Piezoelectric vibrator and fluid pump

Abstract

The application discloses a piezoelectric vibrator and a fluid pump, and belongs to the technical field of fluid control. The piezoelectric vibrator comprises a frame, a vibrating substrate arranged in the frame, a connecting piece connecting the frame and the vibrating substrate, and a piezoelectric element attached to one side of the vibrating substrate. The vibrating substrate is in a rectangular shape. The connecting piece is provided in multiple numbers. The connecting piece is provided in two groups, and the number of the connecting piece in each group is at least two. The two groups of connecting pieces are arranged on opposite sides of the vibrating substrate, respectively. One end of each connecting piece is connected to the vibrating substrate, and the other end of each connecting piece is connected to the frame. The piezoelectric vibrator can reduce the constraint of the connecting piece on the vibration of the vibrating substrate, can greatly improve the amplitude of the vibrating substrate, and can improve the service life of the connecting piece to a certain extent.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of fluid control, in particular to a piezoelectric vibrator and a fluid pump. BACKGROUND

[0002] The piezoelectric element is an energy conversion element that converts electrical energy into force or deformation using the inverse piezoelectric effect. Some existing fluid pumps use the bending vibration generated by the piezoelectric element to change the volume of the cavity to achieve the purpose of transporting fluid.

[0003] In the existing piezoelectric drive type piezoelectric vibrator, the piezoelectric vibrator includes a piezoelectric element, a frame, a vibration substrate located in the frame, and a connecting piece connecting the vibration substrate and the frame. When an alternating voltage is applied to the piezoelectric element, the vibration substrate generates alternating high-frequency vibration. However, the connecting piece connects the frame and the vibration substrate, and when the vibration substrate vibrates, the connecting piece will constrain the vibration of the vibration substrate. The connecting piece vibrates the vibration substrate, which makes the amplitude of the vibration substrate smaller.

[0004] Therefore, it is necessary to provide a new piezoelectric vibrator and a fluid pump. SUMMARY

[0005] Based on the above problems existing in the prior art, the purpose of the embodiments of the present application is to provide a piezoelectric vibrator that can reduce the constraint of the connecting piece on the vibration of the vibration substrate and improve the service life of the connecting piece.

[0006] To achieve the above-mentioned purpose, the technical scheme adopted by the present application is: a piezoelectric vibrator, comprising a frame, a vibration substrate arranged in the frame, a connecting piece connecting the frame and the vibration substrate, and a piezoelectric element attached to one side of the vibration substrate, the vibration substrate is rectangular, the connecting piece is provided in plurality, the connecting piece is provided in two groups, and the number of each group of connecting pieces is at least two, two groups of connecting pieces are respectively arranged on opposite sides of the vibration substrate, one end of each connecting piece is connected to the vibration substrate, and the other end of each connecting piece is connected to the frame.

[0007] Further, the number of each group of connecting pieces is two.

[0008] Further, the distance from the center of each connecting piece to the edge line closer to the vibration substrate is within the range of one-fifth to one-third of the length of the side of the vibration substrate connected to the connecting piece.

[0009] Further, the distance from the center of each connecting piece to the edge line closer to the vibration substrate is one-fourth of the length of the side of the vibration substrate connected to the connecting piece.

[0010] Further, the number of each group of connecting pieces is four.

[0011] Further, the distance between the center of the four connecting members close to the four end points of the vibrating substrate and the edge line of the vibrating substrate close to the connecting members is within the range of one tenth to one sixth of the length of the side of the vibrating substrate connected to the connecting members.

[0012] Further, the distance between the center of the four connecting members close to the four end points of the vibrating substrate and the edge line of the vibrating substrate close to the connecting members is within the range of one tenth to one sixth of the length of the side of the vibrating substrate connected to the connecting members.

[0013] Further, the distance between the center of the four connecting members close to the four end points of the vibrating substrate and the edge line of the vibrating substrate close to the connecting members is within the range of one tenth to one sixth of the length of the side of the vibrating substrate connected to the connecting members.

[0014] Further, the distance between the center of the four connecting members close to the four end points of the vibrating substrate and the edge line of the vibrating substrate close to the connecting members is within the range of one tenth to one sixth of the length of the side of the vibrating substrate connected to the connecting members.

[0015] The application also provides a fluid pump comprising the piezoelectric vibrator.

[0016] The piezoelectric vibrator provided by the application comprises a frame, a vibrating substrate arranged in the frame, connecting members connecting the frame and the vibrating substrate, and a piezoelectric element attached to one side of the vibrating substrate, wherein the vibrating substrate is rectangular, the connecting members are arranged in multiple groups, the number of connecting members in each group is at least two, the two groups of connecting members are arranged on opposite sides of the vibrating substrate, one end of each connecting member is connected to the vibrating substrate, and the other end of each connecting member is connected to the frame. BRIEF DESCRIPTION OF DRAWINGS

[0017] The application will be further described below in conjunction with the drawings and examples.

[0018] In the drawings: Figure 1 FIG. 1 is an exploded schematic view of the piezoelectric vibrator provided by the first embodiment of the application.

[0019] Figure 2 FIG. 2 is a structural schematic view of the piezoelectric vibrator provided by the first embodiment of the application.

[0020] Figure 3 A simulation schematic diagram of the piezoelectric vibrator provided for the first embodiment of the present application.

[0021] Figure 4 A simulation side view of the piezoelectric vibrator provided for the first embodiment of the present application.

[0022] Figure 5 A structure schematic diagram of the piezoelectric vibrator provided for the second embodiment of the present application.

[0023] Figure 6 A simulation schematic diagram of the piezoelectric vibrator provided for the second embodiment of the present application.

[0024] Figure 7 A simulation side view of the piezoelectric vibrator provided for the second embodiment of the present application.

