirements; based on the product identifier, it is determined whether the current product is a specified type of product; if so, the target tail code range and demand ratio of the work-in-process corresponding to the current product are determined according to the product production requirements.

[0063] The specified product type can be a predefined product type. For example, in the semiconductor manufacturing process, a specified product type can be configured through a product mapping table.

[0064] Continue to refer to Figure 2In step S220, it is checked whether the product falls within the specified product type range. The generated product production requirements are obtained, and the product identifier of the current product is determined from these requirements. Based on the product identifier, the mapping table is queried to determine if the current product is a specified product type. If the product identifier is included in the mapping table, subsequent operations continue; otherwise, the entire process ends. Through the above processing, the product meets the pre-set rules when selecting online WIP for production testing, thereby achieving product information control.

[0065] Referring to Table 1, which shows the specified product type corresponding to product group 1 defined by the mapping table, Table 1 defines the target tail codes included in the target tail code range for product group 1, including 2, 3, 5, 9 and 1, 7; and the WIP requirement ratio for the four tail codes 2, 3, 5, and 9 is 30%, while the requirement ratio for the two tail codes 1 and 7 is 50%.

[0066] Table 1

[0067]

[0068] Referring to Table 2, which shows the product types corresponding to product group 2 defined by the mapping table, specifically, Table 2 defines the target tail codes included in the target tail code range for product group 2, including 2, 3, 1, 5, 7, 9, 0, and 6; and the WIP requirement ratio for the six tail codes 2, 3, 1, 5, 7, and 9 is 50%, while the requirement ratio for the two tail codes 0 and 6 is 70%.

[0069] Table 2

[0070]

[0071] In step S120, the selection scheme for the work-in-process corresponding to each tail code in the target tail code range is determined according to the target tail code range and the demand ratio.

[0072] In some exemplary embodiments of this disclosure, the selection scheme for work-in-process can be a selection scheme for the WIP of each tail code in the target tail code range determined according to the demand ratio, including the selection ratio of the WIP of each tail code, etc.

[0073] Continue to refer to Figure 2In step S230, the corresponding tail code (Lot) is selected according to the demand ratio. After determining the target tail code range and WIP demand ratio for work-in-process (WIP) selection at the first process station based on product production needs, the selection ratio of each tail code within the target tail code range can be determined based on the demand ratio. Specifically, the selection ratio can be determined according to the product production needs. For example, the selection ratio can be determined by an average allocation method. When the target tail code range contains 4 tail codes, since the demand ratio is the WIP demand ratio of all tail codes within the target tail code range at the first process station, the demand ratio can be evenly allocated to each tail code within the target tail code range to determine the selection ratio corresponding to each tail code. Then, a corresponding WIP selection scheme is generated based on the determined selection ratio. In other exemplary embodiments of this disclosure, the selection ratio can also be determined according to other allocation methods.

[0074] In one exemplary embodiment of this disclosure, the allocation ratio of work-in-process corresponding to each tail code is determined based on the target tail code range and the demand ratio; product batches that have arrived at the first process station are designated as candidate product batches; and the selection scheme of work-in-process corresponding to each tail code is determined based on the candidate product batches and the allocation ratio.

[0075] The allocation ratio can be the proportion of WIPs corresponding to each tail code within the target tail code range when allocating WIPs for the first process node. The candidate product batch can be a product batch that has already arrived at the first process node.

[0076] Continue to refer to Figure 2 In step S240, a selection ratio determination scheme for each tail code is determined. After determining the target tail code range and the required ratio, the number of tail codes included in the target tail code range can be counted, and the work-in-process allocation ratio of each tail code can be configured according to the required ratio and the number of tail codes. After determining the target tail code range (i.e., Lot tail codes) and the required ratio, the selection ratio of each tail code in the target tail code range can be manually calculated.

[0077] In step S250, the proportion of each tail code Lot is determined, and the proportions of each tail code are manually allocated so that their sum equals the demand proportion. That is, when configuring the selection proportion of each tail code, the following constraint must be met: the sum of the allocation proportions of the work-in-process (WIP) corresponding to all tail codes within the target tail code range equals the demand proportion, to meet the requirements of the production experiment. For example, the allocation proportion of WIP corresponding to each tail code within the target tail code range can be determined using an average allocation method. When the demand proportion is 20%, and the target tail code range includes 4 tail codes, the selection proportions of WIP corresponding to the 4 tail codes can be configured as 5%, 5%, 5%, and 5%, respectively. As another example, when the demand proportion of WIP for tail codes within the target tail code range is 10%, the selection proportions of WIP corresponding to the 4 tail codes can be configured as 2%, 2%, 3%, and 3%, respectively.

