A kind of processing flexible polymer low-energy ion beam high-efficiency wide-range transmission device

Abstract

The application discloses a kind of processing flexible polymer low-energy ion beam high-efficiency wide-range transmission device, it is related to plasma transmission technical field, including transmission pipeline, coaxial coil is sleeved on transmission pipeline, one end of transmission pipeline is used to be connected with plasma source, transmission pipeline is connected with transmission pipeline power supply, and coaxial coil is connected with coaxial coil power supply;Transmission pipeline is also provided with axial wire package, and axial wire package is connected with axial wire package power supply;Axial wire package includes the first axial wire package, second axial wire package and third axial wire package that are sequentially arranged, and the first axial wire package is close to plasma source setting;The direction of magnetic force line generated by first axial wire package and third axial wire package is perpendicular to the axial direction of transmission pipeline, and the direction of magnetic force line generated by second axial wire package is perpendicular to the geometric center plane of transmission pipeline.The application solves the problems of low transmission efficiency and narrow transmission range of polymer surface magnetic filtering in the prior art.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of plasma transmission, in particular to a kind of processing flexible polymer low-energy ion beam high-efficiency wide-range transmission device. BACKGROUND

[0002] Polymer is also called polyadduct, the product formed by a monomer through polymerization (polyaddition) reaction. The molecule has repeating structural units, and the low molecular weight is called oligomer, such as trioxane etc.;The high molecular weight, up to several thousand or even several million, is called high polymer or high molecular compound. High polymer has two types of natural products and artificial synthesis. Natural high polymer, such as protein is the polymer of amino acid, starch and cellulose is the polymer of cyclic polyhydroxy (sugar) etc. Synthesis high polymer has many types, and product application is very wide, such as polyvinyl chloride and polystyrene plastic, resin, polyester and rubber etc.

[0003] In the prior art, the transmission efficiency of polymer plasma transmission technology is deviated, and the effective range is narrow.

[0004] Therefore, it is urgent to develop a new kind of processing flexible polymer low-energy ion beam high-efficiency wide-range transmission device to solve the above problems existing in the prior art. SUMMARY

[0005] The purpose of the present application is to provide a kind of processing flexible polymer low-energy ion beam high-efficiency wide-range transmission device to solve the problems of low transmission efficiency and narrow transmission range of polymer surface magnetic filtering in the prior art.

[0006] To achieve the above purpose, the present application provides the following scheme: the present application provides a kind of processing flexible polymer low-energy ion beam high-efficiency wide-range transmission device, including transmission pipeline, coaxial coil is sleeved on the transmission pipeline, one end of the transmission pipeline is used to connect with plasma source, the transmission pipeline is connected with transmission pipeline power supply, the coaxial coil is connected with coaxial coil power supply;The transmission pipeline is also provided with axial wire package, and the axial wire package is connected with axial wire package power supply;The axial wire package includes first axial wire package, second axial wire package and third axial wire package arranged in sequence, and the first axial wire package is close to the plasma source;The magnetic force line direction generated by the first axial wire package and the third axial wire package is perpendicular to the axial direction of the transmission pipeline, and the magnetic force line direction generated by the second axial wire package is perpendicular to the geometric center plane of the transmission pipeline.

[0007] Preferably, the transmission pipeline is copper transmission pipeline, and the coaxial coil adopts coaxial copper coil.

[0008] Preferably, the copper transmission pipeline is a bend pipe, the inner diameter of the copper transmission pipeline is 180-250 mm, the wall thickness is 8-15 mm, and the bending angle is 60-120 degrees.

[0009] Preferably, the transmission pipeline power supply is a 24V power supply, the copper transmission pipeline is connected to the positive electrode of the transmission pipeline power supply, and the negative electrode of the transmission pipeline power supply is grounded.

