Air floating motion platform

Abstract

An air-floating motion platform includes: a base, a linear motion drive device, an air-floating device, and an air supply device. The air-floating device is movably supported on the base, and the air supply device is disposed on the base, passing through the air-floating device. The linear motion drive device drives the air-floating device to reciprocate linearly on the support surface of the base. The air supply device is in an open state facing the location of the air-floating device, supplying air to the air-floating device, forming an air film between the air-floating device and the support surface of the base, causing the air-floating device to suspend on the support surface of the base. The air supply device gradually closes as it deviates from and eventually leaves the air-floating device. Magnetic preloading increases the stiffness of the air film, and the mechanical switching function formed by the cooperation of the air-floating device and the air supply device achieves air supply without air pipe disturbance during movement, reducing air consumption compared to stationary guide rail air-floating. The air-floating motion platform provided by this invention effectively solves the problems of high air consumption, low air film stiffness, and air pipe disturbance in existing air-floating motion platforms.

Description

Technical Field

[0001] This invention relates to the field of precision motion technology, and more specifically to an air-floating motion platform. Background Technology

[0002] Linear air-bearing motion has advantages such as low motion damping, high precision, and no complex transmission chain, and is widely used in the field of precision motion technology, such as the silicon wafer motion stage of a lithography machine.

[0003] Common types of air-float motion platforms include two types: one uses stationary guide rails for air flotation, where the stationary guide rails continue to spray air even when the motion platform is not on the corresponding stationary guide rail area, resulting in high air consumption and operating costs; the other type supplies air to the motion platform through an air supply pipeline, but the air supply pipeline is still connected to the motion platform. To prevent the air supply pipeline from being frequently bent and damaged, or from affecting other surrounding equipment during the motion process, the motion platform is difficult to move at high speed, resulting in low efficiency and poor reliability. Summary of the Invention

[0004] To address the issues of high air consumption during static air flotation of existing air-float motion platforms and air pipe disturbance during movement with air supply lines, this application provides an air-float motion platform characterized by high air film stiffness, low air consumption, and no air pipe disturbance.

[0005] The technical solution provided by this invention is as follows:

[0006] This invention provides an air-float motion platform, comprising: a base, a linear motion drive device, an air-float device, and an air supply device;

[0007] The air flotation device is movably supported on the base, and the air supply device is disposed on the base through the air flotation device;

[0008] The linear motion drive device drives the air flotation device to reciprocate linearly on the support surface of the base;

[0009] The air supply device is in the open state facing the location of the air flotation device, supplying air to the air flotation device. An air film is formed between the air flotation device and the support surface of the base, so that the air flotation device is suspended on the support surface of the base. The air supply device is gradually closed as it deviates from and moves away from the air flotation device.

[0010] More preferably, the air flotation device and the air supply device cooperate to form a mechanical switch to open the air supply device, so that the air flotation device is free from air pipe disturbance during operation.

[0011] More preferably, the air flotation device includes: an air flotation slider and an air flotation slider magnet; the air supply device includes an air supply pipe; a plurality of magnetic switch assemblies are provided inside the air supply pipe; an air supply pipe magnet is provided above the plurality of magnetic switch assemblies; and a vent hole is provided at the bottom of the air supply pipe relative to the magnetic switch assemblies.

[0012] The air-bearing slider is movably supported on the base, and the air-bearing slider magnet is disposed on the air-bearing slider;

[0013] The air supply pipe passes through the air-float slider and is disposed on the base, with the air supply pipe located above the magnet of the air-float slider;

[0014] The air-float slider magnet, the air supply pipe magnet, and the magnetic switch assembly work together to form the mechanical switch. As the air-float slider moves, the air-float slider magnet attracts the magnetic switch assembly directly above and below it to open the vent of the air supply pipe at its location. The magnetic switch assembly not directly above and below the air-float slider magnet attracts the air supply pipe magnet to close the vent of the air supply pipe at the corresponding location.

[0015] More preferably, the magnetic switch assembly includes: a magnet, a limiting block, a first elastic pad, a second elastic pad, a first elastic sheet, and a second elastic sheet;

[0016] The magnet is disposed inside the gas supply pipe via the first elastic sheet and the second elastic sheet;

[0017] The limiting block is disposed on the magnet;

[0018] The first elastic pad is disposed at the end of the magnet that contacts the magnet of the gas supply pipe;

[0019] The second elastic pad is disposed at the end of the magnet that contacts the air-bearing slider magnet;

[0020] When the magnet is attracted by the magnet of the gas supply pipe, the magnet moves vertically upward with the first elastic sheet and the second elastic sheet as supporting guide rails until the second elastic pad is tightly attached to the bottom of the gas supply pipe and seals the vent hole of the gas supply pipe.

