A scanning array humidity sensor and detection method

Abstract

The application relates to a scanning array type humidity sensor and a detection method, and belongs to the detection field. The application is based on an array type humidity sensor module, and the sensor in the module is controlled to be turned on and turned off, so that the number of parallel connection of the sensor array is increased or decreased. When the environment is stable and undulates, the sensitivity of the system is improved by gradually expanding the sensor array; when the system is in a sudden change environment, the dynamic response performance of the system is improved by gradually reducing the sensor array, so that the sensor system can flexibly adjust the detection scheme according to the environment state. The number of electrode lead wires in the traditional array type sensor is reduced from 2*M*N to M+N, so that the electromagnetic interference problems such as cross coupling crosstalk caused by the complex line of the system are effectively avoided, and the detection precision and robustness of the system are further improved. The application is suitable for the detection field, and can ensure that the sensor system can flexibly adjust the detection mode according to the environment state, and improve the comprehensiveness and accuracy of the environmental detection.

Description

TECHNICAL FIELD

[0001] The present application relates to a humidity sensor, in particular to a scanning array humidity sensor and a detection method, and belongs to the field of detection. BACKGROUND

[0002] Humidity is one of the most important parameters in the natural environment. In the fields of meteorological detection, health care, smart agriculture, food production, etc., humidity sensors have played an important role in human survival and social activities. Sensitivity, as one of the important static indicators of humidity sensors, reflects the output change caused by the unit change of the measured quantity. The higher the sensitivity, the greater the output signal value matched with the measurement change, which is more conducive to signal processing. Dynamic response time is another important property of sensors, which represents the time required for the sensor to complete the process of absorbing or desorbing humidity and dynamic balance when the environmental humidity changes. When the environment changes continuously, fast dynamic response time performance can ensure that the sensor can accurately and comprehensively detect the environmental state quantity in real time.

[0003] However, for humidity sensors, improving the sensitivity and dynamic response time of the sensor at the same time is contradictory. According to the humidity sensing principle, by changing the structure of the sensitive unit and the humidity sensing layer to increase the humidity sensing area of the sensor, the basic electrical characteristics of the sensor can be greatly improved, and the sensitivity of the sensor can be improved, but the transmission time of water molecules in the humidity sensing material is also increased. Although the sensitivity of the sensor is improved, the dynamic response time is reduced. Similarly, by reducing the humidity sensing area of the sensor, the opposite effect will be produced. At present, there is no humidity sensor design that can maximize the sensitivity and dynamic response performance of the sensor at the same time, or can flexibly adjust the optimal performance of the sensor for different detection scenarios.

[0004] Many researchers have also noticed the importance of improving the sensitivity and dynamic response time performance of the sensor. In 2016, Keyvan et al. proposed an interdigital humidity sensor based on ZnO nanorods, which can accelerate the response speed of the sensor by reducing the spacing between ZnO nanorods. In 2018, Zhao et al. analyzed a capacitive humidity sensor based on SnO2 / MoS2, which can improve the sensitivity of the sensor by reducing the gap between the interdigital electrodes of the sensor in the low humidity range. In 2018, Liang realized a capacitive humidity sensor with a humidity sensing film thickness of 1.5um and 3.0um. The experimental comparison found that the response time of the sensor with a thickness of 1.5um was shorter than that of the 3um sensor, which was shortened from 35s to 5s, but the sensitivity was also reduced from 299.9pF / %RH to 178.6pF / %RH. From the above research, it can be seen that from the perspectives of sensitive mechanism, material selection, structure optimization, etc., the current design of the sensor can only optimize one of the two properties, and cannot adjust the optimization strategy.

[0005] In 2023, Li et al. proposed an optimization and design scheme for a high-dynamic and high-sensitivity interdigital capacitive humidity sensor. By constructing a theoretical mathematical model of the sensitivity-dynamic response of the sensor, the influence of each structure of the sensor on the performance was analyzed. Based on the model, a sensor optimization objective equation was constructed, and the structure optimization design for different situations was realized, so as to balance the sensitivity and dynamic response performance. However, the sensitivity and dynamic response performance of the sensor designed based on this optimization scheme cannot reach the limit of each performance, but only ensures that when one property is optimized, the other property is not greatly affected. Moreover, the sensor cannot guarantee that the performance remains consistent with the design scheme in different detection environments.

