Micro-LED batch transfer device

Abstract

The present invention discloses a micro-LED batch transfer device, comprising: a base; a lower transfer platform; a transparent support platform, which is arranged on the lower transfer platform; a temporary platform for material trays; an upper transfer platform; a lifting platform, which has three lifting drive devices and a pressing plate arranged on the three lifting drive devices; a suction nozzle, which is arranged at the bottom of the pressing plate, and has a downward pressing surface, and is used to absorb / release a transfer material plate by vacuum suction; and two material plate cameras, which are directly or indirectly arranged on the base, and the two material plate cameras take images of the transfer material plate absorbed by the suction nozzle.

Description

Technical Field

[0001] The present invention relates to a transfer technology for micro-LEDs, and more particularly to a batch transfer device for micro-LEDs that uses an embossing method to evenly emboss a transfer sheet onto a panel to be transferred during the transfer process. Background Art

[0002] Micro LED displays (Micro LED displays) are the next generation of displays being actively developed in the display industry, following liquid crystal displays and organic light-emitting diode displays. They primarily use LED chips ranging from one micron (μm) to 100 microns in size as display points.

[0003] Taiwan Patent Publication No. 201929265 discloses a transfer head with a porous component containing air holes, which uses vacuum suction to transfer micro-LEDs. The patent specification for this case discloses various prior art techniques for transferring micro-LEDs to panels. However, most existing technologies risk damaging the micro-LEDs during the transfer process or use adhesives for bonding, resulting in immature transfer technology. Summary of the Invention

[0004] The main purpose of this invention is to provide a batch transfer device for micro-LEDs. This device can stamp a transfer sheet containing multiple micro-LEDs onto a panel to be transferred, allowing for laser welding during the stamping process. This transfer technology can then achieve batch transfer results.

[0005] Another object of the present invention is to provide a micro LED batch transfer device that can accurately adjust the transfer material plate so that it is completely pressed onto the panel to be transferred.

[0006] In order to achieve the above-mentioned purpose, the present invention proposes a micro-light-emitting diode (Micro LED) batch transfer device, comprising: a base; a lower transfer platform, which has the ability to move in the X direction and the Y direction and the ability to rotate in the θ direction, and is arranged on the base, and the lower transfer platform has a hollow portion; a transparent support, which is arranged on the lower transfer platform and is located above the hollow portion, and the upper surface of the transparent support has a support exhaust structure which is concave downward, and the transparent support is used to carry a panel to be transferred; a material tray temporary platform, which is directly or indirectly arranged on the base, and the surface of the material tray temporary platform has a plurality of accommodating grooves for placing a plurality of transfer material plates, each of which is rectangular and has a plurality of micro-light-emitting diodes at the bottom; an upper transfer platform A platform, having the ability to move in the X and Y directions and the ability to rotate in the θ direction, is arranged on the base and is positioned higher than the lower loading platform; a lifting platform, having three lifting drive devices and a pressing plate arranged on the three lifting drive devices, the three lifting drive devices are arranged on the upper loading platform, and the pressing plate is located below the three lifting drive devices and is driven to rise and fall; a suction nozzle is arranged at the bottom of the pressing plate, the suction nozzle has a downward pressing surface, and the suction nozzle is used to absorb / release the transfer material plate by vacuum suction; and two material plate cameras are directly or indirectly arranged on the base, for taking images of the transfer material plate adsorbed on the suction nozzle.

[0007] The invention further comprises two panel cameras which are arranged on the base and used for taking images of the panel to be transferred.

[0008] Wherein: the two panel cameras are located on one side of the upper transport platform, and the lower transport platform can be moved to a position where the two panel cameras can take images and to the bottom of the upper transport platform respectively.

[0009] Wherein: it further comprises a plurality of distance measuring devices, which are directly or indirectly arranged on the base to measure the distance between the transfer material plate and the panel to be transferred.

[0010] Wherein: the plurality of distance measuring devices are arranged on the pressing plate and are indirectly arranged on the base, and the plurality of distance measuring devices are partially located at the bottom of the pressing plate but not lower than the bottom end of the suction nozzle.

[0011] Among them: each of the three lifting drive devices has a driving rod, the pressing plate is arranged on the driving rod of the three lifting drive devices, and each driving rod is provided with a pressure sensor, each pressure sensor is used to respectively sense the pressure fed back to each driving rod by the pressing plate.