[0021] When the magnet is attracted by the air-floating slider magnet, the magnet moves vertically downward with the first elastic sheet and the second elastic sheet as supporting guide rails until the limiting block confines the magnet inside the air supply pipe, and the second elastic pad disengages from the bottom of the air supply pipe to open the air vent of the air supply pipe.

[0022] More preferably, the gas supply pipe has a limiting step on one side of its inner wall opposite to the limiting block, and the limiting block is limited to the limiting step.

[0023] More preferably, the air-bearing slider has a V-shaped structure, and the base has a V-shaped support surface for supporting the air-bearing slider.

[0024] More preferably, the air-bearing slider includes inclined support plates on both sides and a bottom support plate located between the lower ends of the two inclined support plates;

[0025] The bottom support plate has an air collection groove on the side facing the air supply pipe;

[0026] The inclined support plate has air flotation holes on the outer side of its inclined surface;

[0027] The bottom support plate and the two inclined support plates are respectively provided with ventilation grooves, and the ventilation grooves are connected to the air collection groove and the air flotation hole;

[0028] The gas collecting groove receives the vent hole and vent groove of the gas supply pipe. The gas in the gas supply pipe flows to the air flotation hole through the vent hole, the gas collecting groove and the vent groove, and is ejected through the air flotation hole and acts on the V-shaped support surface of the base, so that an air film is formed between the air flotation slider and the support surface.

[0029] More preferably, the bottom support plate has an air-float slider magnet groove on the side facing the air supply pipe, and the air collection grooves are provided on both sides of the air-float slider magnet groove. The air-float slider magnet is fixedly installed on the air-float slider through the air-float slider magnet groove.

[0030] More preferably, the air-floating slider further includes a cover plate, and the inclined support plate and the bottom support plate are respectively provided with cover plate grooves on the outside of the ventilation groove. The cover plate is placed in the cover plate groove to seal the ventilation groove and prevent gas leakage in the ventilation groove.

[0031] More preferably, the linear motion drive device includes a stator and a mover magnet, the stator is disposed on the base, the mover magnet is disposed on the air buoyancy device, and the stator and mover magnet provide magnetic preload to the air film between the air buoyancy device and the support surface of the base.

[0032] The air flotation platform provided by this invention has at least one of the following beneficial effects:

[0033] 1. The gas supply device and the air flotation device work together so that the gas supply device only supplies gas to the location of the air flotation device, and shuts off the gas supply to the location where the air flotation device is not located, which greatly reduces gas consumption.

[0034] 2. The air-floating slider has a V-shaped structure design, and the support surface of the base also has a V-shaped design. This V-shaped design limits the movement of the V-shaped air-floating slider, giving the moving carrier on the air-floating motion platform anti-tipping characteristics.

[0035] 3. By designing the structure of the air flotation device and the air supply device as a mechanical switch that can open and close the air supply device, tube-free disturbance of the air flotation device during movement is achieved;

[0036] 4. By designing the magnet to move vertically up and down under the magnetic force between the magnet in the gas supply pipeline and the magnet in the air-floating slider, with the flexible elastic sheet as the support rail, the gas supply pipeline can be switched on and off. The overall structure of the switching function is compact, which makes the overall structure of the air-floating motion platform smaller in volume.

[0037] 5. Under the magnetic preload of the stator and mover magnets, the air flotation device and the support surface of the base have high air film stiffness. Attached Figure Description

[0038] Figure 1 This is a schematic diagram of the air-floating motion platform structure;

[0039] Figure 2 This is a diagram of the base structure.

[0040] Figure 3 This is a structural diagram of an air flotation device;

[0041] Figure 4 This is a side view of the air-float slider.

[0042] Figure 5 This is a front view schematic diagram of an air-float slider;

[0043] Figure 6 This is a schematic diagram of the cross-section of the gas supply device;

[0044] Figure 7 This is a structural diagram showing the coordination between the air flotation device and the air supply device.