[0006] Utilizing wafer process to manufacture a batch of sensors, and combining several sensors with the same size, structure, and performance into an array for measurement can also improve the overall performance of the system to some extent. Array design not only expands the detection range and realizes large-scale, long-distance multi-point testing, but also compensates for each other and improves accuracy. A graphene / silicon array-type intelligent temperature and humidity sensor (ZL201510442058.6) discloses a graphene / silicon array-type intelligent temperature and humidity sensor with high sensitivity and accuracy, which can be integrated. The temperature and humidity sensor of the invention adopts a unique array structure to simultaneously obtain temperature and relative humidity, and improves sensitivity and repeatability through mutual compensation of the sensors, enabling fast and easy measurement of environmental temperature and humidity. Although this method optimizes the overall performance of the system by using array design of sensors, the system still cannot achieve optimal sensitivity and dynamic response performance for different scenarios due to the limitations of individual sensors. Moreover, such array design greatly increases the complexity of the system's lead lines, and each sensitive unit is prone to serious cross-coupling crosstalk problems, affecting system performance.

[0007] In summary, the shortcomings of existing technologies and the technical reasons for these shortcomings are as follows: (1) The sensitivity performance and dynamic response performance of humidity sensors cannot be simultaneously optimized due to the inherent nature of the sensing mechanism. Conventional methods of changing sensor materials or optimizing structures can only improve sensitivity or dynamic response, and cannot flexibly select the optimal system performance strategy for different scenarios. (2) Current array-type sensor systems only arrange sensors in an array and each sensor tests the environment in its own area. Although the sensors can compensate for each other and expand the detection range, the limitations of individual sensor performance and the lack of system linkage result in the inability of the sensors to optimize their performance for different scenarios. In addition, (3) the existing array-type sensor design method requires at least two lead lines for each sensor, greatly increasing the complexity of the system. SUMMARY

[0008] In order to solve the problems that the prior art cannot flexibly adjust the detection scheme according to the detection scene, improve the sensitivity and dynamic response performance of the humidity sensor, and balance the comprehensiveness and accuracy of detection, the main purpose of the present application is to provide a scanning array type humidity sensor and a detection method, which is based on an array type humidity sensor module, and the sensors in the module are controlled to be turned on and turned off, so that the number of parallelly connected sensor arrays in the array type sensor system is increased or decreased. When the environment is stable, the sensitivity performance is maximized to improve the detection quality; when the environment changes suddenly, the dynamic response performance is maximized. The sensor system can flexibly adjust its detection scheme according to the environment state, and improve the comprehensiveness and accuracy of environmental detection.

[0009] The scanning array type humidity sensor disclosed by the present application comprises an array type humidity sensor module, an environment monitoring module, an input instruction module, a microprocessor module, a signal output module and a power module. The array type humidity sensor module is the core of the system and is used to provide high-performance humidity measurement and interact with the microprocessor module; the environment monitoring module is used to monitor the state of the current environment of the system and interact with the microprocessor module; the input instruction module is used to input a decision instruction signal to the microprocessor module according to the current environment state; the microprocessor module is used to process various signals in the system and transmit the processing results to the signal output module; the signal output module is used to output and display the environmental humidity and temperature information monitored by the system; and the power module supplies power to the system.

[0010] The array type humidity sensor module is composed of M*N interdigital capacitive humidity sensors with the same size, the same material and the same structure, wherein M is the number of rows of the array type humidity sensor, and N is the number of columns of the array type humidity sensor. The left electrodes of the humidity sensors in each row of the M rows are sequentially connected to form M to-be-conducted circuits, and the right electrodes of the humidity sensors in each column of the N columns are sequentially connected to form N to-be-scanned circuits, so as to form M+N circuits. According to the sensitive characteristics of the interdigital capacitive humidity sensor, the parallel sensors are equivalent to expanding the basic capacitance value of the sensor, which can improve the sensitivity of the sensor, but to a certain extent, the dynamic response time performance is reduced. Reducing the number of parallel sensors can improve the dynamic response performance of the system, but at the cost of the static sensitivity characteristics.

