Apparatus and method for laser processing micro-holes in aluminum nitride substrates

Abstract

The application relates to the technical field of aluminum nitride substrate processing, in particular to a laser processing micro-hole equipment and method for an aluminum nitride substrate. The equipment comprises driving motors, bidirectional screws, clamping rods, moving plates and placing plates, the output shafts of the driving motors are connected with the bidirectional screws, the bidirectional screws are rotationally connected with workbenches, the upper parts of the workbenches are slidably connected with the clamping rods used for limiting the aluminum nitride substrate, the clamping rods are threadedly connected with the adjacent bidirectional screws, the moving plates are connected with the clamping rods on the left and right sides, and the moving plates are slidably connected with the placing plates used for placing the aluminum nitride substrate. The driving motors drive the bidirectional screws to rotate in the forward and reverse directions, the size of the rectangular area surrounded by the four clamping rods can be adjusted to be adapted to the specification of the aluminum nitride substrate, then the aluminum nitride substrate is placed between the four clamping rods, and the laser processing equipment can be used to process and punch the aluminum nitride substrate, so that the operation is simple, and the processing efficiency can be improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of aluminum nitride substrate processing, in particular to a device and method for laser processing micro-holes of an aluminum nitride substrate. BACKGROUND

[0002] The aluminum nitride substrate is a kind of hard and brittle material, and when it is punched by a mechanical method, it is easy to produce edge collapse or micro-cracks, and the cutting loss in the processing process is large, which affects the processing precision, therefore, generally, the punching is performed by a laser processing method.

[0003] When the existing laser processing equipment punches the aluminum nitride substrate, the aluminum nitride substrate needs to be placed in the clamp of the laser processing equipment manually, the position of the aluminum nitride substrate is fixed by the clamp, and then the aluminum nitride substrate can be punched. However, the specifications of the clamp of the laser processing equipment are generally fixed, when different sizes of aluminum nitride substrates need to be processed, different specifications of clamps need to be replaced, which is troublesome to operate, when the aluminum nitride substrates need to be processed in batches, each aluminum nitride substrate needs to be placed and taken out manually, which consumes a lot of labor and leads to low processing efficiency. SUMMARY

[0004] Therefore, the present application provides a device and method for laser processing micro-holes of an aluminum nitride substrate, which can overcome the shortcomings of the existing laser processing equipment, that is, when different sizes of aluminum nitride substrates need to be processed, different specifications of clamps need to be replaced, and each aluminum nitride substrate needs to be placed and taken out manually, which is troublesome to operate and has low processing efficiency.

[0005] TECHNICAL SCHEME

[0006] A device for laser processing micro-holes of an aluminum nitride substrate, comprising a workbench and a laser processing equipment, a laser processing equipment for punching processing of the aluminum nitride substrate is installed on the upper rear side of the workbench, further comprising a driving motor, a bidirectional screw rod, a clamping rod, a moving plate, a placing plate, a translation assembly, a suction mechanism and a lifting mechanism, a driving motor is connected to the upper rear side and the upper left side of the workbench, a bidirectional screw rod is connected to the output shaft of the driving motor, the bidirectional screw rod is rotatably connected to the workbench, a clamping rod for limiting the aluminum nitride substrate is slidably connected to the upper front and rear and left and right sides of the workbench, the clamping rod is threadedly connected to the adjacent bidirectional screw rod, a moving plate is connected to the left and right clamping rods, a placing plate for placing the aluminum nitride substrate is slidably connected to the moving plate, a translation assembly for moving the aluminum nitride substrate and a lifting mechanism for lifting the aluminum nitride substrate are arranged on the moving plate, and a suction mechanism for sucking the aluminum nitride substrate is arranged on the translation assembly.

[0007] Preferably, the translation assembly comprises sliding rods, brushless motors and first rollers, the top of each moving plate is slidably connected with a sliding rod, the end of each sliding rod away from the other is provided with a brushless motor, the brushless motor is provided with a first roller, and the first roller can roll on the adjacent moving plate.

