Electron beam evaporation coating device suitable for coating the surface of a double-curved optical window

Abstract

The application relates to an electron beam evaporation coating device suitable for coating the surface of a hyperboloid optical window, and aims at solving the problem of poor deposition uniformity of a traditional electron beam evaporation on the surface of a hyperboloid sample. The electron beam evaporation coating device comprises a vacuum cavity, a rack and a multi-degree-of-freedom sample table. The multi-degree-of-freedom sample table comprises a lifting device, a rotating device, a main shaft, a lifting bellows and a rotating shaft. The transmission wheel in the rotating device is coupled with the shell of a self-rotation magnetic force coupler through a belt drive. The self-rotation main gear on the first connecting rod is engaged with the self-rotation driven gear on the rotating shaft. The bottom of the main shaft is provided with a rotating frame. The rotating frame is provided with a motor box and a second bearing seat. During electron beam deposition coating, the threads on the lifting lead screw drive the sample lifting slider to move up and down. The self-rotation main gear of the magnetic force coupling drives the driven gear to realize the self-rotation of the sample. The driving gear engages with the spherical gear to realize the movement of the spherical gear along the spherical surface, so that the surface of the hyperboloid sample is uniformly deposited.

Description

TECHNICAL FIELD

[0001] The present application relates to an electron beam evaporation coating device. BACKGROUND

[0002] With the development of photoelectric detector in the field of national defense, civil security and aerospace, the traditional planar optical window is increasingly difficult to meet the needs of related fields, and the optical window gradually transits to hyperboloid, especially the hemispherical optical window. However, although the hemispherical optical window has incomparable advantages over the planar optical window, its special shape brings challenges to optical processing, especially in the preparation of surface functional film. Therefore, it is urgent to develop a hemispherical optical window coating technology for the development of photoelectric detection system.

[0003] The electron beam evaporation coating technology is to use an electron gun to directly irradiate the material in the crucible in the vacuum chamber, so that the film material changes from solid to gas, and then condenses into a film on the substrate surface. The energy of the electron beam is much higher than that generated by resistance heating, so as to promote the pre-melting of the film material to be more thorough. In addition, electron beam heating can avoid contamination of the film, and the film prepared has high purity and can fully absorb heat during the process of conducting heat, so the heat loss is small, and the thermal efficiency is high. The electron beam evaporation coating can ensure high efficiency production and excellent functional characteristics of the film. The application of electron beam evaporation coating technology to the film layer preparation of hemispherical optical window and other hyperboloid optical window can greatly promote the development of photoelectric technology in the field of aerospace, national defense and other fields, and is an important trend in the development of hyperboloid optical window coating technology. However, the traditional electron beam evaporation technology has poor deposition uniformity on the surface of the hyperboloid, and the obtained optical window has poor performance. Therefore, it is urgent to develop an electron beam evaporation coating equipment suitable for coating the surface of the hyperboloid optical window. SUMMARY

[0004] The purpose of the present application is to solve the problem of poor deposition uniformity of the traditional electron beam evaporation on the surface of the hyperboloid sample, and to provide an electron beam evaporation coating device suitable for coating the surface of the hyperboloid optical window.

[0005] The electron beam evaporation coating device suitable for coating the surface of the hyperboloid optical window comprises a vacuum cavity, a rack and a multi-degree-of-freedom sample table, the vacuum cavity is fixedly installed on the table top of the rack, wherein the multi-degree-of-freedom sample table comprises a lifting device, a rotating device, a main shaft, a lifting bellows and a rotating shaft, a first flange and a second flange are arranged on the top of the vacuum cavity, the first flange and the second flange are parallel and the first flange is located on the upper part of the second flange.