[0010] Preferably, the outer side of the coaxial copper coil is provided with insulating paint, and the two ends of the coaxial copper coil are respectively connected to the positive electrode and the negative electrode of the coaxial coil power supply through a lead wire; the coaxial coil power supply is a direct current power supply, and the current is 0-20A.

[0011] Preferably, the axial wire package power supply connected to the first axial wire package and the third axial wire package is an alternating current power supply, the current of the alternating current power supply is-10-10A, and the frequency is 1-100Hz.

[0012] Preferably, the axial wire package power supply connected to the second axial wire package is a resonant high-frequency power supply, the current of the resonant high-frequency power supply is 0.01-1KA, and the frequency is 0.01-10KHz.

[0013] Preferably, an inlet flange is arranged at the inlet of the copper transmission pipeline for connecting with a plasma source, and an outlet flange is arranged at the outlet of the copper transmission pipeline.

[0014] Preferably, the first axial wire package is arranged at the inlet of the copper transmission pipeline and is parallel to the inlet flange, the second axial wire package is arranged at the geometric center of the copper transmission pipeline, and the third axial wire package is arranged at the outlet of the copper transmission pipeline and is parallel to the outlet flange.

[0015] Preferably, the geometric center lines of the first axial wire package, the second axial wire package and the third axial wire package intersect at the curvature center of the copper transmission pipeline.

[0016] The present application has the following beneficial technical effects compared with the prior art:

[0017] 1. Adding a scanning first axial wire package and a third axial wire package to the original transmission wire package: the scanning first axial wire package is arranged close to the plasma source, and after being led out to the inlet of the copper transmission pipeline, it can effectively reduce the local plasma density and greatly reduce the number of ions entering the inlet of the copper transmission pipeline due to collision under high plasma density.

[0018] 2. A second axial wire package is arranged at the geometric center of the copper transmission pipeline, a resonant high-frequency strong current is passed through, intermittent energy is provided for the plasma, the ion energy in the plasma is improved, and support is provided for the interface bonding strength of the subsequent flexible insulating polymer.

[0019] 3. The third axial coil is arranged at the outlet of the copper transmission pipeline, which can greatly increase the ion beam spot size from 200 to 400-520 mm, and meet the surface treatment of flexible polymer with a width of 250-510 mm. BRIEF DESCRIPTION OF DRAWINGS

[0020] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings needed in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor on the basis of these drawings.

[0021] Figure 1 Structure diagram of the low-energy ion beam high-efficiency wide-range transmission device for processing flexible polymer according to the present application;

[0022] Figure 2 Top view and sectional view of the first axial coil and the third axial coil according to the present application;

[0023] Figure 3 Top view and sectional view of the second axial coil according to the present application;

[0024] Figure 4 Schematic diagram of magnetic field generated by the first axial coil and the third axial coil according to the present application (pipeline cross section);

[0025] Figure 5 Schematic diagram of magnetic field generated by the second axial coil according to the present application (pipeline cross section);

[0026] Figure 6 Beam spot uniformity test diagram according to the present application;

[0027] In the drawings: 101, copper transmission pipeline; 102, coaxial copper coil; 103, first axial coil; 104, second axial coil; 105, third axial coil; 106, plasma source; 201, first coil base; 202, first coil body; 301, second coil body; 302, second coil base; 401, first magnetic line; 501, second magnetic line. DETAILED DESCRIPTION

[0028] The technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some embodiments of the present application, not all embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the present application.

[0029] The purpose of this invention is to provide a high-efficiency, wide-range transmission device for processing low-energy ion beams of flexible polymers, so as to solve the problems of low transmission efficiency and narrow transmission range of magnetic filtering on polymer surfaces in the prior art.