[0045] Figure 8 This is a schematic diagram showing the interaction between the magnetic switch assembly and the gas supply pipeline.

[0046] Figure 9 This is a schematic diagram showing the gas supply device being shut down.

[0047] Figure 10 A schematic diagram showing the gas supply device in operation. Detailed Implementation

[0048] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the specific implementation methods of the present invention will be described below with reference to the accompanying drawings. Obviously, the drawings described below are merely some embodiments of the present invention. For those skilled in the art, other drawings and other implementation methods can be obtained based on these drawings without any creative effort.

[0049] This application provides an air-floating motion platform, aiming to solve the problems of high air consumption and low air film stiffness in existing motion platforms using static guide rails. It also addresses the issue of air pipe disturbance caused by supplying air to the motion platform via air supply pipelines. The air-floating motion platform provided by this application features high air film stiffness, low air consumption, and no air pipe disturbance.

[0050] like Figure 1 As shown, the air-floating motion platform provided in this application includes a base 100, a linear motion drive device 200, an air-floating device 300, and an air supply device 400. The air-floating device 300 is movably supported on the base 100, and the air supply device 400 is disposed on the base 100, penetrating the air-floating device 300. The linear motion drive device 200 drives the air-floating device 300 to reciprocate linearly on the support surface of the base 100. The air supply device 400 is in an open state directly opposite the location of the air-floating device 300, supplying air to the air-floating device 300. An air film is formed between the air-floating device 300 and the support surface of the base 100, causing the air-floating device 300 to suspend on the support surface of the base 100. The air supply device 400 gradually closes as it deviates from and eventually leaves the air-floating device 300.

[0051] The air-floating motion platform of this application can achieve the functional characteristics of high air film stiffness, low air consumption and no air tube disturbance. The basic structure of the air-floating motion platform of this application will be described in detail in conjunction with the achieved functions.

[0052] The base 100 serves as the support for the entire air-float motion platform, supporting the linear motion drive device 200, the air-float device 300, and the air supply device 400. The structural diagram of the base 100 is shown below. Figure 2 As shown, the base 100 has an installation groove 101 and a support surface 102. The stationary part of the linear motion drive device 200 is fixedly installed in the installation groove 101. The air flotation device 300 is suspended on the support surface 102. The air supply device 400 passes through the air flotation device 300 and is installed on the base 100 through the fixed bracket 500.

[0053] The air-floating motion platform of this application has a cleverly designed structure of air-floating device 300 and air supply device 400. The air-floating device 300 and air supply device 400 work together to form a mechanical switch to open the air supply device 400. Through this mechanical switch, the air-floating motion platform has low air consumption and no air pipe disturbance.

[0054] The structural diagram of the air flotation device 300 is as follows: Figure 3 As shown, the air flotation device 300 includes: an air flotation slider 301 and an air flotation slider magnet 302. The air flotation slider 301 is suspended and supported on the support surface 102. The top of the air flotation slider 301 supports the motion carrier 600 to perform air flotation motion. The air flotation slider magnet 302 is disposed on the air flotation slider 301.

[0055] like Figure 4 and Figure 5 As shown, the air-floating slider 301 includes inclined support plates 3011 on both sides and a bottom support plate 3012 located between the lower ends of the two inclined support plates 3011.

[0056] An air collection groove 3013 is provided on the side of the bottom support plate 3012 facing the air supply device 400;

[0057] The top of the two inclined support plates 3011 is used to support the moving carrier 600, and air flotation holes 3014 are opened on the outer side of the inclined surfaces of the two inclined support plates 3011.

[0058] The bottom support plate 3012 and the two inclined support plates 3011 are respectively provided with ventilation grooves 3015, and the ventilation grooves 3015 are connected to the air collection groove 3013 and the air flotation hole 3014.

[0059] The gas collecting groove 3013 receives the gas supply device 400 and the ventilation groove 3015. The gas in the gas supply device 400 flows to the air flotation hole 3014 through the gas collecting groove 3013 and the ventilation groove 3015. The gas is ejected through the air flotation hole 3014 and acts on the support surface 102 of the base 100, so that an air film is formed between the air flotation slider 301 and the support surface.

[0060] Furthermore, in order to prevent the motion carrier 600 from tipping over during movement, this application designs the air-bearing slider 301 as a V-shaped structure, and the support surface 102 of the base 100 is also designed as a V-shaped support surface. The V-shaped support surface limits the movement of the V-shaped air-bearing slider, so that the motion carrier 600 of the air-bearing motion platform has anti-tipping characteristics.