[0025] Figure 8 A structure schematic diagram of the piezoelectric vibrator provided for the third embodiment of the present application.

[0026] Figure 9 A simulation schematic diagram of the piezoelectric vibrator provided for the third embodiment of the present application.

[0027] Figure 10 A simulation side view of the piezoelectric vibrator provided for the third embodiment of the present application.

[0028] Figure 11 A structure schematic diagram of the piezoelectric vibrator provided for the fourth embodiment of the present application.

[0029] Figure 12 A simulation schematic diagram of the piezoelectric vibrator provided for the fourth embodiment of the present application.

[0030] Figure 13 A simulation side view of the piezoelectric vibrator provided for the fourth embodiment of the present application.

[0031] Figure 14 A structure schematic diagram of the piezoelectric vibrator provided for the fifth embodiment of the present application.

[0032] Figure 15 A simulation schematic diagram of the piezoelectric vibrator provided for the fifth embodiment of the present application.

[0033] Figure 16 A simulation side view of the piezoelectric vibrator provided for the fifth embodiment of the present application.

[0034] Figure 17 A structure schematic diagram of the piezoelectric vibrator provided for the sixth embodiment of the present application.

[0035] Figure 18 A simulation schematic diagram of the piezoelectric vibrator provided for the sixth embodiment of the present application.

[0036] Figure 19A simulation side view of the piezoelectric vibrator provided for Embodiment 6 of the present application.

[0037] Figure 20 A structure diagram of the piezoelectric vibrator provided for Embodiment 7 of the present application.

[0038] Figure 21 An exploded diagram of the piezoelectric vibrator provided for Embodiment 7 of the present application.

[0039] Figure 22 A simulation diagram of the piezoelectric vibrator provided for Embodiment 7 of the present application.

[0040] Figure 23 A simulation side view of the piezoelectric vibrator provided for Embodiment 7 of the present application.

[0041] Figure 24 A structure diagram of the piezoelectric vibrator provided for Embodiment 8 of the present application.

[0042] Figure 25 A simulation diagram of the piezoelectric vibrator provided for Embodiment 8 of the present application.

[0043] Figure 26 A simulation side view of the piezoelectric vibrator provided for Embodiment 8 of the present application.

[0044] Figure 27 A structure diagram of the piezoelectric vibrator provided for Embodiment 9 of the present application.

[0045] Figure 28 A simulation diagram of the piezoelectric vibrator provided for Embodiment 9 of the present application.

[0046] Figure 29 A simulation side view of the piezoelectric vibrator provided for Embodiment 9 of the present application.

[0047] Figure 30 A structure diagram of the piezoelectric vibrator provided for Embodiment 10 of the present application.

[0048] Figure 31 A simulation diagram of the piezoelectric vibrator provided for Embodiment 10 of the present application.

[0049] Figure 32 A simulation side view of the piezoelectric vibrator provided for Embodiment 10 of the present application.

[0050] In the drawings, reference numerals:

[0051] piezoelectric vibrator 100;

[0052] frame 1, vibration substrate 2, connecting member 3, piezoelectric element 4. DETAILED DESCRIPTION

[0053] In order to make the technical problems to be solved by the present application, technical solutions and beneficial effects clearer, the present application will be further described in detail below with reference to the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and not intended to limit the present application.

[0054] It should be noted that when an element is referred to as being "connected to" or "set on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0055] In the description of the present application, it should be noted that unless otherwise explicitly specified and limited, the terms "mounting", "connection", "linking" should be understood in a broad sense, for example, it can be fixed connection, or detachable connection, or integral connection; it can be mechanical connection, or electrical connection; it can be direct connection, or indirect connection through an intermediate medium, or internal communication of two elements or interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0056] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application.

[0057] Throughout the specification, reference to "one embodiment" or "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one embodiment of the application. Therefore, the phrases "in one embodiment", "in some embodiments", or "in some embodiments" appearing in various places throughout the specification are not all referring to the same embodiment. Furthermore, particular features, structures, or characteristics can be combined in any suitable manner in one or more embodiments.

[0058] Embodiment one

[0059] Now a fluid pump is provided for the embodiment of the present application, which comprises a piezoelectric vibrator 100 installed inside the fluid pump. As shown in Figure 1As shown, the piezoelectric vibrator 100 provided in this embodiment of the invention includes a frame 1, a vibrating substrate 2 disposed within the frame 1, a connector 3 connecting the frame 1 and the vibrating substrate 2, and a piezoelectric element 4 attached to one side of the vibrating substrate 2. The frame 1 is fixedly installed and does not vibrate during operation. The frame 1 is made of stainless steel. The vibrating substrate 2 is installed in the center of the frame 1 and will bend due to high-frequency vibration generated by the piezoelectric element 4. Multiple connectors 3 are provided, with two sets of connectors 3, and each set of connectors 3 contains at least two connectors 3. The two sets of connectors 3 are respectively disposed on opposite sides of the vibrating substrate 2. One end of each connector 3 is connected to the vibrating substrate 2, and the other end is connected to the frame 1. The frame 1 is rectangular. The connectors 3 are used to reduce the constraint of the vibrating substrate 2 on the frame 1 while connecting the vibrating substrate 2 to the frame 1. The piezoelectric element 4 is adapted to the shape of the vibrating substrate 2 and is attached to one side of the vibrating substrate 2. The piezoelectric element 4 is a piezoelectric ceramic, and the material of the piezoelectric ceramic can be P4 material. When an alternating voltage is applied to the piezoelectric element 4, the piezoelectric element 4 drives the vibrating substrate 2 to generate high-frequency vibration, thereby exhibiting a continuous bending state.

