An elevator type electron accelerator irradiation processing device

Abstract

The application discloses a lifting type electron accelerator irradiation processing device, which comprises an electron accelerator, a beam under conveying device, a support frame, a first driving assembly, a support frame, a second driving assembly and a titanium window; the support frame is movably connected with the beam under conveying device through the first driving assembly, and the first driving assembly is used for moving the support frame to be close to or away from the scanning box below the electron accelerator; the support frame is movably connected with the support frame through the second driving assembly, and the second driving assembly is used for moving the support frame to be close to or away from the scanning box of the electron accelerator, so that the size of the electron beam spot is adjusted to be suitable for the size of the irradiated object; the titanium window is connected with the top of the support frame, the titanium window is provided with a titanium film, and the electron beam emitted by the electron accelerator passes through the titanium film in the titanium window to irradiate the irradiated object. The application can irradiate and process irradiated objects of different sizes, the irradiated objects are uniformly irradiated, and the irradiation processing efficiency is high.

Description

Technical Field

[0001] This invention relates to the field of electron beam irradiation processing technology, and in particular to a lifting electron accelerator irradiation processing device. Background Technology

[0002] High-energy linear electron accelerators can generate and output electron beams with energies of 10 MeV. The high-energy electron beam generated by the accelerator is swept to a specific width and passes through the irradiated material on a titanium film irradiation delivery device within the accelerator's scanning chamber, completing material modification, sterilization, and other processes. It is widely used in radiation processing in the food, agricultural products, condiments, pharmaceuticals, polymer materials, jewelry, and semiconductor industries. For jewelry and semiconductor materials, irradiation processing is performed through electron injection, which differs from conventional product irradiation methods. Jewelry and semiconductor materials absorb very high levels of radiation, requiring an electron injection quantity of 10 MeV. 17 e / cm 2 Static irradiation is required. The high-energy electron beam spot diameter and scanning width are important parameters for static irradiation processing. Among them, the electron beam spot is one of the inherent parameters of the electron accelerator. Typically, the electron beam spot diameter at a position 100cm from the output box of the electron accelerator is 8-10cm.

[0003] In existing electron accelerators, the scanning box is located above the irradiated object and is in a fixed position. For larger objects, such as semiconductor materials with a diameter of 15 cm, proper irradiation cannot be achieved. When objects of different sizes pass below the scanning box, if the distance between the top of the object and the scanning box is too close or too far, a large amount of electron beam will be ineffective, or the electron beam will only irradiate a localized area of ​​the object, resulting in uneven irradiation and low irradiation quality. When the object is too high, it may also come into contact with the scanning box, damaging the titanium film inside the scanning box. Damaged titanium film is difficult to replace, greatly reducing the efficiency of irradiation processing. Summary of the Invention

[0004] The present invention aims to overcome the shortcomings of the prior art by providing a lifting electron accelerator irradiation processing device, which solves the problems of uneven irradiation of the irradiated object, low processing quality, easy damage to the titanium film in the scanning box, and low irradiation processing efficiency when the existing irradiation equipment is used for irradiation processing.

[0005] The technical solution adopted by this invention to solve its technical problem is:

[0006] A lifting electron accelerator irradiation processing apparatus includes an electron accelerator, a beam delivery device, a support frame, a first driving assembly, a support frame, a second driving assembly, and a titanium window. The support frame includes a base, a bottom plate, and upright plates. Two bases are connected to the left and right sides of the beam delivery device, and the first driving assembly is connected to the bases. The two bottom plates are driven to the two bases via the first driving assembly, and the bottoms of the two upright plates are connected to the left and right sides of the two bottom plates, respectively. The first driving assembly drives the bottom plates and upright plates to move closer to or away from the scanning box of the electron accelerator in the front-back direction. The second driving assembly is connected to the support frame, and the support frame is connected between the two upright plates via the second driving assembly. The second driving assembly drives the support frame to move closer to or away from the scanning box of the electron accelerator in the vertical direction. The titanium window is connected to the top of the support frame and has an irradiation port covered with a titanium film. The electron beam emitted by the electron accelerator passes through the titanium film to irradiate the object.