[0061] In other embodiments, the air-bearing slider 301 can be designed into other shapes and structures according to actual needs, and the shape of the support surface 102 of the base 100 can be designed to match the structural shape of the air-bearing slider 301, as long as the actual needs can be met.

[0062] For further information, please continue to refer to [the relevant resources / references]. Figure 4 and Figure 5 The ventilation groove 3015 includes a circular cross section and a rectangular cross section. The rectangular cross section ventilation groove is connected to the circular cross section ventilation groove. The cross section of the ventilation groove 3015 corresponding to the air flotation hole 3014 and the air collection groove 3013 is circular.

[0063] In other embodiments, the purpose or beneficial effects of the present invention can be achieved by changing the shape of the relevant cross-section or component, and all such changes are considered to be within the scope of protection of the present invention.

[0064] For further information, please refer to [link / reference]. Figure 5 The bottom support plate 3012 has an air-floating slider magnet groove 3016 on the side facing the air supply device 400. Air collection grooves 3013 are provided on both sides of the air-floating slider magnet groove 3016. The air-floating slider magnet 302 is fixedly installed on the air-floating slider 301 through the air-floating slider magnet groove 3016.

[0065] For further information, please refer to [link / reference]. Figure 3 and Figure 4 The air-floating slider 301 also includes a cover plate 3017, an inclined support plate 3011 and a bottom support plate 3012 respectively having cover plate grooves 3018 on the outside of the ventilation groove 3015, the cover plate 3017 covering the cover plate groove 3018 to seal the ventilation groove 3015 and prevent gas leakage in the ventilation groove 3015, for example, by using glue to seal between the cover plate 3017 and the cover plate groove 3018.

[0066] The structural diagram of the gas supply device 400 is as follows: Figure 6 As shown, the gas supply device 400 includes a gas supply pipe 401, a plurality of magnetic switch assemblies 402 are provided inside the gas supply pipe 401, a gas supply pipe magnet 403 is provided above the plurality of magnetic switch assemblies in the gas supply pipe 401, and a vent hole 404 is provided at the bottom of the gas supply pipe 401 relative to the magnetic switch assemblies 402.

[0067] Furthermore, one end of the gas supply pipe 401 is fixedly installed with a gas supply connector via threads, which connects to an external gas source. The gas supply pipe 401 includes a gas supply pipe cover plate 4011 and a gas supply pipe support 4012, which are fixedly connected by screws. A gas supply pipe magnet 403 is fixedly installed below the gas supply pipe cover plate 4011 by adhesive. A magnetic switch assembly 402 is disposed in the cavity formed by the gas supply pipe cover plate 4011 and the gas supply pipe support 4012, located below the gas supply pipe magnet 403. Ventilation holes 404 are respectively opened at the bottom of the gas supply pipe support 4012 corresponding to each magnetic switch assembly 402. The gas supply pipe support 4012 is fixedly installed on the base 100 by a fixing bracket 500.

[0068] The structural diagram of the air flotation device 300 and the air supply device 400 is as follows: Figure 7 As shown, specifically, the gas supply pipe 401 passes through the air-float slider 301 and is mounted on the base 100 via a fixed bracket 500. The gas supply pipe 401 is located above the air-float slider magnet 302.

[0069] The air-float slider magnet 302, the air supply pipe magnet 403, and the magnetic switch assembly 402 cooperate to form a mechanical switch. As the air-float slider magnet 302 moves with the air-float slider 301, it attracts the magnetic switch assembly 402 that is directly above and below it to open the vent 404 of the air supply pipe 401 at its location. The magnetic switch assembly 402 that is not directly above and below the air-float slider magnet 302 attracts the air supply pipe magnet 403 to close the vent 404 at the corresponding position of the air supply pipe 401.