[0008] Preferably, the adsorption mechanism comprises guide blocks, sliding frames, return springs, air pumps, shunt pipes, suction cups, jacks and pull ropes, the side of each sliding rod close to the other is connected with a guide block, the sliding frame is slidably connected to the guide block, two return springs are connected between the sliding frame and the adjacent guide block, the air pump is connected to the sliding frame, the air inlet of the air pump is communicated with a shunt pipe, the end of the shunt pipe is communicated with a suction cup for sucking the aluminum nitride substrate, the jack is slidably connected to the sliding rod, the jack can be in contact with the clamping rod when moving to the side close to the other, and the pull rope is connected between the end of the jack away from the other and the bottom of the adjacent sliding frame, so that the jack can drive the sliding frame to move downward through the pull rope, and the aluminum nitride substrate is placed downward.

[0009] Preferably, the lifting mechanism comprises guide rods, screws, ratchets, pushing blocks and connecting springs, the moving plate is connected with a guide rod, the placing plate is slidably connected with the guide rod, the side of the moving plate away from the guide rod is rotatably connected with a screw, the placing plate is threadedly connected with the adjacent screw, the upper end of the screw is connected with a ratchet, the end of the sliding rod away from the other is slidably connected with a pushing block, the pushing block can be in contact with the ratchet when moving to the side close to the other, and the connecting spring is connected between the pushing block and the adjacent sliding rod.

[0010] Preferably, the reset mechanism for driving the placing plate to reset comprises a fixed rod, a mounting block, a rubber block, a sliding plate, a compression spring, a clamping block, a torsion spring and a spring, the placing plate is connected with the fixed rod, the upper part of the moving plate is connected with the mounting block, the rubber block is slidably connected to the mounting block, the sliding plate is connected to the rubber block, the vertical movement of the fixed rod can be in contact with the sliding plate, the compression spring is connected between the sliding plate and the adjacent mounting block, the clamping block is rotatably connected to the sliding plate, the clamping block can clamp the ratchet, the torsion spring is connected between the clamping block and the adjacent sliding plate, and the ratchet is connected between the adjacent moving plate and the spring.

[0011] Preferably, the moving assembly for assisting the moving plate to move forward and backward comprises a mounting frame and a second roller, the bottom of the moving plate is connected with the mounting frame, and the lower part of the mounting frame is rotatably connected with the second roller.

[0012] Preferably, the limiting mechanism for limiting the aluminum nitride substrate is also included, and the limiting mechanism comprises connecting rods, limiting plates, insertion rods and magnets.

[0013] The application also provides a use method of the device for laser processing micro-holes of the aluminum nitride substrate, which comprises the following steps: firstly, stacking appropriate amount of aluminum nitride substrates on the left placing plate; then, driving the bidirectional screw rod to rotate forward and reversely by the driving motor, so as to drive the clamping rods to slide synchronously, adjust the size of the rectangle surrounded by the four clamping rods, so that the size is suitable for the specification of the aluminum nitride substrate; then, the suction cups can generate suction force to suck the aluminum nitride substrate by air pumping; then, the first roller can be driven to rotate by the brushless motor, so as to drive the sliding rod to move and the aluminum nitride substrate to move above the four clamping rods; then, the aluminum nitride substrate can be placed downward between the four clamping rods by the suction cups; and finally, the aluminum nitride substrate between the four clamping rods can be processed and punched by the laser processing device.

[0014] Compared with the prior art, the application has the following advantages:

[0015] 1. The driving motor is used to drive the bidirectional screw rod to rotate forward and reversely, so that the size of the rectangle surrounded by the four clamping rods can be adjusted, and the size is suitable for the specification of the aluminum nitride substrate; then, the aluminum nitride substrate can be placed between the four clamping rods, and the aluminum nitride substrate can be processed and punched by the laser processing device, so that the operation is simple and the processing efficiency can be improved.

[0016] 2. The translation assembly, the adsorption mechanism and the lifting mechanism are matched, so that the multiple aluminum nitride substrates can be placed between the four clamping rods automatically and sequentially, and the aluminum nitride substrates processed completely can be taken out automatically, without manual operation, so that time and labor are saved.

[0017] 3. The reset mechanism is used, so that the left placing plate can be moved downward completely to reset when the aluminum nitride substrates on the left placing plate are processed completely, and the right placing plate can also be moved upward completely to reset when the aluminum nitride substrates processed on the right placing plate are taken out completely.

[0018] 4. The limiting plates and the moving plates can clamp and limit two opposite corners of the aluminum nitride substrate, so that the aluminum nitride substrate can be aligned and flat. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 It is a schematic diagram of the three-dimensional structure of the application.