[0012] Wherein: the transfer material plate has two positioning features, and the two material plate cameras respectively capture images of the two positioning features of the transfer material plate. The two positioning features are positioning marks or two diagonal contours of the transfer material plate.

[0013] Among them: the suction nozzle is in the shape of a plate, and a suction nozzle exhaust structure is formed on the bottom surface. The suction nozzle exhaust structure is used to connect to an exhaust source to absorb the transfer material plate by vacuum suction; the suction nozzle is attached to the bottom surface of the pressing plate, and the pressing plate is provided with two observation holes passing through the two and located at opposite corners. The two material plate cameras take images of the transfer material plate through the two observation holes.

[0014] Among them, it further includes a laser welding device, which is arranged on the base and located below the lower moving platform, and is used for emitting laser through the hollow part and penetrating the transparent support platform to weld the panel to be transferred.

[0015] Wherein: a virtual line is defined along the pressing plate from the center of the range enclosed by the three lifting drive devices to the path of each of the lifting drive devices, the number of the multiple distance measuring devices is three and they are respectively located on the three virtual lines, and the multiple distance measuring devices pass through the pressing plate but not through the suction nozzle.

[0016] Wherein: the pressing plate is triangular, the suction nozzle is square, and the edge of the suction nozzle does not exceed the edge of the pressing plate.

[0017] Among them: the lower moving platform has a base, an X-axis driving slide rail, a Y-axis driving slide rail, a rotating motor and a rotating platform; the upper moving platform has a base, an X-axis driving slide rail, a Y-axis driving slide rail, a rotating motor and a rotating platform.

[0018] As can be seen from the above, the present invention utilizes a stamping method to stamp a transfer sheet containing multiple micro-LEDs onto the panel to be transferred. Laser welding is then performed during the stamping process, thereby achieving batch transfer effects through transfer technology. Furthermore, during stamping, the present invention allows for precise adjustment of the transfer sheet to ensure that it is completely pressed against the panel to be transferred.

[0019] The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments, but this does not limit the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a three-dimensional diagram of a preferred embodiment of the present invention.

[0021] Figure 2 It is a side view of a preferred embodiment of the present invention.

[0022] Figure 3 A side view of some components of a preferred embodiment of the present invention is shown with part of the base removed.

[0023] Figure 4 This is a partial perspective view of components of a preferred embodiment of the present invention, showing the structure of the lower loading platform and the base.

[0024] Figure 5 This is a schematic diagram of some components of a preferred embodiment of the present invention, showing a transparent base.

[0025] Figure 6 A top view of some components of a preferred embodiment of the present invention, showing the lower loading platform.

[0026] Figure 7 This is a three-dimensional diagram of some components of a preferred embodiment of the present invention, showing a bottom view of the upper transfer platform.

[0027] Figure 8 This is a partial perspective view of components of a preferred embodiment of the present invention, showing the spatial relationship between the upper transfer platform and the lower transfer platform.

[0028] Figure 9 This is an enlarged view of some components of a preferred embodiment of the present invention, showing the pressing plate and some components above it.

[0029] Figure 10 This is an enlarged view of another portion of components of a preferred embodiment of the present invention, showing the press plate and some components above it.

[0030] Figure 11 This is a schematic diagram of another embodiment of a preferred embodiment of the present invention, showing the state where the material plate setting machine is set below the transparent supporting platform.

[0031] Figure 12 This is an action diagram of a preferred embodiment of the present invention, showing the state of the transparent base placing the panel to be printed.

[0032] Figure 13 This is another action diagram of a preferred embodiment of the present invention, showing that the temporary tray placement table is located below the suction nozzle.

[0033] Figure 14 This is another action diagram of a preferred embodiment of the present invention, showing the state of the suction nozzle descending to pick up materials.

[0034] Figure 15 This is an enlarged view of a partial component of a preferred embodiment of the present invention, showing the state of the suction nozzle sucking a transfer material plate.

[0035] Figure 16 This is another action diagram of a preferred embodiment of the present invention, showing the state where the transparent support moves to the bottom of the sheet camera.

[0036] Figure 17 This is another action diagram of a preferred embodiment of the present invention, showing the transparent support moving to the bottom of the suction nozzle and the suction nozzle being pressed down.