[0011] The environment monitoring module is mainly composed of S standard temperature sensors, which are arranged in each direction of the system to accurately monitor the state of the current environment of the system in a large range, and bring the environmental parameters into the microprocessor sensor humidity detection equation to compensate the array type humidity sensor test data.

[0012] The input instruction module can adjust the humidity detection strategy by setting the temperature and humidity threshold and criterion time, so that the sensor performance in different test environments is optimized.

[0013] The signal output module can display the real-time temperature information, humidity information and environmental state change of the system.

[0014] The microprocessor module functions include calculating the environmental humidity value measured by the humidity sensor array, scanning or turning off the sensor array according to the environmental state, switching the sensor humidity detection algorithm under different arrays, calculating the temperature value measured by the temperature sensor, temperature compensation for the environmental humidity value measured by the humidity sensor, processing the input instruction, and transmitting the processed signal to the signal output module.

[0015] The application discloses a scanning array type humidity detection method, which is realized based on a scanning array type humidity sensor and includes the following steps.

[0016] S1: The input instruction module is used to set the threshold alpha and beta of the change of the system allowed environmental temperature and humidity parameters within each criterion time and the criterion time t.

[0017] S2: M pieces of to-be-conducted circuits and N pieces of to-be-scanned circuits in the array type humidity sensor system are conducted. The real-time test environmental temperature and humidity state of the system are observed through the signal output module. At this time, the temperature test information of the system is measured by the environmental monitoring module, and the humidity test information is measured by the M*N humidity sensors connected in parallel.

[0018] S3: When the environment changes relatively smoothly, i.e., Delta T is less than or equal to alpha Celsius and Delta H is less than or equal to beta RH percent, the humidity sensor continues to be tested in the current state. At this time, since the environmental transformation fluctuation is small, the system does not prefer to consider the dynamic response time performance. The array type sensor is connected in parallel in turn to test the humidity, maximizes the humidity sensing area of the system, expands the basic capacitance of the system, and maximizes the sensitivity performance of the system. Wherein, Delta T and Delta H are the change amounts of the environmental temperature and humidity parameters measured by the system within each criterion time t; and Celsius and RH percent are the units of Celsius and relative humidity, respectively.

[0019] S4: When the environment changes dramatically, i.e., Delta T is greater than alpha Celsius or Delta H is greater than beta RH percent, the dynamic response performance of the sensor needs to be focused on. The humidity sensor array of the system is scanned, the sensor array is conducted and turned off, and the microprocessor signal processing algorithm is constantly adjusted to ensure that the detection signal does not change suddenly during the switching process, and the dynamic response performance of the system is improved.

[0020] S41: When the system detects the environmental information as AT > a ℃ or AH > b RH% within a certain time t, the N-1 column scanning circuits of the array sensor are sequentially turned off in the order of N, N-1, …, 2, and the M-1 row conduction circuits of the array sensor are sequentially turned off in the order of M, M-1, …, 2, until the system works with the last remaining humidity sensor.

[0021] S42: When the system turns off a certain number of sensors and detects the environmental information as AT ≤ a ℃ and AH ≤ b RH% within a certain time t, the sensor array is gradually turned on. First, the M-1 row circuits of the array sensor are sequentially turned on in the order of 2, …, M-1, M. Then, the N-1 column circuits of the array sensor are sequentially scanned in the order of 2, …, N-1, N. Until the system monitors that the environment AT > a ℃ or AH > b H% within t time when scanning to a certain state, the system performs the S41 step operation to gradually reduce the number of sensors in parallel.