[0078] Referring to Table 3, which shows the allocation scheme for determining the allocation ratio of each tail code according to the work-in-process selection scheme of this disclosure. Specifically, if the demand ratio of the first process station is 10% and the target tail code range includes four tail codes: 2, 3, 5, and 9, then the selection ratio of WIP corresponding to the four tail codes "2, 3, 5, and 9" can be configured as 2%, 2%, 3%, and 3%, respectively.

[0079] Table 3

[0080]

[0081] Based on the demand ratio and the mapping table settings, the proportional distribution of each lot can be calculated, ensuring its sum equals the demand ratio. This approximates a random distribution of online WIP within a specified range (lot tail codes). The determined allocation ratio is then linked to the corresponding process station for dynamic online control, avoiding delays caused by improper human calculations leading to unsatisfactory ratios. After determining the allocation ratio for each tail code, product batches already arriving at the first process station can be identified and designated as candidate product batches. Based on the selection ratio for each tail code and the candidate product batches, a work-in-process selection scheme corresponding to the first process station can be determined.

[0082] In one exemplary embodiment of this disclosure, a batch selection step is sequentially performed on the work-in-process corresponding to each tail code according to the candidate product batch and each allocation ratio, so as to obtain a batch selection scheme corresponding to each tail code; a selection scheme is generated based on the obtained batch selection scheme.

[0083] The batch selection step is an operational procedure for selecting work-in-process (WIP) batches based on candidate product batches. The batch selection scheme is a method for selecting WIP batches from candidate product batches that need to be allocated to the first process station.

[0084] After identifying the candidate product batches that have arrived at the first process station, a batch selection step can be performed sequentially for each tail code based on the allocation ratio of the candidate product batches and each tail code within the target tail code range. This process selects the product batches allocated to the first process station from the candidate product batches, generating a corresponding batch selection plan. After determining the batch selection plan for each tail code, a work-in-process (WIP) selection plan for each tail code can be generated based on the batch selection plan, allocating the WIP of each tail code to the first process station.

[0085] In one exemplary embodiment of this disclosure, the batch selection step includes: obtaining the numerical distribution corresponding to the tail code; determining the corresponding number of selectable batches based on the distribution ratio of the tail code and the numerical distribution; and determining the product batch corresponding to the tail code from the candidate product batches based on the number of selectable batches, as the target product batch corresponding to the tail code.

[0086] The numerical distribution corresponding to the tail code can be the distribution of all tail codes involved in the semiconductor manufacturing process. For example, the numerical distribution can be a uniform distribution. The number of selectable batches can be the number of product batches that can be selected, and the number of selectable batches can be determined based on the minimum allocation ratio and the tail code allocation ratio. The target product batch can be the product batch corresponding to each tail code selected from the selectable product batches.

[0087] The calculation process for the batch selection step can be explained according to Table 4. As shown in Table 4, the WIP tail codes that have arrived at the first process station contain 10 tail codes, namely 0, 1, 2, 3, 4, 5, 6, 7, 8, and 9. Since the WIP tail codes follow an approximately uniform distribution, the probability of selecting a single tail code is 10%.

[0088] In one exemplary embodiment of this disclosure, the number of candidate batches for candidate product batches is obtained; the minimum selection ratio corresponding to the last code is determined based on the number of candidate batches and the numerical distribution; and the number of selectable batches is determined based on the minimum selection ratio and the allocation ratio.

[0089] The minimum selection ratio can be the minimum ratio corresponding to each tail code WIP when performing the selection operation.

[0090] According to the data in Table 4, the candidate product batches arriving at the first process station are 0 to 9, meaning there are 10 candidate batches. Furthermore, since the WIP tail code follows an approximately uniform distribution, sampling WIPs with the same tail code allows for the random allocation of the probability of a single tail code. For example, the probability of selecting one from 10 WIPs with the same tail code is 1%, meaning the minimum selection ratio is 1%. Because this disclosure can achieve a minimum ratio requirement of 1%, this ratio is more precise than the previous probability of selecting a single specified tail code (e.g., 10%), further improving the accuracy and efficiency of production experiments.

[0091] Table 4

[0092]

[0093] Based on the minimum selection ratio and allocation ratio, the number of selectable batches can be further determined. The probability of randomly assigning each tail code is then determined based on the number of selectable batches, ensuring the sum of the tail codes equals the required ratio. Referring to Table 4, the WIP requirement ratio for the first process station is 10%, and the target tail code range includes four tail codes: 2, 3, 5, and 9. After determining the number of tail codes included in the target tail code range, the selection ratio corresponding to each tail code can be configured according to the 10% requirement ratio. For example, the selection ratios for tail codes 2, 3, 5, and 9 are 2%, 2%, 3%, and 3%, respectively. After determining the selection ratio for each tail code, the number of selectable batches can be determined from the 0-9 candidate product batches arriving at the first process station based on the selection ratio. For example, the number of selectable batches for tail codes 2, 3, 5, and 9 are 2, 2, 3, and 3, respectively.