[0037] Figure 18 for Figure 17 A partial enlarged view of .

[0038] Wherein, the reference numerals:

[0039] 10: Micro LED batch transfer device

[0040] 11: Base

[0041] 21: Lower loading platform

[0042] 211:pedestal

[0043] 212: X-axis drive slide

[0044] 213: Y-axis drive slide

[0045] 214: Rotating motor

[0046] 215: Rotating Platform

[0047] 22: Hollow part

[0048] 28:Transparent platform

[0049] 281: Capping platform exhaust structure

[0050] 29: Temporary tray placement table

[0051] 291: accommodating tank

[0052] 31: Upper loading platform

[0053] 311:pedestal

[0054] 312: X-axis drive slide

[0055] 313: Y-axis drive slide

[0056] 314: Rotating motor

[0057] 315: Rotating Platform

[0058] 41: Lifting platform

[0059] 42: Lifting drive device

[0060] 421: Drive rod

[0061] 422: Pressure sensor

[0062] 44: Pressed board

[0063] 51: Nozzle

[0064] 52: Pressed noodles

[0065] 521: Nozzle suction structure

[0066] 54: Observation hole

[0067] 61: Distance measuring device

[0068] 71: Sheet Camera

[0069] 81:Laser welding device

[0070] 88: Panel Camera

[0071] 91: Transfer plate

[0072] 99: Panel to be transferred

[0073] VL: Virtual Line

[0074] 11': Base

[0075] 28':Transparent platform

[0076] 31': Upper loading platform

[0077] 51': Nozzle

[0078] 71': Sheet Camera

[0079] 81': Laser welding device DETAILED DESCRIPTION

[0080] In order to explain the technical features of the present invention in detail, the following preferred embodiments are given with reference to the accompanying drawings, wherein:

[0081] like Figures 1 to 10 As shown, a preferred embodiment of the present invention provides a micro-LED batch transfer device 10, which mainly comprises a base 11, a lower transfer platform 21, a transparent support 28, a tray temporary platform 29, an upper transfer platform 31, a lifting platform 41, a suction nozzle 51, multiple distance measuring devices 61 and two plate cameras 71, wherein:

[0082] The lower platform 21 comprises a base 211, an X-axis drive rail 212, a Y-axis drive rail 213, a rotary motor 214, and a rotary platform 215, and is capable of movement in the X and Y directions, as well as rotation in the θ direction. The lower platform 21 is mounted on the base 11 and has a hollow portion 22. Since the movement and rotation mechanisms for the X, Y, and θ directions (e.g., direct-drive motors) are well known and readily understood by those skilled in the art, their detailed structure and assembly methods are not discussed in detail.

[0083] The transparent support 28 is disposed on the lower platform 21 and above the hollow portion 22. The upper surface of the transparent support 28 has a support exhaust structure 281 for connecting to an exhaust source (not shown). The transparent support 28 is used to support a panel to be transferred 99. In this embodiment, the support exhaust structure 281 is configured in a groove shape, but in other embodiments, it can also be configured in a porous form.

[0084] The tray temporary table 29 is provided on the lower transfer platform 21 and is indirectly provided on the base 11. The surface of the tray temporary table 29 has a plurality of accommodating grooves 291 for placing a plurality of transfer material plates 91. Each transfer material plate 91 is rectangular and has a plurality of micro-light emitting diodes (not shown) at the bottom. Since the micro-light emitting diodes are extremely small, it is difficult to represent them with a diagram, and such a structure is well known to those skilled in the art, it is not necessary to represent them with a diagram. In other embodiments, the tray temporary table 29 can also be directly provided on the base 11, that is, it is not limited to being provided on the lower transfer platform 21. Since this arrangement can be directly understood by those skilled in the art, it is not necessary to represent it with a diagram.

[0085] The upper platform 31 comprises a base 311, an X-axis drive rail 312, a Y-axis drive rail 313, a rotary motor 314, and a rotary platform 315, and is capable of movement in the X and Y directions and rotation in the θ direction. The upper platform 31 is mounted on the base 11 and is positioned higher than the lower platform 21.