[0060] Please see Figures 2-4 In Embodiment 1 of the present invention, the vibrating substrate 2 is rectangular, the piezoelectric element 4 is adapted to the shape of the vibrating substrate 2, and four connectors 3 are provided, which are evenly distributed on opposite sides of the vibrating substrate 2. The length of the side connecting the vibrating substrate 2 to the connector 3 is defined as 'a', and the distance from the center of the connector 3 to the nearest edge of the vibrating substrate 2 is defined as 'b'. The distance 'b' from the center of the four connectors 3 to the nearest edge of the vibrating substrate 2 is one-quarter of the length 'a' of the side connecting the vibrating substrate 2 to the connector 3, i.e., b = 1 / 4a.

[0061] In this embodiment, the piezoelectric oscillator 100 is simulated using the software COMSOL. The operation steps are as follows: model wizard, select piezoelectric, solid, characteristic frequency, import file, select substrate and ceramic material, set solid mechanical parameters, set electrostatic parameters, and calculate characteristic frequency.

[0062] In this embodiment, 15Vpp is connected to both ends of the piezoelectric element 4, and the amplitude is 14.9. For example... Figure 3 As shown, when the vibrating substrate 2 generates high-frequency vibration, there exists a range with a relatively small amplitude within the vibrating substrate 2 (i.e., Figure 3 The white area 5 of the vibrating substrate 2 shows that the smaller amplitude range of the vibrating substrate 2 reflects the constraint effect of the connecting member 3 on the vibrating substrate 2. The smaller amplitude range of the vibrating substrate 2 is roughly on the same straight line as the connecting members 3 located on both sides. The smaller amplitude range of the vibrating substrate 2 forms two parallel straight lines, such as... Figure 4A side view of the piezoelectric vibrator 100 when high-frequency vibration is generated on the vibrating substrate 2 shows the degree of bending of the vibrating substrate 2 at its maximum amplitude. At this time, the constraint of the connector 3 on the vibrating substrate 2 is small, which can increase the amplitude of the vibrating substrate 2 to a greater extent, thereby increasing the flow rate of the fluid pump.

[0063] Example 2

[0064] like Figure 5 As shown, the piezoelectric vibrator 100 provided in Embodiment 2 differs from the piezoelectric vibrator 100 provided in Embodiment 1 only in the connection position of the connector 3. In this embodiment, the vibrating substrate 2 is rectangular, the piezoelectric element 4 is adapted to the shape of the vibrating substrate 2, and four connectors 3 are provided, which are evenly distributed on opposite sides of the vibrating substrate 2. The length of the side of the vibrating substrate 2 connected to the connector 3 is set as a, and the distance from the center of the connector 3 to the edge closest to the vibrating substrate 2 is set as b. The distance b from the center of the four connectors 3 to the edge closest to the vibrating substrate 2 is one-third of the length a of the side of the vibrating substrate 2 connected to the connector 3, that is, b = 1 / 3a.

[0065] In this embodiment, the piezoelectric oscillator 100 is simulated using the software COMSOL. The operation steps are as follows: model wizard, select piezoelectric, solid, characteristic frequency, import file, select substrate and ceramic material, set solid mechanical parameters, set electrostatic parameters, and calculate characteristic frequency.

[0066] In this embodiment, as Figure 6 As shown, when the vibrating substrate 2 generates high-frequency vibration, there exists a range with a relatively small amplitude within the vibrating substrate 2 (i.e., Figure 6 The white area 5 of the vibrating substrate 2 shows that the smaller amplitude range of the vibrating substrate 2 reflects the constraint effect of the connecting member 3 on the vibrating substrate 2, and the smaller amplitude range of the vibrating substrate 2 is elliptical. Figure 7 A side view of the piezoelectric vibrator 100 when high-frequency vibration is generated on the vibrating substrate 2 shows the degree of bending of the vibrating substrate 2 at its maximum amplitude.

[0067] Example 3

[0068] like Figure 8 As shown, the piezoelectric vibrator 100 provided in Embodiment 3 differs from the piezoelectric vibrator 100 provided in Embodiment 1 only in the connection position of the connector 3. In this embodiment, the vibrating substrate 2 is rectangular, the piezoelectric element 4 is adapted to the shape of the vibrating substrate 2, and four connectors 3 are provided, which are evenly distributed on opposite sides of the vibrating substrate 2. The length of the side of the vibrating substrate 2 connected to the connector 3 is set as a, and the distance from the center of the connector 3 to the edge closest to the vibrating substrate 2 is set as b. The distance b from the center of the four connectors 3 to the edge closest to the vibrating substrate 2 is one-eighth of the length a of the side of the vibrating substrate 2 connected to the connector 3, that is, b = 1 / 8a.

[0069] In this embodiment, the piezoelectric vibrator 100 is simulated by software COMSOL, and the operation steps are model wizard, selecting piezoelectric, solid, characteristic frequency, importing file, selecting substrate and ceramic material, setting solid mechanics parameters, setting electrostatic parameters, and calculating characteristic frequency.

[0070] In this embodiment, 15vpp is connected to both ends of the piezoelectric element 4, and the amplitude is 4.25. As shown in Figure 9 , when the vibrating substrate 2 generates high-frequency vibration, there is a smaller amplitude range in the vibrating substrate 2 (i.e. Figure 9 the white area 5 of the vibrating substrate 2), and the smaller amplitude range of the vibrating substrate 2 can reflect the constraint effect of the connecting piece 3 on the vibrating substrate 2, and the smaller amplitude range of the vibrating substrate 2 is X-shaped. As Figure 10 , when the vibrating substrate 2 generates high-frequency vibration, the side view of the piezoelectric vibrator 100 shows the bending degree of the vibrating substrate 2 at the maximum amplitude.