[0094] When selecting target product batches, the selection can be performed sequentially based on the number of available batches and the order of the last digit; alternatively, the selection can be performed randomly based on the number of available batches. For example, when selecting sequentially, for last digit 2, batches 1 and 2 can be selected as target product batches; for last digit 5, batches 1, 2, and 3 can be selected as target product batches. When selecting randomly, for last digit 2, combinations of batches such as "3 and 5," "1 and 4," or "3 and 9" can be selected as target product batches. Through the above processing, selecting WIPs within a specified range (Lot last digit) according to a specified ratio satisfies the requirement that WIPs within a certain ratio range (such as the target last digit range) can be used, while WIPs outside this range can be excluded, thus fulfilling the setting of designating a portion of Lots for production experiments.

[0095] In one exemplary embodiment of this disclosure, there are multiple batch selection schemes, and the batch selection execution logic corresponding to each batch selection scheme is determined; the multiple batch selection execution logics are combined and processed to generate a selection scheme.

[0096] The batch selection execution logic can be the execution logic used for each tail code to perform product batch selection operations.

[0097] Since the target tail code range can contain multiple different tail codes, and each tail code has a corresponding batch selection scheme, multiple batch selection schemes can be determined. (Continue to refer to...) Figure 2 In step S260, execution code is written according to the algorithm. After determining the batch selection scheme for each tail code, execution code can be written according to the corresponding program algorithm. For example, the batch selection execution logic corresponding to each batch selection scheme can be written using a script. Since the first process station includes batch selection execution logic corresponding to multiple tail codes, these multiple tail code batch selection execution logics can be combined to generate the WIP selection scheme corresponding to the first process station. The generated WIP selection scheme is usually an executable program that can be executed by a computer device.

[0098] In one exemplary embodiment of this disclosure, multiple batch selection execution logics are combined to obtain an initial selection scheme; a corresponding scheme execution identifier is configured for the initial selection scheme, and the scheme execution identifier is associated and mapped with the initial selection scheme to obtain the selection scheme.

[0099] The initial selection scheme can be obtained by combining multiple batch selection execution logics. The initial selection scheme does not contain a scheme execution identifier. The scheme execution identifier is a unique identifier used by the computer device to execute the selection scheme, distinguishing it from other scheme execution identifiers. The association mapping is the mapping relationship between the scheme execution identifier and the initial selection scheme. This operation associates the scheme execution identifier with the initial selection scheme and compiles the initial selection scheme into an executable program.

[0100] Since the target tail code range corresponding to the first process station can contain multiple tail codes, and each tail code has its own corresponding batch selection execution logic, in order for the first process station to uniformly execute the batch selection execution logic of all tail codes within the target tail code range, after determining the batch selection execution logic of each tail code, the batch selection execution logic of all tail codes can be combined to generate an initial selection scheme that the computer device can read and recognize according to the code order. After generating the initial selection scheme, in order for the first process station to execute the corresponding selection scheme, a scheme execution identifier (Script ID) corresponding to the initial selection scheme can be generated.

[0101] In step S130, the corresponding work-in-process is selected at the first process station based on the selection scheme, and the selected work-in-process is pushed to the corresponding lower-level production process.

[0102] In some exemplary embodiments of this disclosure, a sub-route may be a next-level production station contained under a first process station.

[0103] After generating the WIP selection scheme, the required work-in-process (WIP) can be selected based on the WIP selection scheme and through the first process station. For example, after the WIP with the corresponding last code in the mapping table corresponding to the product demand arrives at the first process station, the selected WIP can be pushed to the next-level production process Sub Route of the first process station according to a random allocation ratio.

[0104] The work-in-process (WIP) selection scheme disclosed herein automatically selects WIPs based on the executable selection schemes at each process station, replacing manual online WIP selection. If manual online selection were used, the number of lot batches to be selected would need to be specified (otherwise, the WIP allocation ratios could not be achieved). Engineers would need to check daily whether the WIPs arriving at the branch station are within the control range and manually calculate whether they are within the set batch number range. If so, manual WIP control operations (hold operations) would need to be performed at the branching station. After manually executing the branching, the unholding operation would be performed in the corresponding Sub-Route, requiring continuous manual monitoring. Assuming 20 minutes are spent each hour checking the online WIP distribution, this would require 160 minutes per day. The solution in this embodiment can be implemented using script code, eliminating the need for daily manual monitoring of online WIP distribution and effectively improving WIP selection efficiency. Furthermore, since WIP is automatically selected based on the selection ratio at the process station, the allocation ratio can be met without specifying the batch number, avoiding wafer waste caused by oversights during manual WIP selection and improving wafer utilization.