[0070] A schematic diagram of the interaction between the magnetic switch assembly 402 and the gas supply pipe 401 is shown below. Figure 8 As shown, the magnetic switch assembly 402 includes: a magnet 4021, a limiting block 4022, a first elastic pad 4023, a second elastic pad 4024, a first elastic sheet 4025, and a second elastic sheet 4026; wherein, the magnet 4021 can be a magnetic rod, the limiting block 4022, the first elastic pad 4023, and the second elastic pad 4024 are made of rubber and have a certain degree of flexibility, and the first elastic sheet 4025 and the second elastic sheet 4026 can be flexible spring sheets;

[0071] The magnet 4021 is provided with a magnet boss and is magnetized along the axial direction. The magnet 4021 is disposed in the gas supply pipe 401 through the first elastic sheet 4025 and the second elastic sheet 4026. The magnet 4021 is clamped between the first elastic sheet 4025 and the second elastic sheet 4026. The first elastic sheet 4025 and the second elastic sheet 4026 have strong recovery deformation characteristics within a certain bending range. One end of the first elastic sheet 4025 and the second elastic sheet 4026 is fixed to the inner wall of one side of the gas supply pipe 401 by screws, and the other end is coaxially sleeved on the magnet boss of the magnet 4021.

[0072] The limiting block 4022 is coaxially sleeved on the magnet 4021. The limiting block 4022 is closely attached between the first elastic sheet 4025 and the second elastic sheet 4026. The inner wall of the gas supply pipe 401 on one side relative to the limiting block 4022 is provided with a limiting step, and the limiting block 4022 is limited to the limiting step.

[0073] The first elastic pad 4023 is coaxially mounted on the end of the magnet 4021 that contacts the gas supply pipe magnet 403 by adhesive, and is in close contact with the first elastic sheet 4025.

[0074] The second elastic pad 4024 is coaxially mounted on the end of the magnet 4021 that contacts the air-bearing slider magnet 302 by adhesive. The second elastic pad 4024 can be a hollow cylindrical structure. The second elastic pad 4024 is coaxially sleeved on the magnet 4021, and the end face of the second elastic pad 4024 is flush with the end face of the magnet 4021.

[0075] As described above, the mechanical switch formed by the air flotation device 300 and the air supply device 400 can open and close the air supply device 400. A schematic diagram of the mechanical switch closing the air supply device 400 is shown below. Figure 9 As shown in the diagram, the mechanical switch opens the gas supply device 400. Figure 10 As shown.

[0076] Please continue to refer to this. Figure 9 When the magnet 4021 is attracted by the magnet 403 of the air supply pipe, the magnet 4021 moves vertically upward with the first elastic plate 4025 and the second elastic plate 4026 as the support rails until the second elastic pad 4024 is tightly pressed against the bottom of the air supply pipe 401 to seal the air vent 404 of the air supply pipe 401, so as to realize that the air supply pipe 401 gradually closes as it deviates from and leaves the air flotation device 300.

[0077] Please continue to refer to this. Figure 10 When the magnet 4021 is attracted by the air-float slider magnet 302, the magnet 4021 moves vertically downward with the first elastic plate 4025 and the second elastic plate 4026 as the support rail, until the limiting block 4022 limits the magnet 4021 to the air supply pipe 401, and the second elastic pad 4024 disengages from the bottom of the air supply pipe 401 to open the air vent 404 of the air supply pipe 401.

[0078] pass Figure 8 and Figure 9 It can be intuitively seen that by designing the structure of the air flotation device 300 and the air supply device 400, this application forms a mechanical switch, which can realize the closing and opening of the air supply pipeline 401 without air pipe, thereby realizing the control of air consumption and the absence of air pipe disturbance during movement.

[0079] Furthermore, since the air supply is switched on and off by the magnetic force between the magnet 4021 and the air-floating slider magnet 302 in the air supply pipe, the air supply pipe 401 is opened when the air-floating slider magnet 302 approaches the magnet 4021 and gradually closes the air supply pipe 401 when it moves away from the magnet 4021, which greatly reduces the amount of gas consumed.

[0080] Since the magnet 4021 is clamped between the gas supply pipe magnet 403 and the air-bearing slider magnet 302 by the first elastic plate 4025 and the second elastic plate 4026, the magnetic pole arrangement and the magnitude of the magnetic force between them are limited as follows:

[0081] The magnetic pole of the end face of the gas supply pipe magnet 403 facing the magnet 4021 is the S pole, and the magnetic pole of the end face of the magnet 4021 facing the gas supply pipe magnet 403 is the N pole. The magnetic pole of the air float slider magnet 302 facing the magnet 4021 is the N pole, and the magnetic pole of the end face of the magnet 4021 facing the air float slider magnet 302 is the S pole. The magnetic force between the S pole face of the gas supply pipe magnet 403 and the N pole face of the magnet 4021 is less than the magnetic force between the S pole face of the magnet 4021 and the N pole face of the air float slider magnet 302.