[0071] In summary, in the above-mentioned embodiment one, embodiment two and embodiment three, the vibrating substrate 2 is rectangular, the number of each group of connecting pieces 3 is two, that is, the connecting piece 3 is provided with four, the length of the side of the vibrating substrate 2 connected to the connecting piece 3 is a, and the distance between the center of the connecting piece 3 and the edge line of the vibrating substrate 2 closer to the connecting piece 3 is b. When the distance b between the center of the four connecting pieces 3 and the edge line of the vibrating substrate 2 closer to the connecting piece 3 is one-fourth of the length a of the side of the vibrating substrate 2 connected to the connecting piece 3, that is, b = 1 / 4a, at this time, the amplitude of the vibrating substrate 2 is the largest and the vibrating substrate 2 can bend and vibrate along the connecting line of the connecting piece 3. The applicant has obtained through a large number of experiments: when the distance b between the center of the four connecting pieces 3 and the edge line of the vibrating substrate 2 closer to the connecting piece 3 is one-fifth to one-third of the length a of the side of the vibrating substrate 2 connected to the connecting piece 3, that is, 1 / 5a ≤ b ≤ 1 / 3a, at this time, the constraint of the connecting piece 3 on the vibrating substrate 2 is smaller, which can greatly improve the amplitude of the vibrating substrate 2, thereby improving the flow of the fluid pump.

[0072] Embodiment four

[0073] As Figure 11As shown, the piezoelectric vibrator 100 provided in Embodiment Four differs from the piezoelectric vibrator 100 provided in Embodiment One in the number and position of the connecting members 3. In this embodiment, the vibration substrate 2 is rectangular, the piezoelectric element 4 is adapted to the shape of the vibration substrate 2, and the connecting members 3 are provided in eight, with four connecting members symmetrically arranged on each side of the vibration substrate 2. The length of the side of the vibration substrate 2 connected to the connecting members 3 is set as a, the distance from the center of the four connecting members 3 close to the four end points of the vibration substrate 2 to the closer edge line of the vibration substrate 2 is set as b, and the distance from the center of the four connecting members 3 far from the four end points of the vibration substrate 2 to the closer edge line of the vibration substrate 2 is set as d. The distance b from the center of the four connecting members 3 close to the four end points of the vibration substrate 2 to the closer edge line of the vibration substrate 2 is one sixth of the length a of the side of the vibration substrate 2 connected to the connecting members 3, i.e. b = 1 / 6a, and the distance d from the center of the four connecting members 3 far from the four end points of the vibration substrate 2 to the closer edge line of the vibration substrate 2 is one third of the length a of the side of the vibration substrate 2 connected to the connecting members 3, i.e. d = 1 / 3a.

[0074] In this embodiment, the piezoelectric vibrator 100 is simulated by software COMSOL, and the operation steps are model wizard, selection of piezoelectric, solid, characteristic frequency, import file, selection of substrate and ceramic material, setting of solid mechanics parameters, setting of electrostatic parameters, and calculation of characteristic frequency.

[0075] In this embodiment, the piezoelectric vibrator 100 is simulated by software COMSOL, and the operation steps are model wizard, selection of piezoelectric, solid, characteristic frequency, import file, selection of substrate and ceramic material, setting of solid mechanics parameters, setting of electrostatic parameters, and calculation of characteristic frequency. Figure 12 As shown, when the vibration substrate 2 generates high-frequency vibration, there is a range with smaller amplitude in the vibration substrate 2 (i.e. the white area 5 in the vibration substrate 2), and the range with smaller amplitude of the vibration substrate 2 can reflect the constraint effect of the connecting members 3 on the vibration substrate 2, and the range with smaller amplitude of the vibration substrate 2 is approximately in the shape of two circles. Figure 12 As shown, when the vibration substrate 2 generates high-frequency vibration, there is a range with smaller amplitude in the vibration substrate 2 (i.e. the white area 5 in the vibration substrate 2), and the range with smaller amplitude of the vibration substrate 2 can reflect the constraint effect of the connecting members 3 on the vibration substrate 2, and the range with smaller amplitude of the vibration substrate 2 is approximately in the shape of two circles. Figure 13 As shown, when the vibration substrate 2 generates high-frequency vibration, there is a range with smaller amplitude in the vibration substrate 2 (i.e. the white area 5 in the vibration substrate 2), and the range with smaller amplitude of the vibration substrate 2 can reflect the constraint effect of the connecting members 3 on the vibration substrate 2, and the range with smaller amplitude of the vibration substrate 2 is approximately in the shape of two circles.

[0076] Embodiment Five

[0077] As shown, when the vibration substrate 2 generates high-frequency vibration, there is a range with smaller amplitude in the vibration substrate 2 (i.e. the white area 5 in the vibration substrate 2), and the range with smaller amplitude of the vibration substrate 2 can reflect the constraint effect of the connecting members 3 on the vibration substrate 2, and the range with smaller amplitude of the vibration substrate 2 is approximately in the shape of two circles. Figure 14As shown, the piezoelectric vibrator 100 provided in Embodiment 5 differs from the piezoelectric vibrator 100 provided in Embodiment 1 in that the number and connection positions of the connectors 3 are different. In this embodiment, the vibrating substrate 2 is rectangular, the piezoelectric element 4 is adapted to the shape of the vibrating substrate 2, and eight connectors 3 are provided, with four connectors symmetrically arranged on both sides of the vibrating substrate 2. The length of the side of the vibrating substrate 2 connecting to the connectors 3 is set as 'a', the distance from the center of the four connectors 3 closest to the four endpoints of the vibrating substrate 2 to the nearest edge of the vibrating substrate 2 is 'b', and the distance from the center of the four connectors 3 far from the four endpoints of the vibrating substrate 2 to the nearest edge of the vibrating substrate 2 is 'd'. The distance 'b' from the center of the four connectors 3 closest to the four endpoints of the vibrating substrate 2 to the nearest edge of the vibrating substrate 2 is one-eighth of the length 'a' of the side of the vibrating substrate 2 connecting to the connectors 3, i.e., b = 1 / 8a, and the distance 'd' from the center of the four connectors 3 far from the four endpoints of the vibrating substrate 2 to the nearest edge of the vibrating substrate 2 is three-eighths of the length 'a' of the side of the vibrating substrate 2 connecting to the connectors 3, i.e., d = 3 / 8a.