[0105] In one exemplary embodiment of this disclosure, the scheme execution identifier corresponding to the selected scheme is obtained; the scheme execution identifier is added to the target field in the first process station to trigger the generation of an executable selection scheme; and the corresponding work-in-process is selected at the first process station according to the executable selection scheme.

[0106] The target field can be the field used to perform the WIP selection operation. The executable selection scheme can be code that can be executed by computer equipment in the first process station.

[0107] Continue to refer to Figure 2 In step S270, the execution code identifier is associated with the corresponding site. Users can apply for the Script ID through the SM system and link it to the target field corresponding to the first process site. After the Modeling Team goes online in the SM system, the Script code function becomes effective, generating the corresponding executable selection scheme. At this time, users can view the corresponding Script code in the MM system. When the computer device reads the scheme execution identifier, it will call and execute the corresponding executable selection scheme to select the work-in-process required by the first process site through program execution.

[0108] Reference image, Figure 3 The illustration schematically shows the flow of work-in-process with the same tail code range at different process stations according to an exemplary embodiment of the present disclosure. Figure 3 It includes process station 310, process station 320 and process station 330. Process station 310 is the first process station. For process station 310, after determining the corresponding selection scheme according to the product production requirements, a certain proportion of WIP can be selected from the target tail code range that arrives at the process station. The selected WIP is then sent to the corresponding lower-level production process of process station 310, such as sending the selected WIP to the lower-level production process stations 311, 312 and 313 for subsequent production processes.

[0109] In one exemplary embodiment of this disclosure, a second process station is obtained; the second process station is a process station whose tail code of the required work-in-process has the same tail code as that of the first process station; the same tail code corresponding to the first process station and the second process station is determined; the unselected work-in-process corresponding to the same tail code is determined, and the second process station selects the corresponding work-in-process from the unselected work-in-process according to the product production requirements.

[0110] The second process station can be any other process station in the semiconductor production line that has the same required tail code (WIP) as the first process station. Unselected work-in-process (WIP) can be the same required tail code corresponding to both the second and first process stations, but which was not selected by the first process station upon arrival.

[0111] Continue to refer to Figure 3 In a semiconductor production line, there is also a second process station. This second process station is one where the required work-in-process (WIP) has the same tail code as the WIP in the first process station. For example… Figure 3 Process station 330 can be a second process station. Since the WIPs required by the second process station 330 and the first process station 310 have the same last digit, the WIPs whose last digits were not selected at the first process station can be identified as unselected work-in-process. For example, if both the first process station 310 and the second process station 330 require WIPs with the last digit "2", according to the work-in-process selection scheme of this disclosure, the first process station only selects a portion of the WIPs with the last digit "2", and the remaining WIPs with the last digit "2" can be used in other process stations. In this case, since the second process station 330 requires WIPs with the last digit "2", the WIPs not selected by the first process station 310 can be selected and used in the production process of the second process station.

[0112] The work-in-process selection scheme disclosed herein allows for the use of lots with the same last digit for production trials, even for different applicants on the same route and in conflicting site intervals. (Refer to...) Figure 4 , Figure 4 This illustration schematically depicts the effect of reusing work-in-process with the same last code at stations within a conflicting station range, according to an exemplary embodiment of this disclosure. If a semiconductor production line has... Figure 4 The conflicting site interval shown refers to the overlapping interval between the tail code WIPs obtained by applicant A and applicant B. Through the WIP selection scheme disclosed in this paper, the requirement of selecting a portion of Lots for process experiments can be met. WIPs with the same tail code can be reused, realizing the random distribution of online WIPs within a specified range, satisfying the needs of each applicant without conflict, so as to ensure the smooth progress of production experiments.

[0113] It should be noted that the terms “first,” “second,” “third,” “fourth,” etc., used in this disclosure are only for distinguishing different process sites and should not impose any limitations on this disclosure.

[0114] In summary, the process involves obtaining product production requirements, determining the target tail code range and required proportion of work-in-process (WIP) at the first process station, determining the selection scheme for WIP corresponding to each tail code within the target tail code range, and selecting the corresponding WIP at the first process station based on the selection scheme. The selected WIP is then pushed to the corresponding lower-level production process. On one hand, the product production requirements automatically determine the WIP selection scheme, enabling automated online selection of WIP and avoiding the significant time consumption caused by manual WIP selection, thus greatly improving WIP selection efficiency. On the other hand, selecting WIP based on the target tail code range and required proportion ensures that the required proportion is met, avoiding potential oversights during manual selection and improving resource utilization and product availability. Furthermore, since only a portion of the WIP for each tail code is selected during WIP selection, WIPs with the same tail code can be reused when there are conflicting station ranges.