[0020] Figure 2 It is a schematic diagram of the local three-dimensional structure of the application.

[0021] Figure 3 The perspective view of the translation assembly of the present application.

[0022] Figure 4 The perspective view of the translation assembly of the present application.

[0023] Figure 5 The perspective view of the suction mechanism of the present application.

[0024] Figure 6 The perspective view of the lifting mechanism of the present application.

[0025] Figure 7 The perspective view of the lifting mechanism of the present application.

[0026] Figure 8 The enlarged view of part A of the present application. Figure 7

[0027] Figure 9 The perspective view of the reset mechanism of the present application.

[0028] Figure 10 The perspective view of the reset mechanism of the present application.

[0029] Figure 11 The perspective view of the moving assembly of the present application.

[0030] Figure 12 The perspective view of the limiting mechanism of the present application.

[0031] Figure 13 The perspective view of the insertion rod of the present application.

[0032] The marks of the components in the drawings are as follows: 1, workbench, 2, laser processing equipment, 3, driving motor, 4, bidirectional screw rod, 5, clamping rod, 6, moving plate, 7, placing plate, 8, translation assembly, 81, sliding rod, 82, brushless motor, 83, first roller, 9, suction mechanism, 91, guide block, 92, sliding frame, 93, reset spring, 94, air pump, 95, shunt pipe, 96, suction disc, 97, jacking rod, 98, pull rope, 10, lifting mechanism, 101, guide rod, 102, screw rod, 103, ratchet, 104, pushing block, 105, connecting spring, 11, reset mechanism, 111, fixed rod, 112, mounting block, 113, rubber block, 114, sliding plate, 115, compression spring, 116, clamping block, 117, torsion spring, 118, clockwork, 12, moving assembly, 121, mounting frame, 122, second roller, 13, limiting mechanism, 131, connecting rod, 132, limiting plate, 133, insertion rod, 134, magnet. Embodiment​

[0033] The technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of them. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0034] Example: An apparatus for laser processing microholes in an aluminum nitride substrate, such as... Figures 1-8 As shown, the system includes a worktable 1, a laser processing device 2, a drive motor 3, a bidirectional lead screw 4, clamping rods 5, a moving plate 6, a placement plate 7, a translation assembly 8, an adsorption mechanism 9, and a lifting mechanism 10. The laser processing device 2 is mounted on the upper rear side of the worktable 1. The drive motor 3 is bolted to the upper rear side and upper left side of the worktable 1. The output shaft of each drive motor 3 is connected to a bidirectional lead screw 4, which is rotatably connected to the worktable 1. Clamping rods 5 are slidably connected to the four sides of the upper part of the worktable 1, and each clamping rod 5 is threadedly connected to its adjacent bidirectional lead screw 4. The drive motor 3 drives the bidirectional lead screw 4. Rotation can drive the four clamping rods 5 to slide synchronously, adjusting the size of the rectangle formed by the four clamping rods 5 to match the specifications of the aluminum nitride substrate. Then, the laser processing equipment 2 can drill holes in the aluminum nitride substrate between the four clamping rods 5. Movable plates 6 are welded on the clamping rods 5 on both sides, and placement plates 7 are slidably connected to the movable plates 6. The aluminum nitride substrates can be stacked on the placement plates 7. The lifting and lowering of the placement plates 7 can drive the aluminum nitride substrates to lift and lower. The movable plates 6 are equipped with translation components 8 and lifting mechanisms 10. The translation components 8 are equipped with adsorption mechanisms 9.

[0035] like Figure 1 , Figure 3 and Figure 4 As shown, the translation component 8 includes a sliding rod 81, a brushless motor 82, and a first roller 83. The top of each of the moving plates 6 is slidably connected to the sliding rod 81. A brushless motor 82 is installed at the ends of the sliding rods 81 that are far apart from each other. Each brushless motor 82 is equipped with a first roller 83. The first roller 83 can roll on its adjacent moving plate 6. The first roller 83 is driven to rotate by the brushless motor 82, which can drive the sliding rod 81 to move.