[0082] Furthermore, in order to improve the air film stiffness between the air flotation device 300 and the support surface of the base 100, the linear motion drive device 200 is preferably a linear motor. Specifically, the linear motion drive device 200 includes a stator 201 and a mover magnet 202. The stator 201 is fixedly installed in the mounting groove 101 of the base 100 by screws, and the mover magnet 202 is disposed on the air flotation device 300. The stator 201 and the mover magnet 202 provide magnetic preload to the air film between the air flotation device 300 and the support surface of the base 100. This magnetic preload greatly improves the air film stiffness between the air flotation device 300 and the support surface of the base 100.

[0083] For further information, please continue to refer to [the relevant resources / references]. Figure 4 The bottom support plate 3012 has a moving magnet groove 3019 on the side facing the base 100, and the moving magnet 202 is fixedly installed on the air-floating slider 301 through the moving magnet groove 3019.

[0084] The motion carrier 600 is placed between two inclined support plates 3011. The linear motion drive device 200 drives the air-floating slider 301 to reciprocate linearly. When the air-floating slider magnet 302 approaches the magnet 4021, it opens the air supply pipe 401. When it moves away from the magnet 4021, it closes the air supply pipe 401. Therefore, the air-floating motion platform greatly reduces the air consumption. At the same time, since no additional air pipe is needed to supply gas to the air supply pipe 401, compared with the existing air-floating motion platform that uses an additional air pipe for air supply, it achieves air pipe-free disturbance during movement. During the movement, the stator 201 and the mover magnet 202 provide magnetic preload to the air film between the air-floating device 300 and the support surface of the base 100. This magnetic preload greatly improves the air film stiffness between the air-floating device 300 and the support surface of the base 100.

[0085] The working principle of the air-floating motion platform in this application is as follows:

[0086] When there is no air-floating slider magnet 302 below the magnet 4021, the magnet 4021 is attracted by the magnetic force of the air supply pipe magnet 403. The first elastic pad 4023 buffers and dampens the magnet 4021 and the air supply pipe magnet 403. At the same time, the second elastic pad 4024 at the lower end of the magnet 4021 is in close contact with the air supply pipe support 4012, sealing the air vent 404 of the air supply pipe support 4012 and closing the air supply.

[0087] When there is an air-floating slider magnet 302 on the lower periphery of the magnet 4021, the magnet 4021 moves downward under the magnetic force of the larger air-floating slider magnet 302, guided by the first elastic plate 4025 and the second elastic plate 4026, until the limiting block 4022 installed on the magnet 4021 is in close contact with the air supply pipe support 4012, opening the vent 404, so that the gas in the air supply pipe 401 flows to the air-floating hole 3014 through the air collection groove 3013 and the vent 3015, and is ejected from the air-floating hole 3014 and acts on the V-shaped air-floating support surface, so that an air film is formed between the V-shaped air-floating slider 301 and the V-shaped air-floating support surface, and the V-shaped air-floating slider 301 is suspended on the V-shaped air-floating support surface, realizing the air-floating support method of the moving carrier 600, and thus realizing the movement of the moving carrier 600 without air pipe disturbance during movement;

[0088] Under the magnetic force between the gas supply pipe magnet 403 and the air-float slider magnet 302, the magnet 4021 moves vertically up and down with the first elastic plate 4025 and the second elastic plate 4026 as guide rails, realizing the on / off function of gas supply; when the air-float slider magnet 302 approaches the magnet 4021, the gas supply is turned on, and when it moves away from the magnet 4021, the gas supply is turned off, reducing gas consumption.

[0089] The above examples illustrate the present invention only to aid in understanding it and are not intended to limit the scope of the invention. Those skilled in the art can make various simple deductions, modifications, or substitutions based on the principles of this invention.