[0030] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0031] Example 1

[0032] like Figures 1-5 As shown, this embodiment provides a high-efficiency, wide-range transmission device for processing low-energy ion beams of flexible polymers. It includes a transmission pipe with a coaxial coil sleeved on it. One end of the transmission pipe is connected to a plasma source 106. An arc discharge occurs in the plasma source 106 to generate plasma, which is then transmitted through the transmission pipe. The transmission pipe is connected to a power supply, and the coaxial coil is connected to a power supply. In addition to the coaxial coil, this embodiment also includes an axial coil on the transmission pipe, connected to a power supply. The axial coil includes a first axial coil 103, a second axial coil 104, and a third axial coil 105 arranged sequentially. The first axial coil 103 is positioned close to the plasma source 106. The magnetic field lines generated by the first axial coil 103 and the third axial coil 105 are perpendicular to the axial direction of the transmission pipe, while the magnetic field lines generated by the second axial coil 104 are perpendicular to the geometric center plane of the transmission pipe.

[0033] Specifically, such as Figure 4 As shown, the magnetic lines of force of the first axial coil 103 and the third axial coil 105 at the cross-section of the transmission pipe are the first magnetic lines of force 401, which are perpendicular to the axial direction of the transmission pipe; wherein, both the first axial coil 103 and the third axial coil 105 include a first coil base 201 and a first coil body 202, as shown. Figure 2 As shown, the first coil body 202 is arranged around the first coil base 201, and the first coil base 201 is made of magnetic material, such as an iron core.

[0034] And such Figure 5 As shown, the magnetic field lines of the second axial coil 104 at the cross-section of the transmission pipe are the second magnetic field lines 501, which are perpendicular to the geometric center plane of the transmission pipe; wherein, the second axial coil 104 includes a second coil body 301 and a second coil base 302, as shown. Figure 3 As shown, the second coil body 301 is arranged around the second coil base 302, and the second coil base 302 is made of magnetic material, such as an iron core.

[0035] The transmission principle of this embodiment is as follows:

[0036] Plasma is generated in the plasma source 106, guided into the transmission pipe under the action of the coaxial coil and the first axial coil 103, intermittently compressed in the axial direction of the transmission pipe after passing through the coaxial coil and guided to the third axial coil 105 under the action of the second axial coil 104, and scanned out under the action of the third axial coil 105. The plasma source 106 is selected according to the working requirement in the embodiment, and an anode cylinder can be used in the embodiment.

[0037] In the embodiment, the transmission pipe is a copper transmission pipe 101, and the coaxial coil is a coaxial copper coil 102.

[0038] In the embodiment, the copper transmission pipe 101 is a bent pipe, the inner diameter of the copper transmission pipe 101 is 180-250 mm, the wall thickness is 8-15 mm, and the bending angle is 60-120 degrees.

[0039] In the embodiment, the transmission pipe power supply is a 24V power supply, the copper transmission pipe 101 is connected to the positive electrode of the transmission pipe power supply, and the negative electrode of the transmission pipe power supply is grounded.

[0040] In the embodiment, the coaxial copper coil 102 is provided with an insulating paint outer skin, and the two ends of the coaxial copper coil 102 are respectively connected to the positive electrode and the negative electrode of the coaxial coil power supply through a lead wire; the coaxial coil power supply is a direct current power supply, the current is 0-20A, and the number of layers is 1-8.

[0041] In the embodiment, the axial coil power supply connected to the first axial coil 103 and the third axial coil 105 is an alternating current power supply, the current of the alternating current power supply is-10-10A, the frequency is 1-100Hz, and the number of layers is 1-5.

[0042] In the embodiment, the axial coil power supply connected to the second axial coil 104 is a resonant high-frequency power supply, the current of the resonant high-frequency power supply is 0.01-1KA, the frequency is 0.01-10KHz, and the number of layers is 1-3.

[0043] In the embodiment, an inlet flange is arranged at the inlet of the copper transmission pipe 101 for connecting with the plasma source 106, and an outlet flange is arranged at the outlet of the copper transmission pipe 101.