[0022] S43: In the process of scanning the humidity sensor array and turning on and off the sensors, the system constantly adjusts the signal processing algorithm using the microprocessor module. When the system starts to detect with high sensitivity using M*N humidity sensors, the corresponding relationship between the microprocessor input signal: humidity sensor array capacitance value C and the output signal: system detected environmental relative humidity value H is H = τC + εT, where τ is the proportional coefficient of the signal processing algorithm of the microprocessor module, T is the current environmental temperature value, and ε is the temperature compensation proportional coefficient of the microprocessor module. When the system detects that the environmental state changes and starts to scan the sensor array, in order to ensure that the detection signal does not suddenly change during the switching process, the signal processing algorithm of the microprocessor module is constantly adjusted and updated: Where M t and N t are the number of rows and columns of the humidity sensor array during switching.

[0023] Advantages:

[0024] 1. Compared with the traditional sensor which can only improve the basic performance by changing its structure and materials, etc., when facing different test environments, the sensor performance cannot be flexibly exerted to the limit. The disclosed scanning array humidity sensor and detection method changes the detection scheme constantly according to the different environments of the sensor through array scanning. When the environment is stable and has no fluctuation, the sensitivity index of the system is improved by expanding the sensor array, so that the test results of the system are more accurate. When the system is in a sudden environment, the dynamic response performance of the system is improved by gradually reducing the sensor array, so as to quickly respond to the sudden environment and ensure the real-time of the test data, so as to realize the optimal sensitivity and dynamic response performance of the sensor system in different test environments.

[0025] 2、Compared with the humidity sensor of the same size and material, the scanning array type humidity sensor disclosed by the application splits a single detection sensor into several sensor groups to detect humidity under the premise of ensuring the same humidity sensing area, improves the humidity absorption and dehumidification speed of each sensor, and further improves the dynamic response performance of the system.

[0026] 3、The scanning array type humidity sensor disclosed by the application reduces the number of 2*M*N electrode leads in the traditional array type sensor to M+N. Cross-coupling crosstalk and other electromagnetic interference problems caused by complex lines are effectively avoided, and the detection accuracy and robustness of the system are further improved.

[0027] 4、The scanning array type humidity sensor and the detection method disclosed by the application, the system microprocessor module can flexibly switch its signal processing algorithm according to the environment to be measured and the number of sensor groups turned on, so that the system can work smoothly and stably without detection signal mutation. In addition, the microprocessor can also compensate the measurement value of the humidity sensor according to the current environment state value, further improving the detection accuracy. BRIEF DESCRIPTION OF DRAWINGS

[0028] Figure 1 It is a schematic diagram of the scanning array type humidity sensor system disclosed by the application.

[0029] Figure 2 It is a flow chart of the scanning array type humidity detection method disclosed by the application.

[0030] Figure 3 It is a schematic diagram of the scanning array type humidity sensor module structure disclosed by the embodiment. DETAILED DESCRIPTION

[0031] The application will be described in detail below in combination with the drawings and embodiments. The technical problems solved by the technical scheme of the application and the beneficial effects are also described, and it should be pointed out that the described embodiments are only intended to facilitate the understanding of the application and do not limit the application in any way.

[0032] The scanning array type humidity sensor system disclosed by the embodiment, as shown in Figure 1 The scanning array type humidity sensor system disclosed by the embodiment, as shown in

[0033] The power module 6 is connected with the microprocessor module 4, and the whole sensor system is powered through the microprocessor module 4. The array humidity sensor module 1 is the core of the system, and is mainly used to provide high-performance humidity measurement. The detection results of the array humidity sensor module 1 are transmitted to the microprocessor module 4 in the form of electrical signals for further processing, and the microprocessor module 4 calculates the humidity of the environment to be measured by detecting the capacitance change of the array humidity sensor module 1. The environmental monitoring module 2 is distributed around the array humidity sensor module 1, and is mainly used to monitor the state of the current environment of the system. The environmental monitoring module 2 transmits the real-time monitored environmental state information to the microprocessor module 4, which detects the change of the environment in real time on the one hand, and compensates the environmental humidity information measured by the array humidity sensor module 1 on the other hand. The input instruction module 3 is connected with the microprocessor module 4, and is mainly used to input the set decision instruction signal to the microprocessor module 4 for processing according to the current environmental state. The microprocessor module 4 is mainly used to process various signals in the system, and transmits the processing results to the signal output module 5 to display the environmental humidity and temperature information detected by the system.