[0036] like Figure 1 and Figure 5As shown in the drawings, the suction mechanism 9 comprises guide blocks 91, sliding frames 92, return springs 93, air pumps 94, shunt pipes 95, suction cups 96, top rods 97 and pull ropes 98, the top of the sliding rods 81 is welded with the guide blocks 91 on the side close to each other, the guide blocks 91 are slidably connected with the sliding frames 92, the sliding frames 92 are connected with the guide blocks 91 adjacent thereto with two return springs 93, the sliding frames 92 are connected with the air pumps 94, the air pumps 94 are communicated with the shunt pipes 95 at the air inlet, the shunt pipes 95 are communicated with the suction cups 96 at the end, the suction cups 96 can be sucked to the aluminum nitride substrate by the suction generated by the air pump 94, and then the aluminum nitride substrate can be moved by the suction cups 96, the top rods 97 are slidably connected in the sliding rods 81, the top rods 97 can be in contact with the clamping rods 5 by moving to the side close to each other, and the pull ropes 98 are connected between the top rods 97 far away from each other and the bottom of the sliding frames 92 adjacent thereto.

[0037] As shown in the drawings, Figure 1 , Figure 6 , Figure 7 and Figure 8 , the lifting mechanism 10 comprises guide rods 101, screw rods 102, ratchets 103, push blocks 104 and connecting springs 105, the moving plates 6 are welded with the guide rods 101, the placement plates 7 are slidably connected with the guide rods 101, the moving plates 6 are rotatably connected with the screw rods 102 on the side away from the guide rods 101, the placement plates 7 are threadedly connected with the screw rods 102 adjacent thereto, the screw rods 102 can drive the placement plates 7 to lift by rotating, the screw rods 102 are connected with the ratchets 103 at the upper end, the sliding rods 81 are slidably connected with the push blocks 104 at the end far away from each other, the push blocks 104 can be in contact with the ratchets 103 by moving to the side close to each other, so as to drive the ratchets 103 to rotate, drive the screw rods 102 to rotate, and the connecting springs 105 are connected between the push blocks 104 and the sliding rods 81 adjacent thereto.

[0038] Firstly, appropriate amount of aluminum nitride substrate stack is placed on the left placement plate 7, the uppermost aluminum nitride substrate is in contact with the left suction cup 96, then the bidirectional screw rod 4 is driven to rotate forward and backward by the driving motor 3, the clamping rod 5 is driven to slide inwards or outwards synchronously, the size of the rectangle surrounded by the four clamping rods 5 is adjusted to be suitable for the size of the aluminum nitride substrate, the moving plate 6 can move forward and backward with the clamping rods 5 on the left and right sides, and drive the aluminum nitride substrate to move forward and backward to align the position; then the left suction cup 96 can generate suction force by the left air pump 94, so that the uppermost aluminum nitride substrate can be sucked, and the left first roller 83 is driven to rotate by the left brushless motor 82, so that the left sliding rod 81 moves to the right, the left suction cup 96 can drive the aluminum nitride substrate to move to the right to the upper side between the four clamping rods 5, at the same time, the left sliding rod 81 drives the left push block 104 to move to the right, when the left push block 104 is in contact with the left ratchet wheel 103, the left ratchet wheel 103 is driven to rotate by a certain angle, so that the left screw rod 102 is driven to rotate, and then the left placement plate 7 is driven to rise by a distance, when the left top rod 97 is in contact with the right clamping rod 5, the left top rod 97 stops moving, the left sliding rod 81 continues to move to the right, so that the left top rod 97 moves to the left relative to the left sliding rod 81, the left top rod 97 can drive the left sliding frame 92 to move downward through the left pull rope 98, the left reset spring 93 is compressed, the left sliding frame 92 can place the aluminum nitride substrate downward between the four clamping rods 5 through the left suction cup 96, then the left air pump 94 is controlled to stop pumping, so that the left suction cup 96 releases the aluminum nitride substrate, and the left first roller 83 is driven to reverse by the left brushless motor 82, so that the left sliding rod 81 moves to the left to reset, when the left push block 104 is in contact with the left ratchet wheel 103, the left ratchet wheel 103 is pressed to move forward, the left connecting spring 105 is compressed, when the left push block 104 passes the left ratchet wheel 103, the left connecting spring 105 returns to the original state, drives the left push block 104 to move backward to reset, at the same time, the left top rod 97 is separated from the right clamping rod 5, the left reset spring 93 returns to the original state, drives the left sliding frame 92 to move upward to reset, the left top rod 97 moves to the right relative to the left sliding rod 81 to reset through the left pull rope 98, at this time, the next aluminum nitride substrate is in contact with the left suction cup 96, then the laser processing equipment 2 can process the aluminum nitride substrate between the four clamping rods 5; similarly, under the cooperation of the right translation assembly 8, the adsorption mechanism 9 and the lifting mechanism 10, the processed aluminum nitride substrate can be automatically taken out and placed on the right placement plate 7, and the right placement plate 7 can descend by a distance every time an aluminum nitride substrate is placed.