[0044] In the embodiment, the coaxial copper coil 102, the first axial coil 103, the second axial coil 104 and the third axial coil 105 are arranged on the copper transmission pipeline 101; the coaxial copper coil 102 is used to provide a basic magnetic field and guide the transmission of part of the plasma, and the first axial coil 103, the second axial coil 104 and the third axial coil 105 are plasma transmission enhancement coils. The first axial coil 103 is arranged at the entrance of the copper transmission pipeline 101 and is parallel to the entrance flange; the second axial coil 104 is arranged at the geometric center of the copper transmission pipeline 101; and the third axial coil 105 is arranged at the exit of the copper transmission pipeline 101 and is parallel to the exit flange.

[0045] In the embodiment, as shown in Figure 1 the geometric center lines of the first axial coil 103, the second axial coil 104 and the third axial coil 105 are extended to intersect at the curvature center of the copper transmission pipeline 101.

[0046] In the embodiment, the functional sequence of the first axial coil 103, the second axial coil 104 and the third axial coil 105 is scanning, focusing and scanning; the focusing cannot be performed before the scanning; if the second axial coil 104 is arranged at the entrance flange, the following problems exist: 1) unstable arc starting, the arc voltage is too high during the arc starting, exceeding 30 V; 2) poor target material consumption, concentrated in the center of the target material; if the second axial coil 104 is arranged at the exit flange, the following problems exist: 1) too small beam spot diameter, less than 150 mm; 2) the polymer is prone to carbonization after beam current aggregation.

[0047] In the embodiment, S1: Cu plasma is generated in the anode cylinder, and the arc starting current is 60 A;

[0048] S2: the coaxial coil power supply current is 2 A, and the number of layers is 4; the first axial coil 103 and the third axial coil 105 are connected to an alternating current power supply, the current size is-5-5 A, the frequency is 50 Hz, and the number of layers is 2; the second axial coil 104 is connected to a resonance high-frequency power supply, the current size is 0.2 KA, the frequency is 1 KHz, and the number of layers is 2;

[0049] S3: the flexible polymer is discharged from the flange exit with a diameter of 250 mm.

[0050] Embodiment 2

[0051] The embodiment is an improvement based on the embodiment one, and the difference lies in that:

[0052] S1: Cu plasma is generated in the anode cylinder, and the arc starting current is 60 A;

[0053] S2: coaxial coil power current 2A, 4 layers; the first axial wire package 103 and the third axial wire package 105 are connected to the alternating current power supply, the current size is -1-1A, the frequency is 50Hz, and the layer number is 2; the second axial wire package 104 is connected to the resonance high-frequency power supply, the current size is 0.2KA, the frequency is 1KHz, and the layer number is 2;

[0054] S3: flexible polymer off flange outlet diameter 250mm.

[0055] Example 3

[0056] This embodiment is an improvement on the basis of example one, and the difference lies in that:

[0057] S1: Cu plasma is generated in the anode cylinder, and the arc current is 60A;

[0058] S2: coaxial coil power current 2A, 4 layers;

[0059] S3: flexible polymer off flange outlet diameter 250mm.

[0060] As Figure 6 shown, it is a comparison diagram of resistance test after spot punching in examples 1 to 3 (the origin 0 is the geometric center), it can be seen very obviously that when there is no axial wire package, the arc spot is a circular beam spot, the beam spot is directly at about 200mm, the center resistance and the resistance on the side differ by a large multiple, the resistance difference is more than 50 times, and the uniformity is very poor; after increasing the axial wire package current, the arc spot is obviously started to scan, the beam spot is a long strip structure in the transverse direction, the resistance is uniformly distributed within ±300mm, the maximum and minimum resistance difference is not more than 3 times, and the uniform deposition in a large width is well realized.

[0061] It should be noted that for those skilled in the art, it is obvious that the present application is not limited to the details of the above exemplary embodiments, and the present application can be implemented in other specific forms without departing from the spirit or essential characteristics of the present application. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-limiting, the scope of the present application is defined by the appended claims rather than the above description, therefore all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the present application, and any reference signs in the claims should not be regarded as limiting the claims involved.

