A destaticizing and conforming device and a control method thereof

Abstract

The application discloses a kind of destatics laminating devices, including first platform, second platform, gyro wheel mechanism and soft X-ray mechanism, second platform is set in the top of first platform, and both can be relatively moved along first direction X, third direction Z;Gyro wheel mechanism is set in one side of second platform, gyro wheel mechanism can be moved along third direction Z;Soft X-ray mechanism is set in one side of first platform, soft X-ray mechanism can be turned over around second direction Y;When gyro wheel mechanism is close to first platform, soft X-ray mechanism is turned over to the outside of gyro wheel mechanism and opens static electricity removing function;When gyro wheel mechanism is away from first platform, soft X-ray mechanism resets and closes static electricity removing function.It is also disclosed that a kind of control method of destatics laminating device, including steps S1 to S5.The destatics laminating device uses soft X-ray to eliminate the static electricity charge that product and gyro wheel accumulate, store in production process, avoid product from being damaged due to static electricity discharge, improve production yield.

Description

Technical Field

[0001] This invention relates to the field of panel manufacturing technology, and in particular to an anti-static bonding device and its control method. Background Technology

[0002] In the panel display industry, bonding rollers, film / substrate platforms and other mechanisms are required in each bonding production process to bond the film material to the substrate.

[0003] When the membrane material is peeled off, rubbed against rollers or platforms, or rolled, it easily accumulates and stores static charge. When the static charge stored in the bonding mechanism reaches its limit, it will cause a momentary electrostatic discharge (ESD) near the product's chip or electrostatic sensitive area, damaging the product's electronic components. This phenomenon greatly affects the product's production yield, reduces product stability, and shortens its lifespan.

[0004] Currently, the most widely used method in the industry is corona discharge (ion blower, ion bar), but the effect is poor and it cannot effectively solve the problem of electrostatic damage to products caused by the discharge of the roller-attached film. Summary of the Invention

[0005] The purpose of this invention is to provide an antistatic bonding device and its control method, which removes the static electricity accumulated and stored in the roller during the rolling process, thereby avoiding damage to product components by the roller due to electrostatic discharge and improving production yield.

[0006] The objective of this invention is achieved through the following technical solution:

[0007] An anti-static bonding device, comprising:

[0008] First platform;

[0009] The second platform is positioned above the first platform, and the two platforms can move relative to each other along the first direction X and the third direction Z.

[0010] A roller mechanism is disposed on one side of the second platform, and the roller mechanism is capable of moving along a third direction Z;

[0011] A soft X-ray mechanism is disposed on one side of the first platform, and the soft X-ray mechanism is capable of rotating around the second direction Y;

[0012] When the roller mechanism approaches the first platform, the soft X-ray mechanism flips to the outside of the roller mechanism and activates the static electricity elimination function.

[0013] When the roller mechanism moves away from the first platform, the soft X-ray mechanism resets and disables the static electricity elimination function.

[0014] In some embodiments, the first platform is used to adsorb a substrate;

[0015] The second platform is used for adsorbing membrane materials;

[0016] At least the first platform has a vacuum hole in the middle and blank areas on both sides.

[0017] In some embodiments, a buffer layer is provided on the surface of the first platform and / or the second platform;

[0018] The vacuum hole penetrates the buffer layer.

[0019] In some embodiments, the buffer layer is a flexible metal layer, or...

[0020] The buffer layer is an insulating elastic layer, and the insulating elastic layer is covered with a conductive layer.

[0021] In some embodiments, the roller mechanism includes:

[0022] A roller body is disposed on one side of the second platform and extends along the second direction Y;

[0023] A lifting drive component is disposed on the second platform and is connected to the roller body to drive the roller body to move along a third direction Z.

[0024] In some embodiments, the roller mechanism further includes a spring piece, which is obliquely disposed above the side of the roller body, and the bottom of the spring piece is provided with a rounded corner, which always abuts against the outer peripheral surface of the roller body;

[0025] The spring is conductive and is grounded or electrically connected to the second platform.

[0026] In some embodiments, the soft X-ray mechanism includes:

[0027] A soft X-ray generator is disposed on one side of the first platform and is used to eliminate static electricity within the irradiation range;

[0028] A rotary drive is disposed inside the first platform and connected to the soft X-ray generator via a connecting rod, so that the soft X-ray generator can be rotated within the range of 0-90°.