[0078] In this embodiment, the piezoelectric oscillator 100 is simulated using the software COMSOL. The operation steps are as follows: model wizard, select piezoelectric, solid, characteristic frequency, import file, select substrate and ceramic material, set solid mechanical parameters, set electrostatic parameters, and calculate characteristic frequency.

[0079] A 15Vpp is connected to both ends of the piezoelectric element 4, resulting in an amplitude of 9.44. For example... Figure 15 As shown, when the vibrating substrate 2 generates high-frequency vibration, there exists a range with a relatively small amplitude within the vibrating substrate 2 (i.e., Figure 15 In the white area 5 of the vibrating substrate 2, the smaller amplitude range of the vibrating substrate 2 reflects the constraint effect of the connecting member 3 on the vibrating substrate 2. The smaller amplitude range of the vibrating substrate 2 is approximately represented by four lines. At this time, the constraint of the connecting member 3 on the vibrating substrate 2 is relatively small, which can increase the amplitude of the vibrating substrate 2 to a greater extent, thereby increasing the flow rate of the fluid pump. Figure 16 A side view of the piezoelectric vibrator 100 when high-frequency vibration is generated on the vibrating substrate 2 shows the degree of bending of the vibrating substrate 2 at its maximum amplitude.

[0080] Example 6

[0081] like Figure 17As shown, the piezoelectric vibrator 100 provided by the embodiment six is different from the piezoelectric vibrator 100 provided by the embodiment one in the number and the connection position of the connecting pieces 3. In the embodiment, the vibration substrate 2 is rectangular, the piezoelectric element 4 is adapted to the shape of the vibration substrate 2, and eight connecting pieces 3 are symmetrically arranged on the two sides of the vibration substrate 2. The length of the side of the vibration substrate 2 connected with the connecting pieces 3 is a, the distance between the center of the four connecting pieces 3 close to the four end points of the vibration substrate 2 and the closer side line of the vibration substrate 2 is b, and the distance between the center of the four connecting pieces 3 far from the four end points of the vibration substrate 2 and the closer side line of the vibration substrate 2 is d. The distance b between the center of the four connecting pieces 3 close to the four end points of the vibration substrate 2 and the closer side line of the vibration substrate 2 is one sixteenth of the length a of the side of the vibration substrate 2 connected with the connecting pieces 3, i.e. b = 1 / 16a, and the distance d between the center of the four connecting pieces 3 far from the four end points of the vibration substrate 2 and the closer side line of the vibration substrate 2 is seven sixteenths of the length a of the side of the vibration substrate 2 connected with the connecting pieces 3, i.e. d = 7 / 16a.

[0082] In the embodiment, the piezoelectric vibrator 100 is simulated by the software COMSOL, and the operation steps are model wizard, selection of piezoelectric, solid, characteristic frequency, import file, selection of substrate and ceramic material, setting of solid mechanics parameters, setting of electrostatic parameters, and calculation of characteristic frequency.

[0083] In the embodiment, the piezoelectric vibrator 100 is simulated by the software COMSOL, and the operation steps are model wizard, selection of piezoelectric, solid, characteristic frequency, import file, selection of substrate and ceramic material, setting of solid mechanics parameters, setting of electrostatic parameters, and calculation of characteristic frequency. Figure 18 As shown, when the vibration substrate 2 generates high-frequency vibration, there is a range with smaller amplitude in the vibration substrate 2 (i.e. the white area 5 in the vibration substrate 2), and the range with smaller amplitude of the vibration substrate 2 can reflect the constraint effect of the connecting pieces 3 on the vibration substrate 2. The range with smaller amplitude of the vibration substrate 2 is approximately two X-shaped. Figure 18 As shown, when the vibration substrate 2 generates high-frequency vibration, there is a range with smaller amplitude in the vibration substrate 2 (i.e. the white area 5 in the vibration substrate 2), and the range with smaller amplitude of the vibration substrate 2 can reflect the constraint effect of the connecting pieces 3 on the vibration substrate 2. The range with smaller amplitude of the vibration substrate 2 is approximately two X-shaped. Figure 19 As shown, when the vibration substrate 2 generates high-frequency vibration, there is a range with smaller amplitude in the vibration substrate 2 (i.e. the white area 5 in the vibration substrate 2), and the range with smaller amplitude of the vibration substrate 2 can reflect the constraint effect of the connecting pieces 3 on the vibration substrate 2. The range with smaller amplitude of the vibration substrate 2 is approximately two X-shaped.