[0007] Furthermore, the first driving assembly includes a first guide rail, a first slider, a first lead screw, a first lead screw nut, and a first driving motor; the first guide rail and the first lead screw are both connected to the base, the first slider and the first lead screw nut are both connected to the base plate, the first slider is slidably engaged with the first guide rail, and the first lead screw nut is helically engaged with the first lead screw; the output end of the first driving motor is drivenly connected to the first lead screw, and the first driving motor is used to drive the first lead screw to rotate and drive the first lead screw nut to move in the front-back direction.

[0008] Furthermore, the support frame includes a support platform, with support plates correspondingly arranged on the left and right sides of the support platform. The support platform has a window suitable for the irradiation port, and a recessed platform is arranged around the window. The titanium window is connected to the recessed platform. The second drive assembly includes a first rack, a second guide rail, a second slider, a first gear, a first rotating shaft, and a second drive motor. The first rack and the second guide rail, which are arranged vertically, are connected to both of the two upright plates. The second slider is connected to the support plate and slides with the second guide rail. The two ends of the first rotating shaft pass through the corresponding support plates and are connected to the first gear. The first gear meshes with the first rack. The second drive motor is connected to the support platform, and the output end of the second drive motor is driven by the first rotating shaft.

[0009] Furthermore, the titanium window includes an upper pressure plate and a lower pressure plate; the irradiation port is provided on the upper and lower pressure plates respectively, and the upper and lower pressure plates clamp the titanium film; a sliding groove is provided in the sinking platform along the front-to-back direction, and the lower pressure plate is provided with a slider, which cooperates with the sliding groove.

[0010] Furthermore, an electromagnet is provided inside the slide groove, and the electromagnet is electromagnetically attracted to the slider.

[0011] Furthermore, a cooling assembly is provided on the support frame, which includes a cooling fan, an air supply pipe, and an air outlet. The air outlet is located along one edge of the irradiation port and is connected to the air supply pipe. The air supply pipe passes through the support platform and is connected to the air outlet of the cooling fan. The cooling fan is connected to the support plate.

[0012] Furthermore, the cooling assembly includes an air guide, which is connected to the support platform near the irradiation port, with the air guide's front facing the air outlet.

[0013] Furthermore, it also includes a mobile temperature measurement component, which includes an infrared temperature sensor and a third driving component; the third driving component is connected to the outside of the vertical plate, and the third driving component drives the infrared temperature sensor to move vertically closer to or away from the irradiation port, and the infrared temperature sensor is used to measure the temperature of the titanium film inside the irradiation port.

[0014] The present invention has the following beneficial effects:

[0015] 1. The irradiation processing apparatus of the present invention includes an electron accelerator, a beam delivery device, a support frame, and a support box. The support frame is movably connected to the beam delivery device via a first driving component, and the support box is movably connected to the support frame via a second driving component. A titanium window is provided on the support box, and a titanium film is disposed inside the titanium window. The electron beam emitted by the electron accelerator passes through the titanium film inside the titanium window for irradiation. The second driving component drives the support box to move up or down below the scanning box of the electron accelerator, protecting the scanning box and adjusting the size of the electron beam spot to suit the size of the irradiated object, effectively preventing the irradiated object from being damaged by excessive irradiation, ensuring uniform irradiation of the irradiated object by the electron beam, and achieving high irradiation processing quality. The first driving component is used to drive the support box to move from below the scanning box of the electron accelerator to one side, facilitating quick replacement of damaged titanium films and achieving high irradiation processing efficiency.

[0016] 2. To facilitate the installation of titanium windows and improve the efficiency of replacing titanium films, a sliding groove is installed on the support platform, and a slider is installed on the titanium window. The slider and the sliding groove work together to quickly detach and install the titanium window from the support platform by dragging and pushing, ensuring the efficiency of irradiation processing.

[0017] 3. To improve the stability of the titanium window on the support platform, an electromagnet is installed in the slide groove. The electromagnet is controlled to electromagnetically engage with the slider to prevent the titanium window from shifting when the support frame moves, thus avoiding affecting the normal irradiation operation.

[0018] 4. A cooling assembly is installed on the support frame. The cooling assembly includes a cooling fan, an air supply pipe, and an air outlet. The cooling fan delivers gas to the air outlet through the air supply pipe. The air outlet sprays out cooling airflow and blows it onto the titanium film in the titanium window to prevent the titanium film from being deformed or damaged by heat, ensuring normal irradiation and reducing the maintenance cost of irradiation processing.