[0115] It should be noted that although the steps of the method in this invention are described in a specific order in the accompanying drawings, this does not require or imply that the steps must be performed in that specific order, or that all the steps shown must be performed to achieve the desired result. Additional or alternative steps may be omitted, multiple steps may be combined into one step, and / or one step may be broken down into multiple steps.

[0116] Furthermore, in this example embodiment, a work-in-process selection system for semiconductor manufacturing is also provided, with reference to... Figure 5 The work-in-process selection system 500 in the semiconductor manufacturing process may include: a production demand generation module 510, a work-in-process tail code determination module 520, a tail code selection module 530, a scheme generation module 540, and a scheme execution module 550.

[0117] Specifically, the production demand generation module 510 is used to generate corresponding product production demands based on the semiconductor manufacturing process requirements; the work-in-process tail code determination module 520 is used to determine the target tail code range and demand ratio of the work-in-process required in the production process based on the product production demands; the tail code selection module 530 is used to determine the allocation ratio of the work-in-process corresponding to each tail code based on the target tail code range and demand ratio, so as to generate an initial selection scheme corresponding to the work-in-process based on the allocation ratio; the sum of multiple allocation ratios equals the demand ratio; the scheme generation module 540 is used to configure a corresponding scheme execution identifier for the initial selection scheme, and associate and map the selection scheme with the scheme execution identifier to generate a selection scheme; the scheme execution module 550 is used to write the selection scheme to the target field of the first process station, trigger the generation of an executable selection scheme, select the corresponding work-in-process at the first process station according to the executable selection scheme, and push the selected work-in-process to the corresponding lower-level production process.

[0118] Furthermore, in this exemplary embodiment, a work-in-process selection device is also provided in the semiconductor manufacturing process. (Reference) Figure 6 The work-in-process selection device 600 in the semiconductor manufacturing process may include: a selection demand determination module 610, a selection scheme determination module 620, and a work-in-process selection module 630.

[0119] Specifically, the requirement determination module 610 is used to obtain product production requirements and determine the target tail code range and demand ratio of the work-in-process at the first process station based on the product production requirements; the selection scheme determination module 620 is used to determine the selection scheme of the work-in-process corresponding to each tail code in the target tail code range based on the target tail code range and demand ratio; and the work-in-process selection module 630 is used to select the corresponding work-in-process at the first process station based on the selection scheme, so as to push the selected work-in-process to the corresponding lower-level production process.

[0120] In one exemplary embodiment of this disclosure, the work-in-process selection device in the semiconductor manufacturing process further includes a product demand determination module, which is used to obtain the process demand in the semiconductor manufacturing process; determine the product identifier, process site information, process branch information and work-in-process demand ratio of the current product based on the process demand; and generate product production demand based on the product identifier, process site information, process branch information and work-in-process demand ratio.

[0121] In one exemplary embodiment of this disclosure, the selection demand determination module includes a selection demand determination unit, used to obtain the product identifier of the current product from the product production demand; determine whether the current product is a specified type of product based on the product identifier; if so, determine the target tail code range and demand ratio of the work-in-process corresponding to the current product according to the product production demand.

[0122] In one exemplary embodiment of this disclosure, the selection scheme determination module includes a selection scheme determination unit, which is used to determine the allocation ratio of work-in-process corresponding to each tail code based on the target tail code range and the demand ratio; to take the product batch that has arrived at the first process station as the candidate product batch; and to determine the selection scheme of work-in-process corresponding to each tail code based on the candidate product batch and each allocation ratio.

[0123] In one exemplary embodiment of this disclosure, the selection scheme determination unit includes a selection scheme generation unit, which is used to sequentially perform batch selection steps on the work-in-process corresponding to each tail code according to the candidate product batch and each allocation ratio, so as to obtain the batch selection scheme corresponding to each tail code; and generate a selection scheme based on the obtained batch selection scheme.

[0124] In one exemplary embodiment of this disclosure, the scheme generation unit includes a batch selection subunit, which is used to obtain the numerical distribution corresponding to the tail code, determine the corresponding number of selectable batches according to the allocation ratio of the tail code and the numerical distribution, and determine the product batch corresponding to the tail code from the candidate product batches according to the number of selectable batches, as the target product batch corresponding to the tail code.

[0125] In one exemplary embodiment of this disclosure, the batch selection subunit is configured to perform: obtaining the number of candidate batches of candidate product batches; determining the minimum selection ratio corresponding to the tail code based on the number of candidate batches and the numerical distribution; and determining the number of selectable batches based on the minimum selection ratio and the allocation ratio.

[0126] In one exemplary embodiment of this disclosure, the selection scheme generation unit includes a first scheme generation subunit, which is used to determine the batch selection execution logic corresponding to each batch selection scheme; and to combine multiple batch selection execution logics to generate a selection scheme.