[0029] In some embodiments, a limit sensor is provided above and / or below the roller mechanism, and the limit sensor is electrically connected to the soft X-ray mechanism.

[0030] A method for controlling an anti-static bonding device includes the following steps:

[0031] S1: Transfer the substrate to the first platform for adsorption and fixation, and transfer the film material to the second platform for adsorption and fixation;

[0032] S2: Control the second platform to descend along the third direction Z so that it fits with the first platform, thereby pressing the substrate and film together to form a product. At the same time, control the soft X-ray mechanism to flip to the outside of the roller mechanism and activate the static elimination function.

[0033] S3: Control the second platform to rise along the third direction Z, so as to separate it from the first platform, and at the same time control the roller mechanism to descend along the third direction Z, so as to bring it closer to the surface of the product;

[0034] S4: Control the roller mechanism to move along the first direction X to level the product, during which the soft X-ray mechanism is controlled to continuously irradiate the roller mechanism and the product to remove static electricity.

[0035] S5: Transfer the product to the next process, control the second platform to reset above the first platform, control the soft X-ray mechanism to turn off the static elimination function and reset to one side of the first platform.

[0036] In some embodiments, in step S2, when the second platform is attached to the first platform, there is a gap between the roller mechanism and the first platform, or the roller mechanism abuts against the blank area of ​​the first platform.

[0037] In some embodiments, the irradiation angle of the soft X-ray mechanism is adjustable in step S4.

[0038] In some embodiments, during step S4, the roller mechanism gradually moves away from the soft X-ray mechanism during the leveling process.

[0039] Compared with the prior art, the beneficial effects of the present invention include at least the following:

[0040] 1. Use soft X-rays to eliminate static charge accumulated and stored in products and rollers during the production process, avoid product damage due to electrostatic discharge, and improve production yield.

[0041] 2. Soft X-rays only operate when the rollers are in motion, reducing the frequency and duration of use, increasing the lifespan of the device, and reducing harm to the human body.

[0042] 3. The soft X-ray mechanism features a reset design for non-working states, facilitating material loading and unloading on the platform and routine maintenance. Attached Figure Description

[0043] Figure 1This is a schematic diagram of the structure of the antistatic bonding device in the non-working state according to an embodiment of the present invention.

[0044] Figure 2 This is a schematic diagram of the structure of the antistatic bonding device in operation according to an embodiment of the present invention.

[0045] Figure 3 This is a schematic diagram of the structure of the first platform according to an embodiment of the present invention.

[0046] Figure 4 This is a schematic diagram of the connection structure between the spring and the roller body in an embodiment of the present invention.

[0047] In the diagram: 1. First platform; 11. Vacuum hole; 12. Blank area; 2. Second platform; 3. Roller mechanism; 31. Roller body; 32. Lifting drive component; 4. Soft X-ray mechanism; 41. Soft X-ray generator; 42. Rotation drive component; 43. Connecting rod; 5. Buffer layer; 6. Spring; 61. Rounded corner; 7. Limit sensor. Detailed Implementation

[0048] Exemplary embodiments will now be described more fully with reference to the accompanying drawings. However, these exemplary embodiments can be implemented in many forms and should not be construed as limited to the embodiments set forth herein; rather, they are provided to make the invention more comprehensive and complete, and to fully convey the concept of the exemplary embodiments to those skilled in the art. The same reference numerals in the drawings denote the same or similar structures, and therefore repeated descriptions of them will be omitted.

[0049] The terms used to express position and direction in this invention are illustrated with reference to the accompanying drawings, but changes can be made as needed, and all such changes are included within the scope of protection of this invention.

[0050] This invention provides an anti-static bonding device, which is located in Figure 1 or Figure 2 In the Cartier coordinate system shown, this antistatic bonding device can be used to remove the static electricity accumulated and stored in the rollers during rolling, thereby preventing damage to product components from roller discharge and improving production yield.

[0051] See Figure 1 and Figure 2 As shown, the antistatic bonding device includes a first platform 1, a second platform 2, a roller mechanism 3, and a soft X-ray mechanism 4.

[0052] Both the first platform 1 and the second platform 2 are vacuum adsorption platforms, and each is connected to a vacuum system (not shown) through a corresponding vacuum pipeline to realize the platform adsorption function.

[0053] Among them, such as Figure 1As shown, the second platform 2 is positioned above the first platform 1, and the two can move relative to each other along the first direction X (in the same direction as the X-axis of the coordinate system) and the third direction Z (in the same direction as the Z-axis of the coordinate system).