[0019] 5. An air guide is installed on the support platform, with the air guide facing the air outlet. This changes the direction of the cooling airflow, directing it towards the scanning box of the electron accelerator. This airflow then cools the outer surface of the titanium film inside the scanning box, improving the utilization rate of the cooling airflow and reducing the temperature of the titanium film inside the scanning box, thus extending the service life of the titanium film.

[0020] 6. A movable temperature measurement component is provided on the support frame. The temperature measurement component includes an infrared temperature sensor and a third drive component. The temperature measurement interval time can be set as needed. The third drive component is controlled to drive the infrared temperature sensor close to the titanium film of the titanium window for temperature measurement. When the temperature of the titanium film of the titanium window exceeds the standard, the power of the electron accelerator is reduced to avoid overheating and damage to the titanium film; or the infrared temperature sensor is driven away from the electron beam position to reduce the influence of the electron beam on the infrared temperature sensor. Attached Figure Description

[0021] The invention will be further described below with reference to the accompanying drawings:

[0022] Figure 1 This is the front view of the present invention;

[0023] Figure 2 This is a three-dimensional structural diagram of the present invention;

[0024] Figure 3 for Figure 2 Enlarged view of a portion of point A in the middle;

[0025] Figure 4 This is a front view of the support frame and support structure of the present invention;

[0026] Figure 5 This is a top view of the support frame and support structure of the present invention;

[0027] Figure 6 This is a three-dimensional structural diagram of the support frame and support structure of the present invention;

[0028] Figure 7 for Figure 5 Enlarged view of a section at point B in the middle;

[0029] Figure 8 This is a schematic diagram of the titanium window structure of the present invention;

[0030] Figure 9 This is a schematic diagram of the structure of the support frame, support frame, and titanium window after installation according to the present invention.

[0031] In the diagram, 1. Electron accelerator; 2. Beam conveyor; 3. Support frame; 31. Base; 32. Base plate; 33. Vertical plate; 4. First drive assembly; 41. First guide rail; 42. First slider; 43. First lead screw; 44. First lead screw nut; 45. First drive motor; 5. Support frame; 51. Support platform; 511. Window; 512. Sinking platform; 513. Slide groove; 514. Electromagnet; 52. Support plate; 53. Cooling fan; 54. Air duct; 55. Air outlet; 56. Air guide; 57. Infrared temperature sensor; 58. Third drive assembly; 6. Second drive assembly; 61. First rack; 62. Second guide rail; 63. Second slider; 64. First gear; 65. First rotating shaft; 66. Second drive motor; 7. Titanium window; 71. Irradiation port; 72. Upper pressure plate; 73. Lower pressure plate; 74. Slider. Detailed Implementation

[0032] To enable those skilled in the art to better understand the technical solutions of this invention, the technical solutions of this invention will be clearly and completely described below with reference to the accompanying drawings.

[0033] like Figure 1-9 As shown, this invention provides a lifting-type electron accelerator irradiation processing apparatus, including an electron accelerator 1 and a beam undercarriage transport device 2; a movable support frame 3 is provided on the beam undercarriage transport device 2. Specifically, as shown... Figure 1-3 As shown, the support frame 3 includes a base 31, a bottom plate 32, and an upright plate 33. To improve the stability of the support frame 3, in this embodiment, two sets of base 31, bottom plate 32, and upright plate 33 are provided. The two bases 31 are connected to the left and right sides of the under-beam transport device 2. Preferably, one end of the base 31 is located below the scanning box of the electron accelerator 1, the base 31 is arranged along the transport direction of the under-beam transport device 2, and the other end of the base 31 is located on the side of the irradiated object after irradiation.

[0034] The first drive assembly 4 is connected to the base 31. The two base plates 32 are driven to the two base plates 31 through the first drive assembly 4. The bottoms of the two upright plates 33 are respectively connected to the left and right sides of the two base plates 32. The first drive assembly 4 is used to drive the base plates 32 and the upright plates 33 to move in the front-back direction. It can be understood that the two upright plates 33 are driven to move from one side of the scanning box of the electron accelerator 1 to below the scanning box.