[0127] In one exemplary embodiment of this disclosure, the selection scheme generation unit further includes a second scheme generation subunit, which is used to combine multiple batch selection execution logics to obtain an initial selection scheme; configure a corresponding scheme execution identifier for the initial selection scheme; and associate and map the scheme execution identifier with the initial selection scheme to obtain the selection scheme.

[0128] In one exemplary embodiment of this disclosure, the work-in-process selection module includes a first work-in-process selection unit, which is used to obtain the scheme execution identifier corresponding to the selection scheme; add the scheme execution identifier to the target field in the first process station to trigger the generation of an executable selection scheme; and select the corresponding work-in-process at the first process station according to the executable selection scheme.

[0129] In one exemplary embodiment of this disclosure, the work-in-process selection module further includes a second work-in-process selection unit, used to obtain a second process station; the second process station is a process station whose tail code of the required work-in-process has the same tail code as the first process station; the same tail code corresponding to the first process station and the second process station is determined; the unselected work-in-process corresponding to the same tail code is determined, and the second process station selects the corresponding work-in-process from the unselected work-in-process according to the product production requirements.

[0130] The specific details of the virtual modules of the work-in-process selection devices in each of the above semiconductor manufacturing processes have been described in detail in the corresponding work-in-process selection methods for semiconductor manufacturing processes, so they will not be repeated here.

[0131] It should be noted that although several modules or units of the work-in-process selection apparatus in the semiconductor manufacturing process have been mentioned in the detailed description above, this division is not mandatory. In fact, according to embodiments of this disclosure, the features and functions of two or more modules or units described above can be embodied in one module or unit. Conversely, the features and functions of one module or unit described above can be further divided and embodied by multiple modules or units.

[0132] Furthermore, in an exemplary embodiment of this disclosure, an electronic device capable of implementing the above-described method is also provided.

[0133] Those skilled in the art will understand that various aspects of the present invention can be implemented as systems, methods, or program products. Therefore, various aspects of the present invention can be specifically implemented as entirely hardware embodiments, entirely software embodiments (including firmware, microcode, etc.), or embodiments combining hardware and software aspects, collectively referred to herein as “circuit,” “module,” or “system.”

[0134] The following is for reference. Figure 7 To describe an electronic device 700 according to such an embodiment of the present disclosure. Figure 7 The electronic device 700 shown is merely an example and should not impose any limitation on the functionality and scope of use of the embodiments disclosed herein.

[0135] like Figure 7 As shown, the electronic device 700 is manifested in the form of a general-purpose computing device. The components of the electronic device 700 may include, but are not limited to: at least one processing unit 710, at least one storage unit 720, a bus 730 connecting different system components (including storage unit 720 and processing unit 710), and a display unit 740.

[0136] The storage unit stores program code that can be executed by the processing unit 710, causing the processing unit 710 to perform the steps described in the "Exemplary Methods" section above, according to various exemplary embodiments of this disclosure.

[0137] Storage unit 720 may include a readable medium in the form of a volatile storage unit, such as random access memory (RAM) 721 and / or cache memory 722, and may further include a read-only memory (ROM) 723.

[0138] Storage unit 720 may include a program / utility 724 having a set (at least one) program module 725, such program module 725 including but not limited to: operating system, one or more application programs, other program modules and program data, each or some combination of these examples may include an implementation of a network environment.

[0139] Bus 730 can represent one or more of several types of bus structures, including memory cell bus or memory cell controller, peripheral bus, graphics acceleration port, processing unit, or local bus using any of the multiple bus structures.

[0140] Electronic device 700 can also communicate with one or more external devices 770 (e.g., keyboard, pointing device, Bluetooth device, etc.), and with one or more devices that enable a user to interact with electronic device 700, and / or with any device that enables electronic device 700 to communicate with one or more other computing devices (e.g., router, modem, etc.). This communication can be performed via input / output (I / O) interface 750. Furthermore, electronic device 700 can also communicate with one or more networks (e.g., local area network (LAN), wide area network (WAN), and / or public networks, such as the Internet) via network adapter 760. As shown, network adapter 760 communicates with other modules of electronic device 700 via bus 730. It should be understood that, although not shown in the figures, other hardware and / or software modules can be used in conjunction with electronic device 700, including but not limited to: microcode, device drivers, redundant processing units, external disk drive arrays, RAID systems, tape drives, and data backup storage systems.

[0141] From the above description of the embodiments, those skilled in the art will readily understand that the exemplary embodiments described herein can be implemented by software or by combining software with necessary hardware. Therefore, the technical solutions according to the embodiments of this disclosure can be embodied in the form of a software product, which can be stored in a non-volatile storage medium (such as a CD-ROM, USB flash drive, external hard drive, etc.) or on a network, including several instructions to cause a computing device (such as a personal computer, server, terminal device, or network device, etc.) to execute the methods according to the embodiments of this disclosure.