[0039] As Figure 1 ,Figure 9 and Figure 10 As shown in FIG. 11, the reset mechanism 11 includes a fixed rod 111, a mounting block 112, a rubber block 113, a sliding plate 114, a compression spring 115, a clamping block 116, a torsion spring 117, and a clockwork 118. The fixed rod 111 is welded to the placement plate 7. The mounting block 112 is connected to the upper portion of the moving plate 6. The rubber block 113 is slidably connected to the mounting block 112. The sliding plate 114 is connected to the rubber block 113. The fixed rod 111 vertically moves to contact the sliding plate 114, thereby being able to squeeze the sliding plate 114 to move away from the moving plate 6. The compression spring 115 is connected between the sliding plate 114 and the mounting block 112 adjacent to the sliding plate 114. The clamping block 116 is rotatably connected to the sliding plate 114. The clamping block 116 clamps the ratchet wheel 103. The sliding plate 114 is able to drive the clamping block 116 to move away from the moving plate 6 to release the ratchet wheel 103. The torsion spring 117 is connected between the clamping block 116 and the sliding plate 114 adjacent to the clamping block 116. The clockwork 118 is connected between the ratchet wheel 103 and the moving plate 6 adjacent to the ratchet wheel 103. After the clamping block 116 releases the ratchet wheel 103, the clockwork 118 is able to drive the ratchet wheel 103 to reverse, so that the placement plate 7 moves to reset.

[0040] When the left placement plate 7 moves upward, the left fixed rod 111 can move upward and approach the left sliding plate 114; when the right placement plate 7 moves downward, the right fixed rod 111 can move downward, and the upper end of the right fixed rod 111 approaches the right sliding plate 114; when the ratchet 103 is rotated by the dial block 104, the clockwork 118 is deformed to store power, and the ratchet 103 is pressed to rotate, and the torsional spring 117 is deformed, so that the ratchet 103 is released from the clamping of the clamping block 116, thereby not affecting the rotation of the ratchet 103; when the dial block 104 is separated from the ratchet 103, the torsional spring 117 returns to the original state, and the clamping block 116 is reversely rotated to clamp the ratchet 103; when the aluminum nitride substrates on the left placement plate 7 are all processed, the left fixed rod 111 contacts the left sliding plate 114, thereby pressing the left sliding plate 114 to move backward, the left compression spring 115 is compressed, the left sliding plate 114 drives the left clamping block 116 and the left rubber block 113 to move backward, the left clamping block 116 is released from the left ratchet 103, the left clockwork 118 returns to the original state, and drives the left ratchet 103 and the left screw rod 102 to reversely rotate and reset at one time, drives the left placement plate 7 to move downward and reset, the left placement plate 7 drives the left fixed rod 111 to move downward and away from the left sliding plate 114, the left compression spring 115 returns to the original state, drives the left sliding plate 114 to move forward and reset, the left sliding plate 114 drives the left clamping block 116 and the left rubber block 113 to move forward and reset, the left clamping block 116 is clamped to the left ratchet 103 again, and under the friction of the left rubber block 113, the speed of the left sliding plate 114 moving forward is slowed down, so that the left placement plate 7 has enough time to move downward and reset completely; similarly, when the aluminum nitride substrates on the right placement plate 7 are all taken away, the right placement plate 7 can also move upward and reset completely at one time.

[0041] As shown in Figure 1 and Figure 11 , the moving assembly 12 is further included, and the moving assembly 12 includes the mounting frame 121 and the second roller 122, the mounting frame 121 is welded to the bottom of the moving plate 6 on the left and right sides, and the second roller 122 is rotatably connected to the lower part of the mounting frame 121 on the left and right sides; when the moving plate 6 adjusts the position on the left and right sides of the clamping rod 5, the mounting frame 121 and the second roller 122 can move forward and backward, and the second roller 122 can roll on the ground to assist the forward and backward movement of the moving plate 6.