[0035] like Figure 2-3As shown, the first drive assembly 4 includes a first guide rail 41, a first slider 42, a first lead screw 43, a first lead screw nut 44, and a first drive motor 45. The first guide rail 41 and the first lead screw 43 are both connected to the base 31, and the first slider 42 and the first lead screw nut 44 are both connected to the base plate 32. Preferably, the first slider 42 and the first lead screw nut 44 are both connected to the side of the base plate 32 facing the base 31. The first slider 42 is slidably engaged with the first guide rail 41, and the first lead screw nut 44 is helically engaged with the first lead screw 43. The first guide rail 41 and the first lead screw 43 are both arranged along the front-back direction.

[0036] In this embodiment, multiple sets of first guide rails 41 and first sliders 42 are provided; only one set of first lead screw 43, first lead screw nut 44, and first drive motor 45 is provided. The first lead screw 43 is provided on the left base 31 of the two bases 31, and the first drive motor 45 is installed at one end of the base 31 corresponding to the first lead screw 43. That is, the first guide rail 41 and the first lead screw 43 are provided on the left base 31, and the first slider 42 and the first lead screw nut 44 are installed on the base plate 32 corresponding to the left base 31; the first guide rail 41 is provided on the right base 31, and the first slider 42 is installed on the base plate 32 corresponding to the right base 31.

[0037] The first drive motor 45 is electrically connected to the controller. The output end of the first drive motor 45 is connected to the first lead screw 43 through a coupling. The controller controls the first drive motor 45 to drive the first lead screw 43 to rotate, thereby moving the first lead screw nut 44 in the front-back direction. The first slider 42 and the first guide rail 41 provide support and guide limit for the base plate 32. The movement of the first lead screw nut 44 causes the base plate 32 to move smoothly in the front-back direction on the first guide rail 41.

[0038] like Figure 2 , 4 As shown, a movable support frame 5 is provided on the support frame 3; specifically, a second drive assembly 6 is provided on the support frame 5. The support frame 5 is connected between two upright plates 33 through the second drive assembly 6. The second drive assembly 6 is used to drive the support frame 5 to move in the up and down direction. It can be understood that when the first drive assembly 4 drives the two upright plates 33 to stop below the scanning box of the electron accelerator 1, the second drive assembly 6 drives the support frame 5 to move up or down below the scanning box of the electron accelerator 1.

[0039] Preferably, the second drive assembly 6 is installed on the support frame 5 on the side opposite to the conveying direction of the beam delivery device 2. When the first drive assembly 4 drives the two upright plates 33 to stop the support frame 5 below the scanning box of the electron accelerator 1, the second drive assembly 6 is always located on the side of the scanning box of the electron accelerator 1 to avoid the second drive assembly 6 being affected by electron beam irradiation.

[0040] like Figure 9As shown, the top of the support frame 5 is connected to a titanium window 7. The titanium window 7 has an irradiation port 71, and the irradiation port 71 is covered with a titanium film. The shape of the titanium window 7 can be adjusted according to the actual situation of the scanning box. In this embodiment, the titanium window 7 is rectangular, the irradiation port 71 is long and rectangular, and the titanium film completely covers the irradiation port 71. In order to control the energy loss when the electron beam passes through the titanium film, in this embodiment, the thickness of the titanium film in the irradiation port 71 is 0.3 mm.

[0041] When the irradiation device of the present invention is used, the first driving component 4 drives the upright plate 33 to move the support frame 5 along the base 31. When the support frame 5 moves to the bottom of the scanning box of the electron accelerator 1, the electron beam emitted by the electron accelerator 1 passes through the titanium film in the irradiation port 71 and irradiates the object to be irradiated on the beam delivery device 2.

[0042] When irradiating certain special products, such as jewelry and semiconductor materials, the electron injection rate must reach 10⁻⁶ because these materials absorb radiation at extremely high intensities. 17 e / cm 2 Static irradiation is required. The electron accelerator 1 is located above the down-beam delivery device 2. The distance from the scanning box of the electron accelerator 1 to the down-beam delivery device 2 is fixed; therefore, the diameter of the electron beam spot emitted by the electron accelerator 1 on the down-beam delivery device 2 remains constant. When the irradiated object is large, such as a semiconductor material with a diameter of 15 cm, exceeding the diameter of the electron beam spot, the electron beam emitted by the electron accelerator 1 cannot irradiate the entire semiconductor material, resulting in uneven irradiation and a reduction in the irradiation quality of the irradiated object.