[0142] In exemplary embodiments of this disclosure, a computer-readable storage medium is also provided, on which a program product capable of implementing the methods described above is stored. In some possible embodiments, various aspects of the invention may also be implemented as a program product comprising program code that, when the program product is run on a terminal device, causes the terminal device to perform the steps of the various exemplary embodiments of the invention described in the "Exemplary Methods" section above.

[0143] refer to Figure 8 As shown, a program product 800 for implementing the above-described method according to an embodiment of the present invention is described. It may employ a portable compact disc read-only memory (CD-ROM) and include program code, and may run on a terminal device, such as a personal computer. However, the program product of the present invention is not limited thereto. In this document, the readable storage medium may be any tangible medium containing or storing a program that may be used by or in conjunction with an instruction execution system, apparatus, or device.

[0144] The program product may employ any combination of one or more readable media. A readable medium may be a readable signal medium or a readable storage medium. A readable storage medium may be, for example, but not limited to, an electrical, magnetic, optical, electromagnetic, infrared, or semiconductor system, apparatus, or device, or any combination thereof. More specific examples of readable storage media (a non-exhaustive list) include: an electrical connection having one or more wires, a portable disk, a hard disk, random access memory (RAM), read-only memory (ROM), erasable programmable read-only memory (EPROM or flash memory), optical fiber, portable compact disk read-only memory (CD-ROM), optical storage devices, magnetic storage devices, or any suitable combination thereof.

[0145] Computer-readable signal media may include data signals propagated in baseband or as part of a carrier wave, carrying readable program code. Such propagated data signals may take various forms, including but not limited to electromagnetic signals, optical signals, or any suitable combination thereof. A readable signal medium may also be any readable medium other than a readable storage medium, capable of sending, propagating, or transmitting programs for use by or in conjunction with an instruction execution system, apparatus, or device.

[0146] The program code contained on the readable medium may be transmitted using any suitable medium, including but not limited to wireless, wired, optical fiber, RF, etc., or any suitable combination thereof.

[0147] Program code for performing the operations of this invention can be written in any combination of one or more programming languages, including object-oriented programming languages ​​such as Java and C++, and conventional procedural programming languages ​​such as C or similar languages. The program code can execute entirely on the user's computing device, partially on the user's device, as a standalone software package, partially on the user's computing device and partially on a remote computing device, or entirely on a remote computing device or server. In cases involving remote computing devices, the remote computing device can be connected to the user's computing device via any type of network, including a local area network (LAN) or a wide area network (WAN), or it can be connected to an external computing device (e.g., via the Internet using an Internet service provider).

[0148] Furthermore, the above figures are merely illustrative of the processes included in the method according to exemplary embodiments of the present invention, and are not intended to be limiting. It is readily understood that the processes shown in the above figures do not indicate or limit the temporal order of these processes. Additionally, it is readily understood that these processes may be executed synchronously or asynchronously, for example, in multiple modules.

[0149] Other embodiments of this disclosure will readily occur to those skilled in the art upon consideration of the specification and practice of the invention disclosed herein. This application is intended to cover any variations, uses, or adaptations of this disclosure that follow the general principles of this disclosure and include common knowledge or customary techniques in the art not disclosed herein. The specification and embodiments are to be considered exemplary only, and the true scope and spirit of this disclosure are indicated by the claims.

[0150] It should be understood that this disclosure is not limited to the precise structures described above and shown in the accompanying drawings, and various modifications and changes can be made without departing from its scope. The scope of this disclosure is limited only by the appended claims.

Claims

1. A work-in-process selection method in a semiconductor production process, characterized by, The method comprises the following steps: obtaining product production requirements, and determining a target tail code range and a demand ratio of a work-in-process required by a first process station according to the product production requirements; determining a distribution ratio of the work-in-process corresponding to each tail code according to the target tail code range and the demand ratio; taking a product batch that has arrived at the first process station as a candidate product batch; determining a selection scheme of the work-in-process corresponding to each tail code according to the candidate product batch and the distribution ratio; selecting the corresponding work-in-process at the first process station based on the selection scheme, so as to push the selected work-in-process to a corresponding lower-level production process.

2. The method of claim 1, wherein, Before the step of obtaining the product production requirements, the method further comprises the following steps: obtaining process requirements in a semiconductor production process; determining product identification, process station information, process branch information and a demand ratio of the work-in-process of a current product according to the process requirements; generating the product production requirements according to the product identification, the process station information, the process branch information and the demand ratio of the work-in-process.

3. The method of claim 1, wherein, The step of determining the target tail code range and the demand ratio of the work-in-process required by the first process station according to the product production requirements comprises the following steps: obtaining product identification of a current product from the product production requirements; determining whether the current product is a specified type product based on the product identification; if yes, determining the target tail code range and the demand ratio of the work-in-process corresponding to the current product according to the product production requirements.