[0086] The lifting platform 41 comprises three lifting drive units 42 and a pressing plate 44 mounted on each of the three lifting drive units 42. The three lifting drive units 42 are mounted on the upper platform 31. In practice, the three lifting drive units 42 are preferably arranged at equal angles to facilitate subsequent calculation and adjustment of pressure and angle. The three lifting drive units 42 move and rotate with the upper platform 31, and the pressing plate 44, located below the three lifting drive units 42, is driven to rise and fall. In practical implementation, the three lifting drive units 42 can be equipped with servo motors and each have a drive rod 421. The pressing plate 44 can be an equiangular triangular plate, with three corners mounted on the bottom ends of the driving rods 421 of the three lifting drive units 42. Furthermore, each driving rod 421 is equipped with a pressure sensor 422 to sense the pressure applied by the pressing plate 44 to the driving rods 421.

[0087] The suction nozzle 51 is provided at the bottom of the pressing plate 44. The suction nozzle 51 has a downward pressing surface 52. The suction nozzle 51 is used to absorb / release the transfer material sheet 91 by vacuum suction. In the present embodiment, the suction nozzle 51 is in the shape of a square plate, and a suction nozzle air extraction structure 521 is formed on the bottom surface. In the present embodiment, a groove is used as an example, but it can also be set to a porous form. The suction nozzle air extraction structure 521 is used to connect to the air extraction source (not shown in the figure) to absorb the transfer material sheet 91 by vacuum suction. The suction nozzle 51 is attached to the bottom surface of the pressing plate 44, and the edge of the suction nozzle 51 does not exceed the edge of the pressing plate 44. In addition, the suction nozzle 51 and the pressing plate 44 are provided with two observation holes 54 that pass through the two and are located at opposite corners. Since the suction nozzle 51 can be made of metal and be opaque, or can be made of glass and be transparent, when the suction nozzle 51 is opaque, the two observation holes 54 can pass through the pressing plate 44 and the suction nozzle 51. When the suction nozzle 51 is transparent, the two observation holes 54 only need to pass through the pressing plate 44.

[0088] The plurality of distance measuring devices 61 are disposed on the pressing plate 44 and face downward, and are indirectly disposed on the base 11. Parts of the plurality of distance measuring devices 61 are located at the bottom of the pressing plate 44 but not lower than the bottom end of the suction nozzle 51. In this embodiment, the center of the pressing plate 44 is defined by the center of the driving rods 421 of the three lifting driving devices 42. A virtual line VL is defined along the pressing plate 44 along the path from this center to each of the driving rods 421. For convenience of representation, Figure 15 In the figure, only one virtual line VL is used to represent it. The number of the multiple distance measuring devices 61 is three and they are respectively located on the three virtual lines VL. The multiple distance measuring devices 61 pass through the pressing plate 44 but not through the suction nozzle 51, and are located next to the suction nozzle 51. In other embodiments, the multiple distance measuring devices 61 can also be directly set on the base 11, and are not limited to being set on the pressing plate 44. Since this arrangement is directly understandable to those skilled in the art, it is not necessary to illustrate it in a diagram. Furthermore, if the suction nozzle 51 is transparent, the multiple distance measuring devices 61 can also be set to pass through the pressing plate 44 but not through the suction nozzle 51, and be located above the suction nozzle 51. Alternatively, if the suction nozzle 51 is opaque, a perforation can be set in the suction nozzle 51 to allow the distance measurement signals of the multiple distance measuring devices 61 to pass through for distance measurement. Furthermore, even without the multiple distance measuring devices 61, without the distance measurement function, once the entire machine is calibrated, it can be directly operated using pre-set distance parameters. However, this makes it difficult to perform real-time distance measurement and adjustment. Therefore, the multiple distance measuring devices 61 can increase the convenience and efficiency of the overall machine operation.

[0089] The second sheet camera 71 is mounted on the base 11 and faces downward. It captures an image of the transfer sheet 91 held by the nozzle 51. The transfer sheet 91 has two positioning features, which can be additional positioning marks or two diagonal contours of the transfer sheet 91 itself. In this embodiment, the second sheet camera 71 captures the two diagonal contours of the transfer sheet 91 held by the nozzle 51 from top to bottom through the two observation holes 54.

[0090] The above structure can be set up in conjunction with a laser welding device 81. In practice, the laser welding device 81 can be set on the base 11 and located below the lower moving platform 21. During welding, the laser is emitted from bottom to top, and the laser passes through the hollow part 22 and penetrates the transparent support 28 to weld the panel 99 to be transferred.