[0043] Understandably, in the irradiation processing apparatus of the present invention, the electron beam emitted by the electron accelerator 1 passes through the titanium film inside the titanium window 7, and the titanium film inside the titanium window 7 scatters the electron beam, expanding the diameter of the electron beam spot. When the second driving component 6 drives the support frame 5 to move up and down below the scanning box of the electron accelerator 1, the titanium window 7 moves up and down with the support frame 5, the distance between the titanium film inside the titanium window 7 and the scanning box of the electron accelerator 1 changes, and the beam spot diameter also changes after passing through the titanium film inside the titanium window 7. According to the size parameters of the irradiated object preset in the controller, the position of the support frame 5 is adjusted, thereby making the electron beam spot emitted by the electron accelerator 1 suitable for the size of the irradiated object, ensuring that the electron beam irradiates the irradiated object uniformly.

[0044] When the irradiated object is at a high temperature, the distance from the scanning box exit of the electron accelerator 1 to the irradiated object is relatively short, causing the electron beam spot emitted by the electron accelerator 1 to be concentrated in a local area of ​​the irradiated object. At this time, the second driving component 6 drives the support frame 5 to move up and down below the scanning box of the electron accelerator 1 to adjust the size of the electron beam spot, which can effectively prevent the irradiated object from being damaged by excessive irradiation and ensure uniform irradiation.

[0045] like Figure 4-6 As shown, the support frame 5 includes a support platform 51, with support plates 52 correspondingly arranged on the left and right sides of the support platform 51. In this embodiment, the second drive assembly 6 includes a first rack 61, a second guide rail 62, a second slider 63, a first gear 64, a first rotating shaft 65, and a second drive motor 66. The first rack 61 and the second guide rail 62, which are arranged vertically, are connected to both upright plates 33. The second slider 63 is connected to the support plate 52 and slides in cooperation with the second guide rail 62. The two ends of the first rotating shaft 65 pass through the corresponding support plates 52 and are connected to the first gear 64. The first gear 64 meshes with the first rack 61. The second drive motor 66 is electrically connected to the controller and the support platform 51. The output end of the second drive motor 66 is driven by the first rotating shaft 65. The second drive motor 66 drives the first gear 64 to rotate through the first rotating shaft 65, thereby driving the entire support frame 5 to move vertically along the second guide rail 62. Preferably, the second drive motor 66 is mounted on the lower side of the support platform 51, which has a compact structure. At the same time, the support platform 51 protects the second drive motor 66 from the influence of the high-energy electron beam.

[0046] like Figure 5 , 7 As shown in Figure -8, a window 511 suitable for the irradiation port 71 is provided on the support platform 51, and a recessed platform 512 is provided around the window 511. The titanium window 7 is connected to the recessed platform 512. Specifically, the titanium window 7 includes an upper pressure plate 72 and a lower pressure plate 73. The irradiation port 71 is provided on the upper pressure plate 72 and the lower pressure plate 73 respectively. The four edges of the titanium film extend between the upper pressure plate 72 and the lower pressure plate 73, and the upper pressure plate 72 and the lower pressure plate 73 clamp the titanium film. The upper pressure plate 72 and the lower pressure plate 73 are detachably connected. In this embodiment, they are connected by bolts passing through the four edges of the upper pressure plate 72 and the lower pressure plate 73. At the same time, the titanium film in the irradiation port 71 is clamped and tensioned by bolts locking the four edges of the upper pressure plate 72 and the lower pressure plate 73.

[0047] To facilitate the positioning and installation of the titanium window 7 with the support platform 51, a sliding groove 513 along the front-to-back direction is provided in the recessed platform 512. The lower pressure plate 73 is equipped with a slider 74, which cooperates with the sliding groove 513. The slider 74 and the sliding groove 513 together limit the lower pressure plate 73, that is, limit the left and right position of the titanium window 7 in the recessed platform 512.

[0048] In this embodiment, the sliding grooves 513 are symmetrically arranged on the bottom of the left and right sides of the recessed platform 512, and one end of the sliding groove 513 passes through the support platform 51. Several sliders 74 are arranged on the lower pressure plate 73 corresponding to the sliding grooves 513. The lower pressure plate 73 enters the recessed platform 512 from one side of the support platform 51, and the lower surface of the lower pressure plate 73 presses against the recessed platform 512. The sliders 74 cooperate with the sliding grooves 513 to push the lower pressure plate 73. The sliders 74 slide back and forth along the sliding grooves 513 until the side of the lower pressure plate 73 is pushed against the side wall of the recessed platform 512, thus completing the installation of the titanium window 7 and the support platform 51.