4. The method of claim 1, wherein, The method further comprises the following step: the sum of the distribution ratios of the work-in-process corresponding to all tail codes in the target tail code range is equal to the demand ratio.

5. The method of claim 1, wherein, The step of determining the selection scheme of the work-in-process corresponding to each tail code according to the candidate product batch and the distribution ratio comprises the following steps: performing a batch selection step on the work-in-process corresponding to each tail code in sequence according to the candidate product batch and the distribution ratio, so as to obtain a batch selection scheme corresponding to each tail code; generating the selection scheme based on the obtained batch selection scheme.

6. The method of claim 5, wherein, The batch selection step comprises the following steps: obtaining a numerical distribution corresponding to the tail code, and determining a selectable batch quantity corresponding to the tail code according to the distribution ratio of the tail code and the numerical distribution; determining a product batch corresponding to the tail code from the candidate product batch as a target product batch corresponding to the tail code according to the selectable batch quantity.

7. The method of claim 6, wherein, The step of determining the selectable batch quantity corresponding to the tail code according to the distribution ratio of the tail code and the numerical distribution comprises the following steps: obtaining a candidate batch quantity of the candidate product batch; determining a minimum selection ratio corresponding to the tail code according to the candidate batch quantity and the numerical distribution; determining the selectable batch quantity according to the minimum selection ratio and the distribution ratio.

8. The method of claim 5, wherein, The number of the batch selection schemes is multiple, and the step of generating the selection scheme based on the obtained batch selection scheme comprises the following steps: determining batch selection execution logics corresponding to the batch selection schemes respectively; combining the batch selection execution logics to generate the selection scheme.

9. The method of claim 8, wherein, The step of combining the batch selection execution logics to generate the selection scheme comprises the following steps: Combining processing of the plurality of batch selection execution logics to obtain an initial selection scheme; Configuring a corresponding scheme execution identifier for the initial selection scheme, and associating and mapping the scheme execution identifier with the initial selection scheme to obtain the selection scheme.

10. The method of claim 1, wherein, Selecting a corresponding work-in-process at the first process station based on the selection scheme, including: Obtaining a scheme execution identifier corresponding to the selection scheme; Adding the scheme execution identifier to a target field in the first process station to trigger generation of an executable selection scheme; Selecting a corresponding work-in-process at the first process station according to the executable selection scheme.

11. The method of claim 10, wherein, The method further includes: Obtaining a second process station; the second process station is a process station having the same tail code as the first process station for a required work-in-process; Determining the same tail code corresponding to the first process station and the second process station; Determining unselected work-in-processes corresponding to the same tail code, and selecting corresponding work-in-processes from the unselected work-in-processes according to product production requirements by the second process station.

12. A work-in-process selection system in a semiconductor manufacturing process, characterized in that, Including: A production requirement generation module configured to generate a corresponding product production requirement according to a production process requirement of a semiconductor; A work-in-process tail code determination module configured to determine a target tail code range and a requirement proportion of a required work-in-process during production according to the product production requirement; A tail code selection module configured to determine an allocation proportion of a work-in-process corresponding to each tail code according to the target tail code range and the requirement proportion, and to generate an initial selection scheme of the work-in-process corresponding to the allocation proportion; The sum of the plurality of allocation proportions is equal to the requirement proportion; A scheme generation module configured to configure a corresponding scheme execution identifier for the initial selection scheme, and to associate and map the selection scheme with the scheme execution identifier to generate a selection scheme; A scheme execution module configured to write the selection scheme to a target field of a first process station to trigger generation of an executable selection scheme, to select a corresponding work-in-process at the first process station according to the executable selection scheme, and to push the selected work-in-process to a corresponding lower-level production process.

13. A work-in-process selection device in a semiconductor manufacturing process, characterized in that, Including: A selection requirement determination module configured to obtain a product production requirement, and to determine a target tail code range and a requirement proportion of a required work-in-process of a first process station according to the product production requirement; A selection scheme determination module configured to determine an allocation proportion of a work-in-process corresponding to each tail code according to the target tail code range and the requirement proportion, to take a product batch that has arrived at the first process station as a candidate product batch, and to determine a selection scheme of each corresponding work-in-process according to the candidate product batch and each allocation proportion; A work-in-process selection module configured to select a corresponding work-in-process at the first process station based on the selection scheme, and to push the selected work-in-process to a corresponding lower-level production process.

14. An electronic device, comprising: Including: A processor; And A memory having computer readable instructions stored thereon, the computer readable instructions being executed by the processor to implement the work-in-process selection method in a semiconductor production process according to any one of claims 1 to 11.

15. A computer-readable storage medium having stored thereon a computer program which, when executed by a processor, implements the work-in-process selection method in a semiconductor production process according to any one of claims 1 to 11.

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