[0054] Specifically, it could be that the first platform 1 is fixed and the second platform 2 moves along the first direction X and the third direction Z; or the second platform 2 is fixed and the first platform 1 moves along the first direction X and the third direction Z; or the first platform 1 and the second platform 2 can each move along the first direction X and the third direction Z.

[0055] In some embodiments, the first platform 1 is used to adsorb the substrate and the second platform 2 is used to adsorb the film material. By controlling the first platform 1 and the second platform 2 to move closer to each other, the film material can be pressed onto the substrate to form the desired product.

[0056] As a preferred option, such as Figure 1 and Figure 3 As shown, at least the first platform 1 has a vacuum hole 11 in the middle and blank areas 12 on both sides. This design can center the product after pressing. The blank areas 12 on both sides prevent the product from directly contacting the roller mechanism 3. Even if the roller mechanism 3 is static, it can be discharged through the blank areas 12, thereby avoiding damage to the product caused by static electricity.

[0057] See Figure 1 As shown, the roller mechanism 3 is located on one side of the second platform 2. The roller mechanism 3 can move along the third direction Z so that it can press the product surface tightly for leveling.

[0058] In some embodiments, the roller mechanism 3 includes a roller body 31 and a lifting drive 32.

[0059] The roller body 31 is disposed on one side of the second platform 2, and there is a certain gap between it and the second platform 2 to avoid interference and ensure the smooth movement of the roller body 31 along the third direction Z. The roller body 31 extends along the second direction Y to form a roller-like structure. The surface of the roller body 31 is usually provided with an insulating flexible layer (not shown), such as a nylon layer, polyurethane layer, etc., to reduce damage to the product during the leveling process. However, this will also cause the roller body 31 to accumulate and store static electricity.

[0060] The lifting drive component 32 is mounted on the second platform 2 and can move synchronously with the second platform 2 along the first direction X and the third direction Z to achieve adjustment in the leveling direction and height direction. The lifting drive component 32 can be a lifting cylinder, linear module, or other drive component. The lifting drive component 32 is connected to the roller body 31, such as by using a bracket for connection, to drive the roller body 31 to move along the third direction Z, thereby achieving pressing and separation from the product surface.

[0061] It should be noted that during the pressing process, the roller body 31 is flush with or higher than the adsorption surface of the second platform 2 to avoid affecting the pressing of the product. During the leveling process, the roller body 31 is lower than the adsorption surface of the second platform 2 to independently and tightly adhere to the product surface for leveling.

[0062] See Figure 1 and Figure 2 As shown, the soft X-ray mechanism 4 is set on one side of the first platform 1. The soft X-ray mechanism 4 can rotate around the second direction Y (in the same direction as the Y-axis of the coordinate system) to realize the switching of different states, which facilitates the operation of the soft X-ray mechanism 4, as well as the loading and unloading operations and daily maintenance of the platform.

[0063] In some embodiments, the soft X-ray mechanism 4 includes a soft X-ray generator 41 and a rotary drive 42.

[0064] The soft X-ray generator 41 is located on one side of the first platform 1 and is used to eliminate static electricity within the irradiation range. Simply put, the soft X-ray generator 41 produces soft X-rays during operation, while simultaneously generating equal amounts of positive and negative ions. These ions are transmitted in the form of light waves, requiring no airflow. Upon contact with the roller mechanism 3 and the product, they can quickly and efficiently release the static charge on the object's surface without damaging it.

[0065] Since the irradiation range of soft X-rays is the area where static electricity is eliminated, static electricity can be precisely and directionally eliminated by adjusting the irradiation range of the soft X-ray generator 41. Compared with the corona discharge method commonly used in the industry for removing static electricity, this process does not produce ozone or electromagnetic noise hazards caused by corona discharge. It has a stronger static electricity removal capability and can effectively remove the static charge accumulated and stored in the roller mechanism 3 during operation to an absolute zero value, thereby preventing the roller mechanism 3 from damaging products due to electrostatic discharge and improving production yield.

[0066] The rotary drive 42 is located inside the first platform 1. The rotary drive 42 can be a rotary cylinder, motor or other drive components. The rotary drive 42 is connected to the soft X-ray generator 41 through the connecting rod 43 so that the soft X-ray generator 41 can be rotated within the range of 0-90°.