[0049] The scanning box of electron accelerator 1 is equipped with a titanium film. If the titanium film is damaged, the machine needs to be stopped for replacement and maintenance, which is time-consuming and labor-intensive. With the irradiation processing device of the present invention, during irradiation processing, the scanning box of electron accelerator 1 is located above the titanium window 7. The titanium film inside the titanium window 7 can play a certain protective role for the scanning box of electron accelerator 1, preventing external objects such as irradiated objects from touching the titanium film inside the scanning box and causing damage.

[0050] Understandably, in the irradiation processing apparatus of the present invention, when the titanium window 7 is installed or the titanium film inside the titanium window 7 is damaged and needs to be replaced, the first driving component 4 drives the upright plate 33 to move the support frame 5 along the base 31, so that the support frame 5 moves to the scanning box side of the electron accelerator 1, and the titanium window 7 is away from the high-energy electron beam. The worker wearing radiation protection clothing grabs the titanium window 7 and quickly takes it out or puts it in from the support platform 51, or disassembles the upper pressure plate 72 and the lower pressure plate 73 of the titanium window 7 to replace the damaged titanium film. The replacement process does not affect the normal irradiation operation of the electron accelerator 1.

[0051] like Figure 7 As shown, in order to improve the stability of the titanium window 7 on the support platform 51, an electromagnet 514 is provided in the slide groove 513. The electromagnet 514 is electrically connected to the controller, and the control electromagnet 514 is electromagnetically attracted to the slider 74, so that the titanium window 7 presses against the support platform 51, so as to prevent the titanium window 7 from shifting when the support frame 5 moves, which would prevent the electron beam from passing through the titanium film in the irradiation port 71 completely, thus affecting the normal irradiation task.

[0052] In this embodiment, several electromagnets 514 are provided. It can be understood that when the side of the lower pressure plate 73 is pushed against the side wall of the recessed platform 512, that is, after the titanium window 7 and the recessed platform 512 are connected, the position of the electromagnet 514 in the slide groove 513 corresponds one-to-one with the position of the slider 74 on the lower pressure plate 73, ensuring that the electromagnet 514 and the slider 74 are reliably attracted.

[0053] like Figure 4-5As shown, under high power of electron accelerator 1, the electron beam emitted by electron accelerator 1 passes through the titanium film in titanium window 7. To prevent the titanium film from being damaged due to excessive temperature, it is cooled by air cooling. A cooling assembly is set on the support frame 5. The cooling assembly includes a cooling fan 53, an air supply pipe 54, and an air outlet 55. The air outlet 55 is set along one edge of the irradiation port 71. The air outlet 55 is connected to the air supply pipe 54. The air supply pipe 54 passes through the support platform 51 and is connected to the air outlet of the cooling fan 53. The cooling fan 53 is connected to the support plate 52.

[0054] Specifically, the cooling fan 53 is installed on the underside of the support platform 51. The cooling fan 53 is electrically connected to the controller, which controls the operation of the cooling fan 53 to deliver gas through the air duct 54 to the air outlet 55. The air outlet 55 sprays out cooling airflow towards the titanium film in the titanium window 7. The heat on the surface of the titanium film is carried away by the airflow, cooling the titanium film in the working state, avoiding heat deformation and damage to the titanium film, and reducing the maintenance cost of irradiation processing.

[0055] like Figure 4 , 9 As shown, the titanium film inside the scanning box of the electron accelerator 1 is generally cooled from the inside to prevent overheating and deformation. To improve the utilization rate of the cooling airflow, the cooling assembly is also equipped with a guide 56. The guide 56 is connected to the support platform 51 near the irradiation port 71, and the windward side of the guide 56 faces the air outlet 55. Specifically, the guide 56 is arranged along the edge of the irradiation port 71. The windward side of the guide 56 includes an arc-shaped section and a straight section. The arc-shaped section faces the air outlet 55, and the arc-shaped section and the straight section are smoothly transitioned. The straight section is inclined towards the air outlet 55. The cooling airflow ejected from the air outlet 55 blows towards the titanium film in the titanium window 7. After being blocked by the titanium film in the titanium window 7, it flows to the arc-shaped section of the guide 56. The arc-shaped section changes the direction of the cooling airflow, causing the airflow to flow along the straight section to the top of the titanium film in the titanium window 7.