[0034] The array humidity sensor module 1 is composed of 5*5 interdigital capacitive humidity sensors which are arranged in an orderly manner on a wafer with a diameter of 5 cm and have the same size, material and structure. Figure 3 The sensor substrate layer is made of silicon, the electrode layer is made of gold, and the humidity sensing layer is made of molybdenum disulfide. Each interdigital capacitive humidity sensor has a length of 6 mm, a width of 6 mm, an interdigital length of 5.44 mm, a width of 0.16 mm, an interdigital spacing of 0.16 mm, a sensor pad length of 0.4 mm, a width of 0.3 mm, a horizontal sensor spacing of 0.2 mm, and a vertical sensor spacing of 1 mm. The left electrodes of 5 rows of humidity sensors are connected in sequence to form 5 to-be-conducted circuits P1, P2, … P5, which are distributed on the left side of the array sensor. The right electrodes of 5 columns of humidity sensors are connected in sequence to form 5 to-be-scanned circuits Q1, Q2, … Q5, which are distributed below the array sensor. The 5 to-be-conducted circuits and the 5 to-be-scanned circuits together form 10 circuits of the array humidity sensor module 1. Each interdigital capacitive humidity sensor is composed of 8 pairs of interdigital structures. When calculating the sensor base capacitance C, the total capacitance C of the sensor is equivalent to the parallel capacitance value of 8 pairs of interdigital structures, that is, the capacitance value C0 of a pair of interdigital structures multiplied by the number of pairs of interdigital structures, C = 8 * C0. When the circuits in the array humidity sensor module 1 are conducted, the conducted sensors are connected in parallel with each other. Like the sensitivity characteristics of a single humidity sensor, the total capacitance value C of the parallel sensors is L times the capacitance value C of a single sensor, C = L * C. Wherein the parallel number L of the sensors in the array humidity sensor module 1 is M a to-be-conducted circuits and N a to-be-scanned circuits in the array. t t ​The product of the conducting circuits, i.e., L = M t *N t At this time, the total capacitance of the array humidity sensor module 1 is C. a =M t *N t *C. This shows that increasing the number of conducting elements in the sensor will increase the sensor's fundamental capacitance value C. a According to the definition of humidity sensor sensitivity, the sensitivity of array humidity sensor module 1 is S = dCa / dH = M. t *N t *dC / dH, where dC a dC and dH are the total capacitance values ​​of array-type humidity sensor module 1, respectively. a The capacitance C of a single sensor and the derivative of the relative humidity H are considered. Similar to the total capacitance Ca of the array humidity sensor module 1, increasing the number of conducting sensors will increase the sensor sensitivity S. However, because parallel sensors increase the humidity-sensing area of ​​the array humidity sensor module 1, the system's dynamic response time performance is reduced to some extent. Similarly, reducing the number of parallel sensors will improve the system's dynamic response performance, but at the expense of static sensitivity characteristics.

[0035] Based on the above principle analysis, a high-dynamic and high-sensitivity humidity detection method based on a scanning array humidity sensor system was designed, such as... Figure 2 As shown, the specific detection method is as follows:

[0036] S1: Using input instruction module 3, the system sets the thresholds α = 3℃ and β = 2RH% for the allowable changes in ambient temperature and humidity parameters within each criterion time interval, and the criterion time t = 5s. This is used to determine the state of the environment detected by the sensor within 5s, and then switch the sensor performance optimization strategy accordingly. If the environment changes drastically, the sensor's dynamic response performance needs to be improved; if the environment changes steadily, the sensor's sensitivity performance needs to be improved.