[0067] It should be noted that when the soft X-ray generator 41 is at 0°, it is parallel to the first platform 1. At this time, it is in a non-working position, the soft X-ray mechanism 4 is in a closed state, and the user can perform routine maintenance on the platform. There is no radiation hazard from soft X-rays.

[0068] The soft X-ray generator 41 is perpendicular to the first platform 1 at 90° and faces the roller mechanism 3, which is the working position. The soft X-ray mechanism 4 is in the open state, removing static electricity from the roller mechanism 3 and the product. Since the soft X-ray generator 41 only operates when the roller mechanism 3 is in motion, the frequency and duration of use can be reduced, the service life of the soft X-ray mechanism 4 can be increased, and safety is improved.

[0069] See Figure 1 and Figure 3 As shown, in some embodiments, a limit sensor 7 is provided above and / or below the roller mechanism 3. Exemplarily, the limit sensor 7 may be a photoelectric sensor, which is installed in the blank area 12 of the first platform 1 and located below the roller body 31, for detecting the position of the roller body 31.

[0070] In addition, the limit sensor 7 is electrically connected to the soft X-ray mechanism 4. When the roller body 31 descends along the third direction Z to the first preset height (leveling height), the limit sensor 7 can feed back an electrical signal to the soft X-ray mechanism 4 and control the soft X-ray generator 41 to flip to the working position to activate the static elimination function. When the roller body 31 rises along the third direction Z to the second preset height (reset height), the limit sensor 7 can feed back an electrical signal to the soft X-ray mechanism 4 and control the soft X-ray generator 41 to flip to the non-working position to deactivate the static elimination function, thereby realizing the automated control of the static elimination function.

[0071] In use, the aforementioned antistatic bonding device involves loading the substrate and film material, bringing the first platform 1 and the second platform 2 closer together to press the film material onto the substrate to form the desired product. Simultaneously, when the roller mechanism 3 is detected approaching the first platform 1, the soft X-ray mechanism 4 flips to the outside of the roller mechanism 3 and activates its antistatic function. The roller mechanism 3 moves to level the surface of the product, during which the soft X-ray mechanism 4 continuously releases soft X-rays towards the roller mechanism 3 and the product to eliminate static electricity. After processing one product, the second platform 2 drives the roller mechanism 3 to rise and reset. When the roller mechanism 3 is detected moving away from the first platform 1, the soft X-ray mechanism 4 also resets and deactivates its antistatic function, and then the product is unloaded.

[0072] See Figure 3 As shown, in some embodiments, a buffer layer 5 is provided on the surface of the first platform 1 and / or the second platform 2. The buffer layer 5 can absorb a certain amount of pressure applied by the second platform 2 or the roller mechanism 3, preventing excessive pressure from damaging the product. Furthermore, the vacuum hole 11 penetrates the buffer layer 5 to ensure the normal operation of the platform's adsorption function.

[0073] Specifically, the buffer layer 5 can be a flexible metal layer, such as a gold layer, silver layer, copper layer, aluminum layer, tin layer, etc., without any specific limitations. This type of metal layer is soft in texture, has a certain buffering function, and also has good conductivity, which can effectively conduct static electricity from the product and roller mechanism 3, reduce the impact of static electricity in the production process, and improve the product yield.

[0074] Alternatively, the buffer layer 5 can also be an insulating elastic layer, such as a resin layer, a rubber layer, etc., and the insulating elastic layer is covered with a conductive layer, which can also be a gold layer, a silver layer, a copper layer, an aluminum layer, etc. This composite buffer layer 5 also has good buffering and conductivity properties, and its function is similar to that of the flexible metal layer.

[0075] See Figure 4 As shown, in some embodiments, the roller mechanism 3 further includes a spring plate 6, which is generally arc-shaped to improve its elasticity. The spring plate 6 is obliquely disposed on the upper side of the roller body 31, for example, it can be fixed to a bracket (not shown) on which the roller body 31 is mounted. The bottom of the spring plate 6 is provided with a rounded corner 61, which can reduce wear on the roller body 31 and make the roller body 31 roll more smoothly. Under the action of elasticity, the rounded corner 61 always abuts against the outer peripheral surface of the roller body 31, acting as a scraper to clean the outer peripheral surface of the roller body 31 and prevent impurities from adhering to the roller body 31, thereby causing contamination or damage to the product.

[0076] In addition, the spring 6 is conductive and grounded or electrically connected to the second platform 2. The static electricity accumulated and stored in the roller body 31 can also be transferred through the spring 6, which further improves the device's static electricity removal capability. In the event of a failure of the soft X-ray mechanism 4, it can still be used as a backup means to remove static electricity from the roller mechanism 3.