[0042] As shown in Figure 1 , Figure 12 and Figure 13As shown, the device further comprises a limiting mechanism 13, which comprises connecting rods 131, limiting plates 132, insertion rods 133 and magnets 134, the connecting rods 131 are welded in the placing plates 7, the limiting plates 132 are slidably connected to the connecting rods 131, the insertion rods 133 are slidably connected to the limiting plates 132, the magnets 134 are connected to the limiting plates 132 and the insertion rods 133, and the adjacent two magnets 134 are attracted to each other; initially, the insertion rods 133 abut against the side surface of the placing plates 7, so that the limiting plates 132 cannot be moved at will, and people can stack the appropriate amount of aluminum nitride substrates on the left placing plates 7, then the people can pull the insertion rods 133 away from the placing plates 7, under the action of the magnets 134, the position of the insertion rods 133 can be fixed, then the limiting plates 132 are pushed to move to the side close to the aluminum nitride substrates, the connecting rods 131 play a guiding role, so that the limiting plates 132 and the moving plates 6 can clamp and limit two opposite corners of the aluminum nitride substrates, and the aluminum nitride substrates can be aligned and leveled.

[0043] As shown in the drawings, Figures 1-8 The application further provides a use method of the device for laser processing micro-holes of aluminum nitride substrates, which comprises the following steps: firstly, stacking the appropriate amount of aluminum nitride substrates on the left placing plates 7, then driving the bidirectional screw rod 4 to rotate in reverse through the driving motor 3, so that the clamping rods 5 can be synchronously slid, the size of the rectangle surrounded by the four clamping rods 5 is adjusted to be suitable for the specifications of the aluminum nitride substrates, then the suction cups 96 can generate suction force to suck the aluminum nitride substrates through air pumping by the air pump 94, the sliding rods 81 can be moved through the rotation of the first roller 83 driven by the brushless motor 82, so that the aluminum nitride substrates are moved above the four clamping rods 5, then the aluminum nitride substrates can be placed downward between the four clamping rods 5 through the suction cups 96, and the aluminum nitride substrates between the four clamping rods 5 can be processed and punched through the laser processing device 2.

[0044] The above only describes the preferred embodiments of the application and is not used to limit the application, and any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the application shall be included in the protection scope of the application.

Claims

1. An apparatus for laser processing micro-holes of an aluminum nitride substrate, comprising a worktable (1) and a laser processing apparatus (2), wherein the laser processing apparatus (2) for punching processing of the aluminum nitride substrate is installed on the upper rear side of the worktable (1), characterized in that, Also include drive motor (3), bidirectional screw rod (4), clamp rod (5), moving plate (6), placement plate (7), translation assembly (8), suction mechanism (9) and lifting mechanism (10), the upper rear side and the upper left side of the workbench (1) are connected with drive motor (3), the output shaft of drive motor (3) is connected with bidirectional screw rod (4), bidirectional screw rod (4) is rotatably connected with workbench (1), the upper front and rear left and right four sides of workbench (1) are slidably connected with clamp rod (5) for limiting aluminum nitride substrate, clamp rod (5) is threadedly connected with its adjacent bidirectional screw rod (4), the clamp rod (5) on the left and right sides is connected with moving plate (6), moving plate (6) is slidably connected with placement plate (7) for placing aluminum nitride substrate, moving plate (6) is provided with translation assembly (8) for driving aluminum nitride substrate to move and lifting mechanism (10) for driving aluminum nitride substrate to lift, translation assembly (8) is provided with suction mechanism (9) for sucking aluminum nitride substrate; The translation assembly (8) includes a sliding rod (81), a brushless motor (82) and a first roller (83), the top of the moving plate (6) is slidably connected with a sliding rod (81), the end of the sliding rod (81) away from each other is installed with a brushless motor (82), the brushless motor (82) is provided with a first roller (83), the first roller (83) can roll on the adjacent moving plate (6); The suction mechanism (9) includes a guide block (91), a sliding frame (92), a return spring (93), a gas pump (94), a shunt pipe (95), a suction cup (96), a top rod (97) and a pull rope (98), the top of the sliding rod (81) is connected with a guide block (91) on the side close to each other, the guide block (91) is slidably connected with a sliding frame (92), the sliding frame (92) and the adjacent guide block (91) are connected with two return springs (93), the sliding frame (92) is connected with a gas pump (94), the gas pump (94) is connected with a shunt pipe (95) at the inlet, the shunt pipe (95) is connected with a suction cup (96) for sucking aluminum nitride substrate, the sliding rod (81) is slidably connected with a top rod (97), the top rod (97) moves to the side close to each other and contacts with the clamp rod (5), the end of the top rod (97) away from each other and the bottom of the adjacent sliding frame (92) are connected with a pull rope (98), so that the top rod (97) can move the sliding frame (92) downward by pulling the pull rope (98), driving the aluminum nitride substrate to move downward for placement; The lifting mechanism (10) comprises guide rods (101), screw rods (102), ratchets (103), pushing blocks (104) and connecting springs (105), the guide rods (101) are connected to the moving plates (6), the placing plates (7) are slidably connected with the guide rods (101), the screw rods (102) are rotatably connected to the sides, away from the guide rods (101), of the moving plates (6), the placing plates (7) are threadedly connected with the screw rods (102) adjacent thereto, the ratchets (103) are connected to the upper ends of the screw rods (102), the pushing blocks (104) are slidably connected to the ends, away from each other, of the sliding rods (81), the pushing blocks (104) are capable of being in contact with the ratchets (103) when moving towards each other, and the connecting springs (105) are connected between the pushing blocks (104) and the sliding rods (81) adjacent thereto.