[0037] S2: The environmental monitoring module 2 of the array humidity sensor system is activated to begin detecting ambient temperature information. All circuits of the array humidity sensor module 1 are also activated, including 5 circuits to be activated and 5 circuits to be scanned. This means all humidity sensors in the array humidity sensor module 1 are activated and connected in parallel to detect ambient humidity information. The system's real-time ambient temperature and humidity status are observed through the signal output module 5. At this time, the system's temperature test information is obtained by the environmental monitoring module 2, and the humidity test information is obtained by the 5*5 humidity sensors connected in parallel in the array humidity sensor module 1.

[0038] S3: Continuously observe the environmental state monitored by the system displayed in the signal output module 5. When the environment changes are relatively stable, the temperature and humidity change amounts within 5s are both less than the threshold set by the input instruction module 3, i.e. ΔT≤3℃ and ΔH≤2RH%, the current access state of the array humidity sensor module 1 is maintained for testing. At this time, due to the small environmental change fluctuation, the dynamic response performance of the system is sufficient to support the high-performance test of humidity, and the optimization of dynamic response time performance can not be considered. The 5*5 humidity sensors in the array humidity sensor module 1 are connected in parallel for humidity test, and the sensitivity performance of the system is maximized by expanding the system basic capacitance. Among them, ΔT and ΔH are the change amounts of the environmental temperature and humidity parameters monitored by the system per second; and ℃ and RH% are the units of Celsius and relative humidity, respectively.

[0039] S41: When the system monitored environmental state displayed in the signal output module 5 exceeds the threshold set by the input instruction module 3 within 5s, i.e. ΔT>3℃ or ΔH>2RH% occurs. At this time, due to the dramatic change of the environment where the sensor is located, the dynamic response performance of the sensor should be focused on. First, the 4-column scanning circuits of the array humidity sensor module 1 are turned off in the order of 5, 4, 3, and 2, and then the 4-row on-off circuits of the array humidity sensor module 1 are turned off in the order of 5, 4, 3, and 2. Each time a circuit is turned off, the system tests the environmental state in real time using the remaining array sensors in parallel. When the system detects that the environmental information is always ΔT>3℃ or ΔH>2RH% within each 5s criterion time, the on-off sensor circuit is continued to be turned off in order until there is only one humidity sensor working in the array humidity sensor module 1

[0040] S42: When the system is turned off to a certain sensor, the system monitored environment state displayed in the signal output module 5 within a certain 5s criterion time meets the threshold set by the input instruction module 3, that is, ΔT≤3℃ and ΔH≤2RH%. Since the environment change of the sensor at this time is stable, the sensitivity performance of the sensor should be focused on. Start to gradually turn on the sensor array of the array humidity sensor module 1, first turn on the 4 rows of circuits of the array humidity sensor module 1 in the order of 2, 3, 4, 5. Then scan the 4 columns of circuits of the array humidity sensor module 1 in the order of 2, 3, 4, 5. Every time a circuit is turned on, the system tests the environment state in real time using the array sensor that has been turned on in parallel. When the system detects that the environmental information always meets ΔT≤3℃ and ΔH≤2RH% within every 5s criterion time, continue to turn on the sensor circuit in order until all 5*5 humidity sensors of the array humidity sensor module 1 are turned on and work in parallel. If the system detects that the environment ΔT>1℃ or ΔH>2RH% within 5s when scanning the sensor array to a certain state, the system immediately operates according to the S41 step on the basis of the currently turned on array, gradually closes the number of turned on circuits of the array humidity sensor module 1, and reduces the number of sensors in parallel.

[0041] S43: In the process of scanning the array humidity sensor module 1 to realize the turning on and turning off of the sensor, the system constantly adjusts the signal processing algorithm using the microprocessor module 4. When the system starts high sensitivity detection using 5*5 humidity sensors, the corresponding relationship between the microprocessor input signal: humidity sensor array capacitance value C and the output signal: system detected environment relative humidity value H is H=τC+εT, where τ is the proportional coefficient of the signal processing algorithm of the microprocessor module 4, T is the current environment temperature value, and ε is the temperature compensation proportional coefficient of the microprocessor module 4. When the system detects that the environment state changes and starts to scan the sensor array, in order to ensure that the detection signal does not suddenly change during the switching process, the signal processing algorithm of the microprocessor module 4 is also constantly adjusted and updated: where M t and t are the number of turned on rows and columns of the humidity sensor array during the switching process.