[0056] The purpose of this design is that when the first drive assembly 4 and the second drive assembly 6 drive the titanium window 7 to move below the scanning box of the electron accelerator 1, the cooling airflow flows out along the straight section and flows to the scanning box of the electron accelerator 1 located above, thereby providing air cooling to the outer surface of the titanium film inside the scanning box. The cooling airflow has a high utilization rate, further reducing the temperature of the titanium film inside the scanning box of the electron accelerator 1 and improving the service life of the titanium film inside the scanning box of the electron accelerator 1.

[0057] like Figure 6As shown, to monitor the temperature change of the titanium film in the titanium window 7, the irradiation processing apparatus of the present invention is equipped with a movable temperature measuring component, which includes an infrared temperature sensor 57 and a third drive component 58. The third drive component 58 is connected to the outside of the vertical plate 33, and drives the infrared temperature sensor 57 to move vertically closer to or away from the irradiation port 71 of the titanium window 7. Specifically, the third drive component 58 includes a third drive motor, a second lead screw, and a second lead screw nut. The second lead screw is vertically connected to the outside of the vertical plate 33, and the second lead screw nut is helically connected to the second lead screw. The third drive motor is driven by the second lead screw, and drives the second lead screw nut to move vertically through the second lead screw. The infrared temperature sensor 57 is mounted on the second lead screw nut, and the measuring end of the infrared temperature sensor 57 faces the irradiation port 71.

[0058] The third drive motor, infrared temperature sensor 57, and controller are electrically connected. When the third drive motor drives the second nut to move and stop the infrared temperature sensor 57 on one side of the irradiation port 71, the infrared temperature sensor 57 measures the temperature of the titanium film inside the irradiation port 71 and transmits the measured value to the controller. After the temperature measuring component completes the temperature measurement, the third drive motor drives the second nut to move the infrared temperature sensor 57 away from the irradiation port 71, that is, away from the electron beam, and stops it outside the upright plate 33, waiting for the next temperature measurement. It is understood that the temperature measuring component can be set with a temperature measurement interval as needed, so that the infrared temperature sensor 57 periodically detects the temperature of the titanium film in the titanium window 7, avoiding the influence of the electron beam on the infrared temperature sensor 57.

[0059] To further improve the safety of irradiation processing, when the actual temperature value received by the controller from the infrared temperature sensor 57 exceeds the specified value, the power of the electron accelerator 1 is reduced to decrease the energy of the electron beam and prevent the temperature of the titanium film in the titanium window 7 from becoming too high. In this embodiment, the specified temperature of the titanium film in the titanium window 7 is 800℃~900℃ to avoid damage caused by excessive temperature of the titanium film in the titanium window 7.

[0060] In the description of this invention, the terms "upper," "lower," "front," "rear," "left," "right," "top," "bottom," "vertical," and "horizontal," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only to describe the invention and not to require the invention to be constructed or operated in a specific orientation; therefore, they should not be construed as limitations on the invention. The terms "connected" and "linked" in this invention should be interpreted broadly. For example, they can refer to a connection or a detachable connection; they can refer to a direct connection or an indirect connection through intermediate components. Those skilled in the art can understand the specific meaning of the above terms based on the specific circumstances.

[0061] The above description represents preferred embodiments of the present invention. The specific embodiments are provided solely for a better understanding of the invention's concept. Those skilled in the art can make various improvements or equivalent substitutions based on the principles of the present invention, and these improvements or equivalent substitutions are also considered to fall within the scope of protection of the present invention.

Claims

1. An electron accelerator irradiation processing device of the lifting type comprising an electron accelerator (1), a beam- under conveyor (2), characterized in that, It also includes a support frame (3), a first drive assembly (4), a support frame (5), a second drive assembly (6), and a titanium window (7); the support frame (3) includes a base (31), a bottom plate (32), and a vertical plate (33). The two bases (31) are connected to the left and right sides of the beam delivery device (2), and the first drive assembly (4) is connected to the base (31); the two bottom plates (32) are connected to the two bases (31) through the first drive assembly (4), and the bottoms of the two vertical plates (33) are connected to the left and right sides of the two bottom plates (32) respectively; the first drive assembly (4) is used to drive the bottom plate (32) and the vertical plate (33) to move closer to or further away from the scanning box of the electron accelerator (1) in the front-back direction; The second driving component (6) is connected to the support frame (5), which is connected between the two upright plates (33) via the second driving component (6). The second driving component (6) is used to drive the support frame (5) to move closer to or further away from the scanning box of the electron accelerator (1) in the vertical direction. The titanium window (7) is connected to the top of the support frame (5). The titanium window (7) is provided with an irradiation port (71), which is covered with a titanium film. The electron beam emitted by the electron accelerator (1) passes through the titanium film to irradiate the object being irradiated.