[0077] The present invention also provides a control method for an anti-static bonding device, comprising steps S1 to S5.

[0078] S1: Transfer the substrate to the first platform 1 for adsorption and fixation, and transfer the film material to the second platform 2 for adsorption and fixation;

[0079] S2: Control the second platform 2 to descend along the third direction Z so that it fits with the first platform 1, thereby pressing the substrate and film material together to form a product. At the same time, control the soft X-ray mechanism 4 to flip to the outside of the roller mechanism 3 and activate the static elimination function.

[0080] S3: Control the second platform 2 to rise along the third direction Z, so that it separates from the first platform 1, and at the same time control the roller mechanism 3 to descend along the third direction Z, so that it approaches the surface of the product;

[0081] S4: Control the roller mechanism 3 to move along the first direction X to level the product, and during this period, control the soft X-ray mechanism 4 to continuously irradiate the roller mechanism 3 and the product to remove static electricity.

[0082] S5: Transfer the product to the next process, control the second platform 2 to reset above the first platform 1, control the soft X-ray mechanism 4 to turn off the static elimination function and reset to one side of the first platform 1.

[0083] In the control method of the above-mentioned antistatic bonding device, attention should also be paid to the control of ambient temperature and humidity. During the production process, the ambient temperature should be controlled between 20℃ and 26℃, and the humidity should be controlled between 50% and 60% to further limit the generation of static electricity.

[0084] In some embodiments, during step S2, when the second platform 2 is in contact with the first platform 1, there is a gap between the roller mechanism 3 and the first platform 1. For example, the gap between the two is approximately 2-3 cm. By reserving a certain safety distance, direct contact with the product can be avoided, and even discharge can be prevented, when the roller mechanism 3 is energized, thereby effectively avoiding electrostatic damage and ensuring product yield.

[0085] Alternatively, the roller mechanism 3 can be placed against the blank area 12 of the first platform 1. When the roller mechanism 3 is charged, it can avoid the product from contacting the blank area 12 first to discharge. After the static electricity on the roller mechanism 3 is eliminated, the product can be leveled, which can also avoid electrostatic damage to the product.

[0086] In some embodiments, in step S4, the irradiation angle of the soft X-ray mechanism 4 is adjustable to expand or precisely control the irradiation range of the soft X-ray generator 41 and improve the static electricity removal effect.

[0087] In some embodiments, during step S4, the roller mechanism 3 gradually moves away from the soft X-ray mechanism 4 during the leveling process. Figure 2 For example, during the leveling process, the roller mechanism 3 rolls from right to left.

[0088] To minimize static electricity damage to the product, the roller mechanism 3 must ensure that any accumulated static charge is effectively removed to an absolute zero value before contacting the product. Since soft X-rays attenuate significantly in air, the closer the roller mechanism 3 is to the soft X-ray mechanism 4 initially, the better the static electricity removal effect. This prevents instantaneous static discharge upon contact, ensuring high-quality static-free bonding. Because static electricity has been removed from the roller mechanism 3 initially, even if a small amount of static charge accumulates on the roller mechanism 3 during the subsequent product surface leveling process, the distant soft X-rays are sufficient to eliminate this small amount of static, ensuring the entire bonding process is unaffected by static electricity and thus improving production yield.

[0089] Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of the invention without departing from the principles and spirit of the invention, and all such changes should fall within the protection scope of the claims of the present invention.