[0042] Through such an array sensor and humidity detection method, the sensor system can flexibly adjust its detection scheme according to the environment state. When the environment is stable, the sensitivity performance is maximized to improve the detection quality; when the environment changes suddenly, the dynamic response performance is maximized to ensure the comprehensiveness and accuracy of environmental detection.

[0043] The environmental monitoring module 2 mainly consists of four standard temperature sensors, and the sensor array is arranged in each direction of the system, which can accurately monitor the current environment of the system and bring the environmental parameters into the sensor equation to compensate the test data of the array humidity sensor module 1.

[0044] The input instruction module 3 can adjust the humidity detection strategy by setting the temperature and humidity threshold and the criterion time, so as to realize the optimal sensor performance in different test environments. The setting mode can be realized by the modes of key setting, wired communication or wireless communication.

[0045] The signal output module 5 can display the real-time temperature information, humidity information and environmental state change of the system. The display mode can be realized by the modes of display screen, indicator light, wired communication or wireless communication.

[0046] The microprocessor module 4 mainly includes the functions of calculating the humidity value measured by the humidity sensor array, scanning or shutting down the sensor array according to the environmental state, switching the sensor test algorithm under different arrays, calculating the temperature value measured by the temperature sensor, temperature compensation for the temperature value measured by the humidity sensor, processing the input instruction and transmitting the processed signal to the signal output module 5.

[0047] The above specific description further describes the purpose, technical scheme and beneficial effects of the application. It should be understood that the above description is only a specific embodiment of the application and is not used to limit the protection scope of the application. Any modification, equivalent replacement, improvement, etc. within the spirit and principles of the application shall be included in the protection scope of the application.

Claims

1. A scanning array humidity sensor, characterized in that: The system includes an array-type humidity sensor module, an environmental monitoring module, an input command module, a microprocessor module, a signal output module, and a power supply module. The array-type humidity sensor module is the core of the system, used to provide high-performance humidity measurement and to interact and communicate with the microprocessor module. The environmental monitoring module is used to monitor the current environmental status of the system and to interact and communicate with the microprocessor module. The input command module is used to input decision command signals to the microprocessor module based on the current environmental status. The microprocessor module processes various signals in the system and transmits the processing results to the signal output module; the signal output module outputs and displays the ambient humidity and temperature information monitored by the system; the power supply module supplies power to the system. The array-type humidity sensor module consists of M*N interdigitated capacitive humidity sensors of the same size, material, and structure, where M is the number of rows of the array-type humidity sensors and N is the number of columns of the array-type humidity sensors. The left electrodes of each row of humidity sensors in the M rows are connected in sequence to form M circuits to be turned on, and the right electrodes of each column of humidity sensors in the N columns are connected in sequence to form N circuits to be scanned, for a total of M+N circuits. The input instruction module can adjust the humidity detection strategy by setting temperature and humidity thresholds and criterion time, so as to achieve optimal sensor performance under different test environments. The microprocessor module functions to calculate the ambient humidity value measured by the humidity sensor array and to scan or turn off the sensor array according to the environmental conditions.

2. The scanning array humidity sensor as described in claim 1, characterized in that: Based on the sensitivity characteristics of interdigital capacitive humidity sensors, parallel connection of sensors is equivalent to increasing the basic capacitance value of the sensors, which can improve the sensitivity of the sensors, but reduces their dynamic response time performance to some extent; reducing the number of parallel sensors can improve the dynamic response performance of the system, but sacrifices its static sensitivity characteristics.