[0006] The lifting device comprises a first connecting table, a lifting hand wheel, a first transmission pulley, a second transmission pulley, a first connecting block, a first stop block, two guide shafts, a guide screw and a lifting sliding block, the first connecting block is fixed on the upper surface of the first connecting table, the guide screw and the two guide shafts are vertically arranged on the first connecting block, the top of the guide screw and the two guide shafts is provided with the first stop block, the lifting sliding block is sleeved on the guide screw and the two guide shafts, a bearing is arranged between the guide screw and the first connecting block, the lower end of the guide screw penetrates through the first connecting table and is provided with the second transmission pulley, a bearing seat is fixed on the upper surface of the first connecting table, a hand wheel rotating shaft is arranged in the bearing seat, the upper end of the hand wheel rotating shaft is connected with the lifting hand wheel, the lower end of the hand wheel rotating shaft is provided with the first transmission pulley, and the first transmission pulley and the second transmission pulley are driven by a belt;

[0007] The lifting bellows is vertically arranged on the upper surface of the first flange, the lower surface of the first flange is provided with an outer pipe, the lower end of the outer pipe is rotationally connected with the rotating shaft, the outer surface of the rotating shaft is sleeved with the rotation driven gear, the top of the lifting bellows is provided with a connecting block, the lifting sliding block is connected with the connecting block, the lower surface of the connecting block is rotationally connected with the main shaft through an embedded bearing, the main shaft extends into the shaft cylinder of the rotating shaft, and the main shaft is connected with the rotating shaft through a key;

[0008] The rotating device comprises a motor, a transmission wheel, a rotation magnetic coupler, a first connecting rod and a rotation main gear, the motor and the rotation magnetic coupler are arranged above the first flange, the transmission wheel is arranged on the power output shaft of the motor, the transmission wheel and the shell of the rotation magnetic coupler are driven by a belt, the first connecting rod is vertically arranged, one end of the first connecting rod is magnetically coupled with the rotation magnetic coupler, the other end of the first connecting rod is provided with the rotation main gear, and the rotation main gear is engaged with the rotation driven gear on the rotating shaft.

[0009] The bottom of the main shaft is provided with a rotating frame, the bottom of the rotating frame is provided with a motor box and a second bearing seat, a driving gear is arranged on the motor box, a ball gear is embedded in the second bearing seat, the driving gear is engaged with the ball gear, and a sample clamp is arranged on the ball gear.

[0010] The present application is suitable for the electron beam evaporation equipment for the surface film plating of a double-curved sample, is suitable for the surface film plating of a double-curved sample, when the electron beam is deposited and plated, the sample lifting is driven by the lifting hand wheel through the transmission synchronous pulley to rotate the guide rod screw, the thread on the lifting screw drives the sample lifting sliding block to move up and down, the rotation magnetic coupler rotates the rotation main gear to drive the rotation driven gear to realize the sample rotation. The motor in the motor box drives the driving gear to rotate, the driving gear engages the ball gear to realize the ball gear along the spherical surface. Thus, the sample is rotated by 360 degrees, so that the double-curved sample surface is uniformly deposited.

[0011] The application is suitable for the electron beam evaporation equipment for coating the surface of a hyperboloid sample, which can realize uniform deposition and coating of the surface of the hyperboloid sample, and only the motion parameters of the movable sample table are adjusted during the coating process, the left and right and up and down rotation of the sample is realized by using the gear motion of the sample table, and then the adjustment of the orientation of the sample is realized, under the cooperation of the rotation and lifting of the movable sample table, the functions of controlling the distance from the evaporation source to the sample surface and sequentially aligning the evaporation source to the whole surface of the hyperboloid substrate are realized, and the surface of the hyperboloid substrate is coated. The coating process couples the mask plate with the multi-degree-of-freedom sample table motion mode, realizes the uniform and controllable preparation of the surface of the hyperboloid sample, and the non-uniformity of the prepared film is within 5%, which solves the problem that the existing electron beam evaporation coating device has great difficulty in uniformly depositing and coating the surface of the hyperboloid structure. BRIEF DESCRIPTION OF DRAWINGS

[0012] Figure 1 It is a whole structure schematic diagram of the electron beam evaporation coating device suitable for coating the surface of a hyperboloid optical window according to the application;

[0013] Figure 2 It is a structure schematic diagram of a multi-degree-of-freedom sample table;

[0014] Figure 3 It is a structure schematic diagram of the main shaft inside the lifting bellows;

[0015] Figure 4 It is a structure schematic diagram of a lifting device. DETAILED DESCRIPTION