[0062] In the present application, specific examples are applied to describe the principles and implementation modes of the present application, the above embodiment description is only used to help understand the method and core idea of the present application; at the same time, for those skilled in the art, according to the idea of the present application, the specific implementation mode and application range will be changed. In summary, the content of the specification should not be understood as a limitation of the present application.

Claims

1. A high-efficiency, wide-range transmission device for processing low-energy ion beams of flexible polymers, comprising a transmission pipe, a coaxial coil sleeved on the transmission pipe, one end of the transmission pipe for connection to a plasma source, a transmission pipe power supply connected to the transmission pipe, and a coaxial coil power supply connected to the coaxial coil; characterized in that: The transmission pipeline is also provided with an axial coil, which is connected to an axial coil power supply; the axial coil includes a first axial coil, a second axial coil, and a third axial coil arranged in sequence, with the first axial coil located close to the plasma source; the magnetic field lines generated by the first axial coil and the third axial coil are perpendicular to the axial direction of the transmission pipeline, and the magnetic field lines generated by the second axial coil are perpendicular to the geometric center plane of the transmission pipeline.

2. The high-efficiency, wide-range transmission device for processing flexible polymer low-energy ion beams according to claim 1, characterized in that: The transmission pipe is a copper transmission pipe, and the coaxial coil is a coaxial copper coil.

3. The high-efficiency, wide-range transmission device for processing flexible polymer low-energy ion beams according to claim 2, characterized in that: The copper transmission pipe is a bend, with an inner diameter of 180-250mm, a wall thickness of 8-15mm, and a bending angle of 60-120 degrees.

4. The high-efficiency, wide-range transmission device for processing flexible polymer low-energy ion beams according to claim 2, characterized in that: The power supply for the transmission pipeline is 24V. The copper transmission pipeline is connected to the positive terminal of the power supply, and the negative terminal of the power supply is grounded.

5. The high-efficiency, wide-range transmission device for processing flexible polymer low-energy ion beams according to claim 2, characterized in that: The outer side of the coaxial copper coil is covered with insulating varnish, and the two ends of the coaxial copper coil are respectively connected to the positive and negative terminals of the coaxial coil power supply through a lead; the coaxial coil power supply is a DC power supply with a current of 0-20A.

6. The high-efficiency, wide-range transmission device for processing flexible polymer low-energy ion beams according to claim 1, characterized in that: The power supply for the axial coils connected to the first and third axial coils is an AC power supply with a current of -10 to 10A and a frequency of 1 to 100Hz.

7. The high-efficiency, wide-range transmission device for processing flexible polymer low-energy ion beams according to claim 6, characterized in that: The axial coil power supply connected to the second axial coil is a resonant high-frequency power supply, and the current of the resonant high-frequency power supply is 0.01-1KA and the frequency is 0.01-10KHz.

8. The high-efficiency, wide-range transmission device for processing flexible polymer low-energy ion beams according to claim 3, characterized in that: An inlet flange is provided at the inlet of the copper transmission pipe for connection to the plasma source, and an outlet flange is provided at the outlet of the copper transmission pipe.

9. The high-efficiency, wide-range transmission device for processing flexible polymer low-energy ion beams according to claim 8, characterized in that: The first axial coil is disposed at the inlet of the copper transmission pipeline, parallel to the inlet flange; the second axial coil is disposed at the geometric center of the copper transmission pipeline; and the third axial coil is disposed at the outlet of the copper transmission pipeline, parallel to the outlet flange.

10. The high-efficiency, wide-range transmission device for processing flexible polymer low-energy ion beams according to claim 9, characterized in that: The geometric center extensions of the first axial coil, the second axial coil, and the third axial coil intersect at the center of curvature of the copper transmission pipe.

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