Claims

1. An air-floating motion platform, characterized in that, include: Base, linear motion drive, air flotation device and air supply device; The air flotation device is movably supported on the base, and the air supply device is disposed on the base through the air flotation device; The linear motion drive device drives the air flotation device to reciprocate linearly on the support surface of the base; The air supply device is in the open state facing the location of the air flotation device, supplying air to the air flotation device. An air film is formed between the air flotation device and the support surface of the base, so that the air flotation device is suspended on the support surface of the base. The air supply device is gradually closed as it deviates from and moves away from the air flotation device. The air flotation device and the air supply device work together to form a mechanical switch to open the air supply device, so that the air flotation device is free from air pipe disturbance during operation. The air flotation device includes an air flotation slider and an air flotation slider magnet. The air supply device includes an air supply pipe. Several sets of magnetic switch assemblies are installed inside the air supply pipe. An air supply pipe magnet is installed above the several sets of magnetic switch assemblies. A vent hole is opened at the bottom of the air supply pipe relative to the magnetic switch assembly. The air-bearing slider is movably supported on the base, and the air-bearing slider magnet is disposed on the air-bearing slider; The air supply pipe passes through the air-float slider and is disposed on the base, with the air supply pipe located above the magnet of the air-float slider; The air-float slider magnet, the air supply pipe magnet, and the magnetic switch assembly work together to form the mechanical switch. As the air-float slider moves, the air-float slider magnet attracts the magnetic switch assembly directly above and below it to open the vent of the air supply pipe at its location. The magnetic switch assembly not directly above and below the air-float slider magnet attracts the air supply pipe magnet to close the vent of the air supply pipe at the corresponding location.

2. The air-floating motion platform as described in claim 1, characterized in that, The magnetic switch assembly includes: a magnet, a limiting block, a first elastic pad, a second elastic pad, a first elastic sheet, and a second elastic sheet; The magnet is disposed inside the gas supply pipe via the first elastic sheet and the second elastic sheet; The limiting block is disposed on the magnet; The first elastic pad is disposed at the end of the magnet that contacts the magnet of the gas supply pipe; The second elastic pad is disposed at the end of the magnet that contacts the air-bearing slider magnet; When the magnet is attracted by the magnet of the gas supply pipe, the magnet moves vertically upward with the first elastic sheet and the second elastic sheet as supporting guide rails until the second elastic pad is tightly attached to the bottom of the gas supply pipe and seals the vent hole of the gas supply pipe. When the magnet is attracted by the air-floating slider magnet, the magnet moves vertically downward with the first elastic sheet and the second elastic sheet as supporting guide rails until the limiting block confines the magnet inside the air supply pipe, and the second elastic pad disengages from the bottom of the air supply pipe to open the air vent of the air supply pipe.

3. The air-floating motion platform as described in claim 2, characterized in that, The gas supply pipe has a limiting step on one side of its inner wall opposite to the limiting block, and the limiting block is limited to the limiting step.

4. The air-floating motion platform as described in claim 3, characterized in that, The air-floating slider has a V-shaped structure, and the base has a V-shaped support surface for supporting the air-floating slider.

5. The air-floating motion platform as described in claim 4, characterized in that, The air-floating slider includes inclined support plates on both sides and a bottom support plate located between the lower ends of the two inclined support plates. The bottom support plate has an air collection groove on the side facing the air supply pipe; The inclined support plate has air flotation holes on the outer side of its inclined surface; The bottom support plate and the two inclined support plates are respectively provided with ventilation grooves, and the ventilation grooves are connected to the air collection groove and the air flotation hole; The gas collecting groove receives the vent hole and vent groove of the gas supply pipe. The gas in the gas supply pipe flows to the air flotation hole through the vent hole, the gas collecting groove and the vent groove, and is ejected through the air flotation hole and acts on the V-shaped support surface of the base, so that an air film is formed between the air flotation slider and the support surface.

6. The air-floating motion platform as described in claim 5, characterized in that, The bottom support plate has an air-float slider magnet groove on the side facing the air supply pipe, and the air collection grooves are provided on both sides of the air-float slider magnet groove. The air-float slider magnet is fixedly installed on the air-float slider through the air-float slider magnet groove.

7. The air-floating motion platform as described in claim 5, characterized in that, The air-floating slider also includes a cover plate. The inclined support plate and the bottom support plate are respectively provided with cover plate grooves on the outside of the ventilation groove. The cover plate is placed in the cover plate groove to seal the ventilation groove and prevent gas leakage in the ventilation groove.

8. The air-floating motion platform as described in claim 1, characterized in that, The linear motion drive device includes a stator and a mover magnet. The stator is disposed on the base, and the mover magnet is disposed on the air buoyancy device. The stator and mover magnets provide magnetic preload to the air film between the air buoyancy device and the support surface of the base.

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