[0084] Embodiment seven

[0085] As shown, when the vibration substrate 2 generates high-frequency vibration, there is a range with smaller amplitude in the vibration substrate 2 (i.e. the white area 5 in the vibration substrate 2), and the range with smaller amplitude of the vibration substrate 2 can reflect the constraint effect of the connecting pieces 3 on the vibration substrate 2. The range with smaller amplitude of the vibration substrate 2 is approximately two X-shaped. Figure 20 , Figure 21As shown, the piezoelectric vibrator 100 provided in Embodiment 7 is used in a large-capacity fluid pump. The piezoelectric vibrator 100 provided in Embodiment 4 differs from that provided in Embodiment 1 in that the dimensions of the frame 1 and the vibrating substrate 2 are different, the number and connection positions of the connectors 3 are different, and the number of piezoelectric elements 4 is different. In this embodiment, the vibrating substrate 2 is rectangular, and the side length of the vibrating substrate 2 is twice the side length of the vibrating substrate 2 in Embodiment 1. The dimensions of the piezoelectric elements 4 are the same as those in Embodiment 1, and four piezoelectric elements 4 are provided. Eight connectors 3 are provided, and four connectors are symmetrically arranged on both sides of the vibrating substrate 2. Let the length of the side of the connecting member 3 of the vibrating substrate 2 be a, the distance from the center of the four connecting members 3 near the four ends of the vibrating substrate 2 to the edge of the vibrating substrate 2 be b, and the distance from the center of the four connecting members 3 away from the four ends of the vibrating substrate 2 to the edge of the vibrating substrate 2 be d. The distance b from the center of the four connecting members 3 near the four ends of the vibrating substrate 2 to the edge of the vibrating substrate 2 is one-eighth of the length a of the side of the connecting member 3 of the vibrating substrate 2, that is, b = 1 / 8a. The distance d from the center of the four connecting members 3 away from the four ends of the vibrating substrate 2 to the edge of the vibrating substrate 2 is three-eighths of the length a of the side of the connecting member 3 of the vibrating substrate 2, that is, d = 3 / 8a.

[0086] In this embodiment, the piezoelectric oscillator 100 is simulated using the software COMSOL. The operation steps are as follows: model wizard, select piezoelectric, solid, characteristic frequency, import file, select substrate and ceramic material, set solid mechanical parameters, set electrostatic parameters, and calculate characteristic frequency.

[0087] A 15Vpp is connected to both ends of the piezoelectric element 4, resulting in an amplitude of 4.93. For example... Figure 22 As shown, when the vibrating substrate 2 generates high-frequency vibration, there exists a range with a relatively small amplitude within the vibrating substrate 2 (i.e., Figure 22 In the white area 5 of the vibrating substrate 2, the smaller amplitude range of the vibrating substrate 2 reflects the constraint effect of the connecting member 3 on the vibrating substrate 2. The smaller amplitude range of the vibrating substrate 2 is roughly on the same straight line as the connecting members 3 located on both sides. The smaller amplitude range of the vibrating substrate 2 forms four parallel straight lines. At this time, the constraint of the connecting member 3 on the vibrating substrate 2 is small, which can increase the amplitude of the vibrating substrate 2 to a greater extent, thereby increasing the flow rate of the fluid pump. Figure 23 A side view of the piezoelectric vibrator 100 when high-frequency vibration is generated on the vibrating substrate 2 shows the degree of bending of the vibrating substrate 2 at its maximum amplitude.

[0088] In the above-mentioned Embodiment Four, Embodiment Five, Embodiment Six and Embodiment Seven, the vibration substrate 2 is rectangular, and the number of each group of connecting members 3 is four, i.e. eight connecting members 3 are provided, and each four connecting members are symmetrically arranged on the two sides of the vibration substrate 2. The length of the side of the vibration substrate 2 connected with the connecting members 3 is set as a, the distance from the center of the four connecting members 3 close to the four end points of the vibration substrate 2 to the closer edge line of the vibration substrate 2 is set as b, and the distance from the center of the four connecting members 3 far from the four end points of the vibration substrate 2 to the closer edge line of the vibration substrate 2 is set as d. When the distance b from the center of the four connecting members 3 close to the four end points of the vibration substrate 2 to the closer edge line of the vibration substrate 2 is 1 / 8 of the length a of the side of the vibration substrate 2 connected with the connecting members 3, i.e. b = 1 / 8a, and the distance d from the center of the four connecting members 3 far from the four end points of the vibration substrate 2 to the closer edge line of the vibration substrate 2 is 3 / 8 of the length a of the side of the vibration substrate 2 connected with the connecting members 3, i.e. d = 3 / 8a, the amplitude of the vibration substrate 2 is maximum, and the vibration substrate 2 can bend and vibrate along the connecting line of the connecting members 3. The applicant obtains through a large number of experiments that when the distance b from the center of the four connecting members 3 close to the four end points of the vibration substrate 2 to the closer edge line of the vibration substrate 2 is within the range of 1 / 10a to 1 / 6a of the length a of the side of the vibration substrate 2 connected with the connecting members 3, i.e. 1 / 10a≤b≤1 / 6a, and the distance d from the center of the four connecting members 3 far from the four end points of the vibration substrate 2 to the closer edge line of the vibration substrate 2 is within the range of 1 / 3a to 2 / 5a of the length a of the side of the vibration substrate 2 connected with the connecting members 3, i.e. 1 / 3a≤d≤2 / 5a, the constraint of the connecting members 3 on the vibration substrate 2 is smaller, and the amplitude of the vibration substrate 2 can be improved to a greater extent, so as to improve the flow of the fluid pump.

[0089] Embodiment Eight

[0090] As Figure 24As shown, the piezoelectric vibrator 100 provided in Embodiment 8 differs from the piezoelectric vibrator 100 provided in Embodiment 1 in that the number and connection positions of the connectors 3 are different. In this embodiment, the vibrating substrate 2 is rectangular, the piezoelectric element 4 is adapted to the shape of the vibrating substrate 2, and six connectors 3 are provided, with three connectors 3 symmetrically arranged on both sides of the vibrating substrate 2. Specifically, the length of the side of the vibrating substrate 2 connected to the connector 3 is defined as 'a', the distance from the center of the four connectors 3 closest to the four endpoints of the vibrating substrate 2 to the nearest edge of the vibrating substrate 2 is defined as 'b', and the distance from the center of the two connectors 3 far from the four endpoints of the vibrating substrate 2 to the nearest edge of the vibrating substrate 2 is defined as 'd'. The distance 'b' from the center of the four connectors 3 closest to the four endpoints of the vibrating substrate 2 to the nearest edge of the vibrating substrate 2 is one-quarter of the length 'a' of the side of the vibrating substrate 2 connected to the connector 3, i.e., b = 1 / 4a, and the distance 'd' from the center of the two connectors 3 far from the four endpoints of the vibrating substrate 2 to the nearest edge of the vibrating substrate 2 is half of the length 'a' of the side of the vibrating substrate 2 connected to the connector 3, i.e., d = 1 / 2a.