2. The apparatus for laser processing micro-holes of an aluminum nitride substrate according to claim 1, wherein, The reset mechanism (11) for driving the placing plates (7) to reset comprises fixing rods (111), mounting blocks (112), rubber blocks (113), sliding plates (114), compression springs (115), clamping blocks (116), torsional springs (117) and clockwork (118), the fixing rods (111) are connected to the placing plates (7), the mounting blocks (112) are connected to the upper portions of the moving plates (6), the rubber blocks (113) are slidably connected to the mounting blocks (112), the sliding plates (114) are connected to the rubber blocks (113), the fixing rods (111) are capable of being in contact with the sliding plates (114) when moving vertically, the compression springs (115) are connected between the sliding plates (114) and the mounting blocks (112) adjacent thereto, the clamping blocks (116) are rotatably connected to the sliding plates (114), the clamping blocks (116) are capable of clamping the ratchets (103), the torsional springs (117) are connected between the clamping blocks (116) and the sliding plates (114) adjacent thereto, and the clockwork (118) is connected between the ratchets (103) and the moving plates (6) adjacent thereto.

3. The apparatus for laser processing micro-holes of an aluminum nitride substrate according to claim 2, wherein The moving assembly (12) for assisting the moving plates (6) to move forward and backward comprises mounting racks (121) and second rollers (122), the mounting racks (121) are connected to the bottom portions of the moving plates (6), and the second rollers (122) are rotatably connected to the lower portions of the mounting racks (121) in a front-to-back symmetrical manner.

4. The apparatus for laser processing micro-holes of an aluminum nitride substrate according to claim 3, wherein The limiting mechanism (13) for limiting the aluminum nitride substrates comprises connecting rods (131), limiting plates (132), inserting rods (133) and magnets (134), the connecting rods (131) are connected to the placing plates (7), the limiting plates (132) are slidably connected to the connecting rods (131), the inserting rods (133) are slidably connected to the limiting plates (132), the magnets (134) are connected to the limiting plates (132) and the inserting rods (133) adjacent thereto, and the magnets (134) adjacent to each other are capable of being attracted to each other.

5. A method of using the apparatus for laser processing micro-holes of an aluminum nitride substrate according to any one of claims 1 to 4, characterized in that, The method comprises the following steps: First, appropriate amount of aluminum nitride substrate stack is placed on the left placement plate (7), then through the drive motor (3) drive bidirectional screw (4) positive and negative rotation, can drive the clamp rod (5) synchronous sliding, adjust the four clamp rod (5) around the size of the rectangular area, make its size and the specification of aluminum nitride substrate adapt, then through the air pump (94) suction can make the suction cup (96) produce suction force suction aluminum nitride substrate, again through brushless motor (82) drive first roller (83) rotation, can make the sliding rod (81) moves, drive aluminum nitride substrate moves to the top between the four clamp rod (5), then through the suction cup (96) can be placed to the four clamp rod (5) between the aluminum nitride substrate down, again through laser processing equipment (2) can be processed on the aluminum nitride substrate between the four clamp rod (5) punching.

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