[0016] Specific implementation one: the electron beam evaporation coating device suitable for coating the surface of a hyperboloid optical window according to the embodiment includes a vacuum cavity 1, a rack 2 and a multi-degree-of-freedom sample table, the vacuum cavity 1 is fixedly installed on the table top of the rack 2, wherein the multi-degree-of-freedom sample table A includes a lifting device, a rotating device, a main shaft 14, a lifting bellows 15 and a rotating shaft 17, a first flange 3-1 and a second flange 3-2 are arranged at the top of the vacuum cavity 1, the first flange 3-1 and the second flange 3-2 are parallel and the first flange 3-1 is located at the upper part of the second flange 3-2;

[0017] The lifting device comprises a first connecting table 4, a lifting hand wheel 5, a first transmission pulley 6, a second transmission pulley 7, a first connecting block 8, a first stop block 9, two guide shafts 10, a guide screw 11 and a lifting sliding block 12, the first connecting block 8 is fixed on the upper surface of the first connecting table 4, the guide screw 11 and the two guide shafts 10 are vertically arranged on the first connecting block 8, the top of the guide screw 11 and the two guide shafts 10 is provided with the first stop block 9, the lifting sliding block 12 is sleeved on the guide screw 11 and the two guide shafts 10, a bearing is arranged between the guide screw 11 and the first connecting block 8, the lower end of the guide screw 11 penetrates through the first connecting table 4 and is provided with the second transmission pulley 7, a bearing seat 13 is fixed on the upper surface of the first connecting table 4, a hand wheel rotating shaft is arranged in the bearing seat 13, the upper end of the hand wheel rotating shaft is connected with the lifting hand wheel 5, the lower end of the hand wheel rotating shaft is provided with the first transmission pulley 6, and the first transmission pulley 6 and the second transmission pulley 7 are driven by a belt;

[0018] The lifting bellows 15 is vertically arranged on the upper surface of the first flange 3-1, the lower surface of the first flange 3-1 is provided with an outer pipe 31, the lower end of the outer pipe 31 is rotationally connected with the rotating shaft 17, a self-rotation driven gear 17-1 is sleeved on the outer surface of the rotating shaft 17, the top of the lifting bellows 15 is provided with a connecting block 32, the lifting sliding block 12 is connected with the connecting block 32, the lower surface of the connecting block 32 is rotationally connected with the main shaft 14 through the built-in bearing 30, the main shaft 14 extends into the shaft cylinder of the rotating shaft 17, and the main shaft 14 is connected with the rotating shaft 17 through the key 14-1;

[0019] The rotating device comprises a motor 20, a transmission wheel 21, a self-rotation magnetic coupling 22, a first connecting rod 23 and a self-rotation main gear 24, the motor 20 and the self-rotation magnetic coupling 22 are arranged above the first flange 3-1, the transmission wheel 21 is arranged on the power output shaft of the motor 20, the transmission wheel 21 is driven by a belt and the outer shell of the self-rotation magnetic coupling 22, the first connecting rod 23 is vertically arranged, one end of the first connecting rod 23 is magnetically coupled with the self-rotation magnetic coupling 22, the other end of the first connecting rod 23 is provided with the self-rotation main gear 24, and the self-rotation main gear 24 is engaged with the self-rotation driven gear 17-1 on the rotating shaft 17;

[0020] The bottom of the main shaft 14 is provided with a rotating frame 19, the bottom of the rotating frame 19 is provided with a motor box 25 and a second bearing seat, a driving gear is arranged on the motor box 25, a ball gear 26 is built in the second bearing seat, the driving gear is engaged with the ball gear 26, and a sample clamp is arranged on the ball gear 26.

[0021] Specific embodiment two: different from the specific embodiment one, the device suitable for electron beam evaporation coating of a double-curved optical window surface comprises a vacuum system B, the vacuum system B is located below the table surface of the gantry 2, and the vacuum system B is communicated with the vacuum cavity 1 through a gas suction pipeline.

[0022] Specific embodiment three: the difference between this embodiment and specific embodiment two is that the vacuum system B is composed of a molecular pump and a mechanical pump.