[0091] In this embodiment, the piezoelectric oscillator 100 is simulated using the software COMSOL. The operation steps are as follows: model wizard, select piezoelectric, solid, characteristic frequency, import file, select substrate and ceramic material, set solid mechanical parameters, set electrostatic parameters, and calculate characteristic frequency.

[0092] A 15Vpp is connected to both ends of the piezoelectric element 4, resulting in an amplitude of 2.66. For example... Figure 25 As shown, when the vibrating substrate 2 generates high-frequency vibration, there exists a range with a relatively small amplitude within the vibrating substrate 2 (i.e., Figure 25 The white area 5 of the vibrating substrate 2 shows that the smaller amplitude range of the vibrating substrate 2 can reflect the constraint effect of the connecting member 3 on the vibrating substrate 2. Figure 26 A side view of the piezoelectric vibrator 100 when high-frequency vibration is generated on the vibrating substrate 2 shows the degree of bending of the vibrating substrate 2 at its maximum amplitude.

[0093] Example 9

[0094] like Figure 27As shown, the piezoelectric vibrator 100 provided in Embodiment 8 differs from the piezoelectric vibrator 100 provided in Embodiment 1 in that the number and connection positions of the connectors 3 are different. In this embodiment, the vibrating substrate 2 is rectangular, the piezoelectric element 4 is adapted to the shape of the vibrating substrate 2, and six connectors 3 are provided, with three connectors 3 symmetrically arranged on both sides of the vibrating substrate 2. Specifically, the length of the side of the vibrating substrate 2 connected to the connectors 3 is defined as 'a', the distance from the center of the four connectors 3 closest to the four endpoints of the vibrating substrate 2 to the nearest edge of the vibrating substrate 2 is defined as 'b', and the distance from the center of the two connectors 3 far from the four endpoints of the vibrating substrate 2 to the nearest edge of the vibrating substrate 2 is defined as 'd'. The distance 'b' from the center of the four connectors 3 closest to the four endpoints of the vibrating substrate 2 to the nearest edge of the vibrating substrate 2 is one-sixth of the length 'a' of the side of the vibrating substrate 2 connected to the connectors 3, i.e., b = 1 / 6a, and the distance 'd' from the center of the two connectors 3 far from the four endpoints of the vibrating substrate 2 to the nearest edge of the vibrating substrate 2 is half of the length 'a' of the side of the vibrating substrate 2 connected to the connectors 3, i.e., d = 1 / 2a.

[0095] In this embodiment, the piezoelectric oscillator 100 is simulated using the software COMSOL. The operation steps are as follows: model wizard, select piezoelectric, solid, characteristic frequency, import file, select substrate and ceramic material, set solid mechanical parameters, set electrostatic parameters, and calculate characteristic frequency.

[0096] A 15Vpp is connected to both ends of the piezoelectric element 4, resulting in an amplitude of 11.6. For example... Figure 28 As shown, when the vibrating substrate 2 generates high-frequency vibration, there exists a range with a relatively small amplitude within the vibrating substrate 2 (i.e., Figure 28 In the white area 5 of the vibrating substrate 2, the smaller amplitude range of the vibrating substrate 2 reflects the constraint effect of the connecting member 3 on the vibrating substrate 2. At this time, the smaller amplitude range of the vibrating substrate 2 is roughly on the same straight line as the connecting members 3 located on both sides. The smaller amplitude range of the vibrating substrate 2 forms three parallel straight lines, such as... Figure 29 A side view of the piezoelectric vibrator 100 when high-frequency vibration is generated on the vibrating substrate 2 shows the degree of bending of the vibrating substrate 2 at its maximum amplitude. At this time, the constraint of the connector 3 on the vibrating substrate 2 is small, which can increase the amplitude of the vibrating substrate 2 to a greater extent, thereby increasing the flow rate of the fluid pump.

[0097] Example 10

[0098] like Figure 30As shown, the piezoelectric vibrator 100 provided in Embodiment 8 differs from the piezoelectric vibrator 100 provided in Embodiment 1 in that the number and connection positions of the connectors 3 are different. In this embodiment, the vibrating substrate 2 is rectangular, the piezoelectric element 4 is adapted to the shape of the vibrating substrate 2, and six connectors 3 are provided, with three connectors 3 symmetrically arranged on both sides of the vibrating substrate 2. Specifically, the length of the side of the vibrating substrate 2 connected to the connectors 3 is defined as 'a', the distance from the center of the four connectors 3 closest to the four endpoints of the vibrating substrate 2 to the nearest edge of the vibrating substrate 2 is defined as 'b', and the distance from the center of the two connectors 3 far from the four endpoints of the vibrating substrate 2 to the nearest edge of the vibrating substrate 2 is defined as 'd'. The distance 'b' from the center of the four connectors 3 closest to the four endpoints of the vibrating substrate 2 to the nearest edge of the vibrating substrate 2 is one-twelfth of the length 'a' of the side of the vibrating substrate 2 connected to the connectors 3, i.e., b = 1 / 12a. The distance 'd' from the center of the two connectors 3 far from the four endpoints of the vibrating substrate 2 to the nearest edge of the vibrating substrate 2 is half of the length 'a' of the side of the vibrating substrate 2 connected to the connectors 3, i.e., d = 1 / 2a.

[0099] In this embodiment, the piezoelectric oscillator 100 is simulated using the software COMSOL. The operation steps are as follows: model wizard, select piezoelectric, solid, characteristic frequency, import file, select substrate and ceramic material, set solid mechanical parameters, set electrostatic parameters, and calculate characteristic frequency.