Claims

1. A de-static cling device, comprising: The utility model relates to a kind of soft X-ray apparatus and method for eliminating static electricity. It comprises: First platform (1); Second platform (2), the second platform (2) is set above the first platform (1), and both can be relatively moved along the first direction X, third direction Z; Roller mechanism (3), the roller mechanism (3) is set on one side of the second platform (2), the roller mechanism (3) includes the roller body (31) that can be moved along the third direction Z, the surface of the roller body (31) is provided with flexible layer of insulation; Soft X-ray mechanism (4), the soft X-ray mechanism (4) is set on one side of the first platform (1), the soft X-ray mechanism (4) can be turned around the second direction Y; Wherein, when the roller mechanism (3) is close to the first platform (1), the soft X-ray mechanism (4) is turned to the outside of the roller mechanism (3) and opens electrostatic function except; 2. The de-static cling attachment device of claim 1, wherein, When the roller mechanism (3) is away from the first platform (1), the soft X-ray mechanism (4) resets and closes electrostatic function except. The first platform (1) is used for adsorbing substrate; The second platform (2) is used for adsorbing film material; 3. The de-static cling attachment device of claim 2, wherein, Wherein, at least the middle part of the first platform (1) is provided with vacuum hole (11), and both sides are provided with blank area (12). The surface of the first platform (1) and / or second platform (2) is provided with buffer layer (5); 4. The de-static cling attachment device of claim 3, wherein, The vacuum hole (11) penetrates the buffer layer (5). The buffer layer (5) is flexible metal layer, or, 5. The de-static cling attachment device of claim 1, wherein, The buffer layer (5) is insulating elastic layer, and the insulating elastic layer is coated with conductive layer. The roller mechanism (3) comprises: Roller body (31), the roller body (31) is set on one side of the second platform (2), and the roller body (31) extends along the second direction Y; 6. The de-static cling attachment device of claim 5, wherein, Lifting drive part (32), the lifting drive part (32) is set on the second platform (2), and the lifting drive part (32) is connected with the roller body (31) to drive the roller body (31) to move along the third direction Z. The roller mechanism (3) further comprises elastic sheet (6), the elastic sheet (6) is obliquely arranged above the side of the roller body (31), and the bottom of the elastic sheet (6) is provided with rounded corner (61), and the rounded corner (61) always abuts against the outer circumferential surface of the roller body (31); 7. The de-static cling attachment device of claim 1, wherein, The elastic sheet (6) is conductive, and the elastic sheet (6) is grounded or electrically connected with the second platform (2). The soft X-ray mechanism (4) comprises: Soft X-ray generator (41), the soft X-ray generator (41) is set on one side of the first platform (1), and the soft X-ray generator (41) is used for eliminating static electricity in irradiation range; Rotary drive part (42), the rotary drive part (42) is set in the interior of the first platform (1), and the rotary drive part (42) is connected with the soft X-ray generator (41) through connecting rod (43), so that the soft X-ray generator (41) can be turned in the range of 0-90 °.

8. The de-static cling attachment device of claim 1, wherein, The upper and / or lower part of the roller mechanism (3) is provided with a limit sensor (7), which is electrically connected with the soft X-ray mechanism (4).

9. A control method of the destaticizing and attaching apparatus as claimed in claim 1, characterized by, The method comprises the following steps: S1: transferring the substrate to the first platform (1) for adsorption and fixation, and transferring the film material to the second platform (2) for adsorption and fixation; S2: controlling the second platform (2) to descend along the third direction Z to be attached to the first platform (1), so as to press the substrate and the film material to form a product, and at the same time, controlling the soft X-ray mechanism (4) to turn to the outside of the roller mechanism (3) and open the static electricity removing function; S3: controlling the second platform (2) to ascend along the third direction Z to be separated from the first platform (1), and at the same time, controlling the roller mechanism (3) to descend along the third direction Z to be close to the surface of the product; S4: controlling the roller mechanism (3) to move along the first direction X to flatten the product, and during the process, controlling the soft X-ray mechanism (4) to continuously irradiate the roller mechanism (3) and the product to remove static electricity; S5: transferring the product to the next process, controlling the second platform (2) to reset above the first platform (1), and controlling the soft X-ray mechanism (4) to close the static electricity removing function and reset to the side of the first platform (1).

10. The control method of the destaticizing and attaching apparatus according to claim 9, wherein In step S2, when the second platform (2) is attached to the first platform (1), there is a gap between the roller mechanism (3) and the first platform (1), or the roller mechanism (3) is in contact with the blank area (12) of the first platform (1).

11. The control method of the destaticizing and attaching apparatus according to claim 9, wherein In step S4, the irradiation angle of the soft X-ray mechanism (4) is adjustable.

12. The control method of the destaticizing and attaching apparatus according to claim 9, wherein In step S4, during the flattening process, the roller mechanism (3) gradually moves away from the soft X-ray mechanism (4). In step S2, when the second platform (2) is attached to the first platform (1), there is a gap between the roller mechanism (3) and the first platform (1), or the roller mechanism (3) is in contact with the blank area (12) of the first platform (1). In step S4, the irradiation angle of the soft X-ray mechanism (4) is adjustable. In step S4, during the flattening process, the roller mechanism (3) gradually moves away from the soft X-ray mechanism (4).

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