[0023] Specific embodiment four: the difference between this embodiment and specific embodiment two is that a side extraction valve and a main extraction valve are arranged on the extraction pipeline.

[0024] The side extraction valve and the main extraction valve in this embodiment mainly play the role of isolation / switching, connecting the vacuum pump, and prohibiting / allowing gas to enter the vacuum pump system when it is in operation or not.

[0025] Specific embodiment five: the difference between this embodiment and one of specific embodiments one to four is that a crucible 40 and an evaporation source are arranged at the bottom of the chamber of the vacuum chamber 1.

[0026] The film coating material in this embodiment is placed in the crucible.

[0027] Specific embodiment six: the difference between this embodiment and specific embodiment five is that the evaporation source is an electron gun.

[0028] In this embodiment, the electron gun filament emits hot electrons with initial kinetic energy after heating, and the hot electrons converge into a beam under the action of an electric field to form an electron beam, which is incident on the film material in the crucible to realize electric-thermal energy conversion. The surface temperature of the film material in the electron beam bombardment area is as high as 3300-6000°C, thereby causing the film material to melt and evaporate. A high-voltage electrode is also provided, and the hot electrons emitted from the electron gun are accelerated and focused into a beam by the high-voltage electric field between the cathode and the anode.

[0029] Specific embodiment seven: the difference between this embodiment and specific embodiment five is that the evaporation source also includes a resistance evaporation electrode 41.

[0030] The resistance evaporation electrode in this embodiment is used for thermal evaporation film coating. After the resistance evaporation electrode is powered on, heat is generated, and the molecules or atoms of the evaporation material obtain sufficient kinetic energy and evaporate.

[0031] Specific embodiment eight: the difference between this embodiment and one of specific embodiments one to seven is that the rotating frame 19 is composed of an upper connecting plate 19-1, a vertical rod 19-2, and a lower connecting plate 19-3. The upper connecting plate 19-1 and the lower connecting plate 19-3 are arranged in parallel, and a plurality of vertical rods 19-2 are vertically arranged between the upper connecting plate 19-1 and the lower connecting plate 19-3.

[0032] Specific embodiment nine: the difference between this embodiment and specific embodiment eight is that the number of vertical rods 19-2 is three.

[0033] Specific embodiment ten: the difference between this embodiment and one of specific embodiments one to nine is that the hyperboloid sample held by the sample holder is semicircular or semi-elliptical.

[0034] The embodiment is suitable for the electron beam evaporation coating device for coating the hyperbolic optical window surface. The device comprises a vacuum chamber 1, a rack 2 and a multi-degree-of-freedom sample table. The vacuum chamber 1 is fixedly installed on the table top of the rack 2. The multi-degree-of-freedom sample table A comprises a lifting device, a rotating device, a main shaft 14, a lifting bellows 15 and a rotating shaft 17. A first flange 3-1 and a second flange 3-2 are arranged on the top of the vacuum chamber 1. The first flange 3-1 and the second flange 3-2 are parallel and the first flange 3-1 is located on the upper portion of the second flange 3-2. A vacuum system B is arranged on the lower portion of the table top of the rack 2. The vacuum system B is connected with the vacuum chamber 1 through a pumping line. An electron gun 40, a high-voltage electrode 41 and a resistance evaporation electrode 42 are arranged on the bottom of the chamber of the vacuum chamber 1.

[0035] The lifting device comprises a first connecting table 4, a lifting hand wheel 5, a first transmission pulley 6, a second transmission pulley 7, a first connecting block 8, a first stop block 9, two optical shafts 10, a guide screw 11 and a lifting sliding block 12. The first connecting block 8 is fixed on the upper surface of the first connecting table 4. The guide screw 11 and the two optical shafts 10 are vertically arranged on the first connecting block 8. In the top view, the guide screw 11 and the two optical shafts 10 are arranged in a triangular shape. The first stop block 9 is arranged on the top of the guide screw 11 and the two optical shafts 10. The lifting sliding block 12 is sleeved on the guide screw 11 and the two optical shafts 10. A bearing is arranged between the guide screw 11 and the first connecting block 8. The lower end of the guide screw 11 penetrates through the first connecting table 4 and is provided with the second transmission pulley 7. A bearing seat 13 is fixed on the upper surface of the first connecting table 4. A hand wheel rotating shaft is arranged in the bearing seat 13. The upper end of the hand wheel rotating shaft is connected with the lifting hand wheel 5. The lower end of the hand wheel rotating shaft is provided with the first transmission pulley 6. The first transmission pulley 6 and the second transmission pulley 7 are driven through a belt.