2. The apparatus of claim 1, wherein the electron accelerator is a vertical electron accelerator. The first driving component (4) includes a first guide rail (41), a first slider (42), a first lead screw (43), a first lead screw nut (44), and a first driving motor (45); the first guide rail (41) and the first lead screw (43) are both connected to the base (31), the first slider (42) and the first lead screw nut (44) are both connected to the base plate (32), the first slider (42) is slidably engaged with the first guide rail (41), and the first lead screw nut (44) is helically engaged with the first lead screw (43); The output end of the first drive motor (45) is driven to the first lead screw (43). The first drive motor (45) is used to drive the first lead screw (43) to rotate and drive the first lead screw nut (44) to move in the front-back direction.

3. The lifting-type electron accelerator irradiation processing apparatus as described in claim 1, characterized in that, The support frame (5) includes a support platform (51), and support plates (52) are provided on the left and right sides of the support platform (51). The support platform (51) is provided with a window (511) suitable for the irradiation port (71). A sinking platform (512) is provided around the window (511). The titanium window (7) is connected to the sinking platform (512). The second drive assembly (6) includes a first rack (61), a second guide rail (62), a second slider (63), a first gear (64), a first rotating shaft (65), and a second drive motor (66). The first rack (61) and the second guide rail (62) are connected to the two vertically arranged plates (33). The second slider (63) is connected to the support plate (52) and slides with the second guide rail (62). The two ends of the first rotating shaft (65) pass through the corresponding support plate (52) and are connected to the first gear (64). The first gear (64) meshes with the first rack (61). The second drive motor (66) is connected to the support platform (51), and the output end of the second drive motor (66) is driven by the first rotating shaft (65).

4. The processing apparatus according to claim 3, wherein the processing apparatus is characterized by comprising: a plurality of the electron accelerators; and a plurality of the irradiation chambers, each of which is provided with one of the electron accelerators. The titanium window (7) includes an upper pressure plate (72) and a lower pressure plate (73); the upper pressure plate (72) and the lower pressure plate (73) are respectively provided with the irradiation port (71) on the upper and lower sides, and the upper pressure plate (72) and the lower pressure plate (73) hold the titanium film; the sink (512) is provided with a sliding groove (513) along the front and back direction, and the lower pressure plate (73) is provided with a slider (74), and the slider (74) cooperates with the sliding groove (513).

5. The processing apparatus according to claim 4, wherein the processing apparatus is characterized by comprising: a plurality of the electron accelerators; and a plurality of the irradiation chambers, each of which is provided with one of the electron accelerators. 5 An electromagnet (514) is provided in the slide groove (513), and the electromagnet (514) is electromagnetically attracted to the slider (74).

6. The lifting-type electron accelerator irradiation processing apparatus as described in claim 3, characterized in that, A cooling assembly is provided on the support frame (5). The cooling assembly includes a cooling fan (53), an air duct (54), and an air outlet (55). The air outlet (55) is provided along one side edge of the irradiation port (71). The air outlet (55) is connected to the air duct (54). The air duct (54) passes through the support platform (51) and is connected to the air outlet of the cooling fan (53). The cooling fan (53) is connected to the support plate (52).

7. A lifting-type electron accelerator irradiation processing apparatus as described in claim 6, characterized in that, The cooling assembly includes an air guide (56) which is connected to the support platform (51) near the irradiation port (71) and the air guide (56) faces the air outlet (55).

8. The lifting-type electron accelerator irradiation processing apparatus as described in claim 1, characterized in that, It also includes a mobile temperature measuring component, which includes an infrared temperature sensor (57) and a third drive component (58); the third drive component (58) is connected to the outside of the upright plate (33), and the third drive component (58) drives the infrared temperature sensor (57) to move vertically closer to or away from the irradiation port (71). The infrared temperature sensor (57) is used to measure the temperature of the titanium film inside the irradiation port (71).

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