3. A scanning array humidity sensor as described in claim 2, characterized in that: The environmental monitoring module mainly consists of S standard temperature sensors, which form a sensor array and are arranged in various directions of the system. While accurately monitoring the current environmental status of the system over a wide range, the environmental parameters are incorporated into the microprocessor sensor humidity detection equation to compensate for the array humidity sensor test data. The signal output module can display the system's real-time temperature information, humidity information, and changes in environmental conditions; The microprocessor module also includes functions such as switching the sensor humidity detection algorithm under different arrays; calculating the temperature value measured by the temperature sensor; performing temperature compensation on the ambient humidity value measured by the humidity sensor; processing input commands; and transmitting the processed signal to the signal output module.

4. A scanning array humidity detection method, implemented based on a scanning array humidity sensor as described in claim 1, 2, or 3, characterized in that: Includes the following steps, S1: Use the input instruction module to set the thresholds α and β for the system to allow the ambient temperature and humidity parameters to change within each criterion time, as well as the criterion time t; S2: M circuits to be turned on and N circuits to be scanned in the conductive array humidity sensor system; the ambient temperature and humidity status of the system are observed in real time through the signal output module; at this time, the temperature test information of the system is measured by the environmental monitoring module, and the humidity test information is measured by the M*N humidity sensors connected in parallel; S3: When the environmental changes are relatively stable, i.e., ΔT≤α℃ and ΔH≤βRH%, the humidity sensor continues to be tested in its current state. At this time, since the environmental changes are relatively small, the system does not prioritize dynamic response time performance. The array sensors are connected in parallel to perform humidity tests, maximizing the system's humidity-sensing area and increasing the system's basic capacitance while maximizing the system's sensitivity performance. Here, ΔT and ΔH are the changes in the ambient temperature and humidity parameters monitored by the system within each criterion time t, respectively; ℃ and RH% are the units of Celsius and relative humidity, respectively. S4: When the environment in which the sensor is located changes drastically, i.e. ΔT>α℃ or ΔH>βRH%, the dynamic response performance of the sensor needs to be closely monitored. By scanning the humidity sensor array through the system, the sensor array is turned on and off, and the microprocessor signal processing algorithm is continuously adjusted to ensure that the detection signal does not change abruptly during the switching process, thereby improving the dynamic response performance of the system.

5. The scanning array humidity detection method as described in claim 4, characterized in that: The implementation method of S4 is as follows: S41: When the system detects environmental information as ΔT>α℃ or ΔH>βRH% within a certain time t, the N-1 column scanning circuit of the array sensor is turned off in the order of N, N-1, ..., 2, and then the M-1 row conduction circuit of the array sensor is turned off in the order of M, M-1, ..., 2, until the system works using the last remaining humidity sensor. S42: When the system shuts down a certain number of sensors, and the environmental information detected within a certain time t satisfies ΔT≤α℃ and ΔH≤βRH%, then the sensor array is gradually turned on. First, the M-1 rows of the array sensors are turned on sequentially in the order of 2, ..., M-1, M; then the N-1 columns of the array sensors are scanned sequentially in the order of 2, ..., N-1, N; until a certain state is scanned and the system detects that the environmental ΔT>α℃ or ΔH>βRH% within time t, the system performs step S41 to gradually reduce the number of sensors connected in parallel. S43: During the system's scanning of the humidity sensor array and the process of turning the sensors on and off, the system continuously adjusts the signal processing algorithm using the microprocessor module. When the system begins high-sensitivity detection using M*H humidity sensors, the relationship between the microprocessor input signal (the capacitance value C of the humidity sensor array) and the output signal (the relative humidity value H detected by the system) is H = τC + εT, where τ is the proportional coefficient of the microprocessor module's signal processing algorithm, T is the current ambient temperature, and ε is the temperature compensation proportional coefficient of the microprocessor module. When the system detects a change in the environmental state and begins scanning the sensor array, the microprocessor module's signal processing algorithm is continuously adjusted and updated to ensure that the detection signal does not change abruptly during the switching process. Where M t and N t These represent the number of rows and columns of the humidity sensor array that are active during the switching process.

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