[0036] The lifting bellows 15 is vertically installed on the upper surface of the first flange 3-1. The lower surface of the first flange 3-1 is provided with an outer tube 31. The lower end of the outer tube 31 is rotationally connected with the rotating shaft 17. A rotation driven gear 17-1 is sleeved on the outer surface of the rotating shaft 17. The top of the lifting bellows 15 is provided with a connecting block 32. The lifting sliding block 12 is connected with the connecting block 32. The lower surface of the connecting block 32 is rotationally connected with the main shaft 14 through an embedded bearing 30. The main shaft 14 extends into the shaft cylinder of the rotating shaft 17. The main shaft 14 is connected with the rotating shaft 17 through a key 14-1. The lower portion of the outer tube 31 is provided with a connecting frame 18. The connecting frame 18 is composed of a first connecting piece 18-1, a second connecting piece 18-2 and a third connecting piece 18-3. The first connecting piece 18-1 is horizontally fixed on the outer tube 31. The second connecting piece 18-2 and the third connecting piece 18-3 are symmetrically arranged between the first connecting piece 18-1 and the second flange 3-2. The second flange 3-2 is rotationally connected with the rotating shaft through a bearing.

[0037] The rotating device comprises a motor 20, a transmission wheel 21, a self-rotation magnetic coupling 22, a first connecting rod 23 and a self-rotation main gear 24, the motor 20 and the self-rotation magnetic coupling 22 are fixed on a second connecting table which is above the first flange 3-1, the transmission wheel 21 is arranged on the power output shaft of the motor 20, the transmission wheel 21 is driven by a belt and the outer shell of the self-rotation magnetic coupling 22, the first connecting rod 23 is vertically arranged and passes through the first connecting sheet 18-1, one end of the first connecting rod 23 is magnetically coupled with the self-rotation magnetic coupling 22, the other end of the first connecting rod 23 is provided with the self-rotation main gear 24, and the self-rotation main gear 24 is engaged with the self-rotation driven gear 17-1 on the rotating shaft 17.

[0038] The bottom of the main shaft 14 is provided with a rotating frame 19, the bottom of the rotating frame 19 is provided with a motor box 25 and a second bearing seat, a driving gear is arranged on the motor box 25, a ball gear 26 is arranged in the second bearing seat, the driving gear is engaged with the ball gear 26, and a sample clamp is arranged on the ball gear 26.

[0039] Lifting movement: the lower ends of the guide screw rod 11 and the two optical shafts 10 are arranged at corresponding positions of the first connecting table 4, and the upper ends of the guide screw rod 11 and the two optical shafts 10 are provided with first stoppers 9. The first connecting table 4 installs a lifting hand wheel 5 to the side of the guide screw rod and the optical shaft. A transmission synchronous belt wheel is below the first connecting table 4, a driving wheel 6 is connected with the lifting hand wheel 5, and a driven wheel is connected with the guide screw rod 11, so that the rotation of the lifting hand wheel is transmitted to the guide screw rod. The guide screw rod and the optical shaft are connected with the guide screw rod and the optical shaft through through holes in lifting sliding blocks, the guide screw rod is externally threaded, and the three are combined in this form, so that the rotation of the guide screw rod is transmitted to the sample lifting sliding block, and the lifting sliding block is lifted. The other side of the sample lifting sliding block is connected with a connecting block 32, and the sample lifting sliding block drives the main shaft 14 to realize lifting movement when moving. The main shaft 14 is rotationally connected with the connecting block 32 through an embedded bearing 30. The connecting sheet 8 fixes the guide screw rod and the optical shaft below the main shaft sample lifting corrugated pipe in the form of a screw at the lower ends of the guide screw rod and the optical shaft, and fixes the guide screw rod and the optical shaft to the side of the main shaft. The main shaft 14 passes through the first flange 3-1, the lower end of the main shaft 14 is connected with the rotating frame 19, and the main shaft 14 drives the double-curved sample on the sample clamp to move up and down during the lifting process.