[0091] In addition, in this embodiment, in order to position the panel 99 to be transferred, two positioning marks (not shown) can be set on the panel 99 to be transferred at two diagonal positions. Since the positioning marks are well-known technologies in the panel-related field and are not the focus of this case, they are not shown in diagrams. And two panel cameras 88 are set on the base 11. The two panel cameras 88 are located on one side of the upper transfer platform 31, and the lower transfer platform 21 can be moved from the bottom of the upper transfer platform 31 to a position where the two panel cameras 88 can be taken. The two positioning marks are taken downwards for the two panel cameras 88 to perform subsequent positioning. Similar to the above, the two panel cameras 88 can also be located at the bottom and take images upwards, and their installation positions are not limited.

[0092] Again, such as Figure 11 As shown, in other implementation conditions, the two-plate camera 71' can also be set on the laser welding device 81' to take images upward, and is indirectly set on the base 11'. At this time, the two-plate camera 71' is located below the transparent support 28', and the suction nozzle 51' can still be moved by moving the upper transfer platform 31' to be located above the two-plate camera 71'.

[0093] The configuration of this embodiment has been described above, and the operation of this embodiment will be described next.

[0094] like Figure 12 As shown, before operation, a panel 99 to be transferred is placed on the transparent support 28, and the support exhaust structure 281 is connected to the exhaust source (not shown in the figure), thereby adsorbing the panel 99 to be transferred to the transparent support 28 and fixing it. In addition, multiple transfer plates 91 are placed on the temporary tray 29, and each transfer plate 91 has a plurality of micro-LEDs (not shown) on its bottom surface.

[0095] like Figure 13 and Figure 15 As shown, during operation, a computer or controller (not shown) can be used to perform the following operations. First, the lower loading platform 21 is moved so that the tray holding platform 29 is located below the suction nozzle 51. The lifting platform 41 is then operated to raise and lower the suction nozzle 51 to pick up a transfer sheet 91. At this point, the two diagonal contours of the transfer sheet 91 are exactly within the range covered by the two observation holes 54. If the tray holding platform 29 is installed on the base 11, the upper loading platform 31 is moved above the tray holding platform 29.

[0096] like Figure 15 and Figure 16 As shown, the lower transfer platform 21 is then moved so that the transparent support 28 is located below the two-panel camera 88 for imaging. Based on the images obtained, the X- and Y-direction positions of the lower transfer platform 21 are adjusted, and the rotation angle is adjusted to accurately position the panel 99 to be transferred. While positioning the panel 99 to be transferred, the two-panel camera 88 also uses the two observation holes 54 to capture the two diagonal contours of the transfer sheet 91 adsorbed on the suction nozzle 51 to determine whether there are any errors in the position and angle of the transfer sheet 91. Based on this determination, the X- and Y-direction positions of the upper transfer platform 31 are adjusted, and the rotation angle is adjusted to rotate the transfer sheet 91 to the correct position. During rotation, the upper transfer platform 31 rotates the entire lifting platform 41 together with the pressing plate 44 and the suction nozzle 51.

[0097] Next, if Figure 17 and Figure 18As shown, under the premise of maintaining the aforementioned positioning result, the lower transfer platform 21 is moved to the bottom of the upper transfer platform 31, and then the suction nozzle 51 is lowered to press the transfer material plate 91 against the predetermined position of the panel to be transferred 99. At this time, the pressing surface 52 of the suction nozzle is pressed against the transfer material plate 91. During the descent process, the three distance measuring devices 61 are used to measure the distance between the pressing plate 44 and the panel to be transferred 99. After the transfer material plate 91 is pressed against the panel to be transferred 99, the lifting drive devices 42 are adjusted according to the results measured by the three distance measuring devices 61, and then the horizontal state of the pressing plate 44 is adjusted. The structure of the three driving rods 421 with equal angles can easily calculate the pressing force and the angle of the pressing plate 44 for easy adjustment, thereby adjusting the transfer material plate 91 to completely adhere to the panel to be transferred 99. Since the bottom surface of the transfer plate 91 is provided with a plurality of micro-LEDs, it is actually the plurality of micro-LEDs of the transfer plate 91 that are in contact with the panel to be transferred 99. Furthermore, in the aforementioned pressing state, the three pressure sensors 422 on the three driving rods 421 also sense the force fed back from the transfer plate 91 to the pressing plate 44 via the suction nozzle 51. This feedback force value can also be used to adjust the three lifting drive devices 42 to adjust the pressing stroke of the pressing plate 44, thereby adjusting the downward pressure.