[0100] A 15Vpp is connected to both ends of the piezoelectric element 4, resulting in an amplitude of 3.42. For example... Figure 31 As shown, when the vibrating substrate 2 generates high-frequency vibration, there exists a range with a relatively small amplitude within the vibrating substrate 2 (i.e., Figure 31 In the white area 5 of the vibrating substrate 2, the smaller amplitude range of the vibrating substrate 2 reflects the constraint effect of the connecting member 3 on the vibrating substrate 2. At this time, the smaller amplitude range of the vibrating substrate 2 is roughly on the same straight line as the connecting members 3 located on both sides. The smaller amplitude range of the vibrating substrate 2 forms three curves, such as... Figure 32 A side view of the piezoelectric vibrator 100 when high-frequency vibration is generated on the vibrating substrate 2 shows the degree of bending of the vibrating substrate 2 at its maximum amplitude.

[0101] In the above-mentioned Embodiment Eight, Embodiment Nine and Embodiment Ten, the vibration substrate 2 is rectangular, the number of each group of the connecting members 3 is three, i.e. the connecting members 3 are provided with six, and each three of the connecting members are symmetrically arranged at two sides of the vibration substrate 2. The length of the side of the vibration substrate 2 connected with the connecting members 3 is set as a, the distance from the center of the four connecting members 3 close to the four end points of the vibration substrate 2 to the closer side line of the vibration substrate 2 is set as b, and the distance from the center of the two connecting members 3 far from the four end points of the vibration substrate 2 to the closer side line of the vibration substrate 2 is set as d. When the distance b from the center of the four connecting members 3 close to the four end points of the vibration substrate 2 to the closer side line of the vibration substrate 2 is 1 / 6 of the length a of the side of the vibration substrate 2 connected with the connecting members 3, i.e. b = 1 / 6a, and the distance d from the center of the two connecting members 3 far from the four end points of the vibration substrate 2 to the closer side line of the vibration substrate 2 is 1 / 2 of the length a of the side of the vibration substrate 2 connected with the connecting members 3, i.e. d = 1 / 2a, the amplitude of the vibration substrate 2 is maximum and the vibration substrate 2 can bend and vibrate along the connecting line of the connecting members 3. The applicant obtains through a large number of experiments that when the distance b from the center of the four connecting members 3 close to the four end points of the vibration substrate 2 to the closer side line of the vibration substrate 2 is in the range of 1 / 4a to 1 / 8a, i.e. 1 / 4a≤b≤1 / 8a, and the distance d from the center of the two connecting members 3 far from the four end points of the vibration substrate 2 to the closer side line of the vibration substrate 2 is 1 / 2 of the length a of the side of the vibration substrate 2 connected with the connecting members 3, i.e. d = 1 / 2a, the constraint of the connecting members 3 on the vibration substrate 2 is smaller, the amplitude of the vibration substrate 2 can be improved to a greater extent, and the flow of the fluid pump is improved.

[0102] The above only describes preferred embodiments of the present application and is not intended to limit the present application. Any modification, equivalent replacement and improvement within the method and principles of the present application shall be included in the protection scope of the present application.

Claims

1. A piezoelectric vibrator characterized by comprising: The piezoelectric vibrator comprises a frame, a vibrating substrate arranged in the frame, connecting pieces connecting the frame and the vibrating substrate, and a piezoelectric element attached to one side of the vibrating substrate, the vibrating substrate is rectangular, the connecting pieces are arranged in multiple, the connecting pieces are arranged in two groups, and the number of the connecting pieces in each group is at least two, the connecting pieces in the two groups are arranged on opposite sides of the vibrating substrate respectively, one end of each connecting piece is connected to the vibrating substrate, and the other end of each connecting piece is connected to the frame. The number of the connecting pieces in each group is two, and the distance from the center of each connecting piece to the edge line closer to the vibrating substrate is within the range of one fifth to one third of the length of the side of the vibrating substrate connected to the connecting piece. Or the number of the connecting pieces in each group is four, the distance from the center of the four connecting pieces close to the four end points of the vibrating substrate to the edge line closer to the vibrating substrate is within the range of one tenth to one sixth of the length of the side of the vibrating substrate connected to the connecting piece, and the distance from the center of the four connecting pieces away from the four end points of the vibrating substrate to the edge line closer to the vibrating substrate is within the range of one third to two fifths of the length of the side of the vibrating substrate connected to the connecting piece. Or the number of the connecting pieces in each group is three, the distance from the center of the four connecting pieces close to the four end points of the vibrating substrate to the edge line closer to the vibrating substrate is within the range of one fourth to one eighth of the length of the side of the vibrating substrate connected to the connecting piece, and the distance from the center of the two connecting pieces away from the four end points of the vibrating substrate to the edge line closer to the vibrating substrate is within the range of one half of the length of the side of the vibrating substrate connected to the connecting piece.

2. The piezoelectric vibrator according to claim 1, characterized by When the number of the connecting pieces in each group is two, the distance from the center of each connecting piece to the edge line closer to the vibrating substrate is one fourth of the length of the side of the vibrating substrate connected to the connecting piece.

3. The piezoelectric resonator according to claim 1, wherein When the number of the connecting pieces in each group is four, the distance from the center of the four connecting pieces close to the four end points of the vibrating substrate to the edge line closer to the vibrating substrate is one eighth of the length of the side of the vibrating substrate connected to the connecting piece.

4. The piezoelectric resonator according to claim 1, wherein When the number of the connecting pieces in each group is four, the distance from the center of the four connecting pieces away from the four end points of the vibrating substrate to the edge line closer to the vibrating substrate is three eighths of the length of the side of the vibrating substrate connected to the connecting piece.

5. A fluid pump characterized by, The fluid pump comprises the piezoelectric vibrator according to any one of claims 1-4.

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