[0040] Rotation around the vertical axis: the motor 20 and the rotation magnetic coupling 22 are fixed on the second connecting platform, the transmission belt connects the transmission wheel 21 on the motor and the rotation magnetic coupling 22, and the rotation of the motor 20 is transmitted to the rotation magnetic coupling 22. The rotation of the rotation magnetic coupling 22 drives the rotation of the rotation main gear 24 on the first connecting rod 23 through magnetic force, the rotation main gear 24 is engaged with the rotation driven gear 17-1 on the rotation shaft 17, and the rotation of the rotation shaft 17 drives the rotation of the main shaft 14 due to the key connection between the main shaft 14 and the rotation shaft 17. The rotation of the driving gear on the motor box 25 drives the rotation of the ball gear 26 in the horizontal plane.

[0041] Rotation around the vertical axis: the motor 20 and the rotation magnetic coupling 22 are fixed on the second connecting platform, the transmission belt connects the transmission wheel 21 on the motor and the rotation magnetic coupling 22, and the rotation of the motor 20 is transmitted to the rotation magnetic coupling 22. The rotation of the rotation magnetic coupling 22 drives the rotation of the rotation main gear 24 on the first connecting rod 23 through magnetic force, the rotation main gear 24 is engaged with the rotation driven gear 17-1 on the rotation shaft 17, and the rotation of the rotation shaft 17 drives the rotation of the main shaft 14 due to the key connection between the main shaft 14 and the rotation shaft 17. The rotation of the driving gear on the motor box 25 drives the rotation of the ball gear 26 in the horizontal plane. Rotation around the vertical axis: the motor 20 and the rotation magnetic coupling 22 are fixed on the second connecting platform, the transmission belt connects the transmission wheel 21 on the motor and the rotation magnetic coupling 22, and the rotation of the motor 20 is transmitted to the rotation magnetic coupling 22. The rotation of the rotation magnetic coupling 22 drives the rotation of the rotation main gear 24 on the first connecting rod 23 through magnetic force, the rotation main gear 24 is engaged with the rotation driven gear 17-1 on the rotation shaft 17, and the rotation of the rotation shaft 17 drives the rotation of the main shaft 14 due to the key connection between the main shaft 14 and the rotation shaft 17. The rotation of the driving gear on the motor box 25 drives the rotation of the ball gear 26 in the horizontal plane.