[0098] like Figure 17 refer to Figure 3 and Figure 6 As shown, the laser welding device 81 is operated to irradiate the multiple micro-LEDs with laser for welding. The laser passes through the hollow portion 22 and the transparent base 28, and then passes through the panel to be transferred 99 for welding. After the welding is completed, the suction nozzle 51 is raised, and the transfer plate 91 is raised accordingly. The multiple micro-LEDs on the transfer plate 91 remain on the panel to be transferred 99 due to the aforementioned welding action. In this embodiment, the multiple micro-LEDs on the transfer material plate 91 all emit the same color light, for example, all of them are red light, or all of them are green light, or all of them are blue light. Therefore, based on the fact that a pixel on the panel to be transferred 99 is composed of at least three colors of light (i.e., red, green and blue), during actual welding, not all of the micro-LEDs on the transfer material plate 91 are welded to the panel to be transferred 99 at one time, but only a part of the multiple micro-LEDs are welded to the panel to be transferred 99, for example, only one micro-LED is welded at each pixel position, so some of the multiple micro-LEDs still remain on the transfer material plate 91.

[0099] Next, the lower platform 21 is moved to move the panel 99 to a new welding position, and the nozzle 51 is lowered to press the transfer sheet 91, which still contains the remaining micro-LEDs, against the position on the panel 99 to be welded. The laser welding device 81 then performs welding according to the aforementioned process. This process of raising and lowering the nozzle 51 and welding is repeated until all the micro-LEDs on the transfer sheet 91 to be welded are welded to the panel 99.

[0100] like Figure 13 and Figure 14 As shown, the lower loading platform 21 is moved to position the tray temporary table 29 below the suction nozzle 51. The suction nozzle 51 then descends to place the transfer sheet 91 that has just been welded back onto the tray temporary table 29, and then moves to pick up another unused transfer sheet 91, and repeats the aforementioned welding action.

[0101] Since the area of ​​a transfer plate 91 is smaller than the area of ​​the panel to be transferred 99, the aforementioned steps can be repeated multiple times to transfer and weld multiple micro-LEDs of different colors on multiple transfer plates 91 to various positions on the panel to be transferred 99 by laser welding, thereby completing a complete micro-LED panel.

[0102] As can be seen from the above, the present invention uses embossing to emboss a transfer sheet 91 having multiple micro-LEDs onto a panel 99 to be transferred, and then performs laser welding during the embossing process to complete the transfer. Since the number of micro-LEDs on a single transfer sheet 91 may be as high as one million, practical laser welding techniques may only require welding tens of thousands of these micro-LEDs in a single welding operation. In practice, the laser welding device 81 only takes less than a second to weld these tens of thousands of micro-LEDs. Therefore, the present invention is capable of achieving batch transfer.

[0103] In addition, by coordinating the three lifting drive devices 42 with the multiple distance measuring devices 61 , the horizontal tilt angle of the pressing plate 44 can be adjusted, thereby allowing the transfer material plate 91 to accurately fit the surface of the panel to be transferred 99 .

[0104] As can be seen from the foregoing, the technical focus of the present invention lies in the accurate and complete pressing effect of the pressing plate 44. The laser welding device 81 can be integrated into the same machine or installed at the next workstation in the production line to perform welding, as needed. Furthermore, the positioning mechanism for the panel to be transferred 99 can also be integrated into the same machine or handled using other known positioning methods, as needed.

[0105] Furthermore, from the aforementioned descriptions of the location of the tray temporary table 29, the location of the two-plate camera 71, the location of the two-panel camera 88, and the location of the multiple distance measuring devices 61, it can be seen that the location of these four components can be adjusted as needed and are not limited to any one of the location positions. In other words, any one of the location positions cannot be used to limit the scope of the patent in this case.

[0106] Of course, the present invention may have many other embodiments. Without departing from the spirit and essence of the present invention, those skilled in the art may make various corresponding changes and modifications based on the present invention, but these corresponding changes and modifications should all fall within the scope of protection of the claims of the present invention.