Claims

1. An apparatus for electron beam evaporation coating of surfaces of optical windows of double curvature, characterized in that The electron beam evaporation coating device comprises a vacuum chamber (1), a rack (2) and a multi-degree-of-freedom sample table, the vacuum chamber (1) is fixedly installed on the table top of the rack (2), wherein the multi-degree-of-freedom sample table (A) comprises a lifting device, a rotating device, a main shaft (14), a lifting bellows (15) and a rotating shaft (17), a first flange (3-1) and a second flange (3-2) are arranged on the top of the vacuum chamber (1), the first flange (3-1) and the second flange (3-2) are parallel to each other, and the first flange (3-1) is located on the upper portion of the second flange (3-2); The lifting device comprises a first connecting table (4), a lifting hand wheel (5), a first transmission pulley (6), a second transmission pulley (7), a first connecting block (8), a first stop block (9), two guide shafts (10), a guide screw (11) and a lifting sliding block (12), the first connecting block (8) is fixed on the upper surface of the first connecting table (4), the guide screw (11) and the two guide shafts (10) are vertically arranged on the first connecting block (8), the top portions of the guide screw (11) and the two guide shafts (10) are provided with the first stop block (9), the lifting sliding block (12) is sleeved on the guide screw (11) and the two guide shafts (10), a bearing is arranged between the guide screw (11) and the first connecting block (8), the lower end of the guide screw (11) penetrates through the first connecting table (4) and is provided with the second transmission pulley (7), a bearing seat (13) is fixed on the upper surface of the first connecting table (4), a hand wheel rotating shaft is arranged in the bearing seat (13), the upper end of the hand wheel rotating shaft is connected with the lifting hand wheel (5), and the lower end of the hand wheel rotating shaft is provided with the first transmission pulley (6), and the first transmission pulley (6) and the second transmission pulley (7) are driven through a belt; The lifting bellows (15) is vertically installed on the upper surface of the first flange (3-1), the lower surface of the first flange (3-1) is provided with an outer tube (31), the lower end of the outer tube (31) is rotationally connected with the rotating shaft (17), a rotation driven gear (17-1) is sleeved on the outer surface of the rotating shaft (17), the top of the lifting bellows (15) is provided with a connecting block (32), the lifting sliding block (12) is connected with the connecting block (32), the lower surface of the connecting block (32) is rotationally connected with the main shaft (14) through a built-in bearing (30), the main shaft (14) extends into the shaft cylinder of the rotating shaft (17), and the main shaft (14) is connected with the rotating shaft (17) through a key (14-1). The rotating device comprises a motor (20), a transmission wheel (21), a self-rotation magnetic coupling device (22), a first connecting rod (23) and a self-rotation main gear (24), the motor (20) and the self-rotation magnetic coupling device (22) are arranged above the first flange (3-1), the transmission wheel (21) is arranged on a power output shaft of the motor (20), the transmission wheel (21) is driven by a belt and the outer shell of the self-rotation magnetic coupling device (22), the first connecting rod (23) is vertically arranged, one end of the first connecting rod (23) is magnetically coupled with the self-rotation magnetic coupling device (22), the other end of the first connecting rod (23) is provided with the self-rotation main gear (24), and the self-rotation main gear (24) is engaged with a self-rotation driven gear (17-1) on the rotating shaft (17); The bottom of the main shaft (14) is provided with a rotating frame (19), the bottom of the rotating frame (19) is provided with a motor box (25) and a second bearing seat, a driving gear is arranged on the motor box (25), a ball gear (26) is arranged in the second bearing seat, the driving gear is engaged with the ball gear (26), and a sample clamp is arranged on the ball gear (26).

2. The apparatus for e-beam evaporation coating of a double-curved optical window surface according to claim 1, characterized in that The device for electron beam evaporation coating suitable for coating the surface of a double-curved optical window comprises a vacuum system (B), which is arranged below the table surface of a gantry (2) and is connected to a vacuum cavity (1) through a pumping pipeline.

3. The apparatus for e-beam evaporation coating of a double-curved optical window surface according to claim 2, characterized in that The vacuum system (B) is composed of a molecular pump and a mechanical pump.

4. The apparatus for e-beam evaporation coating of a dual-curved optical window surface according to claim 2, wherein A bypass valve and a main valve are arranged on the pumping pipeline.

5. The apparatus for e-beam evaporation coating of a dual curved optical window surface according to claim 1, wherein A crucible (40) and an evaporation source are arranged at the bottom of the chamber of the vacuum cavity (1).

6. The apparatus for e-beam evaporation coating of a dual-curved optical window surface according to claim 5, wherein The evaporation source is an electron gun.

7. The apparatus for e-beam evaporation coating of a dual-curved optical window surface according to claim 5, wherein The evaporation source further comprises a resistance evaporation electrode (41).

8. The apparatus for e-beam evaporation coating of a dual-curved optical window surface according to claim 1, wherein The rotating frame (19) is composed of an upper connecting plate (19-1), a vertical rod (19-2) and a lower connecting plate (19-3), the upper connecting plate (19-1) and the lower connecting plate (19-3) are arranged in parallel, and a plurality of vertical rods (19-2) are vertically arranged between the upper connecting plate (19-1) and the lower connecting plate (19-3).

9. The apparatus for e-beam evaporation coating of a dual-curved optical window surface according to claim 8, wherein The number of the vertical rods (19-2) is three.

10. The apparatus for e-beam evaporation coating of a dual curved optical window surface according to claim 1, wherein The double-curved sample held by the sample clamp is semicircular or semi-elliptical.

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