Claims

1. A micro-LED batch transfer device, characterized in that: Includes: a base; A lower transfer platform, capable of moving in the X and Y directions and rotating in the θ direction, is provided on the base, and has a hollow portion; A transparent support platform is provided on the lower transfer platform and is located above the hollow portion, and the upper surface of the transparent support platform has a support platform air extraction structure that is concave downward, and the transparent support platform can carry a panel to be transferred; A tray temporary platform is directly or indirectly mounted on the base. The tray temporary platform has a plurality of accommodating grooves on its surface for placing a plurality of transfer plates. Each transfer plate is rectangular and has a plurality of micro-LEDs at its bottom. An upper transfer platform, capable of moving in the X and Y directions and rotating in the θ direction, is disposed on the base and is positioned higher than the lower transfer platform; A lifting platform having three lifting drive devices and a pressing plate provided on the three lifting drive devices, wherein the three lifting drive devices are provided on the upper loading platform, and the pressing plate is located below the three lifting drive devices and is driven to move up and down; a suction nozzle disposed at the bottom of the pressing plate, the suction nozzle having a downward pressing surface, and the suction nozzle being capable of sucking / releasing the transfer material sheet by vacuum suction; Two sheet cameras are directly or indirectly mounted on the base to capture images of the transfer sheet adsorbed on the nozzle; as well as A laser welding device is arranged on the base and located below the lower moving platform to emit laser light through the hollow part and penetrate the transparent support platform to weld the panel to be transferred.

2. The micro-LED batch transfer device according to claim 1, characterized in that: The invention further comprises two panel cameras which are arranged on the base and are used to take images of the panel to be transferred.

3. The micro-LED batch transfer device according to claim 2, characterized in that: The two panel cameras are located on one side of the upper transfer platform, and the lower transfer platform can be moved to positions where the two panel cameras can take images and to the bottom of the upper transfer platform.

4. The micro-LED batch transfer device according to claim 1, characterized in that: The invention further comprises a plurality of distance measuring devices which are directly or indirectly arranged on the base to measure the distance between the transfer material plate and the panel to be transferred.

5. The micro-LED batch transfer device according to claim 4, characterized in that: The plurality of distance measuring devices are arranged on the pressing plate and are indirectly arranged on the base. Parts of the plurality of distance measuring devices are located at the bottom of the pressing plate but not lower than the bottom end of the suction nozzle.

6. The micro-LED batch transfer device according to claim 1, characterized in that: Each of the three lifting drive devices has a driving rod. The pressing plate is arranged on the driving rod of the three lifting drive devices. Each of the driving rods is provided with a pressure sensor. Each of the pressure sensors respectively senses the pressure fed back to each of the driving rods by the pressing plate.

7. The micro-LED batch transfer device according to claim 1, characterized in that: The transfer plate has two positioning features. The two plate cameras respectively capture images of the two positioning features of the transfer plate. The two positioning features are positioning marks or two diagonal contours of the transfer plate.

8. The micro-LED batch transfer device according to claim 7, characterized in that: The suction nozzle is plate-shaped, and a suction nozzle exhaust structure is formed on the bottom surface. The suction nozzle exhaust structure is connected to an exhaust source to absorb the transfer material plate by vacuum suction; the suction nozzle is attached to the bottom surface of the pressing plate, and the pressing plate is provided with two observation holes passing through the two and located at opposite corners. The two material plate cameras take images of the transfer material plate through the two observation holes.

9. The micro-LED batch transfer device according to claim 4, characterized in that: A virtual line is defined along the pressing plate from the center of the range enclosed by the three lifting drive devices to the path of each of the lifting drive devices. The number of the multiple distance measuring devices is three and they are respectively located on the three virtual lines, and the multiple distance measuring devices pass through the pressing plate but not through the suction nozzle.

10. The micro-LED batch transfer device according to claim 1, characterized in that: The pressing plate is triangular in shape, the suction nozzle is square in shape, and the edge of the suction nozzle does not exceed the edge of the pressing plate.

11. The micro-LED batch transfer device according to claim 1, characterized in that: The lower loading platform has a base, an X-axis driving slide rail, a Y-axis driving slide rail, a rotary motor and a rotary platform; the upper loading platform has a base, an X-axis driving slide rail, a Y-axis driving slide rail, a rotary motor and a